TWI513560B - - Google Patents

Info

Publication number
TWI513560B
TWI513560B TW102130164A TW102130164A TWI513560B TW I513560 B TWI513560 B TW I513560B TW 102130164 A TW102130164 A TW 102130164A TW 102130164 A TW102130164 A TW 102130164A TW I513560 B TWI513560 B TW I513560B
Authority
TW
Taiwan
Application number
TW102130164A
Other languages
Chinese (zh)
Other versions
TW201507829A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW102130164A priority Critical patent/TW201507829A/zh
Publication of TW201507829A publication Critical patent/TW201507829A/zh
Application granted granted Critical
Publication of TWI513560B publication Critical patent/TWI513560B/zh

Links

TW102130164A 2013-08-23 2013-08-23 升降取送裝置 TW201507829A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW102130164A TW201507829A (zh) 2013-08-23 2013-08-23 升降取送裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102130164A TW201507829A (zh) 2013-08-23 2013-08-23 升降取送裝置

Publications (2)

Publication Number Publication Date
TW201507829A TW201507829A (zh) 2015-03-01
TWI513560B true TWI513560B (https=) 2015-12-21

Family

ID=53186026

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102130164A TW201507829A (zh) 2013-08-23 2013-08-23 升降取送裝置

Country Status (1)

Country Link
TW (1) TW201507829A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116153845B (zh) * 2023-02-27 2023-10-31 东莞市智赢智能装备有限公司 一种晶圆机器人

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200603966A (en) * 2004-07-01 2006-02-01 Daihen Corp Transfer robot
TWM310796U (en) * 2006-09-14 2007-05-01 Sanwa Engineering Corp Multi-joint mechanical arm structure
TW201208835A (en) * 2010-07-16 2012-03-01 Nidec Sankyo Corp Industrial robot
TWM454064U (zh) * 2012-11-29 2013-05-21 Schmid Automation Asia Co Ltd 馬達驅動升降模組

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200603966A (en) * 2004-07-01 2006-02-01 Daihen Corp Transfer robot
TWM310796U (en) * 2006-09-14 2007-05-01 Sanwa Engineering Corp Multi-joint mechanical arm structure
TW201208835A (en) * 2010-07-16 2012-03-01 Nidec Sankyo Corp Industrial robot
TWM454064U (zh) * 2012-11-29 2013-05-21 Schmid Automation Asia Co Ltd 馬達驅動升降模組

Also Published As

Publication number Publication date
TW201507829A (zh) 2015-03-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees