TWI595303B - Lighting device, projection device, optical module and scanning device - Google Patents

Description

Lighting device, projection device, optical module and scanning device

The present invention relates to an illumination device comprising: an optical element; and an illumination device that irradiates light onto the optical element to be irradiated onto the optical element. Moreover, the invention relates to a projection device having the illumination device. Furthermore, the present invention relates to a scanning device and an optical module that change an optical path of incident light.

For example, as disclosed in JP 2012-123381 A, an illumination device using an optical element constituted by a lens array or a hologram element is known. According to such an illumination device, it is possible to illuminate a predetermined region with high precision by adjusting the incident direction of the incident light toward the optical element in advance. An illumination device disclosed in JP 2012-123381 A is provided with an illumination device having a light source that emits light and a scanning device that periodically changes an optical path of light from the light source. The illuminating device irradiates the optical element with light and is scanned on the optical element. Further, in JP 2012-123381 A, it is studied to suppress the generation of speckle in the illuminated field by illumination light from the optical element by means of irradiating the optical element with coherent light on the optical element. Health.

The scanning device 95 of the illuminating device 90 disclosed in JP 2012-123381 A, as shown in FIG. 9, includes a reflecting device 96 that is rotatable about a shaft R _x and a light that is used to illuminate the reflecting device 96. The lens effect is collimated by the deflecting element 97. Light from the illumination device 90 is incident on the optical element 99 along the optical path of the parallel beam. When such an irradiation device 90 is used, the incident light toward the optical element is in one direction, and the design and manufacture of the optical element can be easily performed. Further, unlike the divergent beam, when the optical path light of the parallel beam advances, the variation of the optical path width does not occur. Therefore, the processing of light becomes easy, and the apparatus can be miniaturized.

However, light from a light source, such as laser light from a laser source, typically has a certain degree of spot diameter when incident on the deflecting element 97. Therefore, as shown in Fig. 9, at each instant, even if the optical axis Lax1 of the incident light can be deflected to a predetermined direction, the direction in which all the light rays are directed cannot be collimated. The direction in which the light that is not collimated is in the optical path adjustment function of the optical element, and there is no way to perform high-precision adjustment toward the illuminated area. As a result, it becomes impossible to use the light source light with high utilization efficiency, and it is possible to perform high-precision illumination from a desired direction to the illuminated area.

Further, as shown by a broken line in Fig. 9, the purpose of increasing the output is to use a plurality of light sources 91, 92 in a row. In the example shown in Fig. 9, light from a plurality of light sources 91, 92 is incident on the reflecting means 96 and the deflecting element 97 in parallel optical paths. In such an example It is even impossible to collimate the optical axis Lax2 of the light from the second light source 92. Therefore, it is impossible to accurately illuminate the illuminated area from a desired direction. In this case, if each of the light sources is provided with a reflecting device and a deflecting element, it is unfortunate that the device is costly and large.

The present invention has been made in view of such problems, and an object thereof is to provide an illumination device capable of accurately illuminating an illuminated area from a desired direction, and a projection device having the illumination device. Further, it is an object of the present invention to provide a scanning device which can perform high-precision control of the direction in which light is emitted.

A first illuminating device according to the present invention includes: an optical element; and an illuminating device that illuminates the optical element to be irradiated onto the optical element; the illuminating device includes: a light source device that emits light; and has a reflection from the light source device a first reflecting means for changing the direction of the first reflecting surface; and a second reflecting surface for reflecting light from the first reflecting surface; and the first reflecting surface The second reflecting means that changes the direction of the second reflecting surface in synchronization with the change in direction.

A second illumination device of the present invention includes: an optical element; An illuminating device that irradiates light onto the optical element to be scanned by the optical element; the illuminating device includes: a light source device that emits light; a first reflecting surface that reflects light from the light source device, and the first reflecting surface a first reflecting device that changes in direction of the surface; and a second reflecting surface that reflects light from the first reflecting surface; and a direction in which the direction of the second reflecting surface changes in parallel with a direction of the first reflecting surface 2 reflective device.

In the first or second illumination device of the present invention, light of a certain area incident on the optical element and light of another area that is incident on a certain area of the optical element are Preferably, the optical path is adjusted by the optical element described above and developed into a field having at least partial overlap.

In the first or second illumination device of the present invention, it is preferable that the light that is irradiated from the irradiation device and that is incident on each of the optical elements is illuminating a region in which at least a part of the optical elements overlap each other.

In the first or second illuminating device of the present invention, it is preferable that the first reflecting surface is rotatable about an axis inclined with respect to a normal direction of the first reflecting surface; The reflecting surface is rotatable about an axis that is inclined with respect to the normal direction of the second reflecting surface.

In the first or second illumination device of the present invention, the following Preferably, the rotation axis of the first reflection surface is parallel to the rotation axis of the second reflection surface; the direction of rotation about the rotation axis of the first reflection surface and the rotation axis of the second reflection surface The direction of rotation for the center is the same.

In the first or second illumination device of the present invention, preferably, the rotation axis of the first reflection surface is parallel to the rotation axis of the second reflection surface, and the rotation period of the first reflection surface is different from the second The rotation period of the reflection surface is the same, and the first reflection surface and the second reflection surface are maintained in parallel with each other.

In the first or second illumination device of the present invention, preferably, the first reflecting surface is rotatable about an axis parallel to the first reflecting surface; and the second reflecting surface is It is possible to rotate around an axis parallel to the second reflecting surface.

In the first or second illumination device of the present invention, preferably, the rotation axis of the first reflection surface and the rotation axis of the second reflection surface are parallel; The angular range that can be rotated about the rotation axis of the first reflection surface is the same as the angle range that can be rotated about the rotation axis of the second reflection surface.

In the first or second illumination device of the present invention, preferably, the rotation axis of the first reflection surface is parallel to the rotation axis of the second reflection surface; and the rotation period of the first reflection surface is The second reflecting surface has the same swirling period, and the first reflecting surface and the second reflecting surface are maintained in parallel with each other.

In the first or second illumination device of the present invention, it is preferable that the second reflection surface is larger than the first reflection surface.

In the first or second illumination device of the present invention, it is preferable that the light source device includes a plurality of light sources.

In the first or second illumination device of the present invention, it is preferable that the optical element includes a lens array that changes a direction in which light travels.

In the first or second illumination device of the present invention, it is preferable that the optical element includes a hologram photographic element recording medium.

The optical module of the first optical module of the present invention is an optical module that receives light from a light source device, and includes: a scanning device that changes a direction of light from the light source device; and an optical element that is configured to illuminate Have the above-mentioned scanning device to make progress The scanning device includes: a first reflecting surface having a first reflecting surface for reflecting light from the light source device; and a direction of changing the direction of the first reflecting surface; and having the first reflecting device The second reflecting means that reflects the light of the reflecting surface and reflects the direction of the second reflecting surface in synchronization with the change in the direction of the first reflecting surface.

A second optical module according to the present invention is an optical module that receives light from a light source device, and includes: a scanning device that changes a direction in which light from the light source device is changed; and an optical element that is configured to be irradiated a scanning device that changes direction of light; the scanning device includes: a first reflecting surface that reflects light from the light source device; and a first reflecting device that changes a direction of the first reflecting surface; The second reflecting surface that reflects the light from the first reflecting surface and the second reflecting surface that changes the direction of the second reflecting surface in parallel with the direction of the first reflecting surface.

In the first or second optical module of the present invention, it is preferable that the first reflecting surface is opposite to the normal side of the first reflecting surface. The tilted shaft is rotatable as a center, and the second reflecting surface is rotatable about an axis that is inclined with respect to the normal direction of the second reflecting surface.

In the first or second optical module of the present invention, preferably, the rotation axis of the first reflection surface is parallel to the rotation axis of the second reflection surface; and the rotation axis of the first reflection surface is The direction of rotation of the center is the same as the direction of rotation about the rotation axis of the second reflection surface.

In the first or second optical module of the present invention, preferably, the rotation axis of the first reflection surface is parallel to the rotation axis of the second reflection surface, and the rotation period of the first reflection surface is the same as the The rotation period of the two reflecting surfaces is the same, and the first reflecting surface and the second reflecting surface are maintained in parallel with each other.

In the first or second optical module of the present invention, preferably, the first reflecting surface is rotatable about an axis parallel to the first reflecting surface; and the second reflecting surface is It is possible to rotate around an axis parallel to the second reflecting surface.

In the first or second optical module of the present invention, preferably, the rotation axis of the first reflection surface and the rotation axis of the second reflection surface are parallel; and the first reflection surface is the same The angular range in which the rotation axis is centered and which is rotatable is the same as the angle range in which the rotation axis is centered on the rotation axis of the second reflection surface.

In the first or second optical module of the present invention, preferably, the rotation axis of the first reflection surface and the rotation axis of the second reflection surface are parallel; and the rotation of the first reflection surface The cycle and the second reflecting surface have the same swirling period, and the first reflecting surface and the second reflecting surface are maintained in parallel with each other.

In the first or second optical module of the present invention, it is preferable that the second reflecting surface is larger than the first reflecting surface.

In the first or second optical module of the present invention, it is preferable that the optical element includes a lens array that changes a direction in which light travels.

In the first or second optical module of the present invention, it is preferable that the optical element includes a hologram photographic element recording medium.

It is preferable that the first or second optical module of the present invention further includes a spatial light modulator that is illuminated by light from the optical element.

In the first or second optical module of the present invention, light that has entered a certain area of the optical element and light that enters another area different from the above-described one of the optical elements, It is preferred to adjust the optical path with the aforementioned optical elements, respectively, and to develop a field having at least partial overlap.

In the first or second optical module of the present invention, it is preferable that the light that is irradiated from the irradiation device and that is incident on each of the optical elements is illuminating a region in which at least a part of the optical elements overlap each other.

The projection device of the present invention includes: any one of the first and second illumination devices of the present invention; and a spatial light modulator that is illuminated by light from the illumination device.

The projection device of the present invention further includes a projection optical system that directs light from the spatial light modulator toward the object to be projected.

A projection display device according to the present invention includes: any one of the projection devices of the present invention; and a projection object projected by light from the projection device.

A first scanning device according to the present invention includes: a first reflecting device that reflects a first reflecting surface of the incident light, and a direction that changes a direction of the first reflecting surface; and a light that reflects the first reflecting surface The second reflecting surface of the second reflecting surface, in addition to the change in the direction of the first reflecting surface, changes the direction of the second reflecting surface.

The second scanning device of the present invention has: a first reflecting device that reflects the first reflecting surface of the incident light, and a direction that changes the direction of the first reflecting surface; and a second reflecting surface that reflects the light from the first reflecting surface, and the second reflecting surface A second reflecting means in which the direction of the reflecting surface changes in parallel with the direction of the second reflecting surface.

In the third scanning device of the present invention, the first reflecting surface that reflects the incident light is provided, and the first reflecting surface is held centered on the axis inclined with respect to the normal direction of the first reflecting surface. a first reflecting device that is rotatable; and a second reflecting surface that reflects light from the first reflecting surface, and the second axis that is inclined with respect to a normal direction of the second reflecting surface The reflecting surface is held as a second reflecting means rotatable; and the rotation of the second reflecting surface is synchronized with the rotation of the first reflecting surface.

In the fourth scanning device of the present invention, the first reflecting surface that reflects the incident light is provided, and the first reflecting surface is held centering on the axis inclined with respect to the normal direction of the first reflecting surface. a first reflecting device that is rotatable; and a second reflecting surface that reflects light from the first reflecting surface, and the second axis that is inclined with respect to a normal direction of the second reflecting surface The reflecting surface is held as a second reflecting device that is rotatable; and the second reflecting surface is maintained in parallel with the first reflecting surface. The optical element of the present invention is used in any of the optical elements of the illumination device of the present invention, wherein the optical path of the light irradiated from the illumination device is changed.

It is preferable that the optical element of the present invention is provided with a lens array including a plurality of unit lenses.

It is preferred that the optical element of the present invention is provided with a hologram photographic element recording medium.

According to the present invention, the illuminated area can be illuminated with high precision from a desired direction. Moreover, according to the present invention, the direction in which light is conducted can be controlled with high precision.

10‧‧‧Projection image display device

15‧‧‧ screen

20‧‧‧projection device

25‧‧‧In the field of illumination

30‧‧‧Space light modulator

35‧‧‧Relay optical system

37‧‧‧Uniform optical system

40‧‧‧Lighting device

50‧‧‧Optical components

51‧‧‧ lens array

52‧‧‧ Concentrating lens

57‧‧‧All-image camera recording media

60‧‧‧ illumination device

61‧‧‧Light source device

62‧‧‧Light source

66‧‧‧Light source

67‧‧‧Light source

68‧‧‧Light source

70‧‧‧Scanning device

71‧‧‧1st reflector

72‧‧‧1st reflecting surface

73‧‧‧2nd reflection device

74‧‧‧2nd reflecting surface

75‧‧‧ Controller

76‧‧‧1st reflection device

77‧‧‧1st reflecting surface

78‧‧‧2nd reflection device

79‧‧‧2nd reflecting surface

90‧‧‧ illumination device

91‧‧‧Light source

92‧‧‧Light source

95‧‧‧Sweeping device

96‧‧‧Reflective devices

97‧‧‧ biasing element

99‧‧‧Optical components

37a‧‧‧Injection

37b‧‧‧ shot surface

51a‧‧‧unit lens

71a‧‧‧reflecting members

71b‧‧‧Axis components

71c‧‧‧ drive unit

73a‧‧‧reflecting members

73b‧‧‧Axis components

73c‧‧‧ drive

77a‧‧‧1st drive unit

79a‧‧‧2nd drive unit

AR1‧‧‧ arrow

AR2‧‧‧ arrow

Lax1‧‧‧ optical axis

Lax2‧‧‧ optical axis

LZ‧‧‧ is illuminated

Ra1‧‧‧1st rotating shaft

Ra2‧‧‧2nd rotating shaft

Rb1‧‧‧1st rotation axis

Rb2‧‧‧2nd rotation axis

Rx‧‧‧ axis

Vp1‧‧‧1st imaginary face

Vp2‧‧‧2nd imaginary face

Fig. 1 is a view for explaining one embodiment of the present invention, and is a view showing a schematic configuration of a projection device and a projection display device.

FIG. 2 is a perspective view showing an irradiation device including an illumination device of the projection device of FIG. 1. FIG.

2A] Fig. 2A is a flowchart for explaining a control method of an irradiation device.

Fig. 3 is a side view showing an optical element of the illumination device included in the projection device of Fig. 1.

Fig. 4 is a side view showing a modification of one of the scanning devices of the irradiation device.

Fig. 5 is a side view showing a modification of one of the light source devices of the irradiation device.

Fig. 6 is a side view showing a modification of one of the optical elements.

Fig. 7 is a view showing a modification of one of the projection devices.

Fig. 8 is a view showing another modification of the projection device.

Fig. 9 is a side view showing a conventional scanning device.

Hereinafter, one embodiment of the present invention will be described with reference to the drawings. Further, in the drawings attached to the present specification, the size and the ratio of the length to the width of the appropriate scale are changed and exaggerated from these physical objects.

Moreover, the terms of the shape or geometry used in the present specification and the values of the length or angle such as "parallel", "orthogonal", "identical", etc., which are specific to these degrees, are not strictly The meaning is bound, but as an explanation contains a range of expectations for the same degree of functionality.

The projection display apparatus 10 shown in FIG. 1 includes a screen 15 and a projection device 20 for projecting image light. The projection device 20 includes an illumination device 40 that is illuminated in the illumination area LZ on the imaginary plane, a spatial light modulator 30 that is disposed at a position overlapping the illumination area LZ and that is illuminated by the illumination device 40, and The coherent light from the spatial light modulator 30 is projected onto the projection optical system 25 of the screen 15. That is, in one of the embodiments described herein, the illumination device 40 is assembled to the projection device 20 as an illumination device for illuminating the spatial light modulator 30. In particular, in the present embodiment, the illumination device 40 illuminates the illuminated area LZ by coherent light, and the illumination device 40 does not cause the speckle to be noticed.

First, the lighting device 40 will be described. As shown in Fig. 1, the illumination device 40 has an optical element 50 that directs the direction of light toward the illumination area LZ, and an illumination device 60 that illuminates the light toward the optical element 50, particularly the coherent light in this example. In the example shown in FIG. 1, the illumination device 60 illuminates the optical element 50 with coherent light such that the coherent light is scanned onto the optical element 50. Therefore, at a certain moment, the area on the optical element 50 to which the coherent light is irradiated by the irradiation device 60 becomes a part of the surface of the optical element 50.

The irradiation device 60 has a light source device 61 that emits coherent light in a specific wavelength band, and a scanning device 70 that directs the direction of light from the light source device 61 toward the optical element 50. Furthermore, the optical module is formed by the scanning device 70 and the optical element 50. The light source device 61 has a light source 62 that generates coherent light, for example, a laser light source 62. The scanning device 70 is such that coherent light generated by the light source 62 of the light source device 61 is incident on the optical element 50 to follow the optical path of the light that becomes a parallel beam.

As a specific example shown in the drawing, the scanning device 70 includes a first reflecting device 71 having a first reflecting surface 72 that reflects light from the light source 62, and a first reflecting device 71 that reflects light from the first reflecting surface 72. 2 second reflecting means 73 of the reflecting surface 74, and connected to the first reflection The controller 71 of the device 71 and the second reflecting device 73. The direction of the first reflecting surface 72 of the first reflecting device 71 can be changed in the specified movable range. Similarly, the direction of the second reflecting surface 74 of the second reflecting device 73 can also be changed in the specified movable range. The light irradiated from the light source 62 is scanned on the optical element 50 by repeatedly changing the direction of the first reflecting surface 72 and the direction of the second reflecting surface 74. The controller 75 controls the direction of the first reflecting surface 72 and the direction of the second reflecting surface 74.

In the scanning device 70 described above, the fluctuation of the direction of the first reflecting surface 72 of the first reflecting device 71 and the fluctuation of the direction of the second reflecting surface 74 of the second reflecting device 73 are synchronized. In other words, the first reflecting surface 72 and the second reflecting surface 74 do not change directions independently of each other. One of the direction of the first reflecting surface 72 and the direction of the second reflecting surface 74 is oriented in a predetermined direction in accordance with the other direction. In particular, in the scanning device 70 described here, the first reflecting surface 72 and the second reflecting surface 74 are actuated such that the direction of the first reflecting surface 72 and the direction of the second reflecting surface 74 are parallel to each other.

In the illustrated example, the first reflecting device 71 has a reflecting member 71a having a first reflecting surface 72, a shaft member 71b supporting the reflecting member 71a, and a driving device 71c connected to the shaft member 71b. As shown in Fig. 2, the shaft member 71b is rotatable with the first rotating shaft Ra1 in the axial direction as a center, for example, by being driven by a driving device 71c constituted by a motor. The reflection member 71a supported to the shaft member 71b via the rotating shaft member 71b is also the first The rotation axis Ra1 rotates around the center. However, the first reflecting surface 72 is not orthogonal to the first rotating shaft Ra1. In other words, the normal direction of the first reflecting surface 72 is non-parallel to the first rotating shaft Ra1 and inclined with respect to the first rotating shaft Ra1. Therefore, when the reflection member 71a is rotated about the first rotation axis Ra1, the first reflection surface 72 changes in direction. At this time, when the rotation of the reflection member 71a is a constant speed, the first reflection surface 72 is periodically shifted in the direction around the first imaginary plane Vp1 orthogonal to the first rotation axis Ra1.

In the example shown in the figure, the second reflecting device 73 has the same configuration as that of the first reflecting device 71. In other words, the second reflecting device 73 includes a reflecting member 73a having the second reflecting surface 74, a shaft member 73b supporting the reflecting member 73a, and a driving device 73c connected to the shaft member 73b. As shown in Fig. 2, the shaft member 73b is rotatable around the second rotation axis Ra2 in the axial direction, for example, by being driven by a driving device 73c constituted by a motor. The reflection member 73a supported by the shaft member 73b is also rotated about the second rotation axis Ra2 via the rotation shaft member 73b. However, the second reflecting surface 74 is not orthogonal to the second rotating shaft Ra2. In other words, the normal direction of the second reflecting surface 74 is non-parallel to the second rotating shaft Ra2 and inclined with respect to the second rotating shaft Ra2. Therefore, when the reflection member 73a rotates around the second rotation axis Ra2, the second reflection surface 74 changes in direction. At this time, when the rotation of the reflection member 73a is a constant speed, the second reflection surface 74 periodically changes the direction around the second imaginary plane Vp2 orthogonal to the second rotation axis Ra2.

Further, in the illustrated example, the first rotation axis Ra1 of the first reflection surface 72 and the second rotation axis Ra2 of the second reflection surface 74 are parallel. In addition, the direction of rotation about the first rotation axis Ra1 of the first reflection surface 72 and the direction of rotation about the second rotation axis Ra2 of the second reflection surface 74 are the same direction. Next, the rotation period of the first reflection surface 72 and the rotation period of the second reflection surface 74 are the same. As a result, the first reflecting surface 72 and the second reflecting surface 74 are maintained in a state of being parallel to each other.

In addition, the direction of rotation about the first rotation axis Ra1 of the first reflection surface 72 is the first one when the first reflection surface 72 is viewed from one side to the other side along the first rotation axis Ra1. The direction of rotation of the reflecting surface 72 (arrow AR1 in FIG. 2); the direction of rotation about the second rotation axis Ra2 of the second reflecting surface 74 is along the second rotation axis parallel to the first rotation axis Ra1 Ra2 is a direction in which the second reflecting surface 74 is rotated when the second reflecting surface 74 is viewed from the one side toward the other side (arrow AR2 in Fig. 2).

Here, FIG. 2A shows an example of a method of controlling the directions of the first reflecting surface 72 and the second reflecting surface 74 by the controller 75. In the control method shown in FIG. 2A, as an example, the phases of the drive devices 71c and 73c are controlled as a specific example, and the directions of the reflection surfaces 72 and 74 are controlled so as to control the phases of the rotors of the motors that are the drive devices 71c and 73c. . The phase control method of the driving devices 71c and 73c is realized, for example, by modulation of a PWM signal.

In the example shown in FIG. 2A, the movement of the scanning device 70 is started. In doing so, first, the phase of the first driving device 71c that rotationally drives the first reflecting surface 71 is detected. At the same time, the phase of the second driving device 73c that rotationally drives the second reflecting surface 74 is detected. Next, the controller 75 specifies the offset amount of the phase of the first drive device 71c and the phase of the second drive device 73c. The controller 75 adjusts the first drive device 71c and the second drive device 73c in accordance with the offset amount of the specific phase so that the phase of the first drive device 71c and the phase of the second drive device 73c are the same. As a result, the first reflecting surface 72 of the first reflecting device 71 and the second reflecting surface 74 of the second reflecting device 73 are held in parallel, and are driven by the respective driving devices 71c and 73c.

In the control method shown in FIG. 2A, the phase of the first drive device 71c and the phase of the second drive device 73c are checked, for example, continuously or at regular intervals, until the end of the operation of the scanning device 70. When there is a variation in phase between the drive devices 71c and 73c, the deviation is eliminated, and the phase of the first drive device 71c and the phase of the second drive device 73c are aligned. In this manner, the first reflecting surface 72 and the second reflecting surface 74 are maintained in a state of being parallel to each other while being rotationally driven.

Further, the method of controlling the directions of the first reflecting surface 72 and the second reflecting surface 74 described above is merely an example, and other control methods may be employed. For example, the directions of the first reflecting surface 72 and the second reflecting surface 74 may be directly detected to control the directions of the first reflecting surface 72 and the second reflecting surface 74.

When the above-described scanning device 70 is used, because The reflection surface 72 and the second reflection surface 74 are maintained in parallel, and the direction in which the light is advanced from the second reflection surface 74 is parallel to the direction in which the light incident on the first reflection surface 72 is proceeding. On the other hand, the light source 62 of the light source device 61 is fixed in advance, and the light emitted from the light source 62 is constantly directed from the fixed direction toward the first reflecting device 71. In other words, the direction in which the light from the light source 62 incident on the first reflecting surface 72 is constant is constant. Therefore, the light reflected by the second reflecting surface 74 of the second reflecting device 73 constantly advances in a constant direction. In the illustrated example, light from a constant direction is incident from the irradiation device 60 toward the optical element 50. That is, the light from the illuminating device 60 is incident on the optical element 50 to follow the optical path of the light rays that are parallel beams.

Next, the optical element 50 will be described. The optical element 50 has an optical path control function for directing the incident light toward each field to a specific direction corresponding to the position of the field. The optical element 50 described here corrects the direction in which the incident light is directed to each field and faces the designated area LZ. The field has become the field of illumination LZ. That is, the light from the irradiation device 60, which is irradiated to each of the fields in which the incident surface of the optical element 50 is planarly divided, passes through the optical element 50, and illuminates at least a part of the overlapping area.

As an example, in the example shown in FIGS. 1 and 3, the optical element 50 is configured to include a lens array 51 that is formed to include an incident direction of light from the irradiation device 60. Here, the "lens array" is an assembly of small lenses, which are also referred to as unit lenses, and is used as an element that deflects the direction in which light is deflected by meandering or reflection. Wave function. In the illustrated example, the optical element 50 diffuses light incident on each field corresponding to each unit lens 51a into the entire field of at least the illumination area LZ. That is, the optical element 50 illuminates the same illuminated area LZ by diffusing the light incident from the irradiation device 60 into various fields.

In the illustrated example, the light incident on the optical element 50 is light that travels in a certain direction. Therefore, the lens array 51 shown in Fig. 3 is configured as a fly-eye lens which is covered with a unit lens 51a made of a convex lens. Each unit lens 51a is formed to be identical to each other. The unit lenses 51a are covered such that their optical axes are parallel to each other.

Further, the optical element 50 shown in FIG. 3 has such a lens array 51 and a condensing lens 52 or a field lens which is disposed opposite to the lens array 51. In the optical element 50 of FIG. 2, the lens array 51 is disposed on the maximum light side of the optical element 50, and receives light from the illumination device 60. Each unit lens 51a of the lens array 51 is formed to converge light incident on the optical path of the light beam that becomes a parallel beam to the focus. Next, the condensing lens 52 is disposed on the surface drawn by the focal point of each unit lens 51a, and directs the light from each convex lens toward the illumination area LZ. In particular, by the condensing lens 52, the light from each convex lens can be directed only to the same illumination area LZ, and the illumination light from each direction can be superimposed on the illumination area LZ.

Next, the spatial light modulator 30 will be described. The spatial light modulator 30 is superimposed to the illuminated frontal zone LZ. Next, the spatial light modulator 30 is illuminated by the illumination device 40 to form a modulated image. The light from the illuminating device 40 is illuminated only by the entire area of the illumination area LZ as described above. Therefore, it is preferable that the incident surface of the spatial light modulator 30 is the same shape and size as the illuminated area LZ to which the illumination device 40 is irradiated with light. In this case, the light from the illumination device 40 can be utilized for the formation of the modulated image with high use efficiency.

The spatial light modulator 30 is not particularly limited, and various known spatial light modulators can be utilized. For example, a spatial light modulator that forms a modulated image without using polarized light, for example, a digital micromirror device (DMD) or a transmissive liquid crystal microdisplay or a reflective LCoS (Liquid) that forms a modulated image by polarized light can be used. Crystal On Silicon (registered trademark), as a spatial light modulator 30.

As shown in FIG. 1, when the spatial light modulator 30 is a transmissive liquid crystal microdisplay, the spatial light modulator 30 that is planarly illuminated by the illumination device 40 is used for each pixel. The coherent light is selected and transmitted to form a modulated image on the screen of the display as the spatial light modulator 30. The modulated image thus obtained is finally projected onto the screen 15 by the projection optical system 25 at the same size or by the magnification. Thereby, the observer can observe the portrait that is projected onto the screen 15. The screen 15 can be configured as a transmissive screen or as a reflective screen.

Next, the operation of the illumination device 40, the projection device 20, and the projection display device 10 which are manufactured by the above configuration will be described.

First, the illumination device 60 is scanned at the optical component 50. Upper, the coherent light is illuminated toward the optical element 50. Specifically, coherent light of a specific wavelength band in which the light source 62 of the light source device 61 advances in a certain direction is generated, and the coherent light is changed in the direction in which the scanning device 70 changes. The scanning device 70 performs a periodic operation, and as a result, it also periodically changes at the incident position of the coherent light on the optical element 50.

The coherent light incident on each field of the optical element 50 is superimposed on the illumination area LZ via the optical path adjustment function of the optical element 50, respectively. That is, the coherent light from the respective fields of the optical element 50 from the illumination device 60 is incident on the entire area of the illumination area LZ by the optical element 50 without being diffused or even diffused. Thus, the illumination device 60 can illuminate the illuminated area LZ with coherent light.

As shown in FIG. 1, in the projection device 20, the spatial light modulator 30 is disposed at a position overlapping the illuminated area LZ of the illumination device 40. To this end, the spatial light modulator 30 is planarly illuminated by the illumination device 40, and is formed by a method in which coherent light is selected and transmitted through each pixel. This image is projected onto the screen 15 by the projection optical system 25. The coherent light that is projected onto the screen 15 is diffused and recognized as an image by the observer.

By the way, the coherent light that is projected onto the screen interferes by diffusion, causing speckle to be generated. On the other hand, by illuminating the illumination device 40 here, as will be described later, the speckle can be made very effective without being noticeable.

In order not to make the speckles stand out, the so-called parameters of polarization, phase, angle and time are multiplexed and the mode is added. The person is effective. The so-called mode here is a speckle pattern that has no correlation with each other. For example, when a plurality of laser light sources are projected from coherent light in a direction different from the same screen, only the number of laser light sources has a pattern. Moreover, when the coherent light from the same laser light source is divided into different directions by time and projected onto the screen, the incident direction of the coherent light is changed only between the time when the human eye cannot be decomposed. There are patterns in the number of times. Then, when the mode is present a plurality of times, the interference pattern is not overlapped and averaged, and as a result, the speckle observed by the observer's eyes is not conspicuous.

In the illumination device 40 described above, the coherent light is irradiated onto the optical element 50 to be scanned on the optical element 50. Further, the coherent light that is incident from the illumination device 60 to each field of the optical element 50 illuminates the entire illumination field LZ with coherent light; however, the illumination directions of the coherent light that illuminates the illumination field LZ are mutually phased. different. Next, in order to temporally change the field in which the optical element 50 having coherent light is incident, the direction of incidence of the coherent light toward the illumination field LZ also changes temporally.

In consideration of the use of the illumination field LZ as a reference, coherent light is continuously incident on each field in the illumination field LZ, but the direction of incidence thereof is continuously changed as shown by an arrow A1 in FIG. As a result, the light of each pixel of the formed image is formed by the transmitted light of the spatial light modulator 30, and is projected onto the screen 15 while changing the optical path temporally as shown by an arrow A2 in FIG. The specific location.

From the above description, according to the use of the illuminating device 40 described above, the incident direction of the coherent light is temporally changed at each position on the screen 15 on which the image is displayed, and the change is impossible to be decomposed by the human eye. The speed, as a result, is observed in the human eye, and the scatter pattern of the coherent light that is not multiplexed is observed. Therefore, the overlap and averaging correspond to the speckle generated by each scattered pattern, and are observed by the observer. As a result, the observer who observes the image displayed on the screen 15 can make the speckles very effective.

Furthermore, the speckles that have been observed by humans are not only the speckle on the screen side caused by the scattering of coherent light on the screen 15, but also the coherence before being projected onto the screen. The scattering of light acts as a speckle on the side of the projection device. The speckle pattern generated on the side of the projection device is projected onto the screen 15 via the spatial light modulator 30, and is also recognized by the observer. However, according to the present embodiment, the coherent light is continuously scanned on the optical element 50, and then the coherent light that is incident on each field of the optical element 50 illuminates the illuminated area LZ in which the spatial light modulator 30 is superimposed. Global. That is, the optical element 50 is formed by a new wavefront different from the wavefront until the speckle pattern is formed, and is complicated and uniform, illuminated by the illumination field LZ, and further, the screen is illuminated by the spatial light modulator 30. 15. Through the new wavefront formed on such an optical element 50, the speckle pattern that occurs on the side of the projection device is not visible.

Incidentally, in the illumination device 40 described here, the scanning device 70 that changes the optical path of the light from the light source device 61 has: The first reflecting means 71 having the first reflecting surface 72 for reflecting the light from the light source 62 and the second reflecting means 73 having the second reflecting surface 74 for reflecting the light from the first reflecting surface 72 are provided. Next, the direction of the first reflecting surface 72 of the first reflecting device 71 can be changed in the specified movable range. Further, the direction of the second reflecting surface 74 of the second reflecting device 73 is within a predetermined movable range, and can be changed in synchronization with the fluctuation of the direction of the first reflecting surface 72. Therefore, it is not necessary to set the variable range of the directions of the respective reflecting surfaces 72, 74 to be large, and it is possible to change the optical path of the light emitted from the light source device 61 to a certain direction within a large range. In other words, according to the first reflecting device 71 and the second reflecting device 73 as described above, it is possible to save space and perform scanning in a wide area of the optical element 50.

In particular, in the illuminating device 40 described here, the first reflecting surface 72 and the second reflecting surface 74 are actuated such that the direction of the first reflecting surface 72 and the direction of the second reflecting surface 74 are parallel to each other. In this manner, the first reflecting surface 72 and the second reflecting surface 74 are maintained in parallel, and the direction in which the light proceeds from the second reflecting surface 74 is parallel to the direction in which the light incident on the first reflecting surface 72 is proceeding. On the other hand, the light source 62 of the light source device 61 is fixed in advance, and the light emitted from the light source 62 is constantly directed from the fixed direction toward the first reflecting device 71. In other words, the direction in which the light from the light source 62 incident on the first reflecting surface 72 is constant is constant. Therefore, the light reflected by the second reflecting surface 74 of the second reflecting device 73 advances in a certain direction. In particular, in this example, the light emitted from the illuminating device 60 is incident on the optical element 50 to be a light that becomes a parallel beam. The light path of the line.

As described above, the emission light from the irradiation device 60 is directed in a certain direction, and the processing of the emitted light, for example, transportation, is very easy. Further, unlike the case of diverging a light beam, the width of the optical path through which the light emitted from the irradiation device 60 passes is constant, and the fluctuation of the optical path width does not occur. Therefore, it is possible to effectively prevent the illumination device 40 from being enlarged. Further, the optical element 50 to which the light is irradiated from the irradiation device 60 guides the incident light as illumination light to the illumination target region LZ by bending the incident light toward each of the fields. Next, when the direction of incidence of the optical element 50 is constant, the design and manufacture of the optical element 50 can be simplified.

Further, as shown in FIGS. 1 and 2, the light emitted from the light source 62 has a certain point diameter. As shown in Fig. 9, even if the light having such a dot diameter is collimated using the deflecting element 97 having a lens effect, the direction of the optical axis cannot be controlled. In the deflecting element 97 shown in Fig. 9, it is impossible to direct all the light paths passing through the respective positions in the spot diameter in a desired direction. On the other hand, according to the scanning device 70 having the two reflecting surfaces 72 and 74 that are maintained in parallel, the optical path of the light incident on the first reflecting surface 72 and the second reflection can be made irrespective of the size of the spot diameter. The optical paths of the light reflected by plane 74 are parallel. That is, irrespective of the size of the spot diameter of the light emitted from the light source 62, the irradiation device 60 can illuminate the optical element 50 along the optical path of the light constituting the parallel beam. The light incident on the optical element 50 is adjusted by the optical element 50 with high precision to a predetermined direction. That is, according to the sweep described here The radiation device 70 and the illumination device 40 can illuminate the illumination area LZ with a very high precision from a desired direction.

Further, in the above-described scanning device 70, the first reflecting device 71 is centered on the first rotating shaft Ra1 inclined with respect to the normal direction of the first reflecting surface 72, and the first reflecting surface 72 is provided. Keep it rotatable. The second reflecting device 73 holds the second reflecting surface 74 so as to be rotatable about the second rotating shaft Ra2 that is inclined with respect to the normal direction of the second reflecting surface 74. According to such a first reflecting device 71 and the second reflecting device 73, the optical path can be largely changed by the compact configuration and simple control. In particular, by arranging the first reflecting device 71 and the second reflecting device 73 that are configured in the same manner, the first rotating surface Ra1 and the second rotating shaft Ra2 are parallel to each other, whereby the first reflecting surface 72 and the second reflecting surface can be formed. Face 74 is maintained in parallel. That is, with a simple and compact configuration and control, it is possible to perform very high-precision illumination of the illuminated field LZ from a certain direction.

Further, as understood from Fig. 2, in the case where the scanning device 70 shown in the drawing is used, the scanning path on the optical element 50 of the light incident from the irradiation device 60 onto the optical element 50 is circular. shape. That is, the injection position of the light on the optical element 50 is distributed over a wide range by using the scanning device 70 of a simple configuration, in other words, it can be greatly expanded. Thereby, the size of the incident angle of the illumination light toward each position of the illumination area LZ can be greatly expanded by effectively utilizing the size of the optical element 50. As a result, the speckle can be made unobtrusive.

Still, from the point of view of avoiding the enlargement of the device, It is preferable that the reflecting surfaces 72 and 74 which are rotatable about the axes Ra1 and Ra2 inclined with respect to the normal direction thereof are corresponding to the scanning path and have a circular shape. According to this example, it is possible to avoid the increase in size of the scanning device 70 while effectively utilizing the reflecting surfaces 72 and 74 of the scanning devices 71 and 73. Further, it is preferable that the second reflecting surface 74 of the second scanning device 73 is larger than the first reflecting surface 72 of the first scanning device 71. According to this example, the light of the optical path expanded by the first scanning device 71 can be efficiently reflected by the second scanning device 73. That is, the scanning device 70 can prevent the increase in size of the scanning device 70 while performing the above-described useful optical path control.

According to the present embodiment as described above, the illuminated area LZ can be illuminated with high precision from a desired direction.

Various modifications can be added to the above-described embodiments. Hereinafter, an example of the deformation will be described with reference to the drawings. In the following description of the drawings, the same reference numerals are used for the corresponding parts of the above-described embodiments, and the same reference numerals are used for the corresponding parts of the above-described embodiments, and the overlapping description will be omitted.

In the above-described embodiment, mainly in the scanning device 70 described with reference to FIG. 2, the reflecting surfaces 72 and 74 are rotatable about the rotation axes Ra1 and Ra2 inclined with respect to the normal direction thereof. . However, it is not limited to this example, and various changes can be made with respect to the scanning device 70. As an example, as in the scanning device 70 shown in FIG. 4, the first reflecting surface 77 of the first reflecting device 76 is opposite to the first reflecting surface 77. The first rotation axis Rb1 in which the incident surface 77 is parallel is rotatably centered, and the second reflection surface 79 of the second reflection device 78 is centered on the second rotation axis Rb2 parallel to the second reflection surface 79. It is better to rotate. The first reflecting device 76 has a first driving device 77a that drives the first reflecting surface 77, and the second reflecting device 78 has a second driving device 79a that drives the second reflecting surface 79. The first drive unit 77a and the second drive unit 79a are connected to the controller 75, and the controller 75 controls the operation. The first drive unit 77a and the second drive unit 79a can be controlled by the controller 75 in the same manner as the drive units 71c and 73c of the above-described embodiment.

Next, in the example shown in FIG. 4, the change in the direction of the first reflecting surface 77 can be synchronized with the change in the direction of the second reflecting surface 79. In this case, the above-described operational effects can be exhibited. Further, in the example shown in FIG. 4, the first reflecting surface 77 and the second reflecting surface 79 can be kept parallel, and in this case, the above-described operational effects can be exhibited. For example, the first rotation axis Rb1 of the first reflection surface 77 and the second rotation axis Rb2 of the second reflection surface 79 are parallel to each other, and the first rotation axis Rb1 of the first reflection surface 77 is centered. The angular range of the rotation is the same as the range of the angle at which the second rotation axis Rb2 of the second reflection surface 79 is rotatable, and the rotation period of the first reflection surface 77 and the rotation period of the second reflection surface 79 are In the same manner, the first reflecting surface 77 and the second reflecting surface 79 can be maintained in parallel with each other.

Further, in the above embodiment, the light source device 61 has a single light source 62. However, not limited to this example, as shown in FIG. 5, the light source device 61 may include a plurality of light sources. As an example, the light source The device 61 can also be constructed as a laser array comprising a plurality of laser sources. It is preferable that a plurality of light sources 66, 67, and 68 included in the light source device 61 generate light of mutually different wavelength bands, and light beams of the same wavelength band may be generated. When the light sources 66, 67, and 68 of the different wavelength bands are used, by using the additive color mixture, the illumination area LZ can be illuminated by the light of a color that cannot be generated by a single light source. Further, when the light sources 66, 67, and 68 generate light of a red wavelength band, light of a green wavelength band, or light of a blue wavelength band, the illumination area LZ can be illuminated with white light. On the other hand, when the light sources 66, 67, 68 of the same wavelength band are used, the illumination area LZ can be illuminated with a high output.

Incidentally, when the light from the light sources 91 and 92 arranged in parallel is irradiated to the conventional scanning device 95 shown in FIG. 9, the light from each of the light sources 91 and 92 is reflected by the reflecting device 96. After the same direction, it is incident on a different position on the deflecting element 97. In this case, the light from one light source 91 and the light from the other light source 92 are bent in a different direction by the deflecting element 97 that functions as a lens. Further, in the example shown in Fig. 9, the light emitted from one light source 91 and advanced to the respective fields of the deflecting element 97 corrects the optical path such that its optical axis is aligned in a certain direction; but is emitted from the other light source 92. The optical axis that advances to each field of the deflecting element 97 cannot be corrected to a certain direction by the deflecting element 97. Further, when the light sources 91 and 92 that emit different wavelength bands are used, chromatic aberration occurs under the deflecting element 97 using the lens function shown in FIG.

On the other hand, in the illuminating device 40 shown in FIG. 5, the first reflecting surface 72 and the second reflecting surface 74 are actuated such that the direction of the first reflecting surface 72 and the direction of the second reflecting surface 74 are parallel to each other. In this manner, the first reflecting surface 72 and the second reflecting surface 74 are maintained in parallel, and the direction in which the light proceeds from the second reflecting surface 74 is parallel to the direction in which the light incident on the first reflecting surface 72 is proceeding. Therefore, as shown in FIG. 5, light from the first light sources 66, 67, and 68 in which the different first light sources 66 are arranged in parallel can be reflected by the second reflecting surface 74 of the second reflecting device 73, and then proceed to a predetermined direction. Therefore, the light generated by each of the light sources 66, 67, and 68 can be made into an optical path of the light constituting the parallel light beam, and can be incident on the optical element 50. As a result, the light irradiated from the irradiation device 60 to the optical element 50 is corrected by the optical element 50 with high precision, and can be effectively utilized as illumination light for illuminating the illumination area LZ. Moreover, the scanning device 70 does not utilize the lens function, and there is no problem of chromatic aberration.

Further, in the above-described embodiment, the optical element 50 is illustrated as including the lens array 51, but is not limited thereto. As shown in FIG. 6, the optical element 50 can also include a hologram photographic element recording medium 57. In the example shown in Fig. 6, the light irradiated from the illumination device 60 and scanned on the hologram element recording medium 57 is applied to various fields on the hologram element recording medium 57 to satisfy the hologram element. The incident angle of the diffraction condition of the recording medium 57 is entered and the incident is performed. The light incident from the irradiation device 60 to the respective fields of the hologram element recording medium 57 is diffracted by the hologram element recording medium 57, respectively, and illuminates at least a part of the overlapping areas. In the example shown in FIG. 6, the slave illumination device 60 The light incident on each area of the hologram element recording medium 57 is diffracted by the hologram element recording medium 57, respectively, and illuminates the same illumination area LZ. For example, the light incident from the irradiation device 60 to the respective fields of the hologram element recording medium 57 can be superimposed on the illumination area LZ to reproduce the image of the scattered plate.

Further, in the above-described embodiment, the spatial light modulator 30 is disposed in the illuminated area LZ illuminated by the illumination device 40; however, it is not limited to this example. As an example, in the example shown in FIGS. 7 and 8, the incident surface 37a of the homogenizing optical system 37 is disposed in the illumination area LZ. That is, light from the illumination device 40 is incident on the homogenization optical system 37. The light incident on the homogenizing optical system 37 is propagated in the homogenizing optical system 37 while being totally reflected and then emitted from the homogenizing optical system 37. The illuminance at each position on the exit surface 37b of the uniform optical system 37 is uniformized. As the homogenizing optical system 37, for example, an integrating column can be used.

In the example shown in FIG. 7, the spatial light modulator 30 is disposed to directly face the exit surface 37b of the homogenizing optical system 37, and the spatial light modulator 30 is illuminated with a uniform amount of light. On the other hand, in the example shown in FIG. 8, the relay optical system 35 is disposed between the homogenizing optical system 37 and the spatial light modulator 30. The position of the spatial light modulator 30 is disposed by the relay optical system 35, and is a surface that is conjugate with the emitting surface 37b of the homogenizing optical system 37. For this reason, also in the example shown in Fig. 8, the spatial light modulator 30 is illuminated with a uniform amount of light.

Further, in the above embodiments, the photo is shown The bright device 40 is attached to the projection device 20 and the projection display device 10, but is not limited thereto, and can be applied to various applications such as an illumination device for a scanner.

Further, although some modifications of the above-described embodiments have been described, of course, it is also possible to apply a plurality of modifications as appropriate.

10‧‧‧Projection image display device

15‧‧‧ screen

20‧‧‧projection device

25‧‧‧In the field of illumination

30‧‧‧Space light modulator

40‧‧‧Lighting device

50‧‧‧Optical components

51‧‧‧ lens array

52‧‧‧ Concentrating lens

60‧‧‧ illumination device

61‧‧‧Light source device

62‧‧‧Light source

70‧‧‧Scanning device

71‧‧‧1st reflector

72‧‧‧1st reflecting surface

73‧‧‧2nd reflection device

74‧‧‧2nd reflecting surface

LZ‧‧‧ is illuminated

Ra1‧‧‧1st rotating shaft

Ra2‧‧‧2nd rotating shaft

Vp1‧‧‧1st imaginary face

Vp2‧‧‧2nd imaginary face

A2‧‧‧ arrow

Claims (22)

An illumination device comprising: an optical element; and an illumination device that irradiates light onto the optical element to be irradiated onto the optical element; the illumination device includes: a light source device that emits light; and has a first light that reflects light from the light source device a reflection surface, a first reflection device that changes a direction of the first reflection surface, and a second reflection surface that reflects light from the first reflection surface, and is synchronized with a change in a direction of the first reflection surface The second reflecting device that changes the direction of the second reflecting surface. An illumination device comprising: an optical element; and an illumination device that irradiates light onto the optical element to be irradiated onto the optical element; the illumination device includes: a light source device that emits light; and has a first light that reflects light from the light source device a reflection surface, a first reflection device that changes a direction of the first reflection surface, and a second reflection surface that reflects light from the first reflection surface, and is parallel to a direction of the first reflection surface The second reflecting device in which the direction of the second reflecting surface changes. The lighting device of claim 1 or 2, wherein The first reflecting surface is rotatable about an axis inclined with respect to a normal direction of the first reflecting surface; and the second reflecting surface is inclined with respect to a normal direction of the second reflecting surface The shaft can be rotated as a center. The illumination device according to claim 3, wherein a rotation axis of the first reflection surface is parallel to a rotation axis of the second reflection surface, and a direction of rotation about the rotation axis of the first reflection surface is The directions of the rotation of the second rotating surface of the reflecting surface are the same. The illuminating device according to claim 1 or 2, wherein the first reflecting surface is rotatable about an axis parallel to the first reflecting surface; and the second reflecting surface is associated with the second reflecting surface The surface is centered on a parallel axis and can be rotated. The illumination device according to claim 5, wherein the rotation axis of the first reflection surface is parallel to a rotation axis of the second reflection surface, and the rotation axis of the first reflection surface is rotatable about the rotation axis The angular range is the same as the angular range that can be rotated about the rotation axis of the second reflection surface. The illumination device of claim 1 or 2, wherein the second reflecting surface is larger than the first reflecting surface. The lighting device of claim 1 or 2, wherein The aforementioned light source device includes a plurality of light sources. An optical module that receives an optical module of light from a light source device, includes: a scanning device that changes a direction of light from the light source device; and an optical element that is configured to be irradiated with the scanning device Changing the light; the scanning device includes: a first reflecting surface that reflects light from the light source device; and a first reflecting device that changes a direction of the first reflecting surface; and has a first reflection from the first reflecting surface The second reflecting means that reflects the direction of the second reflecting surface in synchronization with the change in the direction of the first reflecting surface. An optical module that receives an optical module of light from a light source device, includes: a scanning device that changes a direction of light from the light source device; and an optical element that is configured to be irradiated with the scanning device a light that is changed; the scanning device includes: a first reflecting surface that reflects light from the light source device; and a first reflecting device that changes a direction of the first reflecting surface; A second reflecting device that reflects the light from the first reflecting surface and that reflects the direction of the second reflecting surface in parallel with the direction of the first reflecting surface. The optical module according to claim 9 or 10, wherein the first reflecting surface is rotatable about an axis inclined with respect to a normal direction of the first reflecting surface; and the second reflecting surface is a second reflecting surface The axis that is inclined with respect to the normal direction of the second reflecting surface is rotatable as a center. The optical module according to claim 11, wherein the rotation axis of the first reflection surface is parallel to the rotation axis of the second reflection surface, and the direction of rotation about the rotation axis of the first reflection surface is The direction in which the rotation axis of the second reflecting surface is centered is the same. The optical module according to claim 9 or 10, wherein the first reflecting surface is rotatable about an axis parallel to the first reflecting surface; and the second reflecting surface is the second reflecting surface The reflecting surface is centered on a parallel axis and can be rotated. The optical module according to claim 13, wherein the rotation axis of the first reflection surface is parallel to the rotation axis of the second reflection surface, and the rotation axis of the first reflection surface is rotatable about the rotation axis The angle range is centered on the aforementioned rotation axis of the second reflection surface The range of angles of the rotation is the same. The optical module according to claim 9 or 10, wherein the second reflecting surface is larger than the first reflecting surface. The optical module of claim 9 or 10, further comprising a spatial light modulator that is illuminated by light from the optical element. A scanning device includes a first reflecting surface that reflects incident light, and a shaft that is inclined with respect to a normal direction of the first reflecting surface, and holds the first reflecting surface as a rotatable a reflection device; and a second reflection surface that reflects light from the first reflection surface; and the axis that is inclined with respect to a normal direction of the second reflection surface is centered and the second reflection surface is held The second reflecting device that is rotatable; changes the direction of the second reflecting surface in synchronization with a change in the direction of the first reflecting surface. A scanning device includes a first reflecting surface that reflects incident light, and a shaft that is inclined with respect to a normal direction of the first reflecting surface, and holds the first reflecting surface as a rotatable a reflection device; and a second reflection surface that reflects light from the first reflection surface; and the axis that is inclined with respect to a normal direction of the second reflection surface is centered and the second reflection surface is held a second reflecting device that can be rotated; The second reflecting surface is maintained in parallel with the first reflecting surface. A projection device comprising: the illumination device according to claim 1 or 2; and a spatial light modulator illuminated by light from the illumination device. An optical element is an optical element used in the illumination device described in claim 1 or 2, and changes the optical path from the light irradiated by the irradiation device. The optical component of claim 20, wherein the optical component comprises a lens array having a plurality of component lenses. The optical component of claim 20, wherein the optical component comprises a hologram photographic element recording medium.