TWI522495B - Etching solution composition for metal layer comprising copper and titanium (4) - Google Patents
Etching solution composition for metal layer comprising copper and titanium (4) Download PDFInfo
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- TWI522495B TWI522495B TW100115188A TW100115188A TWI522495B TW I522495 B TWI522495 B TW I522495B TW 100115188 A TW100115188 A TW 100115188A TW 100115188 A TW100115188 A TW 100115188A TW I522495 B TWI522495 B TW I522495B
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- 239000000203 mixture Substances 0.000 title claims description 65
- 238000005530 etching Methods 0.000 title claims description 55
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 31
- 229910052802 copper Inorganic materials 0.000 title claims description 30
- 239000010949 copper Substances 0.000 title claims description 30
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims description 25
- 239000010936 titanium Substances 0.000 title claims description 24
- 229910052719 titanium Inorganic materials 0.000 title claims description 24
- 229910052751 metal Inorganic materials 0.000 title claims description 18
- 239000002184 metal Substances 0.000 title claims description 18
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 18
- -1 cyclic amine compounds Chemical class 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 13
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 12
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 12
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 claims description 10
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 claims description 8
- 150000007524 organic acids Chemical class 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 150000002222 fluorine compounds Chemical class 0.000 claims description 6
- 150000007522 mineralic acids Chemical class 0.000 claims description 6
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 claims description 6
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 claims description 6
- 229910001870 ammonium persulfate Inorganic materials 0.000 claims description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 4
- 229910052500 inorganic mineral Inorganic materials 0.000 claims description 4
- 239000011707 mineral Substances 0.000 claims description 4
- 235000010755 mineral Nutrition 0.000 claims description 4
- 235000006408 oxalic acid Nutrition 0.000 claims description 4
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 claims description 4
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 claims description 4
- LCPVQAHEFVXVKT-UHFFFAOYSA-N 2-(2,4-difluorophenoxy)pyridin-3-amine Chemical compound NC1=CC=CN=C1OC1=CC=C(F)C=C1F LCPVQAHEFVXVKT-UHFFFAOYSA-N 0.000 claims description 3
- ULRPISSMEBPJLN-UHFFFAOYSA-N 2h-tetrazol-5-amine Chemical compound NC1=NN=NN1 ULRPISSMEBPJLN-UHFFFAOYSA-N 0.000 claims description 3
- CMGDVUCDZOBDNL-UHFFFAOYSA-N 4-methyl-2h-benzotriazole Chemical compound CC1=CC=CC2=NNN=C12 CMGDVUCDZOBDNL-UHFFFAOYSA-N 0.000 claims description 3
- LDDQLRUQCUTJBB-UHFFFAOYSA-O azanium;hydrofluoride Chemical compound [NH4+].F LDDQLRUQCUTJBB-UHFFFAOYSA-O 0.000 claims description 3
- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 claims description 3
- 150000003839 salts Chemical class 0.000 claims description 3
- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 claims description 3
- ASZZHBXPMOVHCU-UHFFFAOYSA-N 3,9-diazaspiro[5.5]undecane-2,4-dione Chemical compound C1C(=O)NC(=O)CC11CCNCC1 ASZZHBXPMOVHCU-UHFFFAOYSA-N 0.000 claims description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 2
- 229910019142 PO4 Inorganic materials 0.000 claims description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
- 150000003863 ammonium salts Chemical class 0.000 claims description 2
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 claims description 2
- 239000012964 benzotriazole Substances 0.000 claims description 2
- 150000002823 nitrates Chemical class 0.000 claims description 2
- 229910017604 nitric acid Inorganic materials 0.000 claims description 2
- 235000021317 phosphate Nutrition 0.000 claims description 2
- 150000003013 phosphoric acid derivatives Chemical class 0.000 claims description 2
- 239000011698 potassium fluoride Substances 0.000 claims description 2
- 235000003270 potassium fluoride Nutrition 0.000 claims description 2
- 239000011775 sodium fluoride Substances 0.000 claims description 2
- 235000013024 sodium fluoride Nutrition 0.000 claims description 2
- 159000000000 sodium salts Chemical class 0.000 claims description 2
- BFXAWOHHDUIALU-UHFFFAOYSA-M sodium;hydron;difluoride Chemical compound F.[F-].[Na+] BFXAWOHHDUIALU-UHFFFAOYSA-M 0.000 claims description 2
- 150000003467 sulfuric acid derivatives Chemical class 0.000 claims description 2
- SCVFZCLFOSHCOH-UHFFFAOYSA-M potassium acetate Chemical compound [K+].CC([O-])=O SCVFZCLFOSHCOH-UHFFFAOYSA-M 0.000 claims 2
- 235000011056 potassium acetate Nutrition 0.000 claims 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 238000012545 processing Methods 0.000 description 5
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 235000005985 organic acids Nutrition 0.000 description 2
- GVSNQMFKEPBIOY-UHFFFAOYSA-N 4-methyl-2h-triazole Chemical compound CC=1C=NNN=1 GVSNQMFKEPBIOY-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- USFZMSVCRYTOJT-UHFFFAOYSA-N Ammonium acetate Chemical compound N.CC(O)=O USFZMSVCRYTOJT-UHFFFAOYSA-N 0.000 description 1
- 239000005695 Ammonium acetate Substances 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 229940043376 ammonium acetate Drugs 0.000 description 1
- 235000019257 ammonium acetate Nutrition 0.000 description 1
- 239000002738 chelating agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/26—Acidic compositions for etching refractory metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/18—Acidic compositions for etching copper or alloys thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/30—Acidic compositions for etching other metallic material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/2855—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by physical means, e.g. sputtering, evaporation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Description
本案請求韓國專利申請案第10-2010-0039824號申請日4月29日之權益，該案全文係以引用方式併入本案。The case is filed on April 29, the filing date of the Korean Patent Application No. 10-2010-0039824, the entire contents of which is incorporated herein by reference.
本發明係有關一種含銅及鈦之金屬層用蝕刻液組成物，及其係用於半導體裝置及平板顯示器，特別為薄膜電晶體(TFT)之閘極、源極/汲極布線，及電極。The present invention relates to an etchant composition for a metal layer containing copper and titanium, and to a semiconductor device and a flat panel display, particularly a gate, source/drain wiring of a thin film transistor (TFT), and electrode.
於半導體裝置及平板顯示器中，在基板上形成金屬布線之製程典型地包括使用濺鍍而形成金屬層、施加光阻、使用曝光及顯影而在一選定區上形成光阻、及進行蝕刻。此外，在各項個別處理步驟之前或之後進行清潔處理步驟。蝕刻處理運用光阻作為遮罩，使得金屬層留在選定區上，及典型地包括使用電漿之乾蝕刻或使用蝕刻液之濕蝕刻。In semiconductor devices and flat panel displays, the process of forming metal wiring on a substrate typically includes forming a metal layer using sputtering, applying a photoresist, forming a photoresist on a selected region using exposure and development, and etching. In addition, the cleaning process steps are performed before or after each individual processing step. The etching process uses photoresist as a mask such that the metal layer remains on the selected regions, and typically includes dry etching using plasma or wet etching using an etchant.
針對半導體裝置及平板顯示器，特別為TFT，閘極及源極/汲極陣列布線係由包括具有低電阻之鋁製導電層的金屬層組成。但鋁層有問題，原因在於由於在隨後處理步驟中，形成小丘而造成與另一導電層間的短路，及因接觸氧化物層而形成絕緣層。因此，揭示含銅及鈦之雙層作為TFT之閘極、源極/汲極陣列布線、及電極。For semiconductor devices and flat panel displays, particularly TFTs, the gate and source/drain array wiring consists of a metal layer comprising a conductive layer of aluminum having a low electrical resistance. However, the aluminum layer is problematic because a short circuit with another conductive layer is formed due to the formation of hillocks in the subsequent processing step, and an insulating layer is formed by contact with the oxide layer. Therefore, a double layer containing copper and titanium is disclosed as a gate of a TFT, a source/drain array wiring, and an electrode.
但為了蝕刻含銅及鈦之雙層，針對個別層應使用不同蝕刻液組成物。更明確言之，用以蝕刻含銅之金屬層的蝕刻液組成物應主要包括基於過氧化氫之蝕刻液組成物或基於臭氧之蝕刻液組成物。以基於過氧化氫之蝕刻液組成物為例，蝕刻液組成物可能分解且可能隨著時間之經過變不穩定。以基於臭氧之蝕刻液組成物為例，蝕刻速率緩慢且組成物隨著時間之經過變不穩定。However, in order to etch a double layer containing copper and titanium, different etchant compositions should be used for individual layers. More specifically, the etchant composition for etching the copper-containing metal layer should mainly include a hydrogen peroxide-based etchant composition or an ozone-based etchant composition. Taking the hydrogen peroxide-based etchant composition as an example, the etchant composition may decompose and may become unstable over time. Taking the ozone-based etchant composition as an example, the etching rate is slow and the composition becomes unstable over time.
據此，本發明之第一目的係提供一種蝕刻液組成物，其允許進行含銅及鈦之金屬層蝕刻，特別銅/鈦雙層之總濕蝕刻。Accordingly, a first object of the present invention is to provide an etchant composition that permits etching of a metal layer comprising copper and titanium, particularly a total wet etch of a copper/titanium double layer.
本發明之第二目的係提供一種蝕刻液組成物，其甚至不含過氧化氫及/或臭氧而針對銅具有快速蝕刻速率。A second object of the present invention is to provide an etchant composition that does not even contain hydrogen peroxide and/or ozone and has a fast etch rate for copper.
本發明之第三目的係提供一種蝕刻液組成物，其可簡化蝕刻處理步驟且改進生產力。A third object of the present invention is to provide an etching liquid composition which can simplify an etching treatment step and improve productivity.
本發明之第四目的係提供一種蝕刻液組成物，其可達成快速蝕刻速率及一致的蝕刻。A fourth object of the present invention is to provide an etchant composition that achieves a fast etch rate and consistent etching.
本發明之第五目的係提供一種蝕刻液組成物，其不會損壞設備且蝕刻時無需使用昂貴的設備。A fifth object of the present invention is to provide an etching liquid composition which does not damage the apparatus and which does not require the use of expensive equipment when etching.
本發明之第六目的係提供一種蝕刻液組成物，其可有利地施用至大尺寸顯示面板，如此產生經濟效益。A sixth object of the present invention is to provide an etching liquid composition which can be advantageously applied to a large-sized display panel, which is economical.
本發明之第七目的係提供一種蝕刻液組成物，其除了含銅及鈦之金屬層外，可蝕刻用於像素電極之IZO或a-ITO。A seventh object of the present invention is to provide an etching liquid composition which can etch IZO or a-ITO for a pixel electrode in addition to a metal layer containing copper and titanium.
本發明之一態樣係提供一種含銅及鈦之金屬層用蝕刻液組成物，以該組成物總重為基準，包括5至20 wt%過硫酸鹽，0.01至2 wt%氟化合物，1至10 wt%選自於無機酸、無機酸鹽、及其混合物中之一者或多者，0.3至5 wt%環狀胺化合物，1至10 wt%選自於有機酸、有機酸鹽、及其混合物中之一者或多者，及剩餘為水。An aspect of the present invention provides an etchant composition for a metal layer containing copper and titanium, comprising 5 to 20 wt% persulfate, 0.01 to 2 wt% of a fluorine compound, based on the total weight of the composition, 1 Up to 10 wt% is selected from one or more of a mineral acid, a mineral acid salt, and a mixture thereof, 0.3 to 5 wt% of a cyclic amine compound, and 1 to 10 wt% is selected from an organic acid, an organic acid salt, One or more of its mixtures, and the remainder is water.
後文中將針對本發明作詳細說明。The invention will be described in detail hereinafter.
依據本發明之含銅及鈦之金屬層用蝕刻液組成物包括過硫酸鹽、氟化合物、選自於無機酸、無機酸鹽、及其混合物中之一者或多者、環狀胺化合物、選自於有機酸、有機酸鹽、及其混合物中之一者或多者、及水。The etchant composition for a metal layer containing copper and titanium according to the present invention includes a persulfate, a fluorine compound, one or more selected from the group consisting of inorganic acids, inorganic acid salts, and mixtures thereof, a cyclic amine compound, It is selected from one or more of an organic acid, an organic acid salt, and a mixture thereof, and water.
包含於依據本發明之蝕刻液組成物中之過硫酸鹽為含銅層蝕刻用之主要氧化劑，且該組成物總重為基準，其用量為5%至20 wt%，及較佳7%至18 wt%。當此種成分之含量落入於前述範圍內時，含銅層係以適量蝕刻，且蝕刻輪廓情況變優異。The persulfate contained in the composition of the etching solution according to the present invention is a main oxidizing agent for etching the copper-containing layer, and the total weight of the composition is based on the total amount of 5% to 20% by weight, and preferably 7% to 18 wt%. When the content of such a component falls within the above range, the copper-containing layer is etched in an appropriate amount, and the etching profile is excellent.
過硫酸鹽可選自於由過硫酸銨(APS)、過硫酸鈉(SPS)、及過硫酸鉀(PPS)所組成之群組。The persulfate may be selected from the group consisting of ammonium persulfate (APS), sodium persulfate (SPS), and potassium persulfate (PPS).
包含於依據本發明之蝕刻液組成物中之氟化合物主要係用來蝕刻含鈦、IZO、或a-ITO之一層，且以組成物總重為基準，係以0.01%至2 wt%及較佳0.05%至1 wt%之數量添加。當此種成分之含量係落入於前述範圍內時，含鈦層係以適量蝕刻，且蝕刻輪廓情況變優異。當此種成分之含量係低於前述下限時，含鈦層之蝕刻速率可能減低，且可能產生蝕刻殘質。相反地，當此種成分之含量係超過前述上限時，基板諸如玻璃及含矽絕緣層可能受損。The fluorine compound contained in the composition of the etching liquid according to the present invention is mainly used for etching a layer containing titanium, IZO, or a-ITO, and is 0.01% to 2 wt% based on the total weight of the composition. Add 0.05% to 1 wt% in quantity. When the content of such a component falls within the above range, the titanium-containing layer is etched in an appropriate amount, and the etching profile is excellent. When the content of such a component is lower than the aforementioned lower limit, the etching rate of the titanium-containing layer may be lowered, and etching residues may be generated. Conversely, when the content of such a component exceeds the aforementioned upper limit, the substrate such as glass and the ytterbium-containing insulating layer may be damaged.
氟化合物係指可解離成為氟離子或多原子氟離子之化合物，且係選自於由氟化銨、氟化鈉、氟化鉀、氟化氫銨、氟化氫鈉、及氟化氫鉀所組成之群組。The fluorine compound means a compound which can be dissociated into a fluoride ion or a polyatomic fluoride ion, and is selected from the group consisting of ammonium fluoride, sodium fluoride, potassium fluoride, ammonium hydrogen fluoride, sodium hydrogen fluoride, and potassium hydrogen fluoride.
包含於依據本發明之蝕刻液組成物中之選自於無機酸、無機酸鹽、及其混合物中之一者或多者可氧化與蝕刻含銅層，且可氧化含鈦層。以組成物總重為基準，選自於無機酸、無機酸鹽、及其混合物中之一者或多者可以1%至10 wt%及較佳2%至7 wt%之數量使用。當此種成分之含量係落入於前述範圍時，含銅層及含鈦層係以適量蝕刻，且蝕刻輪廓情況變優異。當此種成分之含量係低於前述下限時，蝕刻速率減低，蝕刻輪廓非期望地降級且產生蝕刻殘質。相反地，當此種成分之含量係超過前述上限時，則可能發生過蝕，光阻可能裂開而形成裂縫，因而蝕刻液可滲入裂縫，造成導線非期望地短路。One or more selected from the group consisting of inorganic acids, inorganic acid salts, and mixtures thereof in the composition of the etching liquid according to the present invention can oxidize and etch a copper-containing layer, and can oxidize the titanium-containing layer. One or more selected from the group consisting of inorganic acids, inorganic acid salts, and mixtures thereof may be used in an amount of from 1% to 10% by weight and preferably from 2% to 7% by weight based on the total weight of the composition. When the content of such a component falls within the above range, the copper-containing layer and the titanium-containing layer are etched in an appropriate amount, and the etching profile is excellent. When the content of such a component is lower than the aforementioned lower limit, the etching rate is lowered, the etching profile is undesirably degraded, and an etching residue is generated. Conversely, when the content of such a component exceeds the aforementioned upper limit, overetching may occur, and the photoresist may be cracked to form a crack, so that the etching liquid may penetrate into the crack, causing the wire to be undesirably short-circuited.
無機酸可選自於由硝酸、硫酸、磷酸、及過氯酸所組成之群組。The inorganic acid may be selected from the group consisting of nitric acid, sulfuric acid, phosphoric acid, and perchloric acid.
無機酸鹽可選自於由硝酸鹽、硫酸鹽、磷酸鹽、及過氯酸鹽所組成之群組。The mineral acid salt may be selected from the group consisting of nitrates, sulfates, phosphates, and perchlorates.
包含於依據本發明之蝕刻液組成物中之環狀胺化合物當蝕刻含銅層時可形成一輪廓。以組成物總重為基準，環狀胺化合物係以0.3%至5 wt%及較佳0.5%至3 wt%之數量使用。當此種成分之含量係落入於前述範圍時，可形成適當銅蝕刻速率及錐角，且可有效地控制蝕刻程度。The cyclic amine compound contained in the composition of the etching solution according to the present invention forms a profile when etching the copper-containing layer. The cyclic amine compound is used in an amount of from 0.3% to 5% by weight and preferably from 0.5% to 3% by weight based on the total weight of the composition. When the content of such a component falls within the foregoing range, an appropriate copper etching rate and taper angle can be formed, and the degree of etching can be effectively controlled.
環狀胺化合物係選自於由5-胺基四唑、甲苯基三唑、苯并三唑、及甲基三唑所組成之群組。The cyclic amine compound is selected from the group consisting of 5-aminotetrazole, tolyltriazole, benzotriazole, and methyltriazole.
含在依據本發明之蝕刻液組成物的選自於有機酸、有機酸鹽、及其混合物中之一者或多者係用來調整含銅層之錐角，及也使得隨著時間之經過處理板片數目增加時，蝕刻輪廓維持一致，來調整含銅層之蝕刻速率，因而確保達成期望的側蝕。以組成物總重為基準，選自於有機酸、有機酸鹽、及其混合物中之一者或多者之用量可以是1至10份重量比，及較佳為2%至7 wt%。當此種成分之含量落入於前述範圍以外時，隨著時間之經過處理板片數目增加時，輪廓難以維持一致，可能發生過蝕，非期望地增加側蝕。One or more selected from the group consisting of organic acids, organic acid salts, and mixtures thereof in the composition of the etching solution according to the present invention is used to adjust the taper angle of the copper-containing layer, and also to allow over time As the number of processing sheets increases, the etch profile remains the same to adjust the etch rate of the copper-containing layer, thereby ensuring that the desired side etch is achieved. The amount of one or more selected from the group consisting of organic acids, organic acid salts, and mixtures thereof may be from 1 to 10 parts by weight, and preferably from 2% to 7% by weight, based on the total weight of the composition. When the content of such a component falls outside the foregoing range, the profile is difficult to maintain uniform as the number of sheets processed over time increases, and over-etching may occur, undesirably increasing side erosion.
有機酸可選自於由乙酸、乙醇酸、檸檬酸、及草酸所組成之群組。The organic acid may be selected from the group consisting of acetic acid, glycolic acid, citric acid, and oxalic acid.
有機酸鹽可選自於由乙酸、乙醇酸、檸檬酸、及草酸所組成之群組中之任一者之鉀鹽、鈉鹽、及銨鹽所組成之群組The organic acid salt may be selected from the group consisting of a potassium salt, a sodium salt, and an ammonium salt of any one of the group consisting of acetic acid, glycolic acid, citric acid, and oxalic acid.
包含於依據本發明之蝕刻液組成物中之水為去離子水，其係適用於半導體製程處理，及其具有至少18百萬歐姆‧厘米(MΩ‧cm)之電阻係數。以組成物總重為基準，添加水作為剩餘，使得蝕刻液組成物總重變成100 wt%。The water contained in the composition of the etching solution according to the present invention is deionized water which is suitable for semiconductor processing and which has a resistivity of at least 18 million ohms ‧ centimeters (MΩ ‧ cm). Based on the total weight of the composition, water was added as the remainder so that the total weight of the etching liquid composition became 100 wt%.
除了前述成分外，依據本發明之蝕刻液組成物更可包含選自於蝕刻控制劑、界面活性劑、螯合劑及防蝕劑中之一者或多者。In addition to the foregoing components, the etchant composition according to the present invention may further comprise one or more selected from the group consisting of an etch control agent, a surfactant, a chelating agent, and an anticorrosive agent.
本發明之蝕刻液組成物係有效地用於蝕刻含銅及鈦之金屬層，特別為銅/鈦雙層。又復此種蝕刻液組成物係有效地用於蝕刻IZO或a-ITO。The etchant composition of the present invention is effective for etching a metal layer containing copper and titanium, particularly a copper/titanium double layer. This etchant composition is effectively used to etch IZO or a-ITO.
列舉下列實施例及測試例來舉例說明本發明，但非解譯為限制本發明，而可提供更明白瞭解本發明。The following examples and test examples are given to illustrate the invention, but are not to be construed as limiting the invention, but may provide a better understanding of the invention.
實施例1及比較例1：蝕刻液組成物之製備使用如下表1顯示之成分以所示數量，製備180公斤的蝕刻液組成物。Example 1 and Comparative Example 1: Preparation of Etchant Composition A 180 kg etchant composition was prepared in the amounts indicated using the components shown in Table 1 below.
APS：過硫酸銨 ABF：氟化氫銨APS: ammonium persulfate ABF: ammonium hydrogen fluoride
ATZ：5-胺基四唑 AA：乙酸銨ATZ: 5-aminotetrazole AA: ammonium acetate
AcOH：乙酸AcOH: acetic acid
測試例：蝕刻液組成物性質之評估Test example: Evaluation of the properties of the etchant composition
SiNx層沈積在玻璃上，銅層形成在SiNx層上，而鈦層形成在銅層上。光阻係以預定圖案施加在鈦層上，所形成的基板使用鑽石刀切割成550毫米x 650毫米，如此製作成試樣。A SiN x layer is deposited on the glass, a copper layer is formed on the SiN x layer, and a titanium layer is formed on the copper layer. The photoresist was applied to the titanium layer in a predetermined pattern, and the formed substrate was cut into 550 mm x 650 mm using a diamond knife, thus making a sample.
<蝕刻性質之評估><Evaluation of etching properties>
實施例1及比較例1各自之蝕刻液組成物導入噴灑型蝕刻裝置內(蝕刻器(ETCHER)(TFT)，得自西姆斯公司(SEMES))，然後溫熱至25℃溫度。隨後讓溫度達到30±0.1℃，接著進行蝕刻。總蝕刻時間係基於40% EPD設定。試樣放置於裝置內及噴灑以該組成物。蝕刻完成後，試樣以去離子水清潔及使用熱風乾燥器乾燥，其後光阻(PR)係使用光阻剝離劑去除。清潔與乾燥後，使用掃描電子顯微鏡(SEM)(S-4700，得自日立公司(HITACHI))評估蝕刻性質。結果顯示於下表2。The etching liquid compositions of each of Example 1 and Comparative Example 1 were introduced into a spray type etching apparatus (ETCHER (TFT), available from Sims (SEMES)), and then warmed to a temperature of 25 °C. The temperature was then brought to 30 ± 0.1 ° C, followed by etching. The total etch time is based on a 40% EPD setting. The sample is placed in the device and sprayed with the composition. After the etching is completed, the sample is cleaned with deionized water and dried using a hot air dryer, and then the photoresist (PR) is removed using a photoresist stripper. After cleaning and drying, the etching properties were evaluated using a scanning electron microscope (SEM) (S-4700, available from Hitachi, Ltd.). The results are shown in Table 2 below.
＜處理板片數目之評估＞<Evaluation of the number of processing plates>
使用實施例1及比較例1各自之蝕刻液組成物施行參考蝕刻，及更添加4000 ppm銅粉且完全溶解。隨後，再度進行蝕刻測試，及比較參考蝕刻，側蝕變化超過0.2微米之情況評估為不佳。Reference etching was performed using the etching liquid compositions of each of Example 1 and Comparative Example 1, and 4000 ppm of copper powder was further added and completely dissolved. Subsequently, the etching test was again performed, and the reference etching was compared, and the case where the side etching change exceeded 0.2 μm was evaluated as poor.
＜蝕刻性質＞<etching property>
◎：優異(CD扭斜：1微米，錐角：40度至60度)◎: Excellent (CD skew: 1 micron, cone angle: 40 degrees to 60 degrees)
○：良好(CD扭斜：1.5微米，錐角：30度至60度)○: Good (CD skew: 1.5 microns, cone angle: 30 degrees to 60 degrees)
Δ：普通(CD扭斜：2微米，錐角：30度至60度)Δ: normal (CD skew: 2 microns, cone angle: 30 degrees to 60 degrees)
X：不佳(金屬層受損及殘質形成)X: Poor (damage of metal layer and formation of residue)
＜處理板片數目＞<Number of processed sheets>
◎：優異(隨著時間之經過處理板片數目增加時側蝕變化在0.2微米以內)◎: Excellent (the side etching changes within 0.2 μm when the number of sheets processed increases with time)
X：不佳(隨著時間之經過處理板片數目增加側蝕變化超過0.2微米)X: Poor (the number of sheets processed increases over time, the side erosion changes more than 0.2 microns)
從表2可明顯得知：當使用本發明實施例1之組成物時，蝕刻性質及隨著時間之經過處理板片數目增加時之性質二者皆優異。但既不含銨鹽也不含有機酸之比較例1之組成物結果導致就處理板片數目而言之性質不佳。As is apparent from Table 2, when the composition of Example 1 of the present invention was used, both the etching property and the property when the number of sheets processed over time were increased were excellent. However, the composition of Comparative Example 1 which contained neither ammonium nor organic acid resulted in poor properties in terms of the number of sheets processed.
如前文所述，本發明提供一種用於含銅及鈦之金屬層之蝕刻液組成物。依據本發明，蝕刻液組成物可濕蝕刻含銅及鈦之金屬層，及更明確言之，銅/鈦雙層，如此簡化蝕刻處理步驟及改良生產力。又依據本發明，蝕刻液組成物具有快速蝕刻速率且允許形成均一蝕刻，如此提供優異蝕刻性質。又依據本發明，蝕刻液組成物不會損壞設備且蝕刻時無需昂貴設備，可有利地施用至大型顯示面板，如此產生經濟效益。又依據本發明，除了含銅及鈦之金屬層外，蝕刻液組成物可蝕刻用於像素電極之IZO或a-ITO。又，於含銅及鈦之金屬層用於源/汲電極而IZO或a-ITO用於像素電極之情況下，依據本發明之蝕刻液組成物可一起蝕刻源/汲電極及像素電極。又依據本發明，蝕刻液組成物即便未含過氧化氫及/或臭氧仍可達成針對銅之快速蝕刻速率。As described above, the present invention provides an etchant composition for a metal layer containing copper and titanium. In accordance with the present invention, the etchant composition wet etches a metal layer comprising copper and titanium, and more specifically, a copper/titanium double layer, which simplifies the etching process steps and improves productivity. Still in accordance with the present invention, the etchant composition has a fast etch rate and allows for the formation of a uniform etch, thus providing excellent etch properties. Still further in accordance with the present invention, the etchant composition does not damage the device and requires no expensive equipment for etching, and can be advantageously applied to a large display panel, which is economical. According to the present invention, in addition to the metal layer containing copper and titanium, the etching liquid composition can etch IZO or a-ITO for the pixel electrode. Further, in the case where a metal layer containing copper and titanium is used for the source/germanium electrode and IZO or a-ITO is used for the pixel electrode, the etching liquid composition according to the present invention can etch the source/germanium electrode and the pixel electrode together. Still further in accordance with the present invention, the etchant composition achieves a fast etch rate for copper even without hydrogen peroxide and/or ozone.
雖然已經為了例示說明目的而揭示本發明之多個態樣及具體例，但熟諳技藝人士瞭解可未悖離如隨附之申請專利範圍揭示之本發明之範圍及精髓而可能做出多項修改、添加、及取代。While the invention has been described with respect to the embodiments of the embodiments of the present invention Add, and replace.
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| KR20140013310A (en) | 2012-07-23 | 2014-02-05 | 삼성디스플레이 주식회사 | Etchant and manufacturing method of metal wiring and thin film transistor array panel using the same |
| KR102048022B1 (en) * | 2012-12-18 | 2019-12-02 | 주식회사 동진쎄미켐 | Composition for etching metal layer and method for etching using the same |
| KR102175313B1 (en) * | 2013-09-24 | 2020-11-09 | 삼성디스플레이 주식회사 | Etchant and fabrication method of metal wiring and thin film transistor substrate using the same |
| KR102160286B1 (en) * | 2013-11-04 | 2020-09-28 | 동우 화인켐 주식회사 | Manufacturing method of an array substrate for liquid crystal display |
| KR102282956B1 (en) * | 2015-03-09 | 2021-07-28 | 동우 화인켐 주식회사 | Etching solution composition and manufacturing method of an array substrate for Liquid crystal display using the same |
| KR101978389B1 (en) * | 2017-06-23 | 2019-05-14 | 동우 화인켐 주식회사 | Etchant composition and manufacturing method of an array substrate for image display device |
| KR102487940B1 (en) * | 2018-03-19 | 2023-01-16 | 삼성디스플레이 주식회사 | Etchant composition, and method for manufacturing metal pattern and array substrate using the same |
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2010
- 2010-04-29 KR KR1020100039824A patent/KR20110120422A/en active Application Filing
-
2011
- 2011-04-29 TW TW100115188A patent/TWI522495B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20110120422A (en) | 2011-11-04 |
| TW201142084A (en) | 2011-12-01 |
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