TWI478239B - - Google Patents

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Publication number
TWI478239B
TWI478239B TW101130334A TW101130334A TWI478239B TW I478239 B TWI478239 B TW I478239B TW 101130334 A TW101130334 A TW 101130334A TW 101130334 A TW101130334 A TW 101130334A TW I478239 B TWI478239 B TW I478239B
Authority
TW
Taiwan
Application number
TW101130334A
Other languages
Chinese (zh)
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TW201409574A (en
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Filing date
Publication date
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Priority to TW101130334A priority Critical patent/TW201409574A/en
Publication of TW201409574A publication Critical patent/TW201409574A/en
Application granted granted Critical
Publication of TWI478239B publication Critical patent/TWI478239B/zh

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Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
TW101130334A 2012-08-21 2012-08-21 Crystallization annealing apparatus of hydrogen plasma auxiliary copper-base solar cell process and method thereof TW201409574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW101130334A TW201409574A (en) 2012-08-21 2012-08-21 Crystallization annealing apparatus of hydrogen plasma auxiliary copper-base solar cell process and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW101130334A TW201409574A (en) 2012-08-21 2012-08-21 Crystallization annealing apparatus of hydrogen plasma auxiliary copper-base solar cell process and method thereof

Publications (2)

Publication Number Publication Date
TW201409574A TW201409574A (en) 2014-03-01
TWI478239B true TWI478239B (en) 2015-03-21

Family

ID=50820475

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101130334A TW201409574A (en) 2012-08-21 2012-08-21 Crystallization annealing apparatus of hydrogen plasma auxiliary copper-base solar cell process and method thereof

Country Status (1)

Country Link
TW (1) TW201409574A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI587399B (en) * 2015-12-10 2017-06-11 Nat Chung-Shan Inst Of Science And Tech Hydrogen plasma crystallization annealing system and method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM312537U (en) * 2006-12-08 2007-05-21 Jeng-Shang Tsau Solar cell thin film
TW200941584A (en) * 2007-12-10 2009-10-01 Solopower Inc Methods structures and apparatus to provide group VIA and IA materials for solar cell absorber formation
TW201010114A (en) * 2008-06-30 2010-03-01 Mohd A Aslami Plasma vapor deposition system and method for making multi-junction silicon thin film solar cell modules and panels
TWM413213U (en) * 2011-04-28 2011-10-01 Jenn Feng New Energy Co Ltd Structure of Selenium Vapor fast crystalization annealing furnance

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM312537U (en) * 2006-12-08 2007-05-21 Jeng-Shang Tsau Solar cell thin film
TW200941584A (en) * 2007-12-10 2009-10-01 Solopower Inc Methods structures and apparatus to provide group VIA and IA materials for solar cell absorber formation
TW201010114A (en) * 2008-06-30 2010-03-01 Mohd A Aslami Plasma vapor deposition system and method for making multi-junction silicon thin film solar cell modules and panels
TWM413213U (en) * 2011-04-28 2011-10-01 Jenn Feng New Energy Co Ltd Structure of Selenium Vapor fast crystalization annealing furnance

Also Published As

Publication number Publication date
TW201409574A (en) 2014-03-01

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees