TWI476831B - Tgl tio2/sio2/nitride dry etch - Google Patents
Tgl tio2/sio2/nitride dry etchInfo
- Publication number
- TWI476831B TWI476831B TW101110825A TW101110825A TWI476831B TW I476831 B TWI476831 B TW I476831B TW 101110825 A TW101110825 A TW 101110825A TW 101110825 A TW101110825 A TW 101110825A TW I476831 B TWI476831 B TW I476831B
- Authority
- TW
- Taiwan
- Prior art keywords
- tgl
- tio2
- sio2
- dry etch
- nitride dry
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101110825A TWI476831B (en) | 2012-03-28 | 2012-03-28 | Tgl tio2/sio2/nitride dry etch |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101110825A TWI476831B (en) | 2012-03-28 | 2012-03-28 | Tgl tio2/sio2/nitride dry etch |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201340201A TW201340201A (en) | 2013-10-01 |
TWI476831B true TWI476831B (en) | 2015-03-11 |
Family
ID=49771027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101110825A TWI476831B (en) | 2012-03-28 | 2012-03-28 | Tgl tio2/sio2/nitride dry etch |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI476831B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11195756B2 (en) | 2014-09-19 | 2021-12-07 | Applied Materials, Inc. | Proximity contact cover ring for plasma dicing |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000114235A (en) * | 1998-09-30 | 2000-04-21 | Ibiden Co Ltd | Part for semiconductor producing apparatus and method of producing the same |
US20040163762A1 (en) * | 2001-07-27 | 2004-08-26 | Iizuka Hachishiro | Plasma treating device and substrate mounting table |
JP2009010017A (en) * | 2007-06-26 | 2009-01-15 | Mitsubishi Materials Corp | Focus ring for plasma etching apparatus generating fewer particles |
US20100144157A1 (en) * | 2006-02-27 | 2010-06-10 | Tokyo Electron Limited | Plasma etching apparatus and method |
US20100279516A1 (en) * | 2008-01-11 | 2010-11-04 | Chen-An Chen | Apparatus and method of aligning and positioning a cold substrate on a hot surface |
-
2012
- 2012-03-28 TW TW101110825A patent/TWI476831B/en active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000114235A (en) * | 1998-09-30 | 2000-04-21 | Ibiden Co Ltd | Part for semiconductor producing apparatus and method of producing the same |
US20040163762A1 (en) * | 2001-07-27 | 2004-08-26 | Iizuka Hachishiro | Plasma treating device and substrate mounting table |
US20100144157A1 (en) * | 2006-02-27 | 2010-06-10 | Tokyo Electron Limited | Plasma etching apparatus and method |
JP2009010017A (en) * | 2007-06-26 | 2009-01-15 | Mitsubishi Materials Corp | Focus ring for plasma etching apparatus generating fewer particles |
US20100279516A1 (en) * | 2008-01-11 | 2010-11-04 | Chen-An Chen | Apparatus and method of aligning and positioning a cold substrate on a hot surface |
Also Published As
Publication number | Publication date |
---|---|
TW201340201A (en) | 2013-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2822091A4 (en) | Directional coupler | |
EP2916795A4 (en) | Improved rollator | |
GB201215935D0 (en) | Foldable building | |
EP3009376A4 (en) | Wet wipe packaging | |
EP2820780A4 (en) | Peer-to-peer discovery | |
PL2850008T3 (en) | Can end | |
SG11201406256YA (en) | Can end | |
GB201519750D0 (en) | Twist-to -connect dry break coupling | |
EP2940722A4 (en) | End effector | |
GB2508876B (en) | Hand dryer | |
EP2829281A4 (en) | Lps vaccine | |
GB2501227B (en) | Scaffolding couplers | |
GB2508873B (en) | Hand dryer | |
HK1208326A1 (en) | Hand dryer | |
EP2923383A4 (en) | Photodetection | |
PL2684498T3 (en) | Hand dryer | |
EP2738600A4 (en) | Wavelength conversion element | |
GB201406567D0 (en) | Wall Plug | |
PL2631383T3 (en) | Building extension | |
GB201201053D0 (en) | Dome cleaner | |
TWI476831B (en) | Tgl tio2/sio2/nitride dry etch | |
HK1207547A1 (en) | Hand dryer | |
ZA201502227B (en) | Can end | |
GB201303314D0 (en) | Coupler | |
GB201302270D0 (en) | Coupler |