TWI563354B - - Google Patents

Info

Publication number
TWI563354B
TWI563354B TW104140695A TW104140695A TWI563354B TW I563354 B TWI563354 B TW I563354B TW 104140695 A TW104140695 A TW 104140695A TW 104140695 A TW104140695 A TW 104140695A TW I563354 B TWI563354 B TW I563354B
Authority
TW
Taiwan
Application number
TW104140695A
Other languages
Chinese (zh)
Other versions
TW201629645A (en
Inventor
Shinichirou Fuchigami
Yasunori Suzuki
Yoshihide Kosano
Akari Kodama
Original Assignee
Panasonic Ip Man Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Ip Man Co Ltd filed Critical Panasonic Ip Man Co Ltd
Publication of TW201629645A publication Critical patent/TW201629645A/en
Application granted granted Critical
Publication of TWI563354B publication Critical patent/TWI563354B/zh

Links

TW104140695A 2014-12-05 2015-12-04 Photoresist stripping solution TW201629645A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014247240A JP5885043B1 (en) 2014-12-05 2014-12-05 Resist stripper and method for producing the same

Publications (2)

Publication Number Publication Date
TW201629645A TW201629645A (en) 2016-08-16
TWI563354B true TWI563354B (en) 2016-12-21

Family

ID=55457029

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104140695A TW201629645A (en) 2014-12-05 2015-12-04 Photoresist stripping solution

Country Status (2)

Country Link
JP (1) JP5885043B1 (en)
TW (1) TW201629645A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020194419A1 (en) * 2019-03-25 2020-10-01 パナソニックIpマネジメント株式会社 Resist stripping solution
CN116179286A (en) * 2022-12-05 2023-05-30 湖北兴福电子材料股份有限公司 Hydroxylamine-free water-based cleaning agent

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000284506A (en) * 1999-03-31 2000-10-13 Sharp Corp Photoresist stripper composition and stripping method
JP2004252369A (en) * 2003-02-21 2004-09-09 Mitsubishi Gas Chem Co Inc Surface treating agent containing starch sirup
KR20080051250A (en) * 2006-12-05 2008-06-11 동우 화인켐 주식회사 Photoresist stripper composition and exfoliation method of a photoresist using it
KR20080054714A (en) * 2006-12-13 2008-06-19 동우 화인켐 주식회사 Alkali compositions for stripping of resist
KR20080076016A (en) * 2007-02-14 2008-08-20 동우 화인켐 주식회사 Photoresist stripper composition and exfoliation method of a photoresist using it
JP2009217267A (en) * 2008-03-07 2009-09-24 Air Products & Chemicals Inc Stripper for dry film removal

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5575318B1 (en) * 2013-09-02 2014-08-20 パナソニック株式会社 Resist stripper

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000284506A (en) * 1999-03-31 2000-10-13 Sharp Corp Photoresist stripper composition and stripping method
JP2004252369A (en) * 2003-02-21 2004-09-09 Mitsubishi Gas Chem Co Inc Surface treating agent containing starch sirup
KR20080051250A (en) * 2006-12-05 2008-06-11 동우 화인켐 주식회사 Photoresist stripper composition and exfoliation method of a photoresist using it
KR20080054714A (en) * 2006-12-13 2008-06-19 동우 화인켐 주식회사 Alkali compositions for stripping of resist
KR20080076016A (en) * 2007-02-14 2008-08-20 동우 화인켐 주식회사 Photoresist stripper composition and exfoliation method of a photoresist using it
JP2009217267A (en) * 2008-03-07 2009-09-24 Air Products & Chemicals Inc Stripper for dry film removal

Also Published As

Publication number Publication date
JP2016109870A (en) 2016-06-20
TW201629645A (en) 2016-08-16
JP5885043B1 (en) 2016-03-15

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