TWI421481B - Preloaded pressure sensor module - Google Patents

Description

Pre-press pressure sensor module

This technology is related to a pressure sensor, in particular a preloaded pressure sensor module (PPSM).

Figure 1 is a prior art

The figure shows a flat pressure sensor 10 consisting of an upper stack 141 and a lower stack 142. The upper layer stack 141 has an upper layer substrate 111; the upper layer electrode 112 is disposed under the upper layer substrate 111; and the upper laminate resist layer 113 is disposed under the upper layer electrode 112. The lower layer stack 142 has a lower layer substrate 121; a lower layer electrode 122 is disposed on the lower layer substrate 121; and a lower laminate resist layer 123 is disposed on the lower layer electrode 122. A pair of isolation units 114 are disposed between the upper layer stack 141 and the lower layer stack 142 such that a space 13 is formed between the upper laminate resist layer 113 and the lower laminate resist layer 123. The upper electrode 112 is electrically coupled to a first electrode of the control circuit 15, such as a positive electrode; the lower electrode 122 is electrically coupled to a second electrode of the control circuit 15, such as a negative electrode.

Figure 2 shows the pressure state of the pressure sensor of Figure 1.

The figure shows that the central region of the pressure sensor of Fig. 1 is depressed by the user. After the upper laminate resist layer 113 contacts the lower laminate resist layer 123, the circuit through the upper layer electrode 112 and the lower layer electrode 122 is turned on. When the surface of the material of the upper laminate resist layer 113 and the lower laminate resist layer 123 is initially in contact with the unstable state, an unstable wave signal output as shown in the interval P10 to P11 of Fig. 3 occurs.

Figure 3 shows the circuit characteristics of the prior art of Figure 2.

The figure shows the Y-axis as the output conductance and the X-axis as the pressure applied by the user to the unit of Figure 2. L1 shows the line shape of the output conductance versus pressure. The output conductance is zero in the pressure range of P00~P10 because the upper laminated resistive layer 113 and the lower laminated resistive layer 123 are not yet in contact.

In the interval of pressure P10 to P11, the output conductance is an unstable wave shape due to the instability of the upper laminate resist layer 113 and the surface of the lower laminate resist layer 123 at the beginning of contact. After the pressure P11, an ideal linear shape that can be used to measure the pressure is presented. At this time, the pressure value of P11 is also referred to as an activation force.

The shortcoming of the prior art of Fig. 1 is that after the mass production, the starting pressure difference between the product and the product can be quite large, which is caused by the instability of the initial pressure of the product, as shown in Fig. 3, P10~ In the P11 area, the size of the P10~P11 interval between products is uneven. Therefore, producers must compromise, and if a relatively low starting pressure is set to produce a product that can test less pressure, more defective products will be eliminated.

The present technology discloses a pre-stressed pressure sensor module that can detect relatively small pressures relative to prior art techniques.

Figure 4A shows a piece of piezoresistive material

The figure shows that the piezo-type piezoresistive material PR has a thickness R1 and a first resistance in the vertical direction.

4B shows the state in which the piezoresistive material of FIG. 4A is bent.

The figure shows a bent piezoresistive material. In the center of the cross-sectional view of Fig. 4B, the thickness R2 becomes thin, that is, R2 < R1, and the central thinner state exhibits a "preload" of the piezoresistive material PR ( Preloaded) effect. At the central thinning, the vertical direction has a lower second resistance. The lower central resistance of Figure 4B has a higher electrical conductivity relative to the unbent state of Figure 4A.

4B shows the state in which the piezoresistive material of FIG. 4A is bent.

The figure shows a bent piezoresistive material. The thickness R2 is thinner at the center of the cross-sectional view of Fig. 4B, that is, R2 < R1. This thin central state exhibits "preloading" of the piezoresistive material PR (preloaded). )effect. At the central thinning, the central vertical direction of Fig. 4B has a lower electrical resistance with respect to the unbent state of Fig. 4A, i.e., has a higher electrical conductivity.

Figure 5A shows the process of making the first PPSM

Fig. 5A shows that, first, a flat plate type pressure sensor 10 is prepared; and a substrate 30 having a convex surface 301 is prepared. Then, the flat pressure sensor 10 is bent and placed on the convex surface 301 of the substrate 30. A pre-stressed pressure sensing module (PPSM) 10B (shown in FIG. 6) is formed in a convex shape.

Figure 5B shows a perspective view of the substrate of Figure 5A

Fig. 5B shows that the substrate 30 is in the form of a block or an elongated strip with a convex surface 301 on it.

Figure 6A shows the first PPSM of the art

6A shows a first PPSM fabricated in accordance with the manner of FIG. 5A, in which a flat plate pressure sensor 10 is placed on the upper surface of the convex substrate 30 and bent along the curvature of the substrate convex surface 301. Cost Skills First PPSM 10B. The upper laminate resist layer 113 inside the PPSM 10B and the central region of the lower laminate resist layer 123 are in press contact, as shown in the cross-sectional view of the drawing. The extrusion of the PPSM 10B product forms a preloaded effect in the middle zone. This preloading effect is equivalent to the prior art and preloaded effect, which can bring unstable regions in the early test area of the conventional product. Pre-cancellation allows the product to exhibit a stable area where the pressure can be tested, so that the product PPSM 10B can test relatively small pressures.

Fig. 6B shows a perspective view of Fig. 6A.

Fig. 6B shows that the PPSM 10B is in the form of a block or a strip.

Figure 7 shows the first PPSM electrical diagram of the prior art of Figure 6A

The straight line L2 shows the electrical relationship of the PPSM 10B of Fig. 6A, with the Y axis being the output conductance and the X axis being the pressure. The straight line area of L2 in the figure shows that it is suitable as a pressure test area, and the starting point P21 of the straight line in the figure is set as the starting pressure of the product.

Figure 8 shows an electrical diagram of the prior art product and the prior art.

The line type L2 in the figure shows that the electrical pattern of the product PPSM 10B is completely linear, and the line type L1 is an electrical diagram of the prior art of Fig. 1, exhibiting an unstable output at the initial pressure application, for example, a pressure in the range of 10g to 15g. Comparing the same detection threshold (DT) to 1*10 ^-6 /ohm, it can be seen that the technical product can be measured at a pressure of 0g, while the pressure of the conventional technique can be 15g. It was measured. Thus, the minimum pressure that can be tested with the prior art products is relatively low compared to conventional techniques and is superior to conventional techniques. This product has a low starting pressure, which makes the product a function button for electronic products such as mobile phones, and when the product is designed, different functions can be triggered according to the magnitude of the applied pressure, for example, when the first pressure is applied, the trigger is triggered. The first function, when the second pressure is applied, triggers the second function...etc.

Figure 9 shows the process of making a second PPSM

FIG. 9 shows that a flat pressure sensor 40 is first prepared. The flat pressure sensor 40 has five layers of materials, from top to bottom: upper substrate 411, upper electrode 412, single laminate resist material 413, The lower electrode 422 and the lower substrate 421. Next, a substrate 30 having a convex surface 301 and a flat bottom is prepared. Next, the pressure sensor 40 is placed on the surface of the substrate 30 and bent along the curvature of the convex surface 301; the second PPSM 40B product of the present technology is completed (as shown in FIG. 10).

Figure 10 shows another PPSM made in Figure 9.

Fig. 10 shows a PPSM 40B having, in order from top to bottom, a bent upper substrate 411, a bent upper electrode 412, a bent single laminate resistor 413, a bent lower electrode 422, and a bent lower layer. An electrode 421 and a convex substrate 30. Wherein, the central region of the bent piezoresistive material 413 is extruded upward and downward as shown in the drawing.

FIG. 11A shows another PPSM after the PPSM modification of FIG.

FIG. 11A shows that a space 431 is disposed between the piezoresistive material 413 and the lower layer electrode 422. The electrical diagram of this product is shown in Figure 7.

FIG. 11B shows still another PPSM after the PPSM modification of FIG.

FIG. 11B shows that a space 432 is disposed between the upper electrode 412 and the piezoresistive material 413. The electrical diagram of this product is shown in Figure 7.

Figure 12 shows a top view of a mobile electronic device

12 shows a mobile electronic device 60 such as a mobile phone, a portable media player, a tablet, a Personal Digital Assistant (PDA), etc. having a glass cover 601 for protecting the underlying components such as a display. Modules, etc. The PPSM 10B or 40B of the present technology is placed under the glass cover 601 so that the pressure applied to the glass cover 601 can be detected by the detected PPSM. .

Figure 13 shows the first application of the PPSM of the present technology

Figure 13 shows four PPSMs 10B or 40B placed in four corners below the glass cover 601 of the electronic device 60, one PPSM 10B or 40B in each corner. Each PPSM 10B or 40B is electrically coupled to the control unit for triggering the function of the mobile electronic device 60. The PPSM 10B or 40B senses the pressure from the glass cover 601 and triggers different functions of the electronic device depending on the magnitude of the pressure.

Figure 14 shows a second application of the PPSM of the present technology

Figure 14 shows that four complementary recessed pillows 622 are respectively disposed between the glass upper cover 601 and the PPSM. The flat bottom of the concave pillow 622 is in planar contact with the lower surface of the glass upper cover 601, and the recess of the concave pillow 622 is engaged with the convex surface of the lower PPSM.

Figure 15 shows a third application of the PPSM of the present technology

Figure 15 shows four recesses 602 disposed at four corners below the glass upper cover 601. A PPSM is disposed below each of the grooves 602, and the concave surface of the groove 602 is engaged with the convex surface of the PPSM. The PPSM is placed over the frame 63 inside the mobile electronic device 60.

Figure 16 shows a fourth application of the PPSM of the present technology

Figure 16 shows that the strip PPSM 40C is used, the first strip PPSM 40C is placed on the left side of the glass upper cover 601, and the second strip PPSM 40C is placed on the lower side of the glass upper cover 601. The strip PPSM 40C is placed over the frame 63 inside the mobile electronic device 60. An alternative method is to place two PPSMs on the other two sides below the glass cover 601 - the front and the back.

Figure 17 shows the fifth application of the PPSM of the present technology.

Fig. 17 shows that two recesses 602 are disposed below and below the glass upper cover 601, and PPSM 10B or 40B is disposed below the recess 602, and the concave surface of the recess engages the convex surface of the PPSM 10B, 40B. The PPSM 10B or 40B is disposed above the frame 63 inside the mobile electronic device 60.

Figure 18 shows the sixth application of the PPSM of the present technology

18 shows a liquid crystal display module 61 disposed under the glass upper cover 601. In the cross-sectional view of FIG. 18, a PPSM 10B, 40B, or 40C is disposed on the left and right sides of the liquid crystal display module 61 when the glass upper cover 601 is depressed. The liquid crystal display module 61 is also depressed, the PPSM 10B, 40B, or 40C senses the pressure, the signal is coupled to the control unit, and then the control unit triggers the corresponding function.

Figure 19 shows the seventh application of the PPSM of the present technology

Figure 19 shows electronic device 60 having a frame 62 with a flange 621. The glass upper cover 601 is disposed under the frame flange 621. A space 633 is disposed between the lower surface of the glass upper cover 601 and the liquid crystal display module 61. In the cross-sectional view of FIG. 18, the left and right ends of the liquid crystal display module 61 are shorter than the glass upper cover 601. A PPSM 10B, 40B, or 40C is placed on the left and right of the glass cover 601. When the glass cover 601 is pressed, the PPSM 10B, 40B, or 40C senses the pressure, the signal is coupled to the control unit, and then the control unit Trigger the corresponding function. The space 633 is used to provide a buffer area required for the glass upper cover 601 to be pressed down.

Figure 20 shows the eighth application of the PPSM of the present technology.

Figure 20 is similar to Figure 19 except that the placement of the PPSM is upside down. The PPSM 10B, 40B, or 40C of the present technology is placed upside down on the glass cover 601 with the convex face of the PPSM facing down to the frame 62.

Figure 21 shows the ninth application of the PPSM of the present technology.

21 shows that the mobile electronic device 60 has a U-shaped frame 62 with an integrated display module 70 disposed at an opening above the frame 62. The integrated display module 70 integrates a "touch panel" on the top. 21 is a cross-sectional view showing that the first PPSM 10B, 40B, or 40C is disposed on the left side of the integrated display module 70, and the second PPSM is disposed on the lower side of the integrated display module 70. When the integrated display module 70 is depressed, the PPSM senses the pressure, the signal is coupled to the control unit, and the control unit then triggers the corresponding function.

Figure 22 shows the process of making a third PPSM

Figure 22 shows that a flat pressure sensor 10 is first prepared, and secondly a substrate 80 of the concave surface 801 is prepared. Then, the flat pressure sensor 10 is bent and placed on the concave surface 801 of the base 80. The flat pressure sensor 10 is placed along the curvature of the concave surface 801 to form the third PPSM of the present technology.

23A-23B show a third PPSM of the present technology

Figure 23A shows a concave PPSM placed by a flat pressure sensor along concave surface 801 to form a concave pressure sensor 80B of the present technology. Figure 23B shows a perspective view of the PPSM of the present technology.

Figure 24 shows the process of making the fourth PPSM

FIG. 24 shows that a flat pressure sensor 40 is first prepared. The flat pressure sensor 40 is formed by stacking five layers of materials, which are sequentially from top to bottom: upper substrate 411 and upper electrode 412. A single laminate resistor 413, a lower electrode, a 422, and a lower substrate 421. Next, a concave substrate 80 having a concave surface 801 above it has a flat bottom and a lower surface. Secondly, the flat pressure sensor 40 is bent and placed on the concave surface 801 of the base 80. The flat pressure sensor 10 is placed along the curvature of the concave surface 801 to form the PPSM 80C of the present technology (as shown in Figure 25A).

25A-25B show the fifth PPSM of the present technology

Fig. 25A shows a concave PPSM 80C which is completed in accordance with Fig. 24, and shows a cross-sectional view in which the central portion of the piezoresistive material 413 is extruded upward and downward to exhibit a preloaded effect. Figure 25B shows a perspective view of the PPSM of the present technology.

Figure 26 shows the tenth application of the present technology PPSM

26 shows the glass upper cover 601 of the mobile electronic product 60, with a first pillow 603 disposed on the lower left side and a second pillow 603 disposed on the right side. The first PPSM 80C is disposed under the first pillow 603, and the second PPSM 80C is disposed below the second pillow 603. The convex surface of the rib 603 is engaged with the concave surface of the PPSM 80C. When the glass upper cover 601 is depressed, the concave PPSM 80C senses the pressure, the signal is coupled to the control unit, and then the control unit triggers the corresponding function.

Figure 27 shows the second electrical line type of the present technology PPSM

27 shows the relationship between the "output capacitance" and the "pressure" of the PPSM of the present technology. Referring to FIG. 6A, the PPSM of the present technology is equivalent to a capacitor structure: an upper electrode 112, an upper laminate resistive material 113, a lower laminated resistive material 123, and a lower layer. The structure of the electrode 122 is equivalent to the capacitor structure. When the component is depressed, the capacitance of the upper and lower electrodes changes. The upper laminate barrier material 113 and the lower laminate barrier material 123 are used as dielectric materials, and may be replaced by other dielectric materials. The upper layer electrode 112 is disposed on the upper surface of the dielectric material, and the lower layer electrode 122 is disposed under the dielectric material. Capacitor structure. Different capacitor outputs are electrically coupled to the control unit to trigger different functions.

The above description of the preferred embodiments and the drawings are intended to be illustrative of the preferred embodiments of the invention The present invention is intended to be within the scope of the applicant's scope of the invention.

10. . . Pressure sensor

10B. . . Preload pressure sensor

111. . . Upper substrate

112. . . Upper electrode

113. . . Upper laminate resistance material

114. . . Isolation unit

121. . . Underlying substrate

122. . . Lower electrode

123. . . Lower laminate resistance material

13. . . space

141. . . Upper stack

142. . . Lower stack

15. . . Control circuit

211. . . Upper substrate

212. . . Upper electrode

213. . . Upper laminate resistance material

221. . . Underlying substrate

222. . . Lower electrode

223. . . Lower laminate resistance material

225. . . Piezoresistive material

PR. . . Piezoresistive material

30. . . Convex substrate

301. . . Convex

10B. . . Preload pressure sensor

40. . . Pressure sensor

40B. . . Preload pressure sensor

40C. . . Preload pressure sensor

411. . . Upper substrate

412. . . Upper electrode

413. . . Piezoresistive material

421. . . Underlying substrate

422. . . Lower electrode

431. . . space

432. . . space

60. . . Mobile phone

601. . . Mobile phone glass cover

602. . . Groove

603. . . Pillow

61. . . Liquid crystal display module

62. . . Mobile phone frame

621. . . Frame flange

622. . . Concave pillow

63. . . Mobile phone frame

633. . . space

70. . . Integrated display unit (in-cell touch)

80. . . Concave substrate

80B. . . Preload pressure sensor

801. . . Concave surface

Figure 1 is a prior art

Figure 2 shows the pressure state of the pressure sensor of Figure 1.

Figure 3 shows the circuit characteristics of the prior art of Figure 2.

Figure 4A shows a piece of piezoresistive material

4B shows the state in which the piezoresistive material of FIG. 4A is bent.

Figure 5A shows the process of making the first PPSM

Figure 5B shows a perspective view of the substrate of Figure 5A

Figure 6A shows the first PPSM of the art

Fig. 6B shows a perspective view of Fig. 6A.

Figure 7 shows the first PPSM electrical diagram of the prior art of Figure 6A

Figure 8 shows an electrical diagram of the prior art product and the prior art.

Figure 9 shows the process of making a second PPSM

Figure 10 shows another PPSM made in Figure 9.

FIG. 11A shows another PPSM after the PPSM modification of FIG.

FIG. 11B shows still another PPSM after the PPSM modification of FIG.

Figure 12 shows a top view of a mobile electronic device

Figure 13 shows the first application of the PPSM of the present technology

Figure 14 shows a second application of the PPSM of the present technology

Figure 15 shows a third application of the PPSM of the present technology

Figure 16 shows a fourth application of the PPSM of the present technology

Figure 17 shows the fifth application of the PPSM of the present technology.

Figure 18 shows the sixth application of the PPSM of the present technology

Figure 19 shows the seventh application of the PPSM of the present technology

Figure 20 shows the eighth application of the PPSM of the present technology.

Figure 21 shows the ninth application of the PPSM of the present technology.

Figure 22 shows the process of making a third PPSM

23A-23B show a third PPSM of the present technology

Figure 24 shows the process of making the fourth PPSM

25A-25B show the fifth PPSM of the present technology

Figure 26 shows the tenth application of the present technology PPSM

Figure 27 shows the second electrical line type of the present technology PPSM

111. . . Upper substrate

112. . . Upper electrode

113. . . Upper laminate resistance material

114. . . Isolation unit

121. . . Underlying substrate

122. . . Lower electrode

123. . . Lower laminate resistance material

30. . . Convex substrate

Claims (31)

A pre-pressure type pressure sensor comprising: a hard substrate having a curved surface; and a pressure sensor disposed directly on the curved surface and disposed along the curved surface shape. A pre-pressure type pressure sensor according to claim 1, wherein the pressure sensor further comprises: an upper laminate sensing material; and a lower laminate sensing material disposed on the laminated feeling Below the material; and wherein the central bottom of the laminate sensation material is in contact with the center of the lower laminate sensation material. A pre-pressure type pressure sensor according to claim 2, wherein the two layers of pressure sensitive material are bent along the curved surface. A pre-pressure type pressure sensor according to claim 3, wherein the curved surface is selected from one of the following groups: a convex surface and a concave surface. A pre-pressure type pressure sensor according to claim 2, wherein the at least one layer of the pressure sensitive material is selected from one of the group consisting of a piezoresistive material and a dielectric material. A pre-pressure pressure sensor according to claim 5, further comprising: an upper electrode disposed above the upper laminate sensing material; and a lower electrode disposed under the lower laminate sensing material . A pre-pressure type pressure sensor according to claim 6, further comprising: an upper substrate disposed above the upper layer electrode; and a lower substrate disposed under the lower layer electrode. A pre-pressure type pressure sensor according to claim 1, wherein the curved surface is selected from the group consisting of a convex group and a concave surface. The pre-pressure type pressure sensor of claim 1, wherein the pressure sensor further comprises: an upper layer electrode; a lower layer electrode; and a single laminate sensing material disposed on the upper layer Between the electrode and the underlying electrode. A pre-pressure type pressure sensor according to claim 9, wherein the pressure sensitive material is selected from one of the group consisting of a piezoresistive material and a dielectric material. A pre-pressure type pressure sensor according to claim 9, further comprising: a space disposed between the upper layer electrode and the pressure sensitive material. A pre-pressure type pressure sensor according to claim 9, further comprising: a space disposed between the pressure sensitive material and the lower layer electrode. A pre-pressure type pressure sensor according to claim 9, further comprising: an upper substrate disposed above the upper electrode; and a lower substrate disposed under the lower electrode. A pre-pressure type pressure sensor according to claim 9, wherein the curved surface is selected from one of the following groups: a convex surface and a concave surface. A pre-pressure type pressure sensor according to claim 1, wherein the pressure sensor is selected from the group consisting of a piezoresistive pressure sensor and a capacitive pressure. Sensor. A portable electronic device comprising: an upper cover glass; and the pre-pressure type pressure sensor module according to claim 1 , disposed under the upper cover glass. The portable electronic device of claim 16, wherein the pre-pressure type pressure sensor module has a top convex surface; and four of the pre-press pressure sensor modules They are used, each of which is placed in one of four corners, and is in contact with the glass upper cover with the top convex surface. The portable electronic device of claim 17, further comprising: a concave pillow disposed between the glass upper cover and the pre-pressure pressure sensor module. The portable electronic device of claim 17, further comprising: a concave surface disposed on a lower surface of the glass upper cover and coupled to the top convex surface of the pre-pressure pressure sensor module . The portable electronic device of claim 16, wherein the pre-pressure type pressure sensor has a top convex surface; and the first pre-pressure type pressure sensor is disposed in the The first side below the glass upper cover, and the top convex surface contacting the glass upper cover; and the second preload pressure sensor disposed on the second side of the glass upper cover And the top convex surface contacts the underside of the glass upper cover. The portable electronic device of claim 20, wherein the first side and the second side are: front and back sides. The portable electronic device of claim 20, wherein the first side and the second side are: left and right. The portable electronic device of claim 20, further comprising: a first concave surface disposed on a lower surface of the glass upper cover, coupled to the first convex preloading sensing module And a second concave surface disposed on the lower surface of the glass upper cover and coupled to the convex surface of the second convex pre-pressing sensing module. The portable electronic device of claim 16, wherein the pre-pressure type pressure sensor module has a top convex surface and a flat bottom portion; and the pre-pressure type pressure sensor module The group is disposed under the glass upper cover and contacts the underside of the glass upper cover with the flat bottom. A portable electronic device comprising: a display module; and the pre-pressure type pressure sensing module according to claim 1 of the patent application, disposed under the display module. A portable electronic device comprises: a glass upper cover; a space disposed under the glass upper cover; a display module disposed below the space; and a first pre-press pressure sensing module disposed at the The first side of the glass upper cover is disposed; and the second pre-pressure type pressure sensing module is disposed on the second side of the glass upper cover; wherein the display module is disposed on the two pre-s Pressure between pressure sensing modules. A portable electronic device comprising: an integrated display module having a touch sensor; and a preload pressure sensing module according to claim 1 of the patent application, disposed in the integrated display Below the module. A portable electronic device comprising: a glass upper cover having a pillow block at the bottom; and a pre-pressure type pressure sensing module according to claim 5, disposed under the pillow block; wherein The pillow block has a shape at the bottom that is complementary to the outer surface of the pre-stressed pressure sensor. A portable electronic device comprising: a glass upper cover having a pillow block; and a pre-pressure type pressure sensing module according to claim 11 disposed under the pillow block; wherein the pillow is The block has a shape at the bottom that is complementary to the outer surface of the pre-stressed pressure sensor. A process for fabricating a pre-compression pressure sensing module, comprising: preparing a hard substrate, the substrate having a curved surface; preparing a pressure sensor; and placing the pressure sensor in direct contact with the pressure sensor The curved surface and the setter is bent along the curved shape. A process for fabricating a pre-compression pressure sensing module, wherein the curved surface is selected from one of the following groups: a convex surface and a concave surface, as described in claim 30.