TWI534255B - Heat-conductive silicone grease composition - Google Patents

Heat-conductive silicone grease composition Download PDF

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TWI534255B
TWI534255B TW101117306A TW101117306A TWI534255B TW I534255 B TWI534255 B TW I534255B TW 101117306 A TW101117306 A TW 101117306A TW 101117306 A TW101117306 A TW 101117306A TW I534255 B TWI534255 B TW I534255B
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TW201346020A (en
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Kenichi Tsuji
Kunihiro Yamada
Hiroaki Kizaki
Nobuaki Matsumoto
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Shinetsu Chemical Co
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熱傳導性矽油脂組成物 Thermal conductivity 矽 grease composition

本發明係關於一種熱傳導性矽油脂組成物,其於硬化後以高溫進行加熱熟成之際之硬度上昇少、伸長的降低少。 The present invention relates to a thermally conductive bismuth oil-and-fat composition which has a small increase in hardness and a small decrease in elongation when heated and cooked at a high temperature after curing.

LSI或IC晶片等之電子零件,其使用中之放熱及由於其之性能的降低係廣為所知,作為用以解決其之手段係使用各式之散熱技術。一般之方法,係於散熱部之附近配置冷卻構件,藉由使兩者緊密接合而由冷卻構件有效率地除熱,藉此進行散熱。此時,若於散熱構件與冷卻構件之間有間隙,則由於存在有熱傳導性差之空氣,熱傳導變得沒效率,故散熱構件之溫度無法充分地下降。為了防止如此之現象,於防止空氣存在的目的下,而有使用熱傳導率佳、對構件之表面有追隨性之散熱材料、散熱片或散熱油脂(日本專利第2938428號公報、專利第2938429號公報、專利第3952184號公報:專利文獻1~3)。 Electronic components such as LSIs and IC chips are widely known for their heat release during use and performance degradation. As a means for solving this problem, various types of heat dissipation techniques are used. In a general method, a cooling member is disposed in the vicinity of the heat radiating portion, and the heat is efficiently removed by the cooling member by closely joining the two, thereby dissipating heat. At this time, if there is a gap between the heat radiating member and the cooling member, since there is air having poor thermal conductivity, heat conduction becomes inefficient, and the temperature of the heat radiating member cannot be sufficiently lowered. In order to prevent such a phenomenon, a heat-dissipating material having a good thermal conductivity and having a follow-up property to the surface of the member, a heat sink or a heat-dissipating grease is used for the purpose of preventing the presence of air (Japanese Patent No. 2938428, Patent No. 2938429) Patent No. 3952184: Patent Documents 1 to 3).

於散熱油脂中,為了使半導體晶片與均熱器強固地接著有附與接著性能者。若於半導體晶片與均熱器之間未存在有散熱油脂,則散熱性能會變得不充分,造成顯著地性能降低,故使半導體晶片與均熱器強固地接著係重要。然而,該等材料雖接著力強,但相反的會因使用中以高溫蝕刻使材料之硬度上昇為常見的情形。隨著硬度的上昇,材 料之伸長會減低,故無法追隨因散熱<=>冷卻之熱歷史所致之晶片應變而剝離,最差的情形有導致晶片破損的可能性。 In the heat-dissipating grease, in order to make the semiconductor wafer and the heat spreader firmly adhere to the adhesive performance. If there is no heat-dissipating grease between the semiconductor wafer and the heat spreader, heat dissipation performance is insufficient, resulting in significant performance degradation, so that the semiconductor wafer and the heat spreader are strongly bonded. However, although these materials are strong, the opposite is due to the fact that the hardness of the material is increased by high-temperature etching during use. As the hardness increases, the material The elongation of the material is reduced, so it is impossible to follow the wafer strain due to the heat history of cooling <=> cooling, and the worst case may cause damage to the wafer.

專利文獻1:日本專利第2938428號公報 Patent Document 1: Japanese Patent No. 2938428

專利文獻2:日本專利第2938429號公報 Patent Document 2: Japanese Patent No. 2938429

專利文獻3:日本專利第3952184號公報 Patent Document 3: Japanese Patent No. 3952184

本發明係用以解決上述問題所完成者,其目的在於提供一種熱傳導性矽油脂組成物,其與以往技術相比,於硬化後以高溫進行加熱熟成之際之硬度上昇少、伸長的降低少。 The present invention has been made to solve the above problems, and an object of the invention is to provide a thermally conductive bismuth oil-and-fat composition which has less hardness increase and less elongation reduction when heated and cooked at a high temperature after curing. .

本發明人等,用以達成上述目的而努力探討的結果發現,含有下述(A)~(F)成分之熱傳導性矽油脂組成物,可提供以高溫進行加熱熟成之際之硬度上昇少、伸長的降低少的硬化物,而完成本發明。 As a result of the inventors of the present invention, in order to achieve the above object, it has been found that a thermally conductive bismuth-and-oil composition containing the following components (A) to (F) can provide a low increase in hardness when heated and cooked at a high temperature. The invention is completed by reducing the hardened material with less elongation.

因此,本發明係提供一種熱傳導性矽油脂組成物,其係含有下述而成:(A)於1分子中至少具有2個烯基之25℃之動態黏度為5000~100000mm2/s之有機聚矽氧烷:100質量份;(B)下述通式(2) Accordingly, the present invention provides a thermally conductive bismuth oil composition comprising (A) an organic viscosity of at least 2 alkenyl groups having a dynamic viscosity of from 5,000 to 100,000 mm 2 /s in one molecule. Polysiloxane: 100 parts by mass; (B) the following formula (2)

(R2為碳數1~6之烷基,b為5~100之整數) (R 2 is an alkyl group having 1 to 6 carbon atoms, and b is an integer of 5 to 100)

所表示之單末端3官能之水解性甲基聚矽氧烷:10~90質量份;(C)具有10W/m.℃以上之熱傳導率之熱傳導性填充材:500~1,500質量份;(D)於1分子中含有2個以上5個以下之直接鍵結於矽原子之氫原子(Si-H基)之有機氫聚矽氧烷:{Si-H基之個數}/{(A)成分之烯基之個數}成為1.7~2.8之配合量;(E)於1分子中具有三嗪環及至少1個烯基之接著助劑:0.05~0.5質量份;(F)選自鉑及鉑化合物所構成群中之觸媒:使作為鉑原子之(A)成分為0.1~500ppm之配合量。 The single-end trifunctional hydrolyzable methyl polyoxane represented by the catalyst: 10 to 90 parts by mass; (C) has 10 W/m. Thermal conductivity filler of thermal conductivity above °C: 500 to 1,500 parts by mass; (D) organic hydrogen having two or more and five or less hydrogen atoms (Si-H group) directly bonded to a halogen atom in one molecule Polyoxane: {the number of Si-H groups} / {the number of alkenyl groups of the (A) component} becomes a compounding amount of 1.7 to 2.8; (E) has a triazine ring in one molecule and at least one The auxiliary agent for the alkenyl group is 0.05 to 0.5 part by mass; (F) the catalyst selected from the group consisting of platinum and a platinum compound: the component (A) which is a platinum atom is used in an amount of 0.1 to 500 ppm.

於該場合,相對於(A)成分100質量份,可含有0.05~0.5質量份之(G)選自乙炔化合物、氮化合物、有機磷化合物、肟化合物及有機氯化合物之控制劑。 In this case, 0.05 to 0.5 parts by mass of (G) a controlling agent selected from the group consisting of an acetylene compound, a nitrogen compound, an organophosphorus compound, an anthraquinone compound, and an organochlorine compound may be contained in an amount of 0.05 to 0.5 parts by mass based on 100 parts by mass of the component (A).

又,熱傳導性矽油脂組成物,較佳為,對將以150℃硬化90分鐘所得之薄片,以JIS K6251所記載之方法測定時之切斷時伸長為100%以上,成形為2mm厚度之薄片,於150℃下進行熟成1000小時後之切斷時伸長為80%以上。 In addition, the heat-conductive bismuth oil-and-fat composition is preferably formed into a sheet having a thickness of 2 mm when the sheet obtained by curing at 150 ° C for 90 minutes has a length of 100% or more at the time of cutting as measured by the method described in JIS K6251. The elongation at the time of aging at 150 ° C for 1000 hours was 80% or more.

本發明之熱傳導性矽油脂組成物,其於高溫加熱時之硬度上昇少、可抑制伸長的減少。 The thermally conductive bismuth oil composition of the present invention has a small increase in hardness when heated at a high temperature and can suppress a decrease in elongation.

本發明之熱傳導性矽油脂組成物,含有:(A)含有烯基之有機聚矽氧烷、(B)水解性甲基聚矽氧烷、(C)熱傳導性填充材、(D)有機氫聚矽氧烷、(E)含有三嗪環及烯基之接著助劑、(F)鉑系觸媒,作為必須成分,並視需要含有(G)加成反應控制劑。 The thermally conductive bismuth oil composition of the present invention comprises: (A) an alkenyl group-containing organopolyoxane, (B) a hydrolyzable methyl polyoxyalkylene, (C) a thermally conductive filler, and (D) an organic hydrogen. The polyoxyalkylene oxide, (E) a triazine ring and an alkenyl group-containing auxiliary agent, and (F) a platinum-based catalyst are contained as an essential component, and if necessary, a (G) addition reaction controlling agent is contained.

(A)成分 (A) component

構成本發明之(A)成分之有機聚矽氧烷,係於1分子中至少具有2個直接鍵結於矽原子之烯基者,可使用下述式(1)R1 aSiO(4-a)/2 (1) The organopolyoxane constituting the component (A) of the present invention is one having at least two alkenyl groups directly bonded to a ruthenium atom in one molecule, and the following formula (1) R 1 a SiO (4- ) can be used. a)/2 (1)

(式中,R1為互相相同或不同之碳數1~10、較佳為1~8之非取代或取代之1價烴基,a為15~2.8、較佳為 1.8~2.5、更佳為1.95~2.05之正數。) (wherein R 1 is an unsubstituted or substituted monovalent hydrocarbon group having 1 to 10 carbon atoms, preferably 1 to 8 carbon atoms which are the same or different from each other, and a is 15 to 2.8, preferably 1.8 to 2.5, more preferably A positive number from 1.95 to 2.05.)

所示者。 Shown.

此處,上述R1所示之直接鍵結於矽原子之非取代或取代之1價烴基,可舉例如甲基、乙基、丙基、異丙基、丁基、異丁基、三級丁基、戊基、新戊基、己基、環己基、辛基、壬基、癸基等烷基;苯基、甲苯基、二甲苯基、萘基等芳基;苄基、苯基乙基、苯基丙基等之芳烷基;乙烯基、烯丙基、丙烯基、異丙烯基、丁烯基、己烯基、環己烯基、辛烯基等烯基、或該等之氫原子之一部分或全部以氟、溴、氯等鹵素原子、以氰基等取代者(例如,氯甲基、氯丙基、溴乙基、三氟丙基、氰基乙基)等,較佳為,總R1之90莫耳%以上為甲基。 Here, the above-mentioned monovalent hydrocarbon group represented by R 1 which is directly bonded to an unsubstituted or substituted fluorene atom may, for example, be a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group or a tertiary group. An alkyl group such as butyl group, pentyl group, neopentyl group, hexyl group, cyclohexyl group, octyl group, decyl group or fluorenyl group; aryl group such as phenyl group, tolyl group, xylyl group or naphthyl group; benzyl group and phenylethyl group; An aralkyl group such as a phenylpropyl group; an alkenyl group such as a vinyl group, an allyl group, a propenyl group, an isopropenyl group, a butenyl group, a hexenyl group, a cyclohexenyl group or an octenyl group; or the like Part or all of the atom is preferably a halogen atom such as fluorine, bromine or chlorine, or a cyano group or the like (for example, chloromethyl, chloropropyl, bromoethyl, trifluoropropyl or cyanoethyl). For example, 90 mol% or more of the total R 1 is a methyl group.

又,總R1之中必須至少2個為烯基(以碳數2~8者為佳、更佳為2~6、特佳為乙烯者)。又,烯基之含量,較佳為有機聚矽氧烷中之2.0×10-5~1.0×10-4mol/g、特佳為2.0×10-5~6.0×10-5mol/g。若烯基之量少於2.0×10-5mol/g則組成物之進展性會變差,又,若多於1.0×10-4mol/g則組成物之硬化後之加工熟成中之硬度上昇會變大、使伸長減少。該烯基,可鍵結於分子鏈末端之矽原子、可鍵結於分子鏈中之矽原子、亦可鍵結於兩者。 Further, at least two of the total R 1 must be an alkenyl group (preferably having 2 to 8 carbon atoms, more preferably 2 to 6 carbon atoms, and particularly preferably ethylene). Further, the content of the alkenyl group is preferably 2.0 × 10 -5 to 1.0 × 10 -4 mol / g, particularly preferably 2.0 × 10 -5 to 6.0 × 10 -5 mol / g in the organopolysiloxane. If the amount of the alkenyl group is less than 2.0 × 10 -5 mol/g, the progress of the composition may be deteriorated, and if it is more than 1.0 × 10 -4 mol/g, the hardness of the composition after hardening is ripened. The rise will increase and the elongation will decrease. The alkenyl group may be bonded to a ruthenium atom at the end of the molecular chain, a ruthenium atom which may be bonded to the molecular chain, or may be bonded to both.

該有機聚矽氧烷之構造,通常主鏈基本上係以二有機矽氧烷單位之重複所構成,分子鏈兩端具有以三有機矽氧烷基所封鎖之直鏈狀構造,而亦可局部為分支狀之構造、環狀構造等。 The structure of the organic polyoxane, usually the main chain is basically composed of repeating units of diorganooxane, and the two ends of the molecular chain have a linear structure blocked by a triorganophosphonyl group, and The structure is a branch, a ring structure, or the like.

(A)成分之25℃下之動態黏度若較5000mm2/s低,則組成物之硬化後之加熱熟成中之硬度上昇變大而伸長減少,若大於100000mm2/s則所得組成物之進展性變差,故為5000~100000mm2/s之範圍、較佳為10000~100000mm2/s。又,該動態黏度,係以尤伯洛德(Ubbelohde)型歐斯特瓦爾德(Ostwald)黏度計所得之測定值。 When the dynamic viscosity at 25 ° C of the component (A) is lower than 5000 mm 2 /s, the hardness rise in the heating and ripening of the composition is increased and the elongation is decreased, and if it is more than 100,000 mm 2 /s, the progress of the obtained composition is improved. The property is deteriorated, so it is in the range of 5,000 to 100,000 mm 2 /s, preferably 10,000 to 100,000 mm 2 /s. Further, the dynamic viscosity is a value obtained by an Ubbelohde type Ostwald viscometer.

(A)成分之例,可舉例如兩末端二甲基乙烯基矽烷基封鎖二甲基聚矽氧烷等,可單獨使用該等中之1種或組合2種以上使用。 In the case of the component (A), for example, a dimethylvinyl fluorenyl group may be used to block the dimethyl polyoxyalkylene, and the like may be used alone or in combination of two or more.

(B)成分 (B) component

本發明所使用之(B)成分,係以下述通式(2) The component (B) used in the present invention is represented by the following formula (2)

(R2為碳數1~6之烷基,b為5~100之整數。) (R 2 is an alkyl group having 1 to 6 carbon atoms, and b is an integer of 5 to 100.)

所表示之單末端3官能之水解性甲基聚矽氧烷。 A single-end, trifunctional hydrolyzable methyl polyoxane, as indicated.

R2為碳數1~6之烷基,可舉例如甲基、乙基、丙基、異丙基、丁基、二級丁基、三級丁基、戊基、己基等。又,(B)成分之上述通式(2)所表示之單末端3官能之水解性甲基聚矽氧烷之b,若小於5則矽油脂組成物所致之漏油變得嚴重,而無法發揮接著性能,若大於100則與填充材之濕潤性變得不足,故b為5~100的整數、較佳為10~60之整數。 R 2 is an alkyl group having 1 to 6 carbon atoms, and examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a secondary butyl group, a tertiary butyl group, a pentyl group, and a hexyl group. Further, if b of the single-terminal trifunctional hydrolyzable methyl polyoxyalkylene represented by the above formula (2) represented by the above formula (2) is less than 5, the oil leakage due to the bismuth oil composition becomes severe, and The adhesion performance cannot be exhibited. If it is more than 100, the wettability with the filler is insufficient. Therefore, b is an integer of 5 to 100, preferably an integer of 10 to 60.

該單末端3官能之水解性甲基聚矽氧烷之配合量,相對於(A)成分100質量份,若少於10質量份則無法發揮充分的濕潤性,若較90質量份多則由組成物之滲漏變得劇烈,故以10~90質量份之範圍為宜,較佳為10~80質量份、更佳為超過50質量份80質量份以下、再更佳為51~80質量份之範圍。 When the amount of the one-terminal trifunctional hydrolyzable methyl polyoxyalkylene is less than 10 parts by mass based on 100 parts by mass of the component (A), sufficient wettability cannot be exhibited, and if it is more than 90 parts by mass, The leakage of the composition becomes severe, so it is preferably in the range of 10 to 90 parts by mass, preferably 10 to 80 parts by mass, more preferably 50 parts by mass or less and 80 parts by mass or more, more preferably 51 to 80 parts by mass. The scope of the share.

(C)成分 (C) component

(C)成分之具有熱傳導率之熱傳導性填充材,該填充材所具之熱傳導率若小於10W/m.℃,則矽油脂組成物之熱傳導率本身變小,故填充材之熱傳導率為10W/m.℃以上、較佳為10~5000 W/m.℃。如此之熱傳導性填充材,可使用無機化合物粉末。(C)成分所使用之無機化合物粉末,可使用例如選自鋁粉末、氧化鋅粉末、氧化鈦粉末、氧化鎂粉末、氧化鋁粉末、氫氧化鋁粉末、氮化硼粉末、氮化鋁粉末、鑽石粉末、金粉末、銀粉末、銅粉末、碳粉末、鎳粉末、銦粉末、鉀粉末、金屬矽粉末、二氧化矽粉末等中之1種或2種以上。又,本發明中之熱傳導率,係以京都電子工業(股)製QTM-500所測定之值。 (C) component of the thermal conductivity of the thermal conductivity of the filler, the filler has a thermal conductivity of less than 10W / m. °C, the thermal conductivity of the bismuth oil composition itself becomes smaller, so the thermal conductivity of the filler is 10W/m. Above °C, preferably from 10 to 5000 W/m. °C. As such a thermally conductive filler, an inorganic compound powder can be used. The inorganic compound powder used in the component (C) may be, for example, selected from the group consisting of aluminum powder, zinc oxide powder, titanium oxide powder, magnesium oxide powder, alumina powder, aluminum hydroxide powder, boron nitride powder, aluminum nitride powder, One or more of diamond powder, gold powder, silver powder, copper powder, carbon powder, nickel powder, indium powder, potassium powder, metal cerium powder, cerium oxide powder, and the like. Further, the thermal conductivity in the present invention is a value measured by QTM-500 manufactured by Kyoto Electronics Industry Co., Ltd.

(C)成分所使用之無機化合物粉末之平均粒徑,即使小於0.5μm、或大於100μm,對所得之矽油脂組成物之填充率亦不會上昇,故為0.5~100μm、較佳為1~50μm之範圍。又,本發明中,平均粒徑係以日機裝(股)製Microtrack MT330OEX可測定之體積基準之體積平均徑 [MV]。又,本發明所使用之無機化合物粉末,若需要亦可以有機矽烷、有機矽氮烷、有機聚矽氧烷、有機氟化合物等施以疏水化處理,疏水化處理法,一般周知之方法即可,可舉例如,將無機化合物粉末與有機矽烷或其之部分水解物以TRI MIX、TWIN MIX、行星式混合機(皆為井上製作所(股)製混合機之註冊商標)、ULTRAMIX(瑞穂工業(股)製混合機之註冊商標)、HIVIS DISPER-MIX(特殊機化工業(股)製混合機之註冊商標)等之混合機進行混合之方法。若需要亦可加熱至50~100℃。又,於混合亦可使用甲苯、二甲苯、石油醚、礦油精、異烷烴、異丙醇、乙醇等溶劑,於該場合,以使用真空裝置等除去混合後溶劑為佳。又,稀釋溶劑,亦可使用本發明之液體成分之(A)成分之有機聚矽氧烷。該方法所製造之組成物亦為本發明之範圍內。 When the average particle diameter of the inorganic compound powder used in the component (C) is less than 0.5 μm or more than 100 μm, the filling ratio of the obtained bismuth oil composition does not increase, so it is 0.5 to 100 μm, preferably 1 to 1. A range of 50 μm. Further, in the present invention, the average particle diameter is a volume average diameter of a volume basis measurable by Microtrack MT330OEX manufactured by Nikkiso Co., Ltd. [MV]. Further, the inorganic compound powder used in the present invention may be subjected to hydrophobization treatment, hydrophobization treatment, or the like, or a known method, if necessary, an organic decane, an organic decane, an organopolyoxane or an organic fluorine compound. For example, the inorganic compound powder and the organic decane or a partial hydrolyzate thereof are TRI MIX, TWIN MIX, and a planetary mixer (all registered trademarks of a mixer manufactured by Inoue Co., Ltd.), ULTRAMIX (Ruisheng Industry ( A method in which a mixer such as a registered trademark of a mixer) and a HIVIS DISPER-MIX (registered trademark of a special machine-made mixer) is mixed. Heat to 50~100 °C if necessary. Further, a solvent such as toluene, xylene, petroleum ether, mineral spirits, isoparaffin, isopropanol or ethanol may be used for mixing. In this case, it is preferred to remove the solvent after mixing by using a vacuum apparatus or the like. Further, as the diluent solvent, an organopolyoxane of the component (A) of the liquid component of the present invention can also be used. The compositions made by this method are also within the scope of the invention.

該熱傳導性填充材(無機化合物粉末)之配合量,相對於(A)成分100質量份,若少於500質量份則組成物之熱傳導率降低,若多於1500質量份則組成物之黏度上昇而使作業性惡化,故為500~1500質量份、較佳為600~1300質量份之範圍。 When the amount of the thermally conductive filler (inorganic compound powder) is less than 500 parts by mass based on 100 parts by mass of the component (A), the thermal conductivity of the composition is lowered, and if it is more than 1,500 parts by mass, the viscosity of the composition is increased. On the other hand, the workability is deteriorated, so it is in the range of 500 to 1,500 parts by mass, preferably 600 to 1300 parts by mass.

(D)成分 (D) component

該(D)成分之有機氫聚矽氧烷,例如,可使用下述平均組成式(3) R3 cHdSiO(4-c-d)/2 (3) As the organic hydrogen polyoxyalkylene of the component (D), for example, the following average composition formula (3) R 3 c H d SiO (4-cd)/2 (3) can be used.

(式中,R3為碳數1~12、較佳為1~10之非取代或取代之1價烴基。又,c為0.7~2.1、較佳為0.8~2.05,d為0.001~1.0、較佳為0.005~1.0,且c+d滿足0.8~3.0、較佳為1.0~2.5之正數。) (wherein R 3 is an unsubstituted or substituted monovalent hydrocarbon group having 1 to 12 carbon atoms, preferably 1 to 10 carbon atoms. Further, c is 0.7 to 2.1, preferably 0.8 to 2.05, and d is 0.001 to 1.0. Preferably, it is 0.005 to 1.0, and c+d satisfies a positive number of 0.8 to 3.0, preferably 1.0 to 2.5.

所表示者。 Represented.

(D)成分之具有直接鍵結於矽原子之氫原子(Si-H基)之有機氫聚矽氧烷,為了藉交聯使組成物網狀化必須於1分子中至少具有2個以上Si-H基。又,若具有超過5個Si-H基,則加熱熟成中之硬度上昇增大、伸長減少,故Si-H基為2個以上5個以下之範圍。 The organic hydrogen polyoxyalkylene having a hydrogen atom (Si-H group) directly bonded to a halogen atom of the component (D) must have at least two Si in one molecule in order to reticulate the composition by crosslinking. -H base. In addition, when the amount of the Si-H group is increased, the increase in hardness during heating and aging is increased, and the elongation is decreased. Therefore, the Si-H group is in the range of 2 or more and 5 or less.

鍵結於矽原子之殘餘之有機基R3,可舉例如甲基、乙基、丙基、丁基、己基、十二基等烷基、苯基等之芳基、2-苯基乙基、2-苯基丙基等之芳烷基、氯甲基、3,3,3-三氟丙基等之鹵素取代等之取代烴基、或2-環氧丙氧基乙基、3-環氧丙氧基丙基、4-環氧丙氧基丁基等含有環氧基之有機基(環氧丙基或環氧丙氧基取代烷基)之例。該具有Si-H基之有機氫聚矽氧烷,可為直鏈狀、分支狀及環狀之任一者、或該等之混合物。 The organic group R 3 bonded to the remaining atom of the ruthenium atom may, for example, be an alkyl group such as a methyl group, an ethyl group, a propyl group, a butyl group, a hexyl group or a dodecyl group, an aryl group such as a phenyl group or the like, or a 2-phenylethyl group. a substituted alkyl group such as a 2-phenylpropyl group such as an aralkyl group, a chloromethyl group, a 3,3,3-trifluoropropyl group or the like, or a 2-glycidoxyethyl group or a 3-ring group An example of an epoxy group-containing organic group (epoxypropyl group or glycidoxy group-substituted alkyl group) such as oxypropoxypropyl group or 4-glycidoxybutyl group. The Si-H group-containing organic hydrogen polyoxyalkylene may be any of a linear chain, a branched chain, and a cyclic ring, or a mixture thereof.

(D)成分之配合量,相對於(A)成分中之烯基之數,(D)成分之Si-H基之數,亦即{Si-H基之個數}/{(A)成分之烯基之個數},若小於1.7則無法發揮充分之接著性能,與基材之密合性變差,若大於2.8則加熱熟成中之硬 度上昇增大、伸長降低,故為1.7~2.8之範圍、較佳為2.0~2.5。 The amount of the component (D), the number of Si-H groups of the component (D), that is, the number of {Si-H groups}/{(A) component, relative to the number of alkenyl groups in the component (A). If the number of alkenyl groups is less than 1.7, sufficient adhesion performance cannot be exhibited, and the adhesion to the substrate is deteriorated. The degree of increase increases and the elongation decreases, so it is in the range of 1.7 to 2.8, preferably 2.0 to 2.5.

(E)成分 (E) component

(E)成分之接著助劑,係於1分子中具有三嗪環、並且至少具有1個烯基者,可對組成物附與接著性能。(E)成分所含之烯基,可為直鏈狀或分支狀,可例示如乙烯基、烯丙基、1-丁烯基、1-己烯基、2-甲基丙烯基、(甲基)丙烯酸基等,由成本的觀點考量以烯丙基為佳。(E)成分之具體例,可舉例如三烯丙基三聚異氰酸酯、三甲基丙烯基三聚異氰酸酯、於三烯丙基三聚異氰酸酯之1~2個烯丙基加成有1~2個三甲氧基矽烷基等烷氧基矽烷基之烷氧基矽烷基取代.三烯丙基三聚異氰酸酯及其之水解縮合物之矽氧烷變性物(衍生物)等。 The adhesion aid of the component (E) is a compound having a triazine ring in one molecule and having at least one alkenyl group, and the composition can be attached to the subsequent property. The alkenyl group contained in the component (E) may be linear or branched, and examples thereof include a vinyl group, an allyl group, a 1-butenyl group, a 1-hexenyl group, and a 2-methylpropenyl group. The acryl group or the like is preferably an allyl group from the viewpoint of cost. Specific examples of the component (E) include, for example, triallyl isocyanurate and trimethylallyl isocyanurate, and 1 to 2 allyl addition to triallyl isocyanurate has 1 to 2 An alkoxy fluorenyl group substituted with an alkoxy fluorenyl group such as a trimethoxy fluorenyl group. Triallyl isocyanurate and a hydroxyl condensate (derivative) thereof, and the like.

(E)成分之配合量,相對於(A)成分100質量份,若少於0.05質量份則組成物無法顯示充分的接著性能,若多於0.5質量份則氫矽化反應無法充分進行、而無法展現接著性能,故為0.05~0.5質量份之範圍、較佳為0.05~0.3質量份之範圍。 When the amount of the component (E) is less than 0.05 parts by mass based on 100 parts by mass of the component (A), the composition cannot exhibit sufficient adhesion performance, and if it is more than 0.5 part by mass, the hydroquinone reaction cannot be sufficiently performed, and the composition cannot be sufficiently performed. Since the next performance is exhibited, it is in the range of 0.05 to 0.5 part by mass, preferably 0.05 to 0.3 part by mass.

(F)成分 (F) component

(F)成分之選自鉑及鉑化合物之觸媒,係(A)成分之烯基與(D)成分之Si-H基之間之加成反應的促進成分。該(F)成分,可舉例如鉑之單體、氯化鉑酸、鉑-烯烴錯合物 、鉑-醇錯合物、鉑配位化合物等。(F)成分之配合量,相對於(A)成分100質量份,作為鉑原子若小於0.1ppm則不具作為觸媒的效果,而即使超過500ppm效果亦不會增大、不經濟,故為0.1~500ppm的範圍。 The catalyst of the component (F) selected from the group consisting of platinum and a platinum compound is a promoting component of an addition reaction between an alkenyl group of the component (A) and a Si-H group of the component (D). The component (F) may, for example, be a platinum monomer, a chloroplatinic acid or a platinum-olefin complex. , a platinum-alcohol complex, a platinum coordination compound, and the like. When the amount of the component (F) is less than 0.1 ppm, the amount of the component (F) is not as a catalyst, and the effect is not increased or uneconomical even if it exceeds 500 ppm. Range of ~500ppm.

(G)成分 (G) component

(G)成分之控制劑,係抑制室溫下之氫矽化反應的進行,以延長貯存壽命、適用期者。反應抑制劑可使用周知者,可利用乙炔化合物、各種氮化合物、有機磷化合物、肟化合物、有機氯化合物等。(G)成分之配合量,若小於0.05質量份則無法得到充分之貯存壽命、適用期,若大於0.5質量份則硬化性降低故以0.05~0.5質量份的範圍為佳。為了使該等於矽油脂組成物的分散性良好亦可以甲苯等稀釋使用。 The control agent for the component (G) is a method for suppressing the progress of the hydroquinone reaction at room temperature to prolong the storage life and the pot life. As the reaction inhibitor, a known one can be used, and an acetylene compound, various nitrogen compounds, an organic phosphorus compound, a ruthenium compound, an organic chlorine compound or the like can be used. When the amount of the component (G) is less than 0.05 parts by mass, a sufficient storage life and a pot life cannot be obtained. When the amount is more than 0.5 part by mass, the curing property is lowered, so that it is preferably in the range of 0.05 to 0.5 part by mass. In order to make the dispersibility equal to the bismuth oil composition, it may be diluted with toluene or the like.

其他成分 Other ingredients

又,本發明除上述(A)~(G)成分以外,亦可視需要加入用以防止劣化之抗氧化劑等。 Further, in addition to the above components (A) to (G), an antioxidant or the like for preventing deterioration may be added as needed.

製造方法 Production method

於製造本發明之熱傳導性矽油脂組成物時,可採用將(A)~(F)成分、及視需要之其他成分以TRI MIX、TWIN MIX、行星式混合機(皆為井上製作所(股)製混合機之註冊商標)、ULTRAMIX(瑞穂工業(股)製混合機之註冊商 標)、HIVIS DISPER-MIX(特殊機化工業(股)製混合機之註冊商標)等之混合機進行混合之方法。 When manufacturing the thermally conductive bismuth oil composition of the present invention, the components (A) to (F) and, if necessary, other components may be used as TRI MIX, TWIN MIX, and planetary mixers (all are Inoue Manufacturing Co., Ltd.). Registered trademark of the mixer, ULTRAMIX (Registrar of the Swiss-made mixer) A method in which a mixer such as HIVIS DISPER-MIX (registered trademark of a special machine-made mixer) is mixed.

本發明之熱傳導性矽油脂組成物,若黏度高則作業性變差,故其之黏度以10~1000Pa.s為佳、更佳為50~1000Pa.s。又,如此之黏度可藉由將矽油脂組成物之成分如上述控制來達成。又,本發明中,黏度係以Malcom黏度計所測定之25℃之值(滾輪A為10rpm、剪切速度6[1/s])。 The thermally conductive bismuth oil composition of the present invention has a high viscosity and a workability is deteriorated, so the viscosity thereof is 10 to 1000 Pa. s is better, more preferably 50~1000Pa. s. Moreover, such a viscosity can be achieved by controlling the components of the mash composition as described above. Further, in the present invention, the viscosity is a value of 25 ° C measured by a Malcom viscometer (roller A is 10 rpm, shear rate is 6 [1/s]).

本發明之熱傳導性矽油脂組成物,較佳為使用於存在於LSI等電子零件之外的放熱構件與冷卻構件之間以將由放熱構件之熱傳導至冷卻構件以散熱,可與以往之熱傳導性矽油脂組成物以同樣的方法使用。 The thermally conductive bismuth-and-oil composition of the present invention is preferably used between a heat-releasing member other than an electronic component such as an LSI and a cooling member to conduct heat from the heat-releasing member to the cooling member to dissipate heat, and is compatible with conventional heat conductivity. The oil and fat composition was used in the same manner.

本發明之熱傳導性矽油脂組成物,關於以150℃硬化90分鐘後之薄片,以JIS K6251所記載之方法測定時之斷裂時伸長為100%以上,而由對晶片之應變之追隨性的觀點考量以120%以上為佳。上限並無特別限制,但通常為400%以下、特別是300%以下。又,如此之斷裂時伸長,可藉由於組成物之製作時使用分子量大之成分((A)成分)來達成。 In the heat-conductive bismuth oil-and-fat composition of the present invention, when the sheet is cured at 150 ° C for 90 minutes, the elongation at break when measured by the method described in JIS K6251 is 100% or more, and the followability to the strain of the wafer is considered. The consideration is more than 120%. The upper limit is not particularly limited, but is usually 400% or less, particularly 300% or less. Further, elongation at the time of such breakage can be achieved by using a component having a large molecular weight (component (A)) in the production of the composition.

又,本發明之熱傳導性矽油脂組成物,由封裝中之可靠性試驗後之晶片之應變之追隨性的觀點,成形為2mm厚之薄片,於150℃下進行熟成1000小時後之以JIS K6251所記載之方法所得之斷裂時伸長為80%以上。上限並無特別限制,但通常為300%以下、特別是200%以下。 又,如此熟成後之斷裂時伸長,可藉由於組成物之製作時使用具有2個以上5個以下之交聯點之(D)成分來達成。 Further, the thermally conductive bismuth-and-oil composition of the present invention is formed into a sheet having a thickness of 2 mm from the viewpoint of the strain followability of the wafer after the reliability test in the package, and is aged at 150 ° C for 1,000 hours to JIS K6251. The elongation at break obtained by the method described is 80% or more. The upper limit is not particularly limited, but is usually 300% or less, particularly 200% or less. Moreover, the elongation at the time of the fracture after the aging is achieved by using the component (D) having two or more cross-linking points of five or less at the time of preparation of the composition.

[實施例] [Examples]

以下,顯示實施例及比較例,以具體地說明本發明,但本發明並不限於下述之實施例。又,關於本發明效果之試驗係以如下方式進行。 Hereinafter, the present invention will be specifically described by showing examples and comparative examples, but the present invention is not limited to the examples described below. Further, the test regarding the effects of the present invention was carried out as follows.

[黏度] [viscosity]

矽油脂組成物之絕對黏度,係使用Malcom(型式PC-1T)黏度計以25℃測定。 The absolute viscosity of the bismuth oil composition was measured at 25 ° C using a Malcom (type PC-1T) viscometer.

[熱傳導率] [Thermal conductivity]

將各組成物流入3cm厚之模具,蓋上廚房用燈以京都電子工業(股)製之Model QTM-500測定。 The compositions were transferred to a 3 cm thick mold and covered with a kitchen lamp measured by Model QTM-500 manufactured by Kyoto Electronics Industry Co., Ltd.

[斷裂時伸長] [Elongation at break]

將各組成物以150℃加熱90分鐘加硫以製作成2mm厚之薄片後,製作成JIS K6251所記載之2號啞鈴形狀以進行測定。又,對硬化成2mm厚之薄片狀之試樣,進行150℃.1000小時熟成,以同樣之方法測定熟成後之伸長。 Each of the compositions was heated at 150 ° C for 90 minutes to form a 2 mm thick sheet, and then a No. 2 dumbbell shape described in JIS K6251 was prepared for measurement. Further, the sample which was hardened into a sheet having a thickness of 2 mm was subjected to 150 ° C. After 1000 hours of ripening, the elongation after ripening was measured in the same manner.

[接著強度] [Continue strength]

將各組成物夾入1mm×1mm矽晶圓與2.5mm×2.5mm之矽晶圓,於以1.8kgf之夾具之加壓之下以150℃加熱90分鐘後,使用Dage Deutchland GmbH製Dage series-4000PXY測定接著強度。 Each composition was sandwiched between a 1 mm × 1 mm tantalum wafer and a 2.5 mm × 2.5 mm tantalum wafer, and heated at 150 ° C for 90 minutes under a pressure of a 1.8 kgf jig, and then Dage series manufactured by Dage Deutchland GmbH. 4000PXY was measured for strength.

準備形成本發明組成物之以下之各成分。 The following components of the composition of the present invention are prepared.

(A)成分 (A) component

A-1:兩末端以二甲基乙烯基矽烷基封鎖之25℃之動態黏度為30000mm2/s之二甲基聚矽氧烷 A-1: dimethylpolyoxane having a dynamic viscosity of 30,000 mm 2 /s at 25 ° C blocked with dimethylvinyl fluorenyl at both ends

A-2:兩末端以二甲基乙烯基矽烷基封鎖之25℃之動態黏度為100000mm2/s之二甲基聚矽氧烷 A-2: dimethylpolyoxane having a dynamic viscosity of 100000 mm 2 /s at 25 ° C blocked with dimethylvinyl fluorenyl at both ends

A-3:兩末端以二甲基乙烯基矽烷基封鎖之25℃之動態黏度為10000mm2/s之二甲基聚矽氧烷 A-3: dimethylpolyoxane having a dynamic viscosity of 10000 mm 2 /s at 25 ° C blocked with dimethylvinyl fluorenyl at both ends

A-4(比較例):兩末端以二甲基乙烯基矽烷基封鎖之25℃之動態黏度為500000mm2/s之二甲基聚矽氧烷 A-4 (Comparative Example): two terminals with dimethylvinylsiloxy silicon dynamic viscosity of 25 ℃ alkyl blockade of 500000mm 2 / s of the dimethylpolysiloxane silicon oxyalkyl

A-5(比較例):兩末端以二甲基乙烯基矽烷基封鎖之25℃之動態黏度為3000mm2/s之二甲基聚矽氧烷 A-5 (Comparative Example): dimethylpolyoxane having a dynamic viscosity at 25 ° C of 3000 mm 2 /s blocked with dimethylvinyl fluorenyl at both ends

(B)成分 (B) component B-1: B-1:

B-2: B-2:

(C)成分 (C) component

將下述之鋁粉末與氧化鋅粉末,使用5公升行星式混合機(井上製作所(股)製)以下述表1之混合比於室溫下混合15分鐘,得C-1。 The following aluminum powder and zinc oxide powder were mixed at room temperature for 15 minutes using a 5 liter planetary mixer (manufactured by Inoue Seisakusho Co., Ltd.) to obtain C-1.

.平均粒徑2.0μm之鋁粉末(熱傳導率:237W/m.℃) . Aluminum powder with an average particle diameter of 2.0 μm (thermal conductivity: 237 W/m.°C)

.平均粒徑10.0μm之鋁粉末(熱傳導率:237W/m.℃) . Aluminum powder with an average particle diameter of 10.0 μm (thermal conductivity: 237 W/m.°C)

.平均粒徑1.0μm之氧化鋅粉末(熱傳導率:25W/m.℃) . Zinc oxide powder with an average particle diameter of 1.0 μm (thermal conductivity: 25 W/m.°C)

(D)成分 (D) component

下述式表示之有機氫聚矽氧烷 Organic hydrogen polyoxane represented by the following formula

D-1: D-1:

D-2: D-2:

D-3: D-3:

D-4(比較例): D-4 (comparative example):

D-5(比較例): D-5 (comparative example):

(E)成分 (E) component E-1: E-1:

(F)成分 (F) component

F-1:鉑-二乙烯基四甲基二矽氧烷錯合物之A-1溶液,含有1質量%之鉑原子 F-1: A-1 solution of platinum-divinyltetramethyldioxane complex containing 1% by mass of platinum atom

(G)成分 (G) component

G-1:1-乙烯基-1-環己醇之50質量%之甲苯溶液 50% by mass toluene solution of G-1:1-vinyl-1-cyclohexanol

[實施例1~11、比較例1~7] [Examples 1 to 11 and Comparative Examples 1 to 7]

將(A)~(G)成分以如下方式混合製得實施例1~11及比較例1~7之組成物。 The components of Examples 1 to 11 and Comparative Examples 1 to 7 were obtained by mixing the components (A) to (G) as follows.

亦即,取(A)成分於5公升行星式混合機(井上製作所(股)製),以表2、3所示之配合量加入(B)、(C)成分,以150℃混合1小時。冷卻至常溫,接著以表2、3所示之配合量加入(D)、(E)、(F)、(G)成分混合均勻。 In other words, the component (A) was placed in a 5 liter planetary mixer (manufactured by Inoue Seisakusho Co., Ltd.), and the components (B) and (C) were added in the amounts shown in Tables 2 and 3, and mixed at 150 ° C for 1 hour. . The mixture was cooled to room temperature, and then the components (D), (E), (F), and (G) were added in an appropriate amount as shown in Tables 2 and 3.

本發明,係兼顧接著性能與高溫熟成後之材料之柔軟性之性質之散熱用的熱傳導性矽油脂組成物。於使用本發明以外之以往技術之際,有以下問題點:若附與接著性能則於高溫熟成時之可靠性產生問題、而保持可靠性時無法附與接著性能。亦即,難以兼顧接著性能與高溫熟成時之可靠性。 The present invention relates to a heat conductive strontium oil composition for heat dissipation which combines the properties of the material and the flexibility of the material after high temperature aging. When the prior art other than the present invention is used, there is a problem in that reliability is caused when the high-temperature ripening is accompanied by the subsequent performance, and the performance is not attached when the reliability is maintained. That is, it is difficult to achieve both the reliability of the subsequent performance and the high temperature ripening.

Claims (4)

一種熱傳導性矽油脂組成物,其特徵係含有下述而成:(A)於1分子中至少具有2個烯基之25℃之動態黏度為5000~100000mm2/s之有機聚矽氧烷:100質量份;(B)下述通式(2) (R2為碳數1~6之烷基,b為5~100之整數)所表示之單末端3官能之水解性甲基聚矽氧烷:10~90質量份;(C)具有10W/m.℃以上之熱傳導率之熱傳導性填充材:500~1500質量份;(D)於1分子中含有2個以上5個以下之直接鍵結於矽原子之氫原子(Si-H基)之有機氫聚矽氧烷:{Si-H基之個數}/{(A)成分之烯基之個數}成為1.7~2.8之配合量;(E)於1分子中具有三嗪環及至少1個烯基之接著助劑:0.05~0.5質量份;(F)選自鉑及鉑化合物所構成群中之觸媒:使作為鉑原子之(A)成分為0.1~500ppm之配合量。 A thermally conductive bismuth oil composition characterized by comprising: (A) an organopolyoxane having a dynamic viscosity at 25 ° C of at least 2 alkenyl groups of from 1 to 50000 mm 2 /s in one molecule: 100 parts by mass; (B) the following general formula (2) (R 2 is an alkyl group having 1 to 6 carbon atoms, and b is an integer of 5 to 100), and a single-terminal trifunctional hydrolyzable methyl polyoxyalkylene represented by 10 to 90 parts by mass; (C) having 10 W/ m. Thermal conductivity filler of thermal conductivity above °C: 500 to 1500 parts by mass; (D) organic hydrogen having two or more and five or less hydrogen atoms (Si-H groups) directly bonded to a halogen atom in one molecule Polyoxane: {the number of Si-H groups} / {the number of alkenyl groups of the (A) component} becomes a compounding amount of 1.7 to 2.8; (E) has a triazine ring in one molecule and at least one The auxiliary agent for the alkenyl group is 0.05 to 0.5 part by mass; (F) the catalyst selected from the group consisting of platinum and a platinum compound: the component (A) which is a platinum atom is used in an amount of 0.1 to 500 ppm. 如申請專利範圍第1項之熱傳導性矽油脂組成物,其相對於(A)成分100質量份,含有0.05~0.5質量份 之(G)選自乙炔化合物、氮化合物、有機磷化合物、肟化合物及有機氯化合物之控制劑。 The thermally conductive bismuth oil composition according to Item 1 of the patent application, which contains 0.05 to 0.5 parts by mass based on 100 parts by mass of the component (A). (G) is selected from the group consisting of acetylene compounds, nitrogen compounds, organophosphorus compounds, antimony compounds, and control agents for organochlorine compounds. 一種熱傳導性矽油脂組成物,其特徵係,對將熱傳導性矽油脂組成物以150℃硬化90分鐘所得之薄片,以JIS K6251所記載之方法測定時之切斷時伸長為100%以上,成形為2mm厚度之薄片,於150℃下進行熟成1000小時後之切斷時伸長為80%以上。 A heat-conductive bismuth oil-and-fat composition characterized in that the sheet obtained by curing the heat-conductive bismuth oil-and-fat composition at 150 ° C for 90 minutes has a elongation of 100% or more when measured by the method described in JIS K6251, and is formed. When the sheet having a thickness of 2 mm was cut at 150 ° C for 1,000 hours, the elongation was 80% or more. 如申請專利範圍第1項之熱傳導性矽油脂組成物,其中,(D)成分之配合量係{Si-H基之個數}/{(A)成分之烯基之個數}為2.0~2.5。 The heat conductive bismuth oil composition according to the first aspect of the patent application, wherein the compounding amount of the component (D) is {the number of the {Si-H groups}/the number of the alkenyl groups of the (A) component is 2.0~ 2.5.
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