TWI588430B - Crucible temperature control device - Google Patents

Description

Shabu-shabu temperature control device

The invention relates to a linear evaporation technology, in particular to a crucible temperature control device capable of regulating the heating temperature of a crucible.

In the current vapor deposition apparatus, graphite is often used as a heating material for high-temperature vapor deposition, and a graphite conductor is placed on the periphery of the crucible in a coating manner, and the graphite conductor is energized to generate heat to heat the crucible. The heating temperature of the graphite conductor can be as high as 1000 ° C or higher, and even when the copper element is heated, the heating temperature is higher than 1500 ° C. How to accurately control the evaporation amount of the evaporation material is an important work of the evaporation process. The linear evaporation source is usually heated by two sets of crucibles, and the vapor is linearly plated on the surface of the workpiece through two parallel nozzles. Therefore, the more consistent the characteristics of the crucible heating element and the evaporation material should be the necessary conditions for uniform evaporation. .

The schematic diagram of the linear evaporation source structure used in the prior art is shown in Fig. 1. The upper part is the graphite conductor of the heating nozzle, and the lower left and right crucibles each have upper and lower sets of graphite conductors. Theoretically, under the same average heating conditions on both sides, Good linear vapor deposition results can be obtained. However, if the material of the crucible is slightly abnormal or the thermal characteristics of the crucible are changed for a long time, the vapor concentration generated by the left and right crucibles will be different, resulting in uneven thickness of the vapor deposition film. In addition, the temperature of the graphite conductor will increase rapidly after being heated by electricity, and the temperature will be rapidly decreased when the power is turned off. To precisely control the temperature of the graphite conductor directly from the power supply terminal, the required control circuit and the number of components of the device are costly, and the effect achieved is only to fine-tune a few percentages of heat, which is not cost effective.

In order to solve the shortcomings of the prior art, the present invention provides a crucible temperature control device, which is provided with an insulating ring between the graphite conductor and the crucible of the vapor deposition device, and the insulating ring is used to shield or not shield the heat between the graphite conductor and the crucible. The radiation path achieves the effect of regulating the amount of heat actually received by the crucible.

To achieve the above and other objects, the present invention provides a crucible temperature control device comprising: a crucible; a graphite conductor wrapped around the crucible, the graphite conductor having a plurality of grooves toward the surface of the crucible a spacer ring between the crucible and the graphite conductor, the isolation ring having a plurality of segments that are rotatable to align or misalign the segment to change the graphite conductor The actual heating area of the crucible.

In an embodiment of the invention, the area of the spacer is the same as or smaller than the area of the trench.

In one embodiment of the invention, the isolation ring has a rotating rocker arm coupled to a control lever.

In one embodiment of the invention, the graphite lead system uses electrothermal heating.

In an embodiment of the invention, the isolation ring controls its rotational position and action by an electronic control component, which is based on the actual temperature of the crucible. Change the rotational position of the isolation ring. The electronic control component can be a stepper motor.

The above summary, the following detailed description and the accompanying drawings are intended to further illustrate the manner, the Other objects and advantages of the present invention will be described in the following description and drawings.

11‧‧‧ Shabu Shabu

12‧‧‧ graphite conductor

121‧‧‧ trench

13‧‧ ‧isolate ring

131‧‧‧

A, B‧‧‧Using state partial enlargement

21‧‧‧ graphite conductor

211‧‧‧ trench

22‧‧ ‧isolate ring

221‧‧‧

23‧‧‧Rotating guide ring

24‧‧‧Conductor Seat

25‧‧‧Rotating rocker

251‧‧‧ fixing bolt

26‧‧‧Support rod

31‧‧‧ graphite conductor

32‧‧‧坩锅

33‧‧‧Nozzles

34‧‧‧Control lever

Figure 1 is a schematic view showing the structure of a conventional linear vapor deposition source of the prior art.

2 is a schematic view showing the structure and operation state of the crucible temperature control device of the present invention.

3 is a schematic view showing the component structure of another embodiment of the crucible temperature control device of the present invention.

4 is a schematic view showing an embodiment of the present invention applied to a linear vapor deposition apparatus having a plurality of crucibles.

The embodiments of the present invention are described below by way of specific examples, and those skilled in the art can readily appreciate other advantages and functions of the present invention from the disclosure herein.

The high temperature generated by the current flowing through the graphite conductor is the main source of temperature rise of the crucible. The heating amount is proportional to the heat radiation area of the crucible of the graphite conductor, and the heating area can control the heating amount of the crucible indirectly. Therefore, the invention adds an isolation ring between the graphite conductor and the crucible, and the position of the rotating isolation ring can control the shielding area of the graphite conductor to heat the crucible, and implement the micro-control of the crucible heating.

Please refer to FIG. 2, which is the structure of the crucible temperature control device of the present invention. And the operating state diagram. As shown in the figure, comprising: a crucible 11; a graphite conductor 12 is wrapped around the periphery of the crucible 11, the graphite conductor 12 has a plurality of grooves 121 facing the surface of the crucible; an isolation ring 13 Located between the crucible 11 and the graphite conductor 12, the isolation ring 13 has a plurality of segments 131 that are rotatable to align or misalign the segments 131 to the trenches 121 to change the graphite conductors. 12 The actual heating area of the crucible 11 .

Referring again to FIG. 2, A and B in FIG. 2 respectively represent the operational state in which the segments 131 of the isolation ring 13 are aligned and not aligned with the graphite conductor trenches 121. A is that the chip 131 is not aligned with the groove 121, that is, the chip 131 shields a portion of the heating area of the graphite conductor 12, so that heat transferred from the graphite conductor 12 to the crucible 11 is reduced, and the heating effect is reduced. The temperature of the crucible 11 is lowered; B is that the chip 131 is aligned with the groove 121, that is, the chip 131 is completely unmasked to the graphite conductor 12, so the graphite conductor 12 has the maximum heating relative to the crucible 11. area. By rotating the insulating ring 13 to shield or dispose the chip 131 to the graphite conductor 12, the amount of heat actually transferred to the crucible 11 can be changed, thereby controlling the temperature of the crucible 11.

In an embodiment of the present invention, the area of the chip 131 is the same as or smaller than the area of the trench 121, that is, the area of the chip 131 cannot be larger than the area of the trench 121. In order to prevent the chip 131 from being aligned with the groove 121, a part of the area of the graphite conductor 12 is shielded by the chip 131, causing an error in temperature control.

3 is a component of another embodiment of the crucible temperature control device of the present invention Schematic diagram of the structure, as shown in the figure, the embodiment includes: a graphite conductor 21 having a plurality of trenches 211; an insulating ring 22 having a plurality of segments 221; a rotating guide ring 23 and the isolation ring 22, and allows the isolation ring 22 to rotate inside thereof; the conductor socket 24 is for accommodating the graphite conductor 21; the rotating rocker arm 25 is locked by a fixing bolt 251 and the isolation ring 22, the user The rotating rocker arm 25 can be connected by a control rod (not shown), and the rotating rocker arm 25 is rotated by the control rod to rotate the insulating ring 22 to change the relative position of the segment 221 and the groove 211. When the dissection piece 221 is shielded to the graphite conductor 21, the actual heating area of the graphite conductor 21 against the crucible (not shown) located inside thereof is reduced, thereby achieving temperature control of the crucible; the support rod 26, It is used to support the crucible temperature control device.

The crucible temperature control device of the present invention can be used for a linear vapor deposition device having a plurality of crucibles, in addition to being used in a separate crucible. Ideally, the plurality of crucibles in the linear evaporation device must have the same heating rate and The temperature is set to ensure that the vapor deposition vapor concentration is the same, and the thickness of the produced film is averaged. However, in practical applications, the temperature of different crucibles may be slightly different from the material of the graphite conductor and have different heating temperatures and speeds, so that the vapor concentration produced is not uniform, resulting in uneven film thickness. Although theoretically it can be controlled from the heating circuit end of the graphite conductor, it is very difficult to finely control the temperature of the heated high temperature graphite conductor (for example, only a few or a few tens of degrees Celsius), the required procedures and electronics The number of components is too large, and the benefits are not directly proportional to the effort. Therefore, the present invention provides a simple and reliable crucible The temperature control method can utilize the crucible temperature control device of the invention to adjust the temperature of the crucible without changing the heating state of the graphite conductor, so as to balance the temperature unevenness which may occur in different crucibles and affect the formation of the film thickness. . A schematic diagram of an embodiment of the present invention applied to a linear vapor deposition apparatus having a plurality of crucibles is shown in FIG. 4. The linear vapor deposition apparatus has a graphite conductor 31 for electric heating, and two sets of left and right crucibles 32 (located inside the graphite conductor 31). And a nozzle 33 connected to the crucible, the crucible 32 and the periphery of the nozzle 33 are covered by a graphite conductor, and each set of crucible and graphite conductor has an isolation ring (not shown) provided by the invention. The linear vapor deposition device has a control rod 34 on the side thereof. When the control rod 34 is pulled, the inner isolation ring can be rotated, and the area of the isolation ring is shielded from the graphite conductor, thereby changing the actual transfer of the graphite conductor to the crucible. Heat. For the structural composition of the crucible, the isolation ring, the graphite conductor and the control rod in the crucible temperature control device of the present invention, please refer to FIG. 2, FIG. 3 and related descriptions, and details are not described herein again.

The invention relates to a crucible temperature control device, which changes the actual heating area of the crucible by the graphite conductor by the isolation ring, and further regulates the temperature of the crucible; the invention can be used for the evaporation device with a plurality of crucibles, and utilizes The crucible temperature control device of the invention can balance the temperature difference between different crucibles to ensure the effect and yield of the thin film evaporation process. The insulating ring used in the invention is a mechanical component, has simple control, high reliability, low manufacturing and assembly cost, and can be easily applied to the inside of the existing vapor deposition device to improve the temperature unevenness of the vapor deposition device. The invention can also add an electronic control component, control the rotational position of the isolation ring by electronic control, and make a closed loop with the temperature monitoring machine of the crucible. Control, with high application flexibility.

The above-described embodiments are merely illustrative of the features and functions of the present invention, and are not intended to limit the scope of the technical scope of the present invention. Modifications and variations of the above-described embodiments can be made by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth in the scope of the claims described below.

11‧‧‧ Shabu Shabu

12‧‧‧ graphite conductor

121‧‧‧ trench

13‧‧ ‧isolate ring

131‧‧‧

A, B‧‧‧Using state partial enlargement

Claims (7)

A crucible temperature control device comprises: a crucible; a graphite conductor is wrapped around the crucible, the graphite conductor has a plurality of grooves facing the crucible; an insulating ring is located in the crucible Between the graphite conductor and the graphite conductor, the isolation ring has a plurality of segments that are rotatable to align or misalign the segments to change the actual heated area of the graphite conductor to the crucible. The crucible temperature control device of claim 1, wherein the area of the chip is the same as or smaller than the area of the groove. The crucible temperature control device of claim 1, wherein the isolation ring has a rotary rocker arm coupled to a control lever. The crucible temperature control device of claim 1, wherein the graphite guide system uses electrothermal heating. The crucible temperature control device of claim 1, wherein the isolation ring controls its rotational position and action by an electronic control unit. The crucible temperature control device of claim 5, wherein the electronic control unit changes a rotational position of the isolation ring according to an actual temperature of the crucible. The crucible temperature control device of claim 5, wherein the electronic control component is a stepper motor.