TWI502217B - Fabricating method, fabricating apparatus, assembling apparatus and system for electrowetting display and substrate thereof - Google Patents

Description

Electrowetting display and substrate thereof manufacturing method, device, assembly device and system

The invention relates to a manufacturing method, a device, an assembly device and a system, and in particular to an electrowetting display and a substrate manufacturing method, device, assembly device and system thereof.

Electrowetting display technology (EWD) has the advantages of energy saving, low cost and high image quality. It also has the advantages of high transmittance and simple structure, and the power consumption can be reduced by 50% compared with the traditional display. It is the most popular next-generation display for reflective and transmissive displays.

The principle of electrowetting displays is to manipulate the electrowetting behavior of polar liquids on hydrophobic dielectric films. When no voltage is applied to the component, the polar liquid will assume a contracted state on the hydrophobic dielectric surface to minimize its free energy (Gibbs Free Energy); when a voltage is applied to the component, it will be on the dielectric layer. Generating a charge distribution that attracts polar liquid affinity and the polar liquid exhibits an open state, The phenomenon that the free energy can reach the minimum energy again is called electrowetting. The operation of the electrowetting display is to use the electric wetting force to drive the pixel switch. Specifically, a barrier structure 11 is formed on a hydrophobic dielectric film 10 to define a pixel range, and the ink 12 is filled with a color 12 after the pixel is filled with the polar liquid 13 without applying a voltage to the device. The ink 12 has a better affinity with the hydrophobic dielectric film 10 and is tiled in the pixel to form a dark state of the display as shown in FIG. 22A; when a voltage is applied to the element, the polar liquid 13 is in contact with the hydrophobic dielectric due to electrowetting. The film 10 pushes the ink 12 to the corners of the pixels to form a bright state of the display, as shown in Figure 22B. Since the electrowetting display does not need to use a polarizing film to achieve the effect of controlling the pixel switch, it has the advantages of high transmittance and simple structure.

Most of the electrowetting display processes are compatible with traditional liquid crystal display manufacturing methods. However, high-precision ink coating and polar liquid assembly technology are still to be developed. Ink coating uniformity problems and bubbles may remain between the panels when assembled. The key to this two processes. For example, since the ink used in the electrowetting display is mostly a material having high volatility and low viscosity, during the ink coating process, the thickness of the ink on the substrate may be uneven due to evaporation of the ink. Alternatively, having residual bubbles in the electrowetting display can also affect the display.

One embodiment of the present invention provides an apparatus for electrowetting a display substrate, the electrowetting display substrate produced having a uniform ink thickness.

An embodiment of the present invention provides an assembly device for an electrowetting display substrate, It can eliminate residual bubbles on the substrate of the electrowetting display.

An embodiment of the present invention provides an assembly system that can assemble an electrowetting display having a good display effect.

One embodiment of the present invention provides a method of fabricating an electrowetting display substrate that can uniform the thickness of the ink on the electrowetting display substrate.

One embodiment of the present invention provides a method of fabricating an electrowetting display that can effectively improve the display quality of an electrowetting display.

One embodiment of the present invention provides a manufacturing apparatus for an electrowetting display substrate that includes a coating device and a vapor supply device. The coating apparatus includes a platform adapted to carry a first substrate, and a first fluid supply unit disposed above the platform for placing the first fluid on the first substrate. The vapor supply device provides a vapor environment, wherein the first fluid supply unit supplies the first fluid to the first substrate while the first fluid supply unit moves relative to the platform in a supply direction, and the first substrate has at least a first The portion of the fluid is in a vapor environment.

Another embodiment of the present invention provides an apparatus for electrowetting a display substrate, comprising: an assembly slot, a first substrate transfer module, a first substrate carrier, a second substrate clamping module, a second substrate carrier, and a fluid flow The generating unit and the registration press device. The first substrate transfer module is located on one side of the grouping groove for transporting the first substrate into the grouping groove. The first substrate carrier is disposed in the grouping groove for carrying the first substrate. The second substrate clamping module is disposed on the other side of the grouping slot for transporting the second substrate into the grouping slot. The second substrate carrier is configured to carry the second substrate. The fluid flow generating unit is located within the set of slots. The alignment pressing device is located on the first substrate carrier and the second substrate carrier Between the first substrate and the second substrate, the first substrate and the second substrate are aligned.

Yet another embodiment of the present invention provides an assembly system for an electrowetting display, comprising the above-described apparatus for manufacturing an electrowetting display substrate and an assembly device for electrowetting the display substrate. The manufacturing apparatus of the electrowetting display substrate and the assembly apparatus of the electrowetting display substrate are disposed in close proximity.

A further embodiment of the present invention provides a method of manufacturing an electrowetting display, comprising providing a first substrate, and coating a first fluid on a first substrate in a supply direction, and a portion of the first substrate provided with the first fluid Entering a vapor environment wherein the vapor environment is formed by a first fluid, a solvent used by the first fluid, or a material that is miscible with the first fluid but does not chemically react.

Another embodiment of the present invention provides a method of fabricating an electrowetting display, comprising providing a first substrate having a first fluid, providing a second substrate having a set of elevations, providing a set of slots having a second fluid, wherein the second fluid a fluid is immiscible, the first substrate and the second substrate enter the second fluid to provide a flowing second fluid, and the flowing second fluid flows through the assembly surface of the second substrate to seal the first substrate and the second substrate. The second fluid is positioned between the first fluid and the second substrate.

Yet another embodiment of the present invention provides a method of fabricating an electrowetting display, comprising providing a first substrate, and providing a first fluid on a first substrate in a providing direction, and a portion of the first substrate provided with the first fluid After being supplied with the first fluid, directly entering the second fluid of the grouping trough, wherein the first fluid is immiscible with the second fluid, providing a second substrate having a stacking surface, placing the second substrate into the second fluid and making the group facade After aligning with the first substrate, the second fluid is located between the first fluid and the second substrate.

In order to make the invention more apparent, the following detailed description of the embodiments and the accompanying drawings are set forth below.

100‧‧‧First substrate

110‧‧‧ Coating device

112‧‧‧ platform

112a‧‧‧bearing surface

114‧‧‧First fluid supply unit

120‧‧‧Vapor environment

125‧‧‧Vapor supply unit

130‧‧‧ cavity

130a‧‧‧ sealed cavity

132‧‧‧Auxiliary side wall

132a‧‧‧The belly

132b‧‧‧ cover

132c‧‧‧ box

134‧‧‧Rolling blinds

140‧‧‧ Coating liquid solvent vapor generator

150‧‧‧Setting trough

150a‧‧‧ Inside wall

152‧‧‧Side sidewalls

The bottom wall of the 154‧‧‧ group

156‧‧ ‧ partition

162‧‧‧Clamp

164‧‧‧Roller conveyor belt

166‧‧‧ bearing seat

170‧‧‧soft board

172‧‧‧ Shock Absorbing Sponge

200‧‧‧second substrate

202‧‧‧Facade

210‧‧‧Box glue

215‧‧‧Spray device

220‧‧‧ mask

221‧‧‧ cleaning unit

222‧‧‧ Film

230‧‧‧ suction or scraping device

300‧‧‧assembly equipment

300a‧‧‧First substrate loading area

300b‧‧‧Second substrate defoaming zone

300c‧‧‧Compression position area

300d‧‧‧Second substrate loading area

300e‧‧‧Second substrate temporary release area

310‧‧‧Second substrate clamping module

320‧‧‧Exhaust mask

330‧‧‧ Fluid flow generation unit

332‧‧‧Water pump

332a‧‧‧ Hole

332b, 336‧‧‧ nozzle

334‧‧‧ Impeller

340‧‧‧ Robotic arm

342‧‧‧Rotating mechanism

350‧‧‧First substrate carrier

360‧‧‧Second substrate carrier

362‧‧‧上上行压平台

364‧‧‧ Lower press platform

370‧‧‧ alignment press

400‧‧‧Manufacture equipment

500‧‧‧assembly system

S100~S136‧‧‧Steps

D1‧‧‧ directions

G‧‧‧ gap

A‧‧‧ bubble

S‧‧‧Interstitial

F1‧‧‧First fluid

F2‧‧‧Second fluid

R1‧‧‧ display area

R2‧‧‧ non-display area

1 is a schematic illustration of an assembly system for an electrowetting display.

2 through 5 and 5A-5B are schematic views of possible embodiments of the vapor supply device of Fig. 1, respectively.

6A-6C are schematic illustrations of possible embodiments of a transfer module for clamping a first substrate into a second fluid in the assembly apparatus of FIG. 1.

7 is a schematic view of placing a soft board in the grouping slot in the assembly apparatus of FIG. 1 to guide the first substrate into the second fluid.

FIG. 8A is a schematic view showing the placement of a shock absorbing sponge in the grouping groove in the assembly apparatus of FIG. 1. FIG.

Fig. 8B is a schematic view showing a wall surface of the inner groove wall of the grouping groove in the assembling apparatus of Fig. 1 as a rough surface.

Fig. 9A is a schematic view showing bubbles on a group of the second substrate.

9B is a partial schematic view of an assembly device of an electrowetting display.

Figure 9C is a schematic illustration of an assembly device for an electrowetting display.

9D is a cross-sectional view of the assembly device of the electrowetting display of FIG. 9C.

FIG. 10 is a schematic diagram of the assembly device of the electrowetting display of FIG. 9B further provided with a suction mask.

11A-11B and 12 are schematic views of possible embodiments of a fluid flow generating unit, respectively.

13 is a flow chart of a method of fabricating an electrowetting display using the assembly system of FIG. 1.

14A-14C are schematic diagrams of clamping a second substrate into a second fluid using a second substrate clamping module, and positioning units of the second substrate carrier are aligned with the second substrate.

15A is a schematic view of the glue dispensing device drawing a sealant after the first substrate enters the second fluid.

FIG. 15B is a schematic view of the glue discharging device drawing the sealant in the first substrate in a vapor environment.

16A-16D are one embodiment of a first fluid removal device removing a first fluid located on a non-display area of a first substrate.

17A-17C are another embodiment of the first fluid removal device removing the first fluid located on the non-display area of the first substrate.

18A-18D are still another embodiment of removing a first fluid located on a non-display area of a first substrate.

19 is a partial schematic view of an assembly apparatus of an electrowetting display according to a second embodiment of the present invention.

20A-20C are schematic views of another portion of the assembly apparatus of the electrowetting display of the present invention.

21 is a schematic diagram of another embodiment of an assembly device for an electrowetting display.

Fig. 22A is a view showing a state in which an electrowetting display is not applied with a voltage.

Fig. 22B is a view showing a state in which an electrowetting display is applied with a voltage.

Hereinafter, a manufacturing apparatus, a manufacturing method, and an assembly apparatus, system, and manufacturing method of an electrowetting display substrate are proposed. It should be noted that the terms of the above-mentioned orientations, such as up, down, left, and right, are described in terms of a specific component described above and below; after the reference point is changed, the component The associated location may also change.

[First Embodiment]

1 is a schematic illustration of an assembly system for an electrowetting display. Referring to FIG. 1, the electrowetting display assembly system 500 includes an assembly device 300 and a manufacturing device 400, wherein the assembly device 300 and the manufacturing device 400 can be disposed in close proximity. The manufacturing apparatus 400 includes at least one coating device 110 and a vapor supply device 125 for providing a vapor environment 120. The coating device 110 includes a platform 112 adapted to carry the first substrate 100 and a first fluid supply unit 114, wherein A fluid supply unit 114 can be disposed, for example, above the platform 112 for providing the first substrate F with the first fluid F1. When the first fluid supply unit 114 moves relative to the platform 112 in a supply direction D1 and the first fluid F1 is supplied to the first substrate 100, the portion of the first substrate 100 on which the first fluid F1 has been disposed may be located in the vapor. Environment 120.

In the present embodiment, the vapor supply device 125 is a cavity 130 having at least one opening, and the cross section of the cavity 130 in the providing direction D1 may be, for example, a dome shape. For example, the cavity 130 is formed by a pair of auxiliary sidewalls 132 disposed on both sides of the platform 112 parallel to the supply direction D1 and a roller blind 134 positioned above the platform 112. The first fluid supply unit 114 is suspended. On the auxiliary side wall 132, and the roller blind 134 is connected to the first fluid supply unit 114, the first fluid supply unit 114 is configured to move relative to the first substrate 100 in the supply direction D1 to elongate the roller blind 134 to form the cavity 130, such as Figure 2 shows. The width of the roller blind 134 is substantially equal to the distance between the two auxiliary side walls 132. The width of the roller blind 134 described herein is substantially equal to the distance between the two auxiliary side walls 132, meaning that the width of the roller blind 134 includes two The distance between the auxiliary side walls 132 is completely equal, slightly larger or slightly smaller than the distance between the two auxiliary side walls 132, etc., so that the roller blind 134 and the auxiliary side wall 132 form a relatively complete cavity 130 to provide an effective cover. The first substrate 100 is provided with a portion of the preferred vapor environment 120 of the first fluid F1. The manner in which the vapor environment 120 is formed includes soaking the roller blind 134 through the coating liquid solvent and keeping the roller blind 134 moist, or using a separately provided coating liquid solvent vapor generator 140 (shown in FIG. 5B) to apply the coating liquid. The vapor of the solvent is introduced into the cavity 130 and can be selected according to actual needs. The coating liquid solvent is, for example, a first fluid F1, a solvent used for the first fluid F1, or a material that is miscible with the first fluid F1 but does not chemically react, and for convenience of reading, the following descriptions are all based on the coating solvent. The solvent used for the first fluid F1 and the first fluid F1 described above or a material which is miscible with the first fluid F1 but does not chemically react. For example, the solvent used in the first fluid F1 is a C ₆ -C ₁₆ alkane, naphthenic, aromatic, aliphatic or eucalyptus oil. In one embodiment, the first fluid F1 can be, for example, decane, and the solvent used to form the vapor environment 120 can, for example, use dodecane, wherein decane and dodecane are mutually soluble, but do not produce a chemical reaction.

In another embodiment, a bellows 132a may be utilized instead of the auxiliary sidewalls 132 and the arrangement of the roller blinds 134, as shown in FIG. The bellows 132a may be coupled to the first fluid supply unit 114, and the bellows 132a may pull the bellows 132a to elongate to form the cavity 130 as the first fluid supply unit 114 moves relative to the first substrate 100 along the supply direction D1. The manner of forming the vapor environment 120 in the bellows 132a also includes soaking the bellows 132a through the coating liquid solvent and keeping the bellows 132a moist to form the vapor environment 120, or using a separately provided coating liquid solvent vapor generator 140 to apply the coating liquid solvent. The vapor passes into the bellows 132a.

In still another embodiment, the cavity 130 may also be formed by a box or cover 132b of a ㄇ type, and the cover 132b is illustrated in FIG. The cover 132b can be connected to the first fluid supply unit 114 and moved by the first fluid supply unit 114 to move relative to the platform 112. The additionally provided liquid solvent vapor generator 140 can be used to pass the vapor of the coating solvent into the cavity. A vapor environment 120 is formed in the body 130. The length of the cover 132b in the supply direction D1 is, for example, the same as or greater than the length of the first substrate 100 in the supply direction D1, and the first substrate 100 on which the first fluid F1 has been disposed can be ensured to be in the vapor environment 120, The first fluid F1 is prevented from volatilizing, so that the first fluid F1 on the first substrate 100 is maintained in a uniform thickness. The length of the sidewall of the cover 132b in the height direction may be greater than the distance from the top wall to the first substrate 100, and the sidewall of the cover 132b may extend below the first substrate 100, and may be disposed on the platform 112 or below the platform 112. There are a plurality of conveying zones or tracks arranged in a roller to facilitate the first fluid supply unit 114 to move the cover 132b back and forth in the providing direction D1. move. The arrangement of the transport zones or the tracks arranged in a roller can be changed depending on the design requirements, and is not limited by the manner of the embodiment.

In another embodiment of FIG. 5A, the cavity 130 may also be formed by a box 132c that is connectable to the first fluid supply unit 114 and that is driven by the first fluid supply unit 114 to be opposite to the platform. 112 moves. Different from the cover 132b shown in FIG. 4, the surrounding side wall of the casing 132c may also have a gap G with the bearing surface 112a of the platform 112. The gap G ranges from about 0.1 mm to 5 mm, preferably about 0.5mm to 2mm. Although there is such a gap G between the opposite side walls of the casing 132c and the bearing surface 112a, the box can also be made when the flux of the vapor flowing into the casing 132c is the same as the flux of the vapor leaking from the gap G. The vapor inside the body 132c is stabilized to achieve the effect of preventing the volatilization of the first fluid F1.

In a further embodiment, as shown in FIG. 5B, the vapor supply device 125 can be a sealed cavity 130a, and the platform 112 is disposed within the sealed cavity 130a. The two sides of the platform 112 may be further provided with a pair of auxiliary side walls 132 parallel to the supply direction D1, and the first fluid supply unit 114 may be hung on the auxiliary side wall 132, and the first fluid supply unit 114 and the platform 112 are provided in the direction D1. The relative movement of the first fluid providing unit 114 and the platform 112 in the providing direction D1 includes the platform 112 moving, the first fluid providing unit 114 not moving, or the platform 112 not moving, and the first fluid providing unit 114 moving. Or the platform 112 and the first fluid supply unit 114 move in opposite directions, and can be designed according to actual needs. The coating chamber 130a may be provided with a coating liquid solvent generator 140 in communication with the sealing chamber 130a for introducing the vapor of the coating solvent.

In one embodiment, the vapor in the vapor environment 120 may be the same material as the solvent used in the first fluid F1, such as dodecane, tetradecane, decane or eucalyptus oil. (silicon oil), or it may be a different material, but its vapor does not react with the first fluid F1. As described above, the solvent for the coating liquid is referred to as the solvent used for the first fluid F1 and the first fluid F1 or the material which is miscible with the first fluid F1 but does not react chemically. The coating liquid solvent vapor generator 140 generates steam in a heating mode, an ultrasonic vibration mode, or a nitrogen gas is introduced into a container containing a coating liquid solvent, and the gas in the container is collected as a solvent of the coating liquid solvent, or Each method can also be used in combination. At a typical room temperature, the vapor pressure of the vapor environment 120 in the vapor supply unit 125 is between about 5 Pa and 300 Pa.

In an embodiment, please continue to refer to FIG. 1. In addition to the manufacturing apparatus 400 for manufacturing the first substrate 100 of the electrowetting display, there is further provided an assembly apparatus 300 including at least one set of vertical slots 150, and the vapor environment 120 is located at A fluid supply unit 114 is disposed between the assembly tank 150 and the assembly tank 150 is provided with a second fluid F2 that is not miscible with the first fluid F1 on the first substrate 100. For example, the first fluid F1 is a lipophilic ink or a non-polar solution, and the second fluid F2 can be water or a polar solution in which the ink is not miscible with water and does not react chemically.

In the present embodiment, the assembly groove 150 is inclined to the bottom wall 154 of the assembly groove 150 relative to the side wall 152 of the platform 112 such that the first substrate 100 can enter the assembly groove 150 along the inclined side wall 152. In other embodiments, it is also possible to utilize a clamp 162 (shown in FIG. 6A) that can clamp the first substrate 100, wherein the clamp 162 The first arm substrate 100 may be clamped by the robot arm or the first substrate 100 may be vacuum-adsorbed, the roller conveyor belt 164 of the first substrate 100 may be conveyed by rolling (as shown in FIG. 6B ) or the first substrate 100 may be adsorbed to be transported. The carrier module 166 (shown in FIG. 6C) of the first substrate 100 transports the module to feed the first substrate 100 into the second fluid F2 of the grouping groove 150.

In another embodiment, as shown in FIG. 7, the soft board 170 may be placed in the grouping groove 150, and one side of the soft board 170 bears against the side wall 152 of the grouping groove 150, and the soft board 170 is further One side bears against the bottom wall 154 of the assembly groove 150, and the soft plate 170 can be used to guide the first substrate 100 to slowly slide into the assembly groove 150 when the first substrate 100 is immersed in the second fluid F2.

In the above various embodiments, the first substrate 100 is immersed in the second fluid F2 in the assembly groove 150, and the liquid level is the horizontal reference line, and the angle at which the first substrate 100 is immersed in the second fluid F2 is, for example, 5~. 90 degrees; and the speed at which the first substrate 100 is immersed in the second groove F2 in the grouping groove 150 is, for example, 1 to 30 cm/sec, preferably 10 to 20 cm/sec, and more preferably 13 to 16 cm. /second. The angle and the speed of the second fluid F2 in which the first substrate 100 is immersed in the grouping groove 150 can be changed according to actual needs. This should be a change made by the person in the field according to the contents of the present specification. I will not repeat them here.

In this embodiment, at least one shock absorbing device for absorbing water ripples may be disposed on the inner groove wall 150a of the grouping groove 150, such as a shock absorbing sponge 172 having a non-smooth surface (as shown in FIG. 8A), or The wall surface of the inner groove wall 150a of the grouping groove 150 has a rough surface (as shown in FIG. 8B), and the shock absorbing sponge 172 and the rough surface are both The corrugation of the second fluid F2 can be eliminated to prevent the ripple back of the second fluid F2 from affecting the first fluid F1 provided on the first substrate 100.

9A is a schematic view showing a bubble on a group surface of a second substrate, and FIG. 9B is a partial schematic view of an assembly device of the electrowetting display, FIG. 9C is a schematic diagram of an assembly device of the electrowetting display, and FIG. 9D is an electrowetting display of FIG. 9C. A schematic cross-sectional view of the assembly device. Referring to FIG. 9A, FIG. 9B and FIG. 9C, the assembly device 300 of the electrowetting display further includes an assembly groove 150 in which the second fluid F2 is disposed and a second substrate clamping mold for clamping the second substrate 200. The group 310 has a stacking groove 150 shared with and connected to the grouping groove 150 into which the first substrate 100 enters, and a plurality of partitions 156 are disposed to divide the plurality of partitions into a plurality of regions. If the grouping surface 202 of the second substrate 200 is immersed in the second fluid F2 toward the liquid surface of the second fluid F2 of the grouping groove 150 and parallel to the liquid surface of the second fluid F2, since the second substrate 200 is provided with The spacer S is in the second fluid F2 from the atmospheric environment, and is likely to cause the bubble A to be on the group surface 202 of the second substrate 200 or between the spacers S, and may be disposed second above the grouping groove 150. The substrate clamping module 310 allows the second substrate 200 to be inclined to the liquid surface of the second fluid F2 and the grouping surface 202 of the second substrate 200 faces the grouping groove 150 (ie, the grouping surface 202 faces downward, as shown in FIG. 9A). The method is immersed in the second fluid F2. When the grouping surface 202 of the second substrate 200 faces the liquid surface of the second fluid F2 and enters the second fluid F2 with the liquid surface of the second fluid F2 inclined, the bubble A adhering to the grouping surface 202 of the second substrate 200 may The interface between the air and the second fluid F2 is directionally pressed by the second fluid F2 to escape outside the second substrate 200. The second substrate clamping module 310 can be a mechanical arm and an adsorption platform (as shown in FIG. 9B). The adsorption platform shown or other components or modules that can hold the second substrate 200.

In addition, in an embodiment, the assembly device 300 of the electrowetting display may further include an air extraction mask 320 (shown in FIG. 10). The air extraction mask 320 is disposed on the second substrate clamping module 310 and covered. The second substrate 200 is covered, and the second substrate 200 can be evacuated before the second substrate 200 is immersed in the second fluid F2, and the air bubbles A on the liquid surface of the second fluid F2 are reinforced by an external force.

In this embodiment, in order to enhance the effect of the second substrate 200 having been immersed in the second fluid F2 to eliminate the residual air bubbles A, a fluid flow generating unit 330 may be further disposed in the grouping groove 150 for flowing the second fluid F2. The bubble A located at the group facade 202 is moved to cause the bubble A to escape. The fluid flow generating unit 330 may be configured as shown in FIG. 11A, and includes a water pump 332, a tunnel 332a, and a nozzle 332b that communicates with the water pump 332 through the tunnel 332a; or a rotating impeller 334 in the manner shown in FIG. 11B. The configuration may be composed of a water pump 332 and a nozzle 336 as shown in FIG. The shape of the nozzle 336 may be a circular shape or a slit type or the like. The constituent elements of the fluid flow generation unit 330 described above are not limited to the elements exemplified in the embodiment, and may be changed and combined according to actual needs. In one embodiment, the fluid flow generating unit 330 preferably causes the second fluid F2 to flow in a laminar flow, thereby preventing the second fluid F2 from generating a vortex during the flow to initiate the generation of the bubble A.

Continuing to refer to FIG. 9C and FIG. 9D simultaneously, in the embodiment, the assembly device 300 of the electrowetting display further includes a first substrate carrier 350 located in the grouping groove 150, and the first substrate carrier 350 is adjacent to the coating device 110. The first substrate 100 is disposed after the first substrate 100 enters the assembly slot 150, and the first substrate carrier 350 is disposed. A positioning unit (not shown) may be included for aligning the first substrate 100. Then, the first substrate 100 is transferred from the first substrate loading area 300a to the pressing position area 300c. The transmission mode is not particularly limited, and may be another robot arm or another transmission module, which may be appropriately adapted according to actual needs. Make changes. The second substrate clamping module 310 then clamps the second substrate 200 into the grouping groove 150 to align the first substrate 100 and the second substrate 200 in the pressing position region 300c.

In this embodiment, a plurality of partition plates 156 are disposed in the grouping groove 150 of the assembly device 300, and the assembly groove 150 can be divided into a first substrate loading area 300a, a second substrate loading area 300d, and a first substrate loading area. The pressing position area 300c between the 300a and the second substrate carrying-in area 300d and the second substrate defoaming area 300b. The first substrate carrier 350 is located in the first substrate carrying-in area 300a. The second substrate carrier 360 is located in the second substrate loading area 300d. In another embodiment, the second substrate carrier 360 may also be located in the second substrate temporary release area 300e (shown in FIG. 21), and the second substrate. 200 will be placed in the second substrate temporary discharge zone 300e first. The fluid flow generation unit 330 is located in the second substrate defoaming zone 300b. The alignment pressing device 370 is located in the pressing position region 300c, and may include a lower pressing platform 364 and an upper pressing platform 362, wherein the upper pressing platform 362 is a movable and movable lifting platform, which may also be referred to as The upper pressing and pressing platform 362 is taken.

13 is a flow chart of a method of fabricating an electrowetting display using the assembly system of FIG. 1. Referring to FIG. 1 , FIG. 9C and FIG. 13 , the method for manufacturing the electrowetting display comprises providing the first substrate 100 and performing a first fluid F1 providing process on the first substrate 100 , wherein the first substrate 100 has a first fluid Part of F1 enters the vapor ring In the environment 120, wherein the vapor environment is formed by the first fluid F1, the solvent used by the first fluid F1 or the material miscible with the first fluid F1 but not chemically reacted, and then enters the second fluid F2 of the assembly tank 150. The second fluid F2 is immiscible with the first fluid F1, as in step S100; a second substrate 200 is provided, and the second substrate 200 is immersed in the second fluid F2 of the grouping groove 150, as in step S120; The substrate 100 and the second substrate 200 are aligned after being aligned, as in step S132.

First, the first substrate 100 is put into the assembly device 300 for description. Before the first substrate 100 is put into the assembly device 300, the electrode dielectric layer is further formed on the substrate. In step S102, a hydrophobic layer is formed on the substrate, as in step S104. A retaining wall is formed on the substrate to form the first substrate 100, as by step S106. The first substrate 100 is then placed on the platform 112 of the coating device 110, and the first fluid supply unit 114 is moved relative to the platform 112 to dispose the first fluid F1 on the first substrate 100, wherein the first fluid F1 is disposed The manner of the first substrate 100 may include a slit coating method, an inkjet coating method, a transfer method, a knife coating method, a screen printing method, or the like. The portion of the first substrate 100 that has been provided with the first fluid is sent to the vapor environment 120 (as shown in FIG. 1C), wherein the vapor environment 120 is provided in a manner as shown in FIG. 2, on both sides of the platform 112. The auxiliary side wall 132 is disposed, and in this embodiment, the first fluid supply unit 114 can be elongated by the first fluid supply unit 114 by the platform 112 being fixed, and the roller blind 134 is shared with the auxiliary side wall 132. A cavity 130 is formed and the vapor of the coating solvent is then introduced into the cavity 130. Other possible ways of forming the cavity 130 and forming the vapor environment 120 within the cavity 130 can be as described above, and should be selected from the description in the specification or in a manner that does not violate the present invention. In the case of the spirit of the Ming Dynasty, the changes are appropriately made according to the actual needs, and will not be repeated here.

After the first fluid F1 is disposed on the first substrate 100, the first substrate 100 having the first fluid F1 thereon can be put into the first substrate carrying-in area 300a of the assembly groove 150 by using the transfer module. If the first fluid F1 is volatilized during the transfer of the first substrate 100 from the platform 112 to the assembly slot 150, the vapor environment 120 may extend from the coating device 110 to a portion of the assembly slot 150, In order to ensure that the first fluid F1 of the first substrate 100 is immersed in the second fluid F2 of the grouping groove 150 in a vapor atmosphere, the first fluid F1 on the first substrate 100 can have a uniform thickness. The manner in which the first substrate 100 is immersed in the second fluid F2 of the grouping groove 150 may also be as described above for the components and the manner in which it may be used, and therefore will not be further described herein.

Before the second substrate 200 is put into the assembly device 300, the spacer S may be formed on a substrate (shown in FIG. 9A), as shown in step S122 of FIG. 13; the substrate is subjected to surface hydrophilic treatment, as shown in step S124 of FIG. . Incidentally, the sealant 210 may be selectively drawn according to actual needs (as shown in FIGS. 15A-15B ), for example, the sealant 210 may be drawn on the second substrate 200, or the sealant 210 may be drawn in the first A frame glue 210 is drawn on a substrate 100 or on both the first substrate 100 and the second substrate 200. The frame glue 210 may be drawn before the substrate is put into the assembly groove 150, or may be put into the substrate. The groove 150 is then drawn and can be applied according to actual needs.

The set of elevations 202 of the second substrate 200 faces the bottom wall of the assembly groove 150 154 (ie, the surface of the grouping surface 202 facing the liquid surface of the second fluid F2) (as shown in FIG. 9B), causing the second substrate 200 to be tilted into the second substrate of the grouping groove 150 with respect to the liquid surface of the second fluid F2. In area 300d. Since the atmospheric environment and the second fluid F2 are different substances, when the group surface 202 of the second substrate 200 enters the second fluid F2 in parallel with the liquid surface of the second fluid F2, there may be bubbles A attached to the second substrate 200. On the façade 202; oppositely, when the grouping surface 202 of the second substrate 200 faces the liquid surface of the second fluid F2 and enters the second fluid F2 with the liquid surface of the second fluid F2 inclined, the assembly of the second substrate 200 is adhered. The bubble A on the face 202 is directionalally squeezed by the second fluid F2 at the interface of the air and the second fluid F2 to escape the second substrate 200. As such, it is effective to improve the problem that the grouping surface 202 of the second substrate 200 immersed in the second fluid F2 may have bubbles A affecting the quality of the subsequent assembly or electrowetting display.

As previously described, a suction mask 320 (shown in FIG. 10) may also be used to draw air bubbles A on the set of faces 202 of the second substrate 200. Alternatively, when the second substrate 200 is located in the second fluid F2, for example, in the second substrate defoaming zone 300b, more than one fluid flow generating unit 330 may be used to flow the second fluid F2 in the grouping groove 150, the fluid The flow generation unit 330 may be a water pump 332, an impeller 334, a nozzle 336, or a combination thereof to scatter the bubble A attached to the assembly surface 202 of the second substrate 200 by the flow of the second fluid F2, and cause the bubble A to escape from the assembly surface In addition to 202, the impeller 334 referred to in Figure 11B is either fixed or movable.

14A to FIG. 14C are diagrams showing the positioning on the second substrate carrier after the second substrate is clamped by the second substrate clamping module to allow the second substrate to enter the second fluid F2. A schematic view of the unit aligned with the second substrate. Referring to FIG. 14A to FIG. 14C in sequence, in another embodiment, the second substrate clamping module 310 is, for example, a robot arm, wherein the robot arm holds the second substrate 200 and the second substrate 200 is inclined to the liquid. After entering the second fluid F2 in a planar manner, the second substrate 200 is further positioned on the second substrate carrier 360, wherein the top surface 360a of the second substrate carrier 360 and the bottom wall 154 of the assembly groove 150 are parallel to each other. The upper walking press platform 362 then removes the second substrate 200 from the second substrate carrier 360 and transfers the second substrate 200 to the nip position zone 300c. The second substrate 200 is grasped by the robot arm and tilted into the second fluid F2, and then the upper pressing pressing platform 362 carries the second substrate 200 to the nip position region 300c. Compared with the manner in which the adsorption platform or the pressing platform is directly used as the second substrate clamping module 310 as shown in FIG. 9B, the upper running pressing platform 362 shown in FIG. 14C is already located in the second fluid F2, and does not need to be Designed to have a tilt angle for good workability and reliability.

Continuing to simultaneously refer to FIGS. 9C and 9D, the second substrate 200 is transported to the nip position region 300c at the upper traverse pressing platform 362, and the first substrate 100 is also carried to the nip position region 300c of the grouping groove 150. The first substrate 100 on the lower pressing platform 364 is aligned with the second substrate 200 on the upper running pressing platform 362, and the first substrate 100 and the second substrate 200 are pressed together. To form an electrowetting display, as shown in step S132 of FIG. The process of pressing the first substrate 100 and the second substrate 200 to form an electrowetting display may further include irradiating the frame glue 210 with UV light (not shown), and fixing the frame glue 210 to fix the first substrate 100 and the first substrate The two substrates 200 are as shown in step S134 of FIG. In the electrowetting display after the sealing is completed, the second fluid F2 is located between the first fluid F1 and the second substrate 200. Group The standing electrowetting display is carried out, as shown in step S136 of FIG. In addition, in step S134 of FIG. 13 , the photocurable adhesive or the sealant 210 may be partially irradiated with UV light, and the first substrate 100 and the second substrate 200 may be temporarily adhered or pre-fixed, and then the assembled electric power is set. The wet display is carried out, as shown in step S136 of FIG. Thereafter, the sealant 210 is completely cured, and the first substrate 100 and the second substrate 200 are sealed.

It should be noted that the sealant 210 may be drawn by the spit device 215 after the first substrate 100 enters the second fluid F2 (as shown in FIG. 15A), or the spit device 215 is in the vapor environment 120 (FIG. 15B). The sealant 210 is drawn in the shown). If the sealant 210 is drawn on the second substrate 200 before the second substrate 200 enters the second fluid F2, there may be a problem that the bubble A is easily adhered in the vicinity of the sealant 210, and when the second substrate 200 passes through the fluid flow generation unit 330 At the same time, the flow of the second fluid F2 may also cause the sealant 210 to deform. The drawing of the sealant 210 may be performed after the first substrate 100 enters the second fluid F2, or the first substrate 100 draws the sealant 210 in the vapor environment 120, which can effectively prevent the bubble A from being adsorbed near the sealant 210. Moreover, the deformation of the sealant 210 can be effectively prevented.

In addition, after the first fluid F1 is formed on the first substrate 100, the first fluid F1 located in the non-display area R2 of the first substrate 100 is further removed to prevent the excess first fluid F1 from affecting the integrity of the package. 16A-16D are one embodiment of a first fluid removal device removing a first fluid located on a non-display area of a first substrate. In the present embodiment, the first fluid removal device includes a mask 220 and a cleaning unit 221. Referring to FIG. 16A to FIG. 16D in sequence, when there is a residual (unwanted) first fluid F1 on the non-display area R2 of the first substrate 100, a mask 220 may be placed on On the display area R1 of the first substrate 100, the cleaning unit 221 is cleaned with a solvent or water, and after the excess residual moisture and solvent are blown off, the mask 220 is removed. The step of removing the first fluid F1 of the non-display area R2 as shown in FIGS. 16A to 16D can be performed in an atmospheric environment or a vapor environment 120 (shown in FIG. 1).

17A-17C are another embodiment of the first fluid removal device removing the first fluid located on the non-display area of the first substrate. Referring to FIG. 17A to FIG. 17C in sequence, the first fluid F1 may be selectively removed by using the suction device or the scraping device 230. The step of removing the first fluid F1 of the non-display area R2 as shown in FIGS. 17A to 17C may also be performed in an atmospheric environment, a vapor environment 120 (as shown in FIG. 1) or a second fluid F2.

18A-18D are still another embodiment of removing a first fluid located on a non-display area of a first substrate. Referring to FIG. 18A to FIG. 18D in sequence, the film 222 may be covered on the non-display area R2 of the first substrate 100 before the first fluid F1 is formed on the first substrate 100, and then the first fluid F1 is formed on the first substrate F1. After the first substrate 100 is on, the film 222 is removed. The steps of removing the first fluid F1 of the non-display region R2 as shown in FIGS. 18A to 18D may also be performed in an atmospheric environment or a vapor environment 120 (shown in FIG. 1) before the first substrate 100 enters the second fluid F2. The film 222 is removed. Alternatively, the step of removing the film 222 may be separated after the first substrate 100 enters the second fluid F2.

The electrowetting display produced by the foregoing manufacturing apparatus, assembly apparatus and manufacturing method has a uniform thickness of the first fluid on the first substrate, and no bubbles therein affect the contraction or spreading of the first fluid, which is effective Lifting the electrowetting display The display effect.

[Second embodiment]

19 is a partial schematic view of an assembly apparatus of an electrowetting display according to a second embodiment of the present invention. Referring to FIG. 19, the difference from the foregoing first embodiment is that the arrangement of the vapor supply device 125 is not provided in the assembly system of the present embodiment to provide the vapor environment 120, but the platform 112 of the coating device 110 is tilted. The bearing surface 112a is configured to carry the first substrate 100, and the grouping groove 150 is disposed adjacent to the bearing surface 112a, so that when the first substrate 100 performs the first fluid F1 forming process, the first substrate 100 is provided with the first fluid F1. The portion then enters the assembly tank 150 and is immersed in the second fluid F2. Compared with the foregoing first embodiment, the portion of the first substrate 100 that has been provided with the first fluid F1 is then directly immersed in the second fluid F2, reducing the time during which the first fluid F1 is exposed to the atmosphere, and the reduction can also be achieved. The volatilization of the first fluid F1 maintains the uniformity of the thickness of the first fluid F1. Moreover, because the arrangement of the vapor supply device 125 is not required, the use of components and the overall volume of the assembly system 300 can be reduced as compared to the first embodiment.

The other related component arrangement manners of the electrowetting display assembly system or other process steps of the electrowetting display are not changed, and the assembly system of the present embodiment should be inferred from the contents of the foregoing first embodiment in combination with the disclosure of the present embodiment. The exact arrangement of the components and the method of making the electrowetting display are not explained here.

[Third embodiment]

20A-20C are another assembly device of the electrowetting display of the present invention Part of the schematic. Referring to FIG. 20A-20C, the assembly device is different from the assembly device for manufacturing the second substrate 200 of the electrowetting display according to the first embodiment in that the second substrate holder is used in the assembly device of the embodiment. Holding the module, for example, the robot arm 340 grasps (or cures, clamps) the second substrate 200, and immerses the second substrate 200 in the second fluid F2 of the grouping groove 150 with its group surface 202 facing upward, Then, after the second substrate 200 enters the second fluid F2, the second substrate 200 is turned over in the second fluid F2 so that the assembly surface 202 faces the bottom wall 154 of the assembly groove 150. In an embodiment, the manufacturing apparatus 400 of FIG. 1 is integrated with the assembly apparatus of the embodiment to form the assembly system 500, and the assembly system 500 is used to fabricate the electrowetting display, as shown in step S132 of FIG. The second substrate 200 that has been inverted in the second fluid F2, and the first substrate 100 that has moved in the second fluid F2, is assembled after the second substrate 200 and the first substrate 100 are aligned in the second fluid F2.

Compared with the second substrate 200 entering the second fluid F2 with the group surface 202 facing downward, the second substrate 200 enters the second fluid F2 with the group surface 202 facing upward, and the assembly of the second substrate 200 can be further reduced. There is a possibility of residual bubbles on the face 202. Of course, other auxiliary elements such as the air suction mask 320 or the fluid flow generation unit 330 may be additionally provided as described in the first embodiment to enhance the effect of eliminating bubbles.

The mechanical arm 340 for inverting the second substrate 200 or the setting elements and/or the arrangement of the fixture and the clamp can be designed according to actual needs and selected by using appropriate components. For example, the robot arm 340 can have a rotating mechanism 342. This rotation The rotating mechanism 342 is used to adjust the angle at which the second substrate 200 is transferred into the grouping groove 150 or to control the turning direction of the second substrate 200 in the second fluid F2. In addition, although the components used to invert the second substrate 200 in this embodiment are illustrated by the robot arm 340, in other embodiments, the components used to invert the second substrate 200 may also be tracks, adsorption platforms, and rotating shafts. Or a combination thereof, those skilled in the art should be able to replace or combine appropriate components according to actual needs to achieve the same effect.

The method for fabricating the electrowetting display using the erecting system 500 of the present embodiment can be known from the content of the foregoing first embodiment in combination with the disclosure of the present embodiment, and therefore will not be further described herein.

[Fourth embodiment]

This embodiment differs from the foregoing three embodiments in that the apparatus of FIG. 19 of the foregoing second embodiment is integrated with the apparatus of FIG. 20A, FIG. 20B or FIG. 20C into the assembly system 500 as shown in FIG. 9C. Since the foregoing first to third embodiments have explained in detail the possible arrangement manners of the various components in the assembly system 500, and the related possible operation modes and the manufacturing method of the electrowetting display, those skilled in the art are in accordance with the present specification. The arrangement of the respective elements of the assembly system 500 of the present embodiment and the method of using the assembly system 500 of the present embodiment to fabricate an electrowetting display can be inferred from the explanations of the present invention, and thus the description will not be repeated in the present embodiment.

By using the manufacturing apparatus, the assembly apparatus, the assembly system, and the method of manufacturing the electrowetting display according to an embodiment of the present invention, the first fluid thickness unevenness of the electrowetting display can be improved and/or the residual air bubbles in the electrowetting display can be effectively eliminated, and An electrowetting display produced by using the electrowetting display and the substrate manufacturing method, device, assembly device and system thereof according to an embodiment of the invention, because the first fluid on the substrate has a uniform thickness and is attached to the substrate The bubble is eliminated by the manner in which the substrate is inclined into the fluid level, and the fluid flow generating unit generates the flowing fluid flowing through the substrate assembly, thereby providing better display quality.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

100‧‧‧First substrate

110‧‧‧ Coating device

112‧‧‧ platform

114‧‧‧First fluid supply unit

120‧‧‧Vapor environment

125‧‧‧Vapor supply unit

130‧‧‧ cavity

150‧‧‧Setting trough

152‧‧‧Side sidewalls

The bottom wall of the 154‧‧‧ group

400‧‧‧Manufacture equipment

D1‧‧‧ directions

F1‧‧‧First fluid

F2‧‧‧Second fluid

Claims (21)

An apparatus for electrowetting a display substrate comprises: a set of vertical slots; a first substrate transfer module located on one side of the set of vertical slots for transporting a first substrate into the set of vertical slots; a first substrate carrier, The second substrate clamping module is disposed on the other side of the group of vertical slots for transporting a second substrate into the group of vertical slots; a second substrate is disposed in the set of vertical slots; And disposed in the set of vertical slots or a temporary release area for carrying the second substrate; a fluid flow generating unit located in the set of vertical slots; and a pair of positional pressing devices located on the first substrate carrier The first substrate and the second substrate are bonded to each other between the second substrate carriers. The assembly device of the electrowetting display substrate according to claim 1, wherein the alignment pressing device comprises a lower pressing platform and an upper pressing platform, wherein the upper pressing platform is movable and movable. Adsorption platform. The assembly device of the electrowetting display substrate according to claim 1, wherein the first substrate transfer module is a jig, a roller conveyor belt or a carrier. The assembly device of the electrowetting display substrate according to claim 1, further comprising a flexible board, one side of the flexible board bears against a side wall of the set of vertical slots, and the other side of the flexible board bears against a bottom wall of the set of vertical slots, the flexible board is configured to guide the first substrate into the set of vertical slots. The assembly device of the electrowetting display substrate according to claim 1, further comprising a plurality of shock absorbing sponges disposed on the inner groove wall of the group of vertical grooves or a wall surface of the inner groove wall of the group of grooves is a rough surface for absorbing Or eliminate vibration ripples. The assembly device of the electrowetting display substrate according to claim 1, wherein the second substrate clamping module is a robot arm. The apparatus for assembling an electrowetting display substrate according to claim 6, wherein the second substrate clamping module has a rotating mechanism to adjust an angle of the second substrate relative to the set of vertical grooves. The assembly device of the electrowetting display substrate according to the first aspect of the invention, wherein the second substrate clamping module is an adsorption platform, and the surface of the adsorption platform for carrying the substrate is a slope. The assembly device for the electrowetting display substrate of claim 8, further comprising an air venting mask, connecting the second substrate clamping module and covering the second substrate. The assembly apparatus of the electrowetting display substrate according to claim 1, wherein the fluid flow generation unit comprises a water pump, an impeller or a nozzle. The assembly device of the electrowetting display substrate according to claim 1, further comprising a glue discharging device to provide a sealant for sealing the first substrate and the second substrate. A method for fabricating an electrowetting display, comprising: providing a first substrate having a first fluid; providing a second substrate having a set of elevations; Providing a set of vertical grooves having a second fluid, wherein the second fluid is immiscible with the first fluid; causing the first substrate to enter the second fluid; causing the second substrate to enter the second fluid; providing a flow a second fluid flowing through the set of elevations of the second substrate; and sealing the first substrate and the second substrate such that the second fluid is between the first fluid and the second substrate . The method of manufacturing the electrowetting display of claim 12, wherein the second substrate faces the second fluid with the set of elevations and the second substrate is inclined with respect to the liquid surface of the second fluid into the set of vertical slots. In the second fluid. The method for fabricating an electrowetting display according to claim 12, further comprising: using an air venting mask to evacuate the second substrate before the second substrate enters the second fluid. The method of manufacturing the electrowetting display of claim 12, wherein the second substrate enters the second fluid with the set of façades facing up, and after the second substrate completely enters the second fluid, The second substrate is turned over such that the set of elevations of the second substrate faces a bottom wall of the set of vertical grooves. The method of fabricating an electrowetting display according to claim 12, further comprising removing the first fluid of a non-display area on the first substrate before the first substrate enters the second fluid. Producer of electrowetting display as described in claim 12 The method further includes drawing a sealant on a non-display area of the first substrate before sealing the first substrate and the second substrate, wherein the sealant is drawn in the second fluid. A method for fabricating an electrowetting display, comprising: providing a first substrate, and providing a first fluid on the first substrate in a providing direction, and the portion of the first substrate provided with the first fluid is Providing the first fluid directly into a second fluid of the set of vertical grooves, wherein the first fluid is immiscible with the second fluid; providing a second substrate having a set of elevations, the second substrate being placed into the first fluid In the two fluids; providing a flowing second fluid and flowing the flowing second fluid through the set of façades of the second substrate; and pressing the set of façades with the first substrate, wherein the second fluid is located The first fluid is between the second substrate. The method of fabricating an electrowetting display according to claim 18, wherein the second substrate faces the second fluid with its group façade and the second substrate is inclined with respect to the liquid surface of the second fluid into the second In the fluid. The method of fabricating an electrowetting display according to claim 18, wherein the second substrate enters the second fluid with its group face up, and after the second substrate completely enters the second fluid, The second substrate is turned over such that the set of façades of the second substrate faces a bottom wall of the set of vertical grooves, and then the first substrate and the second substrate are pressed together. The method for fabricating an electrowetting display according to claim 18, further comprising: using an air venting mask to evacuate the second substrate before the second substrate enters the second fluid.