TWI561217B - Flexible strain sensor, and measuring device with said flexible strain sensor - Google Patents

Flexible strain sensor, and measuring device with said flexible strain sensor

Info

Publication number
TWI561217B
TWI561217B TW103116136A TW103116136A TWI561217B TW I561217 B TWI561217 B TW I561217B TW 103116136 A TW103116136 A TW 103116136A TW 103116136 A TW103116136 A TW 103116136A TW I561217 B TWI561217 B TW I561217B
Authority
TW
Taiwan
Prior art keywords
strain sensor
flexible strain
measuring device
flexible
sensor
Prior art date
Application number
TW103116136A
Other languages
English (en)
Other versions
TW201542167A (zh
Inventor
Wan Chun Chuang
wei long Chen
Hwai Ting Lin
Original Assignee
Univ Nat Sun Yat Sen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Sun Yat Sen filed Critical Univ Nat Sun Yat Sen
Priority to TW103116136A priority Critical patent/TWI561217B/zh
Priority to US14/557,542 priority patent/US20150323302A1/en
Publication of TW201542167A publication Critical patent/TW201542167A/zh
Application granted granted Critical
Publication of TWI561217B publication Critical patent/TWI561217B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
TW103116136A 2014-05-06 2014-05-06 Flexible strain sensor, and measuring device with said flexible strain sensor TWI561217B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW103116136A TWI561217B (en) 2014-05-06 2014-05-06 Flexible strain sensor, and measuring device with said flexible strain sensor
US14/557,542 US20150323302A1 (en) 2014-05-06 2014-12-02 Flexible Strain Sensor, Method for Producing Same, and Measuring Device Including Same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103116136A TWI561217B (en) 2014-05-06 2014-05-06 Flexible strain sensor, and measuring device with said flexible strain sensor

Publications (2)

Publication Number Publication Date
TW201542167A TW201542167A (zh) 2015-11-16
TWI561217B true TWI561217B (en) 2016-12-11

Family

ID=54367562

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103116136A TWI561217B (en) 2014-05-06 2014-05-06 Flexible strain sensor, and measuring device with said flexible strain sensor

Country Status (2)

Country Link
US (1) US20150323302A1 (zh)
TW (1) TWI561217B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106408876A (zh) * 2016-09-20 2017-02-15 浙江理工大学 一种基于柔性电子皮肤的疲劳驾驶监测系统及监测方法
CN106525296A (zh) 2016-10-09 2017-03-22 深圳瑞湖科技有限公司 一种用于触摸检测的电子皮肤
TWI604824B (zh) * 2016-10-28 2017-11-11 國立中山大學 肌肉訓練輔助裝置
US10694999B2 (en) * 2017-10-13 2020-06-30 Case Western Reserve University Conductive layer formed strain gauge and method of making same
CN109099832B (zh) * 2018-08-21 2020-07-03 华东理工大学 应变传感器及其制造方法
CN110856656A (zh) * 2018-08-24 2020-03-03 深圳先进技术研究院 肌肉形变的测量系统及柔性传感器的制作方法
CN109163654B (zh) * 2018-09-10 2020-09-08 中国工程物理研究院电子工程研究所 一种超快响应的柔性应变传感器及其制备方法
US10770206B1 (en) 2019-04-08 2020-09-08 Government Of The United States As Represented By The Secretary Of The Air Force System and method for fabricating a strain sensing device directly on a structure
CN112648917A (zh) * 2020-11-19 2021-04-13 南京医科大学 一种基于咖啡环效应的可以探测人体生理信号的新型柔性传感器及其制备方法
CN113418729A (zh) * 2021-06-19 2021-09-21 左点实业（湖北）有限公司 一种拔罐器负压检测的仿真模拟设备及应用方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478095A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Semiconductor displacement converter
US20020017835A1 (en) * 2000-08-10 2002-02-14 Morito Akiyama High-sensitivity flexible ceramic sensor
TWM298980U (en) * 2006-05-03 2006-10-11 Taidoc Technology Corp Portable physiology monitoring device and system
TWM420305U (en) * 2011-08-10 2012-01-11 Mackay Memorial Hospital Physiological sensor
US8250927B2 (en) * 2010-03-17 2012-08-28 Indian Institute Of Science Flexible, stretchable, and distributed strain sensors
WO2013044226A2 (en) * 2011-09-24 2013-03-28 President And Fellows Of Harvard College Artificial skin and elastic strain sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102506693A (zh) * 2011-11-04 2012-06-20 南京航空航天大学 一种石墨烯应变测量和运动传感装置及其制法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478095A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Semiconductor displacement converter
US20020017835A1 (en) * 2000-08-10 2002-02-14 Morito Akiyama High-sensitivity flexible ceramic sensor
TWM298980U (en) * 2006-05-03 2006-10-11 Taidoc Technology Corp Portable physiology monitoring device and system
US8250927B2 (en) * 2010-03-17 2012-08-28 Indian Institute Of Science Flexible, stretchable, and distributed strain sensors
TWM420305U (en) * 2011-08-10 2012-01-11 Mackay Memorial Hospital Physiological sensor
WO2013044226A2 (en) * 2011-09-24 2013-03-28 President And Fellows Of Harvard College Artificial skin and elastic strain sensor

Also Published As

Publication number Publication date
US20150323302A1 (en) 2015-11-12
TW201542167A (zh) 2015-11-16

Similar Documents

Publication Publication Date Title
SG11201704478TA (en) Sensor patch and sensing device having the same
ZA201607537B (en) Device with fingerprint sensor
TWI561217B (en) Flexible strain sensor, and measuring device with said flexible strain sensor
EP3130287A4 (en) Sensor device
PL2899101T3 (pl) Czop główny z urządzeniem czujnikowym
EP3115740A4 (en) Sensor device and elastic structural body
EP3225800A4 (en) Diagnostic device and sensor
GB201411715D0 (en) Sensing device
DK3233227T3 (en) A sensing device and construction elements comprising a sensing device
LT3155364T (lt) Jutiklių blokas, matavimo prietaisas ir matavimo būdas
GB201500472D0 (en) Piezoresistive pressure sensor device
GB201412246D0 (en) Pressure sensor device with high sensitivity and high accuracy
EP3196972A4 (en) Battery sensor device
EP3101400A4 (en) Mechanical quantity measuring device and sensor unit
SG11201913516YA (en) Sensor device
SG11201701909PA (en) Sensor device
EP3163273A4 (en) Strain sensor and load detection device using same
EP3439540C0 (fr) Dispositif médical muni de capteurs
EP3592298C0 (en) SURGICAL SPACING DEVICE WITH SENSOR
GB2527864B (en) Sensing device
SG11201605694RA (en) Sensor fixation device
SI2962915T1 (sl) Nadzorna naprava in tipalna naprava, ki obsega nadzorno napravo
EP3184970A4 (en) Sensor device
PL3681777T3 (pl) Urządzenie czujnikowe
EP3124931A4 (en) Strain sensor, and load detection device using same