TWI531824B - Light receiving device - Google Patents

Light receiving device Download PDF

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TWI531824B
TWI531824B TW101106589A TW101106589A TWI531824B TW I531824 B TWI531824 B TW I531824B TW 101106589 A TW101106589 A TW 101106589A TW 101106589 A TW101106589 A TW 101106589A TW I531824 B TWI531824 B TW I531824B
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receiving device
light receiving
grating
optical
reflective
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TW101106589A
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TW201335649A (en
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柯正浩
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台灣超微光學股份有限公司
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光接收裝置Light receiving device

本發明是有關於一種光傳收裝置,且特別是有關於一種光接收裝置。The present invention relates to a light collecting device, and more particularly to a light receiving device.

光纖通訊模組(fiber optical communication module)係由一光纖傳接模組(fiber optical transceiver module)與一電路模組(circuitry module)結合組成,其中光纖傳接模組通常包含一光傳輸裝置(light transmitting device)以及一光接收裝置(light receiving device)。光纖通訊具有傳輸速度快、容量高、失真低等優點,可有效應付未來龐大的高解析度影像之訊號傳輸。光纖通訊可應用於長距離的訊號傳輸,例如海底光纜(submarine optical fiber cable),亦可應用於短距離的局端(local side)訊號傳輸。由於光纖通訊的頻寬是傳統電纜通訊的數百倍以上,且光纖通訊的技術仍不斷在突破,未來光纖網路仍具有相當的成長性,因此有人說二十一世紀則是光的世紀。The fiber optical communication module is composed of a fiber optical transceiver module and a circuit module, wherein the fiber transmission module usually includes an optical transmission device (light Transmitting device) and a light receiving device. Optical fiber communication has the advantages of fast transmission speed, high capacity, low distortion, etc., and can effectively cope with the signal transmission of large-scale high-resolution images in the future. Optical fiber communication can be applied to long-distance signal transmission, such as submarine optical fiber cable, and can also be applied to short-distance local side signal transmission. Since the bandwidth of optical fiber communication is hundreds of times more than that of traditional cable communication, and the technology of optical fiber communication is still breaking through, the future of optical fiber network still has considerable growth, so some people say that the 21st century is the century of light.

為了進一步提高光纖的訊號傳輸量,常會採用分波多工(Wavelength Division Multiplex,WDM)技術,使多個具有不同波長的光訊號同時於一條光纖中進行傳輸,以提高整體的資訊傳輸量。可是,一旦波長的數目增加,每一波長的寬度及中心波長的間距、整體的光功率、串音干擾(cross-talk)、光纖可傳遞的最大範圍都必須要考慮。最常用來製作分波多工器的技術有:(1)薄膜濾光片(Thin Film Filter,TFF)、(2)陣列波導光柵(Array Waveguide Grating,AWG)以及(3)光纖布拉格光柵(Fiber Bragg Grating、FBG)。由於上述的分波多工器,受限於傳輸的距離較長,光訊號的工作波長多採用波段1475~1625 nm之間,以增加光的穿透率,減少傳輸損失,但相對地成本亦較高,無法以低成本的半導體製程大量生產。In order to further increase the signal transmission capacity of the optical fiber, Wavelength Division Multiplex (WDM) technology is often used to enable multiple optical signals having different wavelengths to be simultaneously transmitted in one optical fiber to improve the overall information transmission amount. However, once the number of wavelengths increases, the width of each wavelength and the spacing of the center wavelength, the overall optical power, the cross-talk, and the maximum range over which the fiber can be transmitted must be considered. The most commonly used techniques for making a split-wave multiplexer are: (1) Thin Film Filter (TFF), (2) Array Waveguide Grating (AWG), and (3) Fiber Bragg (Fiber Bragg) Grating, FBG). Due to the above-mentioned split-wave multiplexer, the transmission distance is limited, and the working wavelength of the optical signal is mostly between 1475 and 1625 nm, so as to increase the transmittance of light and reduce transmission loss, but the relative cost is also relatively low. High, can not be mass produced in a low-cost semiconductor process.

此外,在分光技術上,已知技術於羅倫圓(Rowland circle)上製作出一凹面式光柵(concave grating),使入射光源產生的繞射光聚焦於羅倫圓上,以改善傳統平面式光柵(planar grating)需使用兩個凹面鏡來做光線聚焦之空間,並使光柵分光效率提高。此外,凹面式光柵結合了光柵分光和凹面鏡成像之功能,若入射光源內含有許多不同波長的光訊號,則反射光波會因干涉的結果,而讓不同波長的光訊號反射到不同角度上,產生分光的效果,進而減少能量損耗,且所佔的空間也會減少,以取代傳統大型的分光儀(monochromator)。In addition, in the spectroscopic technique, a known technique is used to fabricate a concave grating on the Rowland circle, so that the diffracted light generated by the incident light source is focused on the Loren circle to improve the conventional planar grating. (planar grating) requires two concave mirrors to make the light focus space and improve the grating splitting efficiency. In addition, the concave grating combines the functions of grating spectroscopic and concave mirror imaging. If the incident light source contains many different wavelengths of optical signals, the reflected light waves will reflect the different wavelengths of the optical signals to different angles due to the interference. The effect of splitting, which in turn reduces energy loss, and the space it takes up, replaces the traditional large monochromator.

本發明係有關於一種光接收裝置,其藉由反射式繞射光柵(reflection type diffraction grating)將不同波長的光訊號反射至不同位置的接收部上,以進行多通道分光之處理。由於反射式繞射光柵是以半導體製程技術製作的分光元件,具有低插入損耗、低串音、易於大量製造等優點,因此光接收裝置之通道數(channel number)及頻寬(bandwith)可增加,且大幅降低生產的成本。The present invention relates to a light receiving device that reflects light signals of different wavelengths to a receiving portion at different positions by a reflection type diffraction grating to perform multi-channel spectroscopic processing. Since the reflective diffraction grating is a spectral component fabricated by a semiconductor process technology, it has the advantages of low insertion loss, low crosstalk, and easy mass production, so the channel number and bandwith of the light receiving device can be increased. And significantly reduce the cost of production.

根據本發明之一方面,提出一種光接收裝置包括一輸入部、一反射型繞射光柵以及多個接收部。輸入部用以輸入多個不同波長之光訊號。反射型繞射光柵位於輸入部之一出口。反射型繞射光柵包括一曲面輪廓以及多個繞射結構。此些繞射結構配置於曲面輪廓上,用以分離不同波長之光訊號並使光訊號聚焦於一預設輸出面上。此些繞射結構以多個光柵間距(grating pitch)設置於此些輪廓點之間。至少部份之此些光柵間距係互為不同。此外,多個接收部配置於預設輸出面上,用以接收分離的不同波長之光訊號。According to an aspect of the invention, a light receiving device includes an input portion, a reflective diffraction grating, and a plurality of receiving portions. The input unit is configured to input a plurality of optical signals of different wavelengths. The reflective diffraction grating is located at one of the outlets of the input. The reflective diffraction grating includes a curved profile and a plurality of diffraction structures. The diffraction structures are disposed on the curved surface contour to separate optical signals of different wavelengths and focus the optical signals on a predetermined output surface. The diffractive structures are disposed between the contour points with a plurality of grating pitches. At least some of the grating spacings are different from each other. In addition, the plurality of receiving portions are disposed on the preset output surface for receiving the separated optical signals of different wavelengths.

為了對本發明之上述及其他方面有更佳的瞭解,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下:In order to better understand the above and other aspects of the present invention, the preferred embodiments are described below, and in conjunction with the drawings, the detailed description is as follows:

本實施例之光接收裝置,係利用反射型繞射光柵將不同波長的光訊號分離並聚焦於一預設輸出面上。反射型繞射光柵兼具分光及聚焦的功能,因此可取代傳統光學系統中的準直面鏡(collimator)與聚焦鏡(focusing lens),進而減少光學系統中元件的使用數量以及複雜的對位問題。The light receiving device of this embodiment separates and focuses the optical signals of different wavelengths on a predetermined output surface by using a reflective diffraction grating. The reflective diffraction grating combines the functions of splitting and focusing, thus replacing the collimator and focusing lens in traditional optical systems, thereby reducing the number of components used in optical systems and complex alignment problems. .

請同時參照第1圖、第2圖及第3圖,第1圖繪示依照一實施例之光接收裝置的示意圖,第2圖繪示反射型繞射光柵的繞射原理之示意圖,第3圖繪示依照一實施例之反射型繞射光柵的示意圖。光接收裝置10包括一輸入部12、一反射型繞射光柵14以及多個接收部16。輸入部12用以輸入多個不同波長之光訊號L1~Ln。反射型繞射光柵14位於輸入部12之一出口121。反射型繞射光柵14包括一曲面輪廓142以及多個繞射結構144。曲面輪廓142具有多個輪廓點P0~Pn。此些繞射結構144配置於曲面輪廓142上,用以分離不同波長之光訊號L1~Ln並使光訊號聚焦於一預設輸出面162上。此些繞射結構144以多個光柵間距設置於此些輪廓點P0~Pn之間。至少部份之此些光柵間距係互為不同。此外,多個接收部16配置於預設輸出面162上,用以接收分離的不同波長之光訊號L1~Ln。Please refer to FIG. 1 , FIG. 2 and FIG. 3 simultaneously. FIG. 1 is a schematic diagram of a light receiving device according to an embodiment, and FIG. 2 is a schematic diagram showing a diffraction principle of a reflective diffraction grating. The figure shows a schematic diagram of a reflective diffraction grating in accordance with an embodiment. The light receiving device 10 includes an input portion 12, a reflective diffraction grating 14, and a plurality of receiving portions 16. The input unit 12 is configured to input a plurality of optical signals L1 to Ln of different wavelengths. The reflective diffraction grating 14 is located at one of the outlets 121 of the input portion 12. The reflective diffraction grating 14 includes a curved profile 142 and a plurality of diffraction structures 144. The curved surface contour 142 has a plurality of contour points P 0 ~ Pn. The diffraction structures 144 are disposed on the curved surface contour 142 for separating the optical signals L1 L Ln of different wavelengths and focusing the optical signals on a predetermined output surface 162 . The diffractive structures 144 are disposed between the contour points P 0 -Pn at a plurality of grating pitches. At least some of the grating spacings are different from each other. In addition, the plurality of receiving portions 16 are disposed on the preset output surface 162 for receiving the separated optical signals L1 L Ln of different wavelengths.

在一實施例中,接收部16例如為一組光電元件所組成的光電轉換器,光電元件例如為光電二極體,以並聯的方式依序排列於預設輸出面162上,可將不同波長之光訊號L1~Ln轉換成一組電訊號。至少部分之此些接收部16之間的間距互為不同,且接收部16的位置與光柵間距設置有關,可依實際設計予以調整,以使接收部16非等距地排列在預設輸出面162上。接收部16的數量不限,端視輸入部12可允許傳輸最大數量的光訊號而定。此外,接收部16亦可為一組光纖或由光纖與光電元件所組合成之混合接收器。各個光纖分得單一波長之光訊號之後,再由後續的光電元件進行資料處理,但亦可不需經由光電轉換,直接以單一波長的光訊號再次傳輸。In an embodiment, the receiving portion 16 is, for example, a photoelectric converter composed of a group of photoelectric elements, such as photodiodes, which are sequentially arranged in parallel on the preset output surface 162 to different wavelengths. The optical signals L1~Ln are converted into a set of electrical signals. At least some of the spacings between the receiving portions 16 are different from each other, and the position of the receiving portion 16 is related to the grating spacing setting, and can be adjusted according to the actual design, so that the receiving portions 16 are non-equally arranged on the preset output surface. 162. The number of receiving sections 16 is not limited, and the looking-up input section 12 may allow transmission of the maximum number of optical signals. In addition, the receiving portion 16 can also be a set of optical fibers or a hybrid receiver in which optical fibers and optoelectronic components are combined. After each optical fiber is divided into optical signals of a single wavelength, data processing is performed by the subsequent photoelectric components, but the optical signals of the single wavelength can be directly transmitted again without photoelectric conversion.

在一實施例中,輸入部12例如為光纖,其末端具有一出口121。不同波長之光訊號L1~Ln可同時在光纖內部傳輸,不會相互干擾,使得訊號傳輸量及頻寬相對增加。在一實施例中,光訊號L1~Ln的可用波長範圍為600~800nm,其數量至少大於等於3。若光接收裝置10對光訊號L1~Ln的解析度愈高,可使用的頻段數也愈高。舉例來說,當可用的頻寬為200nm,最小解析度為5奈米(nm)時,一條光纖可同時傳輸40個不同波長之光訊號L1~Ln。若以傳輸速度為10Gbps來計算,一秒鐘可傳輸的資料量約為400Gb,相當於一片藍光光碟片的容量。因此,以光纖替代傳統的電纜,可克服傳統電纜頻寬不足之限制,以及減少電磁波之雜訊干擾。由此可知,本發明之光接收裝置可應用在以光纖作為傳輸介面之模組上,例如連接於電腦與其週邊電子裝置之間的光纖傳接模組,或區域網路中連接伺服器、印表機、影印機與終端電腦之間的光纖傳接模組,以大幅提高傳輸的資料量。In an embodiment, the input portion 12 is, for example, an optical fiber having an outlet 121 at its end. The optical signals L1~Ln of different wavelengths can be transmitted inside the optical fiber at the same time without mutual interference, so that the signal transmission amount and the bandwidth are relatively increased. In one embodiment, the available wavelengths of the optical signals L1 L Ln are in the range of 600 to 800 nm, and the number thereof is at least 3 or more. If the resolution of the light receiving device 10 to the optical signals L1 to Ln is higher, the number of available frequency bands is also higher. For example, when the available bandwidth is 200 nm and the minimum resolution is 5 nanometers (nm), one fiber can simultaneously transmit 40 different wavelengths of optical signals L1~Ln. If the transmission speed is 10 Gbps, the amount of data that can be transmitted in one second is about 400 Gb, which is equivalent to the capacity of a Blu-ray disc. Therefore, replacing the traditional cable with an optical fiber can overcome the limitation of the conventional cable bandwidth and reduce the noise interference of the electromagnetic wave. It can be seen that the light receiving device of the present invention can be applied to a module using an optical fiber as a transmission interface, for example, a fiber optic transmission module connected between a computer and its peripheral electronic devices, or a server connected to a local area network, printed A fiber optic transmission module between the watch machine, the photocopier and the terminal computer to greatly increase the amount of data transmitted.

以下說明第2圖之繞射原理以及第3圖之反射型繞射光柵14的繞射結構144。為方便說明起見,第3圖繪示之繞射結構144之形狀係以相似三角形為例說明。繞射結構144以多個光柵間距設置於輪廓點P0~Pn之間。至少部份之光柵間距係互為不同,使得不同波長的光訊號L1~Ln以實質上垂直於預設輸出面162之方式射向預設輸出面162。互不相同之光柵間距的個數可視實際設計予以調整,為方便說明起見,第3圖僅以三個互不相同之光柵間距d0、d1及d2為例說明。在一實施例中,光柵間距d0、d1及d2分別為由輪廓點P0至P1、P1至P2、P2至P3之線段長度。The diffraction principle of Fig. 2 and the diffraction structure 144 of the reflection type diffraction grating 14 of Fig. 3 will be described below. For convenience of description, the shape of the diffraction structure 144 illustrated in FIG. 3 is illustrated by a similar triangle. The diffraction structure 144 is disposed between the contour points P 0 to Pn at a plurality of grating pitches. At least some of the grating pitches are different from each other such that the optical signals L1 L Ln of different wavelengths are directed to the preset output surface 162 in a manner substantially perpendicular to the preset output surface 162 . The number of mutually different grating pitches can be adjusted according to the actual design. For convenience of explanation, FIG. 3 only illustrates three different grating spacings d 0 , d 1 and d 2 . In one embodiment, the grating pitches d 0 , d 1 , and d 2 are the lengths of the line segments from the contour points P 0 to P 1 , P 1 to P 2 , and P 2 to P 3 , respectively.

在第2及3圖中,中央輪廓點P0係為曲面輪廓142的中心點,參考點(較佳為輪廓點P1)是光學模擬與調整過程中暫時選擇的下一個輪廓點,當單一波長光線從一已知的入射角α射向以P0與P1連線的線段長度d0為光柵間距的區域光柵時,繞射後在預設輸出面162上的聚焦位置可能會與一理想的聚焦點有一像差△y’(aberration)。像差△y’可經由以下的光柵公式(Grating Equation)In Figures 2 and 3, the central contour point P 0 is the center point of the curved contour 142, and the reference point (preferably the contour point P 1 ) is the next contour point temporarily selected during the optical simulation and adjustment process, when a single When the wavelength ray is emitted from a known incident angle α to a region grating with a line segment length d 0 connecting P 0 and P 1 as a grating pitch, the focus position on the preset output surface 162 after diffraction may be combined with The ideal focus has an aberration Δy' (aberration). The aberration Δy' can be passed through the following grating equation (Grating Equation)

sinα+sinβ=推得像差解析度(aberration induced spectral resolution) Δλ A = Sinα+sinβ= Abbreviated induced spectral resolution Δ λ A =

其中,光柵間距d0係為區域光柵P1P0的光柵間距;繞射角β為該假設的單一波長光線A1經區域光柵P1P0繞射後的角度,其為λ的函數;λ為A1之波長;m為繞射階數;距離r’為A1之繞射光線由區域光柵P1P0繞射至預設輸出面162的距離。在光柵間距d0、繞射角β、波長λ、繞射階數m及距離r’已知的前提下,每一個像差△y’值都能藉由光柵公式找出對應之像差解析度Δλ A 。如此,反射型繞射光柵14之曲面輪廓142上的輪廓點所在位置可以從中央輪廓點P0為基準點出發,透過光學模擬反覆調整光柵間距與區域的光柵輪廓(local grating profile),尋找出像差解析度Δλ A 小於一預定值的位置點作為較佳的次一輪廓點P1所在位置,再從輪廓點P1為基準點出發,以同樣的光學模擬反覆調整光柵間距與區域的光柵輪廓,尋找出像差解析度Δλ A 小於一預定值的位置點作為較佳再次一個的輪廓點P2所在位置,如此重複,直到反射型繞射光柵14之曲面輪廓142被不同光柵間距的區域光柵輪廓佈滿為止,如此求得的反射型繞射光柵14將會是以光學模擬法所能求得的較佳光柵。Wherein, the grating pitch d 0 is the grating pitch of the regional grating P 1 P 0 ; the diffraction angle β is the angle of the assumed single-wavelength ray A1 after being circulated by the regional grating P 1 P 0 , which is a function of λ; It is the wavelength of A1; m is the diffraction order; the distance of the diffracted ray whose distance r' is A1 is diffracted by the area grating P 1 P 0 to the preset output surface 162. Under the premise that the grating spacing d 0 , the diffraction angle β, the wavelength λ, the diffraction order m and the distance r′ are known, the value of each aberration Δy′ can be solved by the grating formula to find the corresponding aberration analysis. Degree Δ λ A . Thus, the position of the contour point on the curved contour 142 of the reflective diffraction grating 14 can be determined from the central contour point P 0 as a reference point, and the grating spacing and the local grating profile are repeatedly adjusted by optical simulation to find out A position point at which the aberration resolution Δ λ A is smaller than a predetermined value is taken as a position of the preferred second contour point P 1 , and then the contour point P 1 is used as a reference point, and the grating pitch and the area are repeatedly adjusted by the same optical simulation. The grating profile is searched for a position where the aberration resolution Δ λ A is smaller than a predetermined value as the position of the contour point P 2 which is preferably one more, and thus repeated until the curved contour 142 of the reflective diffraction grating 14 is separated by a different grating pitch. The region of the grating profile is full, and the thus obtained reflective diffraction grating 14 will be a preferred grating which can be obtained by optical simulation.

相對於傳統具有固定光柵間距之凹面式光柵而言,因其繞射後的光線與羅蘭圓上聚焦的圓弧切線間幾乎不可能成垂直或接近垂直的相交,實用性不高。反觀,本發明透過光學模擬的方式尋找非固定的光柵間距與非圓弧面的曲面輪廓142,使繞射光線可以實質上垂直於預設輸出面162的方式射向預設輸出面162,如此不僅繞射效率會更好,預設輸出面162也可以不必是難以具體實施的羅蘭圓上的圓弧,而可以是一個容易具體實施的其他輸出面,例如一平面上的一直線,如此反射型繞射光柵14在實際應用上將具有非常高的價值。Compared with the conventional concave grating with a fixed grating pitch, it is almost impossible to form a vertical or nearly vertical intersection between the diffracted light and the focused circular arc on the Roland circle, which is not practical. In contrast, the present invention finds the non-fixed grating pitch and the non-circular surface curved contour 142 by optical simulation, so that the diffracted light can be directed to the preset output surface 162 substantially perpendicular to the preset output surface 162. Not only the diffraction efficiency is better, but the preset output surface 162 does not have to be an arc on the Roland circle which is difficult to implement, but may be another output surface that is easy to implement, such as a straight line on a plane, such a reflection type. The diffraction grating 14 will have a very high value in practical applications.

本發明之反射型繞射光柵14因具有一非平面之曲面輪廓142(例如三維球面或曲面)以及互不相等的光柵間距,傳統以精密的鑽石刀在平面式的金屬或玻璃表面上刻製繞射結構144的方法,變得不再適合,其原因至少包含鑽石刀難以變動刻製的間距以及難以在非平面的物質表面操作,因此本發明的反射型繞射光柵14較適當的製程與材質的選擇會是以半導體基底材料(例如矽或Ⅲ-Ⅴ族半導體材料)為其材質,以蝕刻方式在晶圓垂直面上往下蝕刻出非平面的繞射結構144,之後再從晶圓上切割出來。The reflective diffraction grating 14 of the present invention has a non-planar curved contour 142 (for example, a three-dimensional spherical surface or a curved surface) and unequal grating spacing, and is conventionally carved on a flat metal or glass surface with a precision diamond knife. The method of refracting the structure 144 becomes unsuitable for at least the reason that the diamond knives are difficult to change the pitch and the surface of the non-planar material is difficult to operate. Therefore, the reflective diffraction grating 14 of the present invention is more suitable for the process. The material is selected by using a semiconductor substrate material (such as germanium or III-V semiconductor material) to etch a non-planar diffraction structure 144 on the vertical surface of the wafer by etching, and then from the wafer. Cut it out.

請參照第4圖及第5圖,第4圖繪示依照一實施例之光接收裝置的立體分解圖,第5圖繪示光線於第4圖之光通道中行進的示意圖。光接收裝置10進一步包括上波導板120、下波導板130、第一消光元件150與第二消光元件160。Please refer to FIG. 4 and FIG. 5 . FIG. 4 is an exploded perspective view of the light receiving device according to an embodiment, and FIG. 5 is a schematic view showing the light traveling in the optical channel of FIG. 4 . The light receiving device 10 further includes an upper waveguide plate 120, a lower waveguide plate 130, a first extinction element 150, and a second extinction element 160.

下波導板130係實質上平行於上波導板120設置。上波導板120具有第一反射面122,而下波導板130具有與第一反射面122相對之第二反射面132。第一反射面122與第二反射面132之間係形成光通道140,使來自於輸入部12之光訊號L1~Ln如第18圖所示在光通道140內行進。上述第一反射面122與第二反射面132間形成之光通道140一般為空腔式,有別於光線在光纖中傳送所採用的全反射原理,本實施例係將光訊號L1~Ln限制在這些反射面間反覆反射而向前傳送,但亦可填滿適當的介質(例如玻璃、塑膠、或壓克力等)供光訊號在當中反覆反射而向前傳送、同時防止落塵或其他污染物累積在上下波導板之上而影響波導板之平整度與反射率。The lower waveguide plate 130 is disposed substantially parallel to the upper waveguide plate 120. The upper waveguide plate 120 has a first reflective surface 122, and the lower waveguide plate 130 has a second reflective surface 132 opposite the first reflective surface 122. The optical path 140 is formed between the first reflecting surface 122 and the second reflecting surface 132, so that the optical signals L1 to Ln from the input portion 12 travel in the optical channel 140 as shown in FIG. The optical channel 140 formed between the first reflective surface 122 and the second reflective surface 132 is generally of a cavity type, which is different from the principle of total reflection used for transmitting light in the optical fiber. In this embodiment, the optical signals L1~Ln are limited. Reflectively reflected between these reflective surfaces and forwarded, but can also be filled with appropriate media (such as glass, plastic, or acrylic) for the light signal to be reflected and forwarded while preventing dust or other pollution. The matter accumulates on the upper and lower waveguide plates to affect the flatness and reflectivity of the waveguide plate.

前述上波導板120與下波導板130必須具有良好的平整度與反射率,才可使光訊號L1~Ln在上波導板120與下波導板130之間行進時,達到最低的損耗與最佳的光源集中效果。因此,上波導板120及下波導板130之材質例如是不鏽鋼、矽晶片、玻璃、光碟片或硬碟片。此外,如果上波導板120及下波導板130所使用之材料反射率未達所需之標準,可在第一反射面122與第二反射面132上分別設置一層高反射膜以解決此問題,較佳地高反射膜之材料為鋁膜。The upper waveguide plate 120 and the lower waveguide plate 130 must have good flatness and reflectivity, so that the optical signals L1 to Ln can achieve the lowest loss and the best when traveling between the upper waveguide plate 120 and the lower waveguide plate 130. The light source concentrates the effect. Therefore, the material of the upper waveguide plate 120 and the lower waveguide plate 130 is, for example, stainless steel, tantalum wafer, glass, optical disk or hard disk. In addition, if the material reflectance of the upper waveguide plate 120 and the lower waveguide plate 130 is less than the required standard, a high-reflection film may be disposed on the first reflective surface 122 and the second reflective surface 132 to solve the problem. Preferably, the material of the highly reflective film is an aluminum film.

為了防止第一反射面122與第二反射面132之表面隨著時間發生氧化、鏽蝕、粗糙等情形,而降低反射面表面之平整度與反射率,可在第一反射面122與第二反射面132之高反射膜上分別設置第一保護膜與第二保護膜(圖未繪示),保護膜的材料例如是二氧化矽。In order to prevent oxidation, rust, roughness, etc. of the surfaces of the first reflective surface 122 and the second reflective surface 132 over time, the flatness and reflectivity of the surface of the reflective surface are reduced, and the first reflective surface 122 and the second reflective surface are A first protective film and a second protective film (not shown) are respectively disposed on the high reflective film of the surface 132. The material of the protective film is, for example, cerium oxide.

本發明上述實施例所揭露之光接收裝置,規範從輸入部輸入之不同波長之光訊號,於上下波導板之間之光通道中行進,如此可讓光訊號更為集中且不易發散。再搭配鋸齒狀之消光元件更可讓入射角度過大之光訊號被消弭,進而減少到達接收部之雜散光,使得所欲分離的光訊號不會受到雜散光之干擾,以得到更清晰之訊號品質。The light receiving device disclosed in the above embodiments of the present invention regulates the optical signals of different wavelengths input from the input unit to travel in the optical channel between the upper and lower waveguide plates, so that the optical signals are more concentrated and less likely to diverge. In combination with the jagged extinction element, the optical signal with too large incident angle is eliminated, thereby reducing the stray light reaching the receiving portion, so that the optical signal to be separated is not interfered by stray light, so as to obtain clearer signal quality. .

綜上所述,雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。In conclusion, the present invention has been disclosed in the above preferred embodiments, and is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

10...光接收裝置10. . . Light receiving device

12...輸入部12. . . Input section

14...反射型繞射光柵14. . . Reflective diffraction grating

16...接收部16. . . Receiving department

L1~Ln...光訊號L1~Ln. . . Optical signal

121...出口121. . . Export

142...曲面輪廓142. . . Surface contour

144...繞射結構144. . . Diffractive structure

P0~Pn...輪廓點P 0 ~Pn. . . Outline point

162...預設輸出面162. . . Preset output face

d0、d1、d2...光柵間距d 0 , d 1 , d 2 . . . Grating spacing

120...上波導板120. . . Upper waveguide plate

130...下波導板130. . . Lower waveguide plate

122...第一反射面122. . . First reflecting surface

132...第二反射面132. . . Second reflecting surface

140...光通道140. . . Optical channel

150...第一消光元件150. . . First extinction element

160...第二消光元件160. . . Second extinction element

第1圖繪示依照一實施例之光接收裝置的示意圖。FIG. 1 is a schematic diagram of a light receiving device according to an embodiment.

第2圖繪示反射型繞射光柵的繞射原理之示意圖。Figure 2 is a schematic diagram showing the diffraction principle of a reflective diffraction grating.

第3圖繪示依照一實施例之反射型繞射光柵的示意圖。FIG. 3 is a schematic diagram of a reflective diffraction grating according to an embodiment.

第4圖繪示依照一實施例之光接收裝置的立體分解圖。4 is an exploded perspective view of a light receiving device according to an embodiment.

第5圖繪示光線於第4圖之光通道中行進的示意圖。Figure 5 is a schematic diagram showing the travel of light in the optical channel of Figure 4.

10...光接收裝置10. . . Light receiving device

12...輸入部12. . . Input section

14...反射型繞射光柵14. . . Reflective diffraction grating

16...接收部16. . . Receiving department

121...出口121. . . Export

142...曲面輪廓142. . . Surface contour

162...預設輸出面162. . . Preset output face

L1~Ln...光訊號L1~Ln. . . Optical signal

Claims (9)

一種光接收裝置,應用於光纖通訊,該光接收裝置包括:一輸入部,用以輸入複數個不同波長之光訊號;一反射型繞射光柵,位於該輸入部之一出口,該反射型繞射光柵包括:一曲面輪廓,具有複數個輪廓點;以及複數個繞射結構,配置於該曲面輪廓上,用以分離該些不同波長之光訊號並聚焦於一預設輸出面上,該些繞射結構以複數個光柵間距設置於該些輪廓點之間,至少部份之該些光柵間距係互為不同;以及複數個接收部,配置於該預設輸出面上,用以接收分離的該些不同波長之光訊號,其中至少部分之該些接收部非等距地排列在該預設輸出面上。 A light receiving device is applied to optical fiber communication, the light receiving device includes: an input portion for inputting a plurality of optical signals of different wavelengths; and a reflective diffraction grating disposed at an exit of the input portion, the reflective type winding The grating includes: a curved surface contour having a plurality of contour points; and a plurality of diffraction structures disposed on the curved surface contour for separating the optical signals of the different wavelengths and focusing on a predetermined output surface, The diffraction structure is disposed between the contour points by a plurality of grating pitches, at least some of the grating pitches are different from each other; and a plurality of receiving portions are disposed on the preset output surface for receiving the separated The optical signals of different wavelengths, wherein at least some of the receiving portions are non-equidistantly arranged on the preset output surface. 如申請專利範圍第1項所述之光接收裝置,其中該些不同波長之光訊號的數量大於3。 The light receiving device of claim 1, wherein the number of the optical signals of the different wavelengths is greater than 3. 如申請專利範圍第1項所述之光接收裝置,其中該預設輸出面係為一平面上之一直線。 The light receiving device of claim 1, wherein the predetermined output surface is a straight line on a plane. 如申請專利範圍第1項所述之光接收裝置,其中該曲面輪廓與該些繞射結構係刻製於一半導體基底材料上。 The light receiving device of claim 1, wherein the curved profile and the diffraction structures are formed on a semiconductor substrate material. 如申請專利範圍第4項所述之光接收裝置,其中 該半導體基底材料係為矽。 The light receiving device of claim 4, wherein The semiconductor substrate material is tantalum. 如申請專利範圍第1項所述之光接收裝置,更包括:一上波導板,具有一第一反射面;以及一下波導板,實質上平行於該上波導板設置,並具有一第二反射面,該第一反射面與該第二反射面係相對,該第一反射面與該第二反射面之間係形成一光通道,使來自於該輸入部之該些光訊號在該光通道內行進。 The light receiving device of claim 1, further comprising: an upper waveguide plate having a first reflecting surface; and a lower waveguide plate disposed substantially parallel to the upper waveguide plate and having a second reflection The first reflective surface is opposite to the second reflective surface, and an optical channel is formed between the first reflective surface and the second reflective surface, so that the optical signals from the input portion are in the optical channel. Travel inside. 如申請專利範圍第6項所述之光接收裝置,更包括一第一消光元件與一第二消光元件,分別配置於該光通道之兩側。 The light receiving device of claim 6, further comprising a first matting element and a second extinction element disposed on opposite sides of the optical channel. 如申請專利範圍第1項所述之光接收裝置,其中該些接收部包括一組光電元件、一組光纖或其組合。 The light receiving device of claim 1, wherein the receiving portions comprise a set of photovoltaic elements, a set of optical fibers, or a combination thereof. 如申請專利範圍第1項所述之光接收裝置,其中該輸入部包括一光纖。The light receiving device of claim 1, wherein the input portion comprises an optical fiber.
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