TWI468256B - - Google Patents
Info
- Publication number
- TWI468256B TWI468256B TW101108642A TW101108642A TWI468256B TW I468256 B TWI468256 B TW I468256B TW 101108642 A TW101108642 A TW 101108642A TW 101108642 A TW101108642 A TW 101108642A TW I468256 B TWI468256 B TW I468256B
- Authority
- TW
- Taiwan
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101108642A TW201336622A (en) | 2012-03-14 | 2012-03-14 | Flexible polishing carrier and polishing device and polishing method sing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101108642A TW201336622A (en) | 2012-03-14 | 2012-03-14 | Flexible polishing carrier and polishing device and polishing method sing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201336622A TW201336622A (en) | 2013-09-16 |
TWI468256B true TWI468256B (en) | 2015-01-11 |
Family
ID=49627640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101108642A TW201336622A (en) | 2012-03-14 | 2012-03-14 | Flexible polishing carrier and polishing device and polishing method sing the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201336622A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115302382A (en) * | 2022-07-26 | 2022-11-08 | 常熟市佳德汽车零部件有限公司 | Automatic surface polishing device for processing motorcycle engine protecting cover |
CN115351661B (en) * | 2022-09-30 | 2023-01-13 | 武汉乾希科技有限公司 | Cover opening device and cover opening method for box type case of optical communication device |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6183354B1 (en) * | 1996-11-08 | 2001-02-06 | Applied Materials, Inc. | Carrier head with a flexible membrane for a chemical mechanical polishing system |
US6277009B1 (en) * | 1997-12-31 | 2001-08-21 | Applied Materials, Inc. | Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus |
JP2002283231A (en) * | 2001-03-27 | 2002-10-03 | Nisshin Steel Co Ltd | Automatic polishing pressure control method in polishing device |
TWI230108B (en) * | 2004-01-02 | 2005-04-01 | Gau Woei Super Hard Tool Co Lt | Automatic tool feeding device for a grinder |
TWI289493B (en) * | 2004-03-30 | 2007-11-11 | Hon Hai Prec Ind Co Ltd | Polish device and polish method |
TWI325602B (en) * | 2007-02-15 | 2010-06-01 | Au Optronics Corp | Polishing device and automatic polishing method thereof |
TWI336279B (en) * | 2002-10-17 | 2011-01-21 | Ebara Corp | Polishing state monitoring apparatus and polishing apparatus and method |
TWM409129U (en) * | 2011-01-17 | 2011-08-11 | Tian-Ran Wen | polishing apparatus |
-
2012
- 2012-03-14 TW TW101108642A patent/TW201336622A/en not_active IP Right Cessation
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6183354B1 (en) * | 1996-11-08 | 2001-02-06 | Applied Materials, Inc. | Carrier head with a flexible membrane for a chemical mechanical polishing system |
US6277009B1 (en) * | 1997-12-31 | 2001-08-21 | Applied Materials, Inc. | Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus |
JP2002283231A (en) * | 2001-03-27 | 2002-10-03 | Nisshin Steel Co Ltd | Automatic polishing pressure control method in polishing device |
TWI336279B (en) * | 2002-10-17 | 2011-01-21 | Ebara Corp | Polishing state monitoring apparatus and polishing apparatus and method |
TWI230108B (en) * | 2004-01-02 | 2005-04-01 | Gau Woei Super Hard Tool Co Lt | Automatic tool feeding device for a grinder |
TWI289493B (en) * | 2004-03-30 | 2007-11-11 | Hon Hai Prec Ind Co Ltd | Polish device and polish method |
TWI325602B (en) * | 2007-02-15 | 2010-06-01 | Au Optronics Corp | Polishing device and automatic polishing method thereof |
TWM409129U (en) * | 2011-01-17 | 2011-08-11 | Tian-Ran Wen | polishing apparatus |
Also Published As
Publication number | Publication date |
---|---|
TW201336622A (en) | 2013-09-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |