TWI483283B - Power transmission device and related plasma system - Google Patents

Description

Power introduction device and related plasma system

The invention provides a power introduction design, in particular to a power introduction design which is applied to a plasma source and has better safety.

The conventional vacuum plasma system has a plurality of different configurations, one of which is to set the power introduction portion in a general atmospheric environment, and selectively provide an insulating member on the surface of the power introducing portion while being away from all the ground potentials. The object prevents the abnormal discharge of the high-potential object and the power introduction portion. This type of configuration limits the relationship between the electrodes of the vacuum plasma system and the substrate and its system composition, resulting in a single electrode that can only form one side of the plasma to create a process limitation for one side of the substrate. In addition, another conventional configuration is to place the power introduction portion through a cavity to enter the vacuum environment of the cavity. The outer surface of the power introduction portion is covered with an insulating member, and then coated with a metal member that is electrically ground. The disadvantage of this design is that the inside of the cross section of the insulating member is liable to generate micro-arc due to excessive concentrated electromagnetic field, which in turn causes damage to the insulating member and fails. Therefore, how to design a plasma system with good insulation quality and simultaneous multi-layer substrate coating is a key development goal of related industries.

The invention provides an electric appliance which is applied to a plasma source and has better safety Force to introduce the design to solve the above problems.

The patent application scope of the present invention discloses a power introduction device including a cavity, a sleeve structure, and a power introduction member. An electrode is disposed inside the cavity, and a cavity has a first pressure inside. The sleeve structure extends from the outside of the cavity into the interior of the cavity, and the inside of the sleeve structure has a second pressure. The power introducing member is suspended inside the sleeve structure and connected to the electrode in the cavity. The power introduction device provides an insulation function by using a pressure difference between the first pressure and the second pressure.

The patent application scope of the present invention further discloses that the first pressure is substantially greater than or equal to ten times the second pressure, or the second pressure is substantially greater than or equal to ten times the first pressure, and the cavity and the sleeve structure The internal medium is air.

The scope of the invention further discloses that the power introducing device further comprises an insulating bridge member and an insulating covering member. The insulating bridge is disposed between the sleeve structure and the electrode, and the insulating cover is disposed on a surface of the power introducing member.

The scope of the patent application of the present invention further discloses that the power introducing device is applied to a one-pole high-frequency power generator.

The patent application scope of the present invention further discloses a plasma system comprising at least one stage, an electrode, and at least one power introducing device. Each stage is used to carry a corresponding substrate. The power introducing device is connected to the electrode for supplying power to the electrode to perform coating of the substrate. The power introduction device includes a cavity, a sleeve structure, and a power introduction member. An electrode is disposed inside the cavity, and a cavity has a first pressure inside. The sleeve structure extends from the outside of the cavity into the interior of the cavity, and the inside of the sleeve structure has a second pressure. The power introducing member is suspended inside the sleeve structure and connected to the electrode in the cavity. The power introduction device provides an insulation function by using a pressure difference between the first pressure and the second pressure.

The invention uses a high pressure difference as a means of isolating electrical connection, which has the advantages of simple structure, low cost and excellent insulation effect. It is worth mentioning that the pressure difference between the cavity and the casing structure of the present invention is preferably equal to or greater than ten times, and the relative size relationship is not limited, so as to effectively meet the high power power demand.

Please refer to FIG. 1. FIG. 1 is a schematic view of a plasma system 10 according to an embodiment of the present invention. The plasma system 10 includes at least one stage 12, an electrode 14, and at least one power induction device 16. The stage 12 is used to carry a corresponding substrate 18 for a coating process or the like. The electrode 14 is disposed beside the stage 12. The power introducing device 16 is connected to the electrode 14 for supplying power to the electrode 14 for starting up Cheng. A feature of the present invention is that, as shown in FIG. 1, the plasma system 10 can supply power to one or more sets of electrodes 14 using one or more sets of power induction devices 16, and a plurality of power induction devices 16 may be respectively disposed at positions where the periphery of the electrode 14 is symmetrical or asymmetrical to each other.

The following is a detailed description of one of the power induction devices 16 . The power introducing device 16 includes a cavity 20, a sleeve structure 22, a power introducing member 24, an insulating bridge member 26, and an insulating covering member 28. The cavity 20 can be a sealed structure having a first pressure P1 inside. The stage 12, the electrodes 14 and the substrate 18 are all disposed inside the cavity 20. The sleeve structure 22 is pierced from the outside of the cavity 20 and extends into the interior of the cavity 20, wherein the electrical property of the sleeve structure 22 can be a ground pole, the power introduction member 24 can be a fire pole, and the sleeve structure The interior of 22 has a second pressure P2. The power introduction member 24 is suspended from the inside of the sleeve structure 22 and is connected to the electrode 14 inside the cavity 20. Therefore, the plasma system 10 can transfer power to the electrodes 14 inside the cavity 20 by the power introduction member 24 to perform the process of the substrate 18. Furthermore, the insulating bridge member 26 can be selectively disposed between the sleeve structure 22 and the electrode 14, thereby electrically insulating the gap between the two.

The power introducing member 24 generally does not need to be provided with an insulating material on its surface. The power introduction member 24 is suspended inside the sleeve structure 22 and is not insulated from the inner wall surface of the sleeve structure 22 to be insulated. In addition, the power introducing device 16 of the present invention further increases the internal pressure of the cavity 20 (the first pressure P1) and the internal pressure of the casing structure 22 (the The difference between the two pressures P2) strengthens the insulation effect. For example, since the power introducing device 16 of the present invention is suitable for application to a VHF Power Generator, for example, 40 kW, 60 kW, or even 100 kW, in order to avoid an arc generated by excessive electromagnetic field concentration. Destroying the insulation, the first pressure P1 and the second pressure P2 need to differ by more than ten times, and a better insulation effect can be obtained. Therefore, the first pressure P1 may select a second pressure P2 that is substantially greater than or equal to ten times, or the second pressure P2 may select a first pressure P1 that is substantially greater than or equal to ten times.

Please refer to FIG. 2, which is a partial schematic view of the power introducing device 16 according to an embodiment of the present invention. As shown in FIG. 2, the medium inside the cavity 20 and the sleeve structure 22 may be air. The second pressure P2 in the casing structure 22 may be equal or not equal to the external environmental pressure, and the pressure difference between the first pressure P1 and the second pressure P2 may be formed by a forced regulation or a natural formation manner, and the operation aspect thereof. It may not be limited to the foregoing, depending on actual needs. For example, the plasma system 10 can be equipped with a compressor for removing gas from the casing structure 22 for forced pressure reduction; the plasma system 10 can be placed with a mass controller for use. The gas is introduced to force the qi and pressurization. A pressure gauge can also be disposed in the casing structure 22 for confirming the internal pressure value of the casing structure 22 to adjust the pressure difference between the first pressure P1 and the second pressure P2 as needed. The surface of the power introducing member 24 is selectively provided with an insulating covering member 28 for stabilizing the power introducing member 24 and the sleeve structure 22 when the power introducing member 24 is inserted through the sleeve structure 22 and connected to the electrode 14 inside the cavity 20. Inner wall surface Relationships and avoid contact.

In summary, the plasma system 10 of the present invention can elastically set the number and position of the power introducing means 16 around the large-sized electrode 14 to achieve optimum plasma uniformity and amplify the range of process parameters that can be utilized. The plasma system 10 of the present invention can also utilize the coating of the substrate 18 on both sides of the electrode 14, so that the capacity of the machine can be multiplied, so as to reduce the manufacturing cost and improve the competitiveness of the product. Further, the power introducing device 16 of the present invention utilizes a pressure difference of ten times or more to effectively isolate the bushing structure 22 from the power introducing member 24, so that it can achieve safe and stable power transmission in compliance with high power power demand.

Compared with the prior art, the present invention uses a high pressure difference as a means of isolating electrical connection, which has the advantages of simple structure, low cost and excellent insulation effect. It is worth mentioning that the pressure difference between the cavity and the casing structure of the present invention is preferably equal to or greater than ten times, and the relative size relationship is not limited, so as to effectively meet the high power power demand.

The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

10‧‧‧ Plasma System

12‧‧‧ stage

14‧‧‧Electrode

16‧‧‧Power induction device

18‧‧‧Substrate

20‧‧‧ cavity

22‧‧‧ casing structure

24‧‧‧Power Imports

26‧‧‧Insulated bridges

28‧‧‧Insulating coverings

P1‧‧‧ first pressure

P2‧‧‧ second pressure

Figure 1 is a schematic illustration of a plasma system in accordance with an embodiment of the present invention.

Fig. 2 is a partial schematic view showing a power introducing device according to an embodiment of the present invention.

10‧‧‧ Plasma System

12‧‧‧ stage

14‧‧‧Electrode

16‧‧‧Power induction device

18‧‧‧Substrate

20‧‧‧ cavity

22‧‧‧ casing structure

24‧‧‧Power Imports

26‧‧‧Insulated bridges

28‧‧‧Insulating coverings

P1‧‧‧ first pressure

P2‧‧‧ second pressure

Claims (14)

An electric power introduction device comprises: a cavity, an electrode is disposed inside the cavity, and a cavity has a first pressure inside; a casing structure, the sleeve structure extends from the outside of the cavity Provided into the interior of the cavity, the inside of the sleeve structure has a second pressure; and a power introduction member is suspended inside the sleeve structure and connected to the electrode in the cavity; wherein the electric power is introduced The device provides an insulation function by utilizing a pressure difference between the first pressure and the second pressure. The power introducing device of claim 1, wherein the first pressure is substantially greater than or equal to ten times the second pressure. The power induction device of claim 1, wherein the second pressure is substantially greater than or equal to ten times the first pressure. The power introducing device of claim 1, wherein the medium inside the cavity and the sleeve structure is air. The power induction device of claim 1, further comprising: An insulating bridge is disposed between the sleeve structure and the electrode. The power introducing device of claim 1, further comprising: an insulating covering member disposed on a surface of the power introducing member. The power introducing device of claim 1, wherein the power introducing device is applied to a one-pole high-frequency power generator. A plasma system comprising: at least one stage, each stage for carrying a corresponding substrate; an electrode disposed beside the stage; and at least one power introduction device connected to the electrode for providing power The electrode is provided to perform coating on the substrate, the power introducing device comprises: a cavity disposed inside the cavity, and having a first pressure inside the cavity; a sleeve structure, the sleeve The tube structure extends from the outside of the cavity into the cavity, the inside of the sleeve structure has a second pressure; and a power introduction member is suspended and disposed inside the sleeve structure and connected to the cavity The electrode in the body; wherein the power introducing device provides an insulating function by using a pressure difference between the first pressure and the second pressure. The plasma system of claim 8, wherein the first pressure is substantially greater than or equal to ten times the second pressure. The plasma system of claim 8, wherein the second pressure is substantially greater than or equal to ten times the first pressure. The plasma system of claim 8, wherein the chamber and the medium inside the sleeve structure are air. The plasma system of claim 8, wherein the power introducing device further comprises: an insulating bridge disposed between the sleeve structure and the electrode. The plasma system of claim 8, wherein the power introducing device further comprises: an insulating covering member disposed on a surface of the power introducing member. The plasma system of claim 8, wherein the power introduction device is applied to a very high frequency power generator.