TWI460039B - - Google Patents
Info
- Publication number
- TWI460039B TWI460039B TW101111960A TW101111960A TWI460039B TW I460039 B TWI460039 B TW I460039B TW 101111960 A TW101111960 A TW 101111960A TW 101111960 A TW101111960 A TW 101111960A TW I460039 B TWI460039 B TW I460039B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101111960A TW201341094A (zh) | 2012-04-05 | 2012-04-05 | 玻璃雷射加工動態補償方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101111960A TW201341094A (zh) | 2012-04-05 | 2012-04-05 | 玻璃雷射加工動態補償方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201341094A TW201341094A (zh) | 2013-10-16 |
TWI460039B true TWI460039B (zh) | 2014-11-11 |
Family
ID=49771235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101111960A TW201341094A (zh) | 2012-04-05 | 2012-04-05 | 玻璃雷射加工動態補償方法 |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201341094A (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112212782B (zh) * | 2019-06-25 | 2023-01-17 | 合肥欣奕华智能机器股份有限公司 | 一种玻璃基板检测方法、装置及系统 |
CN114872211B (zh) * | 2022-07-08 | 2022-10-25 | 沈阳和研科技有限公司 | 一种双轴划片机的y轴的自动补偿方法及双轴划片机 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05315215A (ja) * | 1992-05-12 | 1993-11-26 | Mitsubishi Electric Corp | 半導体製造装置 |
TWI317176B (en) * | 2006-06-14 | 2009-11-11 | Oerlikon Balzers Coating Uk Ltd | Process for laser scribing |
US20100292947A1 (en) * | 2007-10-23 | 2010-11-18 | Hypertronics PTE LTD. a corporation | Scan head calibration system and method |
-
2012
- 2012-04-05 TW TW101111960A patent/TW201341094A/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05315215A (ja) * | 1992-05-12 | 1993-11-26 | Mitsubishi Electric Corp | 半導体製造装置 |
TWI317176B (en) * | 2006-06-14 | 2009-11-11 | Oerlikon Balzers Coating Uk Ltd | Process for laser scribing |
US20100292947A1 (en) * | 2007-10-23 | 2010-11-18 | Hypertronics PTE LTD. a corporation | Scan head calibration system and method |
Also Published As
Publication number | Publication date |
---|---|
TW201341094A (zh) | 2013-10-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |