TWI566269B - Short arc high-pressure discharge lamp for direct current operation - Google Patents
Short arc high-pressure discharge lamp for direct current operation Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
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Description
本發明是關於一種以大於1kW的公稱電力點燈的短弧高壓放電燈。 This invention relates to a short arc high pressure discharge lamp that illuminates with nominal power greater than 1 kW.
此種的燈一般使用於電影院的放映機(projector)、半導體以及液晶顯示器的製造以及微影技術。此種的短弧高壓放電燈包含設置在放電容器內的陽極以及陰極。一般而言,此種放電容器中置入有包含惰性氣體(noble gas)或是惰性氣體的混合氣體的封入物,一般而言惰性氣體或是惰性氣體的混合氣體為氬(Ar)、氪(Kr)以及/或是氙(Xe)。在多數情形,此封入物中進一步含有一般而言為1 mg/cm3至81 mg/cm3之量的汞(Hg)。此種的短弧高壓放電燈內的陽極一般而言是由鎢系材料所形成。 Such lamps are commonly used in the manufacture of projectors for cinemas, semiconductors, and liquid crystal displays, as well as lithography. Such short arc high pressure discharge lamps comprise an anode and a cathode disposed within a discharge vessel. Generally, such a discharge vessel is provided with an enclosure containing a mixed gas of an inert gas or an inert gas. Generally, a mixed gas of an inert gas or an inert gas is argon (Ar) or krypton ( Kr) and / or 氙 (Xe). In most cases, this seal further contains mercury (Hg) in an amount generally ranging from 1 mg/cm 3 to 81 mg/cm 3 . The anode in such a short arc high pressure discharge lamp is generally formed of a tungsten-based material.
短弧高壓放電燈是藉由電子衝擊陽極,而陽極加溫至高溫(一般而言為2000℃至3000℃之間)。其結果陽極材料蒸發而附著於放電容器的內壁。此附著的陽極材料會使放電容器變黯淡或變黑,進一步會因而吸收來自放電容器的光束的一部分,從而使得實用光束減少。此種影響一般而言在放電燈的耐用期間會變得愈發顯著。因此,此放電燈的動作時間增加的話,由於陽極材料的蒸發而使得實用光束減少。 The short arc high pressure discharge lamp is an electron impact anode, and the anode is heated to a high temperature (generally between 2000 ° C and 3000 ° C). As a result, the anode material evaporates and adheres to the inner wall of the discharge vessel. This attached anode material can dim or blacken the discharge vessel, which in turn will absorb a portion of the beam from the discharge vessel, thereby reducing the utility beam. This effect generally becomes more pronounced during the durability of the discharge lamp. Therefore, if the operating time of the discharge lamp is increased, the practical light beam is reduced due to evaporation of the anode material.
除上述影響之外,還具有下述影響:此短弧高壓放電 燈的總耐用時間短,而且可能進一步使實用光線減少。例如是陰極品質隨著動作的期間不斷的劣化。特別是陰極磨損或是陰極的前部前端進一步變寬。因此,特別是具有含汞的封入物的短弧高壓放電燈,陽極材料的蒸發是相關於此放電燈的總耐用期間的決定性重要因素。 In addition to the above effects, it also has the following effects: this short arc high voltage discharge The total durability of the lamp is short and may further reduce utility light. For example, the cathode quality is continuously deteriorated as the operation progresses. In particular, the cathode is worn or the front end of the cathode is further widened. Thus, in particular for short arc high pressure discharge lamps having a mercury containing enclosure, evaporation of the anode material is a decisive factor in the overall durability of the discharge lamp.
特別是封入壓力高於3巴(bar)時,此陽極材料的蒸發會隨著封入壓力的增加而更加顯著。為了使電弧的寬度短,因此使用此種高的惰性氣體或是惰性氣體的混合氣體(一般而言包含Ar以及/或是Kr以及/或是Xe)之封入壓力。依此,此放電燈使用於光學系統時,實用放射光增加,並且此放電燈具有更高的輝度(高輝度燈)。其結果,於陽極材料造成高的熱負荷,而有可能使得因熱產生的應力變大,進一步依此而有可能使得功能面區域(functional surface region)局部的變形。 In particular, when the sealing pressure is higher than 3 bar, the evaporation of the anode material becomes more pronounced as the sealing pressure increases. In order to make the width of the arc short, the sealing pressure of such a high inert gas or a mixed gas of an inert gas (generally including Ar and/or Kr and/or Xe) is used. Accordingly, when the discharge lamp is used in an optical system, practical radiation is increased, and the discharge lamp has a higher luminance (high luminance lamp). As a result, a high thermal load is caused in the anode material, and it is possible to increase the stress due to heat, and further, it is possible to locally deform the functional surface region.
一般而言,上述種類的短弧高壓放電燈以直流以及定電力(瓦特)而動作。但是,在某些用途中,此電力週期的調變是有利的。而此種電力的調變的動作,也會使陽極材料的蒸發增加。 In general, the above-described short arc high pressure discharge lamps operate with direct current and constant electric power (watts). However, in some applications, this power cycle modulation is advantageous. The modulation of such power also increases the evaporation of the anode material.
為了解決上述問題,特別是減少陽極材料的蒸發,並減少功能面區域的局部變形的出現,進行了不同的嘗試。特別是,使陽極的直徑增大,用以藉由熱放射而於離開陽極的部位增加熱流束。進而,提出了於陽極進行被覆以及/或是結構化陽極的不同方法。例如是,作為陽極材料的功能面區域用的被覆材料,使用粗粒鎢或是樹枝狀錸。但是, 低溫封入壓力超過特定值的此等具有高封入壓力的短弧高壓放電燈,此些對策並無法充分的將陽極材料的蒸發抑制到容許值以下。 In order to solve the above problems, in particular, to reduce the evaporation of the anode material and to reduce the occurrence of local deformation of the functional surface region, different attempts have been made. In particular, the diameter of the anode is increased to increase the heat flux at the point of exiting the anode by thermal radiation. Furthermore, different methods of coating the anode and/or structuring the anode have been proposed. For example, as the coating material for the functional surface region of the anode material, coarse-grained tungsten or dendritic ruthenium is used. but, Such short-arc high-pressure discharge lamps having a high sealing pressure with a low-temperature sealing pressure exceeding a certain value do not sufficiently suppress the evaporation of the anode material below the allowable value.
進而,記載有以含有作為添加劑的鉀的鎢系材料形成陽極的放電燈。相對於在非常高溫度進行的差排(dislocation),不溶性鉀粒子賦予充分的耐久性,藉此可獲得優異的形狀安定性。儘管具有優異的形狀安定性,摻雜有鉀的鎢材料在超過2500℃的高溫使用的話,發現有可能沿著晶粒邊界而過度的結晶成長。此種的結晶成長會造成高的多孔度,降低熱傳導率。 Further, a discharge lamp in which an anode is formed of a tungsten-based material containing potassium as an additive is described. The insoluble potassium particles impart sufficient durability with respect to dislocation at a very high temperature, whereby excellent shape stability can be obtained. Despite the excellent shape stability, when a tungsten-doped tungsten material is used at a high temperature exceeding 2,500 ° C, it is found that excessive crystal growth may occur along grain boundaries. Such crystal growth causes high porosity and lowers thermal conductivity.
專利文獻1記載有使用大於1.5kW的公稱電力的直流點燈用高壓汞放電燈(包含陽極)。此陽極的至少一部分區域,至少是由含有若干的鎢的材料所成。此材料具有每1 mm2多於200粒的結晶粒數、大於19.05 g/cm3的密度。此材料摻雜有鉀。此時,鉀的量少於50 ppm。 Patent Document 1 describes a high-pressure mercury discharge lamp (including an anode) for a direct current lighting using a nominal electric power of more than 1.5 kW. At least a portion of the region of the anode is formed of at least a material comprising a plurality of tungsten. This material has a number of crystal grains of more than 200 grains per 1 mm 2 and a density of more than 19.05 g/cm 3 . This material is doped with potassium. At this time, the amount of potassium is less than 50 ppm.
【先前技術文獻】 [Previous Technical Literature]
【專利文獻】 [Patent Literature]
【專利文獻1】國際公開第2008/077832A1號小冊子 [Patent Document 1] International Publication No. 2008/077832A1
本發明的目的在於提供一種使用大於1kW的公稱電力的直流點燈用的短弧高壓放電燈,提升陽極的形狀安定性以及耐蒸發性,而且於製造中,陽極材料即使經高溫加工後亦提供陽極的優良加工性。 It is an object of the present invention to provide a short arc high pressure discharge lamp for DC lighting using a nominal electric power of more than 1 kW, which improves the shape stability and evaporation resistance of the anode, and in the manufacture, the anode material is provided even after high temperature processing. Excellent processability of the anode.
此目的可由申請專利範圍第1項所記載的使用大於1kW的公稱電力的直流點燈用的短弧高壓放電燈來加以解決。附屬申請專利範圍中定義進一步的延伸。 This object can be solved by a short arc high pressure discharge lamp for DC lighting using a nominal electric power of more than 1 kW as described in the first paragraph of the patent application. A further extension is defined in the scope of the patent application.
此短弧高壓放電燈包括:放電容器,低溫封入壓力為0.5巴以上,且置入有包含至少1種的惰性氣體與任意的汞的封入物;陽極,由包含5 ppm~80 ppm的鉀的鎢系材料所形成;以及陰極。此陽極與陰極設置在放電容器內。陽極具有直徑d(其中10 mm<d<70 mm),且包含陽極與電弧相互作用的功能面區域、以及與此功能面區域鄰接的主體(bulk)區域。此功能面區域在與陽極的縱軸線垂直的平面內測定的結晶粒區域廣於2 mm2,包含至少1粒的結晶粒。上述主體區域內的鎢系材料的結晶粒數,每1 mm2多於100粒。此時,對於此結晶粒數,在與陽極的縱軸線垂直的第2平面內進行測定,而且,此第2平面至上述功能面區域的表面為止的軸方向的距離為s(其中s大於d)。在平行於陽極的縱軸線的方向之功能面區域與主體區域之間,陽極的鎢系材料的結晶粒度具有急遽變化。 The short arc high pressure discharge lamp comprises: a discharge vessel having a low temperature sealing pressure of 0.5 bar or more, and an enclosure containing at least one inert gas and any mercury; and an anode comprising 5 ppm to 80 ppm of potassium. Formed by a tungsten material; and a cathode. The anode and cathode are disposed within a discharge vessel. The anode has a diameter d (where 10 mm < d < 70 mm) and includes a functional surface region where the anode interacts with the arc, and a bulk region adjacent to the functional surface region. The functional surface area has a crystalline grain area greater than 2 mm 2 measured in a plane perpendicular to the longitudinal axis of the anode and contains at least one crystal grain. The number of crystal grains of the tungsten-based material in the main body region is more than 100 grains per 1 mm 2 . In this case, the number of crystal grains is measured in a second plane perpendicular to the longitudinal axis of the anode, and the distance from the second plane to the surface of the functional surface region in the axial direction is s (where s is greater than d ). Between the functional surface region and the body region in a direction parallel to the longitudinal axis of the anode, the crystal grain size of the tungsten-based material of the anode has a rapid change.
此功能面區域內的至少1粒的結晶粒之結晶粒區域,藉由光學顯微鏡例如是可在此功能面區域的研磨面上決定,上述主體區域內的鎢系材料的結晶粒數,藉由ASTM E 112定義。陽極的直徑d由陽極的最大直徑決定。在陽極包含圓筒形部分與鄰接圓錐部分的代表示例中,此圓筒形部分的直徑決定為陽極的直徑d。低溫封入壓力此用語,是解釋為於室溫的放電容器的封入壓力。而且,相對於5 ppm~80ppm的鉀含量,陽極的鎢系材料更包含能夠以氧化物形式添加的添加劑,特別是包含矽(Si)或鋁(Al)。陽極的縱軸線對應電弧擴展的軸線。上述功能面區域例如是較佳為鎢系材料的僅1粒的結晶粒所形成,或是亦具有2粒以上的限制量的結晶粒所形成之情形。較佳是在功能面區域包含2粒以上的結晶粒時,此功能面區域內的鎢系材料的所有結晶粒區域具有廣於2mm2的結晶粒區域。上述主體區域內的結晶粒數,每1mm2多於100粒,亦即是,此主體區域由細微粒結構所形成,而且,此功能面區域內的結晶粒廣於2mm2,此些相較之下為對應極大的結晶粒度,因此就結晶粒度的方面來看,此功能面區域與主體區域之間具有極端的差值。此主體區域鄰接功能面區域,因此在此功能面區域與主體區域之間,結晶粒度急遽變化。特別是,如依照此種的結晶粒度急遽變化(此些為二次再結晶中的不連續的結晶粒成長的徵候)、陽極的鎢系材料中的特定量的鉀、此功能面區域內的大結晶粒度以及主體區域內的細微結晶粒度的組合,被瞭解到可實現特別是高水準的形狀安定性、不期望之結晶成長的低風險。依此,在整個短弧高壓放電燈的耐用期間,此短弧高壓放電燈的光束提升。特別是,陽極材料的蒸發所引起的實用光束的減少,可以特別有效率的變少。由於主體區域與功能面區域鄰接,在功能面區域與主體區域之間完全不具有包含中間結晶粒度的區域。此適用於直流動作的短弧高壓放電燈,例如是能夠適用於以定電力直流動作,或是適用於以調變電 力直流動作之特定應用。此陽極例如是亦可具有大致圓筒形的形狀(例如是,在功能面區域內或是功能面區域的附近包含圓形或是圓錐形)。於此情形,縱軸線與此圓柱中心線一致。 The crystal grain region of at least one crystal grain in the functional surface region is determined by an optical microscope, for example, on the polishing surface of the functional surface region, and the number of crystal grains of the tungsten-based material in the main body region is ASTM E 112 is defined. The diameter d of the anode is determined by the maximum diameter of the anode. In the representative example in which the anode includes a cylindrical portion and an adjacent conical portion, the diameter of the cylindrical portion is determined as the diameter d of the anode. The term "low-temperature sealing pressure" is interpreted as the sealing pressure of the discharge vessel at room temperature. Moreover, the tungsten-based material of the anode further contains an additive which can be added in the form of an oxide, particularly containing bismuth (Si) or aluminum (Al), with respect to a potassium content of 5 ppm to 80 ppm. The longitudinal axis of the anode corresponds to the axis of the arc expansion. The functional surface region is preferably formed of only one crystal grain of a tungsten-based material or a crystal grain of a predetermined amount of two or more. It is preferable that when the functional surface region contains two or more crystal grains, all the crystal grain regions of the tungsten-based material in the functional surface region have a crystal grain region larger than 2 mm 2 . The number of crystal grains in the main body region is more than 100 particles per 1 mm 2 , that is, the main body region is formed by a fine particle structure, and the crystal grains in the functional surface region are wider than 2 mm 2 . Below is a correspondingly large crystal grain size, so there is an extreme difference between this functional surface area and the body area in terms of crystal grain size. This body region abuts the functional surface region, so the crystal grain size changes rapidly between this functional surface region and the body region. In particular, if the crystal grain size changes rapidly according to the above (this is a sign of discontinuous crystal grain growth in secondary recrystallization), a specific amount of potassium in the tungsten-based material of the anode, in the functional surface region The combination of the large crystal grain size and the fine crystal grain size in the bulk region is known to achieve a particularly high level of shape stability and a low risk of undesired crystal growth. Accordingly, the beam of the short arc high pressure discharge lamp is boosted during the durability of the entire short arc high pressure discharge lamp. In particular, the reduction of the practical light beam caused by the evaporation of the anode material can be particularly inefficient. Since the body region is adjacent to the functional surface region, there is no region containing the intermediate crystal grain size at all between the functional surface region and the body region. The short-arc high-pressure discharge lamp suitable for DC operation, for example, can be applied to a fixed-current DC operation or to a specific application for modulating power DC operation. The anode may, for example, also have a generally cylindrical shape (for example, a circular or conical shape in the vicinity of the functional surface area or in the vicinity of the functional surface area). In this case, the longitudinal axis coincides with the centerline of the cylinder.
藉由一實施例,上述主體區域內的鎢系材料,實質上具有不受位置所影響的結晶粒數。換言之,於此情形,結晶粒數在整個的主體區域的容積中是大致一致的。於此情形,在全主體區域中具有細微結晶粒度,而且在功能面區域與主體區域之間,結晶粒度具有特別急峻的變化。於此情形,此主體區域具有特別優良的加工性。 In one embodiment, the tungsten-based material in the body region has substantially the number of crystal grains that are not affected by the position. In other words, in this case, the number of crystal grains is substantially uniform throughout the volume of the body region. In this case, there is a fine crystal grain size in the entire body region, and the crystal grain size has a particularly sharp change between the functional surface region and the body region. In this case, this body region has particularly excellent workability.
藉由一實施例,此陽極的鎢系材料包含大於19.05g/cm3的密度。於此種情形,此陽極以特別緻密的方式而實現於陽極存在高熱傳導度。依此,於此短弧高壓放電燈的動作中,能夠有效率的抑制於陽極因熱而產生的應力。 By way of an embodiment, the tungsten-based material of the anode comprises a density greater than 19.05 g/cm 3 . In this case, the anode is realized in a particularly dense manner in the presence of high thermal conductivity at the anode. Accordingly, in the operation of the short arc high pressure discharge lamp, it is possible to effectively suppress the stress generated by the anode due to heat.
藉由一實施例,上述功能面區域在與縱軸線平行的方向具有厚度t。於此情形,d/20<t<d/5,特別是d/10<t<d/5。由於此功能面區域的上述厚度,可瞭解到具有此短弧高壓放電燈的特別有利的性質。 By way of an embodiment, the functional surface area has a thickness t in a direction parallel to the longitudinal axis. In this case, d/20 < t < d/5, especially d/10 < t < d/5. Due to the aforementioned thickness of this functional surface area, a particularly advantageous property with this short arc high pressure discharge lamp is known.
藉由一實施例,上述功能面區域包含至少1粒的結晶粒,其中結晶粒具有廣於5mm2、特別是廣於10mm2的結晶粒區域。於功能面區域包含2粒以上的結晶粒時,較佳是此功能面區域的所有結晶粒具有此種廣的結晶粒區域。特別是,藉由此種廣的結晶粒區域,有效的抑制陽極材料 的蒸發,因此,此放電燈的耐用期變長。 By way of an embodiment, the functional surface region comprises at least one crystalline particle, wherein the crystalline particle has a crystalline particle region which is wider than 5 mm 2 , in particular greater than 10 mm 2 . When two or more crystal grains are contained in the functional surface region, it is preferred that all of the crystal grains in the functional surface region have such a wide crystal grain region. In particular, by such a wide crystal grain region, evaporation of the anode material is effectively suppressed, and therefore, the durability of the discharge lamp becomes long.
藉由一實施例,上述功能面區域僅由1粒的結晶粒所構成。於此情形,晶粒邊界由此功能面區域排除,因此無論是何種晶粒邊界,電弧不會相互作用。依此,陽極可被特別安定的實現。 According to one embodiment, the functional surface area is composed of only one crystal grain. In this case, the grain boundaries are excluded from this functional surface region, so the arc does not interact regardless of the grain boundaries. Accordingly, the anode can be realized in a particularly stable manner.
藉由一實施例,上述主體區域內的陽極的鎢系材料,每1 mm2包含多於200粒的結晶粒數,特別是每1 mm2包含350粒以上的結晶粒數。於此情形,主體區域內的結晶粒度更細,因此陽極的加工性更為提升。而且,在主體區域與功能面區域之間,結晶粒度的變化的急峻程度變得更加顯著。依此,形狀安定性與耐蒸發性更加提升。 By one embodiment, a tungsten-based material of the anode in said body region, comprising more than 1 mm 2 per 200 crystal grains, particularly comprising 2 to 350 or more crystal grains per 1 mm. In this case, the crystal grain size in the main body region is finer, and thus the workability of the anode is further improved. Moreover, the sharpness of the change in crystal grain size becomes more remarkable between the body region and the functional surface region. Accordingly, shape stability and evaporation resistance are further improved.
藉由一實施例,陽極的鎢系材料中的鉀的量少於50 ppm,特別是8 ppm至45 ppm,更特別是10 ppm至40 ppm。此些鉀量的數值,特別有效率的防止因差排的進行所引起的陽極的變形。於此情形,以鉀充滿的結晶因吸引性的相互作用而影響差排,藉此,此陽極材料具有高的潛變抵抗(creep resistance)。 By way of an embodiment, the amount of potassium in the tungsten-based material of the anode is less than 50 ppm, particularly from 8 ppm to 45 ppm, more particularly from 10 ppm to 40 ppm. These values of the amount of potassium are particularly effective in preventing deformation of the anode due to the progress of the difference. In this case, the potassium-filled crystal affects the poor row due to the attractive interaction, whereby the anode material has high creep resistance.
藉由一實施例,陽極的鎢系材料亦包含Al以及/或是Si。Al以及/或是Si例如是可以在陽極的粉末冶金製程中,添加對應的氧化物以提供。Al以及Si具有如下有利點:在陽極的粉末冶金製程中,使陽極的鎢系材料中的鉀含量安定,達成陽極的高安定性,並且有效率的防止差排的進行。 By way of an embodiment, the tungsten-based material of the anode also contains Al and/or Si. Al and/or Si, for example, can be provided by adding a corresponding oxide in the powder metallurgy process of the anode. Al and Si have the advantage that in the powder metallurgy process of the anode, the potassium content in the tungsten-based material of the anode is stabilized, the high stability of the anode is achieved, and the progress of the difference is efficiently prevented.
藉由一實施例,此短弧高壓放電燈具有大於4 kW的公 稱電力,較佳具有大於5 kW的公稱電力。藉由一實施例,此封入物包含1 mg/cm3~50 mg/cm3的汞。特別是於此些情形,陽極材料的蒸發常常發生的更多,必須有效率的防止。 By way of an embodiment, the short arc high pressure discharge lamp has a nominal power of greater than 4 kW, preferably having a nominal power of greater than 5 kW. By way of an embodiment, the enclosure comprises from 1 mg/cm 3 to 50 mg/cm 3 of mercury. Especially in these cases, evaporation of the anode material often occurs more and must be prevented efficiently.
藉由一實施例,此低溫封入壓力為0.5巴以上,特別是1.5巴以上,而且,此短弧高壓放電燈適用於以定電力動作。藉由其他實施例,此低溫封入壓力為0.5巴以上,特別是1.5巴以上,而且,此短弧高壓放電燈適用於以調變的電力動作。特別是,此短弧高壓放電燈應用於此種方法時,有必要有效率的抑制陽極材料的蒸發。 By way of an embodiment, the low temperature encapsulation pressure is above 0.5 bar, in particular above 1.5 bar, and the short arc high pressure discharge lamp is suitable for operation at constant power. By means of other embodiments, the low-temperature sealing pressure is above 0.5 bar, in particular above 1.5 bar, and the short-arc high-pressure discharge lamp is suitable for operation with modulated electric power. In particular, when this short arc high pressure discharge lamp is applied to such a method, it is necessary to efficiently suppress evaporation of the anode material.
更進一步的展開以及優點,請參照後述的圖式,並明示於一實施例的下述說明。 For further development and advantages, please refer to the following description, and the following description of an embodiment will be apparent.
其次,參照此些圖式並說明一實施型態。圖1所示為短弧高壓放電燈1。短弧高壓放電燈1包括放電容器2。在放電容器2內部設置有陰極3與陽極4。如圖1所示,陽極4的面向陰極3的一側呈現具有附傾斜端緣的大致圓筒形的形狀。陰極3包含圓錐形的前端部分。短弧高壓放電燈1的動作,是在陰極3的圓錐形前端部分與陽極4之間形成電弧。此電弧於大致平行於陽極4的縱軸線Z方向擴展。於圖示的實施型態,陽極4的縱軸線Z與陽極4的圓筒形部分的圓柱中心線一致。 Next, reference is made to these drawings and an embodiment will be described. Figure 1 shows a short arc high pressure discharge lamp 1. The short arc high pressure discharge lamp 1 comprises a discharge vessel 2. A cathode 3 and an anode 4 are provided inside the discharge vessel 2. As shown in Fig. 1, the side of the anode 4 facing the cathode 3 assumes a substantially cylindrical shape with an inclined end edge. The cathode 3 includes a conical front end portion. The operation of the short arc high pressure discharge lamp 1 is to form an arc between the conical front end portion of the cathode 3 and the anode 4. This arc expands in a direction substantially parallel to the longitudinal axis Z of the anode 4. In the illustrated embodiment, the longitudinal axis Z of the anode 4 coincides with the cylindrical centerline of the cylindrical portion of the anode 4.
如圖1所示,陽極4較佳是在面向陰極3的一側包含附有傾斜的形狀。陽極4的面向陰極3的一側,包含電弧 與陽極4相互作用的功能面區域4a。陽極4於遠離陰極3的方向,包含與功能面區域4a直接鄰接的主體區域4b。功能面區域4a與主體區域4b兩者都是由包含作為添加劑的5ppm~80ppm的鉀之鎢系材料所形成。較佳是鉀的量少於50ppm,更佳是8ppm至45ppm,再更佳是10ppm至40ppm。功能面區域4a與主體區域4b兩者是由同一材料形成,包含有大致相同的密度。但是,如同以下的進一步詳細說明,功能面區域4a內的結晶粒度與主體區域4b內的結晶粒度具有顯著的差異。例如是,陽極4的材料可以是被賦予有作為添加劑的上述量的鉀之鎢。但是,亦可以進一步賦予其他添加劑。例如是,作為其他添加劑而添加有少量的鋁(Al)以及/或是矽(Si)。例如是,此些添加物亦能夠以氧化物的形式添加。較佳是上述少量的鋁以及/或是矽,與鉀的量為同程度。 As shown in Fig. 1, the anode 4 preferably includes a slanted shape on the side facing the cathode 3. The side of the anode 4 facing the cathode 3, including the arc Functional surface area 4a that interacts with anode 4. The anode 4 includes a body region 4b directly adjacent to the functional surface region 4a in a direction away from the cathode 3. Both the functional surface region 4a and the main body region 4b are formed of a tungsten-based material containing 5 ppm to 80 ppm of potassium as an additive. Preferably, the amount of potassium is less than 50 ppm, more preferably from 8 ppm to 45 ppm, still more preferably from 10 ppm to 40 ppm. Both the functional surface area 4a and the main body area 4b are formed of the same material and contain substantially the same density. However, as explained in further detail below, the crystal grain size in the functional surface region 4a is significantly different from the crystal grain size in the body region 4b. For example, the material of the anode 4 may be tungsten which is imparted with the above amount of potassium as an additive. However, other additives may be further imparted. For example, a small amount of aluminum (Al) and/or bismuth (Si) is added as another additive. For example, such additives can also be added in the form of an oxide. Preferably, the above-mentioned small amount of aluminum and/or cerium is the same as the amount of potassium.
於上述圓筒形部分,陽極4具有10mm至70mm的範圍的直徑d。而且,陽極4的鎢系材料具有大於19.05g/cm3的密度。依此,在短弧高壓放電燈1的動作中藉由熱傳導以及熱放射,能夠有效率的將熱由功能面區域4a移去。 In the above cylindrical portion, the anode 4 has a diameter d ranging from 10 mm to 70 mm. Moreover, the tungsten-based material of the anode 4 has a density greater than 19.05 g/cm 3 . Accordingly, heat can be efficiently removed from the functional surface region 4a by heat conduction and heat radiation during the operation of the short arc high pressure discharge lamp 1.
於主體區域4b,此鎢系材料包含如下的細微結晶粒度,每1mm2具有多於100粒的結晶粒數,較佳為每1mm2具有多於200粒的結晶粒數,更佳為每1mm2具有多於350粒的結晶粒數。此結晶粒度是依循ASTM E 112,在與陽極4的縱軸線垂直的平面內測定。例如是,此結晶粒數是在距離功能面區域4a的表面僅為距離s的位置測定。其中距 離s大於上述已定的直徑d。此結晶粒數於陽極4的全部主體區域4b內大致一定。換言之,此結晶粒數於主體區域4b內實質上並不會受到位置的影響。 The body region 4b, this tungsten-based material comprising the fine grain size, each having more than 1mm 2 100 crystal grains, preferably having crystalline grains per 1mm 2 of more than 200, and more preferably 1mm per 2 has more than 350 grains of crystal grains. This crystal grain size is measured in a plane perpendicular to the longitudinal axis of the anode 4 in accordance with ASTM E 112. For example, the number of crystal grains is measured at a position which is only a distance s from the surface of the functional surface region 4a. Wherein the distance s is greater than the predetermined diameter d. The number of crystal grains is substantially constant in all the main body regions 4b of the anode 4. In other words, the number of crystal grains in the body region 4b is substantially not affected by the position.
功能面區域4a是從陽極4中面向陰極3的面而擴寬至主體區域4b為止。亦即是,在功能面區域4a與主體區域4b之間,其他區域(具有中間結晶粒度/結晶粒數)完全不存在。功能面區域4a包含與主體區域4b內的結晶粒度極為不同的結晶粒度。功能面區域4a僅由1粒的結晶粒而構成,或是僅含有少數的結晶粒。較佳是功能面區域4a僅由1粒的結晶粒而構成。功能面區域4a包含至少1粒的結晶粒,此結晶粒具有廣於2mm2的結晶粒區域,更佳是具有廣於5mm2的結晶粒區域,再更佳是具有廣於10mm2的結晶粒區域。此結晶粒區域是由功能面區域4a的顯微鏡照片來測定。在功能面區域內4a含有若干個結晶粒時。此些所有的結晶粒,較佳是含有上述已定的寬結晶粒區域。於半徑方向,功能面區域4a至少形成於陽極4中與縱軸線Z交叉的表面部分。於與縱軸線Z平行的方向,功能面區域4a具有d/20至d/5的厚度t,較佳為具有d/10至d/5的厚度t。此處d為上述已定的陽極4的直徑。 The functional surface region 4a is widened from the surface of the anode 4 facing the cathode 3 to the main body region 4b. That is, between the functional surface area 4a and the main body area 4b, other areas (having an intermediate crystal grain size/crystal grain number) are completely absent. The functional surface region 4a contains a crystal grain size which is extremely different from the crystal grain size in the main body region 4b. The functional surface region 4a is composed of only one crystal grain or only a few crystal grains. It is preferable that the functional surface region 4a is composed of only one crystal grain. 4a functional surface area comprising at least one of the crystal grains, the crystal grains having a crystal grain area broader than 2mm 2, more preferably having 2 5mm wide crystal grains in the region, and still more preferably having a 10mm wide in crystal grains 2 region. This crystal grain region is determined by a micrograph of the functional surface region 4a. When the number of crystal grains is contained in the functional surface region 4a. All of the crystal grains preferably contain the above-mentioned predetermined wide crystal grain region. In the radial direction, the functional surface area 4a is formed at least in the surface portion of the anode 4 that intersects the longitudinal axis Z. In the direction parallel to the longitudinal axis Z, the functional surface area 4a has a thickness t of d/20 to d/5, preferably a thickness t of d/10 to d/5. Here d is the diameter of the above-mentioned determined anode 4.
藉由使功能面區域4a內的結晶粒區域廣,而且主體區域4b(與功能面區域4a直接鄰接)內的結晶粒數多,於功能面區域4a與主體區域4b之間的邊界,結晶粒度存在顯著的急遽變化。特別是,此種結晶粒度的急遽變化,亦即是不具有中間粒度的情形,可瞭解對於陽極4的特性產生 有利的影響。功能面區域4a與主體區域4b之間的此種結晶粒度的急遽變化,被認為是功能面區域4a內的不連續的結晶粒成長所引起的。 By making the crystal grain region in the functional surface region 4a wide, and the number of crystal grains in the main body region 4b (directly adjacent to the functional surface region 4a) is large, the crystal grain size is at the boundary between the functional surface region 4a and the main body region 4b. There are significant rapid changes. In particular, such a rapid change in crystal grain size, that is, a case where there is no intermediate grain size, can be understood to produce characteristics for the anode 4 Favorable impact. The rapid change in crystal grain size between the functional surface region 4a and the main body region 4b is considered to be caused by the growth of discontinuous crystal grains in the functional surface region 4a.
上述陽極4的特性可依如下方式達成,由微粉末型態的鎢系材料形成陽極4,在依此形成的大的變形前的陽極材料,以略低的溫度(例如是低於1300℃)施加大的變形(例如是,具體的變形度△A/A>66%),將高變形度的能量收進此大變形前的陽極。其結果,得到再結晶中發生的大的力,具有以高速的晶粒邊界的成長,而且於此些結晶粒的內部具有鉀結晶。依此,抑制了沿著此些晶粒邊界的不希望的結晶成長。 The characteristics of the anode 4 described above can be achieved by forming the anode 4 from a tungsten-based material of a fine powder type, and a relatively low temperature (for example, less than 1300 ° C) of the anode material before the large deformation formed thereby. A large deformation is applied (for example, a specific degree of deformation ΔA/A > 66%), and energy of high deformation is collected into the anode before the large deformation. As a result, a large force generated in recrystallization is obtained, and growth is performed at a high-speed grain boundary, and potassium crystals are present inside the crystal grains. Accordingly, undesired crystal growth along such grain boundaries is suppressed.
對於依照一實施型態的短弧高壓放電燈1與2個比較試樣來進行比較。此比較的結果表示於圖3。圖3所描繪的是相對於此實施型態的短弧高壓放電燈1以及2個比較試樣,作為動作時間(以時間表示)的函數之相對流明維持率(以百分率表示)。此相對流明維持率賦予與初期光束比較的光束的變化。對此實施型態的測定值以圓形表示,第1比較例的測定值以黑色三角形表示,第2比較例的測定值以黑色正方形表示。 A comparison was made between a short arc high pressure discharge lamp 1 according to an embodiment and two comparative samples. The results of this comparison are shown in Figure 3. Figure 3 depicts the relative lumen maintenance (expressed as a percentage) of the short arc high pressure discharge lamp 1 and the two comparative samples as a function of operating time (in terms of time) relative to this embodiment. This relative lumen maintenance rate gives a change in the beam compared to the initial beam. The measured values of this embodiment are indicated by circles, the measured values of the first comparative example are indicated by black triangles, and the measured values of the second comparative example are indicated by black squares.
此實施型態與此些的比較例,個別的陽極是由添加有鉀(K)、鋁(Al)、矽(Si)的鎢所形成。此陽極材料的密度,在3個所有的事例中為19.1 g/cm3。 In this embodiment and the comparative examples, the individual anodes are formed of tungsten to which potassium (K), aluminum (Al), or bismuth (Si) is added. The density of this anode material was 19.1 g/cm 3 in all three cases.
於此實施型態,鉀量為25 ppm,而且鋁量為18 ppm, 進而矽量為6 ppm。 In this embodiment, the amount of potassium is 25 ppm and the amount of aluminum is 18 ppm. Further, the amount is 6 ppm.
於第1比較例,鉀量為26 ppm,而且鋁量為18 ppm,進而矽量為7 ppm。 In the first comparative example, the amount of potassium was 26 ppm, and the amount of aluminum was 18 ppm, and the amount of lanthanum was 7 ppm.
於第2比較例,鉀量為24 ppm,而且鋁量為17 ppm,進而矽量為7 ppm。 In the second comparative example, the amount of potassium was 24 ppm, and the amount of aluminum was 17 ppm, and the amount of lanthanum was 7 ppm.
於此實施型態,主體區域4b包含約350粒的結晶粒數/mm2,而且功能面區域4a由僅1粒的具有約12 mm2的結晶粒度之結晶粒所構成。圖2所示為此實施型態的短弧高壓放電燈的陽極之一部分的顯微鏡照片。於圖2中,可用來明確理解功能面區域4a僅由1粒的結晶粒所形成,且主體區域4b包含細微粒。因此,於功能面區域4a與主體區域4b之間的邊界,結晶粒度存在有急遽變化。此表示於圖4的概略圖中。此實施型態的陽極4,可藉由以鎢系粉末來形成陽極材料以得到,其中鎢系粉末具有所希望的組成且平均結晶粒度為3.5 μm。「大的變形前的(raw)」陽極,於約2000巴承受冷均壓加壓,並於高於2200℃的溫度煅燒。陽極4(或是更適當的說法,此階段為陽極材料)於低於1300℃的溫度變形至高於66%的具體的變形度△A/A。依此形成的陽極4,於2200℃以180分鐘的溫度煅燒而成。在短弧高壓放電燈1中裝設陽極4之後,將陽極4加熱至約3000℃的最高動作溫度為止。於此情形,加熱是以橫跨約60分鐘的時間間隔而連續的進行。 In this embodiment, the main body region 4b contains about 350 crystal grains/mm 2 , and the functional surface region 4a is composed of only one crystal grain having a crystal grain size of about 12 mm 2 . Figure 2 shows a photomicrograph of a portion of the anode of a short arc high pressure discharge lamp of this embodiment. In Fig. 2, it can be used to clearly understand that the functional surface region 4a is formed of only one crystal grain, and the body region 4b contains fine particles. Therefore, there is a sudden change in the crystal grain size at the boundary between the functional surface region 4a and the main body region 4b. This is shown in the schematic diagram of FIG. The anode 4 of this embodiment can be obtained by forming an anode material with a tungsten-based powder having a desired composition and an average crystal grain size of 3.5 μm. The "raw" anode is subjected to cold pressure equalization at about 2000 bar and calcined at a temperature above 2200 °C. The anode 4 (or more appropriately, the anode material at this stage) is deformed at a temperature below 1300 ° C to a specific degree of deformation ΔA/A above 66%. The anode 4 thus formed was calcined at 2,200 ° C for 180 minutes. After the anode 4 is installed in the short arc high pressure discharge lamp 1, the anode 4 is heated to a maximum operating temperature of about 3000 °C. In this case, the heating is carried out continuously over a time interval of about 60 minutes.
於上述的2個比較例,主體區域4b與功能面區域4a兩者都含有約350粒的大致相同的結晶粒數/mm2。 In the above two comparative examples, both the main body region 4b and the functional surface region 4a contained approximately 350 particles of substantially the same number of crystal grains/mm 2 .
此實施型態以及此些比較例的陽極,全部是由粉末冶金製程所形成。其結果所得的陽極形狀,藉由壓延、研磨、銑削、洗淨、回火等公知的技法而實現。與此實施型態的陽極4對照用的此些比較例的陽極,並沒有接受在略低的溫度的大的變形。 The embodiment and the anodes of these comparative examples are all formed by a powder metallurgy process. As a result, the obtained anode shape is realized by a known technique such as rolling, grinding, milling, washing, and tempering. The anodes of these comparative examples used in comparison with the anode 4 of this embodiment did not receive a large deformation at a slightly lower temperature.
如圖3所示,此實施型態的短弧高壓放電燈的相對流明維持率,作為動作時間的函數顯示了顯著向上提升的舉動。亦即是,此光束與此些比較例相比較,抑制了隨時間的衰減程度。 As shown in Fig. 3, the relative lumen maintenance rate of this embodiment of the short arc high pressure discharge lamp shows a significant upward lift as a function of the operating time. That is, this beam suppresses the degree of attenuation with time as compared with these comparative examples.
因此,本發明的短弧高壓放電燈的陽極的穩定性,與以往的實施例進行比較,顯示了實質的提升。依本發明實質的達成了無論何種的晶粒邊界亦不會與電弧相互作用。至某程度為止,其被認為是二次再結晶中的不連續的結晶粒成長所造成的。不連續的結晶粒成長以高速進行。依此,結晶粒不會受到來自晶粒邊界的實質影響,迴避了沿著此些晶粒邊界合體所致的進一步結晶粒粗大化。以鉀充滿的結晶因吸引性的相互作用而影響差排,藉此,此陽極材料具有高的潛變抵抗,迴避了差排的進行所致的變形。進而,瞭解了在本發明的短弧高壓放電燈的動作中,防止了主體區域4b內的細粒狀的結晶粒的進一步成長。 Therefore, the stability of the anode of the short arc high pressure discharge lamp of the present invention is compared with the prior embodiment, showing a substantial improvement. According to the essence of the invention, no matter what kind of grain boundary is reached, it does not interact with the arc. To some extent, it is considered to be caused by the growth of discontinuous crystal grains in secondary recrystallization. The discontinuous crystal grain growth proceeds at a high speed. Accordingly, the crystal grains are not subjected to substantial influence from the grain boundaries, and further coarsening of crystal grains due to the combination of the grain boundaries is avoided. The crystals filled with potassium affect the difference due to the attractive interaction, whereby the anode material has high latent resistance and avoids deformation due to the progress of the difference. Further, it is understood that in the operation of the short arc high pressure discharge lamp of the present invention, further growth of fine-grained crystal grains in the main body region 4b is prevented.
雖然以略為特定的實施型態進行說明,但是此些並不能被視作為對申請專利範圍的保護範圍進行限定。 Although the invention has been described in a somewhat specific embodiment, these are not to be construed as limiting the scope of the claims.
1‧‧‧短弧高壓放電燈 1‧‧‧Short arc high pressure discharge lamp
2‧‧‧放電容器 2‧‧‧discharger
3‧‧‧陰極 3‧‧‧ cathode
4‧‧‧陽極 4‧‧‧Anode
4a‧‧‧功能面區域 4a‧‧‧Functional area
4b‧‧‧主體區域 4b‧‧‧ body area
d‧‧‧直徑 D‧‧‧diameter
s‧‧‧距離 S‧‧‧distance
t‧‧‧厚度 T‧‧‧thickness
Z‧‧‧縱軸線 Z‧‧‧ longitudinal axis
圖1所示為短弧高壓放電燈的概略圖。 Figure 1 shows a schematic view of a short arc high pressure discharge lamp.
圖2所示為一實施型態的短弧高壓放電燈的陽極的一部分的顯微鏡照片。 Figure 2 is a photomicrograph of a portion of the anode of an embodiment of a short arc high pressure discharge lamp.
圖3為相對於此實施型態的短弧高壓放電燈以及2個比較例,表示作為動作時間的函數的相對流明維持率之折線圖。 Fig. 3 is a line graph showing the relative lumen maintenance rate as a function of the operation time for the short arc high pressure discharge lamp and the two comparative examples of the embodiment.
圖4所示為由圖2的顯微鏡照片所決定的主體區域與功能面區域之間的結晶粒度的差異的概略圖。 Fig. 4 is a schematic view showing the difference in crystal grain size between the main body region and the functional surface region determined by the micrograph of Fig. 2.
1‧‧‧短弧高壓放電燈 1‧‧‧Short arc high pressure discharge lamp
2‧‧‧放電容器 2‧‧‧discharger
3‧‧‧陰極 3‧‧‧ cathode
4‧‧‧陽極 4‧‧‧Anode
4a‧‧‧功能面區域 4a‧‧‧Functional area
4b‧‧‧主體區域 4b‧‧‧ body area
d‧‧‧直徑 D‧‧‧diameter
s‧‧‧距離 S‧‧‧distance
t‧‧‧厚度 T‧‧‧thickness
Z‧‧‧縱軸線 Z‧‧‧ longitudinal axis
Claims (13)
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JP2011173994A JP5823770B2 (en) | 2011-08-09 | 2011-08-09 | Short arc high pressure discharge lamp |
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KR (1) | KR101941322B1 (en) |
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Citations (4)
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JPS5550566A (en) * | 1978-10-06 | 1980-04-12 | Toshiba Corp | Super high voltage discharging lamp |
US4574219A (en) * | 1984-05-25 | 1986-03-04 | General Electric Company | Lighting unit |
CN1210360A (en) * | 1997-09-04 | 1999-03-10 | 电灯专利信托有限公司 | Electrode and method and manufacturing apparatus thereof |
TW200834646A (en) * | 2006-12-22 | 2008-08-16 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Mercury high pressure discharge lamp |
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JP3596453B2 (en) * | 2000-09-28 | 2004-12-02 | ウシオ電機株式会社 | Short arc discharge lamp |
JP4167199B2 (en) * | 2003-11-28 | 2008-10-15 | 株式会社アライドマテリアル | Tungsten electrode |
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2011
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5550566A (en) * | 1978-10-06 | 1980-04-12 | Toshiba Corp | Super high voltage discharging lamp |
US4574219A (en) * | 1984-05-25 | 1986-03-04 | General Electric Company | Lighting unit |
CN1210360A (en) * | 1997-09-04 | 1999-03-10 | 电灯专利信托有限公司 | Electrode and method and manufacturing apparatus thereof |
TW200834646A (en) * | 2006-12-22 | 2008-08-16 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Mercury high pressure discharge lamp |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI811707B (en) * | 2021-06-21 | 2023-08-11 | 榮田精機股份有限公司 | Multi-jaw hydraulic automatic chuck |
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WO2013021967A1 (en) | 2013-02-14 |
KR20140078618A (en) | 2014-06-25 |
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CN103733301B (en) | 2016-07-06 |
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CN103733301A (en) | 2014-04-16 |
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