TWI503519B - - Google Patents
Info
- Publication number
- TWI503519B TWI503519B TW103123877A TW103123877A TWI503519B TW I503519 B TWI503519 B TW I503519B TW 103123877 A TW103123877 A TW 103123877A TW 103123877 A TW103123877 A TW 103123877A TW I503519 B TWI503519 B TW I503519B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103123877A TW201602514A (en) | 2014-07-11 | 2014-07-11 | Optical measurement method of film thickness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103123877A TW201602514A (en) | 2014-07-11 | 2014-07-11 | Optical measurement method of film thickness |
Publications (2)
Publication Number | Publication Date |
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TWI503519B true TWI503519B (en) | 2015-10-11 |
TW201602514A TW201602514A (en) | 2016-01-16 |
Family
ID=54851759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103123877A TW201602514A (en) | 2014-07-11 | 2014-07-11 | Optical measurement method of film thickness |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201602514A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11579099B2 (en) | 2019-10-14 | 2023-02-14 | Industrial Technology Research Institute | X-ray reflectometry apparatus and method thereof for measuring three dimensional nanostructures on flat substrate |
US11867595B2 (en) | 2019-10-14 | 2024-01-09 | Industrial Technology Research Institute | X-ray reflectometry apparatus and method thereof for measuring three dimensional nanostructures on flat substrate |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5147125A (en) * | 1989-08-24 | 1992-09-15 | Viratec Thin Films, Inc. | Multilayer anti-reflection coating using zinc oxide to provide ultraviolet blocking |
TWI357977B (en) * | 2007-03-23 | 2012-02-11 | Ind Tech Res Inst | Method for measuring a refractive index and thickn |
TWI386617B (en) * | 2007-12-31 | 2013-02-21 | Ind Tech Res Inst | Reflective measurement method of film thickness by spectral image system |
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2014
- 2014-07-11 TW TW103123877A patent/TW201602514A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5147125A (en) * | 1989-08-24 | 1992-09-15 | Viratec Thin Films, Inc. | Multilayer anti-reflection coating using zinc oxide to provide ultraviolet blocking |
TWI357977B (en) * | 2007-03-23 | 2012-02-11 | Ind Tech Res Inst | Method for measuring a refractive index and thickn |
TWI386617B (en) * | 2007-12-31 | 2013-02-21 | Ind Tech Res Inst | Reflective measurement method of film thickness by spectral image system |
Also Published As
Publication number | Publication date |
---|---|
TW201602514A (en) | 2016-01-16 |