TWI480143B - Industrial robot - Google Patents

Description

Industrial robot

The present invention relates to an industrial robot that transports a specific object to be transported.

Industrial robots that transport specific objects to be transported have been widely used. As such an industrial robot, an industrial robot including a robot to which a transfer object is mounted, an arm for holding a robot, and a ball screw that moves the arm up and down is known (for example, see Patent Document 1). In the industrial robot described in Patent Document 1, a motor is coupled to the ball screw, and the ball screw is driven by one motor.

In addition, an industrial robot that can move the gantry of the main body of the robot in the horizontal direction (for example, see Patent Document 2) is also known. The industrial robot described in Patent Document 2 includes a rack and pinion for moving the susceptor in the horizontal direction, and a motor for rotating the pinion.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-102886

[Patent Document 2] Japanese Patent Laid-Open No. Hei 6-106487

In the case of a glass substrate for a liquid crystal display, the object to be transported by the industrial robot is large in size every year. With the increase in the size of the object to be transported, the industrial robot that transports the large-sized object to be transported has a tendency to increase in size. Further, with the increase in the size of industrial robots, the cost of industrial robots tends to increase.

Therefore, an object of the present invention is to provide an industrial robot that can be reduced in size and can reduce costs even when a large-sized object to be transported is transported.

In order to solve the above problems, the industrial robot according to the present invention includes: a robot that mounts an object to be transported; an arm that couples the robot; and a support member that supports the arm, and includes: driving the support member up and down to move up and down a mechanism and a control unit that controls the upper and lower drive mechanisms; the upper and lower drive mechanisms include a plurality of drive motors, and the control unit includes a motor control unit that controls the plurality of drive motors, and the motor control unit: either by speed control or position control And the first drive motor, which is a plurality of drive motors of the plurality of drive motors, and the second drive for controlling the other drive motors other than the first drive motor by torque control; Use a motor. In addition, the industrial robot according to the present invention includes: a robot that mounts an object to be transported; an arm that couples the robot; and a support member that supports the arm, and includes: the support member is horizontally a horizontal driving mechanism for moving and a control unit for controlling the horizontal driving mechanism; the horizontal driving mechanism includes a plurality of driving motors, and the control unit includes a motor control unit for controlling a plurality of driving motors, and the motor control unit is: speed control or position control Any one of the plurality of driving motors, that is, the first driving motor, which is controlled by the torque control; and the remaining driving motors other than the first driving motor are controlled by the torque control That is, the second drive motor. Further, in order to solve the above problems, the industrial robot according to the present invention includes: a robot that mounts an object to be transported; an arm that couples the robot; and a support member that supports the arm, and includes: the support member is placed up and down a rotation drive mechanism that rotates as a center axis as a specific central axis; and a control unit that controls the rotation drive mechanism; the rotation drive mechanism includes a plurality of drive motors, and the control unit includes a motor control that controls the plurality of drive motors The motor control unit controls the first drive motor, which is a plurality of drive motors of the plurality of drive motors, by the speed control or the position control, and the torque control The second drive motor, which is the other drive motor except the first drive motor, is controlled.

As the object to be transported is enlarged, the total capacity of the drive motor required for the vertical drive mechanism, the horizontal drive mechanism, and/or the rotary drive mechanism is increased. Therefore, when the upper and lower drive mechanism, the horizontal drive mechanism, and/or the rotary drive mechanism are driven by one drive motor, it is necessary to use a motor having a large outer shape, and the industrial robot has a large size.

In the industrial robot of the present invention, the vertical drive mechanism includes a plurality of drive motors. Further, in the industrial robot of the present invention, the horizontal drive mechanism includes a plurality of drive motors, and the rotary drive mechanism includes a plurality of drive motors. Therefore, even when the total capacity of the drive motor required for the upper and lower drive mechanisms is large, a drive horse having a small outer shape can be used. Even when the total capacity of the drive motor required by the horizontal drive mechanism is large, a drive motor having a small outer shape can be used, even if the total capacity of the drive motor required by the rotary drive mechanism is large. In this case, a smaller drive motor can also be used. In addition, when a plurality of driving motors having a small outer shape are used, the degree of freedom in the arrangement of the driving motors is increased as compared with the case of using a single driving motor having a large outer shape. Therefore, in the present invention, the industrial robot can be downsized even if a large object to be transported is transported.

Further, when the capacity of the drive motor exceeds a specific capacity, the price of the drive motor is rapidly increased. However, in the present invention, since a drive motor having a small capacity can be used, even if a plurality of drive motors are used, In this case, the cost of industrial robots can also be reduced.

Further, in the present invention, since the drive motor having a small capacity can be used, the power transmitted from one drive motor is reduced. Therefore, the transmission power to the power transmission mechanism such as the gear that transmits the power of the drive motor can be reduced, and the configuration of the power transmission mechanism can be simplified. Moreover, damage to the power transmission mechanism can be suppressed.

On the other hand, when a plurality of driving motors are used, there is a case where the driving torque of one of the driving motors becomes a large load of the other driving motor due to a difference in the rotational speed or the like. In the present invention, the motor control unit controls one of the plurality of driving motors, that is, the first driving motor, by one of speed control or position control, and torque control; The moment control controls the second drive motor other than the first drive motor. Therefore, the rotational speed or the rotational position of the second drive motor is not controlled, so that the second drive motor rotates in accordance with the rotational speed or rotational position of the first drive motor. As a result, even if a plurality of driving motors are used, it is possible to prevent the driving torque of one of the driving motors from becoming a large load of the other driving motors.

In the present invention, it is preferable that the first drive motor is a single drive motor. According to this configuration, the remaining drive motors can be controlled based on one drive motor. Therefore, for example, by controlling the rotational speed of one of the first driving motors and not controlling the rotational speeds of the remaining second driving motors, the second driving motor can be rotated by a first driving motor. The speed is rotated. As a result, it is possible to reliably prevent the driving torque of one of the driving motors from becoming a large load of the other driving motor.

In addition, the industrial robot according to the present invention includes: a robot that mounts a transfer object; a support arm that connects the arm of the robot and the support arm; and includes: the support member is horizontally a horizontal driving mechanism for moving; and a control unit for controlling the horizontal driving mechanism; the horizontal driving mechanism includes a plurality of driving motors, the control unit includes a horizontal motor control unit that controls the plurality of driving motors, and each of the plurality of driving motors includes a detection driving The speed detecting means of the rotational speed of the motor uses a plurality of driving motors of the plurality of driving motors as the first horizontal driving motor, and the rest of the first horizontal driving motor The driving motor is a second horizontal driving motor, and the horizontal motor control unit controls the first horizontal driving motor by either the speed control or the position control, and calculates the reference pulse number and the detected pulse. The difference between the numbers, wherein the number of reference pulses is detected by the number of pulses from the specific reference position of the support member to the predetermined stop position detected by the first speed detecting means of the speed detecting means of the first horizontal drive motor The number of pulses is the actual number of pulses detected by the first speed detecting means from the reference position of the supporting member; when the difference is below a specific value, either by speed control or position control, Torque control controls the second horizontal drive motor, and when the difference between the number of reference pulses and the number of detected pulses is larger than a specific value, the second horizontal drive motor is controlled by torque control.

With the increase in the size of the object to be transported, the total capacity of the drive motor required by the horizontal drive mechanism is increased. Therefore, when the horizontal drive mechanism is driven by one drive motor, it is necessary to use a motor having a large outer shape for industrial use. Robots have a large scale. In the industrial robot of the present invention, the horizontal drive mechanism includes a plurality of drive motors. Therefore, even when the total capacity of the drive motor required for the horizontal drive mechanism is large, a drive motor having a small outer shape can be used. In addition, when a plurality of driving motors having a small outer shape are used, the degree of freedom in the arrangement of the driving motors is increased as compared with the case of using a single driving motor having a large outer shape. Therefore, in the present invention, the industrial robot can be downsized even if a large object to be transported is transported. Further, when the capacity of the drive motor exceeds a specific capacity, the price of the drive motor is rapidly increased. However, in the present invention, since a drive motor having a small capacity can be used, even if a plurality of drive motors are used, In this case, the cost of industrial robots can also be reduced. Further, in the present invention, since the drive motor having a small capacity can be used, the power transmitted from one drive motor is reduced. Therefore, the transmission power to the power transmission mechanism such as the gear that transmits the power of the drive motor can be reduced, and the configuration of the power transmission mechanism can be simplified. Moreover, damage to the power transmission mechanism can be suppressed. On the other hand, when a plurality of driving motors are used, there is a case where the driving torque of one of the driving motors becomes a large load of the other driving motor due to a difference in the rotational speed or the like. In the present invention, the horizontal motor control unit controls the first horizontal drive motor by either speed control or position control, and calculates a difference between the number of reference pulses and the number of detected pulses, wherein the reference The number of pulses is determined by the number of pulses detected from the specific reference position of the support member to the predetermined stop position detected by the first speed detecting means of the speed detecting means of the first horizontal drive motor. The actual number of pulses detected by the first speed detecting means from the reference position of the supporting member; when the difference is equal to or less than a specific value, the speed control or the position control is controlled by the torque control The two horizontal drive motors, and when the difference between the number of reference pulses and the number of detected pulses is larger than a specific value, the second horizontal drive motor is controlled by torque control. Therefore, when the difference between the number of reference pulses and the number of detection pulses is larger than a specific value, the rotation of the second horizontal driving motor The speed or the rotational position is not controlled, so the second horizontal drive motor rotates in accordance with the rotational speed or rotational position of the first horizontal drive motor. As a result, even if a plurality of driving motors are used, it is possible to prevent the driving torque of one of the driving motors from becoming a large load of the other driving motors. Further, when the difference between the number of reference pulses and the number of detection pulses is equal to or less than a specific value, before the second horizontal drive motor is stopped, the rotational speed or rotational position of the second horizontal drive motor is controlled so that the first The power transmission mechanism that transmits the power of the horizontal drive motor and the second horizontal drive motor to the support member disappears when the stop occurs.

In addition, the industrial robot according to the present invention includes: a robot that mounts an object to be transported; a support arm that connects the arm of the robot and the support arm; and includes: a vertical driving mechanism that rotates around a specific central axis of the axial direction as a center; and a control unit that controls the rotational driving mechanism; the rotational driving mechanism includes a plurality of driving motors, and the control unit includes a rotation that controls the plurality of driving motors Each of the plurality of driving motors includes a speed detecting mechanism that detects a rotational speed of the driving motor, and a plurality of driving motors of the plurality of driving motors are used as the first rotational driving motor, and the first rotation is performed. The other drive motor other than the drive motor is used as the second rotary drive motor, and the rotary motor control unit controls the first rotary drive motor by the speed control or the position control, and calculates the reference. The difference between the number of pulses and the number of detected pulses, wherein the number of reference pulses is The number of pulses detected from the specific rotation reference position of the support member to the predetermined stop position detected by the first speed detecting means of the speed detecting means of the rotation drive motor, and the detected number of pulses is detected by the first speed detecting means The actual number of pulses from the rotation reference position of the support member; when the difference is equal to or less than a specific value, the second rotation drive motor is controlled by either the speed control or the position control, and the torque control Further, when the difference between the number of reference pulses and the number of detected pulses is larger than a specific value, the second rotary drive motor is controlled by torque control. .

With the increase in the size of the object to be transported, the total capacity of the drive motor required for the rotary drive mechanism is increased. Therefore, when the rotary drive mechanism is driven by one drive motor, it is necessary to use a motor having a large outer shape for industrial use. Robots have a large scale. In the industrial robot of the present invention, the rotary drive mechanism includes a plurality of drive motors. Therefore, even when the total capacity of the drive motor required for the rotary drive mechanism is large, a drive motor having a small outer shape can be used. In addition, when a plurality of driving motors having a small outer shape are used, the degree of freedom in the arrangement of the driving motors is increased as compared with the case of using a single driving motor having a large outer shape. Therefore, in the present invention, the industrial robot can be downsized even if a large object to be transported is transported. Further, when the capacity of the drive motor exceeds a specific capacity, the price of the drive motor is rapidly increased. However, in the present invention, since a drive motor having a small capacity can be used, even when a plurality of drive motors are used, In the case of a motor, the cost of industrial robots can also be reduced. Further, in the present invention, since the drive motor having a small capacity can be used, the power transmitted from one drive motor is reduced. Therefore, the transmission power to the power transmission mechanism such as the gear that transmits the power of the drive motor can be reduced, and the configuration of the power transmission mechanism can be simplified. Moreover, damage to the power transmission mechanism can be suppressed. On the other hand, when a plurality of driving motors are used, there is a case where the driving torque of one of the driving motors becomes a large load of the other driving motor due to a difference in the rotational speed or the like. In the present invention, the rotation motor control unit controls the first rotation drive motor by either the speed control or the position control, and calculates the difference between the number of reference pulses and the number of detected pulses. The number of pulses is detected by the number of pulses detected from the specific rotation reference position of the support member to the predetermined stop position detected by the first speed detecting means of the speed detecting means of the first rotation driving motor. The actual number of pulses detected by the first speed detecting means from the rotational reference position of the support member; when the difference is below a specific value, by either speed control or position control, and torque control The second rotation drive motor is controlled, and when the difference between the reference pulse number and the detection pulse number is larger than a specific value, the second rotation drive motor is controlled by torque control. Therefore, when the difference between the number of reference pulses and the number of detection pulses is larger than a specific value, the rotation speed or the rotational position of the second rotation drive motor is not controlled, so the second rotation drive motor follows the first rotation drive motor. Rotate at the speed of rotation or the position of rotation. As a result, even if a plurality of driving motors are used, it is possible to prevent the driving torque of one of the driving motors from becoming a large load of the other driving motors. Further, when the difference between the number of reference pulses and the number of detection pulses is equal to or less than a specific value, before the second rotation drive motor is stopped, the rotation speed or the rotation position of the second rotation drive motor is controlled so as to be used for the first The power transmission mechanism that transmits the power of the rotation drive motor and the second rotation drive motor to the support member disappears when the stop occurs.

As described above, the industrial robot of the present invention can reduce the size of the industrial robot and reduce the cost of the industrial robot even when the large-sized transport object is transported.

Hereinafter, embodiments of the present invention will be described based on the drawings.

(summary structure of industrial robot)

Fig. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. Fig. 2 is a view showing the industrial robot 1 from the E-E direction of Fig. 1 . Fig. 3 is a view showing the industrial robot 1 from the F-F direction of Fig. 1.

The industrial robot 1 (hereinafter referred to as "the robot 1") of the present embodiment is a robot for transporting the glass substrate 2 for liquid crystal display (hereinafter referred to as "substrate 2") as a transfer target. The robot 1 of the present embodiment is particularly suitable for a large-sized robot that transports a large-sized substrate 2, for example, a substantially square substrate 2 having a length of about 3 m. Further, the object to be transported is not limited to the substrate 2, and may be a semiconductor wafer or the like.

As shown in FIGS. 1 to 3, the robot 1 includes two robots 3 on which the substrate 2 is mounted, two arms 4 connected to each of the two robots 3 on the distal end side, and a body portion that supports the two arms 4. 5; and movably supporting the base member 6 of the body portion 5 in the horizontal direction. The body portion 5 includes: a support member 7 that supports the base end side of the two arms 4 and is movable up and down; a columnar member 8 for movably supporting the support member 7 in the up and down direction; and a lower end portion of the body portion 5 and A base 9 that can move horizontally with respect to the base member 6; and a swing member 10 to which the lower end of the columnar member 8 is fixed and can be rotated with respect to the base 9.

As described above, the robot 1 of the present embodiment is a large robot. For example, the height of the robot 1 is about 7 m, and the stroke (moving amount) of the support member 7 in the up and down direction is about 5 m. Further, for example, the horizontal direction of the robot 3 is about 5.5 m.

The robot 3 includes a plurality of claws 12 for mounting the substrate 2. The base end of the robot 3 is rotatably coupled to the front end of the arm 4. The arm 4 has two joint portions 13 which are integrally stretchable. Further, the base end of the arm 4 is fixed to the support member 7.

In the present embodiment, the two robots 3 and the two arms 4 are arranged to overlap in the vertical direction. That is, the robot 1 of the present embodiment is a two-arm type robot. Further, the robot 1 may be a one-arm type robot including a robot 3 and an arm 4.

Further, the robot 1 includes a vertical drive mechanism 16 for moving the support member 7 up and down (see FIG. 4), a horizontal drive mechanism 17 for moving the main body portion 5 in the horizontal direction (refer to FIG. 7), and a counter-rotating member 10 with respect to the base. The rotary drive mechanism 18 (see Fig. 7) which is rotated by the table 9. Hereinafter, the configuration of the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotary drive mechanism 18, and the configuration of the peripheral portion thereof will be described.

(Composition of the upper and lower drive mechanisms and their peripheral parts)

Fig. 4 is a view showing the support member 7 and the vertical drive mechanism 16 from the F-F direction of Fig. 1. Fig. 5 is a view showing the support member 7, the columnar member 8, and the vertical drive mechanism 16 from the G-G direction of Fig. 4 . Fig. 6 is a view showing the vertical drive mechanism 16 from the H-H direction of Fig. 4.

As shown in Fig. 5, the vertical drive mechanism 16 is disposed on the side of the columnar member 8 (below the columnar member 8 of Fig. 5). The vertical drive mechanism 16 includes two upper and lower drive motors 20 and two reducers 21 connected to each of the two vertical drive motors 20. As shown in Fig. 4, one vertical drive motor 20, two reduction gears 21, and one vertical drive motor 20 are fixed to the support member 7 in this order from the top.

Further, the vertical drive mechanism 16 includes two pinions 22 that are fixed to the output shafts of the two reduction gears 21 as upper and lower drive pinions, and two pinions 22 that mesh with the two pinions 22 for up and down drive. Rack 23 of the rack. With the two pinion gears 22 and the rack 23, the support member 7 moves in the up and down direction. Further, the upper and lower drive mechanism 16 includes two upper and lower brake mechanisms 24 for stopping the upper and lower drive mechanisms 16 (i.e., for stopping the support member 7).

Further, as shown in FIG. 5, the robot 1 includes a guide portion 25 for guiding the support member 7 in the up and down direction. The guide portion 25 is composed of a guide rail 26 and a guide block 27 that is engaged with the guide rail 26. Further, the columnar member 8 is formed in a substantially angular columnar shape in which the upper and lower directions are elongated in the longitudinal direction, and the support member 7 is formed in a block shape.

The vertical drive motor 20 includes a speed detecting mechanism (not shown) for detecting the rotational speed of the vertical drive motor 20. The speed detecting means is composed of, for example, a slit plate formed in a disk shape and a light-emitting element and a light-receiving element which are disposed to face each other with the slit plate interposed therebetween.

As shown in FIG. 6, the pulley 28 is fixed to the output shaft of the up-and-down drive motor 20. Further, a pulley 29 larger than the diameter of the pulley 28 is fixed to the input shaft of the speed reducer 21. A belt 30 is placed on the pulleys 28 and 29, and the upper and lower driving motors 20 and the speed reducer 21 are connected adjacent to each other in the vertical direction by the belt 30.

The rack 23 is fixed to the columnar member 8 as a longitudinal direction in the up-down direction (see FIG. 5). As described above, in the present embodiment, the stroke of the support member 7 in the vertical direction is long. That is, the length of the rack 23 is long. Therefore, in the present embodiment, the rack 23 is formed by joining a plurality of rack pieces together. In addition, the length of one rack piece becomes longer than the arrangement pitch of the two pinion gears 22.

As shown in FIG. 6 and the like, the upper and lower brake mechanisms 24 are attached to the input shaft of the reduction gear 21 so as to be adjacent to the pulley 29. That is, each of the two upper and lower brake mechanisms 24 is coupled to each of the two vertical drive motors 20 via the pulleys 28 and 29 and the belt 30.

The upper and lower brake mechanism 24 is a so-called non-excitation type brake, and includes: a housing that houses the coil; a side plate that is fixed to the housing; and an armature that is movably disposed in the axial direction with respect to the housing; a brake disc disposed between the side plate and the armature and fixed to the input shaft of the reducer 21; and a compression coil spring biasing the armature toward the brake disc. In the upper and lower brake mechanism 24, when the coil is energized, the armature is attracted by the casing, and the brake disc is released. Further, when the energization of the coil is stopped, the brake disc is sandwiched between the armature and the side plate by the biasing force of the compression coil spring, and the speed reducer 21 is braked urgently. Further, the upper and lower brake mechanisms 24 have a braking force that can sufficiently stop the portion that moves in the vertical direction including the substrate 2, the robot 3, the arm 4, and the support member 7.

The guide rail 26 is fixed to the columnar member 8 in the longitudinal direction of the upper and lower directions (see FIG. 5). In the present embodiment, the two guide rails 26 are fixed to the columnar member 8. Specifically, the guide rails 26 are fixed to the mounting faces of the two columnar members 8 which are parallel in the left-right direction of FIG. Further, the guide rail 26 disposed on the lower side of FIG. 5 is fixed adjacent to the rack 23.

The guide block 27 is fixed to the support member 7. Specifically, on the surface of the support member 7 that is orthogonal to the fixed surface of the arm 4 (the right end surface of FIG. 5), a guide block 27 is fixed, and the guide block 27 is engaged from the outer side of the upper and lower sides of FIG. Guide rail 26.

Further, in the present embodiment, as shown in FIG. 5, the lid member 31 is fixed to the columnar member 8. The cover member 31 is disposed to cover the guide rail 26 from above and below in FIG.

(Composition of horizontal drive mechanism and its peripheral parts)

Fig. 7 is a view for explaining the internal configuration of the J portion of Fig. 2. Fig. 8 is a view for explaining the configuration of the horizontal drive mechanism 17 and the like from the K-K direction of Fig. 3. Fig. 9 is a view for explaining the configuration of the horizontal drive mechanism 17 from the L-L direction of Fig. 8.

As shown in Fig. 7, the horizontal drive mechanism 17 is disposed on the left end side of the base 9 of Fig. 7. The horizontal drive mechanism 17 includes two horizontal drive motors 40. As shown in Fig. 8, the two horizontal drive motors 40 are arranged adjacent to each other in the left-right direction of Fig. 8. Further, each of the two horizontal drive motors 40 is fixed to each of the two brackets 52 fixed to the base 9. On each of the two brackets 52, as shown in Figs. 8 and 9, the rotating shaft 53 is rotatably held via a bearing 54. The two rotating shafts 53 are arranged adjacent to each other in the left-right direction of FIG.

Further, the horizontal drive mechanism 17 includes two pinion gears 42 as horizontal drive pinions fixed to the lower ends of the two rotary shafts 53, and a rack 43 as a horizontal drive rack that meshes with the two pinion gears 42. . With the two pinion gears 42 and the rack 43, the base 9 is moved in the horizontal direction. Further, the horizontal drive mechanism 17 includes two horizontal brake mechanisms 44 for stopping the horizontal drive mechanism 17 (i.e., to stop the base 9).

Further, the robot 1 includes a guide portion 45 for guiding the base 9 in the horizontal direction. The guide portion 45 is composed of a guide rail 46 and a guide block 47 that is engaged with the guide rail 46. Further, as shown in FIGS. 7 and 8, the base member 6 includes two elongated rail-shaped members 51. The rail-shaped members 51 are arranged in parallel in a state in which a certain interval is left in the left-right direction of FIG.

The horizontal drive motor 40 includes a speed detecting mechanism (not shown) for detecting the rotational speed of the horizontal drive motor 40. The speed detecting means is composed of, for example, a slit plate formed in a disk shape and a light-emitting element and a light-receiving element which are disposed to face each other with the slit plate interposed therebetween.

As shown in FIG. 9, a pulley 48 is fixed to the output shaft of the horizontal drive motor 40. Further, a pulley 49 larger than the diameter of the pulley 48 is fixed to the upper end side of the rotating shaft 53. A belt 50 is placed on the pulleys 48 and 49, and the horizontal drive motor 40 and the rotary shaft 53 which are disposed adjacent to each other in the lower direction of FIG. 8 are coupled by the belt 50.

As shown in FIG. 8, the rack 43 is fixed to the upper surface of the rail-shaped member 51. In the present embodiment, since the amount of movement of the base 9 is large, the length of the rack 43 is long. Therefore, the rack 43 is formed by joining a plurality of rack pieces together.

As shown in FIG. 9, the horizontal brake mechanism 44 is attached to the output shaft of the horizontal drive motor 40 so as to be adjacent to the pulley 48. The horizontal brake mechanism 44 is a so-called non-excitation type brake similar to the vertical brake mechanism 24, and is configured similarly to the upper and lower brake mechanisms 24. That is, in the horizontal brake mechanism 44, when the coil is in the energized state, the armature is attracted by the casing, and the brake disc is released. Further, when the energization of the coil is stopped, the brake disc is sandwiched between the armature and the side plate by the biasing force of the compression coil spring, and the horizontal drive motor 40 is braked urgently.

As shown in FIG. 8, the guide rail 46 is fixed to the upper surface of the rail-shaped member 51. In the present embodiment, the guide rails 46 are fixed to the upper surfaces of the two rail-shaped members 51. Further, the guide rail 46 disposed on the upper side of FIG. 8 is fixed adjacent to the rack 43. As shown in Fig. 7, the guide blocks 47 are fixed to both end portions of the base 9 in the left-right direction of Fig. 7. The guide block 47 is engaged with the guide rail 46 from the upper side.

(Configuration of the rotary drive mechanism and its peripheral parts)

Figure 10 is a plan view of the swing member 10 shown in Figure 1. Figure 11 is a cross-sectional view of the M-M section of Figure 10.

As shown in FIGS. 10 and 11, the rotation drive mechanism 18 is disposed around the center axis CL which is the center of the swirl of the swing member 10. The rotary drive mechanism 18 includes two rotary drive motors 60. As shown in FIG. 10, the two rotation drive motors 60 are arranged in point symmetry with respect to the center axis CL, and are fixed to the center portion of the gyroscopic member 10. Further, the rotation drive mechanism 18 includes a reduction gear 61 that is fixed to a central portion of the revolving member 10. Further, the rotary drive mechanism 18 includes a rotary brake mechanism 64 for stopping the rotary drive mechanism 18 (i.e., to stop the swing member 10). Further, the revolving member 10 is an elongated block-shaped member, and the lower end of the columnar member 8 is fixed to one end side (the left end side of FIG. 10).

The rotation drive motor 60 includes a speed detecting mechanism (not shown) for detecting the rotation speed of the rotation drive motor 60. The speed detecting means is composed of, for example, a slit plate formed in a disk shape and a light-emitting element and a light-receiving element which are disposed to face each other with the slit plate interposed therebetween.

As shown in FIG. 11, an output gear 68 is fixed to the output shaft of the rotary drive motor 60, and the two output gears 68 mesh with the input gear 69 of the speed reducer 61. The revolving member 10 is rotated relative to the base 9 by the two output gears 68 and the speed reducer 61 including the input gear 69. That is, the output side of the speed reducer 61 is fixed to the center portion of the turning member 10, and the turning member 10 rotates with respect to the base 9 by the power of the rotation driving motor 60 transmitted through the speed reducer 61.

As shown in FIG. 11, the rotary brake mechanism 64 is fixed to the upper end of the rotary shaft 73, and the rotary shaft 73 is rotatably held by the center portion of the rotary member 10 via a bearing 74. At the lower end of the rotating shaft 73, a gear 70 that meshes with the input gear 69 of the speed reducer 61 is fixed. Further, as shown in FIG. 10, the rotary brake mechanism 64 is disposed at a position where the rotary drive motor 60 is rotated by 90° around the central axis CL.

The rotary brake mechanism 64 is a so-called non-excitation type brake similar to the vertical brake mechanism 24, and is configured similarly to the upper and lower brake mechanisms 24. That is, in the rotary brake mechanism 64, when the coil is in the energized state, the armature is attracted by the casing, and the brake disc is released. Further, when the energization of the coil is stopped, the brake disc is sandwiched between the armature and the side plate by the biasing force of the compression coil spring, and the input gear 69 is urgently braked.

(Composition of Control Department)

Fig. 12 is a block diagram showing the control unit 80 of the industrial robot 1 shown in Fig. 1 and its related parts. In addition, in FIG. 12, the structure of the control part 80 related to the control of the up-and-down drive mechanism 16, the horizontal drive mechanism 17, and the rotation drive mechanism 18 is shown.

As shown in FIG. 12, as a configuration related to the control of the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotary drive mechanism 18, the control unit 80 includes two upper and lower drive motors 20 for controlling the upper and lower motor control portions 81; a horizontal motor control unit 82 for the horizontal drive motor 40; a rotary motor control unit 83 for controlling the two rotary drive motors 60; two upper and lower brake mechanisms 24 for controlling the upper and lower brake control units 84; and two horizontal brake mechanisms 44 for controlling The horizontal brake control unit 85; and a rotary brake control unit 86 that controls one rotary brake mechanism 64. Further, a control command unit 87 is connected to the control unit 80.

The upper and lower motor control units 81 individually control each of the two upper and lower drive motors 20. Specifically, the upper and lower motor control unit 81 controls one of the two upper and lower driving motors 20 by the speed control and the torque control, and controls the other upper and lower driving by the torque control. Motor 20. In other words, the upper and lower motor control unit 81 performs feedback control based on the output of the speed detecting means from the vertical driving motor 20 and torque control for controlling the current value of the vertical driving motor 20 for one of the upper and lower driving motors 20, Further, the drive motor 20 for the upper and lower driving is not subjected to feedback control based on the output of the speed detecting means from the vertical driving motor 20, and torque control for controlling the current value of the vertical driving motor 20 is performed.

In the present embodiment, one of the two upper and lower drive motors 20 is the first drive motor. Further, the other upper and lower driving motor 20 is a second driving motor.

The horizontal motor control unit 82 controls each of the two horizontal drive motors 40 individually. Specifically, the horizontal motor control unit 82 controls one of the two horizontal drive motors 40 by the speed control and the torque control. In addition, the horizontal motor control unit 82 controls the other horizontal drive motor 40 by speed control and torque control, similarly to one of the horizontal drive motors 40, before the other horizontal drive motor 40 is stopped. When the other horizontal driving motor 40 is stopped before the other, the other horizontal driving motor 40 is controlled by the torque control.

In other words, the horizontal motor control unit 82 does not perform the speed detecting mechanism based on the horizontal driving motor 40 for the other horizontal driving motor 40 except when the other horizontal driving motor 40 is stopped. Output feedback control for torque control. Further, before the other horizontal drive motor 40 is stopped, the horizontal motor control unit 82 performs feedback control based on the output of the speed detecting mechanism from the horizontal drive motor 40 for the other horizontal drive motor 40, and The rotational speed of the horizontal drive motor 40 is controlled such that the backlash between the two pinion gears 42 and the rack 43 disappears.

Here, whether or not the other horizontal drive motor 40 is in a state before the stop is determined, for example, by the horizontal motor control unit 82 based on the output of the speed detecting means from the one horizontal drive motor 40. For example, the horizontal motor control unit 82 calculates the number of pulses from the specific reference position to the predetermined stop position of the base 9 detected by the speed detecting means of the one horizontal drive motor 40, and is actually detected by the speed detecting means. When the difference between the number of pulses and the difference is a specific value or less, it is determined that the other horizontal drive motor 40 is in a state before the stop. That is, when the base 9 enters the range of a specific distance from the stop planned position, the other horizontal drive motor 40 is in a state before the stop.

In the present embodiment, one of the two horizontal drive motors 40 is the first drive motor and the first horizontal drive motor. Further, the other horizontal drive motor 40 is a second drive motor and is a second horizontal drive motor.

Similarly, the rotation motor control unit 83 controls each of the two rotation drive motors 60 individually. Specifically, the rotation motor control unit 83 controls one of the two rotation drive motors 60 by the speed control and the torque control. In addition, the rotation motor control unit 83 controls the other rotation drive motor 60 by speed control and torque control, similarly to one of the rotation drive motors 60, before the other rotation drive motor 60 is stopped. When the other of the rotation drive motors 60 is stopped, the other rotation drive motor 60 is controlled by the torque control.

In other words, when the other rotation drive motor 60 is stopped, the rotation motor control unit 83 does not perform the output based on the speed detection mechanism from the rotation drive motor 60 with respect to the other rotation drive motor 60. Feedback control while performing torque control. Further, before the other rotation drive motor 60 is stopped, the rotation motor control unit 83 performs feedback control based on the output of the speed detection mechanism from the rotation drive motor 60 for the other rotation drive motor 60, and The rotational speed of one of the rotational drive motors 60 is controlled such that the backlash between the two output gears 68 and the input gear 69 disappears.

Here, whether or not the other rotation drive motor 60 is in a state before the stop is determined by, for example, the rotation motor control unit 83 based on the output of the speed detection mechanism from one of the rotation drive motors 60. For example, the rotation motor control unit 83 calculates the number of pulses from the specific reference position to the predetermined stop position of the swing member 10 detected by the speed detecting means of one of the rotational drive motors 60, and is actually detected by the speed detecting means. When the difference between the number of pulses and the difference is a specific value or less, it is determined that the other rotation drive motor 60 is in a state before the stop. That is, when the turning member 10 enters the specific angle range from the stop planned position, the other rotational driving motor 60 is in a state before the stop.

In the present embodiment, one of the two rotation drive motors 60 is the first drive motor and the first rotation drive motor. Further, the other rotation drive motor 60 is a second drive motor and is a second rotation drive motor.

When the stop signal of the support member 7 is input from the control command unit 87, the vertical brake control unit 84 causes the two vertical brake mechanisms 24 to be operated stepwise. In other words, when the stop signal of the support member 7 is input from the control command unit 87, the upper and lower brake control unit 84 sets the start timing of the one upper and lower brake mechanisms 24 to be different from the start timing of the other upper and lower brake mechanisms 24 (staggered) The way, the two upper and lower brake mechanisms 24 are actuated. Specifically, the upper and lower brake control unit 84 activates the two vertical brake mechanisms 24 such that the actuation start timing of the other upper and lower brake mechanisms 24 is later than the actuation start timing of one of the upper and lower brake mechanisms 24 . More specifically, the upper and lower brake control unit 84 stops the two upper and lower brake mechanisms so that the timing of stopping the energization of the coil of the other upper and lower brake mechanism 24 is later than the timing of stopping the energization of the coil of the upper and lower brake mechanism 24 The coil of 24 is energized.

Similarly, when the horizontal brake control unit 85 receives the stop signal of the base 9 from the control command unit 87, the two horizontal brake mechanisms 44 are operated stepwise. In other words, when the stop signal of the base 9 is input from the control command unit 87, the horizontal brake control unit 85 shifts the start timing of the one horizontal brake mechanism 44 from the start timing of the other horizontal brake mechanism 44. The two horizontal brake mechanisms 44 are actuated. Specifically, the horizontal brake control unit 85 activates the two horizontal brake mechanisms 44 such that the actuation start timing of the other horizontal brake mechanism 44 is later than the actuation start timing of one of the horizontal brake mechanisms 44. Further, when the stop signal of the base 9 is input from the control command unit 87, the horizontal brake control unit 85 can also simultaneously actuate the two horizontal brake mechanisms 44.

(Main effects of this embodiment)

As described above, in the present embodiment, the vertical drive mechanism 16 includes two upper and lower drive motors 20. Therefore, in order to convey the large-sized substrate 2, even when the total capacity of the upper-lower drive motor 20 is increased as required by the vertical drive mechanism 16, the upper-lower drive motor 20 having a relatively small outer shape can be used. For example, when the total capacity of the upper and lower drive motors 20 required by the upper and lower drive mechanisms 16 is 10 kW, a 5 kW upper and lower drive motor 20 having a relatively small outer shape can be used instead of a 10 kW upper and lower drive motor having a large outer shape. . Further, when two up-and-down driving motors 20 having a small outer shape are used, the degree of freedom in disposing the upper and lower driving motors 20 is higher than in the case of using one of the upper and lower driving motors having a large outer shape. Therefore, in the present embodiment, the size of the robot 1 can be reduced even if the large substrate 2 is transported.

In addition, when the capacity of the up-and-down driving motor 20 exceeds a specific capacity, the price of the up-and-down driving motor 20 is rapidly increased. However, in the present embodiment, since the up-and-down driving motor 20 having a relatively small capacity can be used, even When the two upper and lower drive motors 20 are used, the cost of the robot 1 can also be reduced.

Further, in the present embodiment, since the up-and-down driving motor 20 having a relatively small capacity can be used, the power transmitted from one of the vertical driving motors 20 is reduced. Therefore, the transmission power to the power transmission mechanism such as the speed reducer 21, the pinion gear 22, and the rack 23 that transmits the power of the upper and lower drive motors 20 can be reduced, and the powers of the reduction gear 21, the pinion 22, and the rack 23 can be simplified. The composition of the delivery mechanism. Further, damage to the power transmission mechanism such as the reduction gear 2, the pinion 22, and the rack 23 can be suppressed.

On the other hand, since the up-and-down drive mechanism 16 uses the two up-and-down drive motors 20, there is a case where the drive torque of one of the upper and lower drive motors 20 is larger than that of the other upper and lower drive motors 20. The load and the driving torque of the upper and lower driving motor 20 become a large load of the one upper and lower driving motor 20, but in the present embodiment, the upper and lower motor control unit 81 is controlled by the speed control and the torque control. One of the two upper and lower drive motors 20 is controlled to drive the upper and lower drive motors 20, and the other upper and lower drive motors 20 are controlled by torque control. In other words, the upper and lower motor control unit 81 controls the rotational speed of one of the upper and lower drive motors 20, but does not control the rotational speed of the other upper and lower drive motors 20, and the other upper and lower drive motors 20 follow the upper and lower drive motors. 20 and rotate. Therefore, a large difference in rotational speed is not generated between the two upper and lower drive motors 20. Therefore, it is possible to prevent the driving torque of one of the upper and lower driving motors 20 from being a large load of the other upper and lower driving motor 20, and to prevent the driving torque of the other upper and lower driving motor 20 from being driven up and down. A larger load of the motor 20 is used.

In addition, since the other upper and lower driving motor 20 rotates in accordance with one of the upper and lower driving motors 20, the two small gears 22 and the teeth that are coupled to each of the two vertical driving motors 20 via the speed reducer 21 or the like are provided. When the strips 23 are engaged, the teeth of the two pinion gears 22 and the teeth of the racks 23 can be prevented from meshing with excessive force. As a result, damage to the pinion gear 22 and the rack 23 can be suppressed, and the support member 7 can be appropriately moved up and down by the vertical drive mechanism 16.

In the present embodiment, the horizontal drive mechanism 17 includes two horizontal drive motors 40. Therefore, similarly to the vertical drive mechanism 16, even when the total capacity of the horizontal drive motor 40 required by the horizontal drive mechanism 17 is increased, the horizontal drive motor 40 having a relatively small outer shape can be used. The degree of freedom in the arrangement of the drive motor 40 is increased. Therefore, in the present embodiment, the size of the robot 1 can be reduced even if the large substrate 2 is transported.

Further, in the present embodiment, since the horizontal drive motor 40 having a relatively small capacity can be used, even when the two horizontal drive motors 40 are used, the cost of the robot 1 can be reduced. Further, in the present embodiment, since the horizontal drive motor 40 having a relatively small capacity can be used, the power transmitted from one horizontal drive motor 40 is reduced. Therefore, the transmission power to the power transmission mechanism such as the pinion gear 42 and the rack 43 that transmit the power of the horizontal drive motor 40 can be reduced, and the configuration of the power transmission mechanism that transmits the power of the horizontal drive motor 40 can be simplified. Moreover, damage of the power transmission mechanism that transmits the power of the horizontal drive motor 40 can be suppressed.

On the other hand, since the horizontal drive mechanism 17 uses the two horizontal drive motors 40, there is a case where the driving torque of one of the horizontal drive motors 40 (or the other horizontal drive motor 40) becomes another. The horizontal drive motor 40 (or one of the horizontal drive motors 40) has a large load. However, in the present embodiment, the horizontal motor control unit 82 controls the two horizontal drives by speed control and torque control. The horizontal drive motor 40 is one of the motors 40, and the other horizontal drive motor 40 is controlled by torque control when the other horizontal drive motor 40 is stopped.

In other words, when the other horizontal driving motor 40 is stopped, the rotation speed of one of the horizontal driving motors 40 is controlled, but the rotation speed of the other horizontal driving motor 40 is not controlled, and the other level is The drive motor 40 rotates in accordance with one of the horizontal drive motors 40. Therefore, in the case where the other horizontal drive motor 40 is stopped, the difference in the rotational speed between the two horizontal drive motors 40 is not generated, so that one horizontal drive motor 40 can be prevented. The driving torque of the (or the other horizontal driving motor 40) is a large load of the other horizontal driving motor 40 (or one of the horizontal driving motors 40).

In addition, when the other horizontal driving motor 40 is stopped before the other horizontal driving motor 40 is stopped, the other horizontal driving motor 40 rotates along with one of the horizontal driving motors 40, so that it is via the pulleys 48, 49 and the belt. When the two pinion gears 42 connected to the respective two horizontal drive motors 40 are engaged with the rack gear 43, the teeth of the two pinion gears 42 and the teeth of the rack gear 43 are prevented from being excessively strong. Engage. As a result, damage to the pinion gear 42 and the rack 43 can be suppressed, and the body portion 5 can be appropriately horizontally moved by the horizontal drive mechanism 17.

Further, in the present embodiment, before the other horizontal drive motor 40 is stopped, the other horizontal drive motor 40 is controlled by speed control and torque control, and the other horizontal drive motor is driven. The rotational speed of 40 is received so that the backlash between the two pinion gears 42 and the rack 43 disappears. Therefore, when the base 9 is stopped, the backlash between the two pinion gears 42 and the rack 43 can be eliminated.

In the present embodiment, the rotation drive mechanism 18 includes two rotation drive motors 60. Therefore, similarly to the vertical drive mechanism 16, even when the total capacity of the rotary drive motor 60 required by the rotary drive mechanism 18 is increased, the rotary drive motor 60 having a relatively small outer shape can be used, and the rotation can be performed. The degree of freedom in the arrangement of the drive motor 60 is increased. Therefore, in the present embodiment, the size of the robot 1 can be reduced even if the large substrate 2 is transported.

Further, in the present embodiment, since the rotary drive motor 60 having a relatively small capacity can be used, even when two rotary drive motors 60 are used, the cost of the robot 1 can be reduced. Further, in the present embodiment, since the rotary drive motor 60 having a relatively small capacity can be used, the power transmitted from one rotary drive motor 60 is reduced. Therefore, the transmission power to the power transmission mechanism such as the output gear 68 and the speed reducer 61 that transmits the power of the rotary drive motor 60 can be reduced, and the configuration of the power transmission mechanism that transmits the power of the rotary drive motor 60 can be simplified. Moreover, damage of the power transmission mechanism that transmits the power of the rotation drive motor 60 can be suppressed.

On the other hand, since the rotation drive mechanism 18 uses the two rotation drive motors 60, there is a case where the drive torque of one of the rotation drive motors 60 (or the other rotation drive motor 60) becomes another. In the present embodiment, the rotary motor control unit 83 controls the two rotary drives by the speed control and the torque control in the one of the rotary drive motor 60 (or one of the rotary drive motors 60). One of the motors 60 is driven by the rotation drive motor 60, and the other rotation drive motor 60 is controlled by torque control when the other rotation drive motor 60 is stopped.

In other words, when the other rotation drive motor 60 is stopped, the rotation speed of one of the rotation drive motors 60 is controlled, but the rotation speed of the other rotation drive motor 60 is not controlled, and the other rotation is performed. The drive motor 60 rotates in accordance with one of the rotary drive motors 60. Therefore, when the other rotation drive motor 60 is stopped, the difference between the two rotation drive motors 60 is not generated, so that one of the rotation drive motors 60 can be prevented. The driving torque of the other rotating drive motor 60 is a larger load of the other rotary drive motor 60 (or one of the rotary drive motors 60).

Further, since the other rotation drive motor 60 rotates in accordance with one rotation drive motor 60, the other two output gears 68 and the speed reducer are used. When the input gear 69 of the 61 meshes, it is also prevented that the teeth of the output gear 68 mesh with the teeth of the input gear 69 with excessive force. As a result, damage to the input gear 68 and the output gear 69 can be suppressed, and the rotary member 10 can be appropriately rotated by the rotation drive mechanism 18.

Further, in the present embodiment, before the other rotation drive motor 60 is stopped, the other rotation drive motor 60 is controlled by the speed control and the torque control, and the other rotation drive motor 60 is controlled. The rotational speed is controlled such that the backlash of the two output gears 68 and the input gear 69 disappears. Therefore, when the swirling member 10 is stopped, the backlash between the two output gears 68 and the input gear 69 can be eliminated.

(Other embodiments)

The embodiment described above is an example of a preferred embodiment of the present invention, and the present invention is not limited thereto, and various modifications may be made without departing from the spirit and scope of the invention.

In the above embodiment, the upper and lower motor control unit 81 controls one of the two upper and lower driving motors 20 by the speed control and the torque control. In addition, for example, the upper and lower motor control unit 81 may control the position control and the torque control of the rotational position of the upper and lower drive motors 20 by integrating the rotational speed detected by the speed detecting means. The drive motor 20 is driven up and down.

Similarly, in the above embodiment, the horizontal motor control unit 82 controls one of the horizontal drive motors 40 by the speed control and the torque control, and controls the other by the speed control and the torque control in a specific case. Although one of the horizontal driving motors 40 is used, the horizontal driving motor 40 can be controlled by position control and torque control. Further, in the above embodiment, the rotary motor control unit 83 controls one of the rotary drive motors 60 by the speed control and the torque control, and in the specific case, controls the other by the speed control and the torque control. Although the motor 60 is driven to rotate, the rotation drive motor 60 can be controlled by position control and torque control.

In the above embodiment, the vertical drive mechanism 16 includes two upper and lower drive motors 20. In addition to this, for example, the vertical drive mechanism 16 may include three or more upper and lower drive motors 20. In this case, it is preferable that the upper and lower motor control unit 81 controls a plurality of up-and-down driving motors 20 of the three or more vertical driving motors 20 by speed control and torque control, and is controlled by torque. The remaining upper and lower drive motors 20 are controlled. Further, in this case, in order to reliably prevent the driving torque of one of the vertical driving motors 20 from being a large load of the other vertical driving motors 20, it is preferable that the upper and lower motor control units 81 control the speed by the speed. Moment control controls one of the three or more upper and lower driving motors 20, and controls the remaining up-and-down driving motors 20 by torque control.

Further, in the above embodiment, the horizontal drive mechanism 17 includes two horizontal drive motors 40, but the horizontal drive mechanism 17 may include three or more horizontal drive motors 40. In this case, it is preferable that the horizontal motor control unit 82 controls a plurality of the horizontal drive motors 40 of the three or more horizontal drive motors 40 by the speed control and the torque control, and is used for the remaining horizontal drive. Before the motor 40 is stopped, the remaining horizontal drive motors 40 are controlled by the speed control and the torque control, and the remaining levels are controlled by the torque control in other cases except when the remaining horizontal drive motors 40 are stopped. The drive motor 40. Further, in this case, in order to reliably prevent the driving torque of the certain horizontal driving motor 40 from becoming a large load of the other horizontal driving motor 40, it is preferable that the horizontal motor control unit 82 controls the speed by the speed. The moment control controls one of the three or more horizontal drive motors 40, and controls the remaining levels by torque control, except when the remaining horizontal drive motors 40 are stopped. The drive motor 40.

Similarly, the rotation drive mechanism 18 may include three or more rotation drive motors 60. In this case, it is preferable that the rotary motor control unit 83 controls a plurality of the rotary drive motors 60 of the three or more rotary drive motors 60 by the speed control and the torque control, and the remaining rotary drive motors are used. Before the motor 60 is stopped, the remaining rotary drive motors 60 are controlled by the speed control and the torque control, and the remaining rotations are controlled by the torque control while the other rotation drive motors 60 are stopped. Drive motor 60. Further, in this case, in order to reliably prevent the driving torque of the one rotation driving motor 60 from being a large load of the other rotation driving motor 60, it is preferable that the rotation motor control unit 83 is controlled by the speed and the rotation. Moment control controls one of the three or more rotational drive motors 60, and controls the remaining rotation by torque control, except when the remaining rotary drive motors 60 are stopped. Drive motor 60.

In the above embodiment, before the other horizontal drive motor 40 is stopped, the horizontal motor control unit 82 controls the other horizontal drive motor 40 by speed control and torque control, and is driven by the other horizontal drive. When the motor 40 is stopped, the other horizontal drive motor 40 is controlled by torque control. In addition to this, for example, the horizontal motor control unit 82 can always control the other horizontal drive motor 40 by torque control. Similarly, the rotation motor control unit 83 can also control the other rotation drive motor 60 by torque control at all times.

In the above embodiment, each of the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotary drive mechanism 18 includes two drive motors 20, 40, and 60, but the upper and lower drive mechanisms 16, the horizontal drive mechanism 17, and the rotation are provided. At least one of the drive mechanisms 18 includes two drive motors 20, 40, and 60, and the drive motors 20, 40, and 60 included in the other drive mechanisms may be one.

In the above embodiment, the support member 7 is moved in the vertical direction by the two pinion gears 22 and the racks 23. In addition to this, for example, the support member 7 can be moved in the vertical direction by a ball screw and a plurality of nut members screwed to the ball screw. Similarly, in the above embodiment, the base 9 is moved in the horizontal direction by the two pinion gears 42 and the rack 43. However, the ball screw and the plurality of nut members screwed to the ball screw may be used. The base 9 moves in the horizontal direction.

In the above embodiment, the robot 1 includes a vertical drive mechanism 16, a horizontal drive mechanism 17, and a rotary drive mechanism 18. In addition to this, for example, the robot 1 may include only two or one drive mechanisms arbitrarily selected from the upper and lower drive mechanisms 16, the horizontal drive mechanism 17, and the rotary drive mechanism 18.

1. . . Robot (industrial robot)

2. . . Substrate (transport object)

3. . . Robot

4. . . arm

7. . . Support component

16. . . Upper and lower drive mechanism

17. . . Horizontal drive mechanism

18. . . Rotary drive mechanism

20. . . Upper and lower drive motors (drive motor, first drive motor, and second drive motor)

40. . . Horizontal drive motor (drive motor, first drive motor, second drive motor)

60. . . Rotary drive motor (drive motor, first drive motor, second drive motor)

80. . . Control department

81. . . Upper and lower motor control unit (motor control unit)

82. . . Horizontal motor control unit (motor control unit)

83. . . Rotary motor control unit (motor control unit)

CL. . . The central axis

1 is a plan view of an industrial robot according to an embodiment of the present invention;

2 is a view showing an industrial robot from the E-E direction of FIG. 1;

3 is a view showing an industrial robot from the F-F direction of FIG. 1;

Figure 4 is a view showing the support member and the upper and lower drive mechanisms from the F-F direction of Figure 1;

Figure 5 is a view showing the support member, the columnar member, and the upper and lower drive mechanisms from the G-G direction of Figure 4;

Figure 6 is a view showing the upper and lower drive mechanisms from the H-H direction of Figure 4;

Figure 7 is a view for explaining the internal structure of the J portion of Figure 2;

Figure 8 is a view for explaining the configuration of a horizontal drive mechanism or the like from the K-K direction of Figure 3;

Figure 9 is a view for explaining the configuration of the horizontal drive mechanism from the L-L direction of Figure 8;

Figure 10 is a plan view of the convoluted member shown in Figure 1;

Figure 11 is a cross-sectional view of the M-M section of Figure 10;

Figure 12 is a block diagram showing the control unit of the industrial robot shown in Figure 1 and its related parts.

20. . . Upper and lower drive motor

twenty four. . . Upper and lower brake mechanism

40. . . Horizontal drive motor

44. . . Horizontal brake mechanism

60. . . Rotary drive motor

64. . . Rotary brake mechanism

80. . . Control department

81. . . Upper and lower motor control unit

82. . . Horizontal motor control unit

83. . . Rotary motor control unit

84. . . Upper and lower brake control unit

85. . . Horizontal brake control unit

86. . . Rotary brake control unit

87. . . Control command department

Claims (6)

An industrial robot comprising: a robot on which an object to be transported is mounted; an arm connecting the robot and a support member supporting the arm; and: a driving mechanism for controlling the upper and lower movement of the support member a control unit for the vertical drive mechanism; the vertical drive mechanism includes a plurality of drive motors, and the control unit includes a motor control unit that controls the plurality of drive motors, wherein the motor control unit is controlled by speed control or position control And controlling the first drive motor by torque control, wherein the first drive motor is a plurality of the drive motors of the plurality of drive motors; and the second drive motor is controlled by torque control. The second drive motor is the other drive motor other than the first drive motor. An industrial robot comprising: a robot on which an object to be transported is mounted; an arm connecting the robot and a support member supporting the arm; and a horizontal drive mechanism that moves the support member in a horizontal direction And a control unit for controlling the horizontal drive mechanism; the horizontal drive mechanism and the plurality of drive motors, wherein the control unit includes a motor control unit that controls the plurality of drive motors, wherein the motor control unit is controlled by speed or Position control And controlling the first drive motor by torque control, wherein the first drive motor is a plurality of the drive motors of the plurality of drive motors; and the second drive motor is controlled by torque control. The second drive motor is the other drive motor other than the first drive motor. An industrial robot comprising: a robot on which an object to be transported is mounted; an arm that connects the robot and a support member that supports the arm; and includes: the support member as an axis a rotation drive mechanism that rotates a center axis of a specific direction; and a control unit that controls the rotation drive mechanism; the rotation drive mechanism includes a plurality of drive motors, and the control unit includes a motor control that controls the plurality of drive motors The motor control unit controls the first drive motor by one of speed control and position control, and the first drive motor is a plurality of the plurality of drive motors The drive motor; the second drive motor is controlled by torque control, and the second drive motor is the drive motor other than the first drive motor. The industrial robot according to any one of claims 1 to 3, wherein the first driving motor is one of the driving motors. An industrial robot comprising: a robot on which an object to be transported is mounted; and the robot is connected An arm and a supporting member for supporting the arm; and a horizontal driving mechanism for moving the supporting member in a horizontal direction; and a control unit for controlling the horizontal driving mechanism; the horizontal driving mechanism includes a plurality of driving motors, and the control The unit includes a horizontal motor control unit that controls the plurality of driving motors, and each of the plurality of driving motors includes a speed detecting mechanism that detects a rotational speed of the driving motor, and drives the plurality of the plurality of driving motors. The motor is used as the first horizontal drive motor, and the other drive motor other than the first horizontal drive motor is used as the second horizontal drive motor, and the horizontal motor control unit is controlled by either speed control or position control. And controlling the first horizontal driving motor with torque control, and calculating a difference between the reference pulse number and the detected pulse number, wherein the reference pulse number is detected by the speed as the first horizontal driving motor The first speed detecting mechanism of the mechanism detects the above branch The number of pulses from the specific reference position of the member to the predetermined stop position, the number of pulses detected is the actual number of pulses detected by the first speed detecting means from the reference position of the support member; When the value is equal to or less than a specific value, the second horizontal driving motor is controlled by either the speed control or the position control, and the difference between the number of the reference pulses and the number of the detection pulses is higher than the specific one. When the value is large, the second horizontal driving is controlled by torque control. motor. An industrial robot comprising: a robot on which an object to be transported is mounted; an arm that connects the robot and a support member that supports the arm; and includes: the support member as an axis a rotation drive mechanism that rotates a center axis of a specific direction; and a control unit that controls the rotation drive mechanism; the rotation drive mechanism includes a plurality of drive motors, and the control unit includes a rotation motor that controls the plurality of drive motors Each of the plurality of driving motors includes a speed detecting means for detecting a rotational speed of the driving motor, and a plurality of the plurality of driving motors are used as the first rotational driving motor. The other driving motor other than the first rotation driving motor is a second rotation driving motor, and the rotation motor control unit controls the first rotation by one of speed control or position control and torque control. Drive the motor and calculate the number of reference pulses and the detected pulse a difference between the numbers, wherein the number of reference pulses is detected from a specific rotation reference position of the support member to a predetermined stop position by the first speed detecting means of the speed detecting means of the first rotation driving motor The number of pulses detected, the number of pulses detected by the first speed detecting means is actual from the rotation reference position of the support member a number of pulses; when the difference is equal to or less than a specific value, the second rotation driving motor is controlled by either the speed control or the position control, and the number of the reference pulses and the number of the detection pulses When the difference is larger than the above-described specific value, the second rotation drive motor is controlled by torque control.