TWI466167B - Light source powered by microwave energy - Google Patents

Light source powered by microwave energy Download PDF

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TWI466167B
TWI466167B TW098107991A TW98107991A TWI466167B TW I466167 B TWI466167 B TW I466167B TW 098107991 A TW098107991 A TW 098107991A TW 98107991 A TW98107991 A TW 98107991A TW I466167 B TWI466167 B TW I466167B
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light source
plasma
light
crucible
plug
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TW201034048A (en
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Andrew Simon Neate
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Ceravision Ltd
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Description

由微波能量供電之光源 Light source powered by microwave energy

本發明關於一種用於一微波供電式燈具之光源。 The invention relates to a light source for a microwave powered luminaire.

為了產生光而於一容器內激發放電係為已知。典型範例係鈉放電燈具及螢光燈管的燈具。後者使用汞蒸氣,其產生紫外線輻射。接著,這個激發螢光粉來產生光。比起鎢絲燈具,這類燈具由每消耗一瓦電所射出光之流明來看係更有效率。然而,該些燈具仍遭受在該容器內所需電極的缺失。既然這些電極帶有放電所需之電流,則該些燈具會衰退而終至失敗。 It is known to excite a discharge system in a container in order to generate light. Typical examples are lamps for sodium discharge lamps and fluorescent tubes. The latter uses mercury vapor, which produces ultraviolet radiation. This, in turn, excites the phosphor to produce light. Compared to tungsten lamps, such lamps are more efficient from the lumens of light emitted per watt of electricity. However, these luminaires still suffer from the absence of the desired electrodes within the container. Since these electrodes have the current required for discharge, the lamps will decay and eventually fail.

我們已發展出無電極燈泡燈具,如同我們專利申請案第PCT/GB2006/002018號所示之一種燈具(我們的“’2018”燈具)、第PCT/GB2005/005080號所示之一種用於該燈具之燈泡、及第PCT/GB2007/001935號所示之一種用於一微波供電式燈具之匹配電路。這些全關於藉由使用微波能量來刺激該些燈泡內之發光電漿而進行無電極操作之燈具。牽涉到使用一空氣波來耦接該微波能量至一燈泡內之較早期提案已產生於例如Fusion照明公司的美國專利案號第5,334,913號中。若使用一空氣波導,則該燈具係笨重的,此因該波導的實體大小係為該空氣中微波波長之分數。這個對於例如街道照明不是問題,但是這類型光並不適合許多應用。基於這個理由,我們的’2018燈具使用一介電波導,其實際上降低在2.4千兆赫操作頻率處之波長。該燈具 係適用於例如背投影電視般之家電用品。 We have developed an electrodeless bulb luminaire, such as one shown in our patent application No. PCT/GB2006/002018 (our "'2018" luminaire), one of the one shown in PCT/GB2005/005080 for this A lamp for a luminaire and a matching circuit for a microwave powered luminaire as shown in PCT/GB2007/001935. These are all about lamps that operate without electrodes by using microwave energy to stimulate the luminescent plasma in the bulbs. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; If an air waveguide is used, the luminaire is cumbersome because the physical size of the waveguide is a fraction of the wavelength of the microwave in the air. This is not a problem for example street lighting, but this type of light is not suitable for many applications. For this reason, our '2018 luminaire uses a dielectric waveguide that actually reduces the wavelength at the 2.4 GHz operating frequency. The luminaire It is suitable for home appliances such as rear projection TVs.

我們現在相信將該燈泡及該波導結合成為單一構件係可行的。 We now believe that combining the bulb and the waveguide into a single component is feasible.

本發明目的係提供一具有這類結合燈泡及波導之改良式燈具。 It is an object of the present invention to provide an improved luminaire having such a combined bulb and waveguide.

根據本發明提供一由微波能量供電之光源,該光源具有:●一材料為透明或半透明以從中提供出口之固態電漿坩堝,該電漿坩堝內含一密封空間,●一環繞在該電漿坩堝四周之法拉第柵欄,該柵欄至少一部分係為光傳輸以在微波被封住時讓光離開該電漿坩堝,●一填充物,而在空間內材料可由微波能量激發以於其中形成一發光電漿,及●一天線,其配置於該電漿坩堝內以傳送電漿感應微波能量至該填充物,該天線具有:●一連接裝置,其延伸至該電漿坩堝外以耦接至一微波能量源;該配置使得來自該空間之電漿之光可穿透該電漿坩堝並自該電漿坩堝透過該柵欄放射。 According to the present invention, there is provided a light source powered by microwave energy, the light source having: a solid plasma pulp having a material transparent or translucent to provide an outlet therefrom, the plasma cartridge containing a sealed space, a surrounding of the electricity a Faraday fence around the pulp, at least a portion of which is light transmitted to allow light to exit the plasma when the microwave is sealed, a filler, and the material in the space can be excited by microwave energy to form a light therein. a plasma, and an antenna disposed in the plasma crucible to deliver plasma-induced microwave energy to the filler, the antenna having: a connecting device extending outside the plasma to couple to a microwave energy source; the configuration allows light from the plasma of the space to penetrate the plasma and radiate from the plasma through the barrier.

如同在本說明書中所使用的:「透光」意謂著被描述成透光之項目所具有之材料係透明或半透明。 As used in this specification: "transparent" means that the material described as being light transmissive is transparent or translucent.

“電漿坩堝”意謂著一內含電漿之封閉本體,在後者之填充物受到來自天線之微波能量激發時,後者係為該空間。 "Microplasm" means a closed body containing a plasma which is the space when the latter filler is excited by the microwave energy from the antenna.

通常,該坩堝材料會是一固態介電材料。 Typically, the tantalum material will be a solid dielectric material.

然而可想像該固態電漿坩堝整體可具有不同結構及組成分子,特別是在它係由大於一物件而密封在一起所構成,我們通常會期待它整體係真正均質的。 However, it is conceivable that the solid state plasma pulp can have different structures and constituent molecules as a whole, especially in that it is sealed by more than one object, and we usually expect it to be truly homogeneous.

在我們研究發光電漿的微波驅動中,典型地使用獨立燈泡來安裝在波導中,我們已知一共振波導中之至少一主要共振對於傳輸微波能量至該可激發材料中並不重要。據此,具有空間、填充物及天線之固態電漿坩堝不必是一共振波導。然而,我們較喜歡運用共振作用。例如,在下述第二實施例中,該電漿坩堝係為環狀剖面並剪裁其尺寸以提供一在其內直徑上延伸之半波。 In our study of microwave driving of luminescent plasmas, a separate bulb is typically used to mount in the waveguide, and it is known that at least one primary resonance in a resonant waveguide is not critical to the transmission of microwave energy into the excitable material. Accordingly, the solid plasma raft having space, filler, and antenna need not be a resonant waveguide. However, we prefer to use resonance. For example, in the second embodiment described below, the plasma raft is an annular section and is sized to provide a half wave extending over its inner diameter.

該光源通常會搭配其一特定方向反射之光來使用。一外部反射器可被提供,或如同在第二實施例中,該電漿坩堝可被塑形而以一特定方向反射光。該塑形表面可被研磨而仰賴總內部反射作用。替代性地,它可被金屬化以強化反射作用。在本例中,該金屬化作用可形成部分的該法拉第柵欄。在另一替代性實施例中,該電漿坩堝可與一被定位以將光反射回到該電漿坩堝之互補反射器結合。 The light source is usually used in conjunction with light reflected in a particular direction. An external reflector can be provided, or as in the second embodiment, the plasma can be shaped to reflect light in a particular direction. The contoured surface can be ground to rely on total internal reflection. Alternatively, it can be metallized to enhance reflection. In this case, the metallization can form part of the Faraday fence. In another alternative embodiment, the plasma crucible can be combined with a complementary reflector positioned to reflect light back to the plasma crucible.

儘管其它材料也適用,但想像該電漿坩堝會為石英或燒結的透明陶瓷材料。尤其,該陶瓷材料可為半透明或透明。一合適半透明陶瓷範例係多晶氧化鋁,而一透明陶瓷範例係多晶釔鋁石榴石-YAG。其它可行材料為氮化鋁及單 晶藍寶石。 Although other materials are also suitable, it is envisaged that the plasma crucible will be quartz or sintered transparent ceramic material. In particular, the ceramic material can be translucent or transparent. A suitable translucent ceramic example is polycrystalline alumina, and a transparent ceramic example is polycrystalline yttrium aluminum garnet-YAG. Other possible materials are aluminum nitride and single Crystal sapphire.

該法拉第柵欄可藉由以一例如銦錫氧化物之傳導性透明材料薄層塗佈該電漿坩堝而被提供。替代性地,該電漿坩堝可被包裝於一導線網狀物中。再者,該導體網狀物可被熔入該電漿坩堝材料中,隨著電漿坩堝材料延伸至該網狀物外。 The Faraday barrier can be provided by coating the plasma crucible with a thin layer of a conductive transparent material such as indium tin oxide. Alternatively, the plasma crucible can be packaged in a wire mesh. Furthermore, the conductor mesh can be melted into the plasma material as the plasma material extends beyond the mesh.

當具有合適材料來抵抗該填充物侵害,尤其是在該電漿坩堝具有相較於該電漿坩堝內自該法拉第柵欄一側邊或末端至另一側邊或末端之距離係小的之壁面厚度的地方,該天線可延伸至該電漿空間中。本例子中,共振主要是建立於該空間內。這類天線可為一延伸至該空間內之短棒,然較佳地係一橫向配置於該電漿坩堝長度中之薄板,典型地為一碟狀物。用於該天線之連接裝置可從旁延伸至該電漿坩堝外,而在該天線之一平面中或靠近之;或者,較佳的是:該天線可軸向延伸至該電漿坩堝外,橫向於該天線之一平面。 When there is a suitable material to resist the filler intrusion, especially in the plasma raft having a wall surface smaller than the distance from the side or end of the Faraday fence to the other side or end of the plasma raft Where the thickness is, the antenna can extend into the plasma space. In this example, the resonance is mainly established in the space. Such an antenna may be a short rod that extends into the space, but is preferably a thin plate that is laterally disposed in the length of the plasma, typically a dish. The connecting means for the antenna may extend from the side to the outside of the plasma, in or near one of the planes of the antenna; or, preferably, the antenna may extend axially beyond the plasma, Transverse to one of the planes of the antenna.

替代性地,該天線可為一在該電漿坩堝之凹角內延伸之傳導金屬短棒。這類凹角可為一伸入該空間之薄壁凸出物,具有與剛剛所述之薄板天線動作類似之短棒天線。該凹角可平行於該空間之一長度或橫向於該空間之一長度。如同一替代例,在該空間是相較於該電漿坩堝內自該法拉第柵欄一側邊或末端至另一側邊或末端之距離為小的地方,該凹角可沿著該空間側邊,而具有建立大部分在該電漿坩堝內但遍及該電漿坩堝各處之共振。本例子中,該電 漿坩堝會具有一大於該環境空氣介電常數之介電常數,且該共振波長會短於它的自由空間波長。 Alternatively, the antenna can be a conductive metal stub extending within the concave corner of the plasma crucible. Such a recessed corner may be a thin-walled projection that projects into the space and has a short rod antenna that acts similarly to the thin-plate antenna just described. The recess angle can be parallel to one of the lengths of the space or transverse to one of the lengths of the space. In the same alternative, the recessed corner may be along the side of the space, where the distance from the side or end of the Faraday fence to the other side or end is small. It has the resonance to establish most of it in the plasma crucible but throughout the plasma crucible. In this example, the electricity The pulp will have a dielectric constant greater than the dielectric constant of the ambient air, and the resonant wavelength will be shorter than its free space wavelength.

在該電漿坩堝是該電漿坩堝內之一個共振微波波長或共振微波波長的整數倍時,它較佳地是該波長之二分之一。 When the plasma crucible is a resonant microwave wavelength or an integral multiple of the resonant microwave wavelength in the plasma crucible, it is preferably one-half of the wavelength.

該填充材料可為已知自一電漿射出光之數種構件中單獨任一者或其結合。 The filler material can be any of a number of components known to emit light from a plasma or a combination thereof.

較佳地,該法拉第柵欄包含至少一孔隙以經此局部地增加光傳輸。通常,該孔隙會是不大於該坩堝中之微波之自由空間波長的十分之一。典型地,對於在2.45千兆赫操作而言,該孔隙不會大於1/10 x 12.24公分,也就是12.24毫米,而對於5.8千兆赫而言,則不大於6.12毫米。 Preferably, the Faraday fence includes at least one aperture to locally increase light transmission therethrough. Typically, the aperture will be no more than one tenth of the free space wavelength of the microwave in the crucible. Typically, for 2.45 GHz operation, the aperture will not be greater than 1/10 x 12.24 cm, which is 12.24 mm, and for 5.8 GHz, no greater than 6.12 mm.

可提供不只一個孔隙。例如,在選取的光係來自該坩堝軸向及徑向兩者之地方,可提供相應位置孔隙。 More than one aperture can be provided. For example, where the selected light system is from both the axial and radial directions of the crucible, the corresponding location aperture can be provided.

相較不存在孔隙區域時,孔隙區域的供應允許更多來自光源的光線進行放射。 The supply of the aperture area allows more of the light from the source to radiate than when there is no void area.

較佳地,該透光電漿坩堝具有:●一具有一臺階結構之孔及一自該空間延伸至該坩堝一表面之埋頭孔及●一在該埋頭孔中並密封至該坩堝之透明材料的塞子。 Preferably, the light-transmissive plasma pulp has: a hole having a stepped structure and a counterbore extending from the space to the surface of the first surface and a transparent material in the counterbore and sealed to the crucible plug.

該臺階結構及該空間可藉由對該坩堝材料進行機械式鑽孔或例如鑄造之其它成形機制而形成。 The step structure and the space can be formed by mechanical drilling of the crucible material or other forming mechanisms such as casting.

在用於該塞子之人工藍寶石及用於該坩堝之透光氧化鋁間具有相容熱膨脹係數係為已知時,該塞子及坩堝可為 不同材料,一般它們典型會是為石英之相同材料。 When the artificial sapphire for the plug and the transparent alumina for the crucible are known to have a compatible coefficient of thermal expansion, the plug and the crucible may be Different materials, generally they will typically be the same material as quartz.

再者,該塞子可以藉由一在該塞子及該坩堝之間的例如玻璃熔料之可熔材料來密封,但是,在該較佳實施例中,該塞子及該坩堝係藉由熔化它們自己的材料來進行密封。為了進行熔化,該坩堝整體可被加熱。然而,限制至熔化範圍之局部加熱係較佳。典型地,這個可以一雷射來進行。 Furthermore, the plug can be sealed by a fusible material such as a glass frit between the plug and the crucible, but in the preferred embodiment, the plug and the tether are melted by themselves. The material is used for sealing. For melting, the crucible can be heated as a whole. However, local heating to the melting range is preferred. Typically, this can be done with a laser.

該塞子可與該臺階結構具有相同深度,在此例中,該塞子係與該坩堝表面齊平。然而,該塞子可浮出該表面。這兩個替代例係適用於該空間靠近該坩堝表面的情形。在一該空間較深入該坩堝之第三替代例中,該塞子係凹陷。在後面這個實施例中,該埋頭孔至該表面之長度可藉由固定於該埋頭孔中之相同材料的進一步塞子所填滿,但不需密封,該進一步塞子與該表面齊平。本配置可讓該空間位在該坩堝中心,且讓該坩堝它的介電材料之表現如同單一固態本體(具有該中心空間)。 The plug may have the same depth as the step structure, in this case the plug is flush with the surface of the crucible. However, the plug can float out of the surface. These two alternatives apply to situations where the space is close to the surface of the crucible. In a third alternative in which the space is deeper into the crucible, the plug is recessed. In the latter embodiment, the length of the countersink to the surface may be filled by a further plug of the same material secured in the counterbore, but without sealing, the further plug is flush with the surface. This configuration allows the space to be centered in the crucible and has its dielectric material behave like a single solid body (with that central space).

較佳地,該光源係與一微波源及一匹配電路結合成一單一整合結構之燈具。 Preferably, the light source is combined with a microwave source and a matching circuit to form a single integrated structure of the luminaire.

在該微波源可為一固態振盪器及放大器時,在該較佳實施例中,就該輸出的觀點來看,該微波源係一磁電管。典型地,該磁電管功率會是1千瓦。 In the preferred embodiment, the microwave source is a magnetron. Typically, the magnetron power will be 1 kilowatt.

在該較佳實施例中,該匹配電路係一阻抗調節器,傳統上為三段調節器。 In the preferred embodiment, the matching circuit is an impedance adjuster, conventionally a three-stage regulator.

應注意的是:通常是期待使用本發明光源來產生可見光,但它們同樣適合用於產生不可見光,尤指紫外線光。 It should be noted that it is generally desirable to use the light source of the present invention to produce visible light, but they are equally suitable for producing invisible light, especially ultraviolet light.

參考至圖1至圖5之圖式,本發明燈具包括一具有一發光共振器1、一磁電器2及一阻抗調節器3形式之光源。一反射器4係安裝在該光源及該阻抗調節器的接合處,以導引該光成為大體上準直之光束5。 Referring to the drawings of FIGS. 1 to 5, the lamp of the present invention comprises a light source having a form of a light-emitting resonator 1, a magnetic device 2 and an impedance adjuster 3. A reflector 4 is mounted at the junction of the source and the impedance adjuster to direct the light into a substantially collimated beam 5.

該發光共振器包括一由石英內封套及外封套12、13所構成之坩堝11。這些有具有分別的端板16、17的環狀圓柱管14、15。一具有提供一地面至該共振器內微波之網線尺寸之鎢線網狀物18構成形式之法拉第柵欄係分別夾在該些圓柱管之間及該些端板之間。包含圓柱管及端板之每一個封套係密封的。一接地裝置18’自該網狀物延伸至該封套外面。 The illuminating resonator comprises a crucible 11 composed of a quartz inner envelope and outer envelopes 12, 13. These have annular cylindrical tubes 14, 15 with separate end plates 16, 17. A Faraday fence having a form of a tungsten wire mesh 18 providing a mesh size to the ground in the resonator is sandwiched between the cylindrical tubes and between the end plates. Each of the envelopes including the cylindrical tube and the end plate is sealed. A grounding device 18' extends from the mesh to the outside of the envelope.

夾在該些端板間之線網狀物間之軸向坩堝長度係為該操作微波頻率的λ/2。在該坩堝的一個末端處,一鉬驅動連接裝置19延伸至一鎢碟狀物20。這個係配置成橫向於該外殼之軸線A且在該外殼末端距離該網狀物1/16λ之處。該坩堝被填滿可激發電漿材料,例如在稀有地球氣體中的金屬鹵化物之劑量。 The axial length between the wire webs sandwiched between the end plates is λ /2 of the operating microwave frequency. At one end of the crucible, a molybdenum drive connecting device 19 extends to a tungsten disc 20. This system is configured to be transverse to the axis A of the housing and at the end of the housing 1/16 λ from the web. The crucible is filled with a dose of metal halide that excites the plasma material, such as in rare earth gases.

該碟狀物充當天線作用並透過該匹配電路3由該磁電器2所驅動。該匹配電路係具有該磁電管之輸出天線22做為它的輸入之鋁製空氣波導32。該匹配電路之輸出天線33係一例如該共振器天線碟狀物之碟狀物,且連接至一延伸至該匹配電路外並以一絕緣襯套35從中絕緣之連接裝置 34。該匹配電路具有三個調節段36、37、38。這些係配置成λ/4,以建構該匹配電路成為一阻抗調節器。 The disc acts as an antenna and is driven by the magnet 2 through the matching circuit 3. The matching circuit has an aluminum air waveguide 32 with the output antenna 22 of the magnetron as its input. The output antenna 33 of the matching circuit is a disk of the resonator antenna disk, for example, and is connected to a connecting device extending outside the matching circuit and insulated from the insulating bushing 35. 34. The matching circuit has three adjustment sections 36, 37, 38. These lines are configured as λ/4 to construct the matching circuit as an impedance regulator.

該匹配電路它的末端處具有凸緣39、40,透過該些凸緣連接該匹配電路至該磁電管及該光源。後者末端係黏牢41至一陶瓷材料之支架42。這個在與該匹配電路之凸緣40中之孔44具有相同螺孔間徑(PCD)處具有孔43,並利用螺絲45來固定之。一間隔環狀物46隔開該匹配電路及該支架,以使該阻抗調節器及光源連接裝置34、19同軸並藉由一夾子47連接彼此。該反射器4也被栓在該支架42及該間隔物46間之螺絲上。該接地裝置18’也被連接至該些螺絲45。 The matching circuit has flanges 39, 40 at its ends through which the matching circuit is connected to the magnetron and the light source. The latter ends are bonded to a bracket 42 of a ceramic material. This has a hole 43 at the same hole diameter (PCD) as the hole 44 in the flange 40 of the matching circuit, and is fixed by a screw 45. A spacer ring 46 separates the matching circuit and the bracket such that the impedance adjuster and the light source connecting means 34, 19 are coaxial and connected to each other by a clip 47. The reflector 4 is also bolted to the screw between the bracket 42 and the spacer 46. The grounding device 18' is also connected to the screws 45.

圖5顯示一替代性發光共振器,也具有內含石英外封套及內封套,其具有一地平面網狀物。在該碟狀天線20所在位置上,一類短棒天線120延伸至一石英凹角套管121中,位在該些封套之中心軸上。本配置完全使該天線與該坩堝之填充內含物絕緣,其優勢處在於該填充物係特別具有侵略性。 Figure 5 shows an alternative illuminating resonator also having an inner quartz envelope and an inner envelope having a ground plane mesh. At the location of the dish antenna 20, a short rod antenna 120 extends into a quartz recessed sleeve 121 on the central axis of the envelopes. This configuration completely insulates the antenna from the fill content of the crucible, which is advantageous in that the filler is particularly aggressive.

操作時,典型地額定在1至5千瓦之磁電管透過該阻抗調節器及該天線20或120將共振微波輻射射入該坩堝中。這個形成一混合介電共振腔室。該共振作用在該腔室中建立該電場強度,使該填充物形成一射出光之電漿。典型地,該共振模式會是TE101。進一步共振模式也是有可能。 In operation, a magnetron, typically rated at 1 to 5 kilowatts, is passed through the impedance adjuster and the antenna 20 or 120 to inject resonant microwave radiation into the bore. This forms a hybrid dielectric resonant chamber. The resonance acts to establish the electric field strength in the chamber such that the filler forms a plasma that emits light. Typically, the resonant mode will be TE101. Further resonance modes are also possible.

典型地在5.8千兆赫處,該網狀物在相對末端間且允許之個別封套壁面厚度可為1.5毫米之坩堝之軸向長度係為 72毫米而直徑為31毫米。會理解到雖然對於多數家庭使用而言係太大,但這類大小係完全適合用於照明較大範圍的環境。 Typically at 5.8 GHz, the mesh is between the opposite ends and allows the individual jacket wall thickness to be 1.5 mm. 72 mm and 31 mm in diameter. It will be appreciated that while it is too large for most home use, this size is well suited for lighting a wide range of environments.

該阻抗調節器可具有114x40x20毫米之內部尺寸。該些調節段係設定為該中間平面的1/16λ。這個已被發現具有優勢存在。 The impedance adjuster can have an internal dimension of 114 x 40 x 20 mm. The adjustment segments are set to 1/16λ of the intermediate plane. This has been found to have an advantage.

以透明陶瓷取代該電漿坩堝之石英材料係可行,本例子中,與該陶瓷接觸之連接器可為鈮。進一步,在該些坩堝壁面內之網狀物所在位置上,該坩堝可被塗佈一銦錫氧化物-ITO-傳導層。 It is possible to replace the quartz material of the plasma crucible with a transparent ceramic. In this example, the connector in contact with the ceramic may be tantalum. Further, the crucible may be coated with an indium tin oxide-ITO-conducting layer at the location of the webs in the crucible walls.

如圖6所示,該光源可利用黃銅焊接料53焊接一鉬短棒52至一鉬末端蓋狀物51且該鉬短棒52攜帶一鎢天線54之子組件來建構。該蓋狀物之邊緣55進入該坩堝之石英末端覆蓋物57之頸部56中。這個子組件係密封在該坩堝之圓柱本體58及相對末端59上之密封物60處。該覆蓋物57具有一電荷管狀物61,透過該管狀物可引進該可激發材料電荷及惰性氣體填充物。該管狀物被封鎖。該法拉第柵欄62係以一ITO塗層形式而提供。 As shown in FIG. 6, the light source can be welded with a brass solder material 53 to a molybdenum stub 52 to a molybdenum end cap 51 and the molybdenum stub 52 carries a subassembly of a tungsten antenna 54 for construction. The edge 55 of the lid enters the neck 56 of the quartz end covering 57 of the crucible. This subassembly is sealed at the cylindrical body 58 of the crucible and the seal 60 on the opposite end 59. The cover 57 has a charge tube 61 through which the charge of the excitable material and the inert gas fill can be introduced. The tube is blocked. The Faraday fence 62 is provided in the form of an ITO coating.

現在轉向圖7及圖8,本發明另一燈具現在將被描述。它具有內含一平坦前面102及一碗碟狀後面103之研磨石英固態電漿坩堝101。該前面係塗佈有銦錫氧化物104以提供它導電性,但還是有透明性。與該ITO層電性接觸的係一在該碗碟狀後面上之鉑層105。這二層一起形成一環繞在該石英電漿坩堝四周之法拉第柵欄。 Turning now to Figures 7 and 8, another luminaire of the present invention will now be described. It has a ground quartz solid plasma crucible 101 containing a flat front face 102 and a dish-shaped back face 103. The front side is coated with indium tin oxide 104 to provide it with electrical conductivity, but still has transparency. Electrically in contact with the ITO layer is a layer of platinum 105 on the back of the dish. Together, the two layers form a Faraday fence that surrounds the quartz plasma crucible.

在該碗碟狀和它的中心軸對準之焦點處係一填充著微波可激發材料107之空間106,典型為在氙氣中之銦鹵化物。該空間係一石英孔,其係由塞子108密封,該塞子利用雷射密封法而被熔化而不用其它材料。 At the focus of the dish and its central axis is a space 106 filled with a microwave excitable material 107, typically an indium halide in helium. This space is a quartz hole which is sealed by a plug 108 which is melted by a laser sealing method without using other materials.

沿著該空間側邊係用於一金屬短棒天線110之一石英容器109。這個係直接連接至例如該電路3之匹配電路之輸出端111。該電路之轉接器板112具有一與該石英電漿坩堝後面外形互補之外形113。為了使該法拉第柵欄接地,一固定環狀物114拉引該石英接觸到該端板。 A quartz container 109 for one of the metal stub antennas 110 is attached along the side of the space. This is directly connected to the output 111 of the matching circuit of the circuit 3, for example. The adapter plate 112 of the circuit has a shape 113 that is complementary to the shape behind the quartz plasma. In order to ground the Faraday fence, a fixed ring 114 pulls the quartz into contact with the end plate.

在來自該匹配電路之微波傳送時,共振產生於該石英電漿坩堝中,且一電漿建立於該空間中。光係由該空間內之鹵化物所射出。該光不是直接透過該前面102離開該電漿坩堝就是藉由該碗碟狀後面103之鉑層105反射往前離開該前面。 During microwave transmission from the matching circuit, resonance is generated in the quartz plasma crucible and a plasma is established in the space. The light system is emitted by a halide in the space. The light does not exit the plasma directly through the front face 102 or is reflected away from the front side by the platinum layer 105 of the dish-shaped rear face 103.

典型地,對於2.4千兆赫微波而言,該石英電漿坩堝之直徑係為49毫米,對於5.8千兆赫微波而言則為31.5毫米。在任一例子中,該空間直徑為5毫米且該塞子為8毫米長,而保留一10毫米長空間。該天線空間109之直徑為2毫米,偏離該空間5毫米,其係在該電漿坩堝之中心軸上。 Typically, the quartz plasma crucible has a diameter of 49 mm for a 2.4 GHz microwave and 31.5 mm for a 5.8 GHz microwave. In either case, the space has a diameter of 5 mm and the plug is 8 mm long while retaining a 10 mm long space. The antenna space 109 has a diameter of 2 mm and is offset from the space by 5 mm and is attached to the central axis of the plasma crucible.

應注意,相較於使用不透明波導中之小燈泡之習知無電極燈具,其中該光出口受到該燈泡直徑所限制,本發明來自該波導全部前面之光出口不只可以顯著地大於該電漿空間106之直徑,旁邊及後面傳導光也可被反射向前至該燈具外。 It should be noted that compared to conventional electrodeless luminaires using small bulbs in opaque waveguides, wherein the optical exit is limited by the diameter of the bulb, the optical exit from all of the front of the waveguide of the present invention can be significantly larger than the plasma space. The diameter of 106, the side and back conduction light can also be reflected forward to the outside of the fixture.

參考至圖9及圖10,一燈具201包括一起形成一微波能量來源之振盪器202及放大器203,典型地操作於2.45或5.8千兆赫、或落在ISM頻帶內之其它頻率。該來源透過一匹配電路204傳送該些微波至一延伸至透光電漿坩堝207內之凹角206中之天線205。這個係為石英並具有包含一惰性氣體填充物及一受微波激發時可射出光之微波可激發材料之一中心腔室208。該波導係透明的,且該光可自任一方向離開該波導,但受限於下述法拉第柵欄所提供之限制。 Referring to Figures 9 and 10, a luminaire 201 includes an oscillator 202 and an amplifier 203 that together form a source of microwave energy, typically operating at 2.45 or 5.8 GHz, or other frequencies falling within the ISM band. The source transmits the microwaves through a matching circuit 204 to an antenna 205 that extends into the recess 206 in the transparent plasma pad 207. This is quartz and has a central chamber 208 comprising an inert gas fill and a microwave excitable material that emits light upon excitation by microwaves. The waveguide is transparent and the light can exit the waveguide from either direction, but is limited by the limitations provided by the Faraday fence described below.

該坩堝係一63毫米長及43毫米直徑之直立環狀圓柱容器。在該坩堝中心,該空間具有10毫米長及3毫米直徑。該凹角係與該空間同軸並具有2毫米直徑及10毫米長。 The raft is an upright circular cylindrical container of 63 mm length and 43 mm diameter. At the center of the crucible, the space has a length of 10 mm and a diameter of 3 mm. The concave angle is coaxial with the space and has a diameter of 2 mm and a length of 10 mm.

一法拉第柵欄209環繞該坩堝並包括:●一遍及具有該天線凹角之末端表面211各處且典型地為內含單氧化矽之銀反光塗層210,●一在該末端表面214上之銦錫氧化物(ITO)沉積層212,及●一在該圓柱表面216上之傳導性化學氣相沉積網狀物215,該網狀物具有延伸至該些末端上之手指狀物217以電性連接該些構件210、212及215。該網狀物之網線係0.5毫米寬並以6.0毫米間距設置之。 A Faraday fence 209 surrounds the crucible and includes: - a silver reflective coating 210 throughout the end surface 211 having the concave corner of the antenna and typically containing mono-antimony, a tin indium on the end surface 214 An oxide (ITO) deposited layer 212, and a conductive chemical vapor deposition web 215 on the cylindrical surface 216 having fingers 217 extending to the ends for electrical connection The members 210, 212 and 215. The mesh of the mesh is 0.5 mm wide and is placed at a pitch of 6.0 mm.

該法拉第柵欄係藉由容納於一外罩219內之凹部218中而接地。 The Faraday fence is grounded by being received in a recess 218 in a housing 219.

該ITO沉積層具有置於該末端表面214中心處之無電鍍12毫米孔隙220,藉此來自該空間之電漿放電器222末端之光221可直接傳送到該透光電漿坩堝外,未因該法拉第柵欄而衰減。多數光雖會衰減至某含量但也透過該法拉第柵欄來傳送出去。 The ITO deposited layer has an electroless 12 mm aperture 220 disposed at the center of the end surface 214, whereby light 221 from the end of the plasma discharger 222 from the space can be directly transferred to the transparent plasma. Faraday fence and decay. Most of the light is attenuated to a certain level but is also transmitted through the Faraday fence.

應注意,該法拉第柵欄可完全由形成在該坩堝四周之線網狀物所構成,其具有一與該空間在同線上之孔隙。 It should be noted that the Faraday fence may consist entirely of a wire mesh formed around the weir, having a void in the same line as the space.

參考至該些圖式中之圖11及圖12,一燈具301包括一微波能量之振盪器及放大器302來源,典型地操作於2.45或5.8千兆赫、或落在ISM頻帶內之其它頻率。該來源透過一匹配電路303傳送該些微波至一延伸至透光電漿坩堝306內之凹角305中之天線304。這個係為石英並具有包含一惰性氣體填充物及一受微波激發時可射出光之微波可激發材料之一中心腔室307。該波導係透明的,光可自任一方向離開該波導,但受限於下述法拉第柵欄所提供之限制。 Referring to Figures 11 and 12 of these figures, a luminaire 301 includes a source of microwave energy oscillator and amplifier 302, typically operating at 2.45 or 5.8 GHz, or other frequencies falling within the ISM band. The source transmits the microwaves through a matching circuit 303 to an antenna 304 that extends into a recess 305 in the light-transmissive plasma raft 306. This is quartz and has a central chamber 307 comprising an inert gas fill and a microwave excitable material that emits light upon excitation by microwaves. The waveguide is transparent and light can exit the waveguide from either direction, but is limited by the limitations provided by the Faraday fence described below.

該坩堝係一63毫米長及43毫米直徑之直立環狀圓柱容器。在該坩堝中心,它的中心水平軸A上,該空間具有10毫米長及3毫米直徑。該凹角係與該空間同軸並具有2毫米直徑及10毫米長。 The raft is an upright circular cylindrical container of 63 mm length and 43 mm diameter. At the center of the crucible, its central horizontal axis A has a diameter of 10 mm and a diameter of 3 mm. The concave angle is coaxial with the space and has a diameter of 2 mm and a length of 10 mm.

一法拉第柵欄308環繞該坩堝並包括:●一遍及具有該天線凹角之末端表面310各處且典型地為內含單氧化矽309之銀反光塗層310,該電鍍層係反射性以將來自該空間中之電漿之光反射至該坩堝外, ●一在該坩堝之末端表面312上之銦錫氧化物(ITO)沉積層311,該ITO塗層傳送來自該電漿之光,及●一在該圓柱表面315上之傳導性化學氣相沉積網狀物314,該網狀物具有延伸至該些末端上之手指狀物316以電性連接該些構件309、311及314。來自該電漿之光可離開位於該些網線間之坩堝。 A Faraday fence 308 surrounds the crucible and includes: - a silver reflective coating 310 that is present throughout the end surface 310 having the concave corner of the antenna and typically containing a monocrystalline niobium 309, the electroplated layer being reflective to be from The light of the plasma in the space is reflected outside the raft, An indium tin oxide (ITO) deposited layer 311 on the end surface 312 of the crucible, the ITO coating transfers light from the plasma, and a conductive chemical vapor deposition on the cylindrical surface 315 A mesh 314 having fingers 316 extending to the ends to electrically connect the members 309, 311, and 314. Light from the plasma can exit the crucible between the wires.

該法拉第柵欄係藉由部分容納於一鋁外罩318內之凹部317中而接地。 The Faraday fence is grounded by being partially received in a recess 317 in an aluminum housing 318.

該末端表面312具有一容納塞子322之孔321,該孔具有與該坩堝相同之材料,該材料即為石英。該孔形成一臺階結構324,該塞子位在該臺階結構上,該臺階結構外表面325與該表面312齊平且該中心空間延伸至該臺階結構。利用雷射密封法將該塞子密封至孔321及該臺階結構324間之角落處。 The end surface 312 has a hole 321 for receiving a plug 322 having the same material as the crucible, which is quartz. The aperture defines a stepped structure 324 on which the plug is positioned, the stepped outer surface 325 being flush with the surface 312 and the central space extending to the stepped structure. The plug is sealed to the corners between the hole 321 and the stepped structure 324 by a laser sealing method.

現在轉向圖13及圖14,那裡所示之不具有驅動天線及法拉第柵欄中任一者,也不具有所示之微波來源及匹配電路之光源係大部分類似圖11及圖12之光源。該坩堝406具有一中心空間407,其係真正位在坩堝水平上及直徑上兩者之中心,然而,該空間307只是直徑上的中心。該孔421延伸並深入至內含該塞子422之坩堝中,該塞子具有相同厚度並依靠在該孔及該空間之接面處之臺階結構424上。該塞子422被雷射以與該塞子322相同之方式所密封。 Turning now to Figures 13 and 14, the source of the source of the microwave source and matching circuit, which does not have either the drive antenna and the Faraday fence, is shown to be substantially similar to the light sources of Figures 11 and 12. The crucible 406 has a central space 407 that is truly centered on both the crucible level and the diameter, however, the space 307 is only the center of the diameter. The aperture 421 extends into and into the bore containing the plug 422, which has the same thickness and rests on the stepped structure 424 at the junction of the aperture and the space. The plug 422 is sealed by the laser in the same manner as the plug 322.

在該孔421中之塞子422外部係一自該塞子422延伸至該坩堝表面412之進一步塞子431。如此,基於微波共振 目的,該坩堝係一具有石英介電常數材料之連續物件。 The plug 422 in the aperture 421 is externally extended from the plug 422 to a further plug 431 of the serpentine surface 412. So, based on microwave resonance The object is a continuous object having a quartz dielectric constant material.

本發明並不要受限於上述實施例之細節。例如,該二塞子422及431可以單一整體方式來提供。 The invention is not limited by the details of the above embodiments. For example, the two plugs 422 and 431 can be provided in a single unitary manner.

1‧‧‧共振器 1‧‧‧Resonator

2‧‧‧磁電管 2‧‧‧Magnetic tube

3‧‧‧阻抗調節器 3‧‧‧ Impedance regulator

4‧‧‧反射器 4‧‧‧ reflector

5‧‧‧準直光束 5‧‧‧ Collimated beam

11‧‧‧坩堝 11‧‧‧坩埚

12‧‧‧封套 12‧‧‧ Cover

13‧‧‧封套 13‧‧‧ Cover

14‧‧‧管 14‧‧‧ tube

15‧‧‧管 15‧‧‧ tube

16‧‧‧端板 16‧‧‧End plate

17‧‧‧端板 17‧‧‧End board

18‧‧‧鎢線網狀物 18‧‧‧Tungsten wire mesh

18’‧‧‧接地裝置 18’‧‧‧ Grounding device

19‧‧‧鉬驅動連接裝置 19‧‧‧Molybdenum drive connection

20‧‧‧鎢碟狀物 20‧‧‧Tungsten disc

22‧‧‧輸出天線 22‧‧‧Output antenna

32‧‧‧空氣波導 32‧‧‧Air Waveguide

33‧‧‧輸出天線 33‧‧‧Output antenna

34‧‧‧連接裝置 34‧‧‧Connecting device

35‧‧‧絕緣襯套 35‧‧‧Insulation bushing

36‧‧‧調節段 36‧‧‧Adjustment section

37‧‧‧調節段 37‧‧‧Adjustment section

38‧‧‧調節段 38‧‧‧ adjustment section

39‧‧‧凸緣 39‧‧‧Flange

40‧‧‧凸緣 40‧‧‧Flange

41‧‧‧膠結材料 41‧‧‧Blocking materials

42‧‧‧支架 42‧‧‧ bracket

43‧‧‧孔 43‧‧‧ hole

44‧‧‧孔 44‧‧‧ hole

45‧‧‧螺絲 45‧‧‧ screws

46‧‧‧間隔環狀物 46‧‧‧ spacer ring

47‧‧‧夾子 47‧‧‧ clip

51‧‧‧鉬末端蓋狀物 51‧‧‧Molybdenum end cap

52‧‧‧鉬短棒 52‧‧‧Molybdenum short rod

53‧‧‧黃銅焊接料 53‧‧‧Brass soldering material

54‧‧‧鎢天線 54‧‧‧Tungsten antenna

55‧‧‧邊緣 55‧‧‧ edge

56‧‧‧頸部 56‧‧‧ neck

57‧‧‧覆蓋物 57‧‧‧ Covering

58‧‧‧圓柱本體 58‧‧‧Cylinder body

59‧‧‧相對末端 59‧‧‧relative ends

60‧‧‧密封物 60‧‧‧ Sealing

61‧‧‧充電器管狀物 61‧‧‧Charger tube

62‧‧‧法拉第柵欄 62‧‧‧Faraday Fence

101‧‧‧固態電漿坩堝 101‧‧‧Solid plasma

102‧‧‧平坦前面 102‧‧‧flat front

103‧‧‧碗碟狀後面 103‧‧‧ dishes behind

104‧‧‧銦錫氧化物 104‧‧‧Indium tin oxide

105‧‧‧鉑層 105‧‧‧Platinum layer

106‧‧‧空間 106‧‧‧ Space

107‧‧‧材料 107‧‧‧Materials

108‧‧‧插頭 108‧‧‧ plug

109‧‧‧容器 109‧‧‧ Container

111‧‧‧輸出端 111‧‧‧ Output

112‧‧‧轉接器板 112‧‧‧Adapter board

113‧‧‧外形 113‧‧‧ shape

114‧‧‧固定環狀物 114‧‧‧Fixed ring

120‧‧‧天線 120‧‧‧Antenna

121‧‧‧凹角套管 121‧‧‧ concave angle casing

201‧‧‧燈具 201‧‧‧Lamps

202‧‧‧振盪器 202‧‧‧Oscillator

203‧‧‧放大器 203‧‧Amplifier

204‧‧‧匹配電路 204‧‧‧Matching circuit

205‧‧‧天線 205‧‧‧Antenna

206‧‧‧凹角 206‧‧‧ concave corner

207‧‧‧電漿坩堝 207‧‧‧Electrical pulp

208‧‧‧中心空間 208‧‧‧central space

209‧‧‧法拉第柵欄 209‧‧Faraday Fence

210‧‧‧反光塗層 210‧‧‧Reflective coating

211‧‧‧末端表面 211‧‧‧End surface

212‧‧‧銦錫氧化物 212‧‧‧Indium Tin Oxide

214‧‧‧末端表面 214‧‧‧End surface

215‧‧‧網狀物 215‧‧‧ mesh

216‧‧‧圓柱表面 216‧‧‧ cylindrical surface

217‧‧‧指狀物 217‧‧‧ fingers

218‧‧‧凹部 218‧‧‧ recess

219‧‧‧外罩 219‧‧‧ Cover

220‧‧‧孔隙 220‧‧‧ pores

221‧‧‧光 221‧‧‧Light

222‧‧‧電漿放電器 222‧‧‧ Plasma Discharger

301‧‧‧燈具 301‧‧‧Lighting

302‧‧‧放大器來源 302‧‧‧Amplifier source

303‧‧‧匹配電路 303‧‧‧Matching circuit

304‧‧‧天線 304‧‧‧Antenna

305‧‧‧凹角 305‧‧‧ concave corner

306‧‧‧電漿坩堝 306‧‧‧Electrical pulp

307‧‧‧中心空間 307‧‧‧central space

308‧‧‧法拉第柵欄 308‧‧Faraday Fence

309‧‧‧單氧化矽 309‧‧‧monosulfide

310‧‧‧反光塗層 310‧‧‧Reflective coating

311‧‧‧沉積層 311‧‧‧Sedimentary layer

312‧‧‧末端表面 312‧‧‧End surface

314‧‧‧網狀物 314‧‧‧ mesh

315‧‧‧圓柱表面 315‧‧‧ cylindrical surface

316‧‧‧指狀物 316‧‧‧ fingers

317‧‧‧凹部 317‧‧‧ recess

318‧‧‧外罩 318‧‧‧ Cover

406‧‧‧坩堝 406‧‧‧坩埚

407‧‧‧中心空間 407‧‧‧central space

412‧‧‧表面 412‧‧‧ surface

421‧‧‧孔 421‧‧‧ hole

422‧‧‧塞子 422‧‧‧plug

424‧‧‧階梯 424‧‧‧Step

431‧‧‧塞子 431‧‧‧ 塞子

為了協助了解本發明,其各種特定實施例已經由範例及參考附圖來描述,其中:圖1係根據本發明結合一微波驅動電路成為一燈具之光源之側視圖。 To assist in understanding the invention, various specific embodiments thereof have been described by way of example and with reference to the accompanying drawings in which: FIG. 1 is a side view of a light source of a luminaire incorporating a microwave drive circuit in accordance with the present invention.

圖2係較大比例顯示圖1中之燈具之光源。 Figure 2 is a larger scale showing the light source of the luminaire of Figure 1.

圖3係圖1中之微波驅動電路之阻抗調節器之類似圖。 Figure 3 is a similar diagram of the impedance regulator of the microwave drive circuit of Figure 1.

圖4係該光源及該阻抗調節器間之接面之片段剖面圖。 4 is a fragmentary cross-sectional view of the junction between the light source and the impedance adjuster.

圖5係類似圖2之替代性光源圖。 Figure 5 is an alternative source diagram similar to Figure 2.

圖6係本發明另一光源之電漿坩堝之透視圖。 Figure 6 is a perspective view of a plasma crucible of another light source of the present invention.

圖7係本發明一進一步光源之透光電漿坩堝之透視圖。 Figure 7 is a perspective view of a light-transmissive plasma pulp of a further light source of the present invention.

圖8係該進一步光源(包含一部分匹配電路及該電漿坩堝之轉接器)之剖面側視圖。 Figure 8 is a cross-sectional side view of the further source (including a portion of the matching circuit and the adapter of the plasma).

圖9係本發明另一光源之透光電漿坩堝之透視圖。 Figure 9 is a perspective view of a light-transmissive plasma pulp of another light source of the present invention.

圖10係包含圖9中之透光電漿坩堝之微波供電式燈具之輪廓圖。 Figure 10 is a contour view of a microwave powered luminaire comprising the light transmissive plasma crucible of Figure 9.

圖11係根據本發明一微波供電式燈具之進一步透光電漿坩堝之透視圖。 Figure 11 is a perspective view of a further light transmissive plasma crucible of a microwave powered luminaire in accordance with the present invention.

圖12係包含圖11中之透光電漿坩堝之微波供電式燈具之輪廓圖。 Figure 12 is a profile view of a microwave powered luminaire comprising the light transmissive plasma crucible of Figure 11.

圖13係類似圖11之根據本發明另一透光電漿坩堝圖。 Figure 13 is a perspective view of another light transmissive plasma according to the present invention similar to Figure 11.

圖14係類似圖12之只有圖13中之坩堝圖。 Figure 14 is a diagram similar to Figure 12 in Figure 13 only.

11‧‧‧坩堝 11‧‧‧坩埚

12‧‧‧封套 12‧‧‧ Cover

13‧‧‧封套 13‧‧‧ Cover

14‧‧‧圓柱管 14‧‧‧ cylindrical tube

15‧‧‧圓柱管 15‧‧‧ cylindrical tube

16‧‧‧端板 16‧‧‧End plate

17‧‧‧端板 17‧‧‧End board

18‧‧‧鎢線網狀物 18‧‧‧Tungsten wire mesh

19‧‧‧鉬驅動連接裝置 19‧‧‧Molybdenum drive connection

20‧‧‧鎢碟狀物 20‧‧‧Tungsten disc

Claims (26)

一種由微波能量供電之光源,該光源具有:一本體,其具有在其中的一密封空間;將微波封住的一法拉第柵欄,其環繞在該本體四周,該本體在該法拉第柵欄之中係一共振波導;一填充物,其在該空間內材料可由微波能量激發以於其中形成一發光電漿;及一天線,其配置於該本體內以傳送電漿感應微波能量至該填充物,該天線具有:一連接裝置,其延伸至該本體外以耦接至一微波能量源;其中:該本體為一電漿坩堝,其材料為透光以從中提供光的出口,並且該法拉第柵欄係至少部分地傳輸光,讓光從該電漿坩堝離開,該配置使得來自該空間的電漿之光可穿透該電漿坩堝並自該電漿坩堝透過該柵欄放射。 A light source powered by microwave energy, the light source having: a body having a sealed space therein; a Faraday fence enclosing the microwave, surrounding the body, the body being attached to the Faraday fence a resonant waveguide; a filler in which a material is excited by microwave energy to form a light-emitting plasma therein; and an antenna disposed in the body to transmit a plasma-sensing microwave energy to the filler, the antenna Having a connecting device extending to the outside of the body to be coupled to a microwave energy source; wherein: the body is a plasma crucible, the material is light transmissive to provide an outlet for light therefrom, and the Faraday barrier is at least partially Light is transmitted to allow light to exit from the plasma crucible, the configuration such that light from the plasma of the space can penetrate the plasma and radiate from the plasma through the barrier. 如申請專利範圍第1項之光源,該電漿坩堝係由多個物件密封在一起。 For example, in the light source of claim 1, the plasma crucible is sealed by a plurality of articles. 如申請專利範圍第1項或第2項之光源,該電漿坩堝係均質的。 If the light source of claim 1 or 2 is applied, the plasma is homogenous. 如申請專利範圍第1項或第2項之光源,其中,該電漿坩堝係為環狀剖面並剪裁其尺寸以提供一在電漿坩堝內 直徑上延伸之半波。 The light source of claim 1 or 2, wherein the plasma crucible is an annular section and is sized to provide a plasma crucible A half wave extending in diameter. 如申請專利範圍第1項或第2項之光源,其中,該電漿坩堝被塑形而以一特定方向反射光。 A light source according to claim 1 or 2, wherein the plasma crucible is shaped to reflect light in a specific direction. 如申請專利範圍第5項之光源,其中,該電漿坩堝之一塑形表面帶有金屬化以強化反射作用。 A light source according to claim 5, wherein one of the shaped surfaces of the plasma crucible is metallized to enhance reflection. 如申請專利範圍第6項之光源,其中,該金屬化形成部分的該法拉第柵欄。 The light source of claim 6, wherein the metallization forms part of the Faraday fence. 如申請專利範圍第5項之光源,包含一被定位以將光反射回到該電漿坩堝之互補反射器。 A light source as in claim 5, comprising a complementary reflector positioned to reflect light back to the plasma. 如申請專利範圍第1項或第2項之光源,結合一獨立反射器來將自該透光坩堝射出之光以一特定方向反射。 The light source of claim 1 or 2 is combined with a separate reflector to reflect light emitted from the light-transmitting pupil in a specific direction. 如申請專利範圍第1項或第2項之光源,其中,該電漿坩堝係為固態介電材料。 The light source of claim 1 or 2, wherein the plasma is a solid dielectric material. 如申請專利範圍第10項之光源,其中,該電漿坩堝係為石英或多晶氧化鋁或多晶釔鋁石榴石或氮化鋁或單晶藍寶石。 The light source of claim 10, wherein the plasma lanthanum is quartz or polycrystalline alumina or polycrystalline yttrium aluminum garnet or aluminum nitride or single crystal sapphire. 如申請專利範圍第1項或第2項之光源,其中,該法拉第柵欄係為或包含一傳導性透明材料薄層及/或一導線網狀物及/或網狀金屬薄片。 The light source of claim 1 or 2, wherein the Faraday barrier is or comprises a thin layer of conductive transparent material and/or a wire mesh and/or a mesh metal foil. 如申請專利範圍第12項之光源,其中,該導體網狀物或網狀薄片被熔入該電漿坩堝之材料中。 The light source of claim 12, wherein the conductor mesh or mesh sheet is melted into the material of the plasma crucible. 如申請專利範圍第12項之光源,其中,該法拉第柵欄包含至少一孔隙以經此局部性增加光傳輸。 The light source of claim 12, wherein the Faraday fence comprises at least one aperture to locally increase light transmission. 如申請專利範圍第14項之光源,其中,該孔隙係不 大於該坩堝中之微波之自由空間波長的十分之一。 For example, the light source of claim 14 of the patent scope, wherein the pore system is not It is greater than one tenth of the free-space wavelength of the microwave in the crucible. 如申請專利範圍第1項或第2項之光源,其中,該天線延伸至具有抵抗該填充物侵害的材料之電漿空間。 A light source according to claim 1 or 2, wherein the antenna extends to a plasma space having a material resistant to the filler. 如申請專利範圍第16項之光源,其中,該電漿坩堝具有一壁面厚度,其相較於該電漿坩堝內自該法拉第柵欄一側邊或末端至另一側邊或末端之距離係小的。 The light source of claim 16, wherein the plasma crucible has a wall thickness which is smaller than a distance from the side or end of the PARA fence to the other side or end of the PARA fence. of. 如申請專利範圍第17項之光源,其中,該天線係一橫向配置於該電漿坩堝長度中之薄板,典型地為一碟狀物,且該連接裝置係一延伸至該電漿坩堝之一壁面面之短棒或接線。 The light source of claim 17, wherein the antenna is a thin plate laterally disposed in the length of the plasma, typically a dish, and the connecting device extends to one of the plasmas Short rods or wires on the wall surface. 如申請專利範圍第1項或第2項之光源,其中,該天線係一在該電漿坩堝之凹角內延伸之傳導金屬短棒或接線,且該連接裝置係一該天線短棒或接線之整合延伸部。 The light source of claim 1 or 2, wherein the antenna is a conductive metal stub or a wire extending in a concave corner of the plasma crucible, and the connecting device is a short rod or a wiring of the antenna. Integrate the extension. 如申請專利範圍第19項之光源,其中,該空間相較於該電漿坩堝內自該法拉第柵欄一側邊或末端至另一側邊或末端之距離係小的,且該凹角係沿著該空間側邊或與該空間一致。 The light source of claim 19, wherein the space is smaller than a distance from a side or end of the Pura counter to the other side or end, and the concave angle is along The side of the space is either consistent with the space. 如申請專利範圍第1項或第2項之光源,其中,該透光電漿坩堝具有:一具有一臺階結構之孔及一自該空間延伸至該坩堝一表面之埋頭孔,及一在該埋頭孔中之透明材料塞子,其密封至該坩堝。 The light source of claim 1 or 2, wherein the light-transmissive plasma pulp has: a hole having a step structure and a counterbore extending from the space to the surface of the first surface, and a countersunk head a plug of transparent material in the hole that is sealed to the crucible. 如申請專利範圍第21項之光源,其中,該坩堝及該塞子係為玻璃材料,且該塞子係藉由局部熔化該臺階結構 處之塞子及/或該埋頭孔材料而被密封至該坩堝。 The light source of claim 21, wherein the plug and the plug are glass materials, and the plug is partially melted by the step structure The plug and/or the counterbore material are sealed to the crucible. 如申請專利範圍第21項之光源,其中,該坩堝及該塞子係為陶瓷材料,且該塞子係藉由局部熔化該臺階結構處及/或該埋頭孔之玻璃熔料而被密封至該坩堝。 The light source of claim 21, wherein the plug and the plug are ceramic materials, and the plug is sealed to the crucible by partially melting the stepped structure and/or the glass frit of the countersink. . 如申請專利範圍第21項之光源,其中,該塞子係與其外部表面處之坩堝齊平。 A light source according to claim 21, wherein the plug is flush with the outer surface thereof. 如申請專利範圍第21項之光源,其中,該密封塞子係凹陷,且一第二塞子被提供於該埋頭孔中並與其外部表面處之坩堝齊平。 The light source of claim 21, wherein the sealing plug is recessed, and a second plug is provided in the counterbore and flush with the outer surface thereof. 如申請專利範圍第1項或第2項之光源,結合一微波驅動電路而成為一燈具,該微波驅動電路包括:一微波源及一匹配電路。 For example, the light source of claim 1 or 2 is combined with a microwave driving circuit to form a lamp. The microwave driving circuit comprises: a microwave source and a matching circuit.
TW098107991A 2009-03-12 2009-03-12 Light source powered by microwave energy TWI466167B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050057158A1 (en) * 2000-07-31 2005-03-17 Yian Chang Plasma lamp with dielectric waveguide integrated with transparent bulb
WO2005117069A1 (en) * 2004-04-29 2005-12-08 Pascal Sortais Light source with electron cyclotron resonance
TW200735164A (en) * 2005-04-08 2007-09-16 Mattson Tech Inc Rapid thermal processing using energy transfer layers

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050057158A1 (en) * 2000-07-31 2005-03-17 Yian Chang Plasma lamp with dielectric waveguide integrated with transparent bulb
WO2005117069A1 (en) * 2004-04-29 2005-12-08 Pascal Sortais Light source with electron cyclotron resonance
TW200735164A (en) * 2005-04-08 2007-09-16 Mattson Tech Inc Rapid thermal processing using energy transfer layers

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