TWI598218B - Polishing method and its finished product and polishing device - Google Patents

Polishing method and its finished product and polishing device Download PDF

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TWI598218B
TWI598218B TW104135595A TW104135595A TWI598218B TW I598218 B TWI598218 B TW I598218B TW 104135595 A TW104135595 A TW 104135595A TW 104135595 A TW104135595 A TW 104135595A TW I598218 B TWI598218 B TW I598218B
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workpiece
polishing
unit
chemical vapor
chemical
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TW104135595A
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TW201714755A (en
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Rui-Cheng Mao
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Description

拋光方法及其成品與拋光裝置 Polishing method and finished product and polishing device thereof

本發明是有關於一種拋光方法及其成品與拋光裝置,特別是指一種利用一化學氣體降低一利用快速成形(Rapid Prototyping)的技術製造的工件的表面粗糙程度的方法及其成品與拋光裝置。 The present invention relates to a polishing method and a finished product and polishing apparatus thereof, and more particularly to a method for reducing the surface roughness of a workpiece manufactured by a technique of rapid prototyping using a chemical gas, and a finished product and a polishing apparatus therefor.

利用積層製造(Additive Manufacturing)、三維列印(3D Printing)或快速成形(Rapid Prototyping)的技術,可以在一個三維物體的數位設計資料完成後,快速地製作出該設計的實際物體。該實際物體在研發的過程中能被當作研究或測試的三維模型,在一些產業中甚至能作為直接使用的器具。積層製造的技術包含融熔擠製沉積成型(Fused Deposition Modeling,FDM),其工作原理係運用加熱頭把熱熔性材料(例如ABS樹脂)加熱其熔點,使該材料介於固態與液態之間。並且經由電腦控制(例如沿X-Y軸移動之機器手臂)該加熱頭沿即將製造的三維原型件的切片資訊(例如CAD的二維幾何資訊)而移動。移動時,噴頭將介於固態與液態之間的熱熔性材料擠壓出來,在基座上形成一薄層。當該薄層完成後,將該基座沿Z軸下降,使該薄層進行固化,並在已固化的該薄層上以該加工頭形成新的薄 層,如此一層一層堆疊,由下而上地形成一個三維原型件。 Using the techniques of Additive Manufacturing, 3D Printing, or Rapid Prototyping, the actual object of the design can be quickly created after the digital design of a three-dimensional object is completed. The actual object can be used as a three-dimensional model for research or testing during the development process, and can even be used as a tool directly in some industries. The technology of laminated manufacturing includes Fused Deposition Modeling (FDM), which works by heating a hot melt material (such as ABS resin) to its melting point, so that the material is between solid and liquid. . And via computer control (eg, a robotic arm moving along the X-Y axis) the heating head moves along the slice information of the three-dimensional prototype to be manufactured (eg, the two-dimensional geometric information of the CAD). When moving, the nozzle squeezes the hot melt material between the solid and liquid to form a thin layer on the susceptor. When the thin layer is completed, the susceptor is lowered along the Z axis, the thin layer is cured, and a new thin film is formed on the cured thin layer by the processing head. The layers, stacked one after the other, form a three-dimensional prototype from bottom to top.

然而,運用FDM所列印的三維原型件的表面皆具有概呈階梯狀的粗糙紋理。早期消除該紋理的方法是利用手工研磨該三維列印原型件的表面,其缺點在於手工的研磨需長時間的專注且難以維持一定品質,再者,手工拋光易損壞該三維原型件的微小特徵結構且操作上有死角。針對微小結構的拋光,磨粒流動加工(abrasive flow machining,AFM)方法以及適應性切層演算法(adaptive slicing algorithm)等技術陸續被提出,但其設備造價昂貴而且操作步驟複雜。化學溶液浸泡處理方法較為簡易且較為經濟,該方法是將被拋光物浸泡於化學溶液中,使該三維原型件表面被融解而降低其粗糙程度。然而,化學溶液浸泡處理方法仍有其缺點:浸泡的時間不易掌握,容易因過度拋光而破壞該三維原型件本身細緻的結構,甚至可能削減該三維原型件的原先設計的體積。再者,該化學溶液例如丙酮具有高揮發性而不易控制,操作過程中容易汙染環境且操作者也容易吸入刺鼻的氣味。 However, the surface of the three-dimensional prototype printed with FDM has a rough texture that is stepped. The early method of eliminating the texture is to manually grind the surface of the three-dimensionally printed prototype. The disadvantage is that the manual grinding requires a long time of concentration and it is difficult to maintain a certain quality. Moreover, the manual polishing is easy to damage the microscopic features of the three-dimensional prototype. Structure and operation have a dead angle. Techniques such as polishing of minute structures, abrasive flow machining (AFM) methods, and adaptive slicing algorithms have been proposed, but their equipment is expensive and complicated. The chemical solution immersion treatment method is simple and economical, and the method is to soak the object to be immersed in the chemical solution, so that the surface of the three-dimensional prototype is melted to reduce the roughness. However, the chemical solution immersion treatment method still has its disadvantages: the immersion time is difficult to grasp, and it is easy to damage the detailed structure of the three-dimensional prototype itself due to excessive polishing, and it is even possible to reduce the original design volume of the three-dimensional prototype. Further, the chemical solution such as acetone has high volatility and is not easily controlled, and it is easy to pollute the environment during handling and the operator is also likely to inhale a pungent odor.

因此,本發明之目的,即在提供一種具備造價低廉、高效率、高精度、低汙染且環保等優點的拋光裝置。 Accordingly, it is an object of the present invention to provide a polishing apparatus which is advantageous in that it is inexpensive, high in efficiency, high in precision, low in pollution, and environmentally friendly.

於是,本發明拋光裝置,適用於將一化學溶液氣化成一化學蒸氣並將該化學蒸氣用於拋光一工件,該拋光裝置包含:一中空殼體,供該工件設置其中;一盛液單元,與該中空殼體相連通且用以盛裝該化學液體;一抽氣 單元,與該中空殼體相連通且用以抽離該中空殼體內的氣體;一導流單元,位於該中空殼體內且用以帶動該化學蒸氣的流向;一控溫單元,連接於該中空殼體,用以控制該化學液體的溫度及化學蒸氣的溫度其中一者;及一控時單元,連接於該中空殼體。 Thus, the polishing apparatus of the present invention is adapted to vaporize a chemical solution into a chemical vapor and to use the chemical vapor for polishing a workpiece, the polishing apparatus comprising: a hollow casing for the workpiece to be disposed therein; and a liquid holding unit Connected to the hollow casing and used to hold the chemical liquid; a unit, in communication with the hollow housing, for extracting gas from the hollow housing; a flow guiding unit located in the hollow housing for driving the flow of the chemical vapor; a temperature control unit, connecting The hollow casing is configured to control one of a temperature of the chemical liquid and a temperature of the chemical vapor; and a timing unit is coupled to the hollow casing.

在一些實施態樣中,該拋光裝置還包括一自動控制模組,與該控溫單元、該控時單元及該抽氣單元電連接。 In some embodiments, the polishing apparatus further includes an automatic control module electrically connected to the temperature control unit, the timing unit, and the air extraction unit.

在一些實施態樣中,該盛液單元為一位於該中空殼體內且開口向上的盛盤,該導流單元為一導流風扇,該導流單元設於該盛液單元上方並使氣體吹向該盛液單元。 In some embodiments, the liquid receiving unit is a tray located in the hollow casing and having an opening upward. The flow guiding unit is a flow guiding fan, and the guiding unit is disposed above the liquid receiving unit and makes the gas Blow to the liquid unit.

在一些實施態樣中,該拋光裝置還包含一位於該中空殼體內的承載單元,該承載單元包括多數軌道、多數向上延伸以供裝設該工件的凸柱,及一旋轉馬達,該等凸柱連接於該等軌道且能沿該等軌道長度方向滑動且能在滑動的過程中可解除地定位,另外,該旋轉馬達受控帶動該等凸柱轉動。 In some embodiments, the polishing apparatus further includes a carrier unit located in the hollow housing, the carrier unit including a plurality of rails, a plurality of protrusions extending upwardly for mounting the workpiece, and a rotary motor, and the like The studs are coupled to the rails and are slidable along the length of the rails and are releasably positionable during the sliding process. Additionally, the rotary motor is controlled to rotate the studs.

在一些實施態樣中,該中空殼體還包括一透明的罩體,該拋光裝置還包含一連接於該罩體的透明加熱片,另外,該抽氣單元包括一儲氣室。 In some embodiments, the hollow housing further includes a transparent cover, the polishing device further includes a transparent heating sheet coupled to the cover, and the suction unit includes a gas storage chamber.

本發明之再一目的,即在提供一種具備高效率、高精度、低汙染且環保等優點的拋光方法。 Still another object of the present invention is to provide a polishing method which has the advantages of high efficiency, high precision, low pollution, and environmental protection.

於是,本發明拋光方法,適用於拋光一工件, 該方法包含下列步驟:步驟(A)設置該工件於一容室中;步驟(B)加熱一可溶解該工件的化學溶液而產生一化學蒸氣;及步驟(C)提供該化學蒸氣於該容室中。 Thus, the polishing method of the present invention is suitable for polishing a workpiece, The method comprises the steps of: step (A) setting the workpiece in a chamber; step (B) heating a chemical solution that dissolves the workpiece to produce a chemical vapor; and step (C) providing the chemical vapor to the chamber In the room.

在一些實施態樣中,於該步驟(B),該加熱程序是根據關於該化學溶液之沸點的一目標溫度而執行;該步驟(C)的執行時間是由關於該工件之表面積的一目標時間而設定。 In some embodiments, in the step (B), the heating procedure is performed according to a target temperature with respect to the boiling point of the chemical solution; the execution time of the step (C) is a target based on the surface area of the workpiece Set by time.

在一些實施態樣中,於該步驟(C)還持續旋轉該工件,其中,該工件的材料為熱塑性樹酯,該化學溶液為丙酮,該化學蒸氣為丙酮蒸氣。 In some embodiments, the workpiece is continuously rotated in the step (C), wherein the material of the workpiece is a thermoplastic resin, the chemical solution is acetone, and the chemical vapor is acetone vapor.

在一些實施態樣中,於該步驟(C)之後還包含:步驟(D)將該化學溶液降溫,接著,進行步驟(E)抽離該容室中的該化學蒸氣。 In some embodiments, after the step (C), the method further comprises: step (D) cooling the chemical solution, and then performing step (E) to withdraw the chemical vapor in the chamber.

本發明之再一目的,即在提供一種使用所述拋光方法製成的成品。 It is still another object of the present invention to provide a finished product produced using the polishing method.

於是,本發明成品,使用上述的拋光方法將一工件拋光而得,該成品包含:多數薄層,彼此層疊並形成一非平整的外表面,其中,該等薄層的材料為熱塑性樹酯,該化學溶液為丙酮;及一溶融層,披覆於該等薄層的該外表面,該溶融層的主要成分與該等薄層相同。 Thus, the finished product of the present invention is obtained by polishing a workpiece using the above-described polishing method, the finished product comprising: a plurality of thin layers laminated on each other and forming a non-flat outer surface, wherein the material of the thin layers is a thermoplastic resin. The chemical solution is acetone; and a molten layer is coated on the outer surface of the thin layers, and the main component of the molten layer is the same as the thin layers.

本發明之功效為:以化學蒸氣取代化學液體對工件進行拋光,能夠提升拋光的精度。藉由拋光裝置的自動控制模組取代人為的監控,能有效控制拋光過程之進行,而提升加工效率。於拋光程序完成後藉由抽氣系統排 出化學蒸氣,並將化學蒸氣冷凝回收使用,能達到循環利用該化學溶液的功能,以增進拋光裝置的環保效能。 The effect of the invention is that the workpiece is polished by chemical vapor instead of the chemical liquid, which can improve the precision of polishing. By replacing the artificial monitoring with the automatic control module of the polishing device, the polishing process can be effectively controlled, and the processing efficiency is improved. After the polishing process is completed, the exhaust system is exhausted. The chemical vapor is discharged and the chemical vapor is condensed and recycled to achieve the function of recycling the chemical solution to improve the environmental performance of the polishing device.

1‧‧‧中空殼體 1‧‧‧ hollow housing

11‧‧‧支撐座 11‧‧‧ Support

12‧‧‧罩體 12‧‧‧ Cover

121‧‧‧加熱貼片 121‧‧‧heated patch

2‧‧‧盛液單元 2‧‧‧ Liquid unit

3‧‧‧承載單元 3‧‧‧ Carrying unit

31‧‧‧旋轉馬達 31‧‧‧Rotary motor

32‧‧‧基座 32‧‧‧Base

321‧‧‧軌道 321‧‧‧ Track

322‧‧‧穿孔 322‧‧‧Perforation

33‧‧‧凸柱 33‧‧‧Bump

4‧‧‧控溫單元 4‧‧‧temperature control unit

41‧‧‧加熱器 41‧‧‧heater

42‧‧‧散熱器 42‧‧‧heatsink

421‧‧‧散熱片 421‧‧‧ Heatsink

422‧‧‧散熱風扇 422‧‧‧ cooling fan

43‧‧‧溫度感測器 43‧‧‧Temperature Sensor

5‧‧‧導流單元 5‧‧‧Guide unit

51‧‧‧風向 51‧‧‧ wind direction

6‧‧‧抽氣單元 6‧‧‧Pumping unit

61‧‧‧儲氣室 61‧‧‧ gas storage room

7‧‧‧控時單元 7‧‧‧Control time unit

8‧‧‧操作面板 8‧‧‧Operator panel

81‧‧‧開始鍵 81‧‧‧ start button

82‧‧‧停止鍵 82‧‧‧ stop button

83‧‧‧溫度設定鍵組 83‧‧‧Temperature setting button group

84‧‧‧時間設定鍵組 84‧‧‧Time setting key group

85‧‧‧溫度顯示單元 85‧‧‧Temperature display unit

86‧‧‧時間顯示單元 86‧‧‧Time display unit

9‧‧‧自動控制模組 9‧‧‧Automatic Control Module

100‧‧‧工件 100‧‧‧Workpiece

101、101’‧‧‧薄層 101, 101’‧‧‧ thin layer

200‧‧‧化學溶液 200‧‧‧chemical solution

201‧‧‧化學蒸氣 201‧‧‧Chemical Vapor

300‧‧‧成品 300‧‧‧ finished products

301‧‧‧溶融層 301‧‧‧Solid layer

400‧‧‧容室 400‧‧ ‧ room

S1‧‧‧步驟 S1‧‧‧ steps

S2‧‧‧步驟 S2‧‧‧ steps

S3‧‧‧步驟 S3‧‧‧ steps

S4‧‧‧步驟 S4‧‧‧ steps

S5‧‧‧步驟 S5‧‧ steps

S6‧‧‧步驟 S6‧‧ steps

S7‧‧‧步驟 S7‧‧ steps

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:圖1是一流程圖,說明本發明的一拋光方法;圖2是一示意圖,說明使用該拋光方法一工件被一化學蒸氣包圍的狀態;圖3是一示意圖,說明使用該拋光方法後的一成品;圖4是一側視示意圖,說明本發明拋光裝置的一實施例乘載一工件的態樣;圖5是一上視示意圖,說明該拋光裝置的一基座與多數凸柱;及圖6是一正視示意圖,說明該拋光裝置的一操作面板。 Other features and effects of the present invention will be apparent from the following description of the drawings. FIG. 1 is a flow chart illustrating a polishing method of the present invention. FIG. 2 is a schematic view showing the use of the polishing method. A state in which a workpiece is surrounded by a chemical vapor; FIG. 3 is a schematic view showing a finished product using the polishing method; and FIG. 4 is a side view showing a state in which a workpiece of the polishing apparatus of the present invention is loaded with a workpiece. Figure 5 is a top plan view showing a pedestal and a plurality of studs of the polishing apparatus; and Figure 6 is a front elevational view showing an operation panel of the polishing apparatus.

在本發明被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。 Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same reference numerals.

參閱圖1、圖2及圖3,說明本發明拋光方法的一實施例。該拋光方法適用於拋光一如圖2的工件100,該工件100可以是以例如熱塑性樹酯等材質,藉由融熔擠製沉積成型等快速成型技術或3D列印技術製成之結構,並包括多數薄層101,此等薄層101相互堆疊,而形成一非平整之外表面。本發明的拋光方法能將圖2中具有非平整、粗糙表面的工件100拋光形成如圖3之具有平整外表面的成 品300,具體包含下列步驟:步驟S1係設置該工件100於一容室400中。步驟S2係加熱一可溶解該工件100的化學溶液而產生一化學蒸氣201,該化學溶液及化學蒸氣201的成分可以是丙酮,但不以此為限。步驟S3係提供該化學蒸氣201於該容室400中,由化學蒸氣201溶解該工件100外表面的材質,以產生拋光效果。步驟S4係加強該化學蒸氣201於該容室中的流動,並驅使化學蒸氣201的濃度在容室400中的分布能接近均勻,讓拋光過程可以穩定地進行。步驟S5係持續旋轉該工件100,在化學蒸氣201在容室400中的濃度之分布還不夠均勻時,也能避免工件100的表面拋光程度不一致的問題。步驟S6係將該化學溶液降溫以減少化學蒸氣201的產量,步驟S7係抽離該容室400中的該化學蒸氣201,而完成整個拋光過程。 An embodiment of the polishing method of the present invention will be described with reference to Figs. 1, 2 and 3. The polishing method is suitable for polishing a workpiece 100 as shown in FIG. 2, and the workpiece 100 may be made of a material such as thermoplastic resin, by rapid prototyping technology such as melt extrusion deposition molding or 3D printing technology, and A plurality of thin layers 101 are included, and these thin layers 101 are stacked one on another to form a non-flat outer surface. The polishing method of the present invention can polish the workpiece 100 having a non-flat, rough surface in FIG. 2 to form a flat outer surface as shown in FIG. The article 300 specifically includes the following steps: Step S1 is to set the workpiece 100 in a chamber 400. Step S2 is to heat a chemical solution that dissolves the workpiece 100 to generate a chemical vapor 201. The chemical solution and the chemical vapor 201 may be acetone, but not limited thereto. Step S3 provides the chemical vapor 201 in the chamber 400, and the chemical vapor 201 dissolves the material of the outer surface of the workpiece 100 to produce a polishing effect. Step S4 enhances the flow of the chemical vapor 201 in the chamber and drives the concentration of the chemical vapor 201 in the chamber 400 to be nearly uniform, so that the polishing process can be performed stably. In step S5, the workpiece 100 is continuously rotated. When the concentration distribution of the chemical vapor 201 in the chamber 400 is not sufficiently uniform, the problem that the surface polishing degree of the workpiece 100 is inconsistent can be avoided. Step S6 is to cool the chemical solution to reduce the yield of the chemical vapor 201, and step S7 is to withdraw the chemical vapor 201 in the chamber 400 to complete the entire polishing process.

透過S1至S3的步驟能令該化學溶液產生的化學蒸氣201將該工件100拋光,且在拋光過程進行中,步驟S2至S5可以同步進行。在上述步驟S2中,該加熱程序是根據關於該化學溶液之沸點的一目標溫度而執行,例如本實施例中化學溶液的成分為丙酮,其沸點為56℃,本實施例將該目標溫度設定為高於沸點約1℃,也就是將目標溫度設定為57℃,如此能有效控制化學蒸氣201的產率。但根據實際需要,該目標溫度的設定可以相對應調整,不以此處揭露內容為限。而在該步驟S3中,其執行時間是由關於該工件100之表面積的一目標時間而設定,該目標時間跟工件100的表面積呈正相關,換言之,具有較大表面積 的工件100需要設定較長的目標時間。 The process of S1 to S3 enables the chemical vapor 201 generated by the chemical solution to polish the workpiece 100, and during the polishing process, steps S2 to S5 can be performed simultaneously. In the above step S2, the heating procedure is performed according to a target temperature with respect to the boiling point of the chemical solution. For example, the chemical solution component in the present embodiment is acetone, and its boiling point is 56 ° C. In this embodiment, the target temperature is set. To be about 1 ° C above the boiling point, that is, to set the target temperature to 57 ° C, the yield of the chemical vapor 201 can be effectively controlled. However, according to actual needs, the setting of the target temperature can be adjusted correspondingly, and is not limited to the content disclosed herein. In this step S3, the execution time is set by a target time with respect to the surface area of the workpiece 100, which is positively correlated with the surface area of the workpiece 100, in other words, has a large surface area. The workpiece 100 needs to set a longer target time.

補充說明的是,其他實施態樣中,步驟S4及步驟S5的順序可以對調,而且,若省略該兩步驟至少一者也能達到將該工件拋光的效果。其他實施態樣中,步驟S6及步驟S7的順序可以對調,而且,若省略該兩步驟至少一者也能達到將該工件拋光的效果。 It should be noted that in other embodiments, the order of step S4 and step S5 may be reversed, and if at least one of the two steps is omitted, the effect of polishing the workpiece can be achieved. In other embodiments, the order of step S6 and step S7 may be reversed, and if at least one of the two steps is omitted, the effect of polishing the workpiece can be achieved.

參閱圖2及圖3,經由上述拋光方法加工後的成品300如同工件100亦包含多數薄層101’,但該等薄層101’的外表面經化學蒸氣201溶融拋光後形成一溶融層301,該溶融層301具有填補表面的效果,而讓成品300具有平整的表面。在本實施例中,由於化學溶液、化學蒸氣201採用可溶解該等薄層101、101’並具有高揮發性的丙酮,因此該成品300的溶融層301的主要成分會與該等薄層101、101’相同。 Referring to FIG. 2 and FIG. 3, the finished product 300 processed by the above polishing method also includes a plurality of thin layers 101' as the workpiece 100, but the outer surface of the thin layers 101' is melted and polished by the chemical vapor 201 to form a molten layer 301. The molten layer 301 has the effect of filling the surface while leaving the finished product 300 with a flat surface. In the present embodiment, since the chemical solution and the chemical vapor 201 are made of acetone which can dissolve the thin layers 101, 101' and have high volatility, the main component of the molten layer 301 of the finished product 300 and the thin layer 101 101' is the same.

參閱圖4,本發明拋光裝置的一實施例適用於執行上述的拋光方法,該拋光裝置包含一中空殼體1、一盛液單元2、一承載單元3、一控溫單元4、一導流單元5、一抽氣單元6、一控時單元7、一操控面板8及一自動控制模組9。值得注意的是,本發明的拋光方法也可以由其他的裝置所執行,而不限於以本發明的拋光裝置所執行。 Referring to FIG. 4, an embodiment of the polishing apparatus of the present invention is suitable for performing the above polishing method. The polishing apparatus comprises a hollow casing 1, a liquid holding unit 2, a carrying unit 3, a temperature control unit 4, and a guide. The flow unit 5, an air extraction unit 6, a control unit 7, a control panel 8, and an automatic control module 9. It should be noted that the polishing method of the present invention can also be performed by other devices, and is not limited to being performed by the polishing apparatus of the present invention.

該中空殼體1包括一支撐座11與一覆蓋於該支撐座11的頂面的透明罩體12,該罩體12具有多數透明的加熱貼片121,且該罩體12與該支撐座11共同形成一個封閉的容室400,容室400可供工件100設置其中,並容納用 於進行拋光處理的化學蒸氣201。藉由該等加熱貼片121可提升該罩體12的溫度,避免該化學蒸氣201在該罩體12上凝結,以利使用者觀察該工件100。 The hollow housing 1 includes a support base 11 and a transparent cover 12 covering the top surface of the support base 11. The cover 12 has a plurality of transparent heating patches 121, and the cover 12 and the support base 11 together form a closed chamber 400, which is provided for the workpiece 100 to be accommodated therein. The chemical vapor 201 is subjected to a polishing treatment. By heating the patch 121, the temperature of the cover 12 can be raised to prevent the chemical vapor 201 from condensing on the cover 12, so that the user can observe the workpiece 100.

該盛液單元2與該中空殼體1相連通且用以盛裝該化學液體200,在本實施例中,該盛液單元2為一位於該容室400內的盛盤。具體而言,該盛液單元2設置於該支撐座11的頂面且開口朝上。在此技術領域中具有通常知識者應可理解,針對盛液單元2的設計的結構與功能上的需求,可以使用與該中空殼體1相連通且用以盛裝化學溶液200的各類容器,並且可使用任何方法達到將該化學溶液200產生的化學蒸氣201引導入該容室400的目的。例如,本實施例是將盛液單元2放置於容室400中,讓從盛液單元2散逸出的化學蒸氣201可以直接在容室400中流通。但盛液單元2也可以放置於容室400之外,並藉由圖中未繪製的氣體管路連通於容室400,而讓化學蒸氣201能從盛液單元2處流向容室400中。 The liquid receiving unit 2 is in communication with the hollow casing 1 and is used for containing the chemical liquid 200. In the embodiment, the liquid receiving unit 2 is a tray located in the chamber 400. Specifically, the liquid receiving unit 2 is disposed on the top surface of the support base 11 with the opening facing upward. It will be understood by those of ordinary skill in the art that for the structural and functional requirements of the design of the liquid containing unit 2, various types of containers that are in communication with the hollow housing 1 and that contain the chemical solution 200 can be used. And the method of guiding the chemical vapor 201 produced by the chemical solution 200 into the chamber 400 can be achieved using any method. For example, in the present embodiment, the liquid holding unit 2 is placed in the chamber 400, so that the chemical vapor 201 discharged from the liquid holding unit 2 can be directly circulated in the chamber 400. However, the liquid holding unit 2 can also be placed outside the chamber 400 and communicated to the chamber 400 by a gas line not shown in the drawing, so that the chemical vapor 201 can flow from the liquid holding unit 2 into the chamber 400.

參閱圖4及圖5,在本實施例中,該承載單元3設置於容室400中,包括一旋轉馬達31、一具有多數軌道321及多數穿孔322的基座32,以及多數向上延伸以供裝設該工件100的凸柱33。該等穿孔322供作該化學蒸氣201穿過基座32的通道。該等凸柱33連接於該等軌道321且能沿該等軌道321長度方向滑動(如圖5中的假想線箭頭所示),並能在滑動的過程中可解除地定位。具體而言,該等凸柱33等長且分別以其頂端托持該工件100,使該工件100 的所有表面(包括底面)皆能暴露於該化學蒸氣201之中,確保該工件100的每個面皆能被該化學蒸氣201拋光。該旋轉馬達31受控帶動該基座32轉動。藉由該旋轉馬達31帶動該工件100轉動以確保萬一該化學蒸氣201的流動不均勻時,工件100的每個面在單位時間內接觸的化學蒸氣201濃度是近似的,而能提升拋光處理的均勻度。補充說明的是,在其他實施態樣中,即使該承載單元3沒有該旋轉馬達31亦可實施。 Referring to FIG. 4 and FIG. 5, in the embodiment, the carrying unit 3 is disposed in the chamber 400, and includes a rotating motor 31, a base 32 having a plurality of rails 321 and a plurality of through holes 322, and a plurality of upwardly extending for A stud 33 of the workpiece 100 is mounted. The perforations 322 serve as passages for the chemical vapor 201 to pass through the susceptor 32. The studs 33 are coupled to the rails 321 and are slidable along the length of the rails 321 (as indicated by the phantom arrow in Figure 5) and are releasably positionable during sliding. Specifically, the protrusions 33 are equal in length and respectively hold the workpiece 100 at the top end thereof to make the workpiece 100 All surfaces (including the bottom surface) can be exposed to the chemical vapor 201 to ensure that each face of the workpiece 100 can be polished by the chemical vapor 201. The rotary motor 31 is controlled to rotate the base 32. By rotating the workpiece 100 by the rotation motor 31 to ensure that the flow of the chemical vapor 201 in each unit of the workpiece 100 is approximated in the event of uneven flow of the chemical vapor 201, the polishing treatment can be improved. Uniformity. It should be noted that in other embodiments, even if the carrying unit 3 does not have the rotating motor 31, it can be implemented.

具體而言,該等軌道321的數目為兩個且相互交叉,該等凸柱33的數目為四根,該等凸柱33在該等軌道321上固定的位置是依據該工件100的大小而固定。在本實施例中,該等軌道321的數量與該等凸柱33的數量只是為使實施例的發明概念得以清楚顯示,在不同實施態樣中並不限定於任何數量的該等軌道321與該等凸柱33。在其他的實施態樣中,省略該基座31亦可實施該等軌道321,在此技術領域中具有通常知識者應可理解,針對該等軌道321的設計的結構與功能上的需求,可以使用不同於本實施例之軌道設計,並且可使用任何方法達到該等凸柱33沿該等軌道321長度方向滑動且能在滑動的過程中可解除地定位的目的。補充說明的是,在其他實施態樣中沒有該承載單元3亦可實施,例如,將該工件100設置於該支撐座11頂面也能將其拋光。 Specifically, the number of the tracks 321 is two and intersects each other. The number of the protrusions 33 is four, and the positions of the protrusions 33 on the tracks 321 are determined according to the size of the workpiece 100. fixed. In the present embodiment, the number of the tracks 321 and the number of the protrusions 33 are only for clearly showing the inventive concept of the embodiment, and are not limited to any number of the tracks 321 in different embodiments. The studs 33. In other implementations, the pedestal 31 may be omitted to implement the tracks 321 . It should be understood by those of ordinary skill in the art that the structural and functional requirements for the design of the tracks 321 may be A track design different from the present embodiment is used, and any method can be used to achieve the purpose that the studs 33 slide along the length of the rails 321 and can be releasably positioned during sliding. It should be noted that, in other embodiments, the carrying unit 3 may not be implemented. For example, the workpiece 100 may be polished on the top surface of the support base 11 .

該控溫單元4連接於該中空殼體1,用以控制該化學液體200的溫度及化學蒸氣201的溫度其中一者。在 本實施例中,該控溫單元4主要是用以控制該化學液體200的溫度。該控溫單元4與該盛液單元2相連接且包括一加熱器41、一散熱器42及一溫度感測器43。該加熱器41為一加熱片,該加熱器41連接於該盛液單元2用以加熱該盛液單元2並進一步使該盛液單元2內的化學溶液200的溫度提升。該散熱器42具有一散熱片421及一散熱風扇422,該散熱器42連接於支撐座11並且與該盛液單元2的底面相接觸,用以使盛液單元2的溫度下降並且進一步降低該化學溶液200的溫度。該溫度感測器43與該盛液單元2相連接並用以測量該盛液單元2的溫度。 The temperature control unit 4 is connected to the hollow casing 1 for controlling one of the temperature of the chemical liquid 200 and the temperature of the chemical vapor 201. in In this embodiment, the temperature control unit 4 is mainly used to control the temperature of the chemical liquid 200. The temperature control unit 4 is connected to the liquid receiving unit 2 and includes a heater 41, a heat sink 42 and a temperature sensor 43. The heater 41 is a heating sheet, and the heater 41 is connected to the liquid receiving unit 2 for heating the liquid holding unit 2 and further raising the temperature of the chemical solution 200 in the liquid holding unit 2. The heat sink 42 has a heat sink 421 and a heat dissipation fan 422. The heat sink 42 is connected to the support base 11 and is in contact with the bottom surface of the liquid receiving unit 2 for lowering the temperature of the liquid holding unit 2 and further reducing the temperature. The temperature of the chemical solution 200. The temperature sensor 43 is connected to the liquid receiving unit 2 and used to measure the temperature of the liquid receiving unit 2.

該導流單元5位於該中空殼體1內且用以帶動該化學蒸氣201的流向。在本實施例中,該導流單元5為一導流風扇,該導流單元5設於該盛液單元2上方產生一氣流,該氣流的方向51朝向該盛液單元2的開口。補充說明的是,藉由將該導流單元5設於該盛液單元2上方,使該導流單元5能具有增強容器400內的化學蒸氣201的流動且加快疏散積聚於該化學溶液200頂面的化學蒸氣201之效果,並且能讓容室400中頂部與底部的氣體產生對流,如此能讓從盛液單元2散逸出的化學蒸氣201向上流動至工件100處進行拋光處理,也能增進容室400中的氣體分布均勻度。在不同的實施態樣中,導流單元5不侷限要設置於容室400的底部,且數量也不限於單一個,可視實際需要而對應調整。 The flow guiding unit 5 is located in the hollow casing 1 and is used to drive the flow of the chemical vapor 201. In the present embodiment, the flow guiding unit 5 is a flow guiding fan, and the flow guiding unit 5 is disposed above the liquid holding unit 2 to generate an air flow, and the direction 51 of the air flow faces the opening of the liquid receiving unit 2. In addition, by providing the flow guiding unit 5 above the liquid holding unit 2, the flow guiding unit 5 can have the flow of the chemical vapor 201 in the reinforcing container 400 and accelerate the accumulation of the chemical solution 200 at the top of the chemical solution 200. The effect of the chemical vapor 201 on the surface, and the convection of the gas at the top and bottom of the chamber 400, so that the chemical vapor 201 escaping from the liquid holding unit 2 flows upward to the workpiece 100 for polishing, and can also be improved. The gas distribution uniformity in the chamber 400. In different implementations, the flow guiding unit 5 is not limited to be disposed at the bottom of the chamber 400, and the number is not limited to a single one, and may be adjusted correspondingly according to actual needs.

該抽氣單元6與該中空殼體1的容室400相連 通且用以抽離該中空殼體1內的氣體。在本實施例中,該抽氣單元6具有一儲氣室61,該儲氣室61用以儲存自該容室400抽出的化學蒸氣201,並且能回收該化學蒸氣201,待化學蒸氣201降溫便冷凝成化學液體200,而能被循環利用,達到環保且無廢氣汙染之功效。 The air extraction unit 6 is connected to the chamber 400 of the hollow housing 1 It is used to evacuate the gas inside the hollow casing 1. In the present embodiment, the air extraction unit 6 has a gas storage chamber 61 for storing the chemical vapor 201 extracted from the chamber 400, and can recover the chemical vapor 201, and the chemical vapor 201 is cooled. It condenses into a chemical liquid 200, which can be recycled, and is environmentally friendly and has no exhaust gas pollution.

該控時單元7連接於該中空殼體1,用以量計該工件100被拋光的時間長度。在本實施例中,該控時單元7為一計時器,與該操控面板8及該自動控制模組9電連接。 The timing unit 7 is connected to the hollow casing 1 for measuring the length of time during which the workpiece 100 is polished. In this embodiment, the timing unit 7 is a timer that is electrically connected to the control panel 8 and the automatic control module 9.

參閱圖6,該操控面板8與該中空殼體1相連接,並具有一開始鍵81、一停止鍵82、一溫度設定件組83、一時間設定件組84、一溫度顯示單元85及一時間顯示單元86。 Referring to FIG. 6 , the control panel 8 is connected to the hollow casing 1 and has a start button 81 , a stop button 82 , a temperature setting member set 83 , a time setting member group 84 , a temperature display unit 85 , and The unit 86 is displayed for a time.

該自動控制模組9與該控溫單元4、該控時單元7及該抽氣單元6電連接。在本實施例中,該自動控制模組9還與該操控面板8、該導流單元5、該旋轉馬達31及該控時單元7電連接。該自動控制模組9包括一微控制器(圖未示)及多數與該微控制器電連接的繼電器(圖未示),該自動控制模組9經由該微控制器操控該等繼電器,以決定是否供電且啟動與該自動控制模組9電連接的該等元件。 The automatic control module 9 is electrically connected to the temperature control unit 4, the timing unit 7, and the air extraction unit 6. In the embodiment, the automatic control module 9 is also electrically connected to the control panel 8, the flow guiding unit 5, the rotating motor 31 and the timing unit 7. The automatic control module 9 includes a microcontroller (not shown) and a plurality of relays (not shown) electrically connected to the microcontroller, and the automatic control module 9 controls the relays via the microcontroller to It is determined whether power is supplied and the components that are electrically connected to the automatic control module 9 are activated.

使用者可在該操控面板8輸入一目標時間及一目標溫度後按下開始鍵81,該自動控制模組8即啟動該控溫系統4中的加熱器41使該盛液單元2的溫度上升。上升至該目標溫度後,該自動控制模組8關閉該加熱器41並且啟動該導流單元5、旋轉馬達31以及該控時系統7。當該 目標時間結束後該自動控制模組8關閉導流單元5、旋轉馬達31以及控時系統7並且啟動抽氣單元6及控溫系統4中的散熱器42。 The user can press the start button 81 after the control panel 8 inputs a target time and a target temperature, and the automatic control module 8 activates the heater 41 in the temperature control system 4 to raise the temperature of the liquid receiving unit 2. . After rising to the target temperature, the automatic control module 8 turns off the heater 41 and activates the flow guiding unit 5, the rotary motor 31, and the timing system 7. When After the target time is over, the automatic control module 8 closes the flow guiding unit 5, the rotating motor 31 and the timing system 7 and activates the air extracting unit 6 and the heat sink 42 in the temperature control system 4.

參閱圖1至圖5,根據上述關於拋光裝置的實施方式,若將該拋光裝置應用於執行本發明的拋光方法,具體的執行步驟為:於步驟S1,使用者可根據工件100的體積、形狀預先設定凸柱33的擺放位置及間隔距離,並在中空殼體12的容室400中設置工件100於承載單元3之上。於步驟S2、S3,於操作面板8設定拋光處理所需的目標時間及目標溫度後,由控溫單元4的加熱器41對盛液單元2中的化學溶液200加熱,而加速化學溶液200揮發為化學蒸氣201的速度,使得容室400內形成富含化學蒸氣201的環境,而能進行工件100的拋光處理。上述加熱過程是由控溫單元400將溫度加熱至該目標溫度,並維持於該目標溫度,以利於控制拋光處理在穩定的狀態下進行。於步驟S4、S5,在拋光處理進行時,導流單元5會持續運作,以增進化學蒸氣201的流動性及分布均勻性。承載單元3的旋轉馬達31也可以在有需要時開啟運作,帶動工件100於容室400內旋轉。步驟S6、S7,拋光處理結束時,控溫單元4的散熱器42會冷卻盛液單元2的溫度以減少化學蒸氣201的生成量,抽氣單元6可將容室400中的化學蒸氣201抽出並回收使用,而將工件100拋光處理為成品300。 Referring to FIG. 1 to FIG. 5, according to the above embodiment of the polishing apparatus, if the polishing apparatus is applied to the polishing method of the present invention, the specific execution step is: in step S1, the user can according to the volume and shape of the workpiece 100. The placement position and the separation distance of the studs 33 are set in advance, and the workpiece 100 is placed on the carrying unit 3 in the chamber 400 of the hollow casing 12. After the target time and the target temperature required for the polishing process are set in the operation panel 8 in steps S2 and S3, the chemical solution 200 in the liquid receiving unit 2 is heated by the heater 41 of the temperature control unit 4 to accelerate the evaporation of the chemical solution 200. The speed of the chemical vapor 201 is such that an environment rich in the chemical vapor 201 is formed in the chamber 400, and the polishing process of the workpiece 100 can be performed. The heating process is performed by the temperature control unit 400 to heat the temperature to the target temperature and maintain the target temperature to facilitate controlling the polishing process to be performed in a stable state. In steps S4 and S5, when the polishing process is performed, the flow guiding unit 5 continues to operate to improve the fluidity and distribution uniformity of the chemical vapor 201. The rotary motor 31 of the carrying unit 3 can also be turned on when necessary to drive the workpiece 100 to rotate within the chamber 400. Steps S6, S7, when the polishing process is finished, the heat sink 42 of the temperature control unit 4 cools the temperature of the liquid receiving unit 2 to reduce the amount of chemical vapor 201 generated, and the pumping unit 6 can extract the chemical vapor 201 in the chamber 400. And recycling, the workpiece 100 is polished to the finished product 300.

綜上所述,本發明的拋光方法提供一種藉由化學蒸氣對工件進行拋光處理的加工方法,該方法具有高加 工精度、低汙染及環保的優點。若由本發明的拋光裝置執行該方法,拋光裝置的導流單元5直接作用於化學液體200表面同時能加速其蒸發且帶動該中空殼體1內的氣流。由旋轉馬達31控制該工件100旋轉以確保工件100的每個面在單位時間內接觸的蒸氣濃度是近似的。以自動控制模組9控制拋光的過程,在整個過程中不需人為監控也能維持拋光的品質。於透明的罩體12增加透明加熱貼片121以避免化學蒸氣201在罩體12上凝結,以供觀察該工件100。故本發明的拋光方法及拋光裝置確實能達成本發明之目的。 In summary, the polishing method of the present invention provides a processing method for polishing a workpiece by chemical vapor, which has a high The advantages of precision, low pollution and environmental protection. If the method is carried out by the polishing apparatus of the present invention, the flow guiding unit 5 of the polishing apparatus directly acts on the surface of the chemical liquid 200 while accelerating its evaporation and driving the airflow in the hollow casing 1. The rotation of the workpiece 100 by the rotary motor 31 to ensure that the vapor concentration of each face of the workpiece 100 is contacted per unit time is approximate. The polishing process is controlled by the automatic control module 9, and the quality of the polishing can be maintained without manual monitoring throughout the process. The transparent heating patch 121 is added to the transparent cover 12 to prevent the chemical vapor 201 from condensing on the cover 12 for viewing the workpiece 100. Therefore, the polishing method and polishing apparatus of the present invention can achieve the object of the present invention.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 However, the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the simple equivalent changes and modifications made by the scope of the invention and the contents of the patent specification, All remain within the scope of the invention patent.

1‧‧‧中空殼體 1‧‧‧ hollow housing

11‧‧‧支撐座 11‧‧‧ Support

12‧‧‧罩體 12‧‧‧ Cover

121‧‧‧加熱貼片 121‧‧‧heated patch

2‧‧‧盛液單元 2‧‧‧ Liquid unit

3‧‧‧承載單元 3‧‧‧ Carrying unit

31‧‧‧旋轉馬達 31‧‧‧Rotary motor

32‧‧‧基座 32‧‧‧Base

33‧‧‧凸柱 33‧‧‧Bump

4‧‧‧控溫單元 4‧‧‧temperature control unit

41‧‧‧加熱器 41‧‧‧heater

42‧‧‧散熱器 42‧‧‧heatsink

421‧‧‧散熱片 421‧‧‧ Heatsink

422‧‧‧散熱風扇 422‧‧‧ cooling fan

43‧‧‧溫度感測器 43‧‧‧Temperature Sensor

5‧‧‧導流單元 5‧‧‧Guide unit

51‧‧‧風向 51‧‧‧ wind direction

6‧‧‧抽氣單元 6‧‧‧Pumping unit

61‧‧‧儲氣室 61‧‧‧ gas storage room

7‧‧‧控時單元 7‧‧‧Control time unit

8‧‧‧操作面板 8‧‧‧Operator panel

9‧‧‧自動控制模組 9‧‧‧Automatic Control Module

100‧‧‧工件 100‧‧‧Workpiece

200‧‧‧化學溶液 200‧‧‧chemical solution

400‧‧‧容室 400‧‧ ‧ room

Claims (9)

一種拋光裝置,適用於將一化學溶液氣化成一化學蒸氣並將該化學蒸氣用於拋光一工件,該拋光裝置包含:一中空殼體,供該工件設置其中;一盛液單元,與該中空殼體相連通且用以盛裝該化學液體;一抽氣單元,與該中空殼體相連通且用以抽離該中空殼體內的氣體;一導流單元,位於該中空殼體內且用以帶動該化學蒸氣的流向;一控溫單元,連接於該中空殼體,用以控制該化學液體的溫度;一控時單元,連接於該中空殼體;及一承載單元,位於該中空殼體內,包括多數軌道、多數向上延伸以供裝設該工件的凸柱,及一旋轉馬達,該等凸柱連接於該等軌道且能沿該等軌道長度方向滑動且能在滑動的過程中可解除地定位,另外,該旋轉馬達受控帶動該等凸柱轉動。 A polishing apparatus adapted to vaporize a chemical solution into a chemical vapor and to use the chemical vapor for polishing a workpiece, the polishing apparatus comprising: a hollow casing for the workpiece to be disposed therein; a liquid holding unit, and the a hollow housing is connected to receive the chemical liquid; an air extraction unit is in communication with the hollow housing for extracting gas from the hollow housing; and a flow guiding unit is located in the hollow shell a control unit for controlling the flow of the chemical vapor; a temperature control unit coupled to the hollow housing for controlling the temperature of the chemical liquid; a timing unit coupled to the hollow housing; and a load bearing unit Locating in the hollow housing, comprising a plurality of rails, a plurality of protrusions extending upwardly for mounting the workpiece, and a rotating motor coupled to the rails and capable of sliding along the length of the rails and capable of The positioning is releasable during the sliding process, and in addition, the rotating motor is controlled to drive the protrusions to rotate. 如請求項1所述的拋光裝置,還包括一自動控制模組,與該控溫單元、該控時單元及該抽氣單元電連接。 The polishing apparatus of claim 1, further comprising an automatic control module electrically connected to the temperature control unit, the timing unit, and the air extraction unit. 如請求項1所述的拋光裝置,該盛液單元為一位於該中空殼體內且開口向上的盛盤,該導流單元為一導流風扇,該導流單元設於該盛液單元上方並使氣體吹向該盛液單元。 The polishing apparatus according to claim 1, wherein the liquid receiving unit is a tray located in the hollow casing and having an opening upward, the flow guiding unit is a flow guiding fan, and the guiding unit is disposed above the liquid receiving unit. The gas is blown to the liquid receiving unit. 如請求項1所述的拋光裝置,其中,該中空殼體還包括一透明的罩體,該拋光裝置還包含一連接於該罩體的透明的加熱貼片,另外,該抽氣單元包括一儲氣室。 The polishing apparatus according to claim 1, wherein the hollow casing further comprises a transparent cover, the polishing device further comprising a transparent heating patch connected to the cover, and further, the air extraction unit comprises A gas storage room. 一種拋光方法,應用如請求項1至4任一項所述的拋光裝置來拋光一工件,該方法包含下列步驟:步驟(A)設置該工件於一容室中;步驟(B)加熱一可溶解該工件的化學溶液而產生一化學蒸氣;及步驟(C)提供該化學蒸氣於該容室中。 A polishing method for polishing a workpiece by the polishing apparatus according to any one of claims 1 to 4, the method comprising the steps of: (A) setting the workpiece in a chamber; and heating in the step (B) Dissolving a chemical solution of the workpiece to produce a chemical vapor; and step (C) providing the chemical vapor in the chamber. 如請求項5所述的拋光方法,其中,於該步驟(B),該加熱程序是根據關於該化學溶液之沸點的一目標溫度而執行;該步驟(C)的執行時間是由關於該工件之表面積的一目標時間而設定。 The polishing method according to claim 5, wherein in the step (B), the heating program is performed according to a target temperature with respect to a boiling point of the chemical solution; the execution time of the step (C) is related to the workpiece The surface area is set for a target time. 如請求項5所述的拋光方法,其中,於該步驟(C)還持續旋轉該工件,其中,該工件的材料為熱塑性樹酯,該化學溶液為丙酮,該化學蒸氣為丙酮蒸氣。 The polishing method according to claim 5, wherein the workpiece is continuously rotated in the step (C), wherein the material of the workpiece is a thermoplastic resin, the chemical solution is acetone, and the chemical vapor is acetone vapor. 如請求項5所述的拋光方法,其中,於該步驟(C)之後還包含:步驟(D)將該化學溶液降溫,接著,進行步驟(E)抽離該容室中的該化學蒸氣。 The polishing method according to claim 5, further comprising, after the step (C), the step (D) of cooling the chemical solution, and then performing the step (E) of withdrawing the chemical vapor in the chamber. 一種成品,使用如請求項1至4所述的拋光裝置將一工件拋光而得,該成品包含:多數薄層,彼此層疊,且該等相互層疊的薄層的邊緣共同構成一非平整的外表面,其中,該等薄層的材料為熱塑性樹酯,該化學溶液為丙酮;及 一溶融層,披覆於該等薄層的該非平整的外表面,該溶融層是由該等薄層的非平整的外表面的部份溶融後冷卻而成,且主要成分與該等薄層相同。 A finished product obtained by polishing a workpiece using a polishing apparatus as claimed in claims 1 to 4, the finished product comprising: a plurality of thin layers laminated on each other, and the edges of the mutually stacked thin layers together form a non-flat outer surface a surface, wherein the material of the thin layer is a thermoplastic resin, and the chemical solution is acetone; a molten layer coated on the non-flat outer surface of the thin layer, the molten layer being cooled by melting a part of the non-flat outer surface of the thin layer, and the main component and the thin layer the same.
TW104135595A 2015-10-29 2015-10-29 Polishing method and its finished product and polishing device TWI598218B (en)

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