TWI594854B - A glovebox monitoring and control system and its monitoring and control method - Google Patents

Description

Glove box monitoring and control system and monitoring and control method thereof

The invention relates to a glove box monitoring and control system and a control method thereof, in particular to a method and a system device for fully automatic monitoring and control of a glove box for high vacuum and deoxidizable water removal.

Glove box, or anaerobic console, which is an environment that provides anhydrous (H ₂ O), oxygen-free (O ₂ ), organic-free gas, and vacuum, filling high-purity inert gas into the hand. Inside the box, and circulate the active material in it, and isolate the equipment directly in contact with the outside personnel, so that the materials placed in the glove box can be stored in the environment of moisture, oxygen and vacuum, or experiment, and the personnel can be ensured. The material can be tested and operated safely and without contact.

The above glove box is mainly composed of a glove box body, a vacuum system, a gas circulation exchange system and a control system, and the glove box body is provided with a front compartment (or a transfer box) and an isolation glove; thereby, a glove can be provided Use insulated gloves in an anhydrous, oxygen-free, vacuum environment.

However, since the conventional glove box has a control system, it controls the vacuum system and the gas circulation exchange system in a semi-automatic manner. It must operate the vacuum system or gas circulation by gradually starting and setting parameters. The exchange system starts the operation, so that the glove box must wait for the next stage parameter setting to complete the vacuum or gas cycle exchange, and the experiment process is interrupted, resulting in the inconvenience of use and operation; The conventional glove box is only equipped with a set of gas circulation exchange system. When the inert gas in the gas circulation exchange system is used, the operation must be stopped. After the inert gas is added or replaced, the operation can be started again. Inconvenience is missing.

The object of the present invention is to improve the above-mentioned defects, and to provide a method and system device for fully automatic monitoring and control of a glove box for high vacuum and deaerator.

In order to achieve the above object, the glove box monitoring and control method of the present invention comprises the following steps: selecting monitoring control or parameter setting: selecting to perform monitoring function or setting monitoring parameters; selecting monitoring function: selecting to perform box cleaning, vestibule Monitoring functions such as cleaning, recycling, regeneration, hydrogen storage tank removal or hydrogen storage; control parameter setting: the user can set various control parameters when the glove box is monitored according to the operation requirements; instrument parameter setting: for the designer to monitor the demand Set the detection range of each meter when the glove box is monitored; the box body is cleaned: the glove box is vacuumed and then filled with inert gas to quickly reduce the water and oxygen content in the box, and repeatedly executed repeatedly, so that The concentration of water and oxygen in the glove box reaches the set micro-oxygen water concentration.

Front hall clearing: It is used to remove the air in the front hall and the connecting pipe of the glove box to achieve the set vacuum and balance the pressure between the front hall and the box.

Cycle-removal regeneration: use two sets of recyclable alternate cleaning devices for cyclic cutting When one of the cleaning devices loses the cleaning ability and then performs the regeneration operation, the other cleaning device can continue to perform the cleaning operation, so that the automatic switching is performed so that the two cleaning devices alternately perform the cycle cleaning and the recycling, thereby improving the water oxygen of the glove box. Clear efficiency.

Hydrogen storage tank removal: The gas in the hydrogen storage tank is pumped out to reach the set vacuum degree, so as to facilitate the subsequent operation of storing and releasing hydrogen gas.

Hydrogen storage: Hydrogen is introduced into the hydrogen storage tank of the glove box from the hydrogen source according to the set time, and the hydrogen concentration is detected in the hydrogen storage process.

Through the above steps, the present invention provides a method for fully automatic monitoring and control of a glove box for high vacuum and deaerator dewatering.

10‧‧‧Gift box

11‧‧‧ cabinet

12‧‧‧ front hall

13‧‧‧Exhaust pipe

14‧‧‧Exclusion device

15‧‧‧ Pressure Sensor

101‧‧‧First connecting pipe

102‧‧‧Second connection tube

103‧‧‧ Third connecting pipe

104‧‧‧fourth connecting pipe

105‧‧‧ fifth connecting tube

106‧‧‧ sixth connecting tube

111‧‧‧balance valve

112‧‧‧First supplementary valve

113‧‧‧First rear valve

114‧‧‧Second rear valve

115‧‧‧Opening valve

116‧‧‧ third rear valve

20A‧‧‧First reaction tank

20B‧‧‧Second reaction tank

201‧‧‧First cycle tube

202‧‧‧Second circulation tube

203‧‧‧ Third cycle tube

204‧‧‧fourth circulation tube

205‧‧‧ fifth cycle tube

206‧‧‧ Sixth circulation tube

207‧‧‧ seventh cycle tube

208‧‧‧ eighth cycle tube

211‧‧‧First inlet valve

212‧‧‧Second supplementary valve

213‧‧‧First exhaust valve

214‧‧‧First exit valve

215‧‧‧Second inlet valve

216‧‧‧ third supplementary valve

217‧‧‧Second exhaust valve

218‧‧‧Second outlet valve

22A‧‧‧First hydrogen delivery tube

22B‧‧‧Second hydrogen delivery tube

221‧‧‧First inlet valve

222‧‧‧Second inlet valve

30‧‧‧Sampling box

31‧‧‧Connecting pipe

32‧‧‧First sampling tube

321‧‧‧Oxygen sampling valve

33‧‧‧Oxygen concentration detector

34‧‧‧Second sampling tube

341‧‧‧Water sampling valve

35‧‧‧Water Concentration Detector

40‧‧‧Nitrogen source

50‧‧‧ Hydrogen source

60‧‧‧vacuum pump

70‧‧‧Circulating pump

80‧‧‧Exclusion device

90‧‧3% hydrogen source

Figure 1 is a flow diagram of the process of the present invention.

Figure 2 is a schematic illustration of the set control parameters of the present invention.

Figure 3 is a schematic diagram of the parameters of the instrument set by the present invention.

Figure 4 is a system diagram of the present invention.

Figure 5 is a system diagram of the present invention, and a schematic diagram of the action of clearing the front hall (1).

Figure 6 is a system diagram of the present invention, and a schematic diagram of the action of clearing the front hall (2).

Figure 7 is a system diagram of the present invention, and a schematic diagram of the action of clearing the front hall (3).

Figure 8 is a system diagram of the present invention, and a schematic diagram of the operation of the box cleaning (1).

Figure 9 is a system diagram of the present invention, and a schematic diagram of the action of the box cleaning (2).

Figure 10 is a system diagram of the present invention, and a schematic diagram of the operation of the box cleaning (3).

Figure 11 is a system diagram of the present invention, and a schematic diagram of the operation of the box cleaning (4).

Figure 12 is a system diagram of the present invention, and a schematic diagram of the operation of hydrogen storage.

Figure 13 is a system diagram of the present invention, and a schematic diagram of the operation of the hydrogen storage tank removal (1).

Figure 14 is a system diagram of the present invention, and a schematic diagram of the operation of the hydrogen storage tank removal (2).

Figure 15 is a system diagram of the present invention, and a schematic diagram of the operation of the cycle regeneration (1).

Figure 16 is a system diagram of the present invention, and a schematic diagram of the operation of the cycle regeneration (2).

Figure 17 is a system diagram of the present invention, and a schematic diagram of the operation of the cycle regeneration (3).

Figure 18 is a system diagram of the present invention, and a schematic diagram of the operation of the cycle regeneration (4).

Figure 19 is a system diagram of the present invention, and a schematic diagram of the operation of the cycle regeneration (5).

Figure 20 is a system diagram of the present invention, and a schematic diagram of the operation of the cycle regeneration (6).

Figure 21 is a flow chart showing the cycle cleaning and regeneration function of the present invention.

Regarding the technical means and methods used in the present invention for achieving the purpose, the flow chart shown in FIG. 1 , the parameter setting diagrams of the second and third figures, the system diagram of the fourth figure, and the fifth to twenty-first figures are provided. The schematic diagram of the monitoring control is as follows: As shown in the flowchart of FIG. 1 , the glove box monitoring method of the present invention comprises the following steps: selecting monitoring control or parameter setting: selecting to perform monitoring function or setting monitoring parameters.

Select monitoring function: You can choose to perform monitoring functions such as front hall cleaning, cabinet cleaning, cycle cleaning regeneration, hydrogen storage tank removal or hydrogen storage.

Control parameter setting: Users can set various control parameters when the glove box is monitored according to the operation requirements. As shown in Figure 2, it includes the setting of the vacuum removal degree of the box and the box clearing. The setting of the number of times, the setting of the vacuum in the front hall, the setting of the front door balancing valve opening time (T1), the setting of the vacuum pump duration (T2) when the valve is closed after clearing, and the cumulative working time of the cycle clearing system switching (T3) The setting of the regeneration system, the setting of the regeneration system demand temperature, the setting of the combustion gas entry time (T4) when the regeneration system temperature arrives, the setting of the purge valve opening time (T5) when the regeneration system T4 arrives, and the water concentration at which the circulation system is stopped. Setting, setting the oxygen concentration for stopping the circulation system, setting the circulating pump per working time (T6), setting the rest time of the circulating pump (T7), and setting the waiting time (T8) before detecting the vacuum pump pressure The setting of the hydrogen storage tank pressurization time (T9).

Instrument parameter setting: The designer can set the detection parameter range of each monitoring instrument of the glove box according to the monitoring requirements. As shown in Fig. 3, it includes the setting of the temperature sensing range of the first cleaning system and the temperature sensing of the second cleaning system. Range setting, setting of temperature sensing range inside glove box, setting of primary humidity sensing range, setting of low humidity sensing range, setting of low oxygen concentration sensing range, setting of vacuum pump vacuum pressure sensing range and hydrogen explosion The setting of the index sensing range.

In the above preferred embodiment, the meter parameter setting step further includes the step of password checking as shown in FIG. 1 , and the password is required to enter, and the step of setting the meter parameter can be performed after confirming the password is correct. The error returns to the step of monitoring control or parameter setting selection.

Box cleaning: used to vacuum the glove box and then fill the tank with inert gas to quickly reduce the water and oxygen content in the box, and repeatedly perform multiple times, so that the concentration of water and oxygen in the glove box is set to a minimum. Oxygen micro water concentration.

Front hall clearing: used to remove air from the front hall of the glove box and the connected pipes. Make it reach the set vacuum and balance the pressure between the front hall and the cabinet.

Cycle clearing and recycling: Two sets of recyclable alternate cleaning devices are used for cyclic switching. When one of the cleaning devices loses the cleaning ability and then performs the regeneration operation, the other cleaning device can continue to perform the cleaning operation, so that the automatic switching can be performed to clear the two. The device alternately performs cycle cleaning and circulation regeneration to improve the water oxygen removal efficiency of the glove box.

Hydrogen storage tank removal: The gas in the hydrogen storage tank is pumped out to reach the set vacuum degree, so as to facilitate the subsequent operation of storing and releasing hydrogen gas.

Hydrogen storage: Hydrogen is introduced into the hydrogen storage tank of the glove box from the hydrogen source according to the set time, and the hydrogen concentration is detected in the hydrogen storage process.

As shown in FIG. 4, the glove box control system of the present invention comprises a glove box body 10, a first reaction tank 20A, a second reaction tank 20B and a sampling box 30; wherein: the glove box body 10 (please Referring to FIG. 4, it is a sealed box 11 having a front hall (transfer box) 12 on one side of the box, and a first connecting tube 101 between the box 11 and the front hall (transport box) 12. The connecting pipe 101 is provided with a balancing valve 111; the casing 11 is connected to the nitrogen source 40 by a second connecting pipe 102, and the second connecting pipe 102 is provided with a first supplementary valve 112; A third connecting pipe 103 is disposed between the 11 and the front hall (transmission box). The third connecting pipe 103 is provided with a first rear valve 113 and a second rear valve 114. The first hydrogen storage body is disposed in the casing 10. The tank 11A and the second hydrogen storage tank 11B are connected to the first hydrogen storage tank 11A and the second hydrogen storage tank 11B by a fourth connecting pipe 104, and a hydrogen source 50 and a vacuum pump 60. The fourth connecting pipe 104 is connected to A shut-off valve 115 is disposed between the hydrogen source 50 and the first hydrogen storage tank 11A and the second hydrogen storage tank 11B. The fourth connecting pipe 104 is between the vacuum pump 60 and the first hydrogen storage tank 11A and the second hydrogen storage tank 11B. After the valve 116 has a third, at the same time, the third connecting pipe 103 and the fourth connecting tube 104 is provided between a fifth connecting tube 105, The fifth connecting pipe 105 is disposed between the first rear valve 113 and the second rear valve 114 of the third connecting pipe 103, and correspondingly disposed between the third rear valve 116 of the fourth connecting pipe 104 and the vacuum pump 60, and The vacuum pump 60 is connected to a discharge pipe 13 . The other end of the discharge pipe 13 is connected to the discharge device 14 . Further, the casing 11 is connected to a sixth connecting pipe 106 . The other end of the sixth connecting pipe 106 is connected to a circulation pump 70 .

In the above preferred embodiment, the casing 11 is connected to a pressure indicator 15 which indicates whether the positive pressure in the casing 11 is sufficient.

The first reaction tank 20A (see FIG. 4) is for reacting moisture and oxygen in the adsorption tank 10, and the first reaction tank 20A is connected to the circulation pump 70 by the first circulation pipe 201, and the circulation pump 70 is connected to the tank 11 by a sixth connecting pipe 106. The first circulating pipe 201 is provided with a first inlet valve 211. Further, the first reaction tank 20A is provided with a second circulating pipe 202. The second cycle The tube 202 is connected to the nitrogen source 40, and the second circulation tube 202 is provided with a second supplementary valve 212. Further, the first reaction tank 20A is provided with a third circulation tube 203, and the third circulation tube 203 is connected and restored. a gas exhausting device 80, a third exhaust pipe 203 is provided with a first exhaust valve 213; in addition, the first reaction tank 20A is connected to the sampling tank 30 by a fourth circulation pipe 204, and the fourth circulating pipe 204 is connected A first outlet valve 214 is provided; further, the second circulation pipe 202 is connected to the first hydrogen delivery pipe 22A, the first hydrogen delivery pipe 22A is connected with a 3% hydrogen source 90, and the first hydrogen delivery pipe 22A A first inlet valve 221 is provided on the upper side.

The second reaction tank 20B (see FIG. 4) is for reacting moisture and oxygen in the adsorption tank 10, and the second reaction tank 20B is connected to the circulation pump 70 by the fifth circulation pipe 205, the fifth A second inlet valve 215 is disposed on the circulation pipe 205; further, the second reaction tank 20B is provided with a sixth circulation pipe 206 connected to the nitrogen source 40, and the sixth cycle The tube 206 is provided with a third supplemental valve 216; further, the second reaction tank 20B is provided with a seventh circulation pipe 207, and the seventh circulation pipe 207 is connected with a reducing gas removing device 80, and the seventh circulating pipe 207 is provided with a second exhaust valve 217; in addition, the second reaction tank 20B is connected to the sampling box 30 by an eighth circulation pipe 208, and a second outlet valve 218 is disposed on the eighth circulation pipe 208; The circulation pipe 206 is connected to a second hydrogen delivery pipe 22B. The second hydrogen delivery pipe 22B is connected with a 3% hydrogen source 90, and the second hydrogen delivery pipe 22B is provided with a second inlet valve 222.

The sampling box 30 (refer to FIG. 4) is connected to the first reaction tank 20A and the second reaction tank 20B, and the sampling box 30 is connected to the tank 11 by a connecting pipe 31; The tank 30 is connected to an oxygen concentration detector 33 via a first sampling tube 32. The sampling box 30 is connected to a moisture concentration detector 35 via a second sampling tube 34. The first sampling tube 32 and the second sampling tube are connected. An oxygen sampling valve 321 and a moisture sampling valve 341 are respectively disposed on the 34.

In a preferred embodiment, the second circulation pipe 202 and the sixth circulation pipe 206 can be connected to a gas pipe 209 to form a three-way pipe. The gas pipe 209 is connected to the nitrogen source 40, so that the second supplementary valve 212 and the second The three supplemental valves 216 are controlled to control the input of nitrogen in the nitrogen source 40.

With the above device, the system includes the functions of vestibular cleaning, tank cleaning, circulation cleaning, hydrogen storage tank removal and hydrogen storage according to the control method, wherein:

(1) Front hall clearing: When the front hall clearing function is selected, the second rear valve 114 opens and activates the vacuum pump 60, and the air in the front hall 12 is passed through the third connecting pipe 103 and the second rear valve 114 by the vacuum pump 60. The fifth connecting pipe 105, the discharging pipe 13 to the discharging device 14 are discharged (as shown in FIG. 5), and a vacuum is formed inside the front hall 12. After the set time (T1) of the front hall balancing valve is opened, the system will The vacuum degree of the vacuum pump 60 is detected to determine whether the vacuum inside the front hall 12 has reached the vacuum level set in the front hall, and the vacuum degree inside the current hall 12 reaches the setting. When the vacuum is constant, the second rear valve 114 is closed and the vacuum pump 60 is continuously operated for the set duration (T2) (as shown in FIG. 6), then the vacuum pump 60 is turned off and the balancing valve 111 is opened (as shown in FIG. 7). Show), after the set time (T1) of the front hall balance valve is turned on, the front hall is cleared, and then the system is in the standby state.

(2) Box cleaning: When the box cleaning function is selected, the first rear valve 113 of the third connecting pipe 103 and the vacuum pump 60 are opened, and the first inlet valve 211, the first outlet valve 214, and the second inlet valve are also opened. 215, a second outlet valve 218 (as shown in FIG. 8), forming a vacuum inside the casing 11, and the first circulation pipe 201, the fourth circulation pipe 204, the fifth circulation pipe 205 and the eighth circulation pipe 208 After the moisture and oxygen are removed, the system starts to detect the vacuum degree of the vacuum pump 60 after the waiting time (T8) before detecting the pressure of the vacuum pump, which is the vacuum degree in the tank 11, and the degree of vacuum in the tank 11 After the set box clear vacuum is reached, the first rear valve 113 is closed and the vacuum pump 60 is continuously operated for the set duration (T2) (as shown in FIG. 9), and the vacuum pump 60 is continuously operated (T2). After the arrival, the vacuum pump 60 is turned off and the replenishing valve 112 is turned on, so that the nitrogen stored in the nitrogen source 40 can be remitted into the tank 11 by the second connecting pipe 102 (as shown in FIG. 10), so that the inside of the casing 11 is formed. In the pressure state, when the positive pressure in the tank 11 reaches the required pressure, the supplementary valve 112 is closed to stop the input. Gas, that is, complete the box cleaning; when the number of times of setting the box is more than two, the cycle of the box clearing is restarted until the required number of times is reached; and when the set number of clearing is completed, the The first inlet valve 211, the first outlet valve 214, the second inlet valve 215, and the second outlet valve 218 are closed, so that the system is in a standby state. At the same time, the system processes the positive pressure monitoring of the tank 11 in parallel. When the positive pressure in the casing 11 is insufficient, the pressure indicator 15 will display a warning, and the system will open the supplementary valve 212 to allow the nitrogen in the nitrogen source 40 to be input into the casing 11 to maintain a positive pressure state (as shown in FIG. 11). Show), when the positive pressure in the tank 11 is sufficient, then The makeup valve 212 is closed to stop the nitrogen input, and the pressure indicator 15 stops displaying the warning.

(3) Hydrogen storage: When the hydrogen storage function is selected, as shown in Fig. 12, the breaking valve 115 is opened, so that the hydrogen of the hydrogen source 50 can be input into the first storage in the tank 11 by the fourth connecting pipe 104. The hydrogen tank 11A and the second hydrogen storage tank 11B start to count, and after reaching the set hydrogen storage tank pressurization time (T9), the opening and closing valve 115 is closed to stop the hydrogen input, that is, the first hydrogen storage tank 11A and the second are completed. The hydrogen storage operation of the hydrogen storage tank 11B, and then the system is in a standby state.

(4) Hydrogen storage tank removal: When the hydrogen storage tank removal function is selected, as shown in Fig. 13, the third rear valve 116 and the vacuum pump 60 are opened, so that the vacuum pump 60 will remain in the first hydrogen storage tank 11A and the first The hydrogen in the second hydrogen storage tank 11B is removed through the fourth connecting pipe 104 and the discharging pipe 13 to the removing device 14. After the waiting time (T8) before the pressure of the vacuum pump is detected, the system detects the pressure of the vacuum pump 60 to determine the box. The degree of vacuum in the body 11 is such that after the vacuum in the tank 11 reaches the set tank vacuum, the third rear valve 116 is closed and the vacuum pump 60 continues to operate for the set duration (T2) (Fig. 14). As shown in the figure, after the time when the vacuum pump 60 continues to operate, the vacuum pump 60 is turned off, and the hydrogen in the first hydrogen storage tank 11A and the second hydrogen storage tank 11B can be eliminated to complete the hydrogen storage tank cleaning operation.

(5) Cycle cleaning and regeneration: Since the system has the first reaction tank 20A and the second reaction tank 20B, when the cycle clearing regeneration function is selected, the system first performs the cycle clearing operation with the first reaction tank 20A, which will open the first The inlet valve 211, the first outlet valve 214, the sampling tank 30 and the oxygen concentration detector 33, the oxygen concentration detector 35 connected to the oxygen sampling valve 321 and the moisture sampling valve 341 (as shown in Fig. 15), and start the cycle The pump 70 causes the moisture and oxygen in the tank 11 to be sucked by the circulation pump 70 through the sixth connecting pipe 106 and the first circulating pipe 201 to be adsorbed by the first reaction tank 20A to remove the inside of the casing 11 and the sixth. Connecting tube 106, oxygen in first circulation tube 201 and Moisture, at the same time, when the set circulating pump 70 reaches the working time (T6), the circulation pump 70, the first inlet valve 211, the first outlet valve 214, the oxygen sampling valve 321 and the moisture sampling valve 341 are closed, and the timing is started. After the circulator pump 70 reaches the rest time (T7), the system detects the oxygen concentration of the first sampling tube 32 and the second sampling tube 34 by the oxygen concentration detector 33 and the moisture concentration detector 35. Water concentration (as shown in Figure 16). If the oxygen concentration and the water concentration have reached the set concentration at which the circulation system stops working, the first reaction tank 20A completes the cleaning operation; and if the oxygen concentration and the water concentration have not reached the set concentration, the first reaction must be restarted again. The cycle cleaning operation of the tank 20A, after the oxygen concentration and the water concentration reach the set value, the cleaning operation is completed, and then the system is put into a standby state. And after a plurality of cycles, and has reached the cumulative working time (T3) for performing the cycle clearing system switching, the oxygen concentration and the water concentration still fail to reach the set concentration, which indicates that the agent in the first reaction tank 20A has The cleaning function can no longer be provided by the crucible. At this time, the system will start the second reaction tank 20B for the circulation cleaning operation, and the first reaction tank 20A enters the recycling operation.

When the second reaction tank 20B enters the circulation cleaning operation, as shown in FIG. 17, it opens the second inlet valve 215, the second outlet valve 218, the sampling tank 30 and the oxygen concentration detector 33, and the moisture concentration detector. 35 connected oxygen sampling valve 321 and moisture sampling valve 341, and start circulating pump 70, so that the moisture and oxygen in the tank 11 are drawn by the circulating pump 70 through the sixth connecting pipe 106 and the fifth circulating pipe 205 The second reaction tank 20B is adsorbed to remove oxygen and moisture in the tank 11 and the sixth connecting pipe 106 and the fifth circulating pipe 205; when the set circulating pump 70 reaches the working time (T6), the circulating pump is turned off. 70, the second inlet valve 215, the second outlet valve 218, the oxygen sampling valve 321 and the moisture sampling valve 341, and start timing, until the circulation pump 70 reaches the rest time (T7), the system is detected by oxygen concentration Detector 33, water concentration detector 35 The oxygen concentration and the water concentration of the first sampling tube 32 and the second sampling tube 34 are measured (as shown in FIG. 18), and the second reaction tank 20B is obtained when both the oxygen concentration and the water concentration reach the set concentration at which the circulation system stops operating. That is, the cleanup job is completed and the system is put into standby.

While the second reaction tank 20B is performing the cleaning operation, the first reaction tank 20A enters the recycling operation, and the system starts the regeneration and heating of the first reaction tank 20A to the set regeneration temperature, and when the set temperature is reached, the system is turned on. The first inlet valve 221 and the first exhaust valve 213 allow 3% of the hydrogen in the 3% hydrogen source 90 to enter the first reaction tank 20A through the first hydrogen delivery pipe 22A and the first inlet valve 221 to regenerate the purge. The medicament, and the exhaust gas reduced in the first reaction tank 20A is discharged through the third circulation pipe 203 and the first exhaust valve 213 (as shown in FIG. 19), and starts timing, and when the temperature reaches the regeneration system, the combustion is started. After the gas entering time (T4), the first inlet valve 221 is closed to stop the input of 3% hydrogen, the second supplemental valve 212 is opened, and the nitrogen gas introduced into the nitrogen source 40 enters the first reaction tank 20A, and the oxygen in the first reaction tank 20A is taken. And the moisture is discharged from the third circulation pipe 203 through the first exhaust valve 213 and starts counting. After the regeneration valve T4 reaches the opening time (T5) of the purge valve, the first exhaust valve 213 and the second supplementary valve 212 are closed. , that is, the recycling operation of the first reaction tank 20A is completed, When the purge cycle system is still operating the second reaction vessel and 20B.

When the second tank 20B has undergone a plurality of cycles and has reached the cumulative working time (T3) for performing the cycle clearing system switching, the oxygen concentration and the water concentration still fail to reach the set concentration, which indicates the second reaction tank. The medicament in 20B has been used and the cleaning function can no longer be provided. At this time, the system will start the first reaction tank 20A to start the circulation cleaning operation, so that the second reaction tank 20B enters the recycling operation; The second reaction tank 20B starts to regenerate and heat to the set regeneration temperature, and when the set temperature is reached, the second inlet valve 222 is opened. The second exhaust valve 217 causes 3% of the hydrogen in the 3% hydrogen source 90 to enter the second reaction tank 20B through the second hydrogen delivery tube 22B and the second inlet valve 222 to regenerate the scavenging agent and the second reaction. The reduced exhaust gas in the tank 20B is discharged through the seventh circulation pipe 207 and the second exhaust valve 217 (as shown in Fig. 20), and starts timing, when the combustion gas entering time (T4) is reached when the temperature of the regeneration system reaches the timing. The second inlet valve 222 is closed to stop the input of 3% hydrogen, the third supplemental valve 216 is opened, the nitrogen gas introduced into the nitrogen source 40 is introduced into the second reaction tank 20B, and the oxygen and moisture in the second reaction tank 20B are taken from the seventh circulation tube. 207 is discharged through the second exhaust valve 217 and starts timing. After the regeneration valve T4 reaches the opening time (T5) of the purge valve, the second exhaust valve 217 and the third supplemental valve 216 are closed, that is, the second reaction tank is completed. The recycling operation of 20B, at this time, the circulation cleaning operation of the system is still performed in the first reaction tank 20A; therefore, by providing the first reaction tank 20A and the second reaction tank 20B, it can be used for the reagent of one of the reaction tanks. When 罄, the cleaning operation is carried out by another reaction tank, and the medicinal agent is used for 清除Grooves can be simultaneously recycled to supplement the clear job agents, do not affect the operation of the cleanup.

As shown in Fig. 21, it is a flow chart of the cycle clearing regeneration function of the present invention. When the cycle clearing regeneration function is started, the first reaction tank 20A performs a cycle cleaning operation, and after the first reaction tank 20A is operated for a time T6, the first The reaction tank 20A enters the rest time T7, and then detects whether the concentration of water and oxygen has reached the set value. If the set value has been reached, the first reaction tank 20A completes the cleaning operation and ends; when the concentration of water and oxygen is not reached When the set value is set, it is calculated whether the working time T3 has been reached. If the working time T3 is not reached, the cycle clearing operation of the first reaction tank 20A is resumed. If the working time T3 has been reached, the concentration of the water and oxygen has not yet reached the setting. The value indicates that the agent in the first reaction tank 20A has been used to provide a cleaning function; at this time, the first reaction tank 20A enters the regeneration stage, and the first reaction tank 20A starts heating to the set temperature, and then After the introduction of 3% hydrogen to regenerate the scavenging agent for T4 time, and then introducing nitrogen gas to remove oxygen and moisture for T5 time, the first reaction tank 20A is regenerated and enters a standby state.

Meanwhile, when the first reaction tank 20A enters the regeneration stage, the second reaction tank 20B synchronously starts the cleaning operation. When the second reaction tank 20B is operated for the time T6, the second reaction tank 20B enters the rest time T7, and then detects. Whether the concentration of water and oxygen has reached the set value, if the set value has been reached, the second reaction tank 20B completes the cleaning operation and ends; when the concentration of water and oxygen does not reach the set value, it is calculated whether the working time T3 has been reached. If the working time T3 is not reached, the cycle cleaning operation of the second reaction tank 20B is resumed. If the working time T3 has been reached, and the concentration of the water and oxygen has not reached the set value, the agent in the second reaction tank 20B is represented. The cleaning function has been used and the cleaning function can no longer be provided; at this time, the second reaction tank 20B enters the regeneration stage, and the second reaction tank 20B starts heating to the set temperature, and then 3% hydrogen is introduced to regenerate the cleaning agent for T4 time. Then, after introducing nitrogen gas to remove oxygen and moisture for T5, the second reaction tank 20B is regenerated and enters a standby state; at the same time, when the second reaction tank 20B enters the regeneration stage, the The first reaction tank 20A is synchronized to start the cleaning operation.

From the above, it can be seen that the present invention has the following advantages:

(1) The invention realizes the fully automated glove box control system by simply setting various control parameters, instrument parameters, and combining the glove box, the reaction tank and the sampling box, so that the person can simply operate and control through the computer without The next operation can be performed by starting and setting the parameters one by one, which has the convenience of operation and use.

(2) Since the present invention is provided with two reaction tanks, each of the two reaction tanks is connected with a circulation pump, a sampling tank, a nitrogen source, and a 3% hydrogen source to form a two-cycle system, and a cleaning agent in a reaction tank is used. At the same time, another reaction tank can be started for the cleaning operation without causing the removal The industry is interrupted, and it is practical and practical.

(3) Further, since the present invention is provided with two reaction tanks, each of the two reaction tanks is connected with a circulation pump, a sampling tank, a nitrogen source, and a 3% hydrogen source to form a two-cycle system, and a cleaning agent in a reaction tank When the crucible is used, another reaction tank can be started for the cleaning operation, and the reagent is used for the recycling of the reaction tank to replenish the decontamination agent, which is convenient for use and practicality.

(4) Further, since the vacuum pump 60 can be used to vacuum the casing 11 and the front hall 12, the casing 11 and the front hall 12 are in a high vacuum state, and the casing 11 can be used in the casing 11 by the circulation pump 70. The oxygen and water are pumped to the reaction tank to be removed, so that the effect of deoxidizing and dewatering in the tank 11 is achieved, and the utility model has the convenience and practicability of use.

(5) In addition, since the system can monitor the positive pressure state in the tank 11 at the same time during operation, when the positive pressure is insufficient, the system controls the nitrogen source 40 to input nitrogen gas to maintain the positive pressure state in the tank 11 . It does not need to be supplemented with nitrogen by means of personnel monitoring, which is convenient and practical for operation.

Therefore, the present invention does have significant progress, and its method is indeed unprecedented. Cheng has already complied with the patent requirements of the invention, and has filed a patent application according to law, and prayed for a patent as a prayer.

The above descriptions are merely illustrative of the possible embodiments of the present invention, and thus the scope of the present invention should not be construed as limiting the scope of the present invention. It is still within the scope of protection covered by the present invention.

Claims (7)

A glove box monitoring and control method comprises the following steps: selecting monitoring control or parameter setting: selecting a monitoring function or setting a monitoring parameter; selecting a monitoring function: selecting a box cleaning, a front hall clearing, a cycle clearing regeneration, and a storage Monitoring functions such as hydrogen tank removal or hydrogen storage; control parameter setting: Users can set various control parameters when glove box is monitored according to operation needs; Instrument parameter setting: It can be used by designers to set glove box monitoring according to monitoring requirements. Detection range of the instrument; box cleaning: used to vacuum the glove box and then fill the tank with inert gas to quickly reduce the water and oxygen content in the box, and repeatedly perform multiple times to make the water and oxygen in the glove box The concentration reaches the set micro-oxygen water concentration. Front hall clearing: used to bring the air in the front hall of the glove box and the connected pipeline to a set vacuum, and to achieve pressure balance between the front hall and the cabinet. Cycle clearing and recycling: two sets of recyclable alternate devices are used for cyclic switching. When one of the clearing devices loses the clearing capacity and needs to be regenerated, the other clearing device can continue to perform the clearing operation, so that the automatic switching is performed to make the two clearing devices alternate. Cycle cleaning and recycling are carried out to improve the water oxygen removal efficiency of the glove box. Hydrogen storage tank removal: The gas in the hydrogen storage tank is pumped out to reach the set vacuum degree, so as to facilitate the subsequent operation of storing and releasing hydrogen gas. Hydrogen storage: hydrogen is introduced into the hydrogen tank of the glove box from the hydrogen source according to the set time, and is stored in the hydrogen storage tank. The hydrogen concentration is detected during the hydrogen process. Through the above steps, the present invention provides a method for fully automatic monitoring and control of a glove box for high vacuum and deaerator dewatering. The glove box monitoring and control method according to claim 1, wherein the control parameter setting includes setting of a vacuum degree of the box, setting of the number of times of cleaning the cabinet, setting of the vacuum of the front hall, and balancing valve of the front hall. The setting of the opening time (T1), the setting of the vacuum pump duration (T2) when the valve is closed, the setting of the cumulative working time (T3) for switching the system to be cleared by the cycle, the setting of the required temperature of the regeneration system, and the combustion of the temperature of the regeneration system. The setting of the gas entry time (T4), the setting of the purge valve opening time (T5) when the regeneration system T4 arrives, the setting of the water concentration for stopping the circulation system, the setting of the oxygen concentration for stopping the circulation system, and the circulation pump each time. The setting of the working time (T6), the setting of the rest time (T7) of the circulation pump, the setting of the waiting time (T8) before detecting the pressure of the vacuum pump, and the setting of the hydrogen storage tank pressing time (T9). The glove box monitoring and control method according to claim 1, wherein the meter parameter setting includes a first cleaning system temperature sensing range setting, a second cleaning system temperature sensing range setting, and a glove box internal temperature. The setting of the sensing range, the setting of the primary humidity sensing range, the setting of the low humidity sensing range, the setting of the low oxygen concentration sensing range, the setting of the vacuum pump vacuum pressure sensing range, and the setting of the hydrogen explosion index sensing range. The glove box monitoring and control method according to claim 1, wherein the meter parameter setting further comprises the step of inputting a password check. A glove box monitoring and control system for performing the control method according to any one of the above claims 1 to 4, comprising a glove box body, a first reaction tank, a second reaction tank and a sampling box; Wherein: the glove box body is a closed box body, and an vestibule is arranged on one side of the box body, and a first connecting tube is arranged between the box body and the front hall, and the balance tube is provided with a balancing valve; a second connecting pipe is connected to the nitrogen source, and the second connecting pipe is provided with a first supplementary valve; further, a third connecting pipe is arranged between the casing and the front hall, and the third connecting pipe is provided with the first rear a valve and a second rear valve; the first hydrogen storage tank and the second hydrogen storage tank are disposed in the tank, so that the first hydrogen storage tank and the second hydrogen storage tank utilize a fourth connecting pipe and a hydrogen source and a vacuum pump Connecting, the fourth connecting pipe is provided with a breaking valve between the hydrogen source and the first hydrogen storage tank and the second hydrogen storage tank, the fourth connecting pipe is between the vacuum pump and the first hydrogen storage tank and the second hydrogen storage tank a third rear valve is disposed, and a fifth connecting pipe is disposed between the third connecting pipe and the fourth connecting pipe, and the fifth connecting pipe corresponds to the first rear valve and the second rear valve disposed in the third connecting pipe And correspondingly disposed between the third rear valve of the fourth connecting pipe and the vacuum pump, and the vacuum pump is connected with a discharge pipe to discharge The other end is connected to the removing device; further, the box is connected with a sixth connecting pipe, and the other end of the sixth connecting pipe is connected with a circulation pump; the first reaction tank is for reacting moisture and oxygen in the adsorption box, The first reaction tank is connected to the circulation pump by using a first circulation pipe, and the circulation pump is connected to the tank by a sixth connecting pipe, and the first circulation pipe is provided with a first inlet valve; further, the first reaction tank is provided with a second circulation pipe, the second circulation pipe is connected to the nitrogen source, and the second circulation pipe is provided with a second supplementary valve; further, the first reaction tank is provided with a third circulation pipe, and the third circulation pipe is connected There is a reducing gas removing device, and a third exhaust pipe is provided with a first exhaust valve; and the first reaction tank is connected to the sampling box by a fourth circulating pipe, and the fourth circulating pipe is provided with a first outlet a valve, and a second hydrogen pipe connected to the first hydrogen pipe, wherein the first hydrogen pipe is connected to a 3% hydrogen source, and a first inlet valve is disposed on the first hydrogen delivery pipe; a second reaction tank is configured to react with moisture and oxygen in the adsorption tank, and the second reaction tank is connected to the circulation pump by using a fifth circulation pipe, The second circulation pipe is provided with a second inlet valve; further, the second reaction tank is provided with a sixth circulation pipe, the sixth circulation pipe is connected with the nitrogen source, and the sixth circulation pipe is provided with a third supplementary valve; Further, the second reaction tank is provided with a seventh circulation pipe, the seventh circulation pipe is connected with a reducing gas removing device, and the seventh circulating pipe is provided with a second exhaust valve; The eighth circulation pipe is connected to the sampling box, and the eighth circulation pipe is provided with a second outlet valve; further, the sixth circulation pipe is connected with the second hydrogen delivery pipe, and the second hydrogen delivery pipe is connected with 3% a hydrogen source, and the second hydrogen delivery pipe is provided with a second inlet valve; the sampling box is connected to the first reaction tank and the second reaction tank, and the sampling box is connected to the tank by a connecting pipe And, the sampling box is connected to an oxygen concentration detector by the first sampling tube, and the sampling box is A second sample tube is connected to a moisture concentration detector, and the first sampling tube and the second sampling tube are respectively provided with an oxygen sampling valve and a moisture sampling valve; by the above device, the crucible provides a high vacuum, deoxidizing and dehydrating Glove box system. A monitoring and control system for a glove box according to claim 5, wherein the box is connected to a pressure indicator. The glove box monitoring and control system of claim 5, wherein the second circulation pipe and the sixth circulation pipe are connected to a gas pipe to form a three-way pipe, and the gas pipe is connected with a nitrogen source, so that The second supplemental valve and the third supplemental valve are controlled to control the input of nitrogen in the nitrogen source.