TWI584395B - Cassette mechanism and multi-layered connecting rod - Google Patents

Description

Cartridge mechanism and its multi-layer connecting rod

The invention relates to a clamping mechanism for wet processing a substrate, in particular to a clamping mechanism with better corrosion resistance and a multi-layer connecting rod.

As the process technology becomes more and more sophisticated, the accumulation of components is greatly improved. To make such a sophisticated product, a very clean wafer surface is required for fabrication. Therefore, in the process of ultra-large integrated circuit, Wafer cleaning technology and cleanliness are one of the important factors affecting wafer process yield, component quality and reliability. At present, the common wafer cleaning method is to place a plurality of wafers in a boat, and then immerse the boat in a solution of various acid-base solutions to remove fine particles on the surface of the wafer. Impurities such as organic matter and metal ions make the surface of the wafer ultra clean.

However, the boat may collide during the transfer to each process machine, causing a gap or groove on the surface of the connecting rod, so when the boat is immersed for a long time, the highly corrosive potion is easy to The gap or groove flows into the center rod of the connecting rod, causing corrosion and rust of the center rod to cause impurities to be mixed into the clean medicine pool, thereby affecting the service life of the wafer boat and making the semiconductor wafer process clean. Seriously affected to reduce component yield, production quality, and reliability.

Accordingly, it is an object of the present invention to provide a latching mechanism that is more resistant to corrosion to solve the above problems.

The technical means adopted by the present invention for solving the problems of the prior art provides a latching mechanism for accommodating a wet etching target to be subjected to a wet etching process. The latching mechanism comprises: two plate bodies, Corrosion-resistant material; and at least two multi-layer connecting rods, wherein the multi-layer connecting rods are substantially parallel to each other between the two boards, the surface of the multi-layer connecting rod has a plurality of supporting protrusions, and An accommodating portion is disposed between the adjacent supporting protrusions to receive the wet etching to-be-processed member, wherein the multi-layer connecting rod comprises a central rod body, an inner corrosion-resistant layer, and an outer corrosion-resistant layer, The inner anti-corrosion layer covers the radially outer surface of the central rod body, and the outer anti-corrosion layer covers the radially outer surface of the inner anti-corrosion layer, and the inner anti-corrosion layer and the outer anti-corrosion layer are both fluorine It is a fluoropolymer material, wherein the outer anti-corrosion layer is more resistant to wear than the inner anti-corrosion layer, and the inner anti-corrosion layer is more resistant to corrosion than the outer anti-corrosion layer.

In an embodiment of the invention, a chucking mechanism is provided. The material of the inner anti-corrosion layer is polyvinylidene fluoride (PVDF), and the outer anti-corrosion layer is made of ethylene-tetrafluoroethylene. (Ethylene Tetra-Fluoro-Ethylene, ETFE).

In an embodiment of the invention, a latching mechanism is provided, the material of which is S45C carbon steel material.

In an embodiment of the invention, a latching mechanism is provided, the inner anti-corrosion layer having a thickness of between 150 μm and 200 μm.

In an embodiment of the invention, a clamping mechanism is provided, the inner corrosion-resistant layer further covering an axial outer surface of the central rod body, and the outer corrosion-resistant layer further covers an axial outer portion of the inner corrosion-resistant layer surface.

Another technical means for solving the problems of the prior art is to provide a multi-layer connecting rod comprising a central rod body, an inner corrosion-resistant layer, and an outer corrosion-resistant layer, the inner corrosion-resistant layer Coating a radially outer surface of the central rod body, the outer corrosion resistant layer coating a radially outer surface of the inner corrosion resistant layer, wherein the inner corrosion resistant layer is more resistant to wear than the outer corrosion resistant layer, and The outer corrosion resistant layer is more resistant to corrosion than the inner corrosion resistant layer.

In an embodiment of the present invention, a multi-layer connecting rod is provided. The inner anti-corrosion layer is made of polyvinylidene fluoride (PVDF), and the outer anti-corrosion layer is made of ethylene-four. Ethylene Tetra-Fluoro-Ethylene (ETFE).

In an embodiment of the invention, a multi-layer connecting rod is provided, and the material of the central rod is S45C carbon steel material.

In an embodiment of the invention, a multi-layer connecting rod is provided, the inner corrosion-resistant layer having a thickness of between 150 μm and 200 μm.

In an embodiment of the invention, a multi-layer connecting rod is provided, the inner anti-corrosion layer further covering an axial outer surface of the central rod body, and the outer anti-corrosion layer further covers the shaft of the inner anti-corrosion layer Outward surface.

By the technical means of the invention, the outer anti-corrosion layer can withstand external force collision to protect the inner anti-corrosion layer and the central rod body, and the inner anti-corrosion layer can further protect the central rod body from being corroded by the medicine water, so the multi-layer connection is used. The rod clamping mechanism can have a long service life, and it is not easy to generate impurities even if it is immersed in the medicine tank for a long time after cleaning or surface roughening, so that the semiconductor wafer process is good. Yield, quality of production, and reliability.

100‧‧‧Card institutions

1‧‧‧ board

2‧‧‧Multilayer connecting rod

21‧‧‧Support convex

22‧‧‧Center body

23‧‧‧Anti-corrosion layer

24‧‧‧External anti-corrosion layer

S‧‧‧ 容部

D‧‧‧thickness

1 is a perspective view showing a latching mechanism according to an embodiment of the present invention; FIG. 2a is a perspective view showing a multi-layer connecting rod according to an embodiment of the present invention; and FIG. 2b is a view showing a double-layer connecting rod according to the present invention; A cross-sectional view of a multi-layer connecting rod of an embodiment.

Hereinafter, embodiments of the present invention will be described based on Figs. 1 to 2b. This description is not intended to limit the embodiments of the invention, but is an embodiment of the invention.

As shown in FIG. 1 , a latching mechanism 100 according to an embodiment of the present invention is configured to receive a wet etching to-be-processed component for performing a wet etching process. The latching mechanism 100 includes: two plate bodies 1 a corrosion-resistant material; and at least two multi-layer connecting rods 2, wherein the multi-layer connecting rods 2 are substantially parallel to each other between the two boards, and the surface of the multi-layer connecting rod 2 has a plurality of Supporting the convex body 21, and an accommodating portion S is disposed between the adjacent supporting convex bodies 21 to accommodate the wet etching to-be-processed member, wherein the multi-layer connecting rod 2 includes a central rod body 22 and an inner corrosion-resistant layer a layer 23, and an outer anti-corrosion layer 23 covering the radially outer surface of the central rod body 22, the outer anti-corrosion layer 24 covering the radially outer portion of the inner anti-corrosion layer 23 The inner anti-corrosion layer 23 and the outer anti-corrosion layer 24 are both fluorine-based polymer materials, wherein the outer anti-corrosion layer 24 is more resistant to wear than the outer anti-corrosion layer 24, and the inner anti-corrosion layer 23 The corrosion resistance is stronger than the outer corrosion resistant layer 24.

Specifically, in the present embodiment, the plate body 1 and the multi-layer connecting rod 2 are integrally formed, whereby the penetration of the syrup into the plate body 1 and the multi-layer connecting rod 2 can be prevented from causing corrosion. However, in other embodiments, the plate body 1 and the multi-layer connecting rod 2 may also be detachable, thereby being replaceable when one of the multi-layer connecting rods 2 or the plate body 1 is damaged. It is convenient, and the present invention is not limited to this, and it is necessary to see the actual application.

In this embodiment, since the plate body 1 and the multi-layer connecting rod 2 are integrally formed, and the center rod body 22 is a cylinder, the inner corrosion-resistant layer 23 covers the center rod body 22 The outer cylindrical corrosion-resistant layer 24 covers the radial cylindrical surface of the inner corrosion-resistant layer 23, that is, the inner corrosion-resistant layer 23 and the outer corrosion-resistant layer 24 only need to cover the diameter. To the cylinder, corrosion resistance can be achieved. In other embodiments, if the plate body 1 and the multi-layer connecting rod 2 are detachable, the inner corrosion-resistant layer 23 can also cover the axial cylinder surface of the central rod body 22, and The outer anti-corrosion layer 24 can also cover the axial cylindrical surface of the inner anti-corrosion layer 23, thereby preventing the inflow of the syrup from the joint surface of the plate body 1 and the multi-layer connecting rod 2, thereby making the complex The corrosion resistance of the layered connecting rod 2 is more perfect.

The inner anti-corrosion layer 23 and the outer anti-corrosion layer 24 are all made of a fluorine-based polymer material, that is, a fluorine-based element is also added to a general plastic, thereby providing better corrosion resistance. The outer anti-corrosion layer 24 is more resistant to wear than the inner anti-corrosion layer 23, wherein wear resistance refers to impact resistance and surface hardness in mechanical properties, that is, compared with the inner anti-corrosion layer 23, The outer anti-corrosion layer 24 has a high impact strength and a surface hardness, so even if the latch mechanism 100 is moved by an external force during the process, the external force collision is caused by the external resistance. The corrosion layer 24 absorbs, thereby protecting the center rod 22 and the inner corrosion-resistant layer 23 from external forces. The inner corrosion-resistant layer 23 is more resistant to corrosion than the outer corrosion-resistant layer 24, wherein the corrosion resistance means that the object is not easily corroded by an acid, a base, an organic solvent, or an alcohol, and the inner corrosion-resistant layer 23 is provided. The center rod 22 can be further protected. Preferably, the inner anti-corrosion layer 23 has a thickness d of between 150 μm and 200 μm.

With the above structure, the outer anti-corrosion layer 24 can withstand an external force collision to protect the inner anti-corrosion layer 23 and the center rod 22, and the inner anti-corrosion layer 23 can further protect the center rod 22 from being medicated. Corrosion, so the cassette mechanism 100 using the multi-layer connecting rod 2 can have a long service life, and it is not easy to be immersed in the medicine tank for a long time even after cleaning or surface roughing. Impurities are generated to provide good yield, quality, and reliability in semiconductor wafer processes.

Preferably, the outer anti-corrosion layer 24 is made of polyvinylidene fluoride (PVDF), and the inner anti-corrosion layer 23 is made of ethylene-tetrafluoroethylene (Ethylene Tetra-Fluoro-Ethylene, ETFE). ). Thereby, the outer anti-corrosion layer 24 of the PVDF material has the outer anti-corrosion layer 23 superior to the ETFE material and can withstand external force collision, and the inner anti-corrosion layer 23 of the ETFE material has the outer corrosion resistance superior to the PVDF material. The corrosion resistance of the layer 24 makes it possible to further protect the central rod 22 from corrosion. Preferably, the material of the central rod body 22 is S45C carbon steel material, which has better comprehensive mechanical properties and lower installation cost.

The above description and description are only illustrative of the preferred embodiments of the present invention, and those of ordinary skill in the art can make other modifications in accordance with the scope of the invention as defined below and the description above, but such modifications should still be It is within the scope of the invention to the invention of the invention.

2‧‧‧Multilayer connecting rod

21‧‧‧Support convex

22‧‧‧Center body

23‧‧‧Anti-corrosion layer

24‧‧‧External anti-corrosion layer

S‧‧‧ 容部

Claims (10)

The anti-corrosion clamping mechanism is configured to receive a wet etching to be processed to perform a wet etching process, the clamping mechanism comprises: two plates, which are corrosion resistant materials; and at least two layers a connecting rod, the multi-layer connecting rods are substantially parallel to each other between the two plates, the surface of the multi-layer connecting rod has a plurality of supporting protrusions, and a space between the adjacent supporting protrusions a portion for receiving the wet etching to-be-processed member, wherein the multi-layer connecting rod includes a center rod body, an inner corrosion-resistant layer, and an outer corrosion-resistant layer covering the center rod body a radially outer surface, the outer anti-corrosion layer coating the radially outer surface of the inner anti-corrosion layer, the inner anti-corrosion layer and the outer anti-corrosion layer are both fluorine-based polymer materials, wherein the outer anti-corrosion layer The wear resistance is stronger than the inner corrosion resistant layer, and the inner corrosion resistant layer is more resistant to corrosion than the outer corrosion resistant layer. The cassette mechanism according to claim 1, wherein the outer anti-corrosion layer is made of polyvinylidene fluoride (PVDF), and the inner anti-corrosion layer is made of ethylene-tetrafluoroethylene (Ethylene Tetra). -Fluoro-Ethylene, ETFE). The cassette mechanism according to claim 1, wherein the material of the center rod is S45C carbon steel material. The cassette mechanism according to claim 1, wherein the inner anti-corrosion layer has a thickness of between 150 μm and 200 μm. The cassette mechanism of claim 1, wherein the inner anti-corrosion layer further covers an axial outer surface of the central rod body, and the outer anti-corrosion layer further covers an axial outer surface of the inner anti-corrosion layer. A multi-layer connecting rod with corrosion resistance, comprising: a central rod body, an inner corrosion-resistant layer, and an outer corrosion-resistant layer covering the radially outer surface of the central rod body, The outer anti-corrosion layer covers the radially outer surface of the inner anti-corrosion layer, and the inner anti-corrosion layer and the outer anti-corrosion layer The layers are all fluorine-based polymer materials, wherein the outer anti-corrosion layer is more resistant to wear than the inner anti-corrosion layer, and the outer anti-corrosion layer is more resistant to corrosion than the inner anti-corrosion layer. The multi-layer connecting rod according to claim 6, wherein the outer anti-corrosion layer is made of polyvinylidene fluoride (PVDF), and the inner anti-corrosion layer is made of ethylene-tetrafluoroethylene ( Ethylene Tetra-Fluoro-Ethylene, ETFE). The multi-layer connecting rod according to claim 6, wherein the material of the central rod body is S45C carbon steel material. The multi-layer connecting rod according to claim 6, wherein the inner anti-corrosion layer has a thickness of between 150 μm and 200 μm. The multi-layer connecting rod according to claim 6, wherein the inner anti-corrosion layer further covers an axial outer surface of the central rod body, and the outer anti-corrosion layer further covers an axial outer surface of the inner anti-corrosion layer .