TWI563621B - Semiconductor structure and method for manufacturing the same - Google Patents

Semiconductor structure and method for manufacturing the same

Info

Publication number
TWI563621B
TWI563621B TW103118907A TW103118907A TWI563621B TW I563621 B TWI563621 B TW I563621B TW 103118907 A TW103118907 A TW 103118907A TW 103118907 A TW103118907 A TW 103118907A TW I563621 B TWI563621 B TW I563621B
Authority
TW
Taiwan
Prior art keywords
manufacturing
same
semiconductor structure
semiconductor
Prior art date
Application number
TW103118907A
Other languages
Chinese (zh)
Other versions
TW201545300A (en
Inventor
Bing Lung Yu
Chin Tsan Yeh
Yung Tai Hung
Chin Ta Su
Original Assignee
Macronix Int Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Macronix Int Co Ltd filed Critical Macronix Int Co Ltd
Priority to TW103118907A priority Critical patent/TWI563621B/en
Publication of TW201545300A publication Critical patent/TW201545300A/en
Application granted granted Critical
Publication of TWI563621B publication Critical patent/TWI563621B/en

Links

TW103118907A 2014-05-30 2014-05-30 Semiconductor structure and method for manufacturing the same TWI563621B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103118907A TWI563621B (en) 2014-05-30 2014-05-30 Semiconductor structure and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103118907A TWI563621B (en) 2014-05-30 2014-05-30 Semiconductor structure and method for manufacturing the same

Publications (2)

Publication Number Publication Date
TW201545300A TW201545300A (en) 2015-12-01
TWI563621B true TWI563621B (en) 2016-12-21

Family

ID=55407193

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103118907A TWI563621B (en) 2014-05-30 2014-05-30 Semiconductor structure and method for manufacturing the same

Country Status (1)

Country Link
TW (1) TWI563621B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200511497A (en) * 2003-09-04 2005-03-16 Taiwan Semiconductor Mfg Co Ltd An interconnect structure and method for fabricating the same
TW201415590A (en) * 2012-10-09 2014-04-16 United Microelectronics Corp Semiconductor structure having contact plug and method of making the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200511497A (en) * 2003-09-04 2005-03-16 Taiwan Semiconductor Mfg Co Ltd An interconnect structure and method for fabricating the same
TW201415590A (en) * 2012-10-09 2014-04-16 United Microelectronics Corp Semiconductor structure having contact plug and method of making the same

Also Published As

Publication number Publication date
TW201545300A (en) 2015-12-01

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