TWI451863B - Retina stimulation apparatus and a manufacturing method thereof - Google Patents
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本發明是有關於一種視網膜刺激裝置及其製造方法,特別是有關於一種恢復因黃斑症所導致的失明之視網膜刺激裝置及其製造方法。 The present invention relates to a retinal stimulating device and a method of manufacturing the same, and more particularly to a retinal stimulating device for restoring blindness caused by macular degeneration and a method of manufacturing the same.
目前,常見的針對視網膜進行刺激的裝置如美國專利US 7,158,836所揭露之裝置,係將多個電極單元設置於一支撐平面上,在利用接腳(pin)直接將此支撐平面固定於鞏膜之上。而由於此習知技術由於無法完全貼合眼球的曲度,造成不均勻刺激臨界值及部份電極需要以相當大的電流對視網膜進行刺激,無法達到高解析大陣列,高效率,低功率之要求。 At present, a common device for stimulating the retina, such as the device disclosed in US Pat. No. 7,158,836, is to place a plurality of electrode units on a support plane, and directly fix the support plane to the sclera by using a pin. . However, due to the inability of the conventional technique to completely conform to the curvature of the eyeball, the threshold of uneven stimulation is caused, and some electrodes need to stimulate the retina with a relatively large current, and high resolution large array, high efficiency, low power cannot be achieved. Claim.
另外,習知的視網膜進行刺激裝置如美國專利US7,035,692,也缺乏將感光元件(CMOS)、驅動裝置及刺激電極整合的特點,造成刺激視網膜的效果不佳。 In addition, conventional retinal stimulation devices such as U.S. Patent No. 7,035,692 also lack the integration of photosensitive elements (CMOS), driving devices and stimulating electrodes, resulting in poor stimulation of the retina.
因此,提供一個能夠符合眼球曲度,並又能整合各元件的視網膜刺激裝置,就顯的相當重要了。 Therefore, it is quite important to provide a retinal stimulating device that can conform to the curvature of the eye and integrate the various components.
有鑑於上述習知技藝之問題,本發明之目的就是在提供一種視網 膜刺激裝置及其製造方法,其係可貼合眼球的曲度並整合各元件於可撓性封裝上,以解決習知視網膜刺激裝置耗能過大以致於損傷其他細胞的問題。 In view of the above-mentioned problems of the prior art, the object of the present invention is to provide a visual network The membrane stimulating device and the method of manufacturing the same can fit the curvature of the eyeball and integrate the components on the flexible package to solve the problem that the conventional retinal stimulating device consumes too much energy to damage other cells.
根據本發明之目的,提出一種視網膜刺激裝置,其包含複數個畫素單元及一可撓性封裝。可撓性封裝係用以承載畫素單元及電源模組,各畫素單元係包含一光感測器、一訊號處理及電驅動單元及一刺激電極。其中,光感測器係感應入射光並產生一感測訊號,訊號處理及電驅動單元係接收並處理感測訊號而對應產生一電刺激波形,而刺激電極係接收電刺激波形而對應產生一刺激電流,用以刺激一視網膜細胞。 In accordance with the purpose of the present invention, a retinal stimulation device is provided that includes a plurality of pixel units and a flexible package. The flexible package is used to carry a pixel unit and a power module. Each pixel unit includes a light sensor, a signal processing and electric driving unit, and a stimulation electrode. The photo sensor senses incident light and generates a sensing signal. The signal processing and electric driving unit receives and processes the sensing signal to generate an electrical stimulation waveform, and the stimulation electrode receives the electrical stimulation waveform to generate a corresponding Stimulates current to stimulate a retinal cell.
其中,視網膜刺激裝置係設置在一神經節細胞(ganglion cell)上,且光感測器與訊號處理及電驅動單元係與刺激電極設置在一中間層之不同側。 Wherein, the retinal stimulating device is disposed on a ganglion cell, and the photo sensor and the signal processing and electric driving unit and the stimulating electrode are disposed on different sides of the intermediate layer.
其中,視網膜刺激裝置係設置在一神經節細胞(ganglion cell)上,且光感測器與訊號處理及電驅動單元係與刺激電極設置在一中間層之同一側。 Wherein, the retinal stimulating device is disposed on a ganglion cell, and the photo sensor and the signal processing and electric driving unit and the stimulating electrode are disposed on the same side of the intermediate layer.
其中,視網膜刺激裝置係設置在一雙極細胞(bipolar cell)與一桿和視錐細胞(rods and cones)之間,且光感測器與訊號處理及電驅動單元係與刺激電極設置在一中間層之不同側。 Wherein, the retinal stimulating device is disposed between a bipolar cell and a rod and a cones and cones, and the photo sensor and the signal processing and electric driving unit and the stimulating electrode are disposed in a Different sides of the middle layer.
其中,視網膜刺激裝置係設置在一雙極細胞(bipolar cell)與一桿和視錐細胞(rods and cones)之間,且光感測器與訊號處理及電驅動單元係與刺激電極設置在一中間層之同一側。 Wherein, the retinal stimulating device is disposed between a bipolar cell and a rod and a cones and cones, and the photo sensor and the signal processing and electric driving unit and the stimulating electrode are disposed in a The same side of the middle layer.
其中,視網膜刺激裝置更包含一電源模組連接該畫素單元,而電 源模組係經由無線充電後提供畫素單元電力。 Wherein, the retinal stimulating device further comprises a power module connected to the pixel unit, and the electric The source module provides pixel unit power after being wirelessly charged.
其中,各畫素單元之間係設有一交換孔(perforation hole),用以在視網膜刺激裝置的上下兩側流通氣體或組織液。 Wherein, a perforation hole is arranged between each pixel unit for circulating gas or tissue fluid on the upper and lower sides of the retinal stimulating device.
其中,各訊號處理及電驅動單元係以一導線彼此電性連接,用以交換各感測訊號以進行背景光強度調整。 Each of the signal processing and the electric drive unit is electrically connected to each other by a wire for exchanging the sensing signals for background light intensity adjustment.
其中,各刺激電極係具有一防護環(guard ring)設於各刺激電極下,用以區域性刺激視網膜細胞。 Each of the stimulation electrodes has a guard ring disposed under each of the stimulation electrodes for regionally stimulating the retinal cells.
其中,各訊號處理及電驅動單元更包含一感測電路,感測電路係偵測視網膜細胞的型態,且各訊號處理及電驅動單元係根據視網膜細胞的型態控制刺激電極刺激視網膜細胞。 Each of the signal processing and electric driving units further includes a sensing circuit, and the sensing circuit detects the type of retinal cells, and each of the signal processing and electric driving units controls the stimulation electrodes to stimulate the retinal cells according to the type of retinal cells.
其中,刺激電極係為凸出的傘狀。 Among them, the stimulating electrode is a convex umbrella shape.
其中,各凸出傘狀的刺激電極之複數個凸出部係不在同一平面上。 Wherein, the plurality of protruding portions of each of the protruding umbrella-shaped stimulation electrodes are not on the same plane.
其中,視網膜刺激裝置更包含一遙控裝置,遙控裝置係以無線通訊的方式連接畫素單元,並對畫素單元進行遠距控制。 Wherein, the retinal stimulation device further comprises a remote control device, wherein the remote control device is connected to the pixel unit by wireless communication, and performs remote control on the pixel unit.
其中,遙控裝置以無線通訊的方式連接畫素單元係包含以光通訊、射頻通訊或無線電通訊的方式進行無線連接。 Wherein, the remote control device is connected to the pixel unit by wireless communication, and the wireless connection is performed by means of optical communication, radio frequency communication or radio communication.
其中,可撓性封裝係為一生物相容材料。 Wherein, the flexible package is a biocompatible material.
其中,生物相容材料係包含聚酰亞胺(polyimide)、聚二甲基矽氧烷(PDMS)或對二甲苯(parylene)。 Among them, the biocompatible material comprises polyimide, polydimethyl siloxane (PDMS) or parylene.
根據本發明之目的,另提出一種視網膜刺激裝置之製造方法,其 包含提供一基板,並於基板上整合複數個訊號處理及電驅動單元、複數個光感測器以及複數個刺激電極以形成複數個畫素單元。接著於刺激電極上設置一導電層,並於畫素單元上的其他區域設置一第一障礙層,再於第一障礙層上設置一第一生物相容材料層,並設置一第一握持基板於第一障礙層上。之後去除基板,並露出訊號處理及電驅動單元及光感測器,再設置一第二障礙層於露出的訊號處理及電驅動單元及光感測器上。接著於各畫素單元間設置複數個交換孔後,設置一第二生物相容材料層於第二障礙層上,且第一生物相容材料層與第二生物相容材料層係包覆各畫素單元。之後便設置一第二握持基板於第二生物相容材料層上,並去除部分的第一生物相容材料層以露出刺激電極上的導電層,最後則去除第二握持基板。 According to the purpose of the present invention, a method of manufacturing a retinal stimulating device is further proposed. The invention comprises providing a substrate, and integrating a plurality of signal processing and electric driving units, a plurality of photo sensors and a plurality of stimulation electrodes on the substrate to form a plurality of pixel units. Then, a conductive layer is disposed on the stimulating electrode, and a first barrier layer is disposed on other regions on the pixel unit, and a first biocompatible material layer is disposed on the first barrier layer, and a first holding is disposed. The substrate is on the first barrier layer. Then, the substrate is removed, and the signal processing and electric driving unit and the photo sensor are exposed, and a second obstacle layer is disposed on the exposed signal processing and electric driving unit and the photo sensor. After a plurality of exchange holes are disposed between the pixel units, a second biocompatible material layer is disposed on the second barrier layer, and the first biocompatible material layer and the second biocompatible material layer are each coated Pixel unit. A second holding substrate is then disposed on the second layer of biocompatible material, and a portion of the first layer of biocompatible material is removed to expose the conductive layer on the stimulating electrode, and finally the second holding substrate is removed.
其中,本方法更包含於各訊號處理及電驅動單元間設置一導線以彼此電性連接,用以交換各感測訊號以進行背景光強度調整。 The method further includes a wire disposed between each of the signal processing and the electric driving unit to be electrically connected to each other for exchanging the sensing signals for background light intensity adjustment.
其中,本方法更包含設置一電源模組連接畫素單元,用以充電後提供畫素單元電力。 The method further includes setting a power module to connect the pixel unit to provide power of the pixel unit after charging.
其中,光感測器係感應入射光並產生一感測訊號,訊號處理及電驅動單元係接收並處理感測訊號而對應產生一電刺激波形,而刺激電極係接收電刺激波形而對應產生一刺激電流,用以刺激一視網膜細胞。 The photo sensor senses incident light and generates a sensing signal. The signal processing and electric driving unit receives and processes the sensing signal to generate an electrical stimulation waveform, and the stimulation electrode receives the electrical stimulation waveform to generate a corresponding Stimulates current to stimulate a retinal cell.
其中,本方法更包含於各刺激電極下設置一防護環(guard ring),用以區域性刺激各視網膜細胞。 Wherein, the method further comprises providing a guard ring under each stimulation electrode for regionally stimulating each retinal cell.
其中,本方法更包含於各訊號處理及電驅動單元中設置一感測電 路,用以偵測視網膜細胞的型態,且各訊號處理及電驅動單元係根據視網膜細胞的型態控制刺激電極刺激視網膜細胞。 The method further includes setting a sensing power in each signal processing and electric driving unit. The path is used to detect the type of retinal cells, and each signal processing and electric drive unit controls the stimulation electrode to stimulate the retinal cells according to the type of retinal cells.
其中,刺激電極係為凸出的傘狀。 Among them, the stimulating electrode is a convex umbrella shape.
其中,各凸出傘狀的刺激電極之複數個凸出部係不在同一平面上。 Wherein, the plurality of protruding portions of each of the protruding umbrella-shaped stimulation electrodes are not on the same plane.
其中,本方法更包含設置一遙控裝置以無線通訊的方式連接畫素單元,並對畫素單元進行遠距控制。 The method further includes setting a remote control device to connect the pixel unit in a wireless communication manner, and performing remote control on the pixel unit.
其中,遙控裝置以無線通訊的方式連接該畫素單元係包含以光通訊、射頻通訊或無線電通訊的方式進行無線連接。 Wherein, the remote control device connects to the pixel unit by wireless communication, and comprises wirelessly connecting by optical communication, radio frequency communication or radio communication.
其中,第一生物相容材料層及第二生物相容材料層係為一可撓性材料。 Wherein, the first biocompatible material layer and the second biocompatible material layer are a flexible material.
其中,可撓性材料係包含聚酰亞胺(polyimide)、聚二甲基矽氧烷(PDMS)或對二甲苯(parylene)。 Among them, the flexible material includes polyimide, polydimethyl siloxane (PDMS) or parylene.
其中,第一障礙層及第二障礙層係為碳化矽(SiC)或類鑽碳薄膜(DLC Film)。 The first barrier layer and the second barrier layer are tantalum carbide (SiC) or a diamond-like carbon film (DLC Film).
承上所述,依本發明之視網膜刺激裝置及其製造方法,其可具有一或多個下述優點: As described above, the retinal stimulating device and the method of manufacturing the same according to the present invention may have one or more of the following advantages:
(1)此視網膜刺激裝置及其製造方法可藉由在可撓式基板上浮貼眼球,藉此可降低刺激視網膜的電流,避免細胞之毀損。 (1) The retinal stimulating device and the method of manufacturing the same can float the eyeball on the flexible substrate, thereby reducing the current that stimulates the retina and avoiding damage of the cells.
(2)此視網膜刺激裝置及其製造方法可藉由整合光感測器、驅動裝置與刺激電極於一個畫素單元,藉此可解決感測及刺激效果不 佳的問題。 (2) The retinal stimulating device and the manufacturing method thereof can solve the sensing and stimulating effect by integrating the photo sensor, the driving device and the stimulating electrode in one pixel unit. Good question.
1‧‧‧中間層 1‧‧‧Intermediate
10‧‧‧基板 10‧‧‧Substrate
11‧‧‧第一握持基板 11‧‧‧First holding substrate
12‧‧‧第二握持基板 12‧‧‧Second holding substrate
2‧‧‧畫素陣列 2‧‧‧ pixel array
20~24‧‧‧畫素單元 20~24‧‧‧ pixel unit
200‧‧‧光感測器 200‧‧‧Light sensor
201‧‧‧訊號處理及電驅動單元 201‧‧‧Signal processing and electric drive unit
2010‧‧‧感測電路 2010‧‧‧Sensor circuit
202‧‧‧刺激電極 202‧‧‧Stimulus electrode
2020‧‧‧防護環 2020‧‧ ‧ protective ring
2021‧‧‧凸起部 2021‧‧‧ raised parts
203‧‧‧導電層 203‧‧‧ Conductive layer
204‧‧‧組織膠 204‧‧‧ tissue glue
205‧‧‧交換孔 205‧‧‧Exchange hole
206‧‧‧導線 206‧‧‧Wire
30‧‧‧第一生物相容材料層 30‧‧‧First biocompatible material layer
31‧‧‧第二生物相容材料層 31‧‧‧Second biocompatible material layer
32‧‧‧第一障礙層 32‧‧‧First barrier
33‧‧‧第二障礙層 33‧‧‧ second barrier
5‧‧‧視網膜刺激裝置 5‧‧‧Retina stimulation device
50‧‧‧電源模組 50‧‧‧Power Module
51‧‧‧可撓性封裝 51‧‧‧Flexible package
52‧‧‧遙控裝置 52‧‧‧Remote control
6‧‧‧神經節細胞 6‧‧‧ ganglion cells
7‧‧‧雙極細胞 7‧‧‧Bipolar cells
8‧‧‧神經網路 8‧‧‧Neural network
9‧‧‧桿和視錐細胞 9‧‧‧ rods and cones
13‧‧‧大腦皮質層 13‧‧‧ cerebral cortex
S10~S19‧‧‧步驟 S10~S19‧‧‧Steps
第1圖 係為本發明之視網膜刺激裝置之製造方法之流程圖;第2A~2E圖 係為本發明之視網膜刺激裝置之製造方法之實施示意圖;第3A圖 係為本發明之視網膜刺激裝置之示意圖;第3B圖 係為本發明之畫素單元之實施例示意圖;第4A圖 係為本發明之視網膜刺激裝置之防護環之示意圖;第4B圖 係為本發明之視網膜刺激裝置之防護環之截面示意圖;第5A圖 係為本發明之上視網膜之視網膜刺激裝置之第一實施例之示意圖;第5B圖 係為本發明之上視網膜之視網膜刺激裝置之第二實施例之示意圖;第5C圖 係為本發明之下視網膜之視網膜刺激裝置之第一實施例之示意圖;第5D圖 係為本發明之下視網膜之視網膜刺激裝置之第二實施例之示意圖;第6圖 係為本發明之視網膜刺激裝置以多片組裝之示意圖;以及第7圖 係為本發明之視網膜刺激裝置之刺激電流對視網膜刺激裝置與視網膜之距離的關係圖; 第8A圖 係為本發明之上視網膜之視網膜刺激裝置之第三實施例之第一示意圖;第8B圖 係為本發明之上視網膜之視網膜刺激裝置之第三實施例之第二示意圖;第9A圖 係為本發明之訊號處理及電驅動單元進行背景光線亮度調整之示意圖;第9B圖 係為本發明之訊號處理及電驅動單元進行背景光線亮度調整之電路圖;第9C圖 係為本發明之訊號處理及電驅動單元進行背景減噪之實施例示意圖;第10A圖 係為本發明之上視網膜之視網膜刺激裝置之第四實施例之示意圖;以及第10B圖 係為本發明之上視網膜之視網膜刺激裝置之第五實施例之示意圖。 1 is a flow chart showing a method of manufacturing a retinal stimulating device of the present invention; 2A to 2E are schematic views showing a method of manufacturing a retinal stimulating device of the present invention; and FIG. 3A is a retinal stimulating device of the present invention; 3B is a schematic view of an embodiment of a pixel unit of the present invention; FIG. 4A is a schematic view of a protective ring of the retinal stimulating device of the present invention; and FIG. 4B is a protective ring of the retinal stimulating device of the present invention; 5A is a schematic view of a first embodiment of a retinal stimulating device for retina of the present invention; FIG. 5B is a schematic view of a second embodiment of a retinal stimulating device for retina of the present invention; Is a schematic diagram of a first embodiment of a retinal stimulating device for retina under the present invention; FIG. 5D is a schematic view of a second embodiment of a retinal stimulating device for retina under the present invention; and FIG. 6 is a retina of the present invention Schematic diagram of the stimulation device in multiple pieces; and Figure 7 is a stimulation current to retinal stimulation device of the retinal stimulation device of the present invention FIG distance relationship of the retina; 8A is a first schematic view of a third embodiment of a retinal stimulating device for retina of the present invention; FIG. 8B is a second schematic view of a third embodiment of a retinal stimulating device for retina according to the present invention; The figure is a schematic diagram of the background signal brightness adjustment of the signal processing and electric driving unit of the present invention; FIG. 9B is a circuit diagram of the signal processing and the background light brightness adjustment of the signal processing and electric driving unit of the present invention; FIG. 9C is the invention FIG. 10A is a schematic diagram of a fourth embodiment of a retinal stimulating device of the retina according to the present invention; and FIG. 10B is a retina of the retina of the present invention. A schematic diagram of a fifth embodiment of a stimulation device.
請參閱第1圖,其係為本發明之視網膜刺激裝置之製造方法之流程圖。如第1圖所示,本發明之視網膜刺激裝置之製造方法包含下列步驟:(S10)提供一基板,並於基板上整合複數個訊號處理及電驅動單元、複數個光感測器以及複數個刺激電極以形成複數個畫素單元;(S11)於刺激電極上設置一導電層,並於畫素單元上的其他區 域設置一第一障礙層,再於第一障礙層上設置一第一生物相容材料層;(S12)設置一第一握持基板於第一障礙層上;(S13)去除基板,並露出訊號處理及電驅動單元及光感測器;(S14)設置一第二障礙層於露出的訊號處理及電驅動單元及光感測器上;(S15)於各畫素單元間設置複數個交換孔;(S16)設置一第二生物相容材料層於第二障礙層上,且第一生物相容材料層與第二生物相容材料層係包覆各畫素單元;(S17)設置一第二握持基板於第二生物相容材料層上;(S18)去除部分的第一生物相容材料層以露出刺激電極上的導電層;以及(S19)去除第二握持基板。 Please refer to FIG. 1 , which is a flow chart of a method for manufacturing a retinal stimulator according to the present invention. As shown in FIG. 1, the manufacturing method of the retinal stimulating device of the present invention comprises the following steps: (S10) providing a substrate, and integrating a plurality of signal processing and electric driving units, a plurality of photo sensors, and a plurality of substrates on the substrate. Stimulating the electrodes to form a plurality of pixel units; (S11) providing a conductive layer on the stimulation electrodes and other regions on the pixel unit a first barrier layer is disposed on the first barrier layer, and a first biocompatible material layer is disposed on the first barrier layer; (S12) a first holding substrate is disposed on the first barrier layer; (S13) the substrate is removed and exposed a signal processing and electric driving unit and a photo sensor; (S14) providing a second obstacle layer on the exposed signal processing and electric driving unit and the photo sensor; (S15) setting a plurality of exchanges between the pixel units (S16) providing a second layer of biocompatible material on the second barrier layer, and the first layer of biocompatible material and the second layer of biocompatible material coating each pixel unit; (S17) setting one The second holding substrate is on the second layer of biocompatible material; (S18) removing a portion of the first layer of biocompatible material to expose the conductive layer on the stimulation electrode; and (S19) removing the second holding substrate.
請同時參閱第2A~2E圖,其係為本發明之視網膜刺激裝置之製造方法之實施示意圖。如圖所示,在步驟(S10)中,係於基板10上整合複數個訊號處理及電驅動單元201、複數個光感測器200以及複數個刺激電極202以形成複數個畫素單元20。本步驟係可在矽晶圓(基板10)上,以標準的或是些微修改的半導體CMOS製程製作,或以CMOS影像感測器(CIS)的製程進行。在一些較佳的實施例中,光感測器係可為但不限於PN Junction或是適度的進行掺雜製程。其中,該些刺激電極202上係可但不限於進一步覆蓋一鈦鎳合金,且該些刺激電極202最後是暴露在外的。 Please also refer to FIGS. 2A-2E, which are schematic diagrams showing the implementation of the method for manufacturing the retinal stimulating device of the present invention. As shown in the figure, in step (S10), a plurality of signal processing and electric driving units 201, a plurality of photo sensors 200, and a plurality of stimulation electrodes 202 are integrated on the substrate 10 to form a plurality of pixel units 20. This step can be performed on a germanium wafer (substrate 10) in a standard or slightly modified semiconductor CMOS process, or in a CMOS image sensor (CIS) process. In some preferred embodiments, the photosensor can be, but is not limited to, a PN Junction or a moderate doping process. The stimulating electrodes 202 can be, but are not limited to, further covered with a titanium-nickel alloy, and the stimulating electrodes 202 are finally exposed.
在步驟(S11)中,於刺激電極202上所設置的導電層203係可為但不限於氧化銥(IrOx)、白金(Pt)、氮化鈦(TiN)或氧化鐵(FeOx)等,用以提供較佳的刺激電極202與第一生物相容材料層30之間的介面關係。其中,第一生物相容材料層30及第二生物相容材料層31係可為但不限於聚酰亞胺(polyimide)、聚二甲基矽氧烷(PDMS)或是對二甲苯(parylene)等。另外,畫素單元20上的其他區域所設置的第一障礙層32以及第二障礙層33係可為但不限於碳化矽(SiC)或類鑽碳薄膜(DLC Film)等,而刺激電極202的上方則可以半導體微影蝕刻製程開洞後進行覆蓋導電層203。 In the step (S11), the conductive layer 203 disposed on the stimulation electrode 202 may be, but not limited to, iridium oxide (IrOx), platinum (Pt), titanium nitride (TiN), or iron oxide (FeOx). To provide a preferred interface between the stimulating electrode 202 and the first layer of biocompatible material 30. The first biocompatible material layer 30 and the second biocompatible material layer 31 may be, but not limited to, polyimide, polydimethyl siloxane (PDMS) or para-xylene (parylene). )Wait. In addition, the first barrier layer 32 and the second barrier layer 33 disposed in other regions on the pixel unit 20 may be, but not limited to, tantalum carbide (SiC) or a diamond-like carbon film (DLC Film), etc., and the stimulation electrode 202 The upper portion of the semiconductor lithography process can be opened to cover the conductive layer 203.
於步驟(S12)中所設置的第一握持基板11係用於在步驟(S13)時,供手持或機台夾持以進行基板10的減薄及去除,該些減薄及去除的製程係可結合研磨製程及蝕刻製程,但不限於此。其中,基板10也可以不進行去除,而僅僅是減薄到光感測器200可以感受到光的程度的厚度即可,這大約是幾十個微米,而在這個厚度下,整個基板10便是可撓曲的狀態。 The first holding substrate 11 disposed in the step (S12) is used for clamping or removing the substrate 10 for performing thinning and removal of the substrate 10 during the step (S13), and the processes of thinning and removing are performed. The polishing process and the etching process may be combined, but are not limited thereto. The substrate 10 may not be removed, but may be thinned to a thickness that the light sensor 200 can sense the light, which is about several tens of micrometers, and at this thickness, the entire substrate 10 is It is a flexible state.
在設置第二障礙層33於露出的訊號處理及電驅動單元201及光感測器202上之後,隨即在各畫素單元20間設置複數個交換孔205,該些交換孔205係用以使人體中的組織液能夠流通視網膜刺激裝置的兩側,其製作方法係可以微影蝕刻等製程進行開孔。在第二生物相容材料層31覆蓋上去之後,也同樣進行開通交換孔205的製程,如此一來,整個畫素單元20便會被包覆在第一及第二生物相容材料層之中,僅留下交換孔205暴露在外以交換組織液。 After the second barrier layer 33 is disposed on the exposed signal processing and the electric driving unit 201 and the photo sensor 202, a plurality of switching holes 205 are disposed between the pixel units 20, and the switching holes 205 are used to make The tissue fluid in the human body can circulate both sides of the retinal stimulating device, and the manufacturing method can be performed by a process such as micro-etching. After the second biocompatible material layer 31 is covered, the process of opening the exchange hole 205 is also performed, so that the entire pixel unit 20 is coated in the first and second biocompatible material layers. Only the exchange holes 205 are left exposed to exchange the tissue fluid.
另外,在步驟(S17)中,於第二生物相容材料層31上所設置的 第二握持基板12係用於在步驟(S18)中當去除部分的第一生物相容材料層30時,供手持貨機台夾持整個視網膜刺激裝置使用,以露出刺激電極202上的導電層203,如此才能對視網膜細胞進行刺激。由於最後的第一生物相容材料層30及第二生物相容材料層31的總和厚度極低,故整體的視網膜刺激裝置的厚度也相當的低(約30μm),故可以穿透光線。 Further, in the step (S17), the second biocompatible material layer 31 is provided. The second holding substrate 12 is for use in the step (S18) when the portion of the first biocompatible material layer 30 is removed, for the handheld cargo machine table to hold the entire retinal stimulating device to expose the conductive layer on the stimulating electrode 202. 203, in order to stimulate the retinal cells. Since the total thickness of the last first biocompatible material layer 30 and the second biocompatible material layer 31 is extremely low, the thickness of the overall retinal stimulating device is also relatively low (about 30 μm), so that light can be transmitted.
請參閱第3A圖,其係為本發明之視網膜刺激裝置之示意圖。如圖所示,本發明之視網膜刺激裝置5包含一畫素陣列2、一電源模組50及一可撓性封裝51。可撓性封裝51,其厚度較佳但不限於30μm,係用以承載及覆蓋畫素陣列2及電源模組50,電源模組50則經由無線充電後提供畫素陣列2電力。畫素陣列2係包含複數個畫素單元20,其厚度較佳但不限於10μm,而各畫素單元20包含一光感測器200、一訊號處理及電驅動單元201及一刺激電極202。其中,光感測器200係感應入射光並產生一感測訊號,訊號處理及電驅動單元201係接收並處理感測訊號而對應產生一電刺激波形,而刺激電極202係接收電刺激波形而對應產生一刺激電流,用以刺激一視網膜細胞。 Please refer to FIG. 3A, which is a schematic diagram of the retinal stimulating device of the present invention. As shown, the retinal stimulating device 5 of the present invention comprises a pixel array 2, a power module 50 and a flexible package 51. The flexible package 51 has a thickness of 30 μm, which is used to carry and cover the pixel array 2 and the power module 50. The power module 50 provides power to the pixel array 2 after being wirelessly charged. The pixel array 2 includes a plurality of pixel units 20 having a thickness of preferably 10 μm, and each of the pixel units 20 includes a photo sensor 200, a signal processing and electric driving unit 201, and a stimulation electrode 202. The photo sensor 200 senses incident light and generates a sensing signal. The signal processing and electric driving unit 201 receives and processes the sensing signal to generate an electrical stimulation waveform, and the stimulation electrode 202 receives the electrical stimulation waveform. Corresponding to generate a stimulation current to stimulate a retinal cell.
其中,如第3B圖所示,訊號處理及電驅動單元201中更可包含一感測電路2010,感測電路2010較佳可連結至該刺激電極202或可單獨偵測視網膜細胞的型態,且各訊號處理及電驅動單元201係根據視網膜細胞的型態控制刺激電極202刺激視網膜細胞。在較佳的實施例中,感測電路2010係於一校正模式中感測視網膜細胞的反應時間,以決定該視網膜細胞是為開細胞(ON Cell)或是關細胞(OFF Cell)的型態。而訊號處理及電驅動單元201更根 據前述的視網膜細胞的反應時間,來決定其所對應的特定之刺激電極202對該視網膜細胞的刺激模式。 As shown in FIG. 3B, the signal processing and electric driving unit 201 further includes a sensing circuit 2010. The sensing circuit 2010 is preferably connected to the stimulation electrode 202 or can detect the type of retinal cells separately. And each signal processing and electric drive unit 201 controls the stimulation electrode 202 to stimulate the retinal cells according to the type of retinal cells. In a preferred embodiment, the sensing circuit 2010 senses the reaction time of the retinal cells in a calibration mode to determine whether the retinal cells are an ON cell or an OFF cell. . The signal processing and electric drive unit 201 is rooted According to the reaction time of the retinal cells mentioned above, the stimulation mode of the specific stimulation electrode 202 corresponding to the retinal cells is determined.
另外,如第4A圖及第4B圖所示,各刺激電極下方周圍更可設置有一防護環(guard ring)2020,防護環2020係為一個區域參考電極,用以提供做為電流回流路徑(在電流驅動模式下),或做為電場返回路徑(在電壓驅動模式下)。該些防護環2020係用以提供刺激電流或電場之通路,使得該些刺激電流不會刺激到離刺激電極較遠的細胞,進而達到區域性地刺激眼睛細胞,保護其餘細胞的目的。 In addition, as shown in FIG. 4A and FIG. 4B, a guard ring 2020 may be disposed around the lower side of each of the stimulation electrodes, and the guard ring 2020 is a regional reference electrode for providing a current return path. In current drive mode), or as an electric field return path (in voltage drive mode). The guard rings 2020 are used to provide a path for stimulating current or electric field, so that the stimulation currents do not stimulate cells farther from the stimulation electrodes, thereby achieving regional stimulation of the eye cells and protecting the remaining cells.
請參閱第5A圖及第5B圖,其係為本發明之上視網膜之視網膜刺激裝置之第一實施例及第二實施例之示意圖。如圖所示,本實施例係為本發明之視網膜刺激裝置5之其中一種態樣,稱為上視網膜(epi-retina)之視網膜刺激裝置,其係以刺激電極202連接視網膜之神經節細胞6(ganglion cell),且光感測器200及訊號處理及電驅動單元201與刺激電極202係位於中間層1之相對面或同一面上,此中間層1較佳可為一氧化層如氧化矽(SiO2)等。在第一實施例中,中間層1之一面上依序設有刺激電極202、導電層203(較佳為鋁)以及選擇性地可以設有組織膠204,而另一面則設有光感測器200及訊號處理及電驅動單元201;而在第二實施例中,中間層1上則設有光感測器200、訊號處理及電驅動單元201及刺激電極202,刺激電極202上更選擇性的可設有組織膠204,中間層1旁則設置有導電層203(較佳為鋁)以及交換孔205。如此配置的好處在於,可以從視網膜刺激裝置5的背側面以較大的面積(全面積)接收光線。光感測器200可以設置在刺激電極 202之下,但是不能覆蓋過訊號處理及電驅動單元201。 Please refer to FIG. 5A and FIG. 5B, which are schematic diagrams showing a first embodiment and a second embodiment of a retinal stimulating device for retina of the present invention. As shown in the figure, the present embodiment is one of the aspects of the retinal stimulating device 5 of the present invention, which is called an epi-retina retinal stimulating device, which is connected to the ganglion cells of the retina by the stimulating electrode 202. (ganglion cell), and the photo sensor 200 and the signal processing and electric driving unit 201 and the stimulating electrode 202 are located on the opposite side or the same side of the intermediate layer 1, and the intermediate layer 1 is preferably an oxide layer such as yttrium oxide. (SiO2) and the like. In the first embodiment, the stimulating electrode 202, the conductive layer 203 (preferably aluminum) and optionally the tissue adhesive 204 may be provided on one side of the intermediate layer 1 and the light sensing on the other side. The sensor 200 and the signal processing and electric driving unit 201; in the second embodiment, the intermediate layer 1 is provided with a photo sensor 200, a signal processing and electric driving unit 201 and a stimulation electrode 202, and the stimulation electrode 202 is further selected. The tissue adhesive 204 may be provided, and the conductive layer 203 (preferably aluminum) and the exchange hole 205 are disposed beside the intermediate layer 1. The advantage of such a configuration is that light can be received from a large area (full area) from the back side of the retinal stimulating device 5. The photo sensor 200 can be disposed on the stimulation electrode Below 202, but cannot overwrite the signal processing and electric drive unit 201.
另請參閱第5C圖及第5D圖,其係為本發明之下視網膜之視網膜刺激裝置之第一實施例及第二實施例之示意圖。如圖所示,本實施例係為本發明之視網膜刺激裝置5之另外一種態樣,稱為下視網膜(sub-retina)之視網膜刺激裝置,其係以刺激電極202連接視網膜之雙極細胞7(bipolar cell)。本下視網膜之視網膜刺激裝置之態樣與上視網膜之態樣的不同處係在於下視網膜之態樣的視網膜刺激裝置係設置在雙極細胞(bipolar cell)7與桿和視錐細胞(rods and concs)9之間,其光感測器200及訊號處理及電驅動單元201與刺激電極202係可位於中間層1之同側面或不同面上,與上視網膜(epi-retina)之視網膜刺激裝置相同。另外,防護環係以不阻擋光線入射光感測器200的方式設置,此交換孔205係用以提供一個通道供人體的體液或氣體如氧氣等,在晶片或視網膜刺激裝置的兩側之間流通,增加人體對本裝置之適應性。 Please refer to FIG. 5C and FIG. 5D, which are schematic diagrams showing a first embodiment and a second embodiment of a retinal stimulating device for the retina according to the present invention. As shown in the figure, this embodiment is another aspect of the retinal stimulating device 5 of the present invention, and is called a sub-retina retinal stimulating device which is connected to the bipolar cells of the retina by the stimulating electrode 202. (bipolar cell). The retinal stimulating device of the present retina is different from the state of the upper retina in that the retinal stimulating device of the lower retina is placed in a bipolar cell 7 with rods and cones (rods and Between the concs) 9, the photo sensor 200 and the signal processing and electric driving unit 201 and the stimulating electrode 202 may be located on the same side or different faces of the intermediate layer 1, and the epi-retina retinal stimulating device the same. In addition, the guard ring is disposed in such a manner as not to block light from entering the photo sensor 200. The exchange hole 205 is used to provide a channel for human body fluid or gas such as oxygen, etc., between the sides of the wafer or retinal stimulation device. Circulation, increasing the body's adaptability to the device.
請參考第6圖,其係為本發明之視網膜刺激裝置以多片組裝之示意圖。如圖所示,當眼球的曲率太大超過可撓性封裝的彎曲度時,則可以適當劃分多個畫素單元成為一六角型的視網膜刺激裝置,並將多個六角型的視網膜刺激裝置組合,以符合眼球的曲度。以多個六角型的視網膜刺激裝置組合的另一個好處更在於,六角型的視網膜刺激裝置接合的邊界即產生體液的交換通道,即交換孔205,有利於體液或氣體如氧氣等的流動與交換。 Please refer to Fig. 6, which is a schematic diagram of the multi-piece assembly of the retinal stimulating device of the present invention. As shown in the figure, when the curvature of the eyeball is too large to exceed the curvature of the flexible package, a plurality of pixel units can be appropriately divided into a hexagonal retinal stimulating device, and a plurality of hexagonal retinal stimulating devices are provided. Combine to match the curvature of the eye. Another advantage of combining multiple hexagonal retinal stimulating devices is that the boundary of the hexagonal retinal stimulating device is the exchange channel of the body fluid, that is, the exchange hole 205, which facilitates the flow and exchange of body fluids or gases such as oxygen. .
再請參考第7圖,其係為本發明之視網膜刺激裝置之刺激電流對視網膜刺激裝置與視網膜之距離的關係圖。如圖所示,橫軸係為 視網膜刺激裝置與視網膜之距離,而縱軸則為視網膜刺激裝置之刺激電流。由於本發明採用可撓式基板,故其可以服貼於眼球表面,進而有效減少視網膜刺激裝置與視網膜之間的距離。因此,本發明之視網膜刺激裝置即可以有效的降低刺激電流,進而保護各細胞。 Referring again to Fig. 7, it is a graph showing the relationship between the stimulation current of the retinal stimulation device of the present invention and the distance between the retinal stimulation device and the retina. As shown in the figure, the horizontal axis is The distance between the retinal stimulator and the retina, and the vertical axis is the stimulating current of the retinal stimulator. Since the present invention employs a flexible substrate, it can be applied to the surface of the eyeball, thereby effectively reducing the distance between the retinal stimulating device and the retina. Therefore, the retinal stimulating device of the present invention can effectively reduce the stimulating current and thereby protect each cell.
請參考第8A圖,其係為本發明之上視網膜之視網膜刺激裝置之第三實施例之第一示意圖。如圖所示,本發明之上視網膜之視網膜刺激裝置5包含可撓性封裝51、畫素單元20、中間層1、第一生物相容材料層30、障礙層32以及刺激電極202。如圖所示,本實施例之特點在於,畫素單元20的同平面中並不包含刺激電極202,而刺激電極202係呈現豎立的傘狀用以刺激各個神經節細胞6,該些傘狀的刺激電極202包含一凸起部2021。因此,在刺激電極202下所拉的訊號導線便不會直接與神經節細胞6接觸而產生耦合或誤刺激的情況。再請參考第8B圖,其係為本發明之上視網膜之視網膜刺激裝置之第三實施例之第二示意圖。如圖所示,本實施例與第8A圖所揭露的實施例的差異在於,各個刺激電極202的凸起部2021可在不同的平面上。本實施例因此可更精準的刺激局部甚至單個神經節細胞6,達到精確還原所感測到的光訊號而產生正確畫面的效果。 Please refer to FIG. 8A, which is a first schematic view of a third embodiment of a retinal stimulating device for retina of the present invention. As shown, the retinal stimulating device 5 of the retina of the present invention comprises a flexible package 51, a pixel unit 20, an intermediate layer 1, a first layer of biocompatible material 30, a barrier layer 32, and a stimulating electrode 202. As shown in the figure, the present embodiment is characterized in that the symmetry unit 202 does not include the stimulating electrode 202, and the stimulating electrode 202 presents an erected umbrella shape for stimulating the ganglion cells 6, which are umbrella-like. The stimulation electrode 202 includes a raised portion 2021. Therefore, the signal wire pulled under the stimulating electrode 202 does not directly contact the ganglion cell 6 to cause coupling or erroneous stimulation. Referring again to FIG. 8B, which is a second schematic diagram of a third embodiment of the retinal stimulating device of the retina of the present invention. As shown, the difference between this embodiment and the embodiment disclosed in FIG. 8A is that the raised portions 2021 of the respective stimulation electrodes 202 can be on different planes. This embodiment can therefore more accurately stimulate local or even single ganglion cells 6, achieving the effect of accurately reducing the sensed optical signals to produce a correct picture.
請參考第9A及9B圖,其係為本發明之訊號處理及電驅動單元進行背景光線亮度調整之示意及電路圖。如第9A圖所示,本圖係示意畫素陣列中的一部份,包含了多個畫素單元20、21、22、23、24。在本實施例中,各個畫素單元彼此之間是可以進行資料交換的,其資料交換的方式係以導線206連接不同的畫素單元進行連接 ,如第9C圖所示。以中央的畫素單元20為例,畫素單元20可以接受其他畫素單元21、22、23、24的感光資料,並進行如第9B圖的處理而輸出電流來刺激視網膜細胞,而達到背景光線亮度調整的效果,其係以畫素單元21~24的平均值與畫素單元20進行差分,但實際實施上並不限於此。藉由將訊號進行流通以進行背景亮度的調整,可有效提升影像的解析度以及辨識率。值得注意的是,這些畫素單元的安排並不限於方形的,也可以是六角形或是其他緊密相鄰的畫素單元的圖樣。 Please refer to FIGS. 9A and 9B, which are schematic and circuit diagrams for adjusting the background light brightness of the signal processing and electric drive unit of the present invention. As shown in Fig. 9A, this figure is a schematic representation of a portion of a pixel array comprising a plurality of pixel units 20, 21, 22, 23, 24. In this embodiment, each pixel unit can exchange data with each other, and the data exchange manner is connected by connecting wires 206 to different pixel units. As shown in Figure 9C. Taking the central pixel unit 20 as an example, the pixel unit 20 can receive the photographic materials of the other pixel units 21, 22, 23, and 24, and perform the processing as shown in FIG. 9B to output current to stimulate the retinal cells to reach the background. The effect of the brightness adjustment of the light is differentiated from the pixel unit 20 by the average value of the pixel units 21 to 24, but the actual implementation is not limited thereto. By adjusting the background brightness by circulating the signal, the resolution and recognition rate of the image can be effectively improved. It is worth noting that the arrangement of these pixel units is not limited to a square shape, but may be a hexagon or a pattern of other closely adjacent pixel units.
請參考第10A圖,其係為本發明之上視網膜之視網膜刺激裝置之第四實施例之示意圖。如圖所示,本發明之上視網膜之視網膜刺激裝置5包含了畫素單元20及刺激電極202。其中刺激電極202係面對神經節細胞6(ganglion cell)用以刺激該細胞。在神經節細胞6下尚有神經網路8(neural networks)以及桿和視錐細胞9(rods and cones)等。其中神經網路8包含了各種細胞如雙極細胞等。在正常的人眼結構中,光入射後即一路通過上述的神經節細胞6、神經網路8以及桿和視錐細胞9並獲得感應後回傳至神經節細胞6;然而,某些視網膜退化的病患其神經網路8可能已產生衰退,桿和視錐細胞9可能已經壞死,因此本發明之上視網膜之視網膜刺激裝置5便是在接收到入射光之後隨即產生刺激訊號刺激神經節細胞6來產生視覺,而又因為本發明採用非常輕薄的軟性基板,故可以完整的服貼在神經節細胞6上,有效的降低產生刺激訊號所需要的功率,而又因為非常輕薄的關係,光線是可以穿透視網膜刺激裝置5的,也因此可以設置在神經節細胞6上,而不用侷限僅只能設置在桿和視錐細胞9下方。另外,如第10B圖 所示,本發明另外可包含一個遙控裝置52用以接收由人體的大腦皮質層13所發出的回饋控制訊號,並根據此些回饋遙控或調整各個畫素單元20,以精確地微調各個刺激電極202刺激視網膜的功率(即亮度的調整),達到更正確的顯示效果。另外,遙控裝置52係可以但不限於光通訊、射頻通訊或無線電通訊的方式與畫素單元20及人體的大腦皮質層13進行無線連接。 Please refer to FIG. 10A, which is a schematic view of a fourth embodiment of a retinal stimulating device for retina of the present invention. As shown, the retinal stimulating device 5 of the retina of the present invention comprises a pixel unit 20 and a stimulating electrode 202. The stimulating electrode 202 faces the ganglion cell to stimulate the cell. There are neural networks 8 as well as rods and cones and the like under ganglion cells 6. The neural network 8 contains various cells such as bipolar cells. In the normal human eye structure, after the light is incident, all the way through the above-mentioned ganglion cells 6, neural network 8 and rods and cones 9 are induced and then transmitted back to the ganglion cells 6; however, some retinal degeneration The patient's neural network 8 may have degenerated, and the rod and cone 9 may have been necrotic. Therefore, the retinal stimulating device 5 on the retina of the present invention generates a stimulation signal to stimulate the ganglion cells immediately after receiving the incident light. 6 to produce vision, and because the invention uses a very thin and soft substrate, it can be completely applied to the ganglion cells 6, effectively reducing the power required to generate the stimulation signal, and because of the very light and thin relationship, the light It is possible to penetrate the retinal stimulating device 5, and thus can be placed on the ganglion cells 6, without limitation, but only under the rods and cones 9. In addition, as shown in Figure 10B As shown, the present invention may further comprise a remote control device 52 for receiving feedback control signals from the cerebral cortex 13 of the human body, and remotely adjusting or adjusting the respective pixel units 20 according to the feedback to accurately fine tune the respective stimulation electrodes. 202 stimulates the power of the retina (ie, the adjustment of brightness) to achieve a more accurate display. In addition, the remote control device 52 can be wirelessly connected to the pixel unit 20 and the cerebral cortex layer 13 of the human body in a manner that can be, but is not limited to, optical communication, radio frequency communication, or radio communication.
本發明之視網膜刺激裝置藉由可撓式基板配合眼球的曲度,進而降低刺激視網膜的電流,避免細胞之毀損;且成功整合光感測器、驅動裝置與刺激電極於一個畫素單元,解決感測及刺激效果不佳的問題。 The retinal stimulating device of the invention solves the curvature of the eyeball by the flexible substrate and the curvature of the eyeball, thereby avoiding the damage of the cell; and successfully integrating the photo sensor, the driving device and the stimulating electrode in a pixel unit, The problem of poor sensing and stimulation.
以上所述僅為舉例性,而非為限制性者。任何未脫離本發明之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。 The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.
2‧‧‧畫素陣列 2‧‧‧ pixel array
20‧‧‧畫素單元 20‧‧‧ pixel unit
200‧‧‧光感測器 200‧‧‧Light sensor
201‧‧‧訊號處理及電驅動單元 201‧‧‧Signal processing and electric drive unit
202‧‧‧刺激電極 202‧‧‧Stimulus electrode
5‧‧‧視網膜刺激裝置 5‧‧‧Retina stimulation device
50‧‧‧電源模組 50‧‧‧Power Module
51‧‧‧可撓性封裝 51‧‧‧Flexible package
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