TWI476444B - Double-projection apparatus - Google Patents

Description

Double projection mirror structure

The invention relates to a mirror structure of double projection, in particular to a piezoelectric actuator which can generate different vibration modes by different driving frequencies of different electrode surfaces and bilateral vibration phases, so that each micro-scanning lens The combination of the eccentric torsion axis and the lens torsion axis produces a specific vibration mode, and the effect of enabling each micro-scan lens to project a synchronized picture is achieved.

According to the MEMS system, it is recognized as the most promising and forward-looking research field in the scientific and technological community. The development of MEMS is rooted in the concept of manufacturing mechanical structures on germanium wafers using semiconductor processes in the mid-1960s, attracting many people to invest in this technology. By the mid-1970s, semiconductor sensors that combined MEMS technology with mechanical structures and electronic components were successfully developed. After 1980, research related to this technology has been sprung up, and the research content is not limited to sensors, but also contains some complex mechanisms and components, such as miniature pumps, valves, gears, motors, clips. and many more. As the technology matures and the scope of applications expands, researchers have set a goal to develop a complete micro-system that includes sensing, actuation, signal processing, control, and more, such as micro-robots and micro-hards. The disc player hopes to become a revolutionary technology in this century like the semiconductor industry. With the concept of a few years ago and the current technology mature, various innovative products of MEMS have been released and commercialized. One of the technologies, micro-projection has the characteristics of energy saving, small size and low cost. Recently, it has attracted attention. Quite a popular application technology theme. The product form includes a head-up display (HUD), a portable projector, a projection module that can be integrated into the handheld device, and the like. Its applications cover automotive electronics, satellite navigation, smart phones, personal computers, monitors, toys, consumer electronics and other industries closely related to Taiwan.

Through the mobile device equipped with a pico projector, the convenience of file sharing can be greatly improved; especially the function of the mobile phone is more and more powerful, but the size of the screen can be displayed limited by the size of the use, and the micro-projection can satisfy the action. The need for projection. At present, manufacturers who develop ultra-small projectors are mainly component companies, and are moving toward accelerating miniaturization and low cost.

However, the ultra-small projector is composed of an actuator micro-Mirror and a laser light source, and the laser light source reflects the laser light source in different directions by the rotation of the micro mirror. The light is scanned to form an image.

At present, the cost of micromirrors in ultra-small projectors depends on the scanning mode and the structure of the actuators used. In the scanning mode, a single micromirror is fabricated on the wafer, and then driven by a biaxial actuator. Although its structure is simple, there is a huge gap between the two-axis driving frequency, so the difficulty of using a single material is high.

In view of this, the inventors of this case have intensively discussed the above-mentioned problems of conventional inventions, and actively pursued solutions through years of experience in R&D and manufacturing of related industries. After long-term efforts in research and development, they finally succeeded in developing this book. Invented the "mirror structure of double projection" to improve the problems of the conventional use.

The main purpose of the present invention is to enable each piezoelectric actuator to generate different vibration modes by different driving frequencies of different electrode surfaces and bilateral vibration phases, so that each micro-scanning lens can be twisted by using an eccentric torsion axis and a lens. The cooperation of the axes produces a specific vibration mode, so that each micro-scan lens can project a synchronized picture.

For the purpose of the above, the present invention is a double-projection mirror structure comprising: an outer frame; a carrier disposed in the outer frame, the carrier is provided with a hollow region; at least two correspondingly connected to the outer An eccentric torsion axis between the frame and the carrier; a lens torsion axis disposed in the hollow region; at least two micro-scanning lenses disposed in the hollow region and connected to both sides of the lens torsion axis; and at least two correspondingly disposed on the outer frame Piezoelectric actuators on both sides of the body.

In an embodiment of the present invention, an extension portion is respectively disposed on both sides of the outer frame body, so that each piezoelectric actuator is not connected to the extension portion.

In an embodiment of the invention, each of the eccentric torsion axes is in a letter shape.

In an embodiment of the invention, each of the lens torsion shafts includes a Y-shaped torsion portion having at least two ends connected thereto.

In an embodiment of the invention, each micro-scanning lens is a micro-mirror having an oblique angle of 0° to 60°, and each micro-scanning lens can scan two identical objects.

Please refer to the "1st, 2nd, and 3rd drawings" for a schematic view of the appearance of the present invention, a schematic view of the first use state of the present invention, and a schematic view of the second state of use of the present invention. As shown in the figure: the present invention is a dual projection mirror structure comprising at least an outer frame 1, a carrier 2, at least two eccentric torsion axes 3, a lens torsion axis 4, at least two micro-scanning lenses 5, and at least two The piezoelectric actuator 6 is constructed.

An extension portion 11 is respectively disposed on both sides of the frame 1 as mentioned above.

The carrier 2 is disposed in the outer frame 1 and has a hollowed out region 21 on the carrier 2.

Each of the eccentric torsion shafts 3 is correspondingly connected between the outer frame body 1 and the carrier 2, and each of the eccentric torsion axes 3 is in a line shape.

The lens torsion shaft 4 is disposed in the hollowed out region 21, and each of the lens torsion shafts 4 includes Y-shaped torsion portions 41, 42 to which at least two ends are connected.

Each of the micro-scanning lenses 5 is disposed in the hollowed out region 21 and connected to both sides of the lens torsion axis 4, and each of the micro-scanning lenses 5 is a micro-mirror having an oblique angle of 0° to 60°, and each micro-scanning lens 5 is Scan two identical objects.

Each of the piezoelectric actuators 6 is correspondingly connected to the extending portion 11 on both sides of the outer frame 1. If so, a new double-projection mirror structure is constructed by the above design.

When the present invention is applied, the same voltage can be applied to each piezoelectric actuator 6 at the same time, so that each piezoelectric actuator 6 converts the voltage into a displacement due to the inverse piezoelectric effect, due to the piezoelectric actuation. The same voltage is applied to the device 6, so that each piezoelectric actuator 6 generates the same displacement direction frequency. At this time, the excitation of the frequency allows the eccentric torsion axes 3 to cause the carrier 2 to be eccentrically The front and rear inclined vibration modes are generated in the outer frame 1, so that the micro-scanning lenses 5 are driven by the carrier 2 in the same direction (as shown in Fig. 2).

Alternatively, different voltages may be applied to the respective piezoelectric actuators 6, so that the piezoelectric actuators 6 may be converted into displacements due to the inverse piezoelectric effect, since the piezoelectric actuators 6 are differently applied. The voltage, therefore, when the opposite voltage is applied and the phase angle of the displacement direction is 180°, the Y-shaped torsion portions 41 and 42 of the lens torsion axis 4 drive the carrier 2 to generate left and right displacements in the outer frame 1. The vibration mode is such that each micro-scanning lens 5 is oscillated like a scale structure to improve the resolution caused by horizontal scanning and to avoid stress concentration at the joint (as shown in Fig. 3).

Thus, the present invention can utilize the inverse piezoelectric effect of each piezoelectric actuator 6 to generate a displacement amount, and by this displacement amount, each micro-scanning lens 5 generates a specific vibration mode, and thereby the vibration mode is excited. The natural frequency of the component itself to achieve the desired mode of motion.

In summary, the mirror structure of the dual projection of the present invention can effectively improve various disadvantages of the conventional use, and the piezoelectric actuators can generate different vibration modes by different driving frequencies of different electrode surfaces and bilateral vibration phases. The micro-scanning lens is combined with the eccentric torsion axis and the lens torsion axis to generate a specific vibration mode, so that each micro-scan lens can project a synchronized picture; thereby making the invention more progressive, more practical, and more In accordance with the requirements of the consumer's use, it has indeed met the requirements of the invention patent application, and filed a patent application according to law.

However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto; therefore, the simple equivalent changes and modifications made in accordance with the scope of the present invention and the contents of the invention are modified. All should remain within the scope of the invention patent.

1. . . Outer frame

11. . . Extension

2. . . Carrier

twenty one. . . Hollow area

3. . . Eccentric torsion axis

4. . . Lens torsion axis

41, 42. . . Y-shaped torsion

5. . . Micro-scan lens

6. . . Piezoelectric actuator

Fig. 1 is a schematic view showing the appearance of the present invention.

Fig. 2 is a schematic view showing the first use state of the present invention.

Figure 3 is a schematic view showing the second state of use of the present invention.

1. . . Outer frame

11. . . Extension

2. . . Carrier

twenty one. . . Hollow area

3. . . Eccentric torsion axis

4. . . Lens torsion axis

41, 42. . . Y-shaped torsion

5. . . Micro-scan lens

6. . . Piezoelectric actuator

Claims (5)

A double-projection mirror structure includes: an outer frame body; a carrier disposed in the outer frame body; and the carrier is provided with a hollow region; at least two eccentric torsion axes are correspondingly connected to the outer frame body Between the carrier and the carrier; a lens torsion axis is disposed in the hollow region; at least two micro-scanning lenses are disposed in the hollow region and connected to both sides of the lens torsion axis, and each micro-scanning lens can scan two identical objects And at least two piezoelectric actuators are correspondingly disposed on both sides of the outer frame body. The mirror structure of the double projection according to the first aspect of the patent application, wherein the outer frame body is respectively provided with an extending portion on both sides thereof, so that the piezoelectric actuators are not connected to the extending portion. According to the mirror structure of the double projection described in claim 1, wherein each eccentric torsion axis is in a shape. The mirror structure of the double projection according to the first aspect of the patent application, wherein each of the lens torsion shafts comprises at least two Y-shaped torsion portions connected at one end. According to the mirror structure of the double projection described in claim 1, wherein each of the micro-scanning lenses is a micro-mirror having an oblique angle of 0° to 60°.