TWI451863B - Retina stimulation apparatus and a manufacturing method thereof - Google Patents

Description

Retinal stimulation device and method of manufacturing same

The present invention relates to a retinal stimulating device and a method of manufacturing the same, and more particularly to a retinal stimulating device for restoring blindness caused by macular degeneration and a method of manufacturing the same.

At present, a common device for stimulating the retina, such as the device disclosed in US Pat. No. 7,158,836, is to place a plurality of electrode units on a support plane, and directly fix the support plane to the sclera by using a pin. . However, due to the inability of the conventional technique to completely conform to the curvature of the eyeball, the threshold of uneven stimulation is caused, and some electrodes need to stimulate the retina with a relatively large current, and high resolution large array, high efficiency, low power cannot be achieved. Claim.

In addition, conventional retinal stimulation devices such as U.S. Patent No. 7,035,692 also lack the integration of photosensitive elements (CMOS), driving devices and stimulating electrodes, resulting in poor stimulation of the retina.

Therefore, it is quite important to provide a retinal stimulating device that can conform to the curvature of the eye and integrate the various components.

In view of the above-mentioned problems of the prior art, the object of the present invention is to provide a visual network The membrane stimulating device and the method of manufacturing the same can fit the curvature of the eyeball and integrate the components on the flexible package to solve the problem that the conventional retinal stimulating device consumes too much energy to damage other cells.

In accordance with the purpose of the present invention, a retinal stimulation device is provided that includes a plurality of pixel units and a flexible package. The flexible package is used to carry a pixel unit and a power module. Each pixel unit includes a light sensor, a signal processing and electric driving unit, and a stimulation electrode. The photo sensor senses incident light and generates a sensing signal. The signal processing and electric driving unit receives and processes the sensing signal to generate an electrical stimulation waveform, and the stimulation electrode receives the electrical stimulation waveform to generate a corresponding Stimulates current to stimulate a retinal cell.

Wherein, the retinal stimulating device is disposed on a ganglion cell, and the photo sensor and the signal processing and electric driving unit and the stimulating electrode are disposed on different sides of the intermediate layer.

Wherein, the retinal stimulating device is disposed on a ganglion cell, and the photo sensor and the signal processing and electric driving unit and the stimulating electrode are disposed on the same side of the intermediate layer.

Wherein, the retinal stimulating device is disposed between a bipolar cell and a rod and a cones and cones, and the photo sensor and the signal processing and electric driving unit and the stimulating electrode are disposed in a Different sides of the middle layer.

Wherein, the retinal stimulating device is disposed between a bipolar cell and a rod and a cones and cones, and the photo sensor and the signal processing and electric driving unit and the stimulating electrode are disposed in a The same side of the middle layer.

Wherein, the retinal stimulating device further comprises a power module connected to the pixel unit, and the electric The source module provides pixel unit power after being wirelessly charged.

Wherein, a perforation hole is arranged between each pixel unit for circulating gas or tissue fluid on the upper and lower sides of the retinal stimulating device.

Each of the signal processing and the electric drive unit is electrically connected to each other by a wire for exchanging the sensing signals for background light intensity adjustment.

Each of the stimulation electrodes has a guard ring disposed under each of the stimulation electrodes for regionally stimulating the retinal cells.

Each of the signal processing and electric driving units further includes a sensing circuit, and the sensing circuit detects the type of retinal cells, and each of the signal processing and electric driving units controls the stimulation electrodes to stimulate the retinal cells according to the type of retinal cells.

Among them, the stimulating electrode is a convex umbrella shape.

Wherein, the plurality of protruding portions of each of the protruding umbrella-shaped stimulation electrodes are not on the same plane.

Wherein, the retinal stimulation device further comprises a remote control device, wherein the remote control device is connected to the pixel unit by wireless communication, and performs remote control on the pixel unit.

Wherein, the remote control device is connected to the pixel unit by wireless communication, and the wireless connection is performed by means of optical communication, radio frequency communication or radio communication.

Wherein, the flexible package is a biocompatible material.

Among them, the biocompatible material comprises polyimide, polydimethyl siloxane (PDMS) or parylene.

According to the purpose of the present invention, a method of manufacturing a retinal stimulating device is further proposed. The invention comprises providing a substrate, and integrating a plurality of signal processing and electric driving units, a plurality of photo sensors and a plurality of stimulation electrodes on the substrate to form a plurality of pixel units. Then, a conductive layer is disposed on the stimulating electrode, and a first barrier layer is disposed on other regions on the pixel unit, and a first biocompatible material layer is disposed on the first barrier layer, and a first holding is disposed. The substrate is on the first barrier layer. Then, the substrate is removed, and the signal processing and electric driving unit and the photo sensor are exposed, and a second obstacle layer is disposed on the exposed signal processing and electric driving unit and the photo sensor. After a plurality of exchange holes are disposed between the pixel units, a second biocompatible material layer is disposed on the second barrier layer, and the first biocompatible material layer and the second biocompatible material layer are each coated Pixel unit. A second holding substrate is then disposed on the second layer of biocompatible material, and a portion of the first layer of biocompatible material is removed to expose the conductive layer on the stimulating electrode, and finally the second holding substrate is removed.

The method further includes a wire disposed between each of the signal processing and the electric driving unit to be electrically connected to each other for exchanging the sensing signals for background light intensity adjustment.

The method further includes setting a power module to connect the pixel unit to provide power of the pixel unit after charging.

The photo sensor senses incident light and generates a sensing signal. The signal processing and electric driving unit receives and processes the sensing signal to generate an electrical stimulation waveform, and the stimulation electrode receives the electrical stimulation waveform to generate a corresponding Stimulates current to stimulate a retinal cell.

Wherein, the method further comprises providing a guard ring under each stimulation electrode for regionally stimulating each retinal cell.

The method further includes setting a sensing power in each signal processing and electric driving unit. The path is used to detect the type of retinal cells, and each signal processing and electric drive unit controls the stimulation electrode to stimulate the retinal cells according to the type of retinal cells.

Among them, the stimulating electrode is a convex umbrella shape.

Wherein, the plurality of protruding portions of each of the protruding umbrella-shaped stimulation electrodes are not on the same plane.

The method further includes setting a remote control device to connect the pixel unit in a wireless communication manner, and performing remote control on the pixel unit.

Wherein, the remote control device connects to the pixel unit by wireless communication, and comprises wirelessly connecting by optical communication, radio frequency communication or radio communication.

Wherein, the first biocompatible material layer and the second biocompatible material layer are a flexible material.

Among them, the flexible material includes polyimide, polydimethyl siloxane (PDMS) or parylene.

The first barrier layer and the second barrier layer are tantalum carbide (SiC) or a diamond-like carbon film (DLC Film).

As described above, the retinal stimulating device and the method of manufacturing the same according to the present invention may have one or more of the following advantages:

(1) The retinal stimulating device and the method of manufacturing the same can float the eyeball on the flexible substrate, thereby reducing the current that stimulates the retina and avoiding damage of the cells.

(2) The retinal stimulating device and the manufacturing method thereof can solve the sensing and stimulating effect by integrating the photo sensor, the driving device and the stimulating electrode in one pixel unit. Good question.

1‧‧‧Intermediate

10‧‧‧Substrate

11‧‧‧First holding substrate

12‧‧‧Second holding substrate

2‧‧‧ pixel array

20~24‧‧‧ pixel unit

200‧‧‧Light sensor

201‧‧‧Signal processing and electric drive unit

2010‧‧‧Sensor circuit

202‧‧‧Stimulus electrode

2020‧‧ ‧ protective ring

2021‧‧‧ raised parts

203‧‧‧ Conductive layer

204‧‧‧ tissue glue

205‧‧‧Exchange hole

206‧‧‧Wire

30‧‧‧First biocompatible material layer

31‧‧‧Second biocompatible material layer

32‧‧‧First barrier

33‧‧‧ second barrier

5‧‧‧Retina stimulation device

50‧‧‧Power Module

51‧‧‧Flexible package

52‧‧‧Remote control

6‧‧‧ ganglion cells

7‧‧‧Bipolar cells

8‧‧‧Neural network

9‧‧‧ rods and cones

13‧‧‧ cerebral cortex

S10~S19‧‧‧Steps

1 is a flow chart showing a method of manufacturing a retinal stimulating device of the present invention; 2A to 2E are schematic views showing a method of manufacturing a retinal stimulating device of the present invention; and FIG. 3A is a retinal stimulating device of the present invention; 3B is a schematic view of an embodiment of a pixel unit of the present invention; FIG. 4A is a schematic view of a protective ring of the retinal stimulating device of the present invention; and FIG. 4B is a protective ring of the retinal stimulating device of the present invention; 5A is a schematic view of a first embodiment of a retinal stimulating device for retina of the present invention; FIG. 5B is a schematic view of a second embodiment of a retinal stimulating device for retina of the present invention; Is a schematic diagram of a first embodiment of a retinal stimulating device for retina under the present invention; FIG. 5D is a schematic view of a second embodiment of a retinal stimulating device for retina under the present invention; and FIG. 6 is a retina of the present invention Schematic diagram of the stimulation device in multiple pieces; and Figure 7 is a stimulation current to retinal stimulation device of the retinal stimulation device of the present invention FIG distance relationship of the retina; 8A is a first schematic view of a third embodiment of a retinal stimulating device for retina of the present invention; FIG. 8B is a second schematic view of a third embodiment of a retinal stimulating device for retina according to the present invention; The figure is a schematic diagram of the background signal brightness adjustment of the signal processing and electric driving unit of the present invention; FIG. 9B is a circuit diagram of the signal processing and the background light brightness adjustment of the signal processing and electric driving unit of the present invention; FIG. 9C is the invention FIG. 10A is a schematic diagram of a fourth embodiment of a retinal stimulating device of the retina according to the present invention; and FIG. 10B is a retina of the retina of the present invention. A schematic diagram of a fifth embodiment of a stimulation device.

Please refer to FIG. 1 , which is a flow chart of a method for manufacturing a retinal stimulator according to the present invention. As shown in FIG. 1, the manufacturing method of the retinal stimulating device of the present invention comprises the following steps: (S10) providing a substrate, and integrating a plurality of signal processing and electric driving units, a plurality of photo sensors, and a plurality of substrates on the substrate. Stimulating the electrodes to form a plurality of pixel units; (S11) providing a conductive layer on the stimulation electrodes and other regions on the pixel unit a first barrier layer is disposed on the first barrier layer, and a first biocompatible material layer is disposed on the first barrier layer; (S12) a first holding substrate is disposed on the first barrier layer; (S13) the substrate is removed and exposed a signal processing and electric driving unit and a photo sensor; (S14) providing a second obstacle layer on the exposed signal processing and electric driving unit and the photo sensor; (S15) setting a plurality of exchanges between the pixel units (S16) providing a second layer of biocompatible material on the second barrier layer, and the first layer of biocompatible material and the second layer of biocompatible material coating each pixel unit; (S17) setting one The second holding substrate is on the second layer of biocompatible material; (S18) removing a portion of the first layer of biocompatible material to expose the conductive layer on the stimulation electrode; and (S19) removing the second holding substrate.

Please also refer to FIGS. 2A-2E, which are schematic diagrams showing the implementation of the method for manufacturing the retinal stimulating device of the present invention. As shown in the figure, in step (S10), a plurality of signal processing and electric driving units 201, a plurality of photo sensors 200, and a plurality of stimulation electrodes 202 are integrated on the substrate 10 to form a plurality of pixel units 20. This step can be performed on a germanium wafer (substrate 10) in a standard or slightly modified semiconductor CMOS process, or in a CMOS image sensor (CIS) process. In some preferred embodiments, the photosensor can be, but is not limited to, a PN Junction or a moderate doping process. The stimulating electrodes 202 can be, but are not limited to, further covered with a titanium-nickel alloy, and the stimulating electrodes 202 are finally exposed.

In the step (S11), the conductive layer 203 disposed on the stimulation electrode 202 may be, but not limited to, iridium oxide (IrOx), platinum (Pt), titanium nitride (TiN), or iron oxide (FeOx). To provide a preferred interface between the stimulating electrode 202 and the first layer of biocompatible material 30. The first biocompatible material layer 30 and the second biocompatible material layer 31 may be, but not limited to, polyimide, polydimethyl siloxane (PDMS) or para-xylene (parylene). )Wait. In addition, the first barrier layer 32 and the second barrier layer 33 disposed in other regions on the pixel unit 20 may be, but not limited to, tantalum carbide (SiC) or a diamond-like carbon film (DLC Film), etc., and the stimulation electrode 202 The upper portion of the semiconductor lithography process can be opened to cover the conductive layer 203.

The first holding substrate 11 disposed in the step (S12) is used for clamping or removing the substrate 10 for performing thinning and removal of the substrate 10 during the step (S13), and the processes of thinning and removing are performed. The polishing process and the etching process may be combined, but are not limited thereto. The substrate 10 may not be removed, but may be thinned to a thickness that the light sensor 200 can sense the light, which is about several tens of micrometers, and at this thickness, the entire substrate 10 is It is a flexible state.

After the second barrier layer 33 is disposed on the exposed signal processing and the electric driving unit 201 and the photo sensor 202, a plurality of switching holes 205 are disposed between the pixel units 20, and the switching holes 205 are used to make The tissue fluid in the human body can circulate both sides of the retinal stimulating device, and the manufacturing method can be performed by a process such as micro-etching. After the second biocompatible material layer 31 is covered, the process of opening the exchange hole 205 is also performed, so that the entire pixel unit 20 is coated in the first and second biocompatible material layers. Only the exchange holes 205 are left exposed to exchange the tissue fluid.

Further, in the step (S17), the second biocompatible material layer 31 is provided. The second holding substrate 12 is for use in the step (S18) when the portion of the first biocompatible material layer 30 is removed, for the handheld cargo machine table to hold the entire retinal stimulating device to expose the conductive layer on the stimulating electrode 202. 203, in order to stimulate the retinal cells. Since the total thickness of the last first biocompatible material layer 30 and the second biocompatible material layer 31 is extremely low, the thickness of the overall retinal stimulating device is also relatively low (about 30 μm), so that light can be transmitted.

Please refer to FIG. 3A, which is a schematic diagram of the retinal stimulating device of the present invention. As shown, the retinal stimulating device 5 of the present invention comprises a pixel array 2, a power module 50 and a flexible package 51. The flexible package 51 has a thickness of 30 μm, which is used to carry and cover the pixel array 2 and the power module 50. The power module 50 provides power to the pixel array 2 after being wirelessly charged. The pixel array 2 includes a plurality of pixel units 20 having a thickness of preferably 10 μm, and each of the pixel units 20 includes a photo sensor 200, a signal processing and electric driving unit 201, and a stimulation electrode 202. The photo sensor 200 senses incident light and generates a sensing signal. The signal processing and electric driving unit 201 receives and processes the sensing signal to generate an electrical stimulation waveform, and the stimulation electrode 202 receives the electrical stimulation waveform. Corresponding to generate a stimulation current to stimulate a retinal cell.

As shown in FIG. 3B, the signal processing and electric driving unit 201 further includes a sensing circuit 2010. The sensing circuit 2010 is preferably connected to the stimulation electrode 202 or can detect the type of retinal cells separately. And each signal processing and electric drive unit 201 controls the stimulation electrode 202 to stimulate the retinal cells according to the type of retinal cells. In a preferred embodiment, the sensing circuit 2010 senses the reaction time of the retinal cells in a calibration mode to determine whether the retinal cells are an ON cell or an OFF cell. . The signal processing and electric drive unit 201 is rooted According to the reaction time of the retinal cells mentioned above, the stimulation mode of the specific stimulation electrode 202 corresponding to the retinal cells is determined.

In addition, as shown in FIG. 4A and FIG. 4B, a guard ring 2020 may be disposed around the lower side of each of the stimulation electrodes, and the guard ring 2020 is a regional reference electrode for providing a current return path. In current drive mode), or as an electric field return path (in voltage drive mode). The guard rings 2020 are used to provide a path for stimulating current or electric field, so that the stimulation currents do not stimulate cells farther from the stimulation electrodes, thereby achieving regional stimulation of the eye cells and protecting the remaining cells.

Please refer to FIG. 5A and FIG. 5B, which are schematic diagrams showing a first embodiment and a second embodiment of a retinal stimulating device for retina of the present invention. As shown in the figure, the present embodiment is one of the aspects of the retinal stimulating device 5 of the present invention, which is called an epi-retina retinal stimulating device, which is connected to the ganglion cells of the retina by the stimulating electrode 202. (ganglion cell), and the photo sensor 200 and the signal processing and electric driving unit 201 and the stimulating electrode 202 are located on the opposite side or the same side of the intermediate layer 1, and the intermediate layer 1 is preferably an oxide layer such as yttrium oxide. (SiO2) and the like. In the first embodiment, the stimulating electrode 202, the conductive layer 203 (preferably aluminum) and optionally the tissue adhesive 204 may be provided on one side of the intermediate layer 1 and the light sensing on the other side. The sensor 200 and the signal processing and electric driving unit 201; in the second embodiment, the intermediate layer 1 is provided with a photo sensor 200, a signal processing and electric driving unit 201 and a stimulation electrode 202, and the stimulation electrode 202 is further selected. The tissue adhesive 204 may be provided, and the conductive layer 203 (preferably aluminum) and the exchange hole 205 are disposed beside the intermediate layer 1. The advantage of such a configuration is that light can be received from a large area (full area) from the back side of the retinal stimulating device 5. The photo sensor 200 can be disposed on the stimulation electrode Below 202, but cannot overwrite the signal processing and electric drive unit 201.

Please refer to FIG. 5C and FIG. 5D, which are schematic diagrams showing a first embodiment and a second embodiment of a retinal stimulating device for the retina according to the present invention. As shown in the figure, this embodiment is another aspect of the retinal stimulating device 5 of the present invention, and is called a sub-retina retinal stimulating device which is connected to the bipolar cells of the retina by the stimulating electrode 202. (bipolar cell). The retinal stimulating device of the present retina is different from the state of the upper retina in that the retinal stimulating device of the lower retina is placed in a bipolar cell 7 with rods and cones (rods and Between the concs) 9, the photo sensor 200 and the signal processing and electric driving unit 201 and the stimulating electrode 202 may be located on the same side or different faces of the intermediate layer 1, and the epi-retina retinal stimulating device the same. In addition, the guard ring is disposed in such a manner as not to block light from entering the photo sensor 200. The exchange hole 205 is used to provide a channel for human body fluid or gas such as oxygen, etc., between the sides of the wafer or retinal stimulation device. Circulation, increasing the body's adaptability to the device.

Please refer to Fig. 6, which is a schematic diagram of the multi-piece assembly of the retinal stimulating device of the present invention. As shown in the figure, when the curvature of the eyeball is too large to exceed the curvature of the flexible package, a plurality of pixel units can be appropriately divided into a hexagonal retinal stimulating device, and a plurality of hexagonal retinal stimulating devices are provided. Combine to match the curvature of the eye. Another advantage of combining multiple hexagonal retinal stimulating devices is that the boundary of the hexagonal retinal stimulating device is the exchange channel of the body fluid, that is, the exchange hole 205, which facilitates the flow and exchange of body fluids or gases such as oxygen. .

Referring again to Fig. 7, it is a graph showing the relationship between the stimulation current of the retinal stimulation device of the present invention and the distance between the retinal stimulation device and the retina. As shown in the figure, the horizontal axis is The distance between the retinal stimulator and the retina, and the vertical axis is the stimulating current of the retinal stimulator. Since the present invention employs a flexible substrate, it can be applied to the surface of the eyeball, thereby effectively reducing the distance between the retinal stimulating device and the retina. Therefore, the retinal stimulating device of the present invention can effectively reduce the stimulating current and thereby protect each cell.

Please refer to FIG. 8A, which is a first schematic view of a third embodiment of a retinal stimulating device for retina of the present invention. As shown, the retinal stimulating device 5 of the retina of the present invention comprises a flexible package 51, a pixel unit 20, an intermediate layer 1, a first layer of biocompatible material 30, a barrier layer 32, and a stimulating electrode 202. As shown in the figure, the present embodiment is characterized in that the symmetry unit 202 does not include the stimulating electrode 202, and the stimulating electrode 202 presents an erected umbrella shape for stimulating the ganglion cells 6, which are umbrella-like. The stimulation electrode 202 includes a raised portion 2021. Therefore, the signal wire pulled under the stimulating electrode 202 does not directly contact the ganglion cell 6 to cause coupling or erroneous stimulation. Referring again to FIG. 8B, which is a second schematic diagram of a third embodiment of the retinal stimulating device of the retina of the present invention. As shown, the difference between this embodiment and the embodiment disclosed in FIG. 8A is that the raised portions 2021 of the respective stimulation electrodes 202 can be on different planes. This embodiment can therefore more accurately stimulate local or even single ganglion cells 6, achieving the effect of accurately reducing the sensed optical signals to produce a correct picture.

Please refer to FIGS. 9A and 9B, which are schematic and circuit diagrams for adjusting the background light brightness of the signal processing and electric drive unit of the present invention. As shown in Fig. 9A, this figure is a schematic representation of a portion of a pixel array comprising a plurality of pixel units 20, 21, 22, 23, 24. In this embodiment, each pixel unit can exchange data with each other, and the data exchange manner is connected by connecting wires 206 to different pixel units. As shown in Figure 9C. Taking the central pixel unit 20 as an example, the pixel unit 20 can receive the photographic materials of the other pixel units 21, 22, 23, and 24, and perform the processing as shown in FIG. 9B to output current to stimulate the retinal cells to reach the background. The effect of the brightness adjustment of the light is differentiated from the pixel unit 20 by the average value of the pixel units 21 to 24, but the actual implementation is not limited thereto. By adjusting the background brightness by circulating the signal, the resolution and recognition rate of the image can be effectively improved. It is worth noting that the arrangement of these pixel units is not limited to a square shape, but may be a hexagon or a pattern of other closely adjacent pixel units.

Please refer to FIG. 10A, which is a schematic view of a fourth embodiment of a retinal stimulating device for retina of the present invention. As shown, the retinal stimulating device 5 of the retina of the present invention comprises a pixel unit 20 and a stimulating electrode 202. The stimulating electrode 202 faces the ganglion cell to stimulate the cell. There are neural networks 8 as well as rods and cones and the like under ganglion cells 6. The neural network 8 contains various cells such as bipolar cells. In the normal human eye structure, after the light is incident, all the way through the above-mentioned ganglion cells 6, neural network 8 and rods and cones 9 are induced and then transmitted back to the ganglion cells 6; however, some retinal degeneration The patient's neural network 8 may have degenerated, and the rod and cone 9 may have been necrotic. Therefore, the retinal stimulating device 5 on the retina of the present invention generates a stimulation signal to stimulate the ganglion cells immediately after receiving the incident light. 6 to produce vision, and because the invention uses a very thin and soft substrate, it can be completely applied to the ganglion cells 6, effectively reducing the power required to generate the stimulation signal, and because of the very light and thin relationship, the light It is possible to penetrate the retinal stimulating device 5, and thus can be placed on the ganglion cells 6, without limitation, but only under the rods and cones 9. In addition, as shown in Figure 10B As shown, the present invention may further comprise a remote control device 52 for receiving feedback control signals from the cerebral cortex 13 of the human body, and remotely adjusting or adjusting the respective pixel units 20 according to the feedback to accurately fine tune the respective stimulation electrodes. 202 stimulates the power of the retina (ie, the adjustment of brightness) to achieve a more accurate display. In addition, the remote control device 52 can be wirelessly connected to the pixel unit 20 and the cerebral cortex layer 13 of the human body in a manner that can be, but is not limited to, optical communication, radio frequency communication, or radio communication.

The retinal stimulating device of the invention solves the curvature of the eyeball by the flexible substrate and the curvature of the eyeball, thereby avoiding the damage of the cell; and successfully integrating the photo sensor, the driving device and the stimulating electrode in a pixel unit, The problem of poor sensing and stimulation.

The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

2‧‧‧ pixel array

20‧‧‧ pixel unit

200‧‧‧Light sensor

201‧‧‧Signal processing and electric drive unit

202‧‧‧Stimulus electrode

5‧‧‧Retina stimulation device

50‧‧‧Power Module

51‧‧‧Flexible package

Claims (27)

A retinal stimulating device comprising: a plurality of pixel units, each of the pixel units comprising: a photo sensor for sensing incident light and generating a sensing signal; a signal processing and electric driving unit for receiving and processing The sensing signal generated by the photo sensor, and the signal processing and electric driving unit comprises a sensing circuit, the sensing circuit detects a type of retinal cells, and the signal processing and electric driving unit receives the signal according to the receiving The sensing signal and the detected shape of the retinal cell are correspondingly generated to generate an electrical stimulation waveform; and a stimulation electrode receives the electrical stimulation waveform generated by the signal processing and the electric driving unit to generate a corresponding A stimulation current for stimulating the retinal cells; and a flexible package for carrying and covering the pixel unit. The retinal stimulating device according to claim 1, wherein the retinal stimulating device is disposed on a ganglion cell, and the photosensors and the signal processing and electric driving units are The stimulating electrodes are disposed on different sides of an intermediate layer. The retinal stimulating device according to claim 1, wherein the retinal stimulating device is disposed on a ganglion cell, and the photosensors and the signal processing and electric driving units are The stimulating electrodes are disposed on the same side of an intermediate layer. The retinal stimulating device according to claim 1, wherein the retinal stimulating device is disposed in a bipolar cell and a rod and a cone ( Between the rods and the cones, the photosensors and the signal processing and electric drive units and the stimulation electrodes are disposed on different sides of the intermediate layer. The retinal stimulating device according to claim 1, wherein the retinal stimulating device is disposed between a bipolar cell and a rod and a cones and cones, and the light sensation The detector and the signal processing and electric drive unit and the stimulation electrodes are disposed on the same side of the intermediate layer. The retinal stimulating device of claim 1, further comprising a power module connected to the pixel unit and charged to provide the pixel unit power. The retinal stimulating device according to claim 1, wherein a perforation hole is disposed between each of the pixel units for circulating a gas or a tissue fluid on the upper and lower sides of the retinal stimulating device. The retinal stimulating device of claim 1, wherein each of the signal processing and electric driving units is electrically connected to each other by a wire for exchanging each of the sensing signals for background light intensity adjustment. The retinal stimulating device of claim 1, further comprising a guard ring disposed under each of the stimulation electrodes for regionally stimulating the retinal cells. The retinal stimulating device of claim 1, wherein the stimulating electrodes are convex umbrellas. The retinal stimulating device according to claim 10, wherein the plurality of protruding portions of each of the protruding umbrella-shaped stimulating electrodes are not in the same plane. The retinal stimulating device of claim 1, wherein the flexible encapsulation is a biocompatible material. The retinal stimulating device of claim 12, wherein the biocompatible material comprises polyimide, polydimethyl siloxane (PDMS) or Paraxylene (parylene). The retinal stimulating device according to claim 1, further comprising a remote control device that connects the pixel unit in a wireless communication manner and performs remote control on the pixel unit. The retinal stimulator device of claim 14, wherein the remote control device is connected to the pixel unit by wireless communication, and comprises wirelessly connecting by optical communication, radio frequency communication or radio communication. A method for manufacturing a retinal stimulating device, comprising the steps of: providing a substrate, and integrating a plurality of signal processing and electric driving units, a plurality of photo sensors, and a plurality of stimulating electrodes on the substrate to form a plurality of pixel units ??? a sensing circuit is disposed in each of the signal processing and electric driving units for detecting a type of retinal cells, and each of the signal processing and electric driving units is based on the type of the retinal cells and the light One of the sensors in the sensor senses a signal, and the stimulating electrode is controlled to stimulate the retinal cells; a conductive layer is disposed on the stimulating electrodes, and one of the other regions on the pixel units is disposed a first barrier layer, further comprising a first layer of biocompatible material on the first barrier layer; a first holding substrate disposed on the first barrier layer; removing the substrate, and exposing the signal processing and electricity a driving unit and the photo sensors; a second barrier layer is disposed on the exposed signal processing and electric driving units and the photo sensors; and a plurality of intersections are arranged between the pixel units Aperture; providing a second layer of biocompatible material on the second barrier layer, and the biocompatible material of the first layer and the second layer based biologically compatible material covering each of the pixel unit; Forming a second holding substrate on the second biocompatible material layer; removing a portion of the first biocompatible material layer to expose the conductive layer on the stimulation electrodes; and removing the second holding substrate. The method for manufacturing a retinal stimulating device according to claim 16, further comprising a wire disposed between each of the signal processing and the electric driving unit to be electrically connected to each other for exchanging each of the sensing signals for background Light intensity adjustment. The method for manufacturing a retinal stimulating device according to claim 16, further comprising: providing a power module to connect the plurality of pixel units for charging to provide the plurality of pixel unit powers. The method of manufacturing a retinal stimulating device according to claim 16, wherein the photo sensor senses incident light and generates a sensing signal, and the signal processing and electric driving unit receives and processes the sensing signal. Correspondingly, an electrical stimulation waveform is generated, and the stimulation electrode receives the electrical stimulation waveform to generate a stimulation current for stimulating a retinal cell. The method for manufacturing a retinal stimulating device according to claim 16, further comprising a guard ring disposed under each of the stimulating electrodes for regionally stimulating each of the retinal cells. The method of manufacturing a retinal stimulating device according to claim 16, wherein the stimulating electrodes are convex umbrella shapes. The method of manufacturing a retinal stimulating device according to claim 21, wherein the plurality of protruding portions of the protruding umbrella-shaped stimulating electrodes are not in the same plane. The method for manufacturing a retinal stimulating device according to claim 16, further comprising: providing a remote control device to connect the pixel units in a wireless communication manner, and performing remote control on the pixel units. A method of manufacturing a retinal stimulating device according to claim 23, wherein The remote control device is connected to the pixel unit by wireless communication, and includes wireless connection by optical communication, radio frequency communication or radio communication. The method of manufacturing a retinal stimulating device according to claim 16, wherein the first biocompatible material layer and the second biocompatible material layer are a flexible material. The method of manufacturing a retinal stimulating device according to claim 25, wherein the flexible material comprises polyimide, polydimethyl siloxane (PDMS) or paraylene (parylene). . The method of manufacturing a retinal stimulating device according to claim 16, wherein the first barrier layer and the second barrier layer are tantalum carbide (SiC) or a diamond-like carbon film (DLC Film).