TWI574071B - Optical fiber connector and manufacturing method thereof, optical fiber connector and optical fiber connecting method, and optical fiber connector and optical fiber assembly - Google Patents
Optical fiber connector and manufacturing method thereof, optical fiber connector and optical fiber connecting method, and optical fiber connector and optical fiber assembly Download PDFInfo
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Description
本發明是有關於一種光纖連接器及其製造方法、光纖連接器和光纖的連接方法、光纖連接器和光纖的組裝體,尤其有關於一種不依賴於基板而光纖與光波導芯的位置對準容易且光纖的位置不易偏移的光纖連接器及其製造方法、光纖連接器和光纖的連接方法、光纖連接器和光纖的組裝體。 The invention relates to a fiber optic connector and a manufacturing method thereof, a fiber optic connector and an optical fiber connecting method, an optical fiber connector and an optical fiber assembly, and particularly relates to a position alignment of an optical fiber and an optical waveguide core independent of a substrate. An optical fiber connector that is easy to offset and whose position of the optical fiber is not easily offset, a method of manufacturing the same, a method of connecting an optical fiber connector and an optical fiber, an optical fiber connector, and an optical fiber assembly.
一般而言,光纜(cable)(亦稱作光纖纜)可進行大量資訊的高速通信,因而被廣泛用於家庭用、工業用的資訊通信中。而且,例如汽車中裝備各種電力組件(例如,汽車導航系統等),於該些電力組件的光通信中亦採用上述光纜。作為將此種光纜所具有的光纖的終端彼此對接而加以連接的光纜連接器,有專利文獻1中揭示的光纜連接器。 In general, cable (also known as fiber optic cable) can perform high-speed communication of a large amount of information, and thus is widely used in information communication for home and industrial use. Moreover, for example, in a car, various power components (for example, a car navigation system, etc.) are equipped, and the above-mentioned optical cable is also used in optical communication of the power components. The optical cable connector disclosed in Patent Document 1 is an optical cable connector in which the terminals of the optical fibers included in the optical cable are connected to each other.
而且,伴隨資訊容量的增大,不僅在幹線或存取系統等通信領域中,在路由器或伺服器內的資訊處理中亦推進使用光信號的光互連(light interconnection)技術的開發。具體而言,為了在路由器或伺服器裝置內的板(board)間或者板內的短距離信號傳送中使用光,作為光傳送路徑,使用與光纖相比配線的自由度高且可實現高密度化的光波導。 Moreover, with the increase in information capacity, the development of optical interconnection technology using optical signals has been promoted not only in the communication field such as trunk lines or access systems but also in information processing in routers or servers. Specifically, in order to use light in short-distance signal transmission between boards or boards in a router or a server device, as a light transmission path, wiring is used with higher degree of freedom and high density compared with an optical fiber. Optical waveguide.
而且,作為將該光波導和光纖接合的方法,例如可列舉如專利文獻2記載的光纖連接器。 In addition, as a method of joining the optical waveguide and the optical fiber, for example, an optical fiber connector described in Patent Document 2 can be cited.
然而,此種光纖連接器中,必須藉由切割來對光纖搭載溝槽進行切削加工,因而作業效率差,而且,光波導芯是在與溝槽的切削步驟不同的另一步驟中藉由光微影及蝕刻而製作,因而會產生光纖的位置偏移。進而,上述方法中若不形成在矽晶圓等的尺寸穩定性佳的硬基板上,則會產生更大的光纖的位置偏移。 However, in such an optical fiber connector, it is necessary to cut the optical fiber mounting groove by cutting, so that work efficiency is poor, and the optical waveguide core is light-driven in another step different from the cutting step of the groove. Fabrication by lithography and etching, which results in a positional shift of the fiber. Further, in the above method, if a hard substrate having a dimensional stability such as a tantalum wafer is not formed, a larger positional shift of the optical fiber occurs.
而且,雖然有如下的光纖與光波導的連接方法,即,將專利文獻3所記載的形成有光波導的波導基板與承載著光纖的光連接器安裝在分別不同的固持器(holder)上,並將各固持器的端面彼此固接,但直至連接為止的步驟數多且煩雜。 Further, there is a method of connecting an optical fiber to an optical waveguide, that is, a waveguide substrate on which an optical waveguide is formed as described in Patent Document 3 and an optical connector carrying the optical fiber are mounted on different holders. The end faces of the respective holders are fixed to each other, but the number of steps up to the connection is large and complicated.
而且,並設著光纖搭載溝槽與光波導的專利文獻4記載的光纖連接器中,利用如下方法,即,在光纖搭載溝槽中導入光纖固定用黏著劑與光纖,並從光纖搭載側由固定夾具而加以抑制,從而將光波導和光纖進行位置對準,但在光纖固定時若不將固定夾具保持水平則光纖與光波導發生軸偏移,從而存在導致光損失的課題。 Further, in the optical fiber connector described in Patent Document 4 in which the optical fiber mounting groove and the optical waveguide are provided, the optical fiber fixing adhesive and the optical fiber are introduced into the optical fiber mounting groove, and the optical fiber mounting side is provided by the optical fiber mounting side. The optical waveguide and the optical fiber are aligned by fixing the jig, but if the fixing jig is not horizontal when the optical fiber is fixed, the optical fiber and the optical waveguide are axially offset, which causes a problem of light loss.
[專利文獻1]日本專利特開2010-48925 [Patent Document 1] Japanese Patent Laid-Open 2010-48925
[專利文獻2]日本專利特開2001-201646 [Patent Document 2] Japanese Patent Laid-Open 2001-201646
[專利文獻3]日本專利特開平7-13040 [Patent Document 3] Japanese Patent Laid-Open No. 7-13040
[專利文獻4]專利第4577376號 [Patent Document 4] Patent No. 4577376
本發明的目的在於提供一種光纖與光波導芯的位置對準容易且光纖的搭載容易並且光纖的位置不易偏移的光纖連接器及其製造方法,光纖連接器和光纖的連接方法,光纖連接器和光纖的組裝體。 An object of the present invention is to provide an optical fiber connector with easy alignment of an optical fiber and an optical waveguide core, and easy mounting of the optical fiber, and a position of the optical fiber is not easily offset, a method of manufacturing the optical fiber connector and the optical fiber, and an optical fiber connector And the assembly of the fiber.
本發明者等人針對上述課題,發現可藉由如下的光纖連接器而解決上述課題,即,上述光纖連接器包括光纖導引構件,該光纖導引構件形成有具有用以固定光纖的溝槽的光纖導引圖案、及覆蓋該光纖導引圖案的蓋材,且將該光纖導引構件及光波導並設。本發明基於該發現而完成。 The inventors of the present invention have found that the above problem can be solved by the optical fiber connector including a fiber guiding member formed with a groove for fixing an optical fiber by the following optical fiber connector a fiber guiding pattern and a cover material covering the fiber guiding pattern, and the fiber guiding member and the optical waveguide are disposed in parallel. The present invention has been completed based on this finding.
亦即,本發明提供如下的(1)~(4)。 That is, the present invention provides the following (1) to (4).
(1)一種光纖連接器,包括光纖導引構件及光波導,上述光纖導引構件包括:構成基板的一部分的光纖導引側(optical fiber guide side)基板部,上述光纖導引側基板部上的光纖導引圖案(optical fiber guide pattern),及覆蓋上述光纖導引圖案的蓋材;上述光波導包含:上述基板中與上述光纖導引側基板部鄰接的光波導側基板部,上述光波導側基板部上的光波導側第1下部包覆層(first lower clad layer),上述光波導側第1下部包覆層上的光信號傳達用芯圖案,及上述光信號傳達用芯圖案上的光波導側上部包覆層;上述光纖導引圖案包含隔開間隔而並列的多根導引構件,相鄰的2根導引構件、光纖導引側基板部、及光纖導引側蓋材部之間的空間成為光纖導引溝槽,在上述光信號傳達用芯圖案的光路方向的延長線上存在上述光纖導引溝槽。 (1) An optical fiber connector comprising: a fiber guiding member and an optical waveguide, wherein the optical fiber guiding member includes: an optical fiber guide side substrate portion constituting a part of the substrate, and the optical fiber guiding side substrate portion An optical fiber guide pattern and a cover material covering the optical fiber guiding pattern; the optical waveguide comprising: an optical waveguide side substrate portion adjacent to the optical fiber guiding side substrate portion of the substrate, the optical waveguide a first lower clad layer on the optical waveguide side of the side substrate portion, an optical signal transmission core pattern on the optical waveguide side first lower cladding layer, and the optical signal transmission core pattern An optical waveguide side upper cladding layer; the optical fiber guiding pattern includes a plurality of guiding members juxtaposed at intervals, two adjacent guiding members, an optical fiber guiding side substrate portion, and an optical fiber guiding side cover portion The space between the fibers becomes a fiber guiding groove, and the fiber guiding groove is present on an extension line of the optical path direction of the optical signal transmission core pattern.
(2)一種光纖連接器的製造方法,是上述光纖連接器的製造方法,且包括:第1步驟,在基板上積層第1下部包覆層後,藉由蝕刻將存在於應形成光纖導引溝槽的部位的第1下部包覆層除去,從而形成光波導側第1下部包覆層;第2步驟,在形成有上述光波導側第1下部包覆層的基板上,積層芯形成用樹脂層後,藉由蝕刻一次性形成光纖導引芯圖案與光信號傳達用芯圖案;第3步驟,在形成有上述光纖導引芯圖案與上述光信號傳達用芯圖案的基板上,積層上部包覆層形成用樹脂層後,藉由蝕刻將存在於應形成上述光纖導引溝槽的部位的上部包覆層形成用樹脂層除去,從而形成光纖導引側上部包覆層、光波導側上部包覆層及光纖導引溝槽;以及第4步驟,形成覆蓋上述光纖導引溝槽的蓋材。 (2) A method of manufacturing an optical fiber connector, comprising the method of manufacturing the optical fiber connector, comprising: a first step of laminating a first lower cladding layer on a substrate, and then guiding the optical fiber to be formed by etching The first lower cladding layer of the trench portion is removed to form the first lower cladding layer on the optical waveguide side, and the second step is for forming the laminated core on the substrate on which the first lower cladding layer on the optical waveguide side is formed. After the resin layer, the optical fiber guiding core pattern and the optical signal transmitting core pattern are formed by etching once; and in the third step, the upper layer is laminated on the substrate on which the optical fiber guiding core pattern and the optical signal transmitting core pattern are formed After the resin layer for forming a cladding layer is removed, the resin layer for forming an upper cladding layer which is present in the portion where the fiber guiding groove is to be formed is removed by etching, thereby forming an upper cladding layer on the optical fiber guiding side and an optical waveguide side. An upper cladding layer and a fiber guiding groove; and a fourth step of forming a cover material covering the fiber guiding groove.
(3)一種光纖連接器和光纖的連接方法,在上述光纖連接器的光纖導引溝槽中填充黏著劑(adhesive agent)並且插入配置光纖。 (3) A method of connecting an optical fiber connector and an optical fiber, wherein an optical adhesive groove of the optical fiber connector is filled with an adhesive agent and inserted into the optical fiber.
(4)一種光纖連接器和光纖的組裝體,包括:上述光纖連接器;以及配置在上述光纖連接器的光纖導引溝槽的光纖;及黏著劑。 (4) An optical fiber connector and an optical fiber assembly comprising: the optical fiber connector; and an optical fiber disposed in the optical fiber guiding groove of the optical fiber connector; and an adhesive.
本發明的光纖連接器的光纖與光波導芯的位置對準容易且光纖的搭載容易,並且光纖的位置不易偏移。 The optical fiber connector of the present invention has an easy alignment with the optical waveguide core and easy mounting of the optical fiber, and the position of the optical fiber is not easily shifted.
本發明的光纖連接器包括光纖導引構件及光波導,上 述光纖導引構件包括:構成基板的一部分的光纖導引側基板部,上述光纖導引側基板部上的光纖導引圖案,及覆蓋上述光纖導引圖案的蓋材;上述光波導包含:上述基板中與上述光纖導引側基板部鄰接的光波導側基板部,上述光波導側基板部上的光波導側第1下部包覆層,上述光波導側第1下部包覆層上的光信號傳達用芯圖案,及上述光信號傳達用芯圖案上的光波導側上部包覆層;上述光纖導引圖案包含隔開間隔而並列的多根導引構件,相鄰的2根導引構件、光纖導引側基板部、及光纖導引側蓋材部之間的空間成為光纖導引溝槽,在上述光信號傳達用芯圖案的光路方向的延長線上存在上述光纖導引溝槽。 The optical fiber connector of the present invention comprises a fiber guiding member and an optical waveguide, The optical fiber guiding member includes: a fiber guiding side substrate portion constituting a part of the substrate; a fiber guiding pattern on the fiber guiding side substrate portion; and a cover member covering the fiber guiding pattern; the optical waveguide comprising: An optical waveguide side substrate portion adjacent to the optical fiber guiding side substrate portion in the substrate, an optical waveguide side first lower cladding layer on the optical waveguide side substrate portion, and an optical signal on the optical waveguide side first lower cladding layer Transmitting a core pattern and an optical waveguide side upper cladding layer on the optical signal transmission core pattern; the optical fiber guiding pattern includes a plurality of guiding members juxtaposed at intervals, and two adjacent guiding members, The space between the optical fiber guiding side substrate portion and the optical fiber guiding side cover material portion serves as a fiber guiding groove, and the optical fiber guiding groove is present on an extension line of the optical path direction of the optical signal transmission core pattern.
而且,本發明的光纖連接器的製造方法是上述光纖連接器的製造方法,且包括:第1步驟,在基板上積層第1下部包覆層後,藉由蝕刻將存在於應形成光纖導引溝槽的部位的第1下部包覆層除去,從而形成光波導側第1下部包覆層;第2步驟,在形成有上述光波導側第1下部包覆層的基板上,積層芯形成用樹脂層後,藉由蝕刻一次性形成光纖導引芯圖案與光信號傳達用芯圖案;第3步驟,在形成有上述光纖導引芯圖案與上述光信號傳達用芯圖案的基板上,積層上部包覆層形成用樹脂層後,藉由蝕刻將存在於應形成上述光纖導引溝槽的部位的上部包覆層形成用樹脂層除去,從而形成光纖導引構件側上部包覆層、光波導側上部包覆層及光纖導引溝槽;以及第4步驟,形成覆蓋上述光纖導引溝槽的蓋材。 Moreover, the method of manufacturing the optical fiber connector of the present invention is the method for manufacturing the optical fiber connector, and includes the first step of: after laminating the first lower cladding layer on the substrate, the etching is performed on the optical fiber to be guided. The first lower cladding layer of the trench portion is removed to form the first lower cladding layer on the optical waveguide side, and the second step is for forming the laminated core on the substrate on which the first lower cladding layer on the optical waveguide side is formed. After the resin layer, the optical fiber guiding core pattern and the optical signal transmitting core pattern are formed by etching once; and in the third step, the upper layer is laminated on the substrate on which the optical fiber guiding core pattern and the optical signal transmitting core pattern are formed After the resin layer for forming a cladding layer is removed, the resin layer for forming an upper cladding layer which is present in the portion where the fiber guiding groove is to be formed is removed by etching, thereby forming an upper cladding layer and an optical waveguide of the optical fiber guiding member side. a side upper cladding layer and a fiber guiding groove; and a fourth step of forming a cover material covering the fiber guiding groove.
本發明的光纖連接器和光纖的連接方法包括如下步驟,在上述的光纖連接器的光纖導引溝槽中填充黏著劑,並且插入配置光纖。 The method of connecting the optical fiber connector and the optical fiber of the present invention comprises the steps of filling the optical fiber guiding groove of the above-mentioned optical fiber connector with an adhesive and inserting the optical fiber.
本發明的光纖連接器和光纖的組裝體,包括:上述的光纖連接器,以及配置在上述光纖連接器的光纖導引溝槽的光纖及黏著劑。 The optical fiber connector and the optical fiber assembly of the present invention include the above-described optical fiber connector, and an optical fiber and an adhesive disposed in the optical fiber guiding groove of the optical fiber connector.
若成為該光纖連接器,則由於光纖導引構件與光波導並設,藉此藉由將光纖固定於光纖導引構件,而可容易地進行光纖與光波導芯的位置對準。而且,因光纖藉由光纖導引圖案及蓋材而被導引,故光纖的位置不易偏移。進而,只要將光纖插入至光纖導引溝槽,便可將光纖與光波導簡易固定。 When the optical fiber connector is used, since the optical fiber guiding member and the optical waveguide are disposed, the optical fiber and the optical waveguide core can be easily aligned by fixing the optical fiber to the optical fiber guiding member. Moreover, since the optical fiber is guided by the optical fiber guiding pattern and the cover material, the position of the optical fiber is not easily shifted. Further, by inserting the optical fiber into the fiber guiding groove, the optical fiber and the optical waveguide can be easily fixed.
(光纖連接器的構造) (Structure of fiber optic connector)
以下,參照圖式,對第1實施形態的光纖連接器1進行說明。第1圖是表示第1實施形態的光纖連接器1的平面圖,第2圖是表示第1實施形態的光纖連接器的立體圖,第3圖是沿著第1圖的A-A線的端視圖,第4圖是沿著第1圖的B-B線的端視圖,第5圖是沿著第1圖的C-C線的端視圖,第6圖是沿著第1圖的D-D線的端視圖。 Hereinafter, the optical fiber connector 1 of the first embodiment will be described with reference to the drawings. Fig. 1 is a plan view showing the optical connector 1 of the first embodiment, Fig. 2 is a perspective view showing the optical connector of the first embodiment, and Fig. 3 is an end view taken along line AA of Fig. 1, 4 is an end view taken along line BB of FIG. 1, FIG. 5 is an end view taken along line CC of FIG. 1, and FIG. 6 is an end view taken along line DD of FIG. 1.
第1實施形態的光纖連接器1並設著光纖導引構件2與光波導3。 The optical fiber connector 1 of the first embodiment is provided with the optical fiber guiding member 2 and the optical waveguide 3.
光纖導引構件2包括:構成基板10的一部分(第3圖中的左側)的光纖導引側基板部10a,光纖導引側基板 部10a上的光纖導引圖案26(第3圖),及覆蓋光纖導引圖案26的蓋材40。 The optical fiber guiding member 2 includes a fiber guiding side substrate portion 10a constituting a part (the left side in FIG. 3) of the substrate 10, and a fiber guiding side substrate. The fiber guiding pattern 26 (Fig. 3) on the portion 10a and the cover member 40 covering the fiber guiding pattern 26.
而且,光波導3包括:基板10中與上述光纖導引側基板部10a鄰接的光波導側基板部10b,光波導側基板部10b上的光波導側第1下部包覆層22b,光波導側第1下部包覆層22b上的光信號傳達用芯圖案23b,及光信號傳達用芯圖案23b上的光波導側上部包覆層24b。 Further, the optical waveguide 3 includes an optical waveguide side substrate portion 10b adjacent to the above-described optical fiber guiding side substrate portion 10a in the substrate 10, and an optical waveguide side first lower cladding layer 22b on the optical waveguide side substrate portion 10b, and an optical waveguide side The optical signal transmission core pattern 23b on the first lower cladding layer 22b and the optical waveguide side upper cladding layer 24b on the optical signal transmission core pattern 23b.
其次,對該些光纖導引構件2及光波導3進行更詳細說明。 Next, the optical fiber guiding member 2 and the optical waveguide 3 will be described in more detail.
基板10包含:俯視形狀為長方形的基板本體11,配置於基板本體11的背面的金屬配線12,及存在於基板本體11的表面的大致整個面的黏著層13。該黏著層13較佳為作為第2下部包覆層發揮功能。然而,亦可省略黏著層13。 The substrate 10 includes a substrate body 11 having a rectangular shape in plan view, a metal wiring 12 disposed on the back surface of the substrate body 11 , and an adhesive layer 13 present on substantially the entire surface of the substrate body 11 . The adhesive layer 13 preferably functions as a second lower cladding layer. However, the adhesive layer 13 can also be omitted.
該基板10的一部分(第3圖中的左側)成為光纖導引側基板部10a,剩餘部分(第3圖中的右側)成為光波導側基板部10b。 A part of the substrate 10 (the left side in FIG. 3) is the fiber guiding side substrate portion 10a, and the remaining portion (the right side in FIG. 3) is the optical waveguide side substrate portion 10b.
而且,蓋材40包含蓋材本體41、及存在於蓋材本體41的背面的黏著層42。亦可省略該黏著層42。 Further, the lid member 40 includes a lid member body 41 and an adhesive layer 42 present on the back surface of the lid member body 41. The adhesive layer 42 can also be omitted.
本實施形態中,蓋材40從光纖導引構件2遍及(across)光波導3而延伸。因此,該蓋材40包括覆蓋光纖導引構件2的光纖導引側蓋材部40a,及覆蓋光波導3的光波導側蓋材部40b。其中,該蓋材40亦可不延伸至光波導3為止。 In the present embodiment, the cover member 40 extends from the optical fiber guiding member 2 across the optical waveguide 3. Therefore, the cover member 40 includes the optical fiber guiding side cover portion 40a covering the optical fiber guiding member 2, and the optical waveguide side cover portion 40b covering the optical waveguide 3. The cover member 40 may not extend to the optical waveguide 3 .
在該光纖導引側基板部10a上存在光纖導引圖案26。該光纖導引圖案26包括彼此隔開間隔而平行地存在的多根(本實施形態中5根)導引構件126(第1圖及第2圖)。該些多根導引構件126與基板10的長邊平行地延伸。相鄰的2根導引構件126間的空間成為光纖導引溝槽32。 A fiber guiding pattern 26 is present on the fiber guiding side substrate portion 10a. The optical fiber guiding pattern 26 includes a plurality of (five in the present embodiment) guiding members 126 (first and second figures) which are present in parallel with each other at intervals. The plurality of guiding members 126 extend in parallel with the long sides of the substrate 10. The space between the adjacent two guiding members 126 becomes the fiber guiding groove 32.
該光纖導引圖案26包含:存在於光纖導引側基板部10a上的光纖導引側第1下部包覆層22a,存在於該光纖導引側第1下部包覆層22a上的光纖導引芯圖案23a,及存在於該光纖導引芯圖案23a上的光纖導引側上部包覆層24a。 The fiber guiding pattern 26 includes a fiber guiding side first lower cladding layer 22a existing on the fiber guiding side substrate portion 10a, and a fiber guiding guide existing on the fiber guiding side first lower cladding layer 22a. The core pattern 23a and the fiber guiding side upper cladding layer 24a present on the fiber guiding core pattern 23a.
上述光纖導引側第1下部包覆層22a如第2圖所示,包含彼此隔開間隔而平行地存在的多根(本實施形態中5根)光纖導引側第1下部包覆片122。同樣地,上述光纖導引芯圖案23a包含彼此隔開間隔而平行地存在的多根(本實施形態中5根)光纖導引芯片123。同樣地,上述光纖導引側上部包覆層24a包含彼此隔開間隔而平行地存在的多根(本實施形態中5根)光纖導引側上部包覆片124。 As shown in FIG. 2, the first optical fiber guiding side first lower cladding layer 22a includes a plurality of (five in the present embodiment) optical fiber guiding side first lower wrapping sheets 122 which are present in parallel with each other at intervals. . Similarly, the above-described optical fiber guiding core pattern 23a includes a plurality of (five in the present embodiment) optical fiber guiding chips 123 which are present in parallel with each other at intervals. Similarly, the optical fiber guiding side upper cladding layer 24a includes a plurality of (five in the present embodiment) optical fiber guiding side upper wrapping sheets 124 which are present in parallel with each other at intervals.
上述導引構件126包括該些光纖導引側第1下部包覆片122、光纖導引芯片123、及光纖導引側上部包覆片124。 The guiding member 126 includes the first fiber guiding side first lower wrapping sheet 122, the fiber guiding chip 123, and the fiber guiding side upper wrapping sheet 124.
如第2圖所示,在中央的3根導引構件126,光纖導引芯片123覆蓋光纖導引側第1下部包覆片122的上表面及側面,且延伸至光纖導引側基板部10a的表面為止。換句話說,在光纖導引側基板部10a上立設光纖導引芯片123,成為該光纖導引芯片123的內部存在光纖導引側第1 下部包覆片122的構造。而且,兩端的2根導引構件126中,光纖導引芯片123比光纖導引側第1下部包覆片122更向光纖導引溝槽32側突出,覆蓋光纖導引側第1下部包覆片122的側面並延伸至光纖導引側基板部10a為止。 As shown in FIG. 2, the optical guiding chip 123 covers the upper surface and the side surface of the first lower wrapping sheet 122 on the optical fiber guiding side, and extends to the optical fiber guiding side substrate portion 10a at the three guiding members 126 at the center. The surface is up. In other words, the optical fiber guiding chip 123 is erected on the optical fiber guiding side substrate portion 10a, and the optical fiber guiding chip 123 has the optical fiber guiding side first. The configuration of the lower cover sheet 122. Further, in the two guiding members 126 at both ends, the optical fiber guiding chip 123 protrudes toward the optical fiber guiding groove 32 from the first lower cladding sheet 122 on the optical fiber guiding side, and covers the first lower cladding of the optical fiber guiding side. The side surface of the sheet 122 extends to the fiber guiding side substrate portion 10a.
而且,在該些5根光纖導引芯片123的上表面,存在光纖導引側上部包覆片124。藉由該些光纖導引芯片123及光纖導引側上部包覆片124,形成光纖導引溝槽32的側面。如第6圖所示,該些光纖導引芯片123的側面比其上方的光纖導引側上部包覆片124的側面更向光纖導引溝槽32側突出。藉此,與光纖導引溝槽32的光路正交的方向的剖面成為T字形。亦即,光纖導引溝槽32成為:由相鄰的導引構件126的光纖導引芯片123形成的窄寬部及由該相鄰的導引構件126的相鄰的光纖導引側上部包覆片124形成的與窄寬部相連的形狀。如此,由於光纖導引溝槽32成為T字形狀,光纖導引芯片123比光纖導引側上部包覆片124更向光纖導引溝槽32側突出,因此光纖的側部實質上藉由導引構件126的光纖導引芯片123而被保持。藉此,因可藉由光纖導引芯圖案23a來固定光纖的側部,故可精度良好地將光信號傳達用芯圖案23b和光纖位置對準。進而在製造時,即便上部包覆層及下部包覆層的形成位置與芯圖案多少有一些偏移,亦可實現如下的優異的效果:可避免上部包覆層及下部包覆層形成於光纖導引溝槽上而妨礙光纖的插入。而且,如上述般,光纖的側部藉由光纖導引芯片123而保持,因此利用與光信號傳達用 芯相同的遮罩來設計該光纖導引芯片123,藉此可實現能夠精度更良好地將光纖與光信號傳達用芯定位的優異的效果。 Further, on the upper surfaces of the five fiber guiding chips 123, the fiber guiding side upper wrapping sheets 124 are present. The side faces of the fiber guiding grooves 32 are formed by the fiber guiding chips 123 and the fiber guiding side upper wrapping sheets 124. As shown in FIG. 6, the side faces of the optical fiber guiding chips 123 protrude toward the side of the optical fiber guiding groove 32 from the side of the upper optical fiber guiding side upper wrapping sheet 124. Thereby, the cross section in the direction orthogonal to the optical path of the optical fiber guiding groove 32 has a T-shape. That is, the fiber guiding groove 32 is a narrow portion formed by the fiber guiding chip 123 of the adjacent guiding member 126 and an adjacent fiber guiding side upper package of the adjacent guiding member 126 The shape of the cover sheet 124 is connected to the narrow portion. In this manner, since the fiber guiding groove 32 has a T-shape, the fiber guiding chip 123 protrudes toward the fiber guiding groove 32 side from the fiber guiding side upper wrapping sheet 124, so that the side portion of the fiber is substantially guided. The fiber guiding chip 123 of the lead member 126 is held. Thereby, since the side portion of the optical fiber can be fixed by the optical fiber guiding core pattern 23a, the optical signal transmission core pattern 23b can be accurately aligned with the optical fiber. Further, at the time of manufacture, even if the positions where the upper cladding layer and the lower cladding layer are formed are somewhat offset from the core pattern, the following excellent effects can be achieved: the upper cladding layer and the lower cladding layer can be prevented from being formed on the optical fiber. Guide the groove to prevent the insertion of the fiber. Further, as described above, the side portion of the optical fiber is held by the optical fiber guiding chip 123, so that it is used for optical signal transmission. The fiber guiding chip 123 is designed with the same mask as the core, whereby an excellent effect of positioning the optical fiber and the optical signal transmitting core with higher accuracy can be achieved.
而且,光纖導引側上部包覆層24a填埋光纖導引芯圖案23a與後述的光纖導引側蓋材部40a之間的空間。藉此,可藉由光纖導引圖案26來支持光纖導引側蓋材部40a。而且,光纖導引圖案26的上端固定於光纖導引側蓋材部40a,因此可藉由光纖導引圖案26將光纖牢固地固定。 Further, the fiber guiding side upper cladding layer 24a fills a space between the fiber guiding core pattern 23a and a fiber guiding side cover portion 40a which will be described later. Thereby, the fiber guiding side cover portion 40a can be supported by the fiber guiding pattern 26. Further, since the upper end of the optical fiber guiding pattern 26 is fixed to the optical fiber guiding side cover portion 40a, the optical fiber can be firmly fixed by the optical fiber guiding pattern 26.
另外,如第2圖所示,外側的2根導引構件126中,光纖導引側上部包覆片124從光纖導引芯片123的上表面遍及外側的側面而存在。 Further, as shown in Fig. 2, in the outer two guiding members 126, the optical fiber guiding side upper wrapping sheet 124 exists from the upper surface of the optical fiber guiding chip 123 to the outer side surface.
上述光纖導引芯圖案23a是用以將光纖固定的導引件,從而並不發揮作為光信號傳達用的芯的功能。 The optical fiber guiding core pattern 23a is a guide for fixing the optical fiber, and does not function as a core for optical signal transmission.
在該光纖導引圖案26上,存在覆蓋光纖導引圖案26的光纖導引側蓋材部40a。藉由該光纖導引側蓋材部40a,光纖導引溝槽32的上端被閉合。 On the fiber guiding pattern 26, there is a fiber guiding side cover portion 40a covering the fiber guiding pattern 26. By the fiber guiding side cover portion 40a, the upper end of the fiber guiding groove 32 is closed.
而且,在上述的光波導側基板部10b上,存在光波導側第1下部包覆層22b。該光波導側第1下部包覆層22b存在於光波導側基板部10b的表面的大致整個面。 Further, on the optical waveguide side substrate portion 10b described above, the optical waveguide side first lower cladding layer 22b is present. The optical waveguide side first lower cladding layer 22b is present on substantially the entire surface of the surface of the optical waveguide side substrate portion 10b.
在該光波導側第1下部包覆層22b上,存在光信號傳達用芯圖案23b。該光信號傳達用芯圖案23b如第1圖所示,包括隔開間隔而配置的多根(本實施形態中4根)芯構件23c(第1圖)。如第1圖所示,芯構件23c整體沿基板10的長邊方向延伸。芯構件23c包含一端側部、中央部、 及另一端側部。一端側部為光纖導引構件2側的部分,且在基板10的長邊方向上延伸,相鄰的一端側部彼此的間隔變窄。中央部與上述一端側部相連,相對於基板10的長邊方向與基板10的外側成角度地延伸。另一端側部與上述中央部相連,且在基板10的長邊方向上延伸,相鄰的另一端側部彼此的間隔比上述一端側部彼此的間隔寬。如此,本實施形態中,光波導3具有芯圖案23b的間距轉換功能。藉此,可使應藉由光纖連接器1而固定的光纖的光纖帶的光纖間距、與應設定於光纖連接器的光路轉換鏡31的上方的光學元件陣列的間距一致。 The optical signal transmission core pattern 23b is present on the optical waveguide side first lower cladding layer 22b. As shown in Fig. 1, the optical signal transmission core pattern 23b includes a plurality of (four in the present embodiment) core members 23c (first drawing) arranged at intervals. As shown in FIG. 1, the core member 23c as a whole extends in the longitudinal direction of the substrate 10. The core member 23c includes one end side portion, a center portion, And the other side of the side. The one end side portion is a portion on the side of the optical fiber guiding member 2, and extends in the longitudinal direction of the substrate 10, and the interval between the adjacent one end side portions is narrowed. The central portion is connected to the one end side portion, and extends at an angle to the outer side of the substrate 10 with respect to the longitudinal direction of the substrate 10. The other end side portion is connected to the central portion, and extends in the longitudinal direction of the substrate 10, and the interval between the adjacent other end side portions is wider than the interval between the one end side portions. As described above, in the present embodiment, the optical waveguide 3 has the pitch conversion function of the core pattern 23b. Thereby, the fiber pitch of the optical fiber ribbon of the optical fiber to be fixed by the optical fiber connector 1 can be made to match the pitch of the optical element array to be set above the optical path conversion mirror 31 of the optical fiber connector.
然而,該間距轉換功能並非為必須。例如,芯圖案23b亦可為直線、S字彎曲、逆S字彎曲。 However, this pitch conversion function is not required. For example, the core pattern 23b may be a straight line, an S-shaped curve, or an inverse S-shaped curve.
在該光信號傳達用芯圖案23b上,存在光波導側上部包覆層24b。如第5圖所示,成為該光波導側上部包覆層24b內埋設著光信號傳達用芯圖案23b的構造。 The optical waveguide side upper cladding layer 24b is present on the optical signal transmission core pattern 23b. As shown in Fig. 5, the optical signal transmitting core pattern 23b is embedded in the optical waveguide side upper cladding layer 24b.
從該光波導側上部包覆層24b遍及光信號傳達用芯圖案23b而設置著V字溝槽30。該V字溝槽30可遍及基板10的短邊方向的全長延伸,存在於至少1根光信號傳達用芯圖案23b的光路上即可。因光信號傳達用芯圖案23b的折射率與空氣的折射率不同,故藉由利用該折射率差,而可將該V字溝槽30的光纖導引構件2側的面設為光路轉換鏡31。而且,如圖示般,亦可在V字溝槽30的2側面中至少光纖導引構件2側的面,設置包含蒸鍍金屬層的光路轉換鏡31。 The V-shaped groove 30 is provided from the optical waveguide-side upper cladding layer 24b over the optical signal transmission core pattern 23b. The V-shaped groove 30 may extend over the entire length of the substrate 10 in the short-side direction and may exist on the optical path of at least one of the optical signal transmission core patterns 23b. Since the refractive index of the optical signal transmission core pattern 23b is different from the refractive index of the air, the surface of the V-shaped groove 30 on the side of the optical fiber guiding member 2 can be set as an optical path conversion mirror by using the refractive index difference. 31. Further, as shown in the figure, an optical path conversion mirror 31 including a vapor-deposited metal layer may be provided on at least the surface of the V-shaped groove 30 on the side of the optical fiber guiding member 2 side.
本實施形態中,該光路轉換鏡31設置在光信號傳達用芯圖案23b(芯構件23c)的上述另一端側部,亦可設置在一端側部或中央部。其中,從避免來自鄰接的芯構件23c的信號接收的觀點考慮,較佳為設置在芯構件23c彼此的間隔變寬的另一端側部。 In the present embodiment, the optical path conversion mirror 31 is provided on the other end side portion of the optical signal transmission core pattern 23b (core member 23c), and may be provided at one end side portion or central portion. Among these, from the viewpoint of avoiding signal reception from the adjacent core member 23c, it is preferable to provide the other end side portion in which the interval between the core members 23c is widened.
在該光波導側上部包覆層24b的表面存在光波導側蓋材部40b。該光波導側蓋材部40b成為V字溝槽30的加強部。 The optical waveguide side cover member portion 40b is present on the surface of the optical waveguide side upper cladding layer 24b. The optical waveguide side cover portion 40b serves as a reinforcing portion of the V-shaped groove 30.
如第3圖所示,在該些光纖導引構件2與光波導3的邊界,存在狹縫溝槽25。該狹縫溝槽25從蓋材40的下面遍及基材10(黏著層13)的厚度方向的中途而存在。而且,該狹縫溝槽25存在於至少光信號傳達用芯圖案23b與光纖導引構件2的邊界即可,亦可遍及基板10的短邊方向的全長而延伸。在將該狹縫溝槽25設置在基板10的短邊方向的一部分的情況下,可藉由雷射加工而較佳地形成。在將該狹縫溝槽25遍及基板10的短邊方向的全長而設置的情況下,可藉由雷射加工或切割機(Dicing Saw)而較佳地形成。 As shown in Fig. 3, a slit groove 25 is present at the boundary between the optical fiber guiding member 2 and the optical waveguide 3. The slit groove 25 exists from the lower surface of the lid member 40 in the middle of the thickness direction of the substrate 10 (adhesive layer 13). Further, the slit groove 25 may exist at least at the boundary between the optical signal transmission core pattern 23b and the optical fiber guiding member 2, and may extend over the entire length of the substrate 10 in the short-side direction. When the slit trench 25 is provided in a part of the short side direction of the substrate 10, it can be preferably formed by laser processing. In the case where the slit groove 25 is provided over the entire length of the substrate 10 in the short-side direction, it can be preferably formed by a laser processing or a Dicing Saw.
如第1圖所示,在上述光信號傳達用芯圖案23b的各芯構件23c的光路方向的延長線上,存在上述光纖導引溝槽32。 As shown in Fig. 1, the optical fiber guiding groove 32 is present on an extension line of the optical path direction of each of the core members 23c of the optical signal transmission core pattern 23b.
在如上述般構成的光纖連接器1中,光纖插入至光纖導引溝槽32,光纖的端面與光信號傳達用芯圖案23b的端面接觸,且利用黏著劑而固定(參照後述第48圖)。如此 僅插入光纖便可進行光纖與光波導3的位置對準。 In the optical fiber connector 1 configured as described above, the optical fiber is inserted into the optical fiber guiding groove 32, and the end surface of the optical fiber is in contact with the end surface of the optical signal transmission core pattern 23b, and is fixed by an adhesive (refer to Fig. 48 which will be described later). . in this way The position alignment of the optical fiber and the optical waveguide 3 can be performed only by inserting the optical fiber.
此時,光纖導引溝槽32的寬度方向(第6圖的左右方向)的位置對準可藉由光纖導引圖案26來進行,光纖導引溝槽32的高度方向(第3圖的上下方向)的位置對準可藉由基板10及蓋材40來進行。若將黏著劑導入光纖導引溝槽32,則光纖與基板10的間隙、光纖與蓋材40的間隙、及光纖與光纖導引圖案26的間隙中分別填充著黏著劑,從而可減少光波導3和光纖的軸偏移。藉由如此設置間隙,而黏著劑的液體循環性亦提高。 At this time, the alignment of the width direction of the fiber guiding groove 32 (the horizontal direction of FIG. 6) can be performed by the fiber guiding pattern 26, and the height direction of the fiber guiding groove 32 (the upper and lower sides of FIG. 3) The alignment of the directions can be performed by the substrate 10 and the cover member 40. When the adhesive is introduced into the fiber guiding groove 32, the gap between the optical fiber and the substrate 10, the gap between the optical fiber and the cover member 40, and the gap between the optical fiber and the optical fiber guiding pattern 26 are filled with an adhesive, thereby reducing the optical waveguide. 3 and the axis offset of the fiber. By setting the gap in this way, the liquid circulation property of the adhesive is also improved.
(光纖連接器的製造方法) (Manufacturing method of optical fiber connector)
以下,參照圖式,對第1實施形態的光纖連接器1的製造方法進行說明。 Hereinafter, a method of manufacturing the optical fiber connector 1 of the first embodiment will be described with reference to the drawings.
第7圖是表示光纖連接器1的基板的第1製造步驟的相當於第1圖的A-A線的部位的端視圖,第8圖是表示光纖連接器1的基板的第1製造步驟的相當於第1圖的C-C線的部位的端視圖。 Fig. 7 is an end view showing a portion corresponding to the AA line of Fig. 1 in the first manufacturing step of the substrate of the optical connector 1, and Fig. 8 is a view showing the equivalent of the first manufacturing step of the substrate of the optical connector 1. An end view of the portion of the CC line in Fig. 1.
第9圖是表示光纖連接器1的基板的第2製造步驟的相當於第1圖的A-A線的部位的端視圖,第10圖是表示光纖連接器1的基板的第2製造步驟的相當於第1圖的C-C線的部位的端視圖。 FIG. 9 is an end view showing a portion corresponding to the line AA of FIG. 1 in the second manufacturing step of the substrate of the optical connector 1, and FIG. 10 is a view showing the equivalent of the second manufacturing step of the substrate of the optical connector 1. An end view of the portion of the CC line in Fig. 1.
第11圖是表示光纖連接器1的基板的第3製造步驟的相當於第1圖的A-A線的部位的端視圖,第12圖是表示光纖連接器1的基板的第3製造步驟的相當於第1圖的C-C線的部位的端視圖。 11 is an end view showing a portion corresponding to the line AA of FIG. 1 in the third manufacturing step of the substrate of the optical connector 1, and FIG. 12 is a view showing the third manufacturing step of the substrate of the optical connector 1. An end view of the portion of the CC line in Fig. 1.
第13圖是表示光纖連接器1的第1步驟的相當於第1圖的A-A線的部位的端視圖,第14圖是表示光纖連接器1的第1步驟的相當於第1圖的B-B線的部位的端視圖,第15圖是表示光纖連接器1的第1步驟的相當於第1圖的C-C線的部位的端視圖,第16圖是表示光纖連接器1的第1步驟的相當於第1圖的D-D線的部位的端視圖。 Fig. 13 is an end view showing a portion corresponding to the AA line of Fig. 1 in the first step of the optical connector 1, and Fig. 14 is a line BB corresponding to Fig. 1 showing the first step of the optical connector 1. FIG. 15 is an end view showing a portion corresponding to the CC line of FIG. 1 in the first step of the optical fiber connector 1, and FIG. 16 is a view showing the first step of the optical fiber connector 1. An end view of the portion of the DD line of Fig. 1.
第17圖是表示光纖連接器1的第2步驟的相當於第1圖的A-A線的部位的端視圖,第18圖是表示光纖連接器1的第2步驟的相當於第1圖的B-B線的部位的端視圖,第19圖是表示光纖連接器1的第2步驟的相當於第1圖的C-C線的部位的端視圖,第20圖是表示光纖連接器1的第2步驟的相當於第1圖的D-D線的部位的端視圖。 17 is an end view showing a portion corresponding to the AA line of FIG. 1 in the second step of the optical fiber connector 1, and FIG. 18 is a BB line corresponding to the first figure showing the second step of the optical fiber connector 1. FIG. 19 is an end view showing a portion corresponding to the CC line of FIG. 1 in the second step of the optical fiber connector 1, and FIG. 20 is a view showing the second step of the optical fiber connector 1. An end view of the portion of the DD line of Fig. 1.
第21圖是表示光纖連接器1的第3步驟的相當於第1圖的A-A線的部位的端視圖,第22圖是表示光纖連接器1的第3步驟的相當於第1圖的B-B線的部位的端視圖,第23圖是表示光纖連接器1的第3步驟的相當於第1圖的C-C線的部位的端視圖,第24圖是表示光纖連接器1的第3步驟的相當於第1圖的D-D線的部位的端視圖。 21 is an end view showing a portion corresponding to the AA line of FIG. 1 in the third step of the optical fiber connector 1, and FIG. 22 is a BB line corresponding to the first figure showing the third step of the optical fiber connector 1. Fig. 23 is an end view showing a portion corresponding to the CC line of Fig. 1 in the third step of the optical connector 1, and Fig. 24 is a view showing the third step of the optical connector 1 An end view of the portion of the DD line of Fig. 1.
第25圖是表示光纖連接器1的第5步驟及第6步驟的立體圖,第26圖是表示光纖連接器1的第5步驟及第6步驟的相當於第1圖的A-A線的部位的端視圖,第27圖是表示光纖連接器1的第5步驟及第6步驟的相當於第1圖的B-B線的部位的端視圖。 Fig. 25 is a perspective view showing a fifth step and a sixth step of the optical connector 1, and Fig. 26 is a view showing a portion corresponding to a portion corresponding to the AA line of Fig. 1 in the fifth step and the sixth step of the optical connector 1. In the view, Fig. 27 is an end view showing a portion corresponding to the BB line of Fig. 1 in the fifth step and the sixth step of the optical fiber connector 1.
第28圖是表示光纖連接器1的第7步驟的相當於第1 圖的A-A線的部位的端視圖,第29圖是表示光纖連接器1的第7步驟的相當於第1圖的B-B線的部位的端視圖。 Figure 28 is a diagram showing the seventh step of the optical fiber connector 1 corresponding to the first In the end view of the portion of the A-A line in the drawing, FIG. 29 is an end view showing a portion corresponding to the line B-B of the first drawing in the seventh step of the optical fiber connector 1.
第1實施形態的光纖連接器的製造方法包含下述的第1步驟、第2步驟、第3步驟及第4步驟。而且,亦可包含下述的基板的第1製造步驟、基板的第2製造步驟、第5步驟、第6步驟及第7步驟。 The method for manufacturing an optical fiber connector according to the first embodiment includes the following first step, second step, third step, and fourth step. Further, the first manufacturing step of the substrate, the second manufacturing step, the fifth step, the sixth step, and the seventh step of the substrate may be included.
<基板的第1製造步驟(第7圖,第8圖)> <First Manufacturing Step of Substrate (Fig. 7, Fig. 8)>
本步驟中,在基板本體11的背面形成金屬層12a。該金屬層12a亦可藉由蒸鍍等而形成。 In this step, the metal layer 12a is formed on the back surface of the substrate body 11. The metal layer 12a can also be formed by vapor deposition or the like.
<基板的第2製造步驟(第9圖、第10圖)> <Second manufacturing step of the substrate (Fig. 9 and Fig. 10)>
本步驟中,藉由蝕刻等從金屬層12a將不需要的部分除去,從而形成金屬配線12。作為蝕刻溶液,可列舉氯化第2銅(cupric chloride)水溶液、氯化第2鐵(ferric chloride)水溶液、過氧化氫水、硫酸水溶液、鹽酸、硝酸水溶液等。 In this step, unnecessary portions are removed from the metal layer 12a by etching or the like to form the metal wiring 12. Examples of the etching solution include a chlorinated cupric chloride aqueous solution, a chlorinated second ferric chloride aqueous solution, hydrogen peroxide water, a sulfuric acid aqueous solution, hydrochloric acid, and an aqueous nitric acid solution.
<基板的第3製造步驟(第11圖、第12圖)> <The third manufacturing step of the substrate (Fig. 11 and Fig. 12)>
其次,在基板本體11的表面形成黏著層13。該黏著層13的形成方法未作特別限制,可藉由與後述第1下部包覆層同樣的方法而較佳地形成。 Next, an adhesive layer 13 is formed on the surface of the substrate body 11. The method of forming the adhesive layer 13 is not particularly limited, and can be preferably formed by the same method as the first lower cladding layer described later.
<第1步驟(第13圖~第16圖)> <Step 1 (Fig. 13 to Fig. 16)>
第1步驟是如下步驟:在基板10上積層第1下部包覆層後,藉由蝕刻而將存在於應形成光纖導引溝槽32的部位的第1下部包覆層除去,並形成光波導側第1下部包覆層22b。 The first step is a step of removing the first lower cladding layer existing at a portion where the optical fiber guiding groove 32 is to be formed by etching, and then forming an optical waveguide by laminating the first lower cladding layer on the substrate 10. The first lower cladding layer 22b is on the side.
第1下部包覆層的形成方法未作特別限定,例如,藉 由包覆層形成用樹脂組成物的塗佈或包覆層形成用樹脂膜的層壓形成即可。 The method for forming the first lower cladding layer is not particularly limited, for example, borrowing The coating of the resin composition for forming a cladding layer or the resin film for forming a cladding layer may be formed by lamination.
在藉由塗佈的情況下,其方法不作限定,藉由普通方法塗佈包覆層形成用樹脂組成物即可。而且,層壓中所使用的包覆層形成用樹脂膜例如藉由如下方法而可容易製造:將包覆層形成用樹脂組成物溶解於溶劑中,並塗佈於承載膜,且除去溶劑。另外,後述的光纖導引側第1下部包覆層22a亦可藉由與第1下部包覆層同樣的方法而較佳地形成。 In the case of coating, the method is not limited, and the resin composition for forming a coating layer may be applied by a usual method. In addition, the resin film for forming a cladding layer used for lamination can be easily produced, for example, by dissolving the resin composition for forming a cladding layer in a solvent, applying it to a carrier film, and removing the solvent. Further, the first lower cladding layer 22a on the optical fiber guiding side to be described later can be preferably formed by the same method as the first lower cladding layer.
本實施形態中,如第14圖及第16圖所示,第1下部包覆層形成用樹脂膜中,藉由蝕刻僅將存在於應形成光纖導引溝槽32的部位的第1下部包覆層形成用樹脂膜除去。因此,在光纖導引側基板部10a的表面形成光纖導引側第1下部包覆層22a。然而,亦可不形成該光纖導引構件側第1下部包覆層22a,將光纖導引構件側的第1下部包覆層形成用樹脂膜全部除去。 In the first embodiment, as shown in FIG. 14 and FIG. 16, the first lower cladding layer is formed in the first lower cladding layer forming resin film by etching only the portion where the fiber guiding groove 32 is to be formed. The coating layer is formed by a resin film. Therefore, the first lower cladding layer 22a on the optical fiber guiding side is formed on the surface of the optical fiber guiding side substrate portion 10a. However, the first lower cladding layer 22a on the side of the optical fiber guiding member may not be formed, and the first resin film for forming the lower cladding layer on the side of the optical fiber guiding member may be removed.
<第2步驟(第17圖~第20圖)> <Step 2 (Fig. 17 to Fig. 20)>
第2步驟是如下步驟:在形成有上述光波導側第1下部包覆層22b的基板10上,積層芯形成用樹脂層後,藉由蝕刻將光纖導引芯圖案23a與光信號傳達用芯圖案23b一次性形成。該芯形成用樹脂層亦可藉由與第1下部包覆層同樣的方法而較佳地形成。 The second step is a step of laminating the resin layer for forming a core on the substrate 10 on which the first lower cladding layer 22b on the optical waveguide side is formed, and then etching the optical fiber guiding core pattern 23a and the optical signal transmission core by etching. The pattern 23b is formed at one time. The core forming resin layer can also be preferably formed by the same method as the first lower cladding layer.
<第3步驟(第21圖~第24圖)> <Step 3 (Fig. 21 to Fig. 24)>
第3步驟是如下步驟:在形成有上述光纖導引芯圖案 23a與上述光信號傳達用芯圖案23b的基板10上,積層上部包覆層形成用樹脂層後,藉由蝕刻將存在於應形成上述光纖導引溝槽32的部位的上部包覆層形成用樹脂層除去,並形成光纖導引側上部包覆層24a、光波導側上部包覆層24b及光纖導引溝槽32。該上部包覆層形成用樹脂層亦可藉由與第1下部包覆層同樣的方法而較佳地形成。 The third step is the step of forming the above-mentioned fiber guiding core pattern After the resin layer for forming the upper cladding layer is laminated on the substrate 10 of the optical signal transmission core pattern 23b, the upper cladding layer is formed by etching at the portion where the optical fiber guiding groove 32 is to be formed. The resin layer is removed, and the fiber guiding side upper cladding layer 24a, the optical waveguide side upper cladding layer 24b, and the optical fiber guiding groove 32 are formed. The resin layer for forming the upper cladding layer can also be preferably formed by the same method as the first lower cladding layer.
<第5步驟(第25圖~第27圖)> <Step 5 (Fig. 25 to Fig. 27)>
第5步驟是如下步驟:沿著上述光纖導引溝槽32與上述光波導側下部包覆層22b的邊界,在基板10表面形成狹縫溝槽25。該狹縫溝槽25較佳為藉由切割機而形成。 The fifth step is a step of forming a slit groove 25 on the surface of the substrate 10 along the boundary between the above-described optical fiber guiding groove 32 and the above-mentioned optical waveguide side lower cladding layer 22b. The slit groove 25 is preferably formed by a cutter.
形成該狹縫溝槽25的主要的理由為如下所示。第22圖中,包含光波導側第1下部包覆層22b、光信號傳達用芯圖案23b及光波導側上部包覆層24b的光纖導引構件2側的端部的光纖接合端面,相對於基板10垂直。然而,實際上在該光纖接合端面藉由蝕刻等形成的情況下,該光纖接合端面有時相對於基板10並不垂直,或者在該光纖接合端面產生凹凸。因此,以將該光纖接合端面形成為平面的方式形成狹縫溝槽25,藉此使該光纖接合端面成為與基板10垂直的平面。藉此,該光纖接合端面與光纖端面充分接觸,可防止或抑制該接合部位的光損失。而且,該狹縫溝槽25如第27圖所示,到達基板10的黏著層13為止。因此,防止光纖的端面的下部因光波導側第1下部包覆層22b的端部的壓陷部被朝向上方上推,而在該光纖接合端面與光纖端面的接合時可防止或抑制該接合部位的光損失。 The main reason for forming the slit groove 25 is as follows. In the same, the optical fiber joint end surface of the end portion on the side of the optical fiber guiding member 2 on the optical waveguide side first lower cladding layer 22b, the optical signal transmission core pattern 23b, and the optical waveguide side upper cladding layer 24b is provided. The substrate 10 is vertical. However, in actuality, when the fiber joint end face is formed by etching or the like, the fiber joint end face may not be perpendicular to the substrate 10 or may have irregularities on the fiber joint end face. Therefore, the slit groove 25 is formed such that the end face of the fiber joining is formed into a plane, whereby the end face of the fiber joining is a plane perpendicular to the substrate 10. Thereby, the fiber joint end face is in sufficient contact with the fiber end face, and light loss at the joint portion can be prevented or suppressed. Further, as shown in FIG. 27, the slit groove 25 reaches the adhesive layer 13 of the substrate 10. Therefore, the lower portion of the end face of the optical fiber is prevented from being pushed upward by the end portion of the end portion of the first lower cladding layer 22b on the optical waveguide side, and the bonding can be prevented or suppressed when the optical fiber bonding end face is bonded to the end face of the optical fiber. Light loss at the site.
本實施形態中,在進行第5步驟時,形成從光波導側上部包覆層24b到達光信號傳達用芯圖案23b為止的V字溝槽30。該V字溝槽30較佳為藉由切割機而形成。 In the fifth embodiment, the V-shaped groove 30 is formed from the optical waveguide-side upper cladding layer 24b to the optical signal transmission core pattern 23b. The V-shaped groove 30 is preferably formed by a cutter.
<第6步驟(第28圖~第29圖)> <Step 6 (Fig. 28 to Fig. 29)>
第6步驟中,在V字溝槽30的光纖導引構件2側的面形成包含金屬層的光路轉換鏡31。該光路轉換鏡31藉由金屬蒸鍍在V字溝槽30的光纖導引構件2側的面而可較佳地形成。 In the sixth step, an optical path conversion mirror 31 including a metal layer is formed on the surface of the V-shaped groove 30 on the side of the optical fiber guiding member 2. The optical path conversion mirror 31 can be preferably formed by metal deposition on the surface of the V-shaped groove 30 on the side of the optical fiber guiding member 2.
<第4步驟(第1圖~第6圖)> <Step 4 (Fig. 1 to Fig. 6)>
第4步驟是形成覆蓋上述光纖導引溝槽32的蓋材40的步驟。 The fourth step is a step of forming a cover member 40 covering the above-described fiber guiding groove 32.
該蓋材40可藉由如下而較佳地形成:準備包含蓋材本體41及其背面的黏著層42的積層體,使黏著層42黏著於光纖導引側上部包覆層24a及光波導側上部包覆層24b的表面。 The cover member 40 can be preferably formed by preparing a laminate including the cover member 41 and the adhesive layer 42 on the back surface thereof, and bonding the adhesive layer 42 to the upper side cladding layer 24a and the optical waveguide side of the optical fiber guiding side. The surface of the upper cladding layer 24b.
該蓋材40包含覆蓋光纖導引溝槽32的光纖導引側蓋材部40a、及覆蓋光波導側上部包覆層24b的光波導側蓋材部40b。該光波導側蓋材部40b作為光波導2的光路轉換鏡31形成部分的加強構件而發揮功能。 The cover member 40 includes an optical fiber guiding side cover portion 40a that covers the optical fiber guiding groove 32, and an optical waveguide side cover portion 40b that covers the optical waveguide side upper cladding layer 24b. The optical waveguide side cover portion 40b functions as a reinforcing member that forms part of the optical path conversion mirror 31 of the optical waveguide 2.
蓋材的形成方法可根據蓋材的材質而適當決定,但較佳為使用輥貼合機、真空疊合機等而形成。 The method of forming the lid member can be appropriately determined depending on the material of the lid member, but it is preferably formed by using a roll bonding machine, a vacuum laminator or the like.
(光纖連接器的各構件的說明) (Description of each component of the optical fiber connector)
以下,對構成本發明的光纖連接器的各構件進行說明。 Hereinafter, each member constituting the optical fiber connector of the present invention will be described.
(下部包覆層及上部包覆層) (lower cladding layer and upper cladding layer)
本說明書中,有時將光纖導引側上部包覆層24a及光波導側上部包覆層24b合併而稱作上部包覆層,將光纖導引側第1下部包覆層22a及光波導側第1下部包覆層22b合併而稱作第1下部包覆層,將第1下部包覆層及黏著層13合併而稱作下部包覆層。 In the present specification, the optical fiber guiding side upper cladding layer 24a and the optical waveguide side upper cladding layer 24b are collectively referred to as an upper cladding layer, and the optical fiber guiding side first lower cladding layer 22a and the optical waveguide side are sometimes referred to. The first lower cladding layer 22b is referred to as a first lower cladding layer, and the first lower cladding layer and the adhesive layer 13 are combined to be referred to as a lower cladding layer.
作為下部包覆層及上部包覆層,可使用包覆層形成用樹脂或包覆層形成用樹脂膜。 As the lower cladding layer and the upper cladding layer, a resin for forming a cladding layer or a resin film for forming a cladding layer can be used.
作為構成包覆層形成用樹脂膜的樹脂組成物,只要為以比光信號傳達用芯圖案23b低的折射率,藉由光或熱而硬化的樹脂組成物則不作特別限定,可較佳地使用熱硬化性樹脂組成物或感光性樹脂組成物。包覆層形成用樹脂膜中使用的樹脂組成物在下部包覆層及上部包覆層中,該樹脂組成物所含有的成分可相同亦可不同,該樹脂組成物的折射率可相同亦可不同。而且,關於第2下部包覆層,較佳為具有作為黏著層的功能,折射率或光硬化性的性質並非為必須,亦可使用後述的黏著劑或芯形成用樹脂膜。 The resin composition constituting the resin film for forming a cladding layer is not particularly limited as long as it is a refractive index lower than that of the optical signal transmission core pattern 23b, and is preferably cured by light or heat. A thermosetting resin composition or a photosensitive resin composition is used. The resin composition used for the resin film for forming a cladding layer may have the same or different components in the resin composition in the lower cladding layer and the upper cladding layer, and the resin composition may have the same refractive index. different. In addition, it is preferable that the second lower cladding layer has a function as an adhesive layer, and the refractive index or photocurability is not essential, and an adhesive or a resin film for forming a core to be described later may be used.
關於下部包覆層及上部包覆層的厚度,未作特別限定,乾燥後的厚度較佳為5μm~500μm的範圍。若為5μm以上,則可確保光的封閉(confinement)所需的包覆厚度,若為500μm以下,則容易均一地控制膜厚。從以上的觀點考慮,下部包覆層及上部包覆層的厚度進而更佳為10μm~100μm的範圍。而且,第1下部包覆層,進而較佳為使用如下厚度的膜,即,用以進行光纖的中心與光信號傳達用芯圖案23b的中心對準的硬化後的膜厚度為{(光纖 的半徑)-(形成於第1下部包覆層3上的光信號傳達用芯圖案23b厚度)/2}的厚度的膜。 The thickness of the lower cladding layer and the upper cladding layer is not particularly limited, and the thickness after drying is preferably in the range of 5 μm to 500 μm. When the thickness is 5 μm or more, the coating thickness required for confinement of light can be ensured, and if it is 500 μm or less, the film thickness can be easily controlled uniformly. From the above viewpoints, the thickness of the lower cladding layer and the upper cladding layer is more preferably in the range of 10 μm to 100 μm. Further, the first lower cladding layer is further preferably a film having a thickness of { (optical fiber) for aligning the center of the optical fiber with the center of the optical signal transmission core pattern 23b. A film having a thickness of - (the thickness of the optical signal transmission core pattern 23b formed on the first lower cladding layer 3) / 2}.
作為具體例,表示使用光纖的直徑80μm、光纖的芯徑50μm的光纖時的較佳的下部包覆層的厚度。首先,構成光信號傳達用芯圖案23b的各芯構件23c的芯徑,在從光纖向光信號傳達用芯圖案23b傳送光信號的情況下,與光纖的芯徑外接的正方形可無光損失地傳送。該情況下,芯構件23c為50μm×50μm(芯高度;50μm)。若符合上述式則最佳的下部包覆層的厚度成為15μm。而且,在使用與上述相同的光纖,從光纖向光信號傳達用芯圖案23b傳送光信號的情況下,與光纖的芯徑內接的正方形可無光損失地傳送。該情況下,芯構件23c成為25μm×25μm(芯高度;25μm)。若符合上述式則最佳的下部包覆層的厚度為(40-25)μm。 As a specific example, the thickness of a preferable lower cladding layer in the case of using an optical fiber having a diameter of 80 μm and an optical fiber having a core diameter of 50 μm is used. First, when the core diameter of each core member 23c constituting the optical signal transmission core pattern 23b is transmitted from the optical fiber to the optical signal transmission core pattern 23b, the square circumscribing the core diameter of the optical fiber can be lost without light loss. Transfer. In this case, the core member 23c is 50 μm × 50 μm (core height; 50 μm). If the above formula is satisfied, the thickness of the optimum lower cladding layer is 15 μm. Further, when an optical signal is transmitted from the optical fiber to the optical signal transmission core pattern 23b using the same optical fiber as described above, the square inscribed in the core diameter of the optical fiber can be transmitted without loss of light. In this case, the core member 23c becomes 25 Mm×25 Mm (core height; 25 Mm). If the above formula is met, the optimum thickness of the lower cladding layer is (40-25). ) μm.
而且,光波導3中,用於填埋光信號傳達用芯圖案23b的上部包覆層的厚度較佳為光信號傳達用芯圖案23b的厚度以上,以從基板10表面到上部包覆層上表面為止的高度成為光纖的直徑以上的方式進行適當調整即可。 Further, in the optical waveguide 3, the thickness of the upper cladding layer for filling the optical signal transmission core pattern 23b is preferably equal to or greater than the thickness of the optical signal transmission core pattern 23b so as to be from the surface of the substrate 10 to the upper cladding layer. The height of the surface may be appropriately adjusted so as to be equal to or larger than the diameter of the optical fiber.
(芯層形成用樹脂及芯層形成用樹脂膜) (Resin for forming a core layer and a resin film for forming a core layer)
本說明書中,有時將光纖導引芯圖案23a及光信號傳達用芯圖案23b合併而稱作芯圖案,並將進行蝕刻而形成芯圖案前的狀態稱作芯層。 In the present specification, the state in which the fiber guiding core pattern 23a and the optical signal transmitting core pattern 23b are combined and referred to as a core pattern, and the etching is performed to form a core pattern may be referred to as a core layer.
本發明中,芯圖案的形成方法未作特別限定,例如,藉由芯層形成用樹脂的塗佈或芯層形成用樹脂膜的層壓形 成芯層,藉由蝕刻形成芯圖案即可。 In the present invention, the method of forming the core pattern is not particularly limited. For example, the coating of the resin for forming a core layer or the lamination of the resin film for forming a core layer is used. The core layer is formed by etching to form a core pattern.
本發明中,光波導3與光纖導引構件2中,分別形成芯層後,同時進行蝕刻而同時形成光信號傳達用芯圖案23b與光纖導引芯圖案23a,藉此可高效地製造光纖連接器1。 In the present invention, after the core layer is formed in the optical waveguide 3 and the optical fiber guiding member 2, the optical signal transmitting core pattern 23b and the optical fiber guiding core pattern 23a are simultaneously formed by etching, whereby the optical fiber connection can be efficiently manufactured. Device 1.
芯層形成用樹脂,尤其光信號傳達用芯圖案23b中使用的芯層形成用樹脂,被設計成比包覆層高的折射率,較佳為使用藉由活性光線而可形成芯圖案的樹脂組成物。圖案化前的芯層的形成方法未作限定,可列舉藉由普通方法塗佈上述芯層形成用樹脂組成物的方法等。 The core layer forming resin, particularly the core layer forming resin used in the optical signal transmitting core pattern 23b, is designed to have a higher refractive index than the cladding layer, and it is preferable to use a resin which can form a core pattern by active light rays. Composition. The method of forming the core layer before the patterning is not limited, and a method of applying the resin composition for forming a core layer by a usual method may be mentioned.
關於芯層形成用樹脂膜的厚度未作特別限定,乾燥後的芯層的厚度通常調整為10μm~100μm。若該膜的加工後的光信號傳達用芯圖案23b的厚度為10μm以上,則具有在與光波導3形成後的受發光元件或光纖的結合中位置對準容許誤差(tolerance)可放大的優點,若為100μm以下,則具有在與光波導3形成後的受發光元件或光纖的結合中,結合效率提高的優點。根據以上的觀點,該膜的厚度進而較佳為30μm~90μm的範圍,為了獲得該厚度而適當調整膜厚度即可。 The thickness of the resin film for forming a core layer is not particularly limited, and the thickness of the core layer after drying is usually adjusted to 10 μm to 100 μm. When the thickness of the processed optical signal transmission core pattern 23b of the film is 10 μm or more, the positional alignment tolerance can be amplified in the combination of the light-receiving element or the optical fiber formed after the optical waveguide 3 is formed. When the thickness is 100 μm or less, there is an advantage that the bonding efficiency is improved in the combination of the light-receiving element or the optical fiber formed after the optical waveguide 3 is formed. From the above viewpoints, the thickness of the film is more preferably in the range of 30 μm to 90 μm, and the film thickness may be appropriately adjusted in order to obtain the thickness.
而且,光信號傳達用芯圖案23b的硬化後的厚度在從光纖向光信號傳達用芯圖案23b傳達光的情況下,若為光纖的芯徑以上則光的損失少,在從光信號傳達用芯圖案23b向光纖傳達光的情況下,若將包含光信號傳達用芯圖案23b的厚度與寬度的矩形調整為成為光纖的芯徑的內 側,則更佳。 In the case where the thickness of the optical signal transmission core pattern 23b after curing is transmitted from the optical fiber to the optical signal transmission core pattern 23b, if the core diameter of the optical fiber is equal to or greater than the core diameter of the optical fiber, the loss of light is small, and the optical signal is transmitted. When the core pattern 23b transmits light to the optical fiber, the rectangle including the thickness and the width of the optical signal transmission core pattern 23b is adjusted to be the inner diameter of the optical fiber. Side, it is better.
(基板) (substrate)
作為基板10的材質,未作特別限制,例如可列舉環氧玻璃樹脂基板、陶瓷基板、玻璃基板、矽基板、塑膠基板、金屬基板、附樹脂層的基板、附金屬層的基板、塑膠膜、附樹脂層的塑膠膜、附金屬層的塑膠膜、電氣配線板等。 The material of the substrate 10 is not particularly limited, and examples thereof include a glass epoxy resin substrate, a ceramic substrate, a glass substrate, a ruthenium substrate, a plastic substrate, a metal substrate, a substrate with a resin layer, a substrate with a metal layer, a plastic film, and A plastic film with a resin layer, a plastic film with a metal layer, and an electric wiring board.
該些中,作為基板10,具有柔軟性及強韌性的基材,例如藉由使用聚對苯二甲酸乙二酯(polyethylene terephthalate)、聚對苯二甲酸丁二酯(polybutylene terephthalate)、聚萘二甲酸乙二酯(polyethylene naphthalate)等的聚酯、聚乙烯(polyethylene)、聚丙烯(polypropylene)、聚醯胺(polyamide)、聚碳酸酯(polycarbonate)、聚苯醚(polyphenylene ether)、聚醚硫醚(polyether sulfide)、聚芳酯(Polyarylate)、液晶聚合物、聚碸(polysulfone)、聚醚碸(Poly ether sulfones)、聚醚醚酮(polyetheretherketone)、聚醚醯亞胺(polyetherimide)、聚醯胺-醯亞胺(polyamide imide)、聚醯亞胺(polyimide),亦可設為可撓性光纖連接器。關於基板10的厚度,可根據板的翹曲或尺寸穩定性而適當變更,較佳為10μm~10.0mm。在藉由光路轉換鏡而光路轉換的光信號透過基板10的情況下,亦可使用相對於光信號的波長為透明的基板10。其中,如後述般亦可省略光路轉換鏡,該情況下,亦可使用透明基板以外的基板。 Among these, as the substrate 10, a substrate having flexibility and toughness is used, for example, by using polyethylene terephthalate, polybutylene terephthalate, or polynaphthalene. Polyester such as polyethylene naphthalate, polyethylene, polypropylene, polyamide, polycarbonate, polyphenylene ether, polyether Polyether sulfide, polyarylate, liquid crystal polymer, polysulfone, poly ether sulfones, polyetheretherketone, polyetherimide, Polyimide imide or polyimide can also be used as a flexible optical fiber connector. The thickness of the substrate 10 can be appropriately changed depending on the warpage or dimensional stability of the sheet, and is preferably 10 μm to 10.0 mm. When the optical signal converted by the optical path by the optical path conversion mirror passes through the substrate 10, the substrate 10 which is transparent with respect to the wavelength of the optical signal can also be used. However, the optical path conversion mirror may be omitted as will be described later. In this case, a substrate other than the transparent substrate may be used.
而且,電氣配線板未作特別限定,金屬配線12亦可為 形成於FR-4上的電氣配線板,金屬配線12亦可為形成於聚醯亞胺或聚醯胺膜上的可撓性配線板。另外,金屬配線12可由金屬層12a形成。 Moreover, the electric wiring board is not particularly limited, and the metal wiring 12 may be In the electric wiring board formed on the FR-4, the metal wiring 12 may be a flexible wiring board formed on a polyimide or polyimide film. In addition, the metal wiring 12 may be formed of the metal layer 12a.
關於黏著層13的種類,未作特別限定,可較佳地列舉兩面膠帶、UV或熱硬化性黏著劑、預浸物、增層材、電氣配線板製造用途所使用的各種黏著劑。在光信號透過基板10的情況下,只要光信號波長中為透明即可,此時,較佳為使用與基板10具有黏著力的包覆層形成用樹脂膜或芯層形成用樹脂膜來形成黏著層13。 The type of the adhesive layer 13 is not particularly limited, and various adhesives used for the production of a double-faced tape, a UV or thermosetting adhesive, a prepreg, a build-up material, and an electric wiring board can be preferably used. In the case where the optical signal is transmitted through the substrate 10, it is sufficient that the wavelength of the optical signal is transparent. In this case, it is preferable to form a resin film for forming a cladding layer or a resin film for forming a core layer by using an adhesive layer having adhesion to the substrate 10. Adhesive layer 13.
(蓋材) (cover material)
本發明的光纖連接器1具有蓋材40。具有此種蓋材40的態樣中,重要的是光纖導引溝槽32的高度及寬度的任一者為固定於光纖導引溝槽32的光纖的直徑以上。亦即,需要使光纖導引溝槽32的高度比光纖的直徑大,且光纖導引溝槽32的寬度比光纖的直徑大。藉由滿足該條件,可將光纖容易地插入至由光纖導引溝槽32與蓋材40形成的空間內。而且,在如此而插入光纖的狀態下,以該光纖與可將光信號傳達至光波導3的光信號傳達用芯圖案23b的位置接合的方式,並設光纖導引構件2與光波導3。 The optical fiber connector 1 of the present invention has a cover member 40. In the case of such a cover member 40, it is important that either the height or the width of the fiber guiding groove 32 is equal to or larger than the diameter of the optical fiber fixed to the fiber guiding groove 32. That is, it is necessary to make the height of the fiber guiding groove 32 larger than the diameter of the fiber, and the width of the fiber guiding groove 32 is larger than the diameter of the fiber. By satisfying this condition, the optical fiber can be easily inserted into the space formed by the optical fiber guiding groove 32 and the cover member 40. Further, in a state in which the optical fiber is inserted in this manner, the optical fiber guiding member 2 and the optical waveguide 3 are provided so that the optical fiber and the optical signal transmitting core pattern 23b capable of transmitting the optical signal to the optical waveguide 3 are joined.
關於蓋材40的材質,未作特別限定,在上部包覆層具有黏著性的情況下,可列舉環氧玻璃樹脂基板、陶瓷基板、玻璃基板、矽基板、塑膠基板、金屬基板、塑膠膜,該些基板中亦可設置樹脂層、金屬層等。而且,作為蓋材40,亦可使用電氣配線(electric wiring)板。 The material of the lid member 40 is not particularly limited, and when the upper cladding layer has adhesiveness, examples thereof include a glass epoxy resin substrate, a ceramic substrate, a glass substrate, a ruthenium substrate, a plastic substrate, a metal substrate, and a plastic film. A resin layer, a metal layer or the like may be provided in the substrates. Further, as the cover member 40, an electric wiring board can also be used.
尤其,作為具有柔軟性及強韌性的蓋材40,例如可較佳地列舉聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚萘二甲酸乙二酯等的聚酯、聚乙烯、聚丙烯、聚醯胺、聚碳酸酯、聚苯醚、聚醚硫醚、聚芳酯、液晶聚合物、聚碸、聚醚碸、聚醚醚酮、聚醚醯亞胺、聚醯胺-醯亞胺、聚醯亞胺等。該些中,自耐熱性、尺寸穩定性的觀點考慮,尤佳為聚醯胺-醯亞胺、聚醯亞胺。 In particular, as the cover material 40 having flexibility and toughness, for example, polyester such as polyethylene terephthalate, polybutylene terephthalate or polyethylene naphthalate may be preferably used. Polyethylene, polypropylene, polyamide, polycarbonate, polyphenylene ether, polyether thioether, polyarylate, liquid crystal polymer, polyfluorene, polyether oxime, polyetheretherketone, polyether oximeimide, poly Amidoxime, phthalimide, polyimine, and the like. Among these, from the viewpoint of heat resistance and dimensional stability, polyamine-imine and polyimine are particularly preferable.
而且,在上部包覆層無黏著性的情況下,較佳為在上述列舉的蓋材本體41設置黏著層42,從而形成附黏著層的蓋材40。 Further, in the case where the upper cladding layer has no adhesiveness, it is preferable to provide the adhesive layer 42 in the above-mentioned lid member body 41, thereby forming the lid member 40 to which the adhesive layer is attached.
關於蓋材40的厚度,可根據板的翹曲或尺寸穩定性而適當變更,但較佳為10μm~10.0mm。而且,作為形成在蓋材40的黏著層42的厚度,通常0.1μm~50μm為較佳的範圍,但更佳為0.1μm~20μm。這是因為,若黏著層42的厚度為20μm以下,則朝向光纖導引溝槽32的黏著劑的流入受到抑制,從而容易控制從基板10表面到蓋材40底面為止的距離。 The thickness of the lid member 40 can be appropriately changed depending on the warpage or dimensional stability of the sheet, but is preferably 10 μm to 10.0 mm. Further, the thickness of the adhesive layer 42 formed on the lid member 40 is usually in the range of preferably 0.1 μm to 50 μm, and more preferably 0.1 μm to 20 μm. This is because if the thickness of the adhesive layer 42 is 20 μm or less, the flow of the adhesive toward the optical fiber guiding groove 32 is suppressed, and the distance from the surface of the substrate 10 to the bottom surface of the cover member 40 can be easily controlled.
進而,本發明的光波導3較佳為具有光路轉換鏡31,在情況下,該蓋材40較佳為兼具備光路轉換鏡31的加強部。 Further, the optical waveguide 3 of the present invention preferably has the optical path conversion mirror 31. In the case of the optical waveguide 3, the cover member 40 preferably has a reinforcing portion that also includes the optical path conversion mirror 31.
(黏著劑) (adhesive)
作為填充於光纖導引溝槽32內而用於光纖與光纖導引構件2的黏著的黏著劑,只要可將光纖與光纖導引構件2黏著則不作特別限制,則可列舉光學用黏著劑、光路結 合用黏著劑、光學零件用密封材、透明黏著劑、折射率整合材兼黏著劑、包覆層形成用樹脂清漆、芯層形成用樹脂清漆等的光硬化型黏著劑、熱硬化型黏著劑、光熱硬化型的黏著劑、2液混合硬化型的黏著劑,該些中,在不透過用以使基板10或蓋材40硬化的電磁波的情況下,較佳為熱硬化型的黏著劑或2液混合硬化型的黏著劑。 The adhesive for filling the optical fiber and the optical fiber guiding member 2 to be filled in the optical fiber guiding groove 32 is not particularly limited as long as it can adhere the optical fiber to the optical fiber guiding member 2, and examples thereof include an optical adhesive. Optical junction A photocurable adhesive, a thermosetting adhesive, or the like, which is used in combination with an adhesive, a sealing material for an optical component, a transparent adhesive, a refractive index-integrating material and an adhesive, a resin varnish for forming a coating layer, and a resin varnish for forming a core layer, A thermosetting type adhesive or a two-liquid type hardening type adhesive, and in the case where electromagnetic waves for curing the substrate 10 or the lid member 40 are not transmitted, a thermosetting type adhesive or 2 is preferable. Liquid mixed hardening type adhesive.
下部包覆層及上部包覆層分別形成多層,而形成所期望的厚度。 The lower cladding layer and the upper cladding layer are respectively formed in a plurality of layers to form a desired thickness.
上述的光纖連接器1中,光路轉換鏡31設為形成有金屬膜的光路轉換鏡,但亦可為利用了空氣層與芯層的折射率差的光路轉換鏡。 In the above-described optical fiber connector 1, the optical path conversion mirror 31 is an optical path conversion mirror in which a metal film is formed, but may be an optical path conversion mirror using a difference in refractive index between the air layer and the core layer.
而且,V字溝槽30及光路轉換鏡31亦可省略。 Further, the V-shaped groove 30 and the optical path conversion mirror 31 may be omitted.
而且,尤其在基板本體11具有密接性的情況下,亦可省略基板10的黏著層13。而且,該黏著層13亦可形成下部包覆層的一部分作為第2下部包覆層。 Further, particularly in the case where the substrate body 11 has adhesiveness, the adhesive layer 13 of the substrate 10 can be omitted. Further, the adhesive layer 13 may also form a part of the lower cladding layer as the second lower cladding layer.
上述的光纖連接器1中,在基板10上存在光纖導引側第1下部包覆層22a,在該光纖導引側第1下部包覆層22a上存在光纖導引芯圖案23a,在該光纖導引芯圖案23a上存在光纖導引側上部包覆層24a,但亦可省略光纖導引側第1下部包覆層22a。 In the above-described optical fiber connector 1, the optical fiber guiding side first lower cladding layer 22a is present on the substrate 10, and the optical fiber guiding core pattern 23a is present on the optical fiber guiding side first lower cladding layer 22a. The fiber guiding side upper cladding layer 24a is present on the guiding core pattern 23a, but the fiber guiding side first lower cladding layer 22a may be omitted.
(光纖連接器的構造) (Structure of fiber optic connector)
第2實施形態的光纖連接器在第1實施形態的光纖連 接器中,代替狹縫溝槽25或與狹縫溝槽25一併,而包括將光纖導引構件2的外部與光纖導引溝槽32連通的黏著劑導入狹縫。 The optical fiber connector of the second embodiment is the optical fiber connector of the first embodiment The adapter includes an adhesive introduction slit that communicates the outside of the optical fiber guiding member 2 with the optical fiber guiding groove 32 instead of or in combination with the slit groove 25.
第2實施形態的光纖連接器中,光纖導引溝槽32經由光纖導引溝槽32的光纖插入口而與外部連通,並且經由黏著劑導入狹縫而與外部連通。因此,在從光纖的插入口及黏著劑導入狹縫的一者導入黏著劑時,光纖導引溝槽32內的空氣從光纖的插入口及黏著劑導入狹縫的另一者流出。藉此,可容易地將黏著劑導入至光纖導引溝槽32內。而且,當在導入著黏著劑的光纖導引溝槽32內導入黏著劑及光纖而將光纖固定時,過量的黏著劑經由黏著劑導入狹縫而向光纖導引溝槽32的外側流出。藉此,可容易地將光纖導入並固定於光纖導引溝槽32內。 In the optical fiber connector of the second embodiment, the optical fiber guiding groove 32 communicates with the outside through the optical fiber insertion opening of the optical fiber guiding groove 32, and is introduced into the slit via the adhesive to communicate with the outside. Therefore, when the adhesive is introduced from one of the insertion port of the optical fiber and the adhesive introduction slit, the air in the optical fiber guiding groove 32 flows out from the insertion opening of the optical fiber and the other of the adhesive introduction slit. Thereby, the adhesive can be easily introduced into the fiber guiding groove 32. Further, when an adhesive and an optical fiber are introduced into the optical fiber guiding groove 32 into which the adhesive is introduced to fix the optical fiber, an excessive amount of the adhesive is introduced into the slit through the adhesive and flows out to the outside of the optical fiber guiding groove 32. Thereby, the optical fiber can be easily introduced and fixed in the optical fiber guiding groove 32.
(第2實施形態的光纖連接器及其製造方法的第1較佳例) (First preferred example of the optical fiber connector and the method of manufacturing the same according to the second embodiment)
以下,參照圖式,對第2實施形態的光纖連接器的第1較佳例進行說明。第30圖是光纖連接器1A的相當於第1圖的A-A線的部位的端視圖,第31圖是光纖連接器1A的相當於第1圖的B-B線的部位的端視圖,第32圖是光纖連接器1A的相當於第1圖的C-C線的部位的端視圖,第33圖是光纖連接器1A的相當於第1圖的D-D線的部位的端視圖。 Hereinafter, a first preferred example of the optical connector of the second embodiment will be described with reference to the drawings. Fig. 30 is an end view of a portion of the optical fiber connector 1A corresponding to the AA line of Fig. 1, and Fig. 31 is an end view of a portion of the optical fiber connector 1A corresponding to the BB line of Fig. 1, and Fig. 32 is a view. An end view of a portion of the optical fiber connector 1A corresponding to the CC line of Fig. 1 and a third view of a portion of the optical fiber connector 1A corresponding to the DD line of Fig. 1 .
<光纖連接器的構造> <Configuration of optical fiber connector>
光纖連接器1A是在第1實施形態的光纖連接器1中, 代替狹縫溝槽25,而設置著將光纖導引構件2的外部與光纖導引溝槽32連通的黏著劑導入狹縫25A。 The optical fiber connector 1A is the optical fiber connector 1 of the first embodiment. Instead of the slit groove 25, an adhesive introduction slit 25A that communicates the outside of the fiber guiding member 2 with the fiber guiding groove 32 is provided.
光纖連接器1A中,與光纖連接器1相同的符號表示相同部分。 In the optical fiber connector 1A, the same reference numerals as those of the optical fiber connector 1 denote the same portions.
該黏著劑導入狹縫25A存在於光纖導引構件2與光波導3的邊界。該黏著劑導入狹縫25A從蓋材40的黏著層42的厚度方向的中途而到達基板10的背面為止。而且,該黏著劑導入狹縫25A遍及基板10的短邊方向的全長而延伸,亦可存在於短邊方向的一部分。 The adhesive introduction slit 25A exists at the boundary between the optical fiber guiding member 2 and the optical waveguide 3. The adhesive introduction slit 25A reaches the back surface of the substrate 10 from the middle in the thickness direction of the adhesive layer 42 of the lid member 40. Further, the adhesive introduction slit 25A extends over the entire length of the substrate 10 in the short-side direction, and may exist in a part of the short-side direction.
<光纖連接器的製造方法> <Method of Manufacturing Optical Fiber Connector>
第2實施形態的光纖連接器的製造方法在第3步驟中可較佳地實施與第1實施形態的光纖連接器的製造方法同樣的方法。因此,對第3步驟的後步驟進行說明。 In the third step, the method of manufacturing the optical fiber connector of the second embodiment can preferably be carried out in the same manner as the method of manufacturing the optical fiber connector of the first embodiment. Therefore, the subsequent steps of the third step will be described.
《第5A步驟(第34圖~第37圖)》 "Step 5A (Figure 34 ~ Figure 37)"
第34圖是表示第5A步驟的相當於第1圖的A-A線的部位的端視圖,第35圖是表示第5A步驟的相當於第1圖的B-B線的部位的端視圖,第36圖是表示第5A步驟的相當於第1圖的C-C線的部位的端視圖,第37圖是表示第5A步驟的相當於第1圖的D-D線的部位的端視圖。 Fig. 34 is an end view showing a portion corresponding to the line AA of Fig. 1 in the fifth step, and Fig. 35 is an end view showing a portion corresponding to the BB line of Fig. 1 in the fifth step, and Fig. 36 is a view An end view of a portion corresponding to the CC line of Fig. 1 in the step 5A, and an end view showing a portion corresponding to the DD line of Fig. 1 in the fifth step A is shown.
就第5A步驟而言,除不進行狹縫溝槽25的形成以外,實施與上述第5步驟同樣的步驟。 In the fifth step, the same steps as in the fifth step described above are carried out except that the formation of the slit groove 25 is not performed.
亦即,第5A步驟中,形成從光波導側上部包覆層24b到達光信號傳達用芯圖案23b為止的V字溝槽30。該V字溝槽30較佳為藉由切割機而形成。 In other words, in the step 5A, the V-shaped groove 30 is formed from the optical waveguide-side upper cladding layer 24b to the optical signal transmission core pattern 23b. The V-shaped groove 30 is preferably formed by a cutter.
《第6步驟(第38圖~第39圖)》 "Step 6 (Figure 38 ~ Figure 39)"
第38圖是表示第6步驟的相當於第1圖的A-A線的部位的端視圖,第39圖是表示第6步驟的相當於第1圖的B-B線的部位的端視圖。 Fig. 38 is an end view showing a portion corresponding to the line A-A in Fig. 1 in the sixth step, and Fig. 39 is an end view showing a portion corresponding to the line B-B in Fig. 1 in the sixth step.
第6步驟與第2實施形態的第6步驟同樣。 The sixth step is the same as the sixth step of the second embodiment.
亦即,在V字溝槽30的光纖導引構件2側的面形成包含金屬層的光路轉換鏡31。該光路轉換鏡31藉由金屬蒸鍍於V字溝槽30的光纖導引構件2側的面而可較佳地形成。 That is, the optical path conversion mirror 31 including the metal layer is formed on the surface of the V-shaped groove 30 on the side of the optical fiber guiding member 2. The optical path conversion mirror 31 can be preferably formed by metal deposition on the surface of the V-shaped groove 30 on the side of the optical fiber guiding member 2.
《第4步驟(第40圖~第43圖)》 "Step 4 (Figure 40 ~ Figure 43)"
第40圖是表示第4步驟的相當於第1圖的A-A線的部位的端視圖,第41圖是表示第4步驟的相當於第1圖的B-B線的部位的端視圖,第42圖是表示第4步驟的相當於第1圖的C-C線的部位的端視圖,第43圖是表示第4步驟的相當於第1圖的D-D線的部位的端視圖。 Fig. 40 is an end view showing a portion corresponding to the AA line of Fig. 1 in the fourth step, and Fig. 41 is an end view showing a portion corresponding to the BB line of Fig. 1 in the fourth step, and Fig. 42 is a view showing the fourth step. An end view of a portion corresponding to the CC line of Fig. 1 in the fourth step, and Fig. 43 is an end view showing a portion corresponding to the DD line of Fig. 1 in the fourth step.
第4步驟與第2實施形態的第4步驟同樣。 The fourth step is the same as the fourth step of the second embodiment.
亦即,第4步驟中,形成覆蓋上述光纖導引溝槽32的蓋材40。 That is, in the fourth step, the cover member 40 covering the above-described fiber guiding groove 32 is formed.
該蓋材40準備包含蓋材本體41及其背面的黏著層42的積層體,藉由使黏著層42黏著於光纖導引側上部包覆層24a及光波導側上部包覆層24b的表面而較佳地形成。 The cover member 40 is prepared by laminating the cover member 41 and the adhesive layer 42 on the back surface thereof, and the adhesive layer 42 is adhered to the surface of the optical fiber guiding side upper cladding layer 24a and the optical waveguide side upper cladding layer 24b. It is preferably formed.
該蓋材40包含覆蓋光纖導引溝槽32的光纖導引側蓋材部40a、及覆蓋光波導側上部包覆層24b的光波導側蓋材部40b。該光波導側蓋材部40b作為光波導2的光路轉 換鏡31形成部分的加強構件發揮功能。 The cover member 40 includes an optical fiber guiding side cover portion 40a that covers the optical fiber guiding groove 32, and an optical waveguide side cover portion 40b that covers the optical waveguide side upper cladding layer 24b. The optical waveguide side cover portion 40b serves as an optical path of the optical waveguide 2 The reinforcing member forming part of the mirror 31 functions as a reinforcing member.
《黏著劑導入狹縫的形成步驟(第30圖~第33圖)》 "Step of Forming Adhesive Introducing Slit (Fig. 30 to Fig. 33)"
在第4步驟後,形成黏著劑導入狹縫25A。該黏著劑導入狹縫25A從基板10的下面到達光纖導引溝槽32為止。而且,該黏著劑導入狹縫25A遍及基板的短邊方向的全長而延伸。該黏著劑導入狹縫25A較佳為藉由切割機而形成。而且,在藉由切割機形成該黏著劑導入狹縫25A時,較佳為將光波導側第1下部包覆層22b、光信號傳達用芯圖案23b及光波導側上部包覆層24b的光纖導引構件2側的端面切削而形成黏著劑導入狹縫25A。 After the fourth step, the adhesive introduction slit 25A is formed. The adhesive introduction slit 25A reaches the fiber guiding groove 32 from the lower surface of the substrate 10. Further, the adhesive introduction slit 25A extends over the entire length of the substrate in the short-side direction. The adhesive introduction slit 25A is preferably formed by a cutter. Further, when the adhesive introduction slit 25A is formed by a cutter, the optical waveguide side first lower cladding layer 22b, the optical signal transmission core pattern 23b, and the optical waveguide side upper cladding layer 24b are preferably used. The end surface on the side of the guide member 2 is cut to form an adhesive introduction slit 25A.
(第2實施形態的光纖連接器及其製造方法的第2較佳例) (Second preferred embodiment of the optical fiber connector and the method of manufacturing the same according to the second embodiment)
以下,參照圖式對第2實施形態的光纖連接器的第2較佳例進行說明。第44圖是光纖連接器1B的相當於第1圖的A-A線的部位的端視圖,第45圖是光纖連接器1B的相當於第1圖的B-B線的部位的端視圖。 Hereinafter, a second preferred example of the optical connector of the second embodiment will be described with reference to the drawings. Fig. 44 is an end view of a portion of the optical fiber connector 1B corresponding to the line A-A of Fig. 1, and Fig. 45 is an end view of a portion of the optical fiber connector 1B corresponding to the line B-B of Fig. 1 .
光纖連接器1B在上述光纖連接器1B中,代替黏著劑導入狹縫25A,而設置將光纖導引構件2的外部與光纖導引溝槽32連通的黏著劑導入狹縫25B。 In the optical fiber connector 1B, in place of the adhesive introduction slit 25A, the optical fiber connector 1B is provided with an adhesive introduction slit 25B that communicates the outside of the optical fiber guiding member 2 with the optical fiber guiding groove 32.
光纖連接器1B中,與光纖連接器1相同的符號表示相同部分。 In the optical fiber connector 1B, the same reference numerals as those of the optical fiber connector 1 denote the same portions.
該黏著劑導入狹縫25B存在於光纖導引構件2與光波導3的邊界。該黏著劑導入狹縫25B從基板10的黏著層13的厚度方向的中途到達蓋材40的表面為止。而且,該 黏著劑導入狹縫25B遍及基板10的短邊方向的全長而延伸,亦可存在於短邊方向的一部分。 The adhesive introduction slit 25B exists at the boundary between the optical fiber guiding member 2 and the optical waveguide 3. The adhesive introduction slit 25B reaches the surface of the cover member 40 from the middle in the thickness direction of the adhesive layer 13 of the substrate 10. And, that The adhesive introduction slit 25B extends over the entire length of the substrate 10 in the short-side direction, and may exist in a part of the short-side direction.
該黏著劑導入狹縫25B亦可藉由切割機而較佳地形成。 The adhesive introduction slit 25B can also be preferably formed by a cutter.
(第2實施形態的光纖連接器及其製造方法的第3較佳例) (Third preferred example of the optical fiber connector and the method of manufacturing the same according to the second embodiment)
以下,參照圖式對第2實施形態的光纖連接器的第3較佳例進行說明。第46圖是光纖連接器1C的相當於第1圖的A-A線的部位的端視圖,第47圖是光纖連接器1C的相當於第1圖的B-B線的部位的端視圖。 Hereinafter, a third preferred example of the optical connector of the second embodiment will be described with reference to the drawings. Fig. 46 is an end view of a portion of the optical fiber connector 1C corresponding to the line A-A of Fig. 1, and Fig. 47 is an end view of a portion of the optical fiber connector 1C corresponding to the line B-B of Fig. 1 .
光纖連接器1C在上述光纖連接器1中,進而設置將光纖導引構件2的外部與光纖導引溝槽32連通的黏著劑導入狹縫25C。 In the optical fiber connector 1C, an adhesive introduction slit 25C that communicates the outside of the optical fiber guiding member 2 with the optical fiber guiding groove 32 is further provided.
該黏著劑導入狹縫25C較光纖導引構件2與光波導3的邊界而存在於光纖導引構件2側。該黏著劑導入狹縫25C從基板10的黏著層13的厚度方向的中途到達蓋材40的表面為止。而且,該黏著劑導入狹縫25C遍及基板10的短邊方向的全長而延伸,但亦可存在於短邊方向的一部分。 The adhesive introduction slit 25C is present on the side of the optical fiber guiding member 2 at a boundary between the optical fiber guiding member 2 and the optical waveguide 3. The adhesive introduction slit 25C reaches the surface of the cover member 40 from the middle in the thickness direction of the adhesive layer 13 of the substrate 10. Further, the adhesive introduction slit 25C extends over the entire length of the substrate 10 in the short-side direction, but may exist in a part of the short-side direction.
該黏著劑導入狹縫25C亦可藉由切割機而較佳地形成。 The adhesive introduction slit 25C can also be preferably formed by a cutter.
(第2實施形態的光纖連接器及其製造方法的第4較佳例) (Fourth preferred example of the optical fiber connector and the method of manufacturing the same according to the second embodiment)
以下,參照圖式對第2實施形態的光纖連接器的第3 較佳例進行說明。第54圖是光纖連接器1D的相當於第1圖的A-A線的部位的端視圖,第55圖是光纖連接器1D的相當於第1圖的B-B線的部位的端視圖。 Hereinafter, the third embodiment of the optical fiber connector of the second embodiment will be described with reference to the drawings. A preferred embodiment will be described. Fig. 54 is an end view of a portion of the optical fiber connector 1D corresponding to the line A-A of Fig. 1, and Fig. 55 is an end view of a portion of the optical fiber connector 1D corresponding to the line B-B of Fig. 1 .
光纖連接器1D在上述光纖連接器1中,進而設置將光纖導引構件的外部與光纖導引溝槽32連通的黏著劑導入狹縫25D。 In the optical fiber connector 1D, the optical fiber connector 1D is further provided with an adhesive introduction slit 25D that communicates the outside of the optical fiber guiding member with the optical fiber guiding groove 32.
該黏著劑導入狹縫25D較光纖導引構件2與光波導3的邊界而存在於光纖導引構件2側。該黏著劑導入狹縫25D從基板10到達光纖導引溝槽32為止。而且,該黏著劑導入狹縫25D遍及基板10的短邊方向的全長而延伸,但亦可存在於短邊方向的一部分。 The adhesive introduction slit 25D is present on the side of the optical fiber guiding member 2 at a boundary between the optical fiber guiding member 2 and the optical waveguide 3. The adhesive introduction slit 25D reaches the fiber guiding groove 32 from the substrate 10. Further, the adhesive introduction slit 25D extends over the entire length of the substrate 10 in the short-side direction, but may exist in a part of the short-side direction.
該黏著劑導入狹縫25D亦可藉由切割機而較佳地形成。 The adhesive introduction slit 25D can also be preferably formed by a cutter.
本發明的光纖連接器和光纖的連接方法是在本發明的光纖連接器的光纖導引溝槽填充黏著劑並且插入配置光纖的連接方法。 The method of connecting the optical fiber connector and the optical fiber of the present invention is a method of connecting the optical fiber guiding groove of the optical fiber connector of the present invention to the adhesive and inserting the optical fiber.
而且,本發明的光纖連接器和光纖的組裝體包括本發明的光纖連接器、及配置於該光纖連接器的光纖導引溝槽的光纖及黏著劑。 Further, the optical fiber connector and the optical fiber assembly of the present invention include the optical fiber connector of the present invention, and an optical fiber and an adhesive disposed in the optical fiber guiding groove of the optical fiber connector.
第48圖~第51圖是表示本發明的光纖連接器和光纖的組裝體70、70A、70B、70C及光纖連接器和光纖的連接方法的剖面圖。 48 to 51 are cross-sectional views showing a method of connecting the optical fiber connector and the optical fiber assembly 70, 70A, 70B, and 70C of the present invention, and an optical fiber connector and an optical fiber.
組裝體70、70A、70B、70C分別包含:光纖連接器1、 1A、1B、1C,及配置於各光纖連接器1、1A、1B、1C的光纖導引溝槽32的光纖50及黏著劑60。該組裝體70、70A、70B、70C可藉由在光纖連接器1、1A、1B、1C的光纖導引溝槽32填充黏著劑60並且插入配置光纖50而製造。 The assembly bodies 70, 70A, 70B, and 70C respectively include: an optical fiber connector 1. 1A, 1B, 1C, and an optical fiber 50 and an adhesive 60 disposed in the optical fiber guiding grooves 32 of the respective optical fiber connectors 1, 1A, 1B, and 1C. The assembly 70, 70A, 70B, 70C can be manufactured by filling the adhesive 60 with the optical fiber guiding grooves 32 of the optical fiber connectors 1, 1A, 1B, 1C and inserting the optical fibers 50.
作為黏著劑,只要可將光纖50與光纖導引構件2黏著則不作特別限制,但可列舉光學用黏著劑、光路結合用黏著劑、光學零件用密封材、透明黏著劑、折射率整合材兼黏著劑、包覆層形成用樹脂清漆、芯層形成用樹脂清漆等的光硬化型黏著劑、熱硬化型黏著劑、光熱硬化型的黏著劑、2液混合硬化型的黏著劑,該些中,在不透過用以使基板10或蓋材40硬化的電磁波的情況下,較佳為熱硬化型的黏著劑或2液混合硬化型的黏著劑。 The adhesive is not particularly limited as long as it can adhere the optical fiber 50 to the optical fiber guiding member 2, and examples thereof include an optical adhesive, an optical path bonding adhesive, an optical component sealing material, a transparent adhesive, and a refractive index bonding material. a photocurable adhesive such as an adhesive varnish, a resin varnish for forming a cladding layer, a resin varnish for forming a core layer, a thermosetting adhesive, a photothermographic adhesive, or a two-liquid hybrid curing adhesive. In the case where electromagnetic waves for hardening the substrate 10 or the lid member 40 are not transmitted, a thermosetting adhesive or a two-liquid mixing-curing adhesive is preferred.
黏著劑的25℃時的黏度較佳為150mPa‧s~400mPa‧s,更佳為200mPa‧s~350mPa‧s,進而較佳為250mPa‧s~300mPa‧s。若在該範圍內,則可使光纖50的中心線與光纖導引溝槽32的光纖插入方向的中心線大致一致。該25℃時的黏度可藉由後述的實施形態所記載的測定方法測定。 The viscosity at 25 ° C of the adhesive is preferably from 150 mPa ‧ to 400 mPa ‧ , more preferably from 200 mPa ‧ to 350 mPa s, and further preferably from 250 mPa ‧ to 300 mPa ‧ s. Within this range, the center line of the optical fiber 50 can be made to substantially coincide with the center line of the fiber guiding groove 32 in the fiber insertion direction. The viscosity at 25 ° C can be measured by the measurement method described in the examples below.
本發明的光纖連接器及其製造方法、光纖連接器和光纖的連接方法、及光纖連接器和光纖的組裝體中,使用第52圖及第53圖來說明光纖連接器和光纖的較佳尺寸。 In the optical fiber connector of the present invention, the method of manufacturing the same, the method of connecting the optical fiber connector and the optical fiber, and the assembly of the optical fiber connector and the optical fiber, the preferred sizes of the optical fiber connector and the optical fiber are described using FIGS. 52 and 53. .
第52圖及第53圖分別為第4圖及第6圖的部分放大 圖。另外,使用光纖連接器1對該尺寸進行說明,使用後述的光纖連接器1A~光纖連接器1D的情況下的尺寸亦同樣。 Figures 52 and 53 are partial enlargements of Figures 4 and 6 respectively. Figure. In addition, the size is described using the optical fiber connector 1, and the dimensions of the optical fiber connector 1A to the optical fiber connector 1D to be described later are also the same.
本發明中,光纖中並無限制,所謂「光纖的直徑」是指光纖的包覆外徑,在該包覆藉由保護層而被覆並且插入配置於光纖導引溝槽的情況下是指附保護層的光纖的外徑。而且,所謂「光纖的半徑」,是指基於上述定義的「光纖的直徑」的一半的長度。 In the present invention, the optical fiber is not limited. The term "diameter of the optical fiber" means the outer diameter of the coated optical fiber. When the coating is covered by the protective layer and inserted into the optical fiber guiding groove, it is attached. The outer diameter of the fiber of the protective layer. Further, the term "radius of the optical fiber" means a length which is half of the "diameter of the optical fiber" defined above.
光纖的直徑較佳為200μm以下,但從容易控制芯形成用樹脂膜的膜厚的觀點考慮,進而較佳為使用125μm直徑或80μm直徑的光纖。 The diameter of the optical fiber is preferably 200 μm or less. From the viewpoint of easily controlling the film thickness of the resin film for forming a core, it is more preferable to use an optical fiber having a diameter of 125 μm or a diameter of 80 μm.
光纖導引溝槽32的寬度W為固定於光纖導引構件2的光纖50的直徑R以上,上述光纖導引溝槽32的高度D1較佳為光纖的直徑R以上。藉此,可將光纖50良好地插入配置於光纖導引溝槽32內。 The width W of the optical fiber guiding groove 32 is equal to or larger than the diameter R of the optical fiber 50 fixed to the optical fiber guiding member 2, and the height D1 of the optical guiding groove 32 is preferably equal to or larger than the diameter R of the optical fiber. Thereby, the optical fiber 50 can be inserted into the optical fiber guiding groove 32 satisfactorily.
從基板10與光信號傳達用芯圖案23b的高度方向的中心之間的距離D2減去固定於光纖導引構件2的光纖50的半徑r所得的值α1,較佳為0.5μm~15μm,從光纖導引溝槽32的高度D1減去光纖50的直徑R所得的值α2較佳為1.0μm~30μm。藉此,光纖50與基板10的間隔及光纖50與蓋材40的間隔變窄,藉由黏著劑的表面張力或黏著劑的流動性而將光纖50配置於光纖導引溝槽32的高度方向的大致中央,因而可精度良好地進行光纖50與光傳達用芯圖案23b的芯對準。 The value α1 obtained by subtracting the radius r of the optical fiber 50 fixed to the optical fiber guiding member 2 from the distance D2 between the substrate 10 and the center of the optical signal transmitting core pattern 23b in the height direction is preferably 0.5 μm to 15 μm. The value α2 obtained by subtracting the diameter R of the optical fiber 50 from the height D1 of the optical fiber guiding groove 32 is preferably 1.0 μm to 30 μm. Thereby, the interval between the optical fiber 50 and the substrate 10 and the interval between the optical fiber 50 and the cover member 40 are narrowed, and the optical fiber 50 is disposed in the height direction of the optical fiber guiding groove 32 by the surface tension of the adhesive or the fluidity of the adhesive. In the approximate center, the core of the optical fiber 50 and the light transmission core pattern 23b can be aligned with high precision.
自上述觀點而言,值α1更佳為0.5μm~7.5μm,進而較佳為0.5μm~5μm。而且,值α2更佳為1.0μm~15μm,進而較佳為1.0μm~10μm。 From the above viewpoints, the value α1 is more preferably from 0.5 μm to 7.5 μm, still more preferably from 0.5 μm to 5 μm. Further, the value α2 is more preferably 1.0 μm to 15 μm, still more preferably 1.0 μm to 10 μm.
同樣地,從上述光信號傳達用芯圖案23b的高度方向的中心與蓋材40之間的距離D3,減去固定於光纖導引構件2的光纖50的半徑r所得的值α3較佳為0.5μm~15μm,更佳為0.5μm~7.5μm,進而較佳為0.5μm~5μm。藉此,光纖50與基板10的間隔及光纖50與蓋材40的間隔變窄,藉由黏著劑的表面張力或黏著劑的流動性將光纖50配置於光纖導引溝槽32的高度方向的大致中央,因而可精度良好地進行光纖50與光傳達用芯圖案23b的芯對準。 Similarly, the value α3 obtained by subtracting the radius r of the optical fiber 50 fixed to the optical fiber guiding member 2 from the distance D3 between the center of the optical signal transmitting core pattern 23b in the height direction and the cover member 40 is preferably 0.5. From μm to 15 μm, more preferably from 0.5 μm to 7.5 μm, still more preferably from 0.5 μm to 5 μm. Thereby, the interval between the optical fiber 50 and the substrate 10 and the interval between the optical fiber 50 and the cover member 40 are narrowed, and the optical fiber 50 is disposed in the height direction of the optical fiber guiding groove 32 by the surface tension of the adhesive or the fluidity of the adhesive. Since the center is substantially at the center, the core of the optical fiber 50 and the light transmission core pattern 23b can be aligned with high precision.
自同樣的觀點考慮,值α3與值α1的差的絕對值α4較佳為0μm~7.5μm,更佳為0μm~5μm,進而較佳為0μm~3μm。 From the same viewpoint, the absolute value α4 of the difference between the value α3 and the value α1 is preferably 0 μm to 7.5 μm, more preferably 0 μm to 5 μm, still more preferably 0 μm to 3 μm.
從光纖導引溝槽32的寬度W減去光纖的直徑R所得的值α5,自光纖的實裝性及容許誤差的觀點考慮,更佳為1.0μm~30μm,進而較佳為1.0μm~15μm,進而更佳為1.0μm~10μm。 The value α5 obtained by subtracting the diameter R of the optical fiber from the width W of the optical fiber guiding groove 32 is more preferably 1.0 μm to 30 μm, and further preferably 1.0 μm to 15 μm from the viewpoint of the mounting property and the tolerance of the optical fiber. More preferably, it is 1.0 μm to 10 μm.
而且,光纖導引溝槽32的光纖插通方向的中心線與光信號傳達用芯圖案23b的光路方向的中心線較佳為一致。在將光信號傳達用芯圖案23b與光纖導引芯圖案23a在同一步驟中藉由光微影加工而形成的情況下,以上述的光纖導引溝槽32的中心線與光信號傳達用芯圖案23b(芯構件 23c)的中心線彼此一致的方式設計光罩形狀即可。所使用的光纖為芯直徑數十μm以上的多模(multi mode)用光纖即可。 Further, the center line of the optical fiber insertion direction of the optical fiber guiding groove 32 and the center line of the optical path direction of the optical signal transmission core pattern 23b are preferably coincident. When the optical signal transmission core pattern 23b and the optical fiber guiding core pattern 23a are formed by photolithography in the same step, the center line of the optical fiber guiding groove 32 and the optical signal transmission core are used. Pattern 23b (core member) The center line of 23c) is designed in such a manner that the shape of the mask is identical to each other. The optical fiber to be used may be a multimode optical fiber having a core diameter of several tens of μm or more.
光纖導引溝槽32的長度L較佳為100μm~30mm,更佳為300μm~10mm,進而較佳為1mm~5mm。若為100μm以上,則可充分防止光纖相對於光纖導引溝槽32的長度L方向的傾斜,若為30mm以下,則可將光纖連接器小型化。 The length L of the fiber guiding groove 32 is preferably from 100 μm to 30 mm, more preferably from 300 μm to 10 mm, and still more preferably from 1 mm to 5 mm. When the thickness is 100 μm or more, the inclination of the optical fiber with respect to the longitudinal direction L of the optical fiber guiding groove 32 can be sufficiently prevented, and if it is 30 mm or less, the optical fiber connector can be miniaturized.
以下,藉由實例對本發明進行更詳細說明,但本發明只要不脫離其主旨,則不限定於以下的實例。 Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to the following examples as long as they do not depart from the gist of the invention.
<(A)基礎聚合物(base polymer);(甲基)丙烯酸聚合物((meth)acrylic polymer)(A-1)的製作> <(A) base polymer; (meth)acrylic polymer ((meth)acrylic polymer) (A-1)
在包括攪拌機、冷卻管、氣體導入管、滴下漏斗、及溫度計的燒瓶中,稱量丙二醇單甲醚醋酸酯(propylene glycol monomethyl ether acetate)46質量份及乳酸甲酯(methyl lactate)23質量份,且一邊導入氮氣體一邊進行攪拌。使液溫上升至65℃,將甲基丙烯酸甲酯(methyl methacrylate)47質量份、丙烯酸丁酯(butyl acrylate)33質量份、2-甲基丙烯酸羥乙酯(hydroxyethyl methacrylate)16質量份、甲基丙烯酸14質量份、2,2'-偶氮雙(2,4-二甲基戊腈)3質量份、丙二醇單甲醚醋酸酯46質量份、及乳酸甲酯23質量份的混合物以3小時滴下後,以65℃攪拌3 小時,進而以95℃持續攪拌1小時,從而獲得(甲基)丙烯酸聚合物(A-1)溶液(固形份45質量%)。 In a flask including a stirrer, a cooling tube, a gas introduction tube, a dropping funnel, and a thermometer, 46 parts by mass of propylene glycol monomethyl ether acetate and 23 parts by mass of methyl lactate were weighed. The mixture was stirred while introducing a nitrogen gas. The liquid temperature was raised to 65 ° C, 47 parts by mass of methyl methacrylate, 33 parts by mass of butyl acrylate, and 16 parts by mass of hydroxyethyl methacrylate. 14 parts by mass of acryl, 3 parts by mass of 2,2'-azobis(2,4-dimethylvaleronitrile), 46 parts by mass of propylene glycol monomethyl ether acetate, and 23 parts by mass of methyl lactate are 3 After dropping for an hour, stir at 65 ° C. 3 After further, stirring was continued at 95 ° C for 1 hour to obtain a (meth)acrylic polymer (A-1) solution (solid content: 45 mass%).
<重量平均分子量的測定> <Measurement of Weight Average Molecular Weight>
使用GPC(Tosoh(股)製造「SD-8022」、「DP-8020」及「RI-8020」)對(A-1)的重量平均分子量(按照標準聚苯乙烯換算)進行測定,結果為3.9×104。另外,管柱使用的是日立化成工業(股)製造的「GelpackGL-A150-S」及「GelpackGL-A160-S」。 The weight average molecular weight (in terms of standard polystyrene) of (A-1) was measured by GPC ("SD-8022", "DP-8020" and "RI-8020" manufactured by Tosoh), and the result was 3.9. ×10 4 . In addition, "Gelpack GL-A150-S" and "Gelpack GL-A160-S" manufactured by Hitachi Chemical Co., Ltd. are used for the column.
<酸值的測定> <Measurement of acid value>
對(A-1)的酸值進行測定的結果為79mgKOH/g。另外,酸值根據中和(A-1)溶液所需的0.1mol/L氫氧化鉀水溶液量而算出。此時,將作為指示劑而添加的酚酞從無色變為粉紅的點設為中和點。 The acid value of (A-1) was measured and found to be 79 mgKOH/g. Further, the acid value was calculated from the amount of the 0.1 mol/L potassium hydroxide aqueous solution required for the neutralization (A-1) solution. At this time, the point at which the phenolphthalein added as the indicator was changed from colorless to pink was set as the neutralization point.
<黏著劑的黏度的測定> <Measurement of viscosity of adhesive>
關於黏著劑,使用E型黏度計(東機產業(股)製造,商品名VISCONIC ELD),測定溫度設為25℃,試樣設為0.4mL,轉數設為20min-1,對黏度進行測定。 For the adhesive, an E-type viscometer (manufactured by Toki Sangyo Co., Ltd., trade name VISCODIC ELD) was used, the measurement temperature was set to 25 ° C, the sample was set to 0.4 mL, and the number of revolutions was set to 20 min -1 . .
<包覆層形成用樹脂清漆A的調合> <Adjustment of Resin Varnish A for Coating Layer Formation>
一邊將如下部分攪拌一邊加以混合:(A)作為基礎聚合物的上述A-1溶液(固形份45質量%)84質量份(固形份38質量份),(B)作為光硬化成分的具有聚酯骨架的(甲基)丙烯酸胺基甲酸酯(新中村化學工業(股)製造「U-200AX」)33質量份、及具有聚丙二醇骨架的(甲基)丙烯酸胺基甲酸酯(新中村化學工業(股)製造「UA-4200」) 15質量份,(C)作為熱硬化成分的六亞甲基二異氰酸酯(hexamethylene diisocyanate)的三聚異氰酸酯(isocyanurate)型三聚物由甲基乙基酮肟(Methyl ethyl ketone oxime)保護的多官能封閉型異氰酸酯(Blocked Isocyanate)溶液(固形份75質量%)(Sumika Bayer Urethane(股)製造「sumijuir BL3175」)20質量份(固形份15質量份),(D)作為光聚合起始劑的1-[4-(2-羥乙氧基)苯]-2-羥基-2-甲基-1-丙基-1-酮(Ciba Japan(股)製造「Irgacure 2959」)1質量份、雙(2,4,6-三甲基苯甲醯基)氧化二苯基膦(Ciba Japan(股)製造「Irgacure 819」)1質量份、及作為稀釋用有機溶劑的丙二醇單甲醚醋酸酯(propylene glycol monomethyl ether acetate)23質量份。使用孔徑2μm的Polyflon過濾器(advantec東洋(股)製造「PF020」)進行加壓過濾後,進行減壓脫泡,從而獲得包覆層形成用樹脂清漆A。 The mixture was mixed while stirring as follows: (A) 84 parts by mass of the above-mentioned A-1 solution (solid content: 45 mass%) as a base polymer (38 parts by mass of solid content), and (B) having a photohardening component 33 parts by mass of (meth)acrylic acid urethane ("U-200AX" manufactured by Shin-Nakamura Chemical Co., Ltd.) and (meth)acrylic acid urethane having a polypropylene glycol skeleton (new Nakamura Chemical Industry Co., Ltd. manufactures "UA-4200") 15 parts by mass, (C) a polyfunctional isocyanurate type terpolymer of hexamethylene diisocyanate as a thermosetting component, protected by methyl ethyl ketone oxime Blocked Isocyanate solution (75% by mass of solid content) ("Sumijuir BL3175" manufactured by Sumika Bayer Urethane) 20 parts by mass (15 parts by mass of solid content), (D) 1 as photopolymerization initiator -[4-(2-hydroxyethoxy)benzene]-2-hydroxy-2-methyl-1-propyl-1-one ("Irgacure 2959" manufactured by Ciba Japan Co., Ltd.) 1 part by mass, double ( 2,4,6-trimethylbenzhydryl)diphenylphosphine ("Irgacure 819" manufactured by Ciba Japan Co., Ltd.) 1 part by mass, and propylene glycol monomethyl ether acetate (propylene) as an organic solvent for dilution Glycol monomethyl ether acetate) 23 parts by mass. After pressure filtration using a Polyflon filter ("van020" manufactured by Advantec Toyo Co., Ltd.) having a pore size of 2 μm, defoaming under reduced pressure was carried out to obtain a resin varnish A for coating layer formation.
將上述所獲得的包覆層形成用樹脂清漆A,在PET膜(東洋紡織(股)製造「COSMOSHINE A4100」,厚度50μm)的非處理面上,使用塗佈機(multi coater TM-MC,hirano-tec株式會社製造)進行塗佈,以100℃乾燥20分鐘後,貼附作為保護膜的表面脫模處理PET膜(Teijindupontfilm(股)製造「PurexA31」,厚度25μm),從而獲得包覆層形成用樹脂膜。此時樹脂層的厚度可藉由調節塗佈機的間隙而任意調整,關於本實例中所使用的第1下部包覆層及第2下部包覆層(黏著層)的厚度,在實 例中有所記載。而且,第1下部包覆層及第2下部包覆層的硬化後的膜厚與塗佈後的膜厚相同。關於本實例中所使用的上部包覆層形成用樹脂膜的膜厚在實例中亦有所記載。實例中所記載的上部包覆層形成用樹脂膜的膜厚設為塗佈後的膜厚。 The above-mentioned resin varnish A for coating layer formation was used, and a coater (multi coater TM-MC, hirano) was used on a non-treated surface of a PET film (COSMOSHINE A4100, manufactured by Toyobo Co., Ltd., thickness: 50 μm). The coating was carried out at 100 ° C for 20 minutes, and a PET film ("Purex A31" manufactured by Teijindupontfilm (25 cm) having a thickness of 25 μm) was attached as a protective film to obtain a coating layer. A resin film is used. At this time, the thickness of the resin layer can be arbitrarily adjusted by adjusting the gap of the coater, and the thicknesses of the first lower cladding layer and the second lower cladding layer (adhesive layer) used in the present example are It is described in the example. Further, the film thickness after curing of the first lower cladding layer and the second lower cladding layer is the same as the film thickness after coating. The film thickness of the resin film for forming an upper cladding layer used in the present example is also described in the examples. The film thickness of the resin film for forming an upper cladding layer described in the examples is the film thickness after coating.
除使用如下以外:(A)作為基礎聚合物的苯氧基樹脂(商品名:Phenotohto YP-70.東都化成(股)製造)26質量份、(B)作為光聚合性化合物的9,9-雙[4-(2-丙烯醯氧基乙氧基)苯基](商品名:A-BPEF,新中村化學工業(股)製造)36質量份、及雙酚A型環氧丙烯酸酯(商品名:EA-1020.新中村化學工業(股)製造)36質量份,(C)作為光聚合起始劑的雙(2,4,6-三甲基苯甲醯基)氧化二苯基膦(bis(2,4,6-trimethylbenzoyl)phenyl phosphine oxide))(商品名:Irgacure 819,Ciba Japan(股)公司製造)1質量份、及1-[4-(2-羥乙氧基)苯]-2-羥基-2-甲基-1-丙基-1-酮(商品名:Irgacure 2959,Ciba Japan(股)製造)1質量份、作為有機溶劑的丙二醇單甲醚醋酸酯40質量份,以與上述包覆層形成用樹脂清漆A的製造例同樣的方法及條件來調和芯層形成用樹脂清漆B。然後,以與上述包覆層形成用樹脂清漆A的製造例同樣的方法及條件進行加壓過濾,進而進行減壓脫泡。 (A) 26 parts by mass of a phenoxy resin (trade name: Phenotohto YP-70. manufactured by Tosho Kasei Co., Ltd.) as a base polymer, and (B) 9,9 as a photopolymerizable compound, except as follows: Bis[4-(2-propenyloxyethoxy)phenyl] (trade name: A-BPEF, manufactured by Shin-Nakamura Chemical Co., Ltd.) 36 parts by mass, and bisphenol A type epoxy acrylate (commercial product) Name: EA-1020. Manufactured by Shin-Nakamura Chemical Industry Co., Ltd.) 36 parts by mass, (C) bis(2,4,6-trimethylbenzylidene) oxidized diphenylphosphine as a photopolymerization initiator (bis(2,4,6-trimethylbenzoyl)phenyl phosphine oxide)) (trade name: Irgacure 819, manufactured by Ciba Japan Co., Ltd.) 1 part by mass, and 1-[4-(2-hydroxyethoxy)benzene ]-2-hydroxy-2-methyl-1-propyl-1-one (trade name: Irgacure 2959, manufactured by Ciba Japan Co., Ltd.) 1 part by mass, 40 parts by mass of propylene glycol monomethyl ether acetate as an organic solvent The resin layer varnish B for core layer formation is blended in the same manner and under the same conditions as the production example of the resin varnish A for coating layer formation. Then, pressure filtration is carried out in the same manner and under the same conditions as in the production example of the resin varnish A for coating layer formation described above, and defoaming under reduced pressure is further performed.
在PET膜(商品名:COSMOSHINE A1517,東洋紡織(股)製造,厚度:16μm)的非處理面上,利用與上 述製造例同樣的方法塗佈乾燥上述所獲得的芯層形成用樹脂清漆B,然後將作為保護膜的脫模PET膜(商品名:PurexA31,Teijindupontfilm(股)製造,厚度:25μm)以脫模面成為樹脂側的方式貼附,從而獲得芯層形成用樹脂膜。此時樹脂層的厚度藉由調節塗佈機的間隙而可任意調整,關於本實例中所使用的芯層形成用樹脂膜厚度,在以下的各實例中有所記載。實例中所記載的芯層形成用樹脂膜的膜厚成為塗佈後的膜厚。 In the non-treated surface of PET film (trade name: COSMOSHINE A1517, manufactured by Toyobo Co., Ltd., thickness: 16 μm), use and use In the same manner as in the production example, the resin layer varnish B for core layer formation obtained above was applied and dried, and then a release PET film (trade name: Purex A31, manufactured by Teijindupontfilm Co., thickness: 25 μm) as a protective film was released. A resin film for forming a core layer is obtained by attaching the surface to the resin side. At this time, the thickness of the resin layer can be arbitrarily adjusted by adjusting the gap of the coater, and the thickness of the resin film for forming a core layer used in the present example is described in the following examples. The film thickness of the resin film for forming a core layer described in the examples is the film thickness after coating.
(藉由減成法的電氣配線形成) (formed by the electrical wiring of the subtractive method)
在作為金屬層的附單面銅箔的聚醯亞胺膜((聚醯亞胺;Upilex VT(宇部日東化成(股)製造),厚度;25μm),(銅箔;NA-DFF(三井金屬礦業(股)製造),厚度;9μm))的銅箔面,使用輥貼合機(Hitachi Chemical Techno-plant(股)製造,HLM-1500),以壓力0.4MPa、溫度110℃、層壓速度0.4m/min的條件,貼合感光性乾膜抗蝕劑(商品名:Photek,日立化成工業(股)製造,厚度:25μm),然後藉由紫外線曝光機(Oak製作所(股)製作,EXM-1172)自感光性乾膜抗蝕劑側經由寬度50μm的負型光罩,以120mJ/cm2照射紫外線(波長365nm),利用35℃的0.1重量%~5重量%碳酸鈉的稀薄溶液將未曝光部分的感光性乾膜抗蝕劑除去。然後,使用氯化鐵溶液將感光性乾膜抗蝕劑除去後而成為暴露的部分的銅箔藉由蝕刻而除去,且使用35℃的1重量%~10重量%氫氧化鈉水溶液,將曝光部 分的感光性乾膜抗蝕劑除去,形成L(線寬)/S(間隙寬度)=60μm/65μm的電氣配線而獲得可撓性配線板。 Polyimide film with a single-sided copper foil as a metal layer ((polyimide); Upilex VT (manufactured by Ube Nitto Kasei Co., Ltd.), thickness; 25 μm), (copper foil; NA-DFF (Mitsui metal) Mining (manufacturing), thickness; 9 μm)) of the copper foil surface, using a roll laminator (Hitachi Chemical Techno-plant, HLM-1500), with a pressure of 0.4 MPa, a temperature of 110 ° C, laminating speed 0.4 m/min, a photosensitive dry film resist (trade name: Photek, manufactured by Hitachi Chemical Co., Ltd., thickness: 25 μm), and then fabricated by an ultraviolet exposure machine (Oak Co., Ltd., EXM) -1172) Irradiation of ultraviolet rays (wavelength 365 nm) at 120 mJ/cm 2 through a negative-type mask having a width of 50 μm from the photosensitive dry film resist side, and using a thin solution of 0.1% by weight to 5% by weight of sodium carbonate at 35 ° C The photosensitive dry film resist of the unexposed portion was removed. Then, the copper foil which has been exposed to the exposed dry film resist using a ferric chloride solution is removed by etching, and the exposure is performed using a 1% by weight to 10% by weight aqueous sodium hydroxide solution at 35 ° C. A part of the photosensitive dry film resist was removed, and an electric wiring having L (line width) / S (gap width) = 60 μm / 65 μm was formed to obtain a flexible wiring board.
(鍍Ni/Au的形成) (Formation of Ni/Au plating)
然後,將可撓性配線板進行脫脂、軟蝕刻、酸清洗,在非電解鍍Ni用增感劑(商品名:SA-100.日立化成工業(股)製造)中以25℃、5分鐘進行浸漬後水洗,在83℃的非電解鍍Ni液(奧野製藥(股)製造,ICP nikoron GM-SD溶液,pH4.6)中進行8分鐘浸漬從而形成3μm的Ni被膜,然後,藉由純水實施清洗。 Then, the flexible wiring board is subjected to degreasing, soft etching, and acid cleaning, and is carried out at 25 ° C for 5 minutes in a sensitizer for electroless Ni plating (trade name: SA-100. manufactured by Hitachi Chemical Co., Ltd.). After immersion, it was washed with water, and immersed in an electroless Ni plating solution (manufactured by Okuno Pharmaceutical Co., Ltd., ICP nikoron GM-SD solution, pH 4.6) at 83 ° C for 8 minutes to form a Ni film of 3 μm, and then, by pure water. Carry out cleaning.
其次,在置換鍍金液(100mL;HGS-500及1.5g;在氰化金鉀/L中建浴)(商品名:HGS-500.日立化成工業(股)製造,)中以85℃、浸漬8分鐘,在Ni被膜上形成0.06μm的置換金被膜。藉此,獲得無覆蓋膜的電氣配線部分由鍍Ni及鍍Au而被覆的可撓性配線板。 Next, impregnation at 85 ° C in displacement gold plating solution (100 mL; HGS-500 and 1.5 g; bath in potassium cyanide/L) (trade name: HGS-500. manufactured by Hitachi Chemical Co., Ltd.) A gold film of 0.06 μm was formed on the Ni film for 8 minutes. Thereby, a flexible wiring board in which the electric wiring portion without the cover film is coated with Ni plating and Au plating is obtained.
將作為黏著層13的上述所獲得的10μm厚的包覆層形成用樹脂膜裁斷為大小100mm×100mm,將作為保護膜的脫模PET膜(Purex A31)剝離,在上述形成的可撓性配線板的聚醯亞胺面,使用作為平板型疊合機的真空加壓式疊合機(名機製作所(股)製作,MVLP-500),在500Pa以下抽成真空後,以壓力0.4MPa、溫度100℃、加壓時間30秒的條件進行加熱壓接,從而形成附第2下部包覆層的電氣配線板。藉由紫外線曝光機((股)製作所製造,EXM-1172)而自承載膜側以4J/cm2照射紫外線(波長365nm),然後將承載膜剝離,以170℃進行1小時加熱處理, 藉此形成附厚度10μm的第2下部包覆層的基板10。 The 10 μm-thick resin film for forming a cladding layer obtained as the adhesive layer 13 was cut into a size of 100 mm × 100 mm, and the release PET film (Purex A31) as a protective film was peeled off, and the flexible wiring formed as described above was peeled off. The polyimine surface of the plate is used as a vacuum pressurizing laminator (made by the famous machine manufacturer, MVLP-500) as a flat type laminating machine. After vacuuming at 500 Pa or less, the pressure is 0.4 MPa. The electric wiring board with the second lower cladding layer was formed by heating and pressure bonding under the conditions of a temperature of 100 ° C and a pressurization time of 30 seconds. Ultraviolet light (wavelength 365 nm) was irradiated from the carrier film side at 4 J/cm 2 by an ultraviolet exposure machine (EXM-1172), and then the carrier film was peeled off, and heat treatment was performed at 170 ° C for 1 hour. A substrate 10 having a second lower cladding layer having a thickness of 10 μm was formed.
(第1步驟) (Step 1)
將上述所獲得的20μm厚的下部包覆層形成用樹脂膜栽斷為大小100μm×100μm,將保護膜剝離,在第2下部包覆層面側,在與上述同樣的條件下,藉由真空疊合機而積層。經由具有95μm×3.0mm×4根非曝光部的負型光罩,藉由紫外線曝光機(Oak製作所(股)製作,EXM-1172)自承載膜側以250mJ/cm2照射紫外線(波長365nm)。然後,剝離承載膜,使用顯影液(1%碳酸鉀水溶液),對第1下部包覆層進行蝕刻。繼而,進行水清洗,以170℃進行1小時加熱乾燥及硬化,從而於光纖導引溝槽形成部分形成95μm×3.0mm的開口部。藉此,成為在光波導3形成部分形成有光波導側第1下部包覆層22b,在光纖導引構件2側形成有光纖導引側第1下部包覆層22a的狀態。 The resin film for forming a lower cladding layer having a thickness of 20 μm obtained as described above was cut into a size of 100 μm × 100 μm, and the protective film was peeled off. On the second lower cladding layer side, under the same conditions as above, a vacuum stack was used. Join the machine and build up. The negative-type photomask having 95 μm × 3.0 mm × 4 non-exposed portions was irradiated with ultraviolet rays (wavelength 365 nm) at 250 mJ/cm 2 from the side of the carrier film by an ultraviolet exposure machine (manufactured by Oak Co., Ltd., EXM-1172). . Then, the carrier film was peeled off, and the first lower cladding layer was etched using a developing solution (1% potassium carbonate aqueous solution). Then, water washing was performed, and the film was dried by heating and hardening at 170 ° C for 1 hour to form an opening of 95 μm × 3.0 mm in the fiber guiding groove forming portion. Thereby, the optical waveguide side first lower cladding layer 22b is formed in the optical waveguide 3 forming portion, and the optical fiber guiding side first lower cladding layer 22a is formed on the optical fiber guiding member 2 side.
(第2步驟) (Step 2)
其次,在上述的第1下部包覆層面使用輥貼合機(Hitachi Chemical Techno-plant(股)製造,HLM-1500)以壓力0.4MPa、溫度50℃、層壓速度0.2m/min的條件,層壓剝離了保護膜的50μm厚的上述芯層形成用樹脂膜,然後,使用上述的真空加壓式疊合機(株式會社名機製作所製作,MVLP-500),在500Pa以下抽成真空後,以壓力0.4MPa、溫度70℃、加壓時間30秒的條件進行加熱壓接。 然後,經由光信號傳達用芯圖案寬度50μm(光纖連接部分的圖案間距;125μm,光路轉換鏡形成部(自光纖連接部分離開5mm的地點)的圖案間距;250μm,4根)、光纖導引芯圖案寬度40μm(光纖溝槽間距;125μm,4根,僅兩端的光纖導引芯圖案150μm)的負型光罩,將光信號傳達用芯圖案23b形成於第1下部包覆層上,將由光纖導引芯圖案23a形成的光纖導引溝槽32形成於基板上,以此方式進行位置對準,並藉由上述紫外線曝光機以700mJ/cm2照射紫外線(波長365nm),繼而以80℃、5分鐘進行曝光後加熱。然後,將作為承載膜的PET膜剝離,使用顯影液(丙二醇單甲醚醋酸酯/N,N-二甲基乙醯胺=8/2,質量比)蝕刻芯圖案。然後,使用清洗液(異丙醇)進行清洗,以100℃進行10分鐘加熱乾燥,從而形成光信號傳達用芯圖案23b及光纖導引芯圖案23a,且同時形成85μm寬的光纖導引溝槽32。另外,光纖導引芯圖案23a的各圖案的大小在將光纖固定於光纖導引溝槽32時,以光纖與可將光信號收發至光信號傳達用芯圖案23b的位置接合的方式進行設計。 Next, on the first lower cladding layer described above, a roll laminator (manufactured by Hitachi Chemical Techno-plant Co., Ltd., HLM-1500) was used under the conditions of a pressure of 0.4 MPa, a temperature of 50 ° C, and a laminating speed of 0.2 m/min. The resin film for forming a core layer having a thickness of 50 μm from which the protective film was peeled off was laminated, and then vacuum-pressurized laminator (MVLP-500, manufactured by Nippon Seisakusho Co., Ltd.) was used, and vacuum was applied at 500 Pa or less. The heating and pressure bonding was carried out under the conditions of a pressure of 0.4 MPa, a temperature of 70 ° C, and a pressurization time of 30 seconds. Then, the core pattern width is 50 μm via the optical signal transmission (pattern pitch of the fiber connecting portion; 125 μm, pattern pitch of the optical path conversion mirror forming portion (the point where the fiber connecting portion is separated by 5 mm); 250 μm, 4), the optical fiber guiding core A negative mask having a pattern width of 40 μm (fiber groove pitch; 125 μm, four, only two ends of the fiber guiding core pattern: 150 μm) is formed on the first lower cladding layer by the optical signal transmission core pattern 23b. The fiber guiding groove 32 formed by the guiding core pattern 23a is formed on the substrate, is aligned in this manner, and is irradiated with ultraviolet rays (wavelength 365 nm) at 700 mJ/cm 2 by the above ultraviolet exposure machine, and then at 80 ° C, Heating was performed after exposure for 5 minutes. Then, the PET film as a carrier film was peeled off, and a core pattern was etched using a developing solution (propylene glycol monomethyl ether acetate / N, N-dimethylacetamide = 8/2, mass ratio). Then, it was washed with a cleaning liquid (isopropyl alcohol), and dried by heating at 100 ° C for 10 minutes to form an optical signal transmission core pattern 23b and an optical fiber guiding core pattern 23a, and at the same time, an optical fiber guiding groove of 85 μm width was formed. 32. Further, the size of each pattern of the optical fiber guiding core pattern 23a is designed such that the optical fiber is bonded to a position at which the optical signal can be transmitted and received to the optical signal transmission core pattern 23b when the optical fiber is fixed to the optical fiber guiding groove 32.
(第3步驟) (Step 3)
其次,將剝離了保護膜的70μm厚的上部包覆層樹脂膜自芯圖案形成面側開始,使用上述的真空加壓式疊合機(名機製作所(股)製作,MVLP-500),於500Pa以下抽成真空後,以壓力0.35MPa、溫度110℃、加壓時間30秒的條件進行加熱壓接並層壓。進而,使用第1下部包覆層 形成時所使用的負型光罩以150mJ/cm2照射紫外線(波長365nm)後,將承載膜剝離,並使用顯影液(1%碳酸鉀水溶液),蝕刻上部包覆層形成用樹脂膜。繼而,進行水清洗,以170℃進行1小時加熱乾燥及硬化。 Then, the upper cladding resin film having a thickness of 70 μm from which the protective film was peeled off was used from the side of the core pattern forming surface, and the above-described vacuum pressure type laminator (produced by Miyoshi Seisakusho Co., Ltd., MVLP-500) was used. After vacuuming at 500 Pa or less, it was heat-compressed and laminated under the conditions of a pressure of 0.35 MPa, a temperature of 110 ° C, and a pressurization time of 30 seconds. Further, after the negative mask used in the formation of the first lower cladding layer was irradiated with ultraviolet rays (wavelength: 365 nm) at 150 mJ/cm 2 , the carrier film was peeled off, and the developing solution (1% potassium carbonate aqueous solution) was used to etch the upper portion. A resin film for forming a cladding layer. Then, it was washed with water, and dried and hardened at 170 ° C for 1 hour.
如以上般,製作125μm間距、光纖徑80μm、4通道用的光纖連接器本體。 As described above, an optical fiber connector body having a pitch of 125 μm, a fiber diameter of 80 μm, and four channels was produced.
所獲得的光纖連接器本體中,光纖導引溝槽32的橫寬為85μm,光纖導引芯圖案23a的高度(自第2下部包覆層表面算起的高度)為70μm,自基板面至上部包覆層上表面為止的高度為90μm,光信號傳達用芯圖案23b的厚度為50μm。 In the obtained optical fiber connector body, the lateral width of the optical fiber guiding groove 32 is 85 μm, and the height of the optical fiber guiding core pattern 23a (the height from the surface of the second lower cladding layer) is 70 μm, from the substrate surface to the upper side. The height of the upper surface of the cladding layer was 90 μm, and the thickness of the optical signal transmission core pattern 23b was 50 μm.
(第5A步驟及第6步驟) (Steps 5A and 6)
<光路轉換鏡的形成> <Formation of optical path conversion mirror>
自所獲得的光纖連接器本體的上部包覆層側使用切割機(DAC552,Disco(股)公司製造)而形成45°的V字溝槽30。其次,將使鏡形成部分開口的金屬遮罩設置在附鏡片的光纖連接器本體,使用蒸鍍裝置(RE-0025,First技研製)而使作為蒸鍍金屬層的Au蒸鍍0.5μm從而形成光路轉換鏡31。 A 45-degree V-shaped groove 30 was formed using a cutter (DAC552, manufactured by Disco Co., Ltd.) from the upper cladding side of the obtained fiber connector body. Next, a metal mask having a mirror-forming portion opening was placed in the fiber-optic connector body of the lens, and a vapor deposition apparatus (RE-0025, developed by First Technology) was used to vapor-deposit Au as a vapor-deposited metal layer to 0.5 μm. Optical path conversion mirror 31.
(第4步驟) (Step 4)
<蓋材的形成> <Formation of cover material>
於聚醯亞胺膜(Upilex RN(宇部日東化成(股)製造),厚度;25μm)上將作為黏著層42的上述所獲得的10μm厚的包覆層形成用樹脂膜的保護膜剝離,在與上述同樣的 條件下,藉由真空疊合機積層,形成附黏著層42的蓋材40。其次,將積層於蓋材40的包覆層形成用樹脂膜的承載膜剝離,並自上述的光纖連接器的上部包覆層形成面側,在與上述同樣的條件下,藉由真空疊合機進行加熱壓接。其次,以180℃、1小時加熱硬化,從而形成附蓋材40的光纖連接器1A。 The protective film of the resin film for forming a cladding layer having a thickness of 10 μm obtained as the above-mentioned adhesive layer 42 was peeled off on the polyimide film (Upilex RN (manufactured by Ube Nitto Kasei Co., Ltd.), thickness; 25 μm). Same as above Under the condition, the cover material 40 with the adhesive layer 42 is formed by laminating by a vacuum laminator. Then, the carrier film of the resin film for forming a cladding layer laminated on the lid member 40 is peeled off, and the surface of the upper cladding layer of the above-mentioned optical fiber connector is formed, and vacuum lamination is performed under the same conditions as described above. The machine is heated and crimped. Next, it was heat-hardened at 180 ° C for 1 hour to form the optical fiber connector 1A with the cover material 40.
自光纖導引溝槽32的基板10(第2下部包覆層13)表面至蓋材40的底面(蓋材的黏著層42的底面)為止的高度為90μm。 The height from the surface of the substrate 10 (second lower cladding layer 13) of the fiber guiding groove 32 to the bottom surface of the lid member 40 (the bottom surface of the adhesive layer 42 of the lid member) was 90 μm.
所獲得的光纖連接器1A中,下部包覆層的厚度為20μm,光信號傳達用芯圖案23b的厚度為50μm,自光信號傳達用芯圖案23b上表面至蓋材40底面為止的上部包覆層的厚度為20μm,光纖溝槽32寬度為80μm。 In the obtained optical fiber connector 1A, the thickness of the lower cladding layer was 20 μm, the thickness of the optical signal transmission core pattern 23b was 50 μm, and the upper cladding from the upper surface of the optical signal transmission core pattern 23b to the bottom surface of the cover member 40 was coated. The thickness of the layer was 20 μm, and the width of the fiber groove 32 was 80 μm.
(黏著劑導入狹縫的形成步驟) (Step of forming the adhesive introduction slit)
為了將所獲得的光波導3的光纖連接端面平滑化而使用切割機(DAC552,Disco(股)公司製造),形成兼用作40μm寬度的狹縫溝槽的黏著劑導入狹縫25A。並且,相對於光纖導引芯圖案23a平行地切斷基板10(自光波導端面離開3mm的地點),以在基板端面出現光纖導引溝槽32的方式進行外形加工。 In order to smooth the optical fiber connection end face of the obtained optical waveguide 3, a cutter (DAC 552, manufactured by Disco Co., Ltd.) was used to form an adhesive introduction slit 25A which also serves as a slit groove having a width of 40 μm. Then, the substrate 10 (a point separated from the end face of the optical waveguide by 3 mm) is cut in parallel with respect to the optical fiber guiding core pattern 23a, and the outer shape processing is performed so that the optical fiber guiding groove 32 appears on the end surface of the substrate.
自如以上般而獲得的光纖連接器1A的黏著劑導入狹縫25A,滴下作為黏著劑的上述的芯層形成用樹脂清漆,在由光纖導引溝槽32及蓋材40形成的空間部,插入125μm間距、4通道的光纖50(芯徑;50μm,包覆徑;80μm), 以180℃、1小時加熱硬化後,與光波導3的光信號傳達用芯圖案23b的光傳達面接合,自光纖50傳達光信號後,光損失為1.53dB。將其結果表示於表1。 The adhesive introduction slit 25A of the optical fiber connector 1A obtained as described above is dropped, and the above-described resin layer varnish for core layer formation as an adhesive is dropped, and inserted into the space formed by the optical fiber guiding groove 32 and the lid member 40. 125μm pitch, 4-channel fiber 50 (core diameter; 50μm, cladding diameter; 80μm), After heat curing at 180 ° C for 1 hour, the light transmission surface of the optical signal transmission core pattern 23b of the optical waveguide 3 was bonded, and the optical signal was transmitted from the optical fiber 50, and the optical loss was 1.53 dB. The results are shown in Table 1.
實例1中,除對下部包覆層樹脂膜的厚度、芯層形成用樹脂膜的厚度、上部包覆層樹脂膜的厚度、芯圖案形成用負型光罩的形狀進行適當調整,將光纖連接器1A的各部分的尺寸表示於表1以外,進行與實例1同樣的操作。而且,與實例1同樣地,對光損失的值進行測定。將其結果表示於表1及表2中。 In the example 1, the thickness of the lower cladding resin film, the thickness of the resin film for forming a core layer, the thickness of the upper cladding resin film, and the shape of the negative pattern mask for core pattern formation are appropriately adjusted to connect the optical fibers. The dimensions of the respective portions of the device 1A are shown in Table 1 except that the same operation as in Example 1 was carried out. Further, in the same manner as in Example 1, the value of the light loss was measured. The results are shown in Tables 1 and 2.
(第1步驟) (Step 1)
除代替20μm厚的下部包覆層形成用樹脂膜而使用15μm厚的下部包覆層形成用樹脂膜以外,進行與實例1的第1步驟同樣的操作。 The same operation as in the first step of Example 1 was carried out, except that a resin film for forming a lower cladding layer of a thickness of 20 μm was used, and a resin film for forming a lower cladding layer having a thickness of 15 μm was used.
(第2步驟) (Step 2)
進行與實例1的第2步驟同樣的操作。 The same operation as in the second step of Example 1 was carried out.
(第3步驟) (Step 3)
除代替70μm厚的上部包覆層形成用樹脂膜而使用85μm厚的上部包覆層形成用樹脂膜、及將加壓壓接時的壓力設為0.4MPa以代替0.35MPa以外,進行與實例1的第3步驟同樣的操作。 A resin film for forming an upper cladding layer of a thickness of 70 μm was used instead of the resin film for forming an upper cladding layer of a thickness of 70 μm, and a pressure at the time of press-bonding was 0.4 MPa instead of 0.35 MPa, and Example 1 was carried out. The third step of the same operation.
(第5步驟及第6步驟) (Step 5 and Step 6)
<狹縫溝槽的形成> <Formation of slit groove>
為了將所獲得的光纖連接器本體的光纖連接端面平滑 化而使用切割機(DAC552,Disco(股)公司製造),形成40μm寬度的狹縫溝槽25。並且,相對於光纖導引側芯圖案23a平行地切斷基板(自光波導端面離開3mm的地點),以在基板端面出現光纖導引溝槽32的方式進行外形加工。 Smoothing the fiber connection end face of the obtained fiber connector body Using a cutter (DAC552, manufactured by Disco Co., Ltd.), a slit groove 25 having a width of 40 μm was formed. Then, the substrate (the point separated from the end face of the optical waveguide by 3 mm) is cut in parallel with respect to the optical fiber guiding side core pattern 23a, and the outer shape processing is performed so that the optical fiber guiding groove 32 appears on the end surface of the substrate.
<光路轉換鏡的形成> <Formation of optical path conversion mirror>
從所獲得的光纖連接器本體的上部包覆層側使用切割機(DAC552,Disco(股)公司製造)而形成45°的V字溝槽30。其次,將使鏡形成部分開口的金屬遮罩設置在附鏡片的光纖連接器,使用蒸鍍裝置(RE-0025,First技研製)使作為蒸鍍金屬層12a的Au蒸鍍0.5μm從而形成光路轉換鏡31。 A 45° V-shaped groove 30 was formed using a cutter (DAC552, manufactured by Disco Co., Ltd.) from the upper cladding side of the obtained optical connector body. Next, a metal mask having a mirror-formed portion is placed in the lens-attached optical fiber connector, and Au as a vapor-deposited metal layer 12a is vapor-deposited by 0.5 μm using a vapor deposition device (RE-0025, developed by First Technology) to form an optical path. Conversion mirror 31.
(第4步驟) (Step 4)
除將從基板10表面到蓋材40的底面(蓋材40的黏著層的底面)為止的高度設為82μm以代替90μm以外,進行與實例1的第4步驟同樣的操作。 The same operation as in the fourth step of Example 1 was carried out except that the height from the surface of the substrate 10 to the bottom surface of the lid member 40 (the bottom surface of the adhesive layer of the lid member 40) was 82 μm instead of 90 μm.
自如以上般而獲得的光纖連接器1的光纖導引溝槽32滴下上述的芯層形成用樹脂清漆,在由光纖導引溝槽32及蓋材40形成的空間部,插入125μm間距、4通道的光纖50(芯徑;50μm,包覆徑;80μm),以180℃、1小時加熱硬化後,與光波導3的光信號傳達用芯圖案23b的光傳達面接合,從而可從光纖50傳達光信號,且,光纖50亦不會偏移。 The above-described resin varnish for forming a core layer is dropped from the fiber guiding groove 32 of the optical fiber connector 1 obtained as described above, and a space of 125 μm and 4 channels are inserted in a space formed by the fiber guiding groove 32 and the lid member 40. The optical fiber 50 (core diameter; 50 μm, cladding diameter; 80 μm) is heat-hardened at 180 ° C for 1 hour, and then bonded to the light transmission surface of the optical signal transmission core pattern 23b of the optical waveguide 3, thereby being able to be transmitted from the optical fiber 50. The optical signal, and the optical fiber 50 is also not offset.
(第1步驟) (Step 1)
除代替20μm厚的下部包覆層形成用樹脂膜,而使用15μm厚的下部包覆層形成用樹脂膜以外,進行與實例1的第1步驟同樣的操作。 The same operation as in the first step of Example 1 was carried out, except that a resin film for forming a lower cladding layer of 20 μm thick was used instead of a resin film for forming a lower cladding layer having a thickness of 15 μm.
(第2步驟) (Step 2)
進行與實例1的第2步驟同樣的操作。 The same operation as in the second step of Example 1 was carried out.
(第3步驟) (Step 3)
除代替70μm厚的上部包覆層形成用樹脂膜而使用85μm厚的上部包覆層形成用樹脂膜,及將加壓壓接時的壓力設為0.4MPa以代替0.35MPa以外,進行與實例1的第3步驟同樣的操作。 The resin film for forming an upper cladding layer of 85 μm thick was used instead of the resin film for forming the upper cladding layer of 70 μm thick, and the pressure at the time of pressure bonding was 0.4 MPa instead of 0.35 MPa, and Example 1 was carried out. The third step of the same operation.
(第5A步驟,第6步驟) (Step 5A, Step 6)
進行與實例1的第5A步驟及第6步驟同樣的操作。 The same operations as in the fifth step and the sixth step of the example 1 were carried out.
(第4步驟) (Step 4)
除將自基板10表面到蓋材40的底面(蓋材40的黏著層的底面)為止的高度設為82μm以代替90μm以外,進行與實例1的第4步驟同樣的操作。 The same operation as in the fourth step of Example 1 was carried out except that the height from the surface of the substrate 10 to the bottom surface of the lid member 40 (the bottom surface of the adhesive layer of the lid member 40) was 82 μm instead of 90 μm.
(黏著劑導入狹縫的形成步驟) (Step of forming the adhesive introduction slit)
進行與實例1的黏著劑導入狹縫的形成步驟同樣的操作,從而獲得光纖連接器1A。 The same operation as the step of forming the adhesive introduction slit of Example 1 was carried out, thereby obtaining the optical fiber connector 1A.
從如以上般而獲得的光纖連接器1A的黏著劑導入狹縫25A滴下上述的芯層形成用樹脂清漆,在由光纖導引溝槽32及蓋材40形成的空間部,插入125μm間距、4通道 的光纖50(芯徑;50μm,包覆徑;80μm),以180℃、1小時加熱硬化後,與光波導3的光信號傳達用芯圖案23b的光傳達面接合,從而可從光纖50傳達光信號,且,光纖50亦不會偏移。 The resin layer varnish for core layer formation described above was dropped from the adhesive introduction slit 25A of the optical fiber connector 1A obtained as described above, and a space of 125 μm was inserted into the space formed by the optical fiber guiding groove 32 and the lid member 40. aisle The optical fiber 50 (core diameter; 50 μm, cladding diameter; 80 μm) is heat-hardened at 180 ° C for 1 hour, and then bonded to the light transmission surface of the optical signal transmission core pattern 23b of the optical waveguide 3, thereby being able to be transmitted from the optical fiber 50. The optical signal, and the optical fiber 50 is also not offset.
除將黏著劑導入狹縫的形成步驟設為下述般以外,進行與實例21同樣的操作。 The same operation as in Example 21 was carried out except that the steps of forming the adhesive into the slit were as follows.
(黏著劑導入狹縫的形成步驟) (Step of forming the adhesive introduction slit)
為了將所獲得的光波導3的光纖連接端面平滑化,而使用切割機(DAC552,Disco(股)公司製造)形成40μm寬度的兼用作狹縫溝槽的黏著劑導入狹縫25B。並且,相對於光纖-導引芯圖案23a平行地切斷蓋材40(自光波導端面離開3mm的地點),以在蓋材端面出現光纖導引溝槽32的方式進行外形加工。 In order to smooth the optical fiber connection end face of the obtained optical waveguide 3, an adhesive introduction slit 25B which also serves as a slit groove having a width of 40 μm is formed using a cutter (DAC552, manufactured by Disco Co., Ltd.). Then, the cover member 40 (a point separated from the end face of the optical waveguide by 3 mm) is cut in parallel with respect to the optical fiber-guide core pattern 23a, and the outer shape processing is performed so that the optical fiber guiding groove 32 appears on the end surface of the cover member.
從如以上般而獲得的光纖連接器1B的黏著劑導入狹縫25B滴下上述的芯層形成用樹脂清漆,在由光纖導引溝槽32及蓋材40形成的空間部,插入125μm間距、4通道的光纖50(芯徑;50μm,包覆徑;80μm),以180℃、1小時加熱硬化後,與光波導3的光信號傳達用芯圖案23b的光傳達面接合,從而可從光纖50傳達光信號,且,光纖50亦不會偏移。 The resin layer varnish for core layer formation described above was dropped from the adhesive introduction slit 25B of the optical fiber connector 1B obtained as described above, and a space of 125 μm was inserted into the space formed by the optical fiber guiding groove 32 and the lid member 40. The optical fiber 50 (core diameter; 50 μm, cladding diameter; 80 μm) of the channel is heat-hardened at 180 ° C for 1 hour, and then bonded to the light transmission surface of the optical signal transmission core pattern 23b of the optical waveguide 3, thereby being able to be obtained from the optical fiber 50. The optical signal is transmitted and the optical fiber 50 is not offset.
在第4步驟後,除進行下述的黏著劑導入狹縫的形成步驟以外,進行與實例20同樣的操作。 After the fourth step, the same operation as in Example 20 was carried out except that the steps of forming the adhesive introduction slit described below were carried out.
(黏著劑導入狹縫的形成步驟) (Step of forming the adhesive introduction slit)
使用切割機(DAC552,Disco(股)公司製造)形成40μm寬度的黏著劑導入狹縫25C。該黏著劑導入狹縫25C藉由如下而形成:相對於光纖導引芯圖案23a平行地切斷蓋材40(自光波導端面離開3mm的地點),以在蓋材端面出現光纖導引溝槽32的方式進行外形加工。 An adhesive introduction slit 25C having a width of 40 μm was formed using a cutter (DAC552, manufactured by Disco Co., Ltd.). The adhesive introduction slit 25C is formed by cutting the cover member 40 (a position separated from the end face of the optical waveguide by 3 mm) in parallel with respect to the optical fiber guiding core pattern 23a to form a fiber guiding groove at the end surface of the cover member. The shape of 32 is processed in the shape.
從如以上般而獲得的光纖連接器1C的黏著劑導入狹縫25C滴下上述的芯層形成用樹脂清漆,在由光纖導引溝槽32及蓋材40形成的空間部,插入125μm間距、4通道的光纖50(芯徑;50μm,包覆徑;80μm),以180℃、1小時加熱硬化後,與光波導3的光信號傳達用芯圖案23b的光傳達面接合,從而可從光纖50傳達光信號,且,光纖50亦不會偏移。 The resin layer varnish for forming a core layer is dropped from the adhesive introduction slit 25C of the optical fiber connector 1C obtained as described above, and a space of 125 μm is inserted into a space formed by the optical fiber guiding groove 32 and the lid member 40. The optical fiber 50 (core diameter; 50 μm, cladding diameter; 80 μm) of the channel is heat-hardened at 180 ° C for 1 hour, and then bonded to the light transmission surface of the optical signal transmission core pattern 23b of the optical waveguide 3, thereby being able to be obtained from the optical fiber 50. The optical signal is transmitted and the optical fiber 50 is not offset.
在第4步驟後,除進行下述的黏著劑導入狹縫的形成步驟以外,進行與實例20同樣的操作。 After the fourth step, the same operation as in Example 20 was carried out except that the steps of forming the adhesive introduction slit described below were carried out.
(黏著劑導入狹縫的形成步驟) (Step of forming the adhesive introduction slit)
為了將所獲得的光波導3的光纖連接端面平滑化,而使用切割機(DAC552,Disco(股)公司製造)形成40μm寬度的兼用作狹縫溝槽的黏著劑導入狹縫25D。該黏著劑導入狹縫25D藉由如下而形成:相對於光纖-導引芯圖案 23a平行地切斷基板10(自光波導端面離開3mm的地點),以在蓋材端面出現光纖導引溝槽32的方式進行外形加工。 In order to smooth the optical fiber connection end face of the optical waveguide 3 obtained, a dicing machine (DAC 552, manufactured by Disco Co., Ltd.) was used to form an adhesive introduction slit 25D which also serves as a slit groove having a width of 40 μm. The adhesive introduction slit 25D is formed by: relative to the optical fiber-guide core pattern 23a cuts the substrate 10 in parallel (a position separated from the end face of the optical waveguide by 3 mm), and performs profile processing so that the fiber guiding groove 32 appears on the end surface of the lid member.
從如以上般而獲得的光纖連接器1D的黏著劑導入狹縫25D滴下上述的芯層形成用樹脂清漆,在由光纖導引溝槽32及蓋材40形成的空間部,插入125μm間距、4通道的光纖50(芯徑;50μm,包覆徑;80μm),以180℃、1小時加熱硬化後,與光波導3的光信號傳達用芯圖案23b的光傳達面接合,從而可從光纖50傳達光信號,且,光纖50亦不會偏移。 The resin layer varnish for forming a core layer is dropped from the adhesive introduction slit 25D of the optical fiber connector 1D obtained as described above, and a space of 125 μm is inserted into a space formed by the optical fiber guiding groove 32 and the lid member 40. The optical fiber 50 (core diameter; 50 μm, cladding diameter; 80 μm) of the channel is heat-hardened at 180 ° C for 1 hour, and then bonded to the light transmission surface of the optical signal transmission core pattern 23b of the optical waveguide 3, thereby being able to be obtained from the optical fiber 50. The optical signal is transmitted and the optical fiber 50 is not offset.
如以上詳細說明般,本發明的光纖連接器不依賴於基板而容易進行光纖與光波導芯的位置對準,且光纖的位置不易偏移。並且,只要將光纖插入至由溝槽與蓋材形成的空間內便可將光纖與光波導簡易結合。 As described in detail above, the optical fiber connector of the present invention can easily position the optical fiber and the optical waveguide core without depending on the substrate, and the position of the optical fiber is not easily shifted. Moreover, the optical fiber and the optical waveguide can be easily combined by inserting the optical fiber into the space formed by the groove and the cover material.
因此,可有效用作光纖用的光電轉換基板等。 Therefore, it can be effectively used as a photoelectric conversion substrate for an optical fiber or the like.
1、1A、1B、1C、1D‧‧‧光纖連接器 1, 1A, 1B, 1C, 1D‧‧‧ fiber optic connectors
2‧‧‧光纖導引構件 2‧‧‧Fiber guiding member
3‧‧‧光波導 3‧‧‧ optical waveguide
10‧‧‧基板 10‧‧‧Substrate
10a‧‧‧光纖導引側基板部 10a‧‧‧Fibre guide side substrate
10b‧‧‧光波導側基板部 10b‧‧‧Optical waveguide side substrate
11‧‧‧基板本體 11‧‧‧Substrate body
12‧‧‧金屬配線 12‧‧‧Metal wiring
12a‧‧‧金屬層 12a‧‧‧metal layer
13‧‧‧黏著層 13‧‧‧Adhesive layer
22a‧‧‧光纖導引側第1下部包覆層 22a‧‧‧1st lower cladding on the fiber guiding side
22b‧‧‧光波導側第1下部包覆層 22b‧‧‧1st lower cladding on the optical waveguide side
23a‧‧‧光纖導引芯圖案 23a‧‧‧Fiber guide core pattern
23b‧‧‧光信號傳達用芯圖案 23b‧‧‧Light signal transmission core pattern
23c‧‧‧芯構件 23c‧‧‧ core components
24a‧‧‧光纖導引側上部包覆層 24a‧‧‧Film guiding side upper cladding
24b‧‧‧光波導側上部包覆層 24b‧‧‧ optical waveguide side upper cladding
25‧‧‧狹縫溝槽 25‧‧‧Slit trench
25A、25B、25C、25D‧‧‧黏著劑導入狹縫 25A, 25B, 25C, 25D‧‧‧Adhesive introduction slit
26‧‧‧光纖導引圖案 26‧‧‧Fiber guide pattern
30‧‧‧V字溝槽 30‧‧‧V-groove
31‧‧‧光路轉換鏡 31‧‧‧Light path conversion mirror
32‧‧‧光纖導引溝槽 32‧‧‧Fiber guiding groove
40‧‧‧蓋材 40‧‧‧Cleaning
40a‧‧‧光纖導引側蓋材部 40a‧‧‧Fibre guide side cover
40b‧‧‧光波導側蓋材部 40b‧‧‧Light waveguide side cover part
41‧‧‧蓋材本體 41‧‧‧ cover body
42‧‧‧黏著層 42‧‧‧Adhesive layer
50‧‧‧光纖 50‧‧‧ fiber
60‧‧‧黏著劑 60‧‧‧Adhesive
70、70A、70B、70C‧‧‧組裝體 70, 70A, 70B, 70C‧‧‧ assembly
122‧‧‧光纖導引側第1下部包覆片 122‧‧‧1st lower cover sheet on the fiber guiding side
123‧‧‧光纖導引芯片 123‧‧‧Fiber guide chip
124‧‧‧光纖導引側上部包覆片 124‧‧‧Film guiding side upper cover sheet
126‧‧‧導引構件 126‧‧‧Guide members
A、B、C、D‧‧‧線 Lines A, B, C, D‧‧
D1‧‧‧光纖導引溝槽的高度 D1‧‧‧ Height of fiber guiding groove
D2‧‧‧基板與光信號傳達用芯圖案的高度方向的中心之間的距離 D2‧‧‧Distance between the substrate and the center of the height direction of the core pattern for optical signal transmission
D3‧‧‧光信號傳達用芯圖案的高度方向的中心與蓋材之間的距離 D3‧‧‧ Distance between the center of the height direction of the core pattern of the optical signal transmission and the cover material
r‧‧‧光纖的半徑 r‧‧‧The radius of the fiber
R‧‧‧光纖的直徑 R‧‧‧diameter of fiber
W‧‧‧光纖導引溝槽的寬度 W‧‧‧Width of fiber guiding groove
圖1是表示第1實施形態的光纖連接器1的平面圖。 Fig. 1 is a plan view showing the optical connector 1 of the first embodiment.
圖2是表示第1實施形態的光纖連接器1的立體圖。 Fig. 2 is a perspective view showing the optical connector 1 of the first embodiment.
圖3是沿著圖1的A-A線的端視圖(end view)。 Fig. 3 is an end view taken along line A-A of Fig. 1.
圖4是沿著圖1的B-B線的端視圖。 Fig. 4 is an end view taken along line B-B of Fig. 1.
圖5是沿著圖1的C-C線的端視圖。 Fig. 5 is an end view taken along line C-C of Fig. 1.
圖6是沿著圖1的D-D線的端視圖。 Fig. 6 is an end view taken along line D-D of Fig. 1.
圖7是表示光纖連接器1的基板的第1製造步驟的相 當於第1圖的A-A線的部位的端視圖。 7 is a view showing a phase of a first manufacturing step of a substrate of the optical fiber connector 1. An end view of the portion of the line A-A in Fig. 1.
圖8是表示光纖連接器1的基板的第1製造步驟的相當於第1圖的C-C線的部位的端視圖。 8 is an end view showing a portion corresponding to a line C-C of FIG. 1 in a first manufacturing step of the substrate of the optical fiber connector 1.
圖9是表示光纖連接器1的基板的第2製造步驟的相當於第1圖的A-A線的部位的端視圖。 FIG. 9 is an end view showing a portion corresponding to the line A-A of FIG. 1 in the second manufacturing step of the substrate of the optical fiber connector 1.
圖10是表示光纖連接器1的基板的第2製造步驟的相當於第1圖的C-C線的部位的端視圖。 FIG. 10 is an end view showing a portion corresponding to the line C-C of FIG. 1 in the second manufacturing step of the substrate of the optical fiber connector 1.
圖11是表示光纖連接器1的基板的第3製造步驟的相當於第1圖的A-A線的部位的端視圖。 FIG. 11 is an end view showing a portion corresponding to the line A-A of FIG. 1 in the third manufacturing step of the substrate of the optical fiber connector 1.
圖12是表示光纖連接器1的基板的第3製造步驟的相當於第1圖的C-C線的部位的端視圖。 FIG. 12 is an end view showing a portion corresponding to a line C-C of FIG. 1 in a third manufacturing step of the substrate of the optical fiber connector 1.
圖13是表示光纖連接器1的第1步驟的相當於第1圖的A-A線的部位的端視圖。 FIG. 13 is an end view showing a portion corresponding to the line A-A of FIG. 1 in the first step of the optical fiber connector 1.
圖14是表示光纖連接器1的第1步驟的相當於第1圖的B-B線的部位的端視圖。 FIG. 14 is an end view showing a portion corresponding to the line B-B of FIG. 1 in the first step of the optical fiber connector 1.
圖15是表示光纖連接器1的第1步驟的相當於第1圖的C-C線的部位的端視圖。 FIG. 15 is an end view showing a portion corresponding to the line C-C of FIG. 1 in the first step of the optical fiber connector 1.
圖16是表示光纖連接器1的第1步驟的相當於第1圖的D-D線的部位的端視圖。 FIG. 16 is an end view showing a portion corresponding to the line D-D of FIG. 1 in the first step of the optical fiber connector 1.
圖17是表示光纖連接器1的第2步驟的相當於第1圖的A-A線的部位的端視圖。 Fig. 17 is an end elevational view showing a portion corresponding to the line A-A of Fig. 1 in the second step of the optical fiber connector 1.
圖18是表示光纖連接器1的第2步驟的相當於第1圖的B-B線的部位的端視圖。 FIG. 18 is an end view showing a portion corresponding to the line B-B of FIG. 1 in the second step of the optical fiber connector 1.
圖19是表示光纖連接器1的第2步驟的相當於第1 圖的C-C線的部位的端視圖。 19 is a view corresponding to the first step of the second step of the optical fiber connector 1. An end view of the portion of the C-C line of the figure.
圖20是表示光纖連接器1的第2步驟的相當於第1圖的D-D線的部位的端視圖。 FIG. 20 is an end view showing a portion corresponding to the D-D line of FIG. 1 in the second step of the optical fiber connector 1.
圖21是表示光纖連接器1的第3步驟的相當於第1圖的A-A線的部位的端視圖。 FIG. 21 is an end view showing a portion corresponding to the line A-A of FIG. 1 in the third step of the optical fiber connector 1.
圖22是表示光纖連接器1的第3步驟的相當於第1圖的B-B線的部位的端視圖。 FIG. 22 is an end view showing a portion corresponding to the line B-B of FIG. 1 in the third step of the optical fiber connector 1.
圖23是表示光纖連接器1的第3步驟的相當於第1圖的C-C線的部位的端視圖。 FIG. 23 is an end view showing a portion corresponding to the line C-C of FIG. 1 in the third step of the optical fiber connector 1.
圖24是表示光纖連接器1的第3步驟的相當於第1圖的D-D線的部位的端視圖。 FIG. 24 is an end view showing a portion corresponding to the D-D line of FIG. 1 in the third step of the optical fiber connector 1.
圖25是表示光纖連接器1的第5步驟及第6步驟的立體圖。 FIG. 25 is a perspective view showing a fifth step and a sixth step of the optical fiber connector 1.
圖26是表示光纖連接器1的第5步驟及第6步驟的相當於第1圖的A-A線的部位的端視圖。 FIG. 26 is an end view showing a portion corresponding to the line A-A of FIG. 1 in the fifth step and the sixth step of the optical fiber connector 1.
圖27是表示光纖連接器1的第5步驟及第6步驟的相當於第1圖的B-B線的部位的端視圖。 FIG. 27 is an end view showing a portion corresponding to the line B-B of FIG. 1 in the fifth step and the sixth step of the optical fiber connector 1.
圖28是表示光纖連接器1的第6步驟的相當於第1圖的A-A線的部位的端視圖。 FIG. 28 is an end view showing a portion corresponding to the line A-A of FIG. 1 in the sixth step of the optical fiber connector 1.
圖29是表示光纖連接器1的第6步驟的相當於第1圖的B-B線的部位的端視圖。 FIG. 29 is an end view showing a portion corresponding to the line B-B of FIG. 1 in the sixth step of the optical fiber connector 1.
圖30是光纖連接器1A的相當於第1圖的A-A線的部位的端視圖。 Fig. 30 is an end view of a portion of the optical fiber connector 1A corresponding to the line A-A of Fig. 1;
圖31是光纖連接器1A的相當於第1圖的B-B線的部 位的端視圖。 Fig. 31 is a portion of the optical fiber connector 1A corresponding to the line B-B of Fig. 1; The end view of the bit.
圖32是光纖連接器1A的相當於第1圖的C-C線的部位的端視圖。 Fig. 32 is an end elevational view of a portion of the optical fiber connector 1A corresponding to the line C-C of Fig. 1;
圖33是光纖連接器1A的相當於第1圖的D-D線的部位的端視圖。 Fig. 33 is an end elevational view of a portion of the optical fiber connector 1A corresponding to the line D-D of Fig. 1;
圖34是表示光纖連接器1A的第5A步驟的相當於第1圖的A-A線的部位的端視圖。 Fig. 34 is an end elevational view showing a portion corresponding to the line A-A of Fig. 1 in the fifth step of the optical fiber connector 1A.
圖35是表示光纖連接器1A的第5A步驟的相當於第1圖的B-B線的部位的端視圖。 35 is an end view showing a portion corresponding to the line B-B of the first drawing in the fifth step of the optical fiber connector 1A.
圖36是表示光纖連接器1A的第5A步驟的相當於第1圖的C-C線的部位的端視圖。 Fig. 36 is an end elevational view showing a portion corresponding to the line C-C of Fig. 1 in the fifth step of the optical fiber connector 1A.
圖37是表示光纖連接器1A的第5A步驟的相當於第1圖的D-D線的部位的端視圖。 Fig. 37 is an end elevational view showing a portion corresponding to the line D-D of Fig. 1 in the fifth step of the optical fiber connector 1A.
圖38是表示光纖連接器1A的第6步驟的相當於第1圖的A-A線的部位的端視圖。 38 is an end view showing a portion corresponding to the line A-A of Fig. 1 in the sixth step of the optical fiber connector 1A.
圖39是表示光纖連接器1A的第6步驟的相當於第1圖的B-B線的部位的端視圖。 Fig. 39 is an end elevational view showing a portion corresponding to the line B-B of Fig. 1 in the sixth step of the optical fiber connector 1A.
圖40是表示光纖連接器1A的第4步驟的相當於第1圖的A-A線的部位的端視圖。 Fig. 40 is an end elevational view showing a portion corresponding to the line A-A of Fig. 1 in the fourth step of the optical fiber connector 1A.
圖41是表示光纖連接器1A的第4步驟的相當於第1圖的B-B線的部位的端視圖。 Fig. 41 is an end elevational view showing a portion corresponding to the line B-B of Fig. 1 in the fourth step of the optical fiber connector 1A.
圖42是表示光纖連接器1A的第4步驟的相當於第1圖的C-C線的部位的端視圖。 Fig. 42 is an end elevational view showing a portion corresponding to the line C-C of Fig. 1 in the fourth step of the optical fiber connector 1A.
圖43是表示光纖連接器1A的第4步驟的相當於第1 圖的D-D線的部位的端視圖。 Figure 43 is a view showing the first step of the fourth step of the optical fiber connector 1A. An end view of the portion of the D-D line of the figure.
圖44是光纖連接器1B的相當於第1圖的A-A線的部位的端視圖。 Fig. 44 is an end view of a portion of the optical fiber connector 1B corresponding to the line A-A of Fig. 1;
圖45是光纖連接器1B的相當於第1圖的B-B線的部位的端視圖。 Fig. 45 is an end view of a portion of the optical fiber connector 1B corresponding to the line B-B of Fig. 1;
圖46是光纖連接器1C的相當於第1圖的A-A線的部位的端視圖。 Fig. 46 is an end elevational view of a portion of the optical fiber connector 1C corresponding to the line A-A of Fig. 1;
圖47是光纖連接器1C的相當於第1圖的B-B線的部位的端視圖。 Fig. 47 is an end view of a portion of the optical fiber connector 1C corresponding to the line B-B of Fig. 1;
圖48是表示光纖連接器1和光纖的組裝體70及光纖連接器和光纖的連接方法的剖面圖。 Fig. 48 is a cross-sectional view showing a method of connecting the optical fiber connector 1 and the optical fiber assembly 70, and the optical fiber connector and the optical fiber.
圖49是表示光纖連接器1A和光纖的組裝體70A及光纖連接器和光纖的連接方法的剖面圖。 Fig. 49 is a cross-sectional view showing a method of connecting the optical fiber connector 1A and the optical fiber assembly 70A, and the optical fiber connector and the optical fiber.
圖50是表示光纖連接器1B和光纖的組裝體70B及光纖連接器和光纖的連接方法的剖面圖。 Fig. 50 is a cross-sectional view showing a method of connecting the optical fiber connector 1B and the optical fiber assembly 70B and the optical fiber connector and the optical fiber.
圖51是表示光纖連接器1C和光纖的組裝體70C及光纖連接器和光纖的連接方法的剖面圖。 Fig. 51 is a cross-sectional view showing a method of connecting the optical fiber connector 1C and the optical fiber assembly 70C and the optical fiber connector and the optical fiber.
圖52是第4圖的部分放大圖。 Figure 52 is a partial enlarged view of Figure 4;
圖53是第6圖的部分放大圖。 Figure 53 is a partial enlarged view of Figure 6.
圖54是光纖連接器1D的相當於第1圖的A-A線的部位的端視圖。 Fig. 54 is an end elevational view of a portion of the optical fiber connector 1D corresponding to the line A-A of Fig. 1;
圖55是光纖連接器1D的相當於第1圖的B-B線的部位的端視圖。 Fig. 55 is an end elevational view of a portion of the optical fiber connector 1D corresponding to the line B-B of Fig. 1;
1‧‧‧光纖連接器 1‧‧‧Fiber optic connector
2‧‧‧光纖導引構件 2‧‧‧Fiber guiding member
3‧‧‧光波導 3‧‧‧ optical waveguide
23c‧‧‧芯構件 23c‧‧‧ core components
30‧‧‧V字溝槽 30‧‧‧V-groove
31‧‧‧光路轉換鏡 31‧‧‧Light path conversion mirror
32‧‧‧光纖導引溝槽 32‧‧‧Fiber guiding groove
126‧‧‧導引構件 126‧‧‧Guide members
Claims (17)
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US5343544A (en) * | 1993-07-02 | 1994-08-30 | Minnesota Mining And Manufacturing Company | Integrated optical fiber coupler and method of making same |
US20050133943A1 (en) * | 2003-12-19 | 2005-06-23 | Fuji Xerox Co., Ltd. | Process for producing polymer optical waveguide |
TWM359704U (en) * | 2008-10-27 | 2009-06-21 | Advanced Connectek Inc | Optical fiber connector |
US20090214157A1 (en) * | 2008-02-21 | 2009-08-27 | Sony Corporation | Optical module and optical waveguide |
US7590315B2 (en) * | 2006-12-08 | 2009-09-15 | Sony Corporation | Optical waveguide and optical module using the same |
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US5343544A (en) * | 1993-07-02 | 1994-08-30 | Minnesota Mining And Manufacturing Company | Integrated optical fiber coupler and method of making same |
US20050133943A1 (en) * | 2003-12-19 | 2005-06-23 | Fuji Xerox Co., Ltd. | Process for producing polymer optical waveguide |
US7590315B2 (en) * | 2006-12-08 | 2009-09-15 | Sony Corporation | Optical waveguide and optical module using the same |
US20090214157A1 (en) * | 2008-02-21 | 2009-08-27 | Sony Corporation | Optical module and optical waveguide |
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