TWI460039B - - Google Patents

Info

Publication number
TWI460039B
TWI460039B TW101111960A TW101111960A TWI460039B TW I460039 B TWI460039 B TW I460039B TW 101111960 A TW101111960 A TW 101111960A TW 101111960 A TW101111960 A TW 101111960A TW I460039 B TWI460039 B TW I460039B
Authority
TW
Taiwan
Application number
TW101111960A
Other versions
TW201341094A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW101111960A priority Critical patent/TW201341094A/zh
Publication of TW201341094A publication Critical patent/TW201341094A/zh
Application granted granted Critical
Publication of TWI460039B publication Critical patent/TWI460039B/zh

Links

TW101111960A 2012-04-05 2012-04-05 玻璃雷射加工動態補償方法 TW201341094A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW101111960A TW201341094A (zh) 2012-04-05 2012-04-05 玻璃雷射加工動態補償方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW101111960A TW201341094A (zh) 2012-04-05 2012-04-05 玻璃雷射加工動態補償方法

Publications (2)

Publication Number Publication Date
TW201341094A TW201341094A (zh) 2013-10-16
TWI460039B true TWI460039B (zh) 2014-11-11

Family

ID=49771235

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101111960A TW201341094A (zh) 2012-04-05 2012-04-05 玻璃雷射加工動態補償方法

Country Status (1)

Country Link
TW (1) TW201341094A (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112212782B (zh) * 2019-06-25 2023-01-17 合肥欣奕华智能机器股份有限公司 一种玻璃基板检测方法、装置及系统
CN114872211B (zh) * 2022-07-08 2022-10-25 沈阳和研科技有限公司 一种双轴划片机的y轴的自动补偿方法及双轴划片机

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05315215A (ja) * 1992-05-12 1993-11-26 Mitsubishi Electric Corp 半導体製造装置
TWI317176B (en) * 2006-06-14 2009-11-11 Oerlikon Balzers Coating Uk Ltd Process for laser scribing
US20100292947A1 (en) * 2007-10-23 2010-11-18 Hypertronics PTE LTD. a corporation Scan head calibration system and method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05315215A (ja) * 1992-05-12 1993-11-26 Mitsubishi Electric Corp 半導体製造装置
TWI317176B (en) * 2006-06-14 2009-11-11 Oerlikon Balzers Coating Uk Ltd Process for laser scribing
US20100292947A1 (en) * 2007-10-23 2010-11-18 Hypertronics PTE LTD. a corporation Scan head calibration system and method

Also Published As

Publication number Publication date
TW201341094A (zh) 2013-10-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees