TWI442552B - Differential nonvolatile memory unit and its operation method - Google Patents

Differential nonvolatile memory unit and its operation method Download PDF

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TWI442552B
TWI442552B TW101101091A TW101101091A TWI442552B TW I442552 B TWI442552 B TW I442552B TW 101101091 A TW101101091 A TW 101101091A TW 101101091 A TW101101091 A TW 101101091A TW I442552 B TWI442552 B TW I442552B
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transistor
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coupled
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TW201330233A (en
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Hou Jen Chiu
Hong Chin Lin
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Nat Univ Chung Hsing
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差動式非揮發性記憶體單元及其操作方法Differential non-volatile memory unit and method of operating same

本發明是有關於一種非揮發性記憶體單元,特別是指一種差動型非揮發性記憶體單元及其操作方法。The present invention relates to a non-volatile memory unit, and more particularly to a differential non-volatile memory unit and method of operation thereof.

目前,非揮發性記憶體隨著可攜帶式電子產品的成長而需求大幅提升。傳統的浮動閘極非揮發性記憶體單元結構是將金氧半場效應電晶體的閘極以複晶矽(Poly-Silicon)製作,並包覆在氧化層(例如SiO2 )中,稱為浮動閘極。將電荷儲存於浮動閘極中,而被氧化層所隔絕以達到電荷儲存之效果。浮動閘極非揮發性記憶體單元的操作原理主要是利用載子通過氧化層注入至浮動閘極中,進而造成電晶體臨界電壓值(Threshold Voltage,VTH )的偏移,因此可以定義出0和1兩個邏輯狀態。At present, the demand for non-volatile memory has increased dramatically with the growth of portable electronic products. The conventional floating gate non-volatile memory cell structure is formed by using a poly-Silicon gate of a gold-oxygen half-field transistor and coating it in an oxide layer (for example, SiO 2 ), which is called floating. Gate. The charge is stored in the floating gate and is isolated by the oxide layer to achieve the effect of charge storage. The operation principle of the floating gate non-volatile memory unit is mainly to use the carrier to inject into the floating gate through the oxide layer, thereby causing the shift of the threshold voltage (V TH ) of the transistor, so that 0 can be defined. And 1 logical state.

由於傳統的非揮發性記憶體單元大多以非標準CMOS製程技術設計與製造,需要多增加額外的光罩與製程步驟提高了記憶體製造的成本。在積體電路系統晶片的發展上,有時需要記憶體單元與系統整合在同一晶片上的需求,使得嵌入式CMOS製程之非揮發性記憶體單元的發展逐漸有重要的市場應用。而新製程的演進使氧化層之厚度持續減小,也造成一般儲存於浮動閘極中的載子容易流失,因此發展出可多次寫入差動型非揮發性記憶體,差動型的優點是可以容許些微的漏電,且容易判別微小的電流差異。Since traditional non-volatile memory cells are mostly designed and manufactured in a non-standard CMOS process technology, additional masking and processing steps are required to increase the cost of memory fabrication. In the development of integrated circuit system chips, the need to integrate memory cells and systems on the same chip is sometimes required, and the development of non-volatile memory cells in embedded CMOS processes has gradually become an important market application. The evolution of the new process has continued to reduce the thickness of the oxide layer, which also causes the carriers generally stored in the floating gate to be easily lost. Therefore, it has been developed that the differential non-volatile memory can be written multiple times, and the differential type is developed. The advantage is that slight leakage can be tolerated and it is easy to discriminate small current differences.

參閱圖1,於文獻「Yi-Hung Tsai,Hsiao-Lan Yang,Wun-Jie Lin,Chrong Jung Lin,and Ya-Chin King,“A New Differential Logic-Compatible Multiple-Time Programmable Memory Cell,”Japanese Journal of Applied Physics 49(2010) 04DD13」中,揭露一種習知的可多次寫入差動型非揮發性記憶體單元,包含:一第一電晶體11、一第二電晶體12、一第三電晶體13、一第一電壓耦合件14及一第二電壓耦合件15。Referring to Figure 1, in the literature "Yi-Hung Tsai, Hsiao-Lan Yang, Wun-Jie Lin, Chrong Jung Lin, and Ya-Chin King, "A New Differential Logic-Compatible Multiple-Time Programmable Memory Cell," Japanese Journal of In Applied Physics 49 (2010) 04DD13, a conventional multi-write differential type non-volatile memory unit is disclosed, comprising: a first transistor 11, a second transistor 12, and a third The crystal 13 has a first voltage coupling member 14 and a second voltage coupling member 15.

該第一電晶體11、第二電晶體12及第三電晶體13是製作於一P型摻雜井10上(如圖1中PW所示區域),該第一電壓耦合件14及第二電壓耦合件15是分別製作於N型摻雜井140及150上(如圖1中NW所示區域)。該第一電晶體11、第二電晶體12及第三電晶體13是NMOS電晶體,而該第一電壓耦合件14及該第二電壓耦合件15是一MOS結構。The first transistor 11, the second transistor 12 and the third transistor 13 are fabricated on a P-type doping well 10 (as shown by PW in FIG. 1), the first voltage coupling 14 and the second Voltage couplings 15 are fabricated on N-type wells 140 and 150, respectively (as indicated by NW in Figure 1). The first transistor 11, the second transistor 12 and the third transistor 13 are NMOS transistors, and the first voltage coupling 14 and the second voltage coupling 15 are a MOS structure.

該第一電晶體11包括一用以儲存電荷的閘極111、一第一端112及一第二端113。該第二電晶體12包括一用以儲存電荷的閘極121、一第一端122,及一第二端123。該第三電晶體13包括一閘極131、一與該第一電晶體11之第二端113及該第二電晶體12之第二端123耦接的第一端132,及一第二端133。The first transistor 11 includes a gate 111 for storing electric charge, a first end 112 and a second end 113. The second transistor 12 includes a gate 121 for storing electric charge, a first end 122, and a second end 123. The third transistor 13 includes a gate 131, a first end 132 coupled to the second end 113 of the first transistor 11 and the second end 123 of the second transistor 12, and a second end 133.

該第一電壓耦合件14包括一與該第一電晶體11之閘極111耦接的閘極141,以及一互相短路的一第一端142及一第二端143,當其施加高電壓時,可以透過閘極141下方之氧化層,移除閘極141中之電荷。該第二電壓耦合件15包括一與該第二電晶體12之閘極121耦接的閘極151,以及一與互相短路並與該第一電壓耦合件14之第一端142耦接的一第一端152及一第二端153,當其施加高電壓時,可以透過閘極151下方之氧化層,移除閘極151中之電荷。The first voltage coupling member 14 includes a gate 141 coupled to the gate 111 of the first transistor 11, and a first end 142 and a second end 143 short-circuited to each other when a high voltage is applied. The charge in the gate 141 can be removed through the oxide layer under the gate 141. The second voltage coupling member 15 includes a gate 151 coupled to the gate 121 of the second transistor 12, and a gate 510 coupled to the first end 142 of the first voltage coupling member 14 The first end 152 and the second end 153 can remove the charge in the gate 151 through the oxide layer under the gate 151 when a high voltage is applied.

寫入操作是施加多個電壓至該記憶體單元,透過通道熱電子(channel hot electron,CHE)注入電荷於閘極111或121中,造成第一電晶體11和第二電晶體12的臨界電壓值的差異。讀取操作是施加多個電壓至該記憶體單元,使該第一電晶體11、第二電晶體12及第三電晶體13導通,此時使用感測放大器(圖未示)同時讀取第一電晶體11和第二電晶體12的通道電流值,即可產生一邏輯狀態輸出。抹除操作則是施加多個電壓至該記憶體單元,透過福樂-諾德漢穿隧效應(Fowler-Nordheim tunneling)以消除閘極111或121的電荷。詳細的操作電壓資料如下表1所示:The writing operation is to apply a plurality of voltages to the memory unit, and inject a charge into the gate 111 or 121 through a channel hot electron (CHE), thereby causing a threshold voltage of the first transistor 11 and the second transistor 12. The difference in value. The reading operation is to apply a plurality of voltages to the memory unit, and the first transistor 11, the second transistor 12, and the third transistor 13 are turned on. At this time, the sensing amplifier (not shown) is used to simultaneously read the first A channel current value of a transistor 11 and a second transistor 12 produces a logic state output. The erase operation applies a plurality of voltages to the memory cell through the Fowler-Nordheim tunneling to eliminate the charge of the gate 111 or 121. The detailed operating voltage data is shown in Table 1 below:

由表1可發現,於抹除該記憶體單元時,相對於該第三電晶體13的第二端133而言,需要升壓高達9.5V(例如該第一電壓耦合件14的第一端142),寫入時,也需升壓7V(例如該第一電晶體11的第一端112),因此有操作電壓差較大的缺點。It can be seen from Table 1 that when the memory cell is erased, the boosting is required to be as high as 9.5 V with respect to the second end 133 of the third transistor 13 (for example, the first end of the first voltage coupling 14) 142) When writing, it is also necessary to boost 7V (for example, the first end 112 of the first transistor 11), so there is a disadvantage that the operating voltage difference is large.

因此,本發明之目的,即在提供一種可以降低操作電壓差的差動式非揮發性記憶體單元及其操作方法。Accordingly, it is an object of the present invention to provide a differential non-volatile memory cell that can reduce the operating voltage difference and a method of operating the same.

於是,本發明差動式非揮發性記憶體單元,包含一第一電晶體、一第二電晶體、一第三電晶體、一第四電晶體及一第五電晶體。Therefore, the differential non-volatile memory unit of the present invention comprises a first transistor, a second transistor, a third transistor, a fourth transistor and a fifth transistor.

該第一電晶體包括一用以儲存電荷的閘極、一第一端及一第二端。該第二電晶體包括一用以儲存電荷的閘極、一第一端,及一與該第一電晶體之第二端耦接的第二端。該第三電晶體包括一閘極、一與該第一電晶體之第二端耦接的第一端,及一第二端,用以控制該第一電晶體及該第二電晶體的通道電流。The first transistor includes a gate for storing a charge, a first end, and a second end. The second transistor includes a gate for storing charge, a first end, and a second end coupled to the second end of the first transistor. The third transistor includes a gate, a first end coupled to the second end of the first transistor, and a second end for controlling the channel of the first transistor and the second transistor Current.

該第四電晶體包括一與該第一電晶體之閘極耦接的閘極,以及互相短路的一第一端及一第二端,用以耦合其第一端上的電壓到該第一電晶體之閘極。該第五電晶體包括一與該第二電晶體之閘極耦接的閘極,以及互相短路並與該第四電晶體之第一端耦接的一第一端及一第二端,用以耦合其第一端上的電壓到該第二電晶體之閘極。The fourth transistor includes a gate coupled to the gate of the first transistor, and a first end and a second end shorted to each other for coupling a voltage on the first end thereof to the first The gate of the transistor. The fifth transistor includes a gate coupled to the gate of the second transistor, and a first end and a second end that are shorted to each other and coupled to the first end of the fourth transistor. To couple the voltage on its first terminal to the gate of the second transistor.

其中,該第一電晶體、該第二電晶體及該第三電晶體是製作於一N型摻雜井上,該第四電晶體及該第五電晶體是製作於其它N型摻雜井上,該等電晶體是P型電晶體。The first transistor, the second transistor and the third transistor are fabricated on an N-type doping well, and the fourth transistor and the fifth transistor are fabricated on other N-type doping wells. The transistors are P-type transistors.

本發明操作一差動式非揮發性記憶體單元的方法,適用於上述的差動式非揮發性記憶體單元,且包含以下步驟:The method for operating a differential non-volatile memory cell of the present invention is applicable to the differential non-volatile memory cell described above, and comprises the following steps:

抹除邏輯0步驟:施加多個電壓分別到該記憶體單元的該第一電晶體的第一端、該第三電晶體的閘極與第二端、該第四電晶體的第一端及製作有該第一電晶體的該N型摻雜井,該等電壓足以使該第一電晶體發生碰穿效應產生熱載子,且使該第一電晶體的閘極被注入部分熱載子而消除電荷。Erasing logic 0: applying a plurality of voltages to a first end of the first transistor of the memory cell, a gate and a second end of the third transistor, a first end of the fourth transistor, and Forming the N-type doping well of the first transistor, the voltage is sufficient to cause a breakdown effect of the first transistor to generate a hot carrier, and causing a gate of the first transistor to be injected into a portion of the hot carrier And eliminate the charge.

抹除邏輯1步驟:施加多個電壓分別到該記憶體單元的該第二電晶體的第一端、該第三電晶體的閘極與第二端、該第四電晶體的第一端及製作有該第一電晶體的該N型摻雜井,該等電壓足以使該第二電晶體發生碰穿效應產生熱載子,且使該第二電晶體的閘極被注入部分熱載子而消除電荷。Erasing logic 1 step: applying a plurality of voltages to a first end of the second transistor of the memory cell, a gate and a second end of the third transistor, a first end of the fourth transistor, and Forming the N-type doping well of the first transistor, the voltage is sufficient to cause a breakdown effect of the second transistor to generate a hot carrier, and causing a gate of the second transistor to be injected into a portion of the hot carrier And eliminate the charge.

本發明之功效在於:該差動式非揮發性記憶體單元藉由結構上的改變及利用碰穿效應進行抹除動作,能有效降低操作時相對於該第三電晶體的第二端所需的升壓及降壓。The effect of the invention is that the differential non-volatile memory unit can be effectively erased by the structural change and the bumping effect, and can be effectively reduced relative to the second end of the third transistor during operation. Boost and buck.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之一個較佳實施例的詳細說明中,將可清楚的呈現。The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments.

參閱圖2及圖3,本發明差動式非揮發性記憶體單元之較佳實施例包含一第一電晶體21、一第二電晶體22、一第三電晶體23、一第四電晶體24及一第五電晶體25。圖2為本較佳實施例的上視圖,圖3是本較佳實施例的電路圖。Referring to FIG. 2 and FIG. 3, a preferred embodiment of the differential non-volatile memory cell of the present invention comprises a first transistor 21, a second transistor 22, a third transistor 23, and a fourth transistor. 24 and a fifth transistor 25. 2 is a top view of the preferred embodiment, and FIG. 3 is a circuit diagram of the preferred embodiment.

該第一電晶體21、該第二電晶體22及該第三電晶體23是製作於一主摻雜井20上,該第四電晶體24及該第五電晶體25是分別製作於兩個次摻雜井240、250上。於本較佳實施例中,該等摻雜井20、240、250皆為N型(如圖2中NW所示區域),而該等電晶體21~25為PMOS電晶體。The first transistor 21, the second transistor 22 and the third transistor 23 are formed on a main doping well 20, and the fourth transistor 24 and the fifth transistor 25 are respectively fabricated in two Sub-doped wells 240, 250. In the preferred embodiment, the doping wells 20, 240, and 250 are all N-type (as shown by NW in FIG. 2), and the transistors 21-25 are PMOS transistors.

該第一電晶體21包括一用以儲存電荷的閘極211、一第一端212及一第二端213。該第二電晶體22包括一用以儲存電荷的閘極221、一第一端222,及一第二端223。該第三電晶體23用以控制該第一電晶體21及該第二電晶體22的通道電流,且包括一閘極231、一與該第一電晶體21之第二端213及該第二電晶體22之第二端223耦接的第一端232,及一第二端233。The first transistor 21 includes a gate 211 for storing electric charge, a first end 212 and a second end 213. The second transistor 22 includes a gate 221 for storing electric charge, a first end 222, and a second end 223. The third transistor 23 is configured to control channel currents of the first transistor 21 and the second transistor 22, and includes a gate 231, a second end 213 of the first transistor 21, and the second The second end 223 of the transistor 22 is coupled to the first end 232 and to the second end 233.

該第四電晶體24包括一與該第一電晶體21之閘極211耦接的閘極241,以及互相短路的一第一端242及一第二端243,用以耦合其第一端242上的電壓到該第一電晶體21之閘極211。該第五電晶體25包括一與該第二電晶體22之閘極221耦接的閘極251,以及互相短路並與該第四電晶體24之第一端242耦接的一第一端252及一第二端253,用以耦合其第一端252上的電壓到該第二電晶體22之閘極221。The fourth transistor 24 includes a gate 241 coupled to the gate 211 of the first transistor 21, and a first end 242 and a second end 243 short-circuited to each other for coupling the first end 242 thereof. The upper voltage is applied to the gate 211 of the first transistor 21. The fifth transistor 25 includes a gate 251 coupled to the gate 221 of the second transistor 22, and a first end 252 that is shorted to each other and coupled to the first end 242 of the fourth transistor 24. And a second terminal 253 for coupling the voltage on the first terminal 252 to the gate 221 of the second transistor 22.

該第四電晶體24耦合電壓至第一電晶體21的電壓耦合率(Coupling Ratio)由閘極241和閘極211的面積比決定。電壓耦合率可以表示為下式:The voltage coupling ratio (Coupling Ratio) of the fourth transistor 24 coupled to the first transistor 21 is determined by the area ratio of the gate 241 and the gate 211. The voltage coupling ratio can be expressed as:

電壓耦合率= Voltage coupling ratio =

其中,A代表該第四電晶體24的閘極241面積,B代表該第一電晶體21的閘極211面積。當A>B,電荷容易由閘極211進出;當A<B,電荷容易由閘極241進出。先前技術(如圖1)採用A<B的架構,而在本較佳實施例中,為了提高電壓耦合率,使電荷容易由閘極211進出,該第四電晶體24的閘極241面積大於該第一電晶體21的閘極211面積,而同樣地,該第五電晶體25的閘極251面積大於該第二電晶體22的閘極221面積。本較佳實施例在操作時,因為A>B,所以可用碰穿效應產生熱載子來進行抹除,以避免在第四電晶體24的第一端242施加高電壓。Wherein, A represents the area of the gate 241 of the fourth transistor 24, and B represents the area of the gate 211 of the first transistor 21. When A>B, the charge is easily in and out of the gate 211; when A<B, the charge is easily in and out of the gate 241. The prior art (Fig. 1) adopts the architecture of A<B, and in the preferred embodiment, in order to increase the voltage coupling ratio, the charge is easily entered and exited by the gate 211, and the gate 241 of the fourth transistor 24 has a larger area. The gate 211 of the first transistor 21 has an area, and similarly, the gate 251 of the fifth transistor 25 has an area larger than the gate 221 of the second transistor 22. In the preferred embodiment, since A>B, a thermal carrier can be generated by the bumping effect for erasing to avoid applying a high voltage to the first terminal 242 of the fourth transistor 24.

參閱表2,本發明操作一差動型非揮發性記憶體單元的方法之較佳實施例適用於上述的差動式非揮發性記憶體單元,且包含以下步驟:寫入邏輯0、寫入邏輯1、讀取資料、抹除邏輯0及抹除邏輯1。Referring to Table 2, a preferred embodiment of the method of operating a differential non-volatile memory cell of the present invention is applicable to the differential non-volatile memory cell described above, and includes the steps of: writing logic 0, writing Logic 1, read data, erase logic 0, and erase logic 1.

參閱圖3及圖4,圖4為沿著圖2中的I-I’線的剖面圖。寫入邏輯0步驟包括:施加3V到該主摻雜井20;施加0V到該第三電晶體23的閘極231,施加3V到第三電晶體23的第二端233,使該第三電晶體23導通;施加-3V到該第一電晶體21的第一端212,施加0V到該第四電晶體24的第一端242,藉由第四電晶體24對第一電晶體21的電壓耦合效應,使得第一電晶體21導通;此時,該第二電晶體22的第一端222浮接,使第二電晶體22不導通。電晶體21、23的通道中的電洞將從電晶體23的第二端233往第一電晶體21的第一端212移動(如圖4中A方向所示,實心圓代表電子,空心圓代表電洞),電洞經由通道中橫向電場的加速,在第一電晶體21的第一端212接面的附近造成撞擊游離而產生電子與電洞,這些電子與電洞又被電場加速造成撞擊游離再產生新的電子與電洞,而在第一電晶體21的第一端212接面的附近發生累增崩潰的現象。電子與電洞經由電場的加速而獲得足夠高的能量成為熱載子。熱電洞在經過碰撞過程之後,若仍具有足夠高的能量能夠克服Si-SiO2 間的位能障,受到第一電晶體21的閘極211到通道間垂直電場的影響將有機會注入至第一電晶體21的閘極211中,使其帶有電荷。通道中大部份的電洞流入第一電晶體21的第一端212,經由撞擊游離所產生的電子大部分則是受到第一電晶體21的第一端212與主摻雜井20間電場的影響經由主摻雜井20流走,形成基板電流。3 and 4, FIG. 4 is a cross-sectional view taken along line II' of FIG. 2. The step of writing logic 0 includes: applying 3V to the main doping well 20; applying 0V to the gate 231 of the third transistor 23, applying 3V to the second end 233 of the third transistor 23, and making the third electric The crystal 23 is turned on; applying -3V to the first end 212 of the first transistor 21, applying 0V to the first end 242 of the fourth transistor 24, and the voltage of the first transistor 21 by the fourth transistor 24. The coupling effect causes the first transistor 21 to be turned on; at this time, the first end 222 of the second transistor 22 floats to make the second transistor 22 non-conductive. The holes in the channels of the transistors 21, 23 will move from the second end 233 of the transistor 23 to the first end 212 of the first transistor 21 (as shown in the direction A of Figure 4, the solid circles represent electrons, hollow circles Representing the hole), the hole is accelerated in the vicinity of the junction of the first end 212 of the first transistor 21 by the acceleration of the transverse electric field in the channel to generate electrons and holes, and the electrons and holes are accelerated by the electric field. The impact free generates new electrons and holes, and a cumulative collapse occurs in the vicinity of the junction of the first end 212 of the first transistor 21. The electrons and holes are accelerated by the electric field to obtain a sufficiently high energy to become a hot carrier. After the thermal cavity has a high enough energy to overcome the potential energy barrier between Si-SiO 2 after the collision process, the vertical electric field between the gate 211 of the first transistor 21 and the channel will have an opportunity to be injected into the first The gate 211 of a transistor 21 is charged. Most of the holes in the channel flow into the first end 212 of the first transistor 21, and most of the electrons generated by the impact free are received by the electric field between the first end 212 of the first transistor 21 and the main doping well 20. The effect flows through the main doping well 20 to form a substrate current.

寫入邏輯1步驟包括:施加3V到該主摻雜井20;施加0V到該第三電晶體23的閘極231,施加3V到第三電晶體23的第二端233,使該第三電晶體23導通;施加-3V到該第二電晶體22的第一端222,施加0V到該第四電晶體24的第一端242,藉由第五電晶體25對第二電晶體22的電壓耦合效應,使得第二電晶體22導通;此時,該第一電晶體21的第一端212浮接,使第一電晶體21不導通。如同上述的說明,該第二電晶體22的第一端222發生累增崩潰產生熱載子,且該第二電晶體22的閘極221被注入部分熱電洞而帶有電荷。The step of writing logic 1 includes: applying 3V to the main doping well 20; applying 0V to the gate 231 of the third transistor 23, applying 3V to the second end 233 of the third transistor 23, and making the third electric The crystal 23 is turned on; applying -3V to the first end 222 of the second transistor 22, applying 0V to the first end 242 of the fourth transistor 24, and the voltage of the second transistor 22 by the fifth transistor 25. The coupling effect causes the second transistor 22 to be turned on; at this time, the first end 212 of the first transistor 21 is floated to make the first transistor 21 non-conductive. As described above, the first end 222 of the second transistor 22 undergoes a cumulative collapse to generate a hot carrier, and the gate 221 of the second transistor 22 is injected into a portion of the thermoelectric hole to carry a charge.

基於差動型的結構設計,當記憶體單元的第一電晶體及第二電晶體其中之一被寫入後,導致第一電晶體21和第二電晶體22臨界電壓值的相異。若有熱電洞注入至第一電晶體21的閘極211,將造成第一電晶體21臨界電壓值提高,使得第一電晶體21相較於第二電晶體22有較低的通道電流,反之亦然。在本實施例中,該記憶體單元的邏輯0定義為第二電晶體22的通道電流大於第一電晶體21的通道電流;邏輯1定義為第一電晶體21的通道電流大於第二電晶體22的通道電流。Based on the differential type structure design, when one of the first transistor and the second transistor of the memory cell is written, the threshold voltage values of the first transistor 21 and the second transistor 22 are different. If a thermoelectric hole is injected into the gate 211 of the first transistor 21, the threshold voltage of the first transistor 21 is increased, so that the first transistor 21 has a lower channel current than the second transistor 22, and vice versa. Also. In this embodiment, the logic 0 of the memory cell is defined as the channel current of the second transistor 22 is greater than the channel current of the first transistor 21; the logic 1 is defined as the channel current of the first transistor 21 is greater than the second transistor. 22 channel current.

參閱圖3,讀取資料步驟包括:施加3V到該主摻雜井20;施加1.8V到該第三電晶體23的閘極231,施加3V到該第三電晶體23的第二端233,使該第三電晶體導通;及施加2V到該第一電晶體21的第一端212及該第二電晶體22的第一端222,施加1V(讀取方式1)或1.5V(讀取方式2)到該第四電晶體24的第一端242,使該第一電晶體21及該第二電晶體22其中至少一者產生通道電流(圖中I1及I2)。此時,利用一感測放大器3接收該第一電晶體21及該第二電晶體22的通道電流並進行比較,即可產生一邏輯狀態輸出。Referring to FIG. 3, the step of reading data includes: applying 3V to the main doping well 20; applying 1.8V to the gate 231 of the third transistor 23, applying 3V to the second end 233 of the third transistor 23, Turning the third transistor on; and applying 2V to the first end 212 of the first transistor 21 and the first end 222 of the second transistor 22, applying 1V (read mode 1) or 1.5V (reading Mode 2) To the first end 242 of the fourth transistor 24, at least one of the first transistor 21 and the second transistor 22 generates a channel current (I1 and I2 in the figure). At this time, a channel current of the first transistor 21 and the second transistor 22 is received by a sense amplifier 3 and compared, and a logic state output is generated.

參閱圖3及圖5,圖5為沿著圖2中的I-I’線的剖面圖。抹除邏輯0步驟包括:施加3V到該主摻雜井20;施加0V到該第三電晶體23的閘極231,施加3V到第三電晶體23的第二端233,使該第三電晶體23導通;施加-3V到該第一電晶體21的第一端212,施加6V到該第四電晶體24的第一端242,藉由第四電晶體24對第一電晶體21的電壓耦合效應,使得第一電晶體21不導通;該第二電晶體22的第一端222浮接,使第二電晶體22不導通。此時第一電晶體21產生大量的漏電流,經由主摻雜井20流向第一電晶體21的第一端212,受到第一電晶體21的第一端212接面附近高電場的加速而在第一電晶體21的第一端212接面的附近造成撞擊游離而產生電子與電洞(如圖5中B方向所示)。經由撞擊產生的電子,受到第一端212接面附近高電場的加速而獲得足夠高的能量成為熱電子。換句話說,第一電晶體21發生碰穿效應產生熱載子。熱電子在經過碰撞過程之後,若仍具有足夠高的能量能夠克服Si-SiO2間的位能障,受到第一電晶體21的閘極211到通道間垂直電場的影響將有機會注入至第一電晶體21的閘極211中而消除電荷。顯然地,熱電子注入至第一電晶體21的閘極211中降低了第一電晶體21的臨界電壓值,使得通道電流增加,因此導致了更多的熱電子注入至第一電晶體21的閘極211中,使得通道電流逐漸增加。這個過程最終將導致記憶體單元的燒毀,因此在第一電晶體21旁串聯了該第三電晶體23的目的就是為了限制第一電晶體21的通道電流的大小,避免元件燒毀的情況發生。Referring to Figures 3 and 5, Figure 5 is a cross-sectional view taken along line I-I' of Figure 2 . The erase logic 0 step includes: applying 3V to the main doping well 20; applying 0V to the gate 231 of the third transistor 23, applying 3V to the second end 233 of the third transistor 23, causing the third The crystal 23 is turned on; -3V is applied to the first end 212 of the first transistor 21, 6V is applied to the first end 242 of the fourth transistor 24, and the voltage of the first transistor 21 is applied by the fourth transistor 24. The coupling effect causes the first transistor 21 to be non-conducting; the first end 222 of the second transistor 22 floats to make the second transistor 22 non-conductive. At this time, the first transistor 21 generates a large amount of leakage current, and flows to the first end 212 of the first transistor 21 via the main doping well 20, and is accelerated by the high electric field near the junction of the first end 212 of the first transistor 21. In the vicinity of the junction of the first end 212 of the first transistor 21, an impact is generated to generate electrons and holes (as shown by the direction B in Fig. 5). The electrons generated by the impact are accelerated by a high electric field near the junction of the first end 212 to obtain a sufficiently high energy to become hot electrons. In other words, the first transistor 21 has a breakdown effect to generate a hot carrier. After the collision of the hot electrons, if there is still enough energy to overcome the potential energy barrier between the Si-SiO2, the influence of the vertical electric field between the gate 211 of the first transistor 21 and the channel will have an opportunity to be injected into the first The gate 211 of the transistor 21 is removed to eliminate the charge. Obviously, the injection of hot electrons into the gate 211 of the first transistor 21 lowers the threshold voltage value of the first transistor 21, so that the channel current increases, thus causing more hot electrons to be injected into the first transistor 21. In the gate 211, the channel current is gradually increased. This process will eventually lead to the burning of the memory cells, so that the third transistor 23 is connected in series with the first transistor 21 in order to limit the magnitude of the channel current of the first transistor 21, and to avoid the occurrence of component burnout.

抹除邏輯1步驟包括:施加-3V到該主摻雜井20;施加0V到該第三電晶體23的閘極231,施加3V到第三電晶體23的第二端233,使該第三電晶體23導通;施加-3V到該第二電晶體22的第一端222,施加6V到該第四電晶體24的第一端242,藉由第五電晶體25對第二電晶體22的電壓耦合效應,使得第二電晶體22不導通;該第一電晶體21的第一端212浮接,使第一電晶體21不導通。如同上述的說明,該第二電晶體22發生碰穿效應產生熱載子,且該第二電晶體22的閘極221被注入部分熱電子而消除電荷。The erase logic 1 step includes: applying -3V to the main doping well 20; applying 0V to the gate 231 of the third transistor 23, applying 3V to the second end 233 of the third transistor 23, making the third The transistor 23 is turned on; -3V is applied to the first end 222 of the second transistor 22, 6V is applied to the first end 242 of the fourth transistor 24, and the second transistor 22 is applied to the second transistor 22 The voltage coupling effect causes the second transistor 22 to be non-conducting; the first end 212 of the first transistor 21 is floated to make the first transistor 21 non-conductive. As described above, the second transistor 22 is subjected to a breakdown effect to generate a hot carrier, and the gate 221 of the second transistor 22 is injected with a portion of the hot electrons to eliminate the charge.

當上述實施例是以標準0.18μm CMOS製程技術中的3.3V Normal PMOS電晶體設計時,該記憶體單元在初始未被寫入的情況下,操作於讀取方式1時,量測到第一電晶體21和第二電晶體22的通道電流分別約為8.81μA和7.86μA。操作於讀取方式2時,量測到第一電晶體21和第二電晶體22的通道電流分別約為2.31μA和2.03μA。When the above embodiment is designed with a 3.3V Normal PMOS transistor in a standard 0.18μm CMOS process technology, the memory cell is measured in the first read mode 1 when the memory cell is initially not written. The channel currents of the transistor 21 and the second transistor 22 are approximately 8.81 μA and 7.86 μA, respectively. When the mode 2 is read, the channel currents of the first transistor 21 and the second transistor 22 are measured to be about 2.31 μA and 2.03 μA, respectively.

於寫入邏輯0後,操作於讀取方式1時,量測到第一電晶體21和第二電晶體22的通道電流分別約為2.59μA和8.97μA。操作於讀取方式2時,量測到第一電晶體21和第二電晶體22的通道電流分別約為0.22μA和2.15μA。After the logic 0 is written, when the read mode 1 is operated, the channel currents of the first transistor 21 and the second transistor 22 are measured to be about 2.59 μA and 8.97 μA, respectively. When the mode 2 is read, the channel currents of the first transistor 21 and the second transistor 22 are measured to be about 0.22 μA and 2.15 μA, respectively.

於抹除邏輯0後,操作於讀取方式1時,量測到第一電晶體21和第二電晶體22的通道電流分別約為9.53μA和7.59μA,操作於讀取方式2時,量測到第一電晶體21和第二電晶體22的通道電流分別約為2.47μA和1.97μA。After the logic 0 is erased, when the read mode 1 is operated, the channel currents of the first transistor 21 and the second transistor 22 are measured to be about 9.53 μA and 7.59 μA, respectively, and when the read mode 2 is operated, the amount is The channel currents of the first transistor 21 and the second transistor 22 were measured to be about 2.47 μA and 1.97 μA, respectively.

於寫入邏輯1後,操作於讀取方式1時,量測到第一電晶體21和第二電晶體22的通道電流分別約為10.7μA和1.97μA。操作於讀取方式2時,量測到第一電晶體21和第二電晶體22的通道電流分別約為2.6μA和0.15μA。After the logic 1 is written, when the read mode 1 is operated, the channel currents of the first transistor 21 and the second transistor 22 are measured to be about 10.7 μA and 1.97 μA, respectively. When the mode 2 is read, the channel currents of the first transistor 21 and the second transistor 22 are measured to be about 2.6 μA and 0.15 μA, respectively.

於抹除邏輯1後,操作於讀取方式1時,量測到第一電晶體21和第二電晶體22的通道電流分別約為8.94μA和8.24μA,操作於讀取方式2時,量測到第一電晶體21和第二電晶體22的通道電流分別約為2.34μA和2.26μA。After the logic 1 is erased, when the read mode 1 is operated, the channel currents of the first transistor 21 and the second transistor 22 are measured to be approximately 8.94 μA and 8.24 μA, respectively, and when the read mode 2 is operated, the amount is The channel currents of the first transistor 21 and the second transistor 22 were measured to be about 2.34 μA and 2.26 μA, respectively.

綜上所述,上述實施例藉由結構上的改變及利用碰穿效應產生熱載子注入的方式完成抹除操作,相對於該第三電晶體23的第二端233的3V而言,抹除操作需升壓3V(例如該第四電晶體24的第一端242的6V)及降壓6V(例如該第一電晶體21的第一端212的-3V),低於先前技術於抹除操作時需升壓9.5V(例如該第四電晶體14的第一端142相對於該第三電晶體13的第二端133),在外部電路的設計複雜度上,升壓至9.5V設計較複雜。此外,上述實施例藉由結構上的改變及利用累增崩潰產生熱載子注入的方式完成寫入操作,相對於該第三電晶體23的第二端233的3V而言,寫入操作需降壓6V(例如該第一電晶體21的第一端212的-3V),也低於先前技術於寫入操作時需升壓7V(例如該第一電晶體11的第一端112相對於該第三電晶體13的第二端133),同樣地,由於只需降壓6V,外部電路也比升壓至7V容易設計,故確實能達成本發明之目的。In summary, the above embodiment performs the erasing operation by means of a structural change and a hot carrier injection by the bumping effect, relative to the 3V of the second end 233 of the third transistor 23, In addition to the operation, it is required to boost 3V (for example, 6V of the first end 242 of the fourth transistor 24) and a step-down of 6V (for example, -3V of the first end 212 of the first transistor 21), which is lower than the prior art In addition to the operation, it is required to boost 9.5V (for example, the first end 142 of the fourth transistor 14 is opposite to the second end 133 of the third transistor 13), and the voltage is boosted to 9.5V in the design complexity of the external circuit. The design is more complicated. In addition, the above embodiment performs the write operation by means of a structural change and a hot carrier injection by the cumulative collapse, and the write operation is required with respect to the 3V of the second end 233 of the third transistor 23. The step-down of 6V (eg, -3V of the first terminal 212 of the first transistor 21) is also lower than the prior art required to boost 7V during the write operation (eg, the first end 112 of the first transistor 11 is relative to Similarly, since the second end 133) of the third transistor 13 is only required to be stepped down by 6 V, the external circuit is also easier to design than boosting to 7 V, and the object of the present invention can be achieved.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

20...主摻雜井20. . . Main doping well

21...第一電晶體twenty one. . . First transistor

211...閘極211. . . Gate

212...第一端212. . . First end

213...第二端213. . . Second end

22...第二電晶體twenty two. . . Second transistor

221...閘極221. . . Gate

222...第一端222. . . First end

223...第二端223. . . Second end

23...第三電晶體twenty three. . . Third transistor

231...閘極231. . . Gate

232...第一端232. . . First end

233...第二端233. . . Second end

24...第四電晶體twenty four. . . Fourth transistor

240...次摻雜井240. . . Secondary doping well

241...閘極241. . . Gate

242...第一端242. . . First end

243...第二端243. . . Second end

25...第五電晶體25. . . Fifth transistor

250...次摻雜井250. . . Secondary doping well

251...閘極251. . . Gate

252...第一端252. . . First end

253...第二端253. . . Second end

3...感測放大器3. . . Sense amplifier

圖1是一上視圖,說明習知一差動型非揮發性記憶體單元的結構;Figure 1 is a top view showing the structure of a conventional differential non-volatile memory unit;

圖2是一上視圖,說明本發明差動式非揮發性記憶體單元之較佳實施例的結構;Figure 2 is a top plan view showing the structure of a preferred embodiment of the differential non-volatile memory cell of the present invention;

圖3是該較佳實施例的電路圖;Figure 3 is a circuit diagram of the preferred embodiment;

圖4是沿圖2中的I-I’線的剖面圖,說明本發明操作一差動型非揮發性記憶體單元的方法之較佳實施例的寫入操作原理;及Figure 4 is a cross-sectional view taken along line I-I' of Figure 2, illustrating the principle of the write operation of the preferred embodiment of the method of operating a differential non-volatile memory cell of the present invention;

圖5是沿圖2中的I-I’線的剖面圖,說明該較佳實施例的抹除操作原理。Figure 5 is a cross-sectional view taken along line I-I' of Figure 2 illustrating the principle of the erasing operation of the preferred embodiment.

20...主摻雜井20. . . Main doping well

21...第一電晶體twenty one. . . First transistor

211...閘極211. . . Gate

212...第一端212. . . First end

213...第二端213. . . Second end

22...第二電晶體twenty two. . . Second transistor

221...閘極221. . . Gate

222...第一端222. . . First end

223...第二端223. . . Second end

23...第三電晶體twenty three. . . Third transistor

231...閘極231. . . Gate

232...第一端232. . . First end

233...第二端233. . . Second end

24...第四電晶體twenty four. . . Fourth transistor

240...次摻雜井240. . . Secondary doping well

241...閘極241. . . Gate

242...第一端242. . . First end

243...第二端243. . . Second end

25...第五電晶體25. . . Fifth transistor

250...次摻雜井250. . . Secondary doping well

251...閘極251. . . Gate

252...第一端252. . . First end

253...第二端253. . . Second end

Claims (9)

一種差動型非揮發性記憶體單元,包含:一第一電晶體,包括一用以儲存電荷的閘極、一第一端及一第二端;一第二電晶體,包括一用以儲存電荷的閘極、一第一端,及一與該第一電晶體之第二端耦接的第二端;一第三電晶體,包括一閘極、一與該第一電晶體之第二端耦接的第一端,及一第二端,用以控制該第一電晶體及該第二電晶體的通道電流;一第四電晶體,包括一與該第一電晶體之閘極耦接的閘極,以及互相短路的一第一端及一第二端,用以耦合其第一端上的電壓到該第一電晶體之閘極;及一第五電晶體,包括一與該第二電晶體之閘極耦接的閘極,以及互相短路並與該第四電晶體之第一端耦接的一第一端及一第二端,用以耦合其第一端上的電壓到該第二電晶體之閘極;其中,該第一電晶體、該第二電晶體及該第三電晶體是製作於一N型摻雜井上,該第四電晶體及該第五電晶體是製作於其他N型摻雜井上,該等電晶體是P型電晶體。A differential non-volatile memory unit includes: a first transistor, including a gate for storing charge, a first end and a second end; and a second transistor, including a device for storing a gate of the charge, a first end, and a second end coupled to the second end of the first transistor; a third transistor comprising a gate, a second portion of the first transistor a first end coupled to the end, and a second end for controlling channel currents of the first transistor and the second transistor; a fourth transistor comprising a gate coupled to the first transistor a gate connected, and a first end and a second end shorted to each other for coupling a voltage on the first end to the gate of the first transistor; and a fifth transistor, including a a gate coupled to the gate of the second transistor, and a first end and a second end shorted to each other and coupled to the first end of the fourth transistor for coupling the voltage on the first end thereof a gate to the second transistor; wherein the first transistor, the second transistor, and the third transistor are fabricated in an N-type doping well The fourth transistor and the fifth transistor are fabricated on other N-type doping wells, and the transistors are P-type transistors. 依據申請專利範圍第1項所述之記憶體單元,其中,該第四電晶體之閘極面積大於該第一電晶體的閘極面積,該第五電晶體之閘極面積大於該第二電晶體的閘極面積。The memory unit of claim 1, wherein a gate area of the fourth transistor is greater than a gate area of the first transistor, and a gate area of the fifth transistor is greater than the second The gate area of the crystal. 一種操作一差動型非揮發性記憶體單元的方法,該記憶體單元包含製作於一N摻雜井上的一第一電晶體、一第二電晶體及一第三電晶體,以及製作於其它N型摻雜井上的一第四電晶體及一第五電晶體,該第一電晶體包括一用以儲存電荷的閘極、一第一端及一第二端,該第二電晶體包括一用以儲存電荷的閘極、一第一端,及一與該第一電晶體之第二端耦接的第二端,該第三電晶體包括一閘極、一與該第一電晶體之第二端耦接的第一端,及一第二端,用以控制該第一電晶體及該第二電晶體的通道電流,該第四電晶體包括一與該第一電晶體之閘極耦接的閘極,以及互相短路的一第一端及一第二端,用以耦合其第一端上的電壓到該第一電晶體之閘極,該第五電晶體包括一與該第二電晶體之閘極耦接的閘極,以及互相短路並與該第四電晶體之第一端耦接的一第一端及一第二端,用以耦合其第一端上的電壓到該第二電晶體之閘極,該等電晶體是P型電晶體,該方法包含以下步驟:抹除邏輯0步驟:施加多個電壓分別到該記憶體單元的該第一電晶體的第一端、該第三電晶體的閘極與第二端、該第四電晶體的第一端及製作有該第一電晶體的該N型摻雜井,該等電壓足以使該第一電晶體發生碰穿效應產生熱載子,且使該第一電晶體的閘極被注入部分熱載子而消除電荷;及抹除邏輯1步驟:施加多個電壓分別到該記憶體單元的該第二電晶體的第一端、該第三電晶體的閘極與第二端、該第四電晶體的第一端及製作有該第一電晶體的該N型摻雜井,該等電壓足以使該第二電晶體發生碰穿效應產生熱載子,且使該第二電晶體的閘極被注入部分熱載子而消除電荷。A method of operating a differential non-volatile memory cell, the memory cell comprising a first transistor, a second transistor, and a third transistor fabricated on an N-doped well, and fabricated in other a fourth transistor and a fifth transistor on the N-type doping well, the first transistor includes a gate for storing electric charge, a first end and a second end, and the second transistor includes a second transistor a gate for storing a charge, a first end, and a second end coupled to the second end of the first transistor, the third transistor including a gate, a first transistor a first end coupled to the second end, and a second end for controlling channel currents of the first transistor and the second transistor, the fourth transistor including a gate of the first transistor a coupled gate, and a first end and a second end shorted to each other for coupling a voltage on the first end thereof to a gate of the first transistor, the fifth transistor including a first a gate coupled to the gate of the second transistor, and a first short circuit coupled to the first end of the fourth transistor And a second end for coupling a voltage on the first end thereof to a gate of the second transistor, the transistor being a P-type transistor, the method comprising the steps of: erasing logic 0: applying a plurality of voltages respectively reaching a first end of the first transistor of the memory unit, a gate and a second end of the third transistor, a first end of the fourth transistor, and the first transistor is fabricated The N-type doping well, the voltage is sufficient for the first transistor to have a breakdown effect to generate a hot carrier, and the gate of the first transistor is injected with a portion of the hot carrier to eliminate the charge; and erasing Logic 1 step: applying a plurality of voltages to the first end of the second transistor of the memory unit, the gate and the second end of the third transistor, the first end of the fourth transistor, and The N-type doping well of the first transistor, the voltage is sufficient to cause a breakdown effect of the second transistor to generate a hot carrier, and the gate of the second transistor is injected into a portion of the hot carrier to eliminate Charge. 依據申請專利範圍第3項所述之方法,其中,在抹除邏輯0步驟中,該等施加的電壓是使該第三電晶體導通,以限制流過第三電晶體的電流,且使該第四電晶體耦合其第一端上的電壓使該第一電晶體不導通。The method of claim 3, wherein in the step of erasing logic 0, the applied voltage is to turn on the third transistor to limit the current flowing through the third transistor, and The fourth transistor is coupled to a voltage at its first end such that the first transistor is non-conducting. 依據申請專利範圍第3項所述之方法,其中,在抹除邏輯1步驟中,該等施加的電壓是使該第三電晶體導通,以限制流過第三電晶體的電流,且使該第五電晶體耦合其第一端上的電壓使該第二電晶體不導通。The method of claim 3, wherein in the erasing logic 1 step, the applied voltage is to turn on the third transistor to limit the current flowing through the third transistor, and The fifth transistor is coupled to the voltage at its first terminal such that the second transistor is non-conducting. 依據申請專利範圍第3項所述之方法,還包含以下步驟:寫入邏輯0步驟:施加多個電壓分別到該記憶體單元的該第一電晶體的第一端、該第三電晶體的閘極與第二端、該第四電晶體的第一端及製作有該第一電晶體的該N型摻雜井,該等電壓足以使該第一電晶體的第一端發生累增崩潰產生熱載子,且使該第一電晶體的閘極被注入部分熱載子而帶有電荷;及寫入邏輯1步驟:施加多個電壓分別到該記憶體單元的該第二電晶體的第一端、該第三電晶體的閘極與第二端、該第四電晶體的第一端及製作有該第一電晶體的該N型摻雜井,該等電壓足以使該第二電晶體的第一端發生累增崩潰產生熱載子,且使該第二電晶體的閘極被注入部分熱載子而帶有電荷。According to the method of claim 3, the method further includes the step of: writing a logic 0: applying a plurality of voltages to the first end of the first transistor of the memory unit, the third transistor a gate and a second end, a first end of the fourth transistor, and the N-type doping well formed with the first transistor, the voltages being sufficient to cause a cumulative collapse of the first end of the first transistor Generating a hot carrier, and causing a gate of the first transistor to be injected with a portion of the hot carrier to carry a charge; and writing a logic 1 step: applying a plurality of voltages to the second transistor of the memory cell a first end, a gate and a second end of the third transistor, a first end of the fourth transistor, and the N-type doping well formed with the first transistor, the voltages being sufficient for the second The first end of the transistor undergoes a cumulative collapse to generate a hot carrier, and the gate of the second transistor is injected with a portion of the hot carrier to carry a charge. 依據申請專利範圍第6項所述之方法,其中,在該寫入邏輯0步驟中,該等施加的電壓是使該第三電晶體導通,且使該第四電晶體耦合其第一端上的電壓使該第一電晶體導通。The method of claim 6, wherein in the writing logic 0 step, the applied voltage is to turn on the third transistor, and the fourth transistor is coupled to the first end thereof. The voltage causes the first transistor to conduct. 依據申請專利範圍第6項所述之方法,其中,在該寫入邏輯1步驟中,該等施加的電壓是使該第三電晶體導通,且使該第五電晶體耦合其第一端上的電壓使該第二電晶體導通。The method of claim 6, wherein in the writing logic 1 step, the applied voltage is to turn on the third transistor, and the fifth transistor is coupled to the first end thereof The voltage causes the second transistor to conduct. 依據申請專利範圍第3項所述之方法,還包含以下步驟:讀取資料步驟:施加多個電壓分別到該記憶體單元的該第一電晶體的第一端、該第二電晶體的第一端、該第三電晶體的閘極與第二端、該第四電晶體的第一端及製作有該第一電晶體的該N型摻雜井,該等電壓足以使該第一電晶體及該第二電晶體至少其中一者及該第三電晶體產生通道電流。According to the method of claim 3, the method further includes the step of: reading a data: applying a plurality of voltages to the first end of the first transistor of the memory unit, and the second transistor An end, a gate and a second end of the third transistor, a first end of the fourth transistor, and the N-type doping well on which the first transistor is formed, the voltages being sufficient to make the first At least one of the crystal and the second transistor and the third transistor generate a channel current.
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