TWI595167B - Manufacturing method of porous aerostatic bearing - Google Patents

Description

Method for manufacturing porous pneumatic hydrostatic bearing

The present invention relates to a method of manufacturing a hydrostatic bearing, and more particularly to a method of manufacturing a porous aerostatic bearing.

Common porous materials are metals, ceramics, graphite, etc., and porous materials are characterized in that they form a large number of microchannels by internal supports, so that the hydrostatic bearings made of porous materials have uniform static pressure, High bearing capacity and high stability. However, since the gas permeability of a hydrostatic bearing made of a porous material is made of a porous material, the number and size of the microchannels are determined and difficult to control, so how to effectively Adjusting the gas permeability of porous pneumatic hydrostatic bearings through the added throttling structure is the goal of the current research and development of porous pneumatic hydrostatic bearings.

Please refer to Taiwan Patent Application No. 102112771, "Manufacturing Method and Structure of Porous Element with Double Micro-throttle Layer", which is provided with a hole layer on the surface to be sealed of the porous carrier by a glue sealing process The sealing layer seals the opening of the microporous channel, and then is processed through a through hole, and a plurality of through holes are formed in the through hole region of the sealing layer, and the through holes penetrate through the sealing layer and are connected to the plurality of through holes. Forming the microporous channels under the via region to form a double micro-throttle layer by the porous carrier plate having the microporous channels and the sealing layer having the microporous channels, when the fluid passes through the The microporous channels and the through holes can effectively improve rigidity and stability. However, the colloid applied in the encapsulation process is a fluid, so that when the colloid is applied to the porous carrier, the colloid will penetrate into the microporous channel of the porous carrier, and the depth of the colloid penetrating into the microporous channel is difficult to control. It will lead to the difficulty of subsequent through hole processing. In addition, since the working surface of the porous pneumatic hydrostatic bearing needs to be kept flat, in the prior art, the sealing layer must be leveled by diamond cutting after the sealing process is completed. The surface, the manufacturing process is quite complicated, and it is difficult to mass-produce the porous aerostatic bearing.

The invention attaches a sealing film to a porous carrier plate, and forms an opening on the sealing film as a throttling structure of the porous carrier plate, wherein the sealing film penetrates into the depth of the porous carrier plate because the sealing film has been preformed. The method of relatively coating is shallow and easy to control, so as to facilitate the subsequent process of forming the opening, and the flatness of the working surface of the completed porous aerostatic bearing is controlled by the surface of the porous carrier, so it can be porous Excellent flatness is formed in the manufacturing process of the carrier, and no additional grinding process is required, which is advantageous for mass production of porous pneumatic hydrostatic bearings.

A method of manufacturing a porous aerostatic bearing of the present invention comprises: providing a porous carrier having an upper surface, a lower surface, and a plurality of microchannels, the microchannels communicating with the upper surface and the a lower surface; a sealing film attached to the upper surface of the porous carrier, the sealing film covering the microchannels communicating with the upper surface; and a plurality of openings formed in the sealing film The membrane is sealed and the openings reveal the microchannels.

The penetration depth of the permeation portion of the porous carrier plate by the sealing film is shallow and easy to control, and the energy required for forming the openings in the sealing film can be greatly reduced, and no additional grinding is required. The process can also maintain the smoothness of the working surface, and can reduce the manufacturing cost of the porous pneumatic hydrostatic bearing and facilitate mass production.

1 is a flow chart of a method 10 for manufacturing a porous aerostatic bearing according to a first embodiment of the present invention, which includes "providing a porous carrier 11" and "attaching a sealing film 12", The steps of "hot baking step 13" and "forming the opening 14 in the sealing film".

Referring to FIGS. 1 and 2, a porous carrier 100 is provided in the step 11. The porous carrier 100 has an upper surface 110, a lower surface 120, and a plurality of microchannels 130. The microchannels 130 communicate with the upper substrate 130. The surface 110 and the lower surface 120 allow the airflow to flow from the lower surface 120 of the porous carrier 100, and then flow out from the upper surface 110 via the microchannels 130, wherein the porous carrier 100 may be selected from metal, Ceramic or graphite. Next, referring to FIGS. 1 and 3, in step 12, a sealing film 200 is attached to the upper surface 110 of the porous carrier 100 by vacuum bonding film technology in a vacuum chamber (not shown). The sealing film 200 covers the microchannels 130 that communicate with the upper surface 110, so that the microchannels 130 exposed on the upper surface 110 of the porous carrier 100 are blocked, and the airflow cannot be from the upper surface at this time. 110 flows out, wherein the material of the sealing film 200 may be selected from a film of polyphenylene sulfide (PPS), polyamine (PA), polyamidimide (PAI) or polyimine (PI).

Referring to FIG. 3, in step 12, when the sealing film 200 is attached to the upper surface 110 of the porous carrier 100, one of the penetrating portions 210 of the sealing film 200 penetrates into the microchannels 130, but Since the sealing film 200 is a pre-formed dry film, the penetration of the permeable portion 210 of the sealing film 200 into the microchannels 130 is not deep and easy to control. In the embodiment, the sealing film 200 has a a first thickness T1, the permeable portion 210 has a second thickness T2, and the first thickness T1 of the sealing film 200 is between 2 μm and 50 μm, and between the first thickness T1 and the second thickness T2 The ratio is between 100:2 and 100:50.

Referring to FIG. 1 , a hot baking step is performed in step 13 to increase the hardness of the sealing film 200 to make the sealing film 200 more wear resistant, wherein a hot baking time in the hot baking step is 10 Between minute and 240 minutes, a hot baking temperature is between 120 ° C and 300 ° C to volatilize and set the solvent in the sealing film 200.

Referring to FIGS. 1 and 4, a plurality of openings 300 are formed in the sealing film 200 in the step 14. The openings 300 extend through the sealing film 200, and the openings 300 expose the microchannels 130 so that the airflow can be After the lower surface 120 of the porous carrier 100 flows in, through the microchannels 130 and the openings 300, the microchannels 130 of the porous carrier 100 and the sealing film 200 can be opened. The hole 300 constitutes a double micro-throttle structure, and the air permeability of the porous aerostatic bearing is controlled by the number, aperture, arrangement and opening shape of the openings 300. In the present embodiment, the openings 300 of the sealing film 200 are formed by laser drilling, and the thickness of the permeating portion 210 of the sealing film 200 of the present invention penetrating into the porous carrier 100 is easily controlled. Therefore, in the present invention, the number of laser drilling holes required to form the openings 300 is small, and the number of laser drilling holes required by the present invention can be reduced to 1/5 compared with the prior art. That is, the energy required to form the openings 300 can be greatly reduced, and the manufacturing cost can be reduced.

Referring to FIG. 5, a flow chart of a method 10 for manufacturing a porous aerostatic bearing according to a second embodiment of the present invention includes "providing a porous carrier plate 11" and "forming a hole 14 in the sealing film". The steps of "attaching the sealing film 12" and "hot baking step 13".

The second embodiment of the present invention differs in that the step 14 of forming the openings 300 in the sealing film 200 is such that the step 14 is not necessarily limited to laser drilling before the step 13 of attaching the sealing film 200. The openings 300 are formed in a manner that can be formed by developing etching, which can further reduce the manufacturing cost. The process parameters therein are the same as those in the first embodiment, and therefore will not be described again.

Please refer to FIGS. 6, 7, and 8 for a flow chart of a second embodiment of the present invention. Referring to FIGS. 5 and 6, a porous carrier 100 is provided in step 11. The porous carrier 100 has An upper surface 110, a lower surface 120 and a plurality of microchannels 130 communicate with the upper surface 110 and the lower surface 120. Next, referring to FIGS. 5 and 7, a sealing film 200 is provided in step 14, and a plurality of openings 300 are formed in the sealing film 200, and the openings 300 penetrate the sealing film 200. Next, referring to FIGS. 5 and 8, the sealing film 200 is attached to the porous carrier 100 in steps 12 and 13, respectively, and a hot baking step is performed, when the sealing film 200 is attached to the porous carrier. When the upper surface 110 of the sealing plate 100 is infiltrated into the microchannels 130, the openings 300 of the sealing film 200 and the microchannels 130 of the porous carrier 100 are ensured. The plurality of hot-bake steps are used to increase the hardness of the sealing film 200 to make the sealing film 200 more wear-resistant.

In the present invention, the penetration of the sealing film 200 into the porous carrier 100 is shallow and easy to control, and the energy required for forming the openings 300 in the sealing film 200 can be greatly reduced, and An additional grinding process can maintain the smoothness of the working surface, which can reduce the manufacturing cost of the porous pneumatic hydrostatic bearing and facilitate mass production.

The scope of the present invention is defined by the scope of the appended claims, and any changes and modifications made by those skilled in the art without departing from the spirit and scope of the invention are within the scope of the present invention. .

10 Method for manufacturing porous aerostatic bearing 11 Providing porous carrier plate 12 Attaching sealing film 13 Hot baking step 14 forming an opening in the sealing film 100 Porous carrier plate 110 Upper surface 120 Lower surface 130 Microchannel 200 Sealing film 210 Permeate portion 300 opening T1 first thickness T2 second thickness

Fig. 1 is a flow chart showing a method of manufacturing a porous gas static pressure bearing according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view showing the porous aerostatic bearing according to the first embodiment of the present invention. Figure 3 is a cross-sectional view showing the porous aerostatic bearing according to the first embodiment of the present invention. Figure 4 is a cross-sectional view showing the porous aerostatic bearing according to the first embodiment of the present invention. Figure 5 is a flow chart showing a method of manufacturing a porous gas static pressure bearing according to a second embodiment of the present invention. Figure 6 is a cross-sectional view showing the porous aerostatic bearing according to a second embodiment of the present invention. Figure 7 is a cross-sectional view showing the porous aerostatic bearing according to a second embodiment of the present invention. Figure 8 is a cross-sectional view showing the porous aerostatic bearing according to a second embodiment of the present invention.

10 Manufacturing method of porous aerostatic bearing 11 Providing a porous carrier 12 Attaching a sealing film 13 Hot baking step 14 Opening a hole in the sealing film

Claims (8)

A method for manufacturing a porous gas static pressure bearing, comprising: providing a porous carrier plate having an upper surface, a lower surface, and a plurality of microchannels, wherein the microchannels communicate the upper surface and the lower surface; a sealing film on the upper surface of the porous carrier, the sealing film is attached to the upper surface of the porous carrier by a vacuum bonding film technology in a vacuum chamber, and the sealing film covers the upper surface a microchannel; and forming a plurality of openings in the sealing film, the openings penetrating the sealing film, and the openings reveal the microchannels. The method for producing a porous aerostatic bearing according to claim 1, further comprising a heat baking step to increase the hardness of the sealing film. The method for manufacturing a porous aerostatic bearing according to claim 2, wherein a hot roasting time in the hot roasting step is between 10 minutes and 240 minutes, and a hot roasting temperature is between 120 ° C and Between 300 ° C. The method for manufacturing a porous aerostatic bearing according to the above aspect of the invention, wherein the material of the sealing film is selected from the group consisting of polyphenylene sulfide (PPS), polyamidoamine (PA), and polyamidamine. (PAI) or polyimine (PI). The method of manufacturing a porous aerostatic bearing according to the first aspect of the invention, wherein, when the sealing film is attached to the upper surface of the porous carrier, a permeated portion of the sealing film penetrates into the microchannels in. The method of manufacturing a porous aerostatic bearing according to claim 5, wherein the sealing film has a first thickness, the permeable portion has a second thickness, the first thickness and the second thickness The ratio between degrees is between 100:2 and 100:50. The method of manufacturing a porous aerostatic bearing according to claim 6, wherein the first thickness of the sealing film is between 2 μm and 50 μm. The method of manufacturing a porous aerostatic bearing according to the first aspect of the invention, wherein the openings of the sealing film are formed by laser drilling or lithography.