TWI489573B - Detecting device - Google Patents

Description

Testing device

The present invention relates to a detecting device, and more particularly to a detecting device suitable for use in a solar cell.

In the structural design of the electrode of the solar cell, in order to achieve both the low light shielding rate and the low resistance, the electrode is currently designed to include a bus bar and a finger bar. The finger electrode is connected to the bus electrode and extends from the bus electrode to spread over the surface of the solar cell to supply current to the bus electrode. In this electrode design, the arrangement of the finger electrodes can help to reduce the light shielding rate, and the arrangement of the bus electrodes can reduce the resistance, thereby increasing the electron flow rate.

Generally, screen electrodes are used to mount electrodes on the substrate of the solar cell. Since the finger electrodes are required to have a high aspect ratio, the height is usually not achieved by a single screen printing step, but requires multiple times of printing, baking and sintering to complete the desired height. The production of electrodes. In order for the subsequently printed material layer to be accurately superimposed on the printed pattern layer, several alignment marks are also printed over the substrate simultaneously in the printing of the pattern layer for subsequent printing alignment. In this technique, an optical element such as a charge coupled device (CCD) camera is usually used to detect the position of the alignment mark on the pattern layer, thereby judging the position of the pattern layer, and using the position information to adjust the printing of the next material layer. position. Wherein, the so-called alignment mark is printed on the front printing, and is additionally printed with a mark different from the bus bar and the finger bar, but the mark shields the light receiving area. In addition to affecting the efficiency of the battery, it also changes the appearance of the battery, and thus whether the derivative customer can accept the change of appearance. In addition, some people use the side edges, corners, etc. of the cell as alignment marks, so that the polycrystalline cell itself is designed as a square right angle, and the four corners of the single crystal cell have a similar trimming pattern. Therefore, the same detecting device cannot be simultaneously applied to position detection of single and polycrystalline cells. Therefore, if the boundary between the bus electrode of the battery itself and the finger electrode is used as an alignment mark, the above problem can be solved.

However, when the production line with different numbers of bus electrode printing, such as two bus bars (2 BusBar) and three bus bars (3 Bus Bar), is replaced, the three bus electrodes are arranged on both sides. The junction between the two bus electrodes and the finger electrodes is aligned, and only the cells of the two bus electrodes are arranged. The width of the two bus electrodes is smaller than the distance between the three bus electrodes, so that the two are The position of the alignment mark of the product is different, so each time the product line is replaced, the CCD camera needs to be moved and the CCD camera software and hardware are recalibrated. It takes about 10 hours for each calibration of the CCD camera to be made, which greatly increases the downtime and causes a huge loss of production capacity on the production line. In addition, the replacement of the product line will also create a problem of alignment, which will lead to an increase in product defects, resulting in a decline in product yield.

Therefore, an aspect of the present invention is to provide a detecting device that can transmit alignment mark images of different product lines to optical components of the same optical module by using a light guiding module for performing these product lines. The position of the alignment mark is corrected and corrected by the printing position of the electrode paste. Since the lens of the optical component of the optical module is not required to be moved, the lens correction can be omitted. The action, and greatly reduce the downtime of the screen printing machine, which can effectively improve the capacity utilization.

Another aspect of the present invention provides a detecting device that does not need to move the lens of the optical component of the optical module when detecting the alignment marks at different positions, so that the product line can be directly replaced, and the conventional replacement can be avoided. Issues such as print alignment defects derived from the products of the production line.

According to the above object of the invention, a detecting device is proposed. The detecting device comprises an optical module and a light guiding module. The light guiding module is connected to the optical module, and the light guiding module can receive a first incident light and a second incident light, respectively, and are respectively guided by a first guiding direction and a second guiding direction. Lead to the optical module. The incident direction of the first incident light is parallel to the incident direction of the second incident light and does not overlap.

According to an embodiment of the invention, the first guiding direction is parallel and overlapping with the second guiding direction.

According to another embodiment of the present invention, the first guiding direction is parallel to the second guiding direction and does not overlap.

According to still another embodiment of the present invention, the second incident light is in the same axial direction as the second guiding direction.

According to still another embodiment of the present invention, the optical module includes two lenses that receive the first incident light and the second incident light, respectively.

According to still another embodiment of the present invention, the light guiding module comprises a mirror group.

Please refer to FIG. 1 , which illustrates an embodiment of the present invention. A schematic diagram of a detection device. This detecting device 100 can be applied to the process of a solar cell. In the present embodiment, the detecting device 100 can detect the position of the alignment mark on the formed electrode pattern layer during the electrode manufacturing process of the solar cell to facilitate the processing of a processing procedure under the solar cell. The detecting device 100 mainly includes a light guiding module 108 and an optical module 106.

In one embodiment, the optical module 106 includes two optical elements 104a and two optical elements 104b. Wherein, the two optical elements 104a can be used, for example, to receive two first incident lights 116a from two alignment marks 120a on the solar cells having three bus electrodes, and the two optical elements 104b can be used to receive, for example, two The two of the solar cells of the bus electrodes are aligned with the second second incident light 116b of the mark 120b. Optical elements 104a and 104b can be, for example, CCDs. In this embodiment, the number of optical components can be adjusted according to the number of alignment marks to be detected on the solar cell, and usually at least three alignment marks are required to meet the position detection requirements, and generally The position detection is performed with the alignment marks at the four positions, so that two sets of devices as shown in Fig. 1 can be arranged and arranged equidistantly corresponding to the positions of the ends of the bus electrodes. The detecting device 100 can be applied to the multi-printed alignment mark detection of a pattern layer such as an electrode of a solar cell, but is not limited to multiple printing of electrodes. Each optical element 104a includes a lens 102a, and each optical element 104b includes a lens 102b, wherein the lenses 102a, 102b can be, for example, a CCTV lens. The optical elements 104a and 104b can receive the first incident light 116a and the second incident light 116b through the lenses 102a and 102b, respectively.

In the detecting device 100, the optical component 104a of the optical module 106 is 104b is connected to the light guiding module 108. In one embodiment, as shown in FIG. 1, the light guiding module 108 includes a second mirror group 114a and a second mirror group 114b. The two mirror groups 114a are respectively connected to the two optical elements 104a, and the two mirror groups 114b are respectively connected to the two optical elements 104b to respectively guide the first incident light 116a and the second incident light 116b to the optical elements 104a and 104b, respectively. . Each mirror group 114a can include, for example, mirrors 110a and 112a, and each mirror group 114b can include mirrors 110b and 112b, for example.

The positions of the mirror group 114a and the mirror group 114b are respectively adjusted according to the positions of the alignment marks 120a and 120b on the solar cell, so that the first incident light 116a and the second incident light 116b can be respectively injected into the mirror group. In the 114a and mirror group 114b, in particular, the alignment marks 120a, 120b may correspond to the mirrors 110a, 110b, respectively. The positions of the optical elements 104a and 104b are adjusted according to the positions of the mirror group 114a and the mirror group 114b, respectively, so that the first incident light 116a and 116b are reflected by the mirror group 114a and the mirror group 114b, respectively, to enter the optical In elements 104a and 104b. In this embodiment, the two mirror sets 114b are interposed between the two mirror sets 114a and the two optical elements 104b are interposed between the two optical elements 104a. In other embodiments, the light directing module can comprise, for example, a refractive mirror set, or a combination selected from the group consisting of a refractive mirror, a mirror, and a reflective dome. In the present embodiment, the optical member or combination included in the light guiding module is not limited to the above embodiment as long as the incident light from the alignment mark can be guided to the corresponding optical element.

When the detecting device 100 is used to perform the detection of the two alignment marks 120b on the solar cell having the two bus electrodes, the two alignment marks 120b are The second incident light 116b, which is generated separately, is incident on the mirror 110b of the second mirror group 114b of the light module 108 in the incident direction 122b. After being reflected by the mirror 110b, the second incident light 116b is again incident on the other mirror 112b of the mirror group 114b. The mirror 112b can be in the second guiding direction 118b and direct the second incident light 116b to the lens 102b of the optical element 104b into the optical element 104b.

On the other hand, when the detecting device 100 is used to perform the detection of the two alignment marks 120a on the solar cells having the three bus electrodes, the two first incident lights 116a respectively generated by the two alignment marks 120a are in the incident direction 122a. The mirrors 110a of the two mirror groups 114a of the light guiding module 108 are respectively emitted. After being reflected by the mirror 110a, the first incident light 116a is again incident on the other mirror 112a of the mirror group 114a. At this time, the mirror 112a may be guided in the first guiding direction 118a to guide the first incident light 116a to the lens 102a of the optical element 104a to enter the optical element 104a.

In the present embodiment, the position of the two alignment marks 120a on the solar cell having three bus electrodes is different from the position of the two alignment marks 120b on the solar cell having the two bus electrodes, so that the alignment mark 120a is generated. The incident direction 122a of the incident light 116a is parallel to the incident direction 122b of the second incident light 116b of the alignment mark 120b, but does not overlap. In an embodiment, as shown in FIG. 1, the mirror group 114a and the mirror group 114b of the light guiding module 108 respectively guide the first incident light 116a and the second incident light 116b to the corresponding optical component 104a and The first guiding direction 118a of 104b is parallel to the second guiding direction 118b, but does not overlap.

With this embodiment, even if the distance between the alignment marks 120a and 120b of the solar cells of different product lines is too small, it is impossible to directly When the corresponding optical elements 104a and 104b are directly disposed directly above the alignment marks 120a and 120b for position detection, the optical elements 104a and 104b may be disposed not on the alignment marks 120a and 120b by the design of the light guiding module 108. In the case of directly above, the first incident light 116a and the second incident light 116b generated by the alignment marks 120a and 120b can be smoothly introduced into the optical elements 104a and 104b. As a result, the installation space of the optical elements 104a and 104b can be enlarged, and the installation is more flexible.

Since the first incident light 116a and the second incident light 116b respectively emitted by the alignment marks 120a and 120b of the solar cells of different product lines can be transmitted to the detecting device 100, the optical elements 104a and 104b can be respectively paired. The interpretation and correction of the positions of the quasi-markers 120a and 120b. Therefore, the detecting device 100 can simultaneously detect the alignment marks 120a and 120b of the solar cells of different product lines. Therefore, when the product line is replaced, the optical elements 104a and 104b of the detecting device 100 and the light guiding module 108 need not be moved. In this way, the optical component movement and correction procedure of the prior art can be omitted, and the downtime of the process machine can be greatly reduced, thereby greatly improving the capacity utilization rate. In addition, since the optical elements 104a and 104b are not moved, in the multiple printing process, the printing alignment defects caused by the conventional technique can be avoided.

Please refer to FIG. 2, which is a schematic diagram of a detecting device suitable for a solar cell according to another embodiment of the present invention. In this embodiment, the detecting device 200 can be applied to the multi-printed alignment mark detection of a pattern layer such as an electrode of a solar cell, but is not limited to multiple printing of the electrodes. The detecting device 200 mainly includes a light guiding module 204 and an optical module 202, wherein the embodiment is compared to the embodiment of FIG. In the first embodiment, the light guide module 108 and the right half of the optical module 106 are designed in another manner. Therefore, in the present embodiment, only three bus electrodes or two bus electrodes are described on one side. Relevant use cases at the time of testing. In this embodiment, similar to the optical module 106 of the detecting device 100, the optical module 202 of the detecting device 200 may include an optical component (not shown), such as a CCD, and the optical component includes a lens, such as a CCTV lens. . The optical component of the optical module 202 can receive incident light from alignment marks on solar cells of different product lines, such as first incident light 212 of alignment marks 222 on a solar cell having three bus electrodes, and The second incident light 214 of the alignment mark 224 on the solar cells of the bus electrodes.

In the detecting device 200, the optical module 202 is connected to the light guiding module 204. In an embodiment, as shown in FIG. 2, the light guiding module 204 includes a mirror group, which may include two mirrors 206 and 208, and a rotatable mirror 210. The mirrors 206 and 208 are arranged to reflect the first incident light 212 and the second incident light 214 toward the mirror 210, respectively, and the mirror 210 can be rotationally adjusted according to the solar cell product to be detected by the detecting device 200. Wherein, the above-mentioned mirrors 206, 208 can be in the form of fixed or rotatable adjustment.

In the present embodiment, the optical member or combination included in the light guiding module 204 can directly guide the first incident light 212 and the second incident light 214 from the alignment marks 222 and 224 to the optical module 202. The components may be, and are not limited to, the mirror group of the above embodiment. In some embodiments, the light directing module can, for example, comprise a combination selected from any of the group consisting of a refractor, a mirror, and a reflective mirror.

When the detection device 200 is used to detect the alignment mark 222 on the solar cell having three bus electrodes, the mirror 210 may be rotated first so that the reflection surface of the mirror 210 faces the reflection surface of the mirror 206. The first incident light 212 generated by the alignment mark 222 is incident on the mirror 206 of the light guide module 204 in the incident direction 216. After being reflected by the mirror 206, the first incident light 212 is again incident on the mirror 210. Since the mirror 210 has been rotated and adjusted, the reflecting surface of the mirror 210 can guide the first reflected light 212 reflected from the reflecting surface of the mirror 206 to the optical module 202 in a first guiding direction. Optical element. That is, the reflective surface of the mirror 210 can be used to guide the first reflected light 212 from the reflective surface of the mirror 206 to the optical module 202 in a first guiding direction.

On the other hand, when the alignment mark 224 on the solar cell of the two bus electrodes is to be detected, the mirror 210 may be rotated first so that the reflection surface of the mirror 210 opposes the reflection surface of the mirror 208. The second incident light 214 generated by the alignment mark 224 is incident on the mirror 208 of the light guide module 204 in the incident direction 218. After being reflected by the mirror 208, the second incident light 214 is again incident on the mirror 210. Since the mirror 210 has been rotated and adjusted, the reflecting surface of the mirror 210 can guide the second incident light 214 reflected from the reflecting surface of the mirror 208 to the optical module 202 in a second guiding direction. element.

In this embodiment, the first guiding direction and the second guiding direction are both guiding directions 220, that is, the first guiding direction is parallel and overlapping with the second guiding direction, so that only a single one is needed. The optical component of the optical module 202 can be used. In addition, as shown in FIG. 2, an alignment mark 222 on a solar cell having three bus electrodes and a solar cell having two bus electrodes The position of the alignment mark 224 is different (wherein the alignment marks 222 and 224 of FIG. 2 are only present at different bus electrode positions at different sides of different solar cells), and thus the alignment mark 222 is generated. The incident direction 216 of the first incident light 212 is parallel to the incident direction 218 of the second incident light 214 of the alignment mark 224, but does not overlap.

With this embodiment, by the design of the light guiding module 204, the optical module 202 of the detecting device 200 can have only a single optical component, that is, the alignment marks 222 and 224 of products of different product lines can be generated. Both the incident light 212 and the second incident light 214 are smoothly introduced into the optical component of the optical module 202.

Since the first incident light 212 and the second incident light 214 respectively emitted by the alignment marks 222 and 224 of the solar cells of different product lines can be transmitted to the detecting device 200, the optical module 202 can be aligned. Interpretation and correction of the positions of 222 and 224. Therefore, the detecting device 200 can simultaneously detect the alignment marks 222 and 224 of the solar cells of different product lines. Therefore, when the product line is replaced, the embodiment also does not need to move the optical module 202 and the light guiding module 204 of the detecting device 200.

Please refer to FIG. 3, which is a schematic diagram of a detecting device suitable for a solar cell according to still another embodiment of the present invention. In this embodiment, the detecting device 300 is equally applicable to the multi-printed alignment mark detection of the pattern layer of the solar cell, but is not limited to multiple printing of the electrodes. The detecting device 300 mainly includes a light guiding module 304 and an optical module 326. In this embodiment, the present embodiment mainly uses other designs in the right half of the light guiding module 108 and the optical module 106 in FIG. 1 . Therefore, the present embodiment is as follows. Only on one side Explain the relevant use cases of three bus electrodes or two bus electrodes at the time of detection.

In this embodiment, similar to the optical module 106 of the detecting device 100, the optical module 326 of the detecting device 300 can include two optical elements 302a and 302b, such as a CCD, and each of the optical elements 302a and 302b includes a lens. , for example, a CCTV lens. Optical elements 302a and 302b of optical module 326 can receive incident light from alignment marks on solar cells of different product lines, such as first incident light 310 of alignment marks 322 on solar cells having three bus electrodes, And second incident light 312 of alignment marks 324 on the solar cells of the two bus electrodes. In one embodiment, as shown in FIG. 3, the alignment mark 324 is disposed under the lens of the optical element 302b of the optical module 326, so that the second incident light 312 emitted from the alignment mark 324 can be directly incident on the optical In element 302b.

In the detecting device 300, the optical elements 302a and 302b of the optical module 326 are both connected to the light guiding module 304, or the second incident light 312 emitted by the alignment mark 324 is directly incident on the optical element 302b, so The relationship with the light guide module 304 is not connected. In an embodiment, as shown in FIG. 3, the light guiding module 304 includes a mirror group, the mirror group may include two mirrors 306 and 308, and the mirror group may be disposed on the alignment mark 322. Directly above. In the present embodiment, the optical member or combination included in the light guiding module 304 can directly guide the first incident light 310 from the alignment mark 322 to the optical element 302a of the optical module 326, and It is limited to the mirror group of the above embodiment. In some embodiments, the light directing module can, for example, comprise a combination selected from any of the group consisting of a refractor, a mirror, and a reflective mirror.

When the detecting device 300 is used to perform the detection of the alignment mark 322 on the solar cell having three bus electrodes, the first incident light 310 generated by the alignment mark 322 is incident on the mirror 308 of the light guiding module 304 in the incident direction 314. . After being reflected by the mirror 308, the first incident light 310 is again directed toward the mirror 306. At this time, the mirror 306 can guide the first reflected light 310 emitted from the reflecting surface of the mirror 308 to the optical element 302a of the optical module 326 in a first guiding direction 316.

On the other hand, when the alignment mark 324 on the solar cell having the two bus electrodes is to be detected, the second incident light 312 generated by the alignment mark 324 is incident on the light guiding module 304 in the incident direction 318. Since the alignment mark 324 is disposed directly under the lens of the optical component 302b of the optical module 326, the second incident light 312 can be guided by the light guiding module 304 or guided by the light guiding module 304 to The incident direction 318 of the second incident light 312 is incident directly into the optical element 302b with the second guiding direction 320 of the axial direction.

In the present embodiment, the alignment mark 322 on the solar cell having three bus electrodes is different from the position of the alignment mark 324 on the solar cell having the two bus electrodes, and thus the first incident of the alignment mark 322 is generated. The incident direction 314 of the light 310 is parallel to the incident direction 318 of the second incident light 312 of the alignment mark 324, but does not overlap.

With this embodiment, even if the distance between the alignment marks 322 and 324 of the solar cells of different product lines is too small, the corresponding optical elements 302a and 302b cannot be directly disposed directly above the alignment marks 322 and 324. By the design of the light guiding module 304, the first incident light 310 generated by the alignment marks 322 and 324 can still be obtained only when the optical element 302b is disposed directly above the alignment mark 324. Two incident light 312 Smooth introduction into the optical elements 302a and 302b. In this way, the installation space of the optical component optical module 326 can be expanded, and the installation is more flexible.

Since the first incident light 310 and the second incident light 312 respectively emitted by the alignment marks 322 and 324 of the solar cells of different product lines can be transmitted to the detecting device 300, the optical module 326 can be aligned. Interpretation and correction of the positions of 322 and 324. Therefore, the detecting device 300 can simultaneously detect the alignment marks 322 and 324 of the solar cells of different product lines. Therefore, when the product line is replaced, the embodiment does not need to move the optical module 326 and the light guiding module 304 of the detecting device 300.

In still another embodiment of the present invention, in order to enable the detecting device to simultaneously detect the alignment marks of the solar cells of different product lines, the detecting device may also include a stepping optical module system. Since the stepper optical module system can automatically move the optical components of the optical module system according to the position of the alignment marks of the solar cells of different product lines, it can be applied to the alignment marks of the solar cells of all product lines. Detection.

It can be seen from the above embodiments that one advantage of the present invention is that the detecting device can use the light guiding module to respectively transmit the alignment mark images of different product lines to the optical components of the same optical module for performing the product lines. The position of the alignment mark is corrected and corrected by the printing position of the electrode paste. Since the lens of the optical component of the optical module is not required, the lens correction operation can be omitted, and the downtime of the screen printing machine can be greatly reduced, thereby effectively improving the capacity utilization rate.

It can be seen from the above embodiments that another advantage of the present invention is that the detection device does not need to move the lens of the optical component of the optical module when detecting the alignment marks at different positions, so the product line can be directly replaced, and can be avoided. Conventional problems such as printing alignment defects caused by changing lines.

While the present invention has been described above by way of example, it is not intended to be construed as a limitation of the scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100‧‧‧Detection device

102a‧‧‧ lens

102b‧‧‧ lens

104a‧‧‧Optical components

104b‧‧‧Optical components

106‧‧‧Optical module

108‧‧‧Light guide module

110a‧‧‧Mirror

110b‧‧‧Mirror

112a‧‧‧Mirror

112b‧‧‧Mirror

114a‧‧‧Mirror group

114b‧‧‧Mirror group

116a‧‧‧first incident light

116b‧‧‧second incident light

118a‧‧‧First guiding direction

118b‧‧‧second guiding direction

120a‧‧‧ alignment mark

120b‧‧‧ alignment mark

122a‧‧‧Injection direction

122b‧‧‧Injection direction

200‧‧‧Detection device

202‧‧‧Optical module

204‧‧‧Light guide module

206‧‧‧Mirror

208‧‧‧Mirror

210‧‧‧Mirror

212‧‧‧First reflected light

214‧‧‧second incident light

216‧‧‧Injection direction

218‧‧‧Injection direction

220‧‧‧Direction direction

222‧‧‧ alignment mark

224‧‧ Alignment mark

300‧‧‧Detection device

302a‧‧‧Optical components

302b‧‧‧Optical components

304‧‧‧Light guide module

306‧‧‧Mirror

308‧‧‧Mirror

310‧‧‧First incident light

312‧‧‧second incident light

314‧‧‧Injection direction

316‧‧‧First guiding direction

318‧‧‧Injection direction

320‧‧‧Second guiding direction

322‧‧‧ alignment mark

324‧‧‧ alignment marks

326‧‧‧Optical module

The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt;

2 is a schematic view showing a detecting device according to another embodiment of the present invention.

3 is a schematic view showing a detecting device according to still another embodiment of the present invention.

100‧‧‧Detection device

102a‧‧‧ lens

102b‧‧‧ lens

104a‧‧‧Optical components

104b‧‧‧Optical components

106‧‧‧Optical module

108‧‧‧Light guide module

110a‧‧‧Mirror

110b‧‧‧Mirror

112a‧‧‧Mirror

112b‧‧‧Mirror

114a‧‧‧Mirror group

114b‧‧‧Mirror group

116a‧‧‧first incident light

116b‧‧‧second incident light

118a‧‧‧First guiding direction

118b‧‧‧second guiding direction

120a‧‧‧ alignment mark

120b‧‧‧ alignment mark

122a‧‧‧Injection direction

122b‧‧‧Injection direction

Claims (5)

A detecting device includes: an optical module; and a light guiding module connected to the optical module, wherein the light guiding module can receive a first incident light and a second incident light respectively, and respectively Leading to the optical module in a first guiding direction and a second guiding direction, wherein the light guiding module comprises a mirror group and a rotatable mirror, the mirrors respectively corresponding to the first The incident light and the second incident light; wherein the incident direction of the first incident light is parallel to the incident direction of the second incident light and does not overlap. The detecting device according to claim 1, wherein the first guiding direction is parallel to and overlaps with the second guiding direction. The detecting device of claim 1, wherein the first guiding direction is parallel to the second guiding direction and does not overlap. The detecting device of claim 1, wherein the second incident light is in the same axial direction as the second guiding direction. The detecting device of claim 1, wherein the optical module comprises two lenses that receive the first incident light and the second incident light, respectively.