TWI477439B - Method of transferring nanowire - Google Patents

Description

Method of transferring nanowires

The invention relates to nanowires, in particular to the acquisition and integration of nanowires.

Driven by the highly integrated wave, the demand for nanoscale functional devices by modern technology will become more and more urgent. The nanowire has a very high surface area to volume ratio. This one-dimensional structure has excellent performance in surface characteristics, mechanical properties, quantum effects, etc. Therefore, according to the characteristics of different materials, the nanowire structure is also Correspondingly, various applications have been derived, such as gas sensors, field effect transistors, and light-emitting elements.

However, the difficulty in making components using nanowires is that how to overcome the size problem and to align and control it is a difficult point. If you can control the nanowires to make a large number of regular arrangements, it will enable the nanowires to be smoothly introduced into the mass production process. Currently known methods for preparing nanowire films include: Dielectrophoresis, Micro-fluid channel, and Blown film extrusion, and the above processes require self-growth of the nanowires. The substrate is removed and uniformly dispersed into the solvent, which is a wet process, which takes a long time to prepare or arrange, and the nanowire is easily damaged during the process of removing the nanowire from the growth substrate. The structure affects its function.

In view of this, a method for transferring a nanowire with short time and high transfer efficiency is provided. As necessary.

A method of transferring a nanowire, comprising the steps of: providing a first substrate, the first substrate having a first surface, the first surface having an array of nanowires substantially perpendicular to the first surface; providing a second The second substrate has a second surface, the second substrate is a flexible substrate; the second substrate and the first substrate are covered with each other, the second surface faces the first surface; and the first substrate is pressed The second substrate causes the second substrate to push the nanowire array in a predetermined direction to transfer at least a portion of the nanowires to the second surface; providing a third substrate having a third substrate a third surface; the second substrate and the third substrate are covered with each other, the second surface faces the third surface; and the second substrate and the third substrate are pressed together to make the second surface The nanowire is transferred to the third surface.

Compared with the prior art, the present invention uses a dry process to transfer the nanowire to the target substrate, which is short in time and high in transfer efficiency.

10‧‧‧First substrate

100‧‧‧ first surface

102‧‧‧Nano line array

1020‧‧‧Neon line

20‧‧‧second substrate

200‧‧‧ second surface

30‧‧‧Roller device

31‧‧‧First wheel

32‧‧‧Second wheel

33‧‧‧Conveyor belt

40‧‧‧ third substrate

400‧‧‧ third surface

FIG. 1 is a schematic diagram of a first substrate and a second substrate according to an embodiment of the present invention, wherein a first substrate vertically grows with a nanowire array.

2 is a schematic view of the first substrate and the second substrate being pressed by a roller device.

FIG. 3 is a schematic view showing the effect of the second substrate on which the nanowires on the first substrate are transferred.

Figure 4 is a schematic view showing the steps of transferring the nanowires on the second substrate onto the third substrate.

The invention will now be described in further detail with reference to the drawings.

Referring to FIG. 1 to FIG. 4, the method for transferring a nanowire according to an embodiment of the present invention includes the following steps: A first substrate 10 is provided. The first substrate 10 has a flat first surface 100. The first surface 100 has a nanowire array 102 substantially perpendicular to the first surface 100. The nanowire array 102 includes a large number of Ordered or unordered nanowires 1020. The first substrate 10 may be a germanium substrate.

A second substrate 20 is provided. The second substrate 20 has a flat second surface 200. The second substrate 20 is a flexible substrate. The flexible substrate is made of a soft material. Preferably, the substrate is made of inert and hydrophobic. Made of methyl acrylate.

The second substrate 20 and the first substrate 10 are covered with each other, and the second surface 200 faces the first surface 100.

The first substrate 10 and the second substrate 20 that are covered by each other are pressed by the roller device 30. In the present embodiment, the roller device 30 includes a first roller 31, a second roller 32, and a conveyor belt 33. The first roller 31 drives the conveyor belt 33 to move. The second roller 32 is located above the conveyor belt 33. When the first substrate 10 and the second substrate 20 that are covered by each other move below the second roller 32, the second roller 32 Pressing the second substrate 20 and the first substrate 10 to further adhere the second substrate 20 and the first substrate 10, and pushing down the nanowire array 102 vertically grown on the first substrate 10 while At least a portion of the nanowires in the array of nanowires 102, or the entire array of nanowires, are transferred to the second surface 200 by the viscous force of the second substrate 20 during the lamination process. Since the rolling direction of the roller device 30 is determined, the direction of the pressure received by the nanowire array 102 is determined, and thus the direction in which it is tilted is determined.

If the nanowires 1020 in the nanowire array 102 are in an ordered arrangement, since the tilting direction of the nanowire array 102 is determined, all of the nanowires transferred to the second surface 200 can also be ordered. The nanowires transferred to the second surface 200 lie flat on the second surface 200.

The active surfaces of the first substrate 10 and the second substrate 20 (ie, the first surface 100 and the second surface 200) used in the embodiments of the present invention are both flat to ensure a large number and area of the transferred nanowires.

In order to allow as many nanowires 1020 as possible to be transferred to the second surface 200, the above steps may be repeated such that the nanowires 1020 that were not originally pushed or transferred are pushed down or transferred.

Further, a third substrate 40 is provided, and the third substrate 40 may be a target substrate that requires a nanowire. The third substrate 40 has a flat third surface 400. The third substrate 40 may be a hard substrate such as a ceria substrate or a flexible substrate.

Similarly, the second substrate 20 and the first substrate 10 are used to cover the second substrate 20 and the third substrate 40. The second surface 200 faces the third surface 400. The second substrate 20 and the third substrate 40 that are mutually covered may be pressed by a roller to transfer the nanowire of the second surface 200 to the third surface 400, or may be pressed to the second surface in other manners. The substrate 20 and the third substrate 40 are pressed.

The method for transferring the nanowires provided by the invention is a dry process, which does not need to remove the nanowire array from the growth substrate and uniformly disperse into the solvent, thereby avoiding destroying the surface characteristics of the expected nanowire, and The transferable nanowires are basically arranged in an orderly manner, so that the time for rearranging the nanowires can be reduced, and the transfer efficiency is high.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

10‧‧‧First substrate

20‧‧‧second substrate

30‧‧‧Roller device

31‧‧‧First wheel

32‧‧‧Second wheel

33‧‧‧Conveyor belt

Claims (7)

A method of transferring a nanowire, comprising the steps of: providing a first substrate, the first substrate having a first surface, the first surface having an array of nanowires substantially perpendicular to the first surface; providing a second The second substrate has a second surface, the second substrate is a flexible substrate; the second substrate and the first substrate are covered with each other, the second surface faces the first surface; and the first substrate is pressed The second substrate causes the second substrate to push the nanowire array in a predetermined direction to transfer at least a portion of the nanowires to the second surface; providing a third substrate having a third substrate a third surface; the second substrate and the third substrate are covered with each other, the second surface faces the third surface; and the second substrate and the third substrate are pressed together to make the second surface The nanowire is transferred to the third surface. The method of transferring a nanowire according to claim 1, wherein the second substrate is polymethyl methacrylate. The method of transferring a nanowire according to claim 1, wherein the first substrate and the second substrate are pressed together by a roller. The method of transferring a nanowire according to claim 1, wherein the first and second surfaces are both flat. The method of transferring a nanowire according to claim 1, wherein the third substrate is a rigid substrate. The method of transferring a nanowire according to claim 1, wherein the third substrate is a flexible substrate. A method for transferring a nanowire as described in claim 1 of the scope of the patent law, wherein: the third surface is flat Tan.