TWI555981B - Gas instant detection system - Google Patents

Description

Gas detection system

The present invention relates to a gas detection system, and more particularly to a detection system capable of detecting an abnormal gas immediately and performing gas analysis on the abnormal gas.

In general, in the semiconductor manufacturing process, it is usually necessary to use a chemical vapor deposition process to deposit various semiconductor layers, or to form components such as electrodes through a process such as sputtering, but in these processes, in the working space Gas control is often the key to determining the success of a process.

Please refer to the first figure and the second figure. The first figure shows the system schematic diagram of the prior art gas detection system; the second figure shows the detection timing diagram of the prior art gas detection system. As shown in the first figure, a gas detecting system PA100 includes a line switching device PA1 and a gas analyzer PA2. The pipeline switching device PA1 is connected to the plurality of working spaces PA200 (for example, the working spaces P1, P2, P3, P4, and P5) by a plurality of pipelines PA11, and the pipeline switching device PA1 performs the plurality of the plurality of pipelines along a detection timing. The pipeline PA11 is sequentially connected to the gas analyzer PA2, and the gas analyzer PA2 detects and analyzes the gases in the working spaces P1, P2, P3, P4 and P5 in turn.

As described above, since the gas detecting system PA100 sequentially detects the gases in the working spaces P1, P2, P3, P4, and P5 according to the detection timing, the working spaces P1 and P2 that are required to be detected by the gas detecting system PA100 are described. , P3, When there are too many P4 and P5, one of the working spaces P1, P2, P3, P4 and P5 needs to wait until the next round to be detected again after the detection, but if the working spaces P1, P2, P3, P4 and P5 One of them will have a gas anomaly after being detected, and it will have to wait until the next round of testing to find out. However, when it is found, it often causes irreparable damage to the semiconductor components, which in turn creates defective products and makes production. The cost increases. For example, when the work space P2 performs sampling detection in the work space P3, a gas abnormality occurs. However, according to the order of the detection timing, the work space P4, P5, and P1 are sequentially detected, and the work space P2 is turned, but this time Time may cause serious and irreparable problems in the process performed by workspace P2.

In view of the prior art, the gas detecting system detects the gas in the plurality of working spaces in turn according to the detecting sequence. Therefore, when one of the plurality of working spaces has a problem of gas abnormality, the pipe switching device can only wait for the detecting. When the scheduling of the sequence reaches the working space where the gas is abnormal, the problem of abnormal gas in the working space can be known. Therefore, the main object of the present invention is to provide a gas detection system for utilizing multiple gas detection systems. The device continuously detects a plurality of working spaces, and the control unit further inserts a temporary sampling time period after a current sampling time period when the gas detecting device detects a gas abnormality, so that the current sampling time period ends and then The working space in which the gas is abnormal is detected for analysis.

In view of the above, the present invention provides a gas detection system for solving the problems of the prior art. The gas detection system sequentially performs gas detection on a plurality of working spaces with a detection timing, and detects timing. The sampling system includes a plurality of sampling intervals corresponding to the working spaces, and the gas detecting system comprises a plurality of gas pipelines, a pipeline switching device, a plurality of gas detecting devices and a control unit. A plurality of gas lines are respectively connected to the working spaces. A line switching device is in communication with the gas lines and connects one of the gas lines to a gas analyzer. A plurality of gas detecting devices are used to continuously detect gases in the working spaces. The control unit is electrically connected to the pipeline switching device and the gas detecting devices, and is configured to control the pipeline switching device to sequentially connect the gas pipelines to the gas analyzer according to the detection timing, and when When one of the gas detecting devices detects abnormal gas, the control unit inserts a temporary sampling time period after one of the sampling time periods, so that the pipeline switching device is After the current sampling time period is completed, the abnormal gas is detected to be connected to the gas analyzer according to the temporary sampling time period.

An auxiliary technical means derived from the above-mentioned necessary technical means is that the gas detecting devices continuously detect the gases in the working spaces, and at least one of the gas detecting devices detects the gas. An abnormality determination signal is generated and transmitted during the abnormality, and the control unit inserts the temporary sampling time period after the current sampling time period according to the abnormality determination signal.

An auxiliary technical means derived from the above-mentioned technical means is that the gas detecting devices are respectively connected to the working spaces to continuously detect the gases in the working spaces. Preferably, the gas detecting devices are respectively disposed between the gas lines and the working spaces for detecting gas flowing into the gas lines from the working spaces.

An auxiliary technical means derived from the above-mentioned necessary technical means is that the gas detecting devices are all a photoionization detector.

An auxiliary technical means derived from the above-mentioned necessary technical means is that the gas analyzer is a mass spectrometer.

An auxiliary technical means derived from the above-mentioned necessary technical means is that The pipeline switching device is a selective gas detecting device, and the selective gas detecting device comprises a detecting device body, a cover body and a selective connecting member. Detection System The system has a receiving tank and an exhaust line, and the exhaust line is connected to the receiving groove, so that the gas in the receiving tank is discharged through the exhaust line. The cover system is disposed on the detecting device body and seals the receiving groove, and the cover body defines a central passage and a plurality of peripheral passages disposed around the central passage, the central passage is connected to the detecting pipeline to In the gas analyzer, the peripheral channels are respectively connected to the gas lines. The selective connecting member is rotatably disposed in the receiving groove in a rotating direction and closely fits to the cover body, and the selective connecting member defines a central air outlet and an air inlet, and the center is out The air port is connected to the central passage, and the air inlet is connected to the central air outlet. Preferably, the selective connecting component further defines a venting port, and the venting port is symmetrically disposed on the two sides of the central air outlet.

One of the subsidiary technical means derived from the above-mentioned necessary technical means is The body detecting system further comprises a power output device, the power output device has a transmission component, the detection device is disposed on the power output device, and the selective communication component is fixed to the transmission component to be driven by the transmission component The selective communication element is driven to rotate in the rotational direction. Preferably, the transmission member comprises a connecting disc body and a transmission shaft, and the connecting disc system is fixed to the selective connecting member, and the transmission shaft is coupled to the connecting disc body.

As described above, since the present invention utilizes multiple gas detecting devices to separate The gas in each working space is detected, so that it is possible to immediately know whether the gas in each working space has an abnormal condition, and the control unit can detect the gas emission in the gas detecting device. When an abnormality occurs, the temporary sampling time period is inserted after the current sampling time period, so that the working space where the gas abnormality is detected is preferentially analyzed after the current sampling time period is ended, so as to avoid affecting the working space due to the abnormal gas condition. The process is carried out.

The specific embodiments of the present invention will be further described by the following examples and drawings.

PA100‧‧‧ gas detection system

PA200‧‧‧Workspace

PA1‧‧‧ pipeline switching device

PA11‧‧‧ pipeline

PA2‧‧‧ gas analyzer

P1, P2, P3, P4, P5‧‧‧ work space

100‧‧‧Gas detection system

1a, 1b, 1c, 1d, 1e‧‧‧ gas lines

2‧‧‧Line switching device

21‧‧‧Detection device body

211‧‧‧ accommodating slots

22‧‧‧ Cover

221‧‧‧Central passage

222, 2221, 2222‧‧‧ peripheral channels

23‧‧‧Selective connectivity components

231‧‧‧ center outlet

232‧‧‧air inlet

233‧‧ vents

24‧‧‧Power output device

241‧‧‧ Transmission parts

2411‧‧‧Connected disk

2412‧‧‧ drive shaft

25‧‧‧Support spring

3a, 3b, 3c, 3d, 3e‧‧‧ gas detection devices

4‧‧‧Control unit

10a, 10b, 10c, 10d, 10e‧‧‧ work space

20‧‧‧ gas analyzer

30‧‧‧Test pipeline

40‧‧‧Exhaust line

R‧‧‧direction of rotation

ST‧‧‧ Temporary sampling schedule

PT‧‧‧ current sampling time

OT‧‧‧Preset schedule

The first diagram shows a system schematic diagram of a prior art gas detection system; the second diagram shows a detection timing diagram of a prior art gas detection system; and the third diagram shows the gas instant detection system provided by the preferred embodiment of the present invention. 4 is a schematic circuit diagram showing a gas detection system according to a preferred embodiment of the present invention; and a fifth diagram showing a schematic diagram of a pipeline switching device according to a preferred embodiment of the present invention; A schematic cross-sectional view of a pipe switching device according to a preferred embodiment of the present invention; a seventh top view showing a top view of a pipe switching device according to a preferred embodiment of the present invention; and an eighth embodiment showing the present invention. The top view of the top surface of the selective communication element provided in the preferred embodiment is shown in the top view; and the ninth figure shows the detection timing diagram of the gas instant detection system of the present invention.

Please refer to the third and fourth figures together. The third figure shows that the present invention is preferred. The system schematic diagram of the gas instant detection system provided by the embodiment; the fourth diagram shows the circuit diagram of the gas instant detection system provided by the preferred embodiment of the present invention.

As shown, a gas detection system 100 includes five gas lines 1a, 1b, 1c, 1d and 1e, a line switching device 2, a plurality of gas detecting devices 3a, 3b, 3c, 3d and 3e, and a Control unit 4.

The gas lines 1a, 1b, 1c, 1d, and 1e communicate with the work spaces 10a, 10b, 10c, 10d, and 10e, respectively.

The line switching device 2 is connected to the gas lines 1a, 1b, 1c, 1d and 1e, and the line switching device 2 is used to connect one of the gas lines 1a, 1b, 1c, 1d and 1e to one Gas analyzer 20, gas analyzer 20 is a mass spectrometer in this embodiment.

The gas detecting device 3a is disposed between the gas line 1a and the working space 10a for continuously detecting the gas in the working space 10a, and the other gas detecting devices 3b, 3c, 3d and 3e are arranged and gas-detected. The measuring device 3a is similar and therefore not described otherwise. In practical practice, the gas line 1a is taken as an example, the gas line 1a may be directly communicated with the working space 10a, and the gas detecting device 3a communicates with the gas line 1a and communicates with the working space 10a via the gas line 1a. The gas in the working space 10a is detected; or the gas line 1a may be indirectly connected to the working space 10a via the gas detecting device 3a. In the present embodiment, the gas detecting devices 3a, 3b, 3c, 3d and 3e are all a photoionization detector, but are not limited thereto.

The control unit 4 is electrically connected to the gas detecting devices 3a, 3b, 3c, 3d and 3c for controlling the pipeline switching device 2 to sequentially connect the gas lines 1a, 1b, 1c, 1d and 1e according to the detection timing. The gas analyzer 20 is configured to analyze the gas composition in the working spaces 10a, 10b, 10c, 10d, and 10e in turn through the gas analyzer 20.

Please continue to refer to the fifth to eighth figures, and the fifth figure shows the comparison of the present invention. A schematic plan view of a pipe switching device provided by a preferred embodiment; a sixth schematic view showing a pipe switching device according to a preferred embodiment of the present invention; and a seventh embodiment showing a preferred embodiment of the present invention. A top plan view of the top surface of the pipeline switching device; the eighth drawing shows a top plan view of the selective communication component provided in the preferred embodiment of the present invention. As shown, the pipeline switching device 2 includes a detecting device body 21, a cover 22, a selective communication member 23, a power output device 24, and a support spring 25.

The detecting device body 21 has a receiving slot 211, and the receiving slot 211 is a The exhaust line 40 discharges the gas in the accommodating groove 211.

The cover 22 is disposed on the detecting device body 21 and seals the receiving groove 211. The cover body 22 defines a central passage 221 and eight peripheral passages 222 disposed around the central passage 221 (only two of which are labeled 2221 and 2222). The central passage 221 is connected to the detection pipeline 30, and the peripheral passage 2221 2222 is connected to the gas lines 1a and 1b, respectively.

The selective connecting member 23 is rotatably disposed in a rotational direction R The slot 211 is closely attached to the bottom surface of the cover 22, and the selective communication member 23 defines a central air outlet 231, an air inlet 232, and a vent 233. The central air outlet 231 is connected to the central passage 221, the air inlet 232 is connected to the central air outlet 231, and the air inlet 233 and the air inlet 232 are symmetrically disposed on both sides of the central air outlet 231, and the air outlet 233 is Corresponding to the peripheral channel 222; wherein, since the above eight peripheral channels 222 are uniformly distributed on the periphery of the center channel 221, and the air inlet 232 and the vent 233 are symmetrically disposed, the air inlet 232 will be peripherally When the channel 2221 is in communication with the central channel 221, the vent 233 is used to communicate the peripheral channel 2222 to the accommodating groove 211.

As described above, since the selective communication member 23 is symmetrically opened with an air inlet 232 and vent 233, thereby making the center of gravity of the selective connecting member 23 more balanced and stable The ground body 22 is attached to the cover body.

The power output device 24 has a transmission member 241, and the detecting device body 21 The transmission member 241 is disposed on the power output device 24, and the transmission member 241 includes a coupling disc body 2411 and a transmission shaft 2412. The connecting plate body 2411 is fixed to the selective connecting member 23; the driving shaft 2412 is disposed at the bottom of the detecting device body 21 and coupled to the connecting plate body 2411. In practical use, the power output device 24 is a stepping motor (not shown) as a power source, and the selective communication member 23 is rotated by the transmission shaft 2412 and the connecting disk body 2411 for the user to selectively One of the eight peripheral passages 222 described above is communicated to the central passage 221 via the selective communication element 23.

The support spring 25 is disposed on the transmission shaft 2412 and abuts against the connecting disc body 2411 The bottom surface of the receiving groove 211 is provided to provide the connecting plate body 2411 to press the selective connecting member 23 upward against the cover 22.

In summary, when the user uses the power output device 24 to control selective communication When the element 23 is rotated in the rotational direction R such that the air inlet 232 is correspondingly communicated with the peripheral passage 2221 of the eight peripheral passages 222, the gas disposed in the gas line 1e of the peripheral passage 2221 passes through the selective communication member 23 and The detection line 30 is transmitted to the gas analyzer 20 for the user to analyze the gas in the gas line 1e.

Further, the detecting device body 21, the cover 22, and the selective connecting member 23 All of them are made of polytetrafluoroethene (PTFE), so that the gas in the gas lines 1a, 1e can be effectively prevented from contacting the detecting device body 21, the cover 22 or the selective connecting member 23 A reaction occurs between them, and the friction between the bottom surface of the cover 22 and the selective communication member 23 can be reduced and adhered.

Please refer to the third to ninth figures, and the ninth figure shows the gas of the present invention. Schematic diagram of the detection sequence of the detection system. As shown in the figure, the control unit 4 is the control line switching device 2 to separate the gas lines 1a, 1b, 1c, 1d and 1e according to the detection timing. The gas analyzer 20 is sequentially connected in turn, but when the line switching device 2 is communicating the gas line 1e to the gas analyzer 20, it means that the current sampling time period PT in the detection timing is sampling the working space 10e. At the same time, the gas detecting device 3d generates an abnormality determining signal because it detects an abnormal condition of the gas in the working space 10d, and the control unit 4 inserts a temporary sampling time period ST at the current after receiving the abnormality determining signal. After the sampling time period PT, the preset schedule OT originally arranged after the current sampling time period PT is postponed, thereby enabling the pipeline switching device 2 to follow the temporary sampling time period after the current sampling time period PT is completed. ST connects the gas line 1d to the gas analyzer 20 to flexibly analyze the gas in the working space 10d having the abnormal gas condition until the gas condition in the working space 10d returns to normal, and then continues the original preset schedule. OT.

In summary, the present invention utilizes multiple gas detecting devices to separate The gas in each working space is detected, so that it is possible to immediately know whether the gas in each working space has an abnormal condition, and the control unit can further insert the current sampling time when the gas detecting device detects an abnormality of the gas. The temporary sampling time period is used to analyze the working space where the gas abnormality is detected after the current sampling time interval is ended, so as to avoid the process of the working space in the working space due to the abnormal gas condition.

With the detailed description of the above preferred embodiments, it is hoped that the description will be more clearly described. The scope and spirit of the present invention is not limited by the preferred embodiments disclosed herein. On the contrary, the intention is to cover various modifications and equivalents within the scope of the invention as claimed.

100‧‧‧Gas detection system

1a, 1b, 1c, 1d, 1e‧‧‧ gas lines

2‧‧‧Line switching device

3a, 3b, 3c, 3d, 3e‧‧‧ gas detection devices

4‧‧‧Control unit

10a, 10b, 10c, 10d, 10e‧‧‧ work space

20‧‧‧ gas analyzer

30‧‧‧Test pipeline

Claims (9)

A gas detection system performs gas detection on a plurality of working spaces in sequence with a detection timing, the detection timing includes a plurality of sampling time periods corresponding to the working spaces, and the gas detection system includes: a plurality of gas pipelines, Connected to the working spaces respectively; a pipeline switching device is connected to the gas pipelines and connects one of the gas pipelines to a gas analyzer; a plurality of gas detecting devices For continuously detecting the gas in the working spaces, and at least one of the gas detecting devices generates and transmits an abnormality determining signal when detecting a gas abnormality; and a control unit electrically connecting The pipeline switching device and the gas detecting devices are configured to control the pipeline switching device to sequentially connect the gas pipelines to the gas analyzer according to the detection timing, and when the gas detecting devices are When one of the detected abnormal gases detects and transmits the abnormality determination signal, the control unit inserts a temporary sampling time interval according to the abnormality determination signal. One of the sample time periods is after the current sampling time period, so that the pipeline switching device connects the gas to which the abnormal gas is detected according to the temporary sampling time period after the current sampling time period is completed. Analyzer. The gas detecting system of claim 1, wherein the gas detecting devices are respectively connected to the working spaces to continuously detect the gases in the working spaces. Such as the gas detection system described in claim 2, wherein the gas detection systems The devices are respectively disposed between the gas pipelines and the working spaces for detecting gas flowing into the gas pipelines from the working spaces. The gas detection system of claim 1, wherein the gas detection devices are all photoionization detectors. The gas detection system of claim 1, wherein the gas analyzer is a mass spectrometer. The gas detection system of claim 1, wherein the pipeline switching device is a selective gas detecting device, the selective gas detecting device comprising: a detecting device body having a receiving groove and a a venting line, the venting line is connected to the accommodating groove, so that the gas in the accommodating groove is discharged through the venting line; a cover body is disposed on the detecting device body and sealed The accommodating slot has a central passage and a plurality of outer peripheral passages disposed around the central passage. The central passage is connected to the gas analyzer by a detecting pipeline, and the peripheral passages are respectively connected The gas line; and a selective connecting member are rotatably disposed in the receiving groove in a rotating direction and closely fit to the cover body, and the selective connecting member has a center out a gas outlet and an air inlet, the central air outlet is connected to the central passage, the air inlet is connected to the central air outlet; wherein the selective communication element sequentially pairs the air inlet according to the detection timing The peripheral passages are connected to each other, and the working spaces are respectively sent to the gas analyzer through the gas pipelines and the detection pipelines. The gas detecting system of claim 6, wherein the selective connecting element further defines a venting port, and the venting port is symmetrically disposed on the two sides of the central air outlet. The gas detection system of claim 1, further comprising a power output device having a transmission member, the detection device is disposed on the power output device, and the selective communication component is fixed to the a transmission member for driving the selective communication member to rotate in the rotation direction by the transmission member. The gas detecting system of claim 8, wherein the transmission member comprises a connecting disc body and a transmission shaft, the connecting disc system is fixed to the selective connecting member, and the transmission shaft is coupled to the connecting rod Disk body.