TWI422830B - - Google Patents

Info

Publication number
TWI422830B
TWI422830B TW98144856A TW98144856A TWI422830B TW I422830 B TWI422830 B TW I422830B TW 98144856 A TW98144856 A TW 98144856A TW 98144856 A TW98144856 A TW 98144856A TW I422830 B TWI422830 B TW I422830B
Authority
TW
Taiwan
Application number
TW98144856A
Other languages
Chinese (zh)
Other versions
TW201122493A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW98144856A priority Critical patent/TW201122493A/en
Publication of TW201122493A publication Critical patent/TW201122493A/en
Application granted granted Critical
Publication of TWI422830B publication Critical patent/TWI422830B/zh

Links

TW98144856A 2009-12-24 2009-12-24 Microprobe structure and method of making the same TW201122493A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW98144856A TW201122493A (en) 2009-12-24 2009-12-24 Microprobe structure and method of making the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW98144856A TW201122493A (en) 2009-12-24 2009-12-24 Microprobe structure and method of making the same

Publications (2)

Publication Number Publication Date
TW201122493A TW201122493A (en) 2011-07-01
TWI422830B true TWI422830B (en) 2014-01-11

Family

ID=45046187

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98144856A TW201122493A (en) 2009-12-24 2009-12-24 Microprobe structure and method of making the same

Country Status (1)

Country Link
TW (1) TW201122493A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200530119A (en) * 2004-03-10 2005-09-16 qing-fu Zou Manufacturing method for micromechanical probe structure and micromechanical probe structure
TW200609515A (en) * 2005-11-10 2006-03-16 Mjc Probe Inc Probe of probe card and manufacturing method thereof
TW200622253A (en) * 2004-08-26 2006-07-01 K&S Interconnect Inc Stacked tip cantilever electrical connector
TW200739858A (en) * 2006-03-06 2007-10-16 Formfactor Inc Stacked guard structures

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200530119A (en) * 2004-03-10 2005-09-16 qing-fu Zou Manufacturing method for micromechanical probe structure and micromechanical probe structure
TW200622253A (en) * 2004-08-26 2006-07-01 K&S Interconnect Inc Stacked tip cantilever electrical connector
TW200609515A (en) * 2005-11-10 2006-03-16 Mjc Probe Inc Probe of probe card and manufacturing method thereof
TW200739858A (en) * 2006-03-06 2007-10-16 Formfactor Inc Stacked guard structures

Also Published As

Publication number Publication date
TW201122493A (en) 2011-07-01

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