TWI428689B - Manufacturing methods of photomask and microstructure by using laser dragging process, and microstructure - Google Patents

Description

Photomask and three-dimensional microstructure manufacturing method and stereo microstructure using laser drag method

The invention relates to a method for manufacturing a reticle and a three-dimensional microstructure, in particular to a method for manufacturing a reticle and a three-dimensional microstructure using a laser drag method.

The laser drag micro-machining method uses a reticle projection technology with a precision moving platform to make the patterns on the reticle superimpose in different directions and depths on the surface of the substrate to produce a variety of three-dimensional microstructures. The laser drag micro-machining method can quickly and massively produce a three-dimensional microstructure, and the shape of the three-dimensional structure is completely determined by the light-transmissive shape on the reticle, so the design of the reticle is the most critical part of the drag method.

Laser dragging is most commonly used in the fabrication of microlens arrays, but most researchers have defined the reticle topography with a quadratic curve, and the drag dimension used is only orthogonal secondary drag, the resulting microlens structure Both are asymmetrical and topographical and cannot be accurately predicted, so they cannot be used in the sophisticated optical industry. That is to say, the existing technology cannot accurately define the structural morphology produced, and it is impossible to predict a more complicated microstructure. Therefore, if the desired three-dimensional microstructure is to be produced and the axis is symmetrical, the reticle pattern must be corrected to achieve the desired microstructure, so that the opportunity of the laser drag method in the optoelectronic industry can be increased.

Therefore, how to provide a method for manufacturing a reticle and a three-dimensional microstructure using a laser drag method can accurately correct a reticle pattern to produce a desired three-dimensional microstructure, which is one of the current important topics in the industry.

In view of the above problems, it is an object of the present invention to provide a method of manufacturing a photomask and a three-dimensional microstructure capable of producing a desired three-dimensional microstructure by correcting a mask pattern.

In order to achieve the above object, a method for manufacturing a reticle using a laser drag method according to the present invention comprises: a movement determining step of determining a direction and a number of times a substrate moves a substrate relative to at least one reticle; Determining a step of determining a feature of a stereoscopic microstructure on the substrate; an analysis step of calculating a feature of the reticle using a numerical analysis method according to the direction, the number of times, and the appearance feature; and a production step, The reticle is fabricated according to the characteristics of the reticle.

In an embodiment, in the moving determining step, the machine moves the substrate relative to the reticle according to at least two directions, and the directions are orthogonal or at an angle.

In one embodiment, in the movement determining step, the machine moves the substrate relative to the mask at least twice.

In an embodiment, in the moving determining step, the machine moves the substrate relative to the plurality of masks in accordance with at least one direction.

In one embodiment, in the movement determining step, the machine moves the substrate relative to the plurality of reticle at least once.

In one embodiment, the stereoscopic microstructure features are elliptical, conical, pyramidal, asymmetrical, axisymmetric, clumped, or other appearance.

In an embodiment, the numerical analysis method comprises a simplex method.

In one embodiment, the appearance features are represented by one program.

In an embodiment, the manufacturing method further comprises a laser light determining step of determining the intensity and the irradiation time of the laser light, and in the analyzing step, calculating the intensity and the irradiation time of the laser light using a numerical analysis method. The characteristics of the reticle.

In order to achieve the above object, a method for manufacturing a three-dimensional microstructure using a laser drag method according to the present invention comprises: a movement determining step of determining a direction and a number of times a substrate moves a substrate relative to at least one mask; The structure determining step determines the appearance characteristics of a three-dimensional microstructure on the substrate; an analysis step is based on the direction, the number of times, and the appearance feature, using a numerical analysis method to calculate the characteristics of the mask; a production step, Manufacturing a reticle according to the characteristics of the reticle; disposing the substrate on the machine; arranging the reticle on the substrate; and determining the direction and number of times determined by the substrate along the movement determining step by the machine Moving in sequence, during the movement, a laser beam is irradiated through the reticle to illuminate the substrate, and the stereoscopic microstructure is generated on the substrate by the superposition of the laser light.

To achieve the above object, a three-dimensional microstructure obtained by applying the above manufacturing method according to the present invention may be an axisymmetric microstructure, such as a bullet type or a head type axisymmetric microstructure.

To achieve the above object, a three-dimensional microstructure obtained by applying the above manufacturing method according to the present invention is a polyhedral microstructure, such as a hexahedral pyramid microstructure, a multi-layer pyramid microstructure or a multi-layer curved microstructure.

As described above, in the manufacturing method of the reticle of the present invention, unlike the conventional method, the present invention first determines the direction and the number of times a substrate moves relative to at least one reticle, and determines a stereoscopic microstructure. The appearance features on the substrate are then calculated using a numerical analysis method based on the above-mentioned directions, times, and appearance features, and then the mask is fabricated according to the characteristics of the mask. In this way, after the reticle is manufactured, the machine is caused to move the substrate in the direction and the number of times determined in the movement determining step according to the previously determined parameters, and a laser beam is passed through during the moving process. The photomask illuminates the substrate, and the stereoscopic microstructure, that is, the expected three-dimensional microstructure, can be produced on the substrate by the superposition of the above-mentioned laser light.

In addition, the complexity of the structure can be increased by the present invention to process elliptical, conical, pyramidal, or even complex three-dimensional microstructures of symmetry or asymmetry. In addition, the invention can increase the dimension of the dragging, for example, by three times of pulling, so that the light transmissive area of the reticle is superimposed in more dimensions for laser processing, and the micro-structure of the hexagonal closest packing is fabricated, so that the structure The filling rate can be increased, and the key is that the desired structural morphology can be processed, thus creating great economic value.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a method of manufacturing a reticle and a three-dimensional microstructure using a laser drag method according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings, wherein the same elements will be described with the same reference numerals.

1 is a schematic diagram showing the steps of a method for manufacturing a reticle using a laser drag method according to a preferred embodiment of the present invention, which includes steps S01 to S04. 2 is a schematic diagram showing a hypothetical situation of a method of manufacturing a reticle according to a preferred embodiment of the present invention. Briefly described here, the laser dragging process (LDP) uses a reticle projection technique with a precision moving platform to allow the graphics on the reticle to be superimposed in different directions and depths on the substrate surface. A variety of three-dimensional microstructures. The three-dimensional microstructure is, for example, a lens or other light guiding element. Please refer to FIG. 1 and FIG. 2 for explaining a method of manufacturing a photomask according to a preferred embodiment of the present invention.

First, step S01 is a movement determining step of determining the direction and number of times a substrate 101 moves a substrate 102 relative to at least one of the masks 103. Here, the direction and number of times the substrate 102 moves relative to the mask 103 are determined in advance. The substrate 102 can be moved along the XY plane on the machine table 101. The machine table 101 can move the substrate 102 relative to the reticle 103 according to a single direction or at least two directions, and the directions are orthogonal or at an angle. For example, the machine 101 moves the substrate 102 first in the X-axis direction and then in the Y-axis direction, which is a secondary drag; or the machine 101 moves the substrate 102 first in the X-axis direction and then in the counterclockwise direction 60. Move in the direction of the degree and move it in the direction of 60 degrees counterclockwise. This is three times of dragging. Of course, this embodiment can apply four times of dragging, five times of dragging, and the like.

Step S02 is a microstructure determining step of determining a three-dimensional microstructure (not shown) on the substrate 102. In this step, the stereomicrostructure has not actually been formed on the substrate 102, but is a stereoscopic microstructure that the manufacturer desires. The present invention does not limit the topographical features of the three-dimensional microstructures, which may be, for example, elliptical, conical, pyramidal, asymmetrical, axisymmetric, clumped, or other closely packed or otherwise. Appearance features can be represented by at least one program.

Step S03 is an analysis step of calculating the characteristics of the reticle by using a numerical analysis method according to the direction, the number of times, and the appearance characteristics. After the above-described decision step, the direction, the number of times the substrate is moved, and the appearance of the three-dimensional microstructure to be produced are set. The characteristics of the desired mask can be calculated by numerical analysis. The present invention does not particularly limit the kind of the numerical analysis method, and for example, a simplex method can be used. The features of the reticle can be represented, for example, by at least one program.

Step S04 is a production step of fabricating the reticle according to the characteristics of the reticle. After the features of the reticle are determined, the desired reticle can be fabricated in accordance with this feature. The features of the reticle can for example be reduced to a parametric solution of the equation.

Since the present invention utilizes a numerical analysis method to solve the characteristics of the reticle under some predetermined conditions, the present invention can be applied to a more complicated situation. In addition to being applicable to multiple directions and multiple drags, the present invention is also applicable to the case of multiple masks. That is, in the movement determining step, the machine moves the substrate relative to the plurality of masks in accordance with at least one direction or at least once relative to the plurality of masks. As shown in FIG. 3, in a movement determining step, the direction and number of times the machine moves the substrate relative to the mask 104 can be determined, and the direction and number of times the table moves the substrate relative to the other mask 105 can be determined. Then, in the analysis step, the features of the reticle 104, 105 can be solved.

In addition, the manufacturing method may further include a laser light determining step of determining the intensity of the laser light and the irradiation time, and in the analyzing step, calculating the mask by using a numerical analysis method according to the intensity of the laser light and the irradiation time. Characteristics. Due to variations in the intensity of the laser light and the illumination time, the characteristics of the resulting three-dimensional microstructure are also affected. Accordingly, in this embodiment, the intensity of the laser light and the irradiation time can be set in advance, and the numerical analysis method can calculate the characteristics of the reticle according to the intensity of the laser light, the irradiation time, the number of times of substrate movement, and the direction.

With the above manufacturing method of the reticle of the present embodiment, a desired reticle or a plurality of reticle can be manufactured for the intended three-dimensional microstructure. After the reticle is manufactured, the reticle can be used to produce a three-dimensional microstructure. The method for manufacturing a three-dimensional microstructure includes sequentially moving the substrate along a direction and a number of times determined by the movement determining step, and moving a laser beam through the mask to illuminate the substrate during the moving process. The three-dimensional microstructure is produced on the substrate by the superposition of the above-described laser light. In the method of manufacturing a three-dimensional microstructure, the substrate is moved in accordance with the number and direction determined by the previous determination step, so that the desired three-dimensional microstructure can be produced by the superposition of the laser light.

Of course, if a plurality of reticle is considered in the movement determining step (as shown in FIG. 3), the corresponding reticle needs to be replaced in the manufacturing method of the three-dimensional microstructure. Further, in consideration of the intensity of the laser light and the irradiation time, it is necessary to adjust the laser light source in accordance with the intensity of the laser light and the irradiation time in the method of manufacturing the three-dimensional microstructure.

Hereinafter, a method of manufacturing the photomask of the present invention will be described with a practical example.

4 is a top plan view of the contemplated three-dimensional microstructures 106, and FIG. 5 is a schematic view of a perspective view of the three-dimensional microstructures 106. Here, the three-dimensional microstructure 106 is exemplified by an axially symmetric semi-spherical ball. In this embodiment, in the movement determining step, the substrate is determined to move three times with respect to a mask, and the directions of the movements are different by 60 degrees, as shown in FIG. 4, the first pulling direction, the second pulling direction, and the third. Drag the direction. In the microstructure determining step, it is determined that the stereoscopic structure 106 has a semi-spherical feature, which can be represented by a spherical equation. Thereby, in the analyzing step, the characteristics of the reticle can be calculated according to the direction, the number of times and the appearance feature, and then the reticle is manufactured according to the characteristics of the reticle in the production step. FIG. 6 is a schematic view showing a part of the reticle 107, and the reticle 107 has a semicircular light transmitting portion 108.

After the reticle 107 is formed, the substrate can be sequentially moved in the direction and the number of times determined by the movement determining step by the machine. During the moving process, a laser beam is irradiated through the reticle and the lens to illuminate the substrate. The superposition of the above-described laser light produces a three-dimensional microstructure on the substrate. 7A is a schematic top view of the three-dimensional microstructure obtained by the first pulling, FIG. 7B is a schematic view of a perspective of the three-dimensional microstructure obtained by the first pulling; FIG. 8A is a three-dimensional drawing obtained by the second pulling FIG. 8B is a schematic view showing a perspective view of the three-dimensional microstructure obtained by the second pulling; FIG. 9A is a top view of the three-dimensional microstructure obtained by the third pulling, and FIG. 9B is a third drawing. Schematic diagram of one of the perspectives of the three-dimensional microstructure obtained by the second drag. Thereby, an expected three-dimensional microstructure as shown in FIG. 5 can be produced.

The three-dimensional microstructure produced by the method for manufacturing a three-dimensional microstructure using the laser drag method of the present embodiment will be exemplified below.

The three-dimensional microstructure is, for example, an axisymmetric microstructure, which is, for example, a bullet-type axisymmetric microstructure as shown in FIGS. 10A and 10B, or a hammer-type axisymmetric microstructure as shown in FIGS. 11A and 11B.

The three-dimensional microstructures are, for example, polyhedral microstructures, such as the hexahedral corner pillar microstructures shown in Figures 12A and 12B, or the multi-layer corner pillar microstructures shown in Figures 13A and 13B, or Figures 14A and 14B. Multi-level surface microstructure.

In summary, in the manufacturing method of the reticle of the present invention, unlike the conventional method, the present invention first determines the direction and the number of times a substrate moves relative to at least one reticle, and determines a stereoscopic microstructure. The appearance features on the substrate are then calculated using a numerical analysis method based on the above-mentioned directions, times, and appearance features, and then the mask is fabricated according to the characteristics of the mask. In this way, after the reticle is manufactured, the machine is caused to move the substrate in the direction and the number of times determined in the movement determining step according to the previously determined parameters, and a laser beam is passed through during the moving process. The photomask illuminates the substrate, and the stereoscopic microstructure, that is, the expected three-dimensional microstructure, can be produced on the substrate by the superposition of the above-mentioned laser light.

In addition, the complexity of the structure can be increased by the present invention to process elliptical, conical, pyramidal, and even asymmetrical three-dimensional microstructures. In addition, the invention can increase the dimension of the dragging, for example, by three times of pulling, so that the light transmissive area of the reticle is superimposed in more dimensions for laser processing, and the micro-structure of the hexagonal closest packing is fabricated, so that the structure The filling rate can be increased, and the key is that the desired structural morphology can be processed, thus creating great economic value.

The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

101. . . Machine

102. . . Substrate

103～105,107. . . Mask

106. . . Stereo microstructure

108. . . Translucent part

S01～S04. . . Steps of manufacturing the mask

1 is a schematic view showing the steps of a method for manufacturing a reticle using a laser drag method according to a preferred embodiment of the present invention;

2 and FIG. 3 are schematic diagrams showing a hypothetical situation of a method of manufacturing a reticle according to a preferred embodiment of the present invention;

4 is a top plan view of a contemplated three-dimensional microstructure according to a preferred embodiment of the present invention;

Figure 5 is a schematic view of a perspective view of the three-dimensional microstructure of Figure 4;

Figure 6 is a partial schematic view of a reticle produced by the reticle manufacturing method of the preferred embodiment of the present invention;

7A and FIG. 7B are schematic diagrams showing the three-dimensional microstructure obtained by the first method of manufacturing the reticle according to the preferred embodiment of the present invention;

8A and FIG. 8B are schematic diagrams showing the three-dimensional microstructure obtained by the second method of manufacturing the reticle according to the preferred embodiment of the present invention;

9A and FIG. 9B are schematic diagrams showing the three-dimensional microstructure obtained by the third method of manufacturing the reticle according to the preferred embodiment of the present invention;

FIG. 10A is a top plan view showing a three-dimensional microstructure produced by the method for manufacturing a three-dimensional microstructure using the laser drag method of the embodiment; FIG.

Figure 10B is a schematic view of a perspective view of the three-dimensional microstructure of Figure 10A;

11A is a top plan view showing another three-dimensional microstructure produced by the method for manufacturing a three-dimensional microstructure using the laser drag method of the embodiment;

Figure 11B is a schematic view of a perspective view of the three-dimensional microstructure of Figure 11A;

12A is a top plan view showing another three-dimensional microstructure produced by the method for manufacturing a three-dimensional microstructure using the laser drag method of the embodiment;

12B is a schematic view of a perspective view of the three-dimensional microstructure of FIG. 10A;

FIG. 13A is a top plan view showing another three-dimensional microstructure produced by the method for manufacturing a three-dimensional microstructure using the laser drag method of the embodiment; FIG.

Figure 13B is a schematic view of a perspective view of the three-dimensional microstructure of Figure 13A;

14A is a top plan view showing another three-dimensional microstructure produced by the method for manufacturing a three-dimensional microstructure using the laser drag method of the present embodiment;

Figure 14B is a schematic illustration of a perspective view of the three-dimensional microstructure of Figure 14A.

S01～S04. . . Steps of manufacturing the mask

Claims (14)

A method for manufacturing a reticle using a laser drag method, comprising: a movement determining step of determining a direction and a number of times a substrate moves relative to at least one reticle; and a microstructure determining step determining a stereo micro a feature on the substrate; an analysis step of calculating a feature of the reticle using a numerical analysis method according to the direction, the number of times, and the appearance feature; and a production step based on the feature of the reticle Out of the mask. The manufacturing method of claim 1, wherein in the moving determining step, the machine moves the substrate relative to the reticle according to at least two directions, and the directions are orthogonal or at an angle. The manufacturing method according to claim 1 or 2, wherein in the moving determining step, the machine moves the substrate at least twice relative to the mask. The manufacturing method of claim 1, wherein in the moving determining step, the machine moves the substrate relative to the plurality of masks in at least one direction. The manufacturing method of claim 1, wherein in the moving determining step, the machine moves the substrate relative to the plurality of masks at least once. The manufacturing method according to claim 1, wherein the stereoscopic microstructure features ellipse, cone, pyramid, asymmetry, axis symmetry, and the closest angle of the vertical angle. The manufacturing method according to claim 1, wherein the numerical analysis method comprises a simplex method. The manufacturing method of claim 1, wherein the appearance feature is represented by at least one program. The manufacturing method according to claim 1, further comprising: a laser light determining step of determining a intensity of the laser light and an irradiation time, and in the analyzing step, further determining the intensity and the irradiation time of the laser light. The numerical analysis method is used to calculate the characteristics of the reticle. A method for manufacturing a three-dimensional microstructure using a laser drag method, comprising: a movement determining step of determining a direction and a number of times a substrate moves relative to at least one mask; and a microstructure determining step determining a stereo The microstructure is characterized by the appearance on the substrate; an analysis step is based on the direction, the number of times, and the appearance feature, using a numerical analysis method to calculate the feature of the reticle; a production step is based on the feature of the reticle The reticle is disposed on the machine table; the reticle is disposed on the substrate; and the substrate is sequentially moved by the machine along the direction and the number of times determined in the movement determining step, During the moving process, a laser beam is irradiated through the reticle to illuminate the substrate, and the stereoscopic microstructure is generated on the substrate by the superposition of the laser light. A three-dimensional microstructure produced by the manufacturing method of claim 10, which is an axisymmetric microstructure. The three-dimensional microstructure according to claim 11 is a bullet-type or a head-shaped axisymmetric microstructure. A three-dimensional microstructure produced by the manufacturing method of claim 10, which is a polyhedral microstructure. The three-dimensional microstructure as described in claim 13 is a hexahedral pyramid microstructure, a multi-level pyramid microstructure or a multi-layer curved microstructure.