TWI416103B - Biosensor, package structure and detecting system using the same - Google Patents

Abstract

The present invention relates to a biosensor. The biosensor includes a substrate having a surface, a first electrode, a second electrode and an inductor. The first electrode and the second electrode are located on the surface of the substrate. The inductor is located between the first electrode and the second electrode and capable of reacting with a detecting sample to cause a current change of the biosensor. The first electrode includes a plurality of first carbon nanotubes located parallel with each other. The second electrode includes a plurality of second carbon nanotubes located parallel with each other. Each of the plurality of first carbon nanotubes is located corresponding to one of the plurality of second carbon nanotubes. A biosensor package structure and a detecting system using the same is also provided.

Description

Biosensor, its package structure and detection system

The invention relates to a biosensor and a detection system, in particular to a biosensor and a detection system based on a carbon nanotube.

The sensor is an important component of the detection system and has a wide range of applications in inspection systems.

The biosensor of the prior art generally includes a first electrode and a second electrode disposed corresponding to the first electrode. The first electrode and the second electrode are electrically connected to an external circuit through an electrode lead. It can be understood that the higher the accuracy and sensitivity requirements of the biosensor, the better. However, the first and second electrodes of the biosensor are typically fabricated using metal. Since the line width of the metal electrode affects the resistance of the metal electrode, when the line width of the metal electrode is reduced to the nanometer level, the resistance value thereof is remarkably increased. Therefore, the first metal preparation is currently used in the biosensor. The line width of the electrode and the second electrode is usually from several micrometers to several tens of micrometers. Therefore, the number of first electrodes or second electrodes in the unit area is small, which affects the accuracy and sensitivity of the biosensor. Further, the first electrode and the second electrode prepared by the metal have poor corrosion resistance, thereby affecting the life of the biosensor.

In view of this, a biosensor with high sensitivity and long life is provided. The inspection system is really necessary.

A biosensor comprising: a substrate having a surface; a first electrode and a second electrode, the first electrode and the second electrode being spaced apart from each other on a surface of the substrate; and an inductive component arrangement Between the first electrode and the second electrode, the sensing element can react with the sample to be tested to cause a current change of the biosensor; wherein the first electrode comprises a plurality of first sets arranged in parallel The carbon nanotubes, the second electrode comprises a plurality of second carbon nanotubes disposed in parallel, and the first carbon nanotubes are disposed in one-to-one correspondence with the second carbon nanotubes.

A biosensor includes: a substrate having a surface; at least one first carbon nanotube, one end of the at least one first carbon nanotube is electrically connected to a first electrode lead, and the other end has a first detecting tip; at least one second carbon nanotube, one end of the at least one second carbon nanotube is electrically connected to a second electrode lead, and the other end has a second detecting tip, the second nanometer a second detecting tip of the carbon tube is opposite and spaced apart from the first detecting tip of the first carbon nanotube; and an inductive element is disposed on the first detecting tip and the second carbon nanotube of the first carbon nanotube Between the second probe tips, the sensing element can react with the sample being tested to cause a change in the current of the biosensor.

A biosensor package structure includes: a base; a cover opposite to the cover, and a space defined between the cover and the base as a detection chamber, the detection chamber passing through a sample passage and A sample channel is connected to the outside; and at least one biosensor is disposed in the detection chamber; wherein the biosensor is the biosensor.

A detection system comprising: a biosensor package structure; a sample supply system coupled to the biosensor package structure via an input tube; a sample collection system, the sample collection system passing through an output tube Connected to the biosensor package structure; and a signal acquisition and analysis system electrically coupled to the biosensor package structure through a plurality of wires; wherein the biosensor package structure is biologically sensitive Detector package structure.

Compared with the prior art, the biosensor has the following advantages: First, since the first electrode and the second electrode are prepared by using a carbon nanotube, the first electrode and the second electrode have excellent conductivity and improve the biological activity. Sensitivity of the sensor. Second, since the size of the carbon nanotubes in the first electrode and the second electrode is small and does not affect the conductivity, more first electrodes and second electrodes can be disposed per unit area, thereby improving Biosensing detection accuracy and sensitivity. Third, since the first electrode and the second electrode are prepared using a carbon nanotube, the first electrode and the second electrode have excellent corrosion resistance and improve the service life of the biosensor.

10‧‧‧Detection system

100‧‧‧Biosensor package structure

102‧‧‧Sample supply system

104‧‧‧ Sample Collection System

106‧‧‧Signal acquisition and analysis system

110‧‧‧ cover

1102‧‧‧ Groove

1104‧‧‧Injection channel

1106‧‧‧Drawing channel

120‧‧‧Biosensor

1210‧‧‧First electrode

1212‧‧‧First electrode lead

1214‧‧‧First carbon nanotube

1216‧‧‧First detection tip

1220‧‧‧second electrode

1222‧‧‧Second electrode lead

1224‧‧‧Second carbon nanotube

1226‧‧‧Second detection tip

1230‧‧‧Inductive components

1232‧‧‧ Carrier

1234‧‧‧Induction materials

130‧‧‧Input tube

140‧‧‧Output tube

150‧‧‧ wire

160‧‧‧ stitches

170‧‧‧Test room

180‧‧‧Base

1802‧‧‧ Picture

1804‧‧‧2 bismuth oxide layer

190‧‧‧Nano Carbon Tube Array

FIG. 1 is a schematic diagram of a first structure of a biosensor according to an embodiment of the present invention.

FIG. 2 is a schematic diagram of a second structure of a biosensor according to an embodiment of the present invention.

FIG. 3 is a schematic diagram of a third structure of a biosensor according to an embodiment of the present invention.

FIG. 4 is a schematic structural diagram of a biosensor package structure according to an embodiment of the present invention.

FIG. 5 is a schematic structural diagram of a detection system according to an embodiment of the present invention.

FIG. 6 to FIG. 10 are process flowcharts of a method for preparing a biosensor according to an embodiment of the present invention.

The biosensor provided by the embodiment of the present invention, the package structure and the detection system thereof will be described in detail below with reference to the accompanying drawings.

Referring to FIG. 1 , an embodiment of the present invention provides a biosensor 120 including a first electrode 1210 , a second electrode 1220 , and an inductive component 1230 . The first electrode 1210 and the second electrode 1220 are disposed on the same surface of a substrate 180 at intervals. The sensing element 1230 is disposed between the first electrode 1210 and the second electrode 1220.

The first electrode 1210 includes at least one first carbon nanotube 1214 and a first electrode lead 1212 electrically connected to the first carbon nanotube 1214. Preferably, the first carbon nanotube 1214 is a single carbon nanotube, and one end of each first carbon nanotube 1214 is electrically connected to the first electrode lead 1212, and the other end has a first detection. Tip 1216. The first carbon nanotube 1214 may be a single-walled carbon nanotube, a double-walled carbon nanotube or a multi-walled carbon nanotube. The single-walled carbon nanotube has a diameter of 0.5 nm to 50 nm, the double-walled carbon nanotube has a diameter of 1.0 nm to 50 nm, and the multi-walled carbon nanotube has a diameter of 1.5. Nano ~ 50 nm. The length of the first carbon nanotube 1214 is not limited and can be selected according to actual needs. Preferably, the first carbon nanotube 1214 is a metallic carbon nanotube. It can be understood that when a plurality of first carbon nanotubes 1214 are included, the plurality of first carbon nanotubes 1214 can be disposed in parallel, and the distance between adjacent two first carbon nanotubes 1214 is between 1 micrometer and 100. Micron. Since the carbon nanotubes have a smaller diameter, more first carbon nanotubes 1214 can be disposed per unit area, thereby improving the accuracy and sensitivity of the biosensor 120. In this embodiment, the first electrode 1210 includes three first carbon nanotubes 1214 disposed in parallel, and the distance between adjacent two first carbon nanotubes 1214 is 5 micrometers to 10 micrometers. The three first nanometers One end of the carbon tube 1214 away from the first detecting tip 1216 is electrically connected to the first electrode lead 1212, respectively. The first carbon nanotube 1214 has a length of 10 micrometers to 50 micrometers.

The first electrode lead 1212 is used to electrically connect the first carbon nanotube 1214 to an external circuit. The material of the first electrode lead 1212 may be a conductive paste, a metal, a carbon nanotube or indium tin oxide (ITO) or the like. The length, width and thickness of the first electrode lead 1212 can be selected according to actual needs. In this embodiment, the first electrode lead 1212 is prepared by printing a conductive paste by a screen printing method. The composition of the conductive paste includes metal powder, low melting point glass powder, and a binder. Among them, the metal powder is preferably silver powder, and the binder is preferably terpineol or ethyl cellulose. In the conductive paste, the weight percentage of the metal powder is 50% to 90%, the weight percentage of the low-melting glass powder is 2% to 10%, and the weight percentage of the binder is 8% to 40%. The first electrode lead 1212 is disposed at the same end of the plurality of first carbon nanotubes 1214 and electrically connected to the plurality of first carbon nanotubes 1214, respectively.

The second electrode 1220 includes at least one second carbon nanotube 1224 and a second electrode lead 1222 electrically connected to the second carbon nanotube 1224. Preferably, the second carbon nanotube 1224 is a single carbon nanotube, and each of the second carbon nanotubes 1224 is electrically connected to the second electrode lead 1222 at one end and has a second detection at the other end. Tip 1226. The structure of the second electrode 1220 is the same as that of the first electrode 1210. When the second electrode 1220 includes a plurality of second carbon nanotubes 1224, the plurality of second carbon nanotubes 1224 may be disposed in parallel. Moreover, the second carbon nanotubes 1224 are disposed in one-to-one correspondence with the first carbon nanotubes 1214, and the second detecting tips 1226 are spaced apart from the first detecting tips 1216. Preferably, the second detecting tip 1226 and the first detecting tip 1216 are the most distant between the second carbon nanotube 1224 and the first carbon nanotube 1214. Small point. The distance between the second probe tip 1226 and the first probe tip 1216 is less than or equal to 10 microns. Preferably, the distance between the second detecting tip 1226 and the first detecting tip 1216 is less than or equal to 100 nm. It can be understood that the distance between the second detecting tip 1226 and the first detecting tip 1216 is less than 100 nm, which can lower the opening current of the biosensor 120, thereby improving the sensitivity of the biosensor 120. The first carbon nanotube 1214 extends in a first direction and the second carbon nanotube 1224 extends in a second direction. The positional relationship between the second carbon nanotube 1224 and the first carbon nanotube 1214 may be collinear as shown in FIG. 1, or may be arranged as shown in FIG. 2, or vertical as shown in FIG. Settings. The collinear arrangement here means that the extending direction of the first carbon nanotube 1214 is the same as the extending direction of the second carbon nanotube 1224, and the corresponding first carbon nanotube 1214 and the second carbon nanotube are disposed correspondingly. 1224 are on the same line. The so-called crossover arrangement forms an angle greater than zero degrees and not equal to 90 degrees between the first extending direction of the first carbon nanotube 1214 and the second extending direction of the second carbon nanotube 1224. The vertical arrangement, that is, the first extending direction of the first carbon nanotube 1214 and the second extending direction of the second carbon nanotube 1224 form an angle of 90 degrees.

In this embodiment, the second electrode 1220 includes three second carbon nanotubes 1224 disposed in parallel, and one end of the three second carbon nanotubes 1224 away from the second detecting tip 1226 and the second electrode lead respectively 1222 electrical connection. The three second carbon nanotubes 1224 are in one-to-one correspondence with the three first carbon nanotubes 1214, and are arranged in a line. The distance between the second probe tip 1226 and the first probe tip 1216 is 50 nanometers.

The sensing element 1230 covers the second probe tip 1226 with the first probe tip 1216 to connect the first electrode 1210 and the second electrode 1220. The size of the sensing element 1230 can be selected according to actual needs. The sensing element 1230 includes a plurality A carrier 1232 and an inductive material 1234.

The support 1232 may be a carbon nanotube, graphite thin, carbon fiber, amorphous carbon or graphite or the like. The carrier 1232 forms a conductive path between the first electrode 1210 and the second electrode 1220 to connect the sensing material 1234 between the first electrode 1210 and the second electrode 1220. The correspondingly disposed second carbon nanotubes 1224 and the first carbon nanotubes 1214 may be connected by a single or a plurality of carriers 1232. In this embodiment, the carrier 1232 is a plurality of carbon nanotubes. The surface of the carbon nanotube has a functional group including one or a plurality of carboxyl groups (-COOH), hydroxyl groups (-OH), aldehyde groups (-CHO), and amino groups (-NH ₂ ). This functional group can be formed on the wall of the carbon nanotube tube. The plurality of carbon nanotubes are attracted to each other by Van Der Waals forces to form a carbon nanotube structure having a specific shape. The plurality of carbon nanotubes in the carbon nanotube structure are evenly distributed, and are arranged in an ordered or disordered arrangement. There is a large amount of gap between the carbon nanotubes in the carbon nanotube structure, so that the carbon nanotube structure has a large number of micropores. The carbon nanotube structure may be a carbon nanotube membrane, a nanocarbon pipeline, or a combination thereof.

The sensing material 1234 can react with the sample to be tested to cause a change in current of the biosensor 120. The sensing material 1234 is uniformly dispersed on the surface of the carrier 1232 to form a composite structure with the carrier 1232. In this embodiment, the sensing material 1234 is adsorbed on the surface of the carbon nanotube. Since the carbon nanotube has a large specific surface area, the sensing element 1230 can adsorb a large amount of the sensing material 1234. The sensing material 1234 can be a gas, a liquid, or a particle. The sensing material 1234 can be an antibody, an antigen, a DNA, or a fluorescent molecular organism. In this embodiment, the sensing material 1234 is an antibody.

The biosensor provided by the invention has the following advantages: First, since the first electrode and the second electrode are prepared by using a carbon nanotube, the first electrode and the second electrode have excellent electrical conductivity, and the biosensor is improved. Sensitivity. Second, since the dimensions of the carbon nanotubes in the first electrode and the second electrode are small, more first electrodes and second electrodes may be disposed in a unit area, and the distance between the probe tips is less than 10 μm. Improves the detection accuracy and sensitivity of biosensors. Third, since the first electrode and the second electrode are prepared using a carbon nanotube, the first electrode and the second electrode have excellent corrosion resistance and improve the service life of the biosensor.

With further reference to FIG. 4 , an embodiment of the present invention further provides a biosensor package structure 100 including a substrate 180 , a cover 110 , and at least one biosensor 120 .

The substrate 180 is attached and fixed to the cover 110 to define a detection chamber 170. The biosensor 120 is disposed on a surface of the substrate 180 within the detection chamber 170. The substrate 180 and/or the cover 110 further define a sample channel 1104 and a sample channel 1106. In this embodiment, the substrate 180 is a planar substrate. A surface of the cover 110 forms an elongated groove 1102. The planar substrate 180 covers the recess 1102 of the cover 110 to form a detection chamber 170. It will be appreciated that the detection chamber 170 may also be formed by a recess in the base 180 and a planar cover 110. Preferably, the biosensor package structure 100 includes a plurality of biosensors 120 arranged along the length of the groove 1102. The sample channel 1104 and the sample channel 1106 are both formed on the cover 110. Preferably, the sampling channel 1104 extends from the bottom surface of the recess 1102 in a direction perpendicular to the bottom surface of the recess 1102 to facilitate input of a sample to be detected. The sampling channel 1106 starts from the side of the groove 1102 along the side with the groove 1102. Extends in a vertical direction to facilitate output of the sample after detection.

The substrate 180 can be a rigid substrate or a flexible substrate. The hard substrate may be one or a plurality of ceramic substrates, glass substrates, quartz substrates, tantalum substrates, tantalum oxide substrates, diamond substrates, alumina substrates, and rigid polymer substrates. The flexible substrate may be a polymer substrate. The material of the polymer substrate may be dimethyl methoxy hydride oligomer (PDMS), polycarbonate (PC), polymethyl methacrylate (PMMA), polyethylene (PE), polyimine ( Polyester materials such as PI) or polyethylene terephthalate (PET), or polyether oxime (PES), cellulose ester, polyvinyl chloride (PVC), benzocyclobutene (BCB) or acrylic resin Such as materials. It is to be understood that the material of the substrate 180 is not limited to the above materials. The size, shape and thickness of the substrate 180 are not limited, and those skilled in the art can select according to actual needs. In this embodiment, the substrate 180 includes a cymbal sheet 1802 and a ruthenium dioxide layer 1804 formed on a surface of the cymbal sheet 1802. The cymbal sheet 1802 has a thickness of 0.5 mm to 2 mm. The ceria layer 1804 has a thickness of from 100 micrometers to 500 micrometers.

The material of the cover 110 may be the same as the material of the substrate 180. The size and thickness of the cover 110 can be selected according to actual needs. Preferably, the cover 110 is a polymer substrate to facilitate the formation of the recess 1102, the injection channel 1104, and the sample channel 1106. The cover 110 and the substrate 180 may be fixed by an adhesive. In this embodiment, the cover 110 is a monodimethyl siloxane oligomer substrate. The groove 1102 can be formed directly by injection molding or by mechanical extrusion. The size of the groove 1102 can be selected according to actual needs. In this embodiment, the groove 1102 is rectangular, and has a length of 5 mm to 10 mm, a width of 0.2 mm to 1 mm, and a depth of 50 μm to 100 μm. The injection channel 1104 and the sampling channel 1106 Do not form at both ends of the groove 1102 along the length direction. When the sample to be tested enters from the injection channel 1104 and flows out of the sample channel 1106, the sample to be tested needs to flow through all of the biosensors 120. The sample channel 1104 and the sample channel 1106 may be through holes formed in the cover 110, or may be through holes defined by the grooves formed on the surface of the cover 110 near the substrate 180 and the substrate 180. The diameter of the sample channel 1104 and the sample channel 1106 can be from 200 micrometers to 400 micrometers.

The biosensor 120 is disposed on a surface of the substrate 180. The first electrode 1210 and the second electrode 1220 are electrically connected to a pin 160 outside the detection chamber 170 through a wire 150, respectively, to facilitate connection of the biosensor 120 to an external circuit. It can be understood that when the biosensor package structure 100 includes a plurality of biosensors 120, the different biosensors 120 can include different inductive materials 1234 so that the biosensor package structure 100 can be used for detection. A different component of a sample. In this embodiment, three biosensors 120 are arranged side by side on the surface of the substrate 180.

The stitches 160 may be disposed on the same surface or different surfaces of the substrate 180 as the biosensor 120. In this embodiment, the pin 160 is disposed on the surface of the substrate 180 away from the biosensor 120. The wire 150 is a conductive adhesive disposed in the through hole of the substrate 180. It can be understood that by extending the first electrode lead 1212 and the second electrode lead 1222 outside the detection chamber 170, the biosensor 120 can also be directly connected to the external circuit.

Referring to FIG. 5 , an embodiment of the present invention further provides a detection system 10 using the biosensor 120, which includes: a biosensor package structure 100, a sample supply system 102, and a sample collection system 104. And a signal acquisition and analysis system 106.

The sample supply system 102 is coupled to the sample channel 1104 of the biosensor package structure 100 via an input tube 130. The sample collection system 104 is coupled to the sample channel 1106 of the biosensor package structure 100 via an output tube 140. The signal acquisition and analysis system 106 is electrically coupled to the biosensor 120 by a plurality of wires (not shown) that are electrically coupled to the pins 160 of the biosensor package structure 100.

The sample supply system 102 can be a microinjection pump. The sample collection system 104 can be a glass. The signal acquisition and analysis system 106 can be a chemical analyzer. The input tube 130 and the output tube 140 may be glass tubes or steel tubes, and may have a diameter of 200 micrometers to 400 micrometers.

The detection system 10 can be used to detect samples of liquid or gas. The working process of the detection system 10 will be described below by taking a liquid sample to be detected containing an antigen as an example. When the detection system 10 is in operation, the liquid sample to be detected is input from the injection channel 1104 to the detection chamber 170 through the input tube 130 using the sample supply system 102. The liquid sample to be tested flows within the detection chamber 170, exits through the sample channel 1106, and is collected by the sample collection system 104. The antigen in the liquid sample in the detection chamber 170 reacts with the antibody in the sensing element 1230, causing a change in the effect of the biosensor 120. This effect change is transmitted to the signal acquisition and analysis system 106 in the form of an electrical signal. The collected electrical signals are analyzed by the signal acquisition and analysis system 106 to obtain information such as the content and type of the antigen in the liquid sample to be detected.

Referring to FIG. 6, an embodiment of the present invention further provides a method for preparing a biosensor 120, which can prepare a single or a plurality of biosensors 120. This embodiment is described by taking a plurality of biosensors 120 at the same time, which includes the following steps:

Step 1: A substrate 180 is provided, and an array of carbon nanotubes 190 is formed on the surface of the substrate 180. The array of carbon nanotubes 190 includes a plurality of carbon nanotubes parallel to the surface of the substrate 180 and parallel to each other.

In this embodiment, the substrate 180 is a cymbal. The carbon nanotube array 190 may be directly grown on the surface of the substrate 180 by chemical vapor deposition or the prepared carbon nanotube array may be transferred to the surface of the substrate 180 by transfer or the like. In this embodiment, a strip-shaped monodisperse catalyst layer is formed on one side of the ruthenium, and then the carbon nanotube array 190 is directly grown by chemical vapor deposition. For the method of directly growing the carbon nanotube array 190 on the surface of the substrate 180, please refer to the Taiwan Patent Application No. 200936797, filed on Sep. 29, 2009, filed on Sep. 1, 2009. Carbon nanotube film structure and preparation method thereof. In order to save space, only the above is cited, but all the technical disclosures of the above application are also considered as part of the technical disclosure of the present application.

Step 2: preparing a plurality of first electrode leads 1212 and a plurality of second electrode leads 1222, the first electrode leads 1212 and the second electrode leads 1222 are disposed one-to-one, and each pair of first electrode leads 1212 and second electrodes The leads 1222 are electrically connected by at least one carbon nanotube.

In this embodiment, the first electrode lead 1212 and the second electrode lead 1222 are prepared by printing a conductive paste on the surface of the substrate 180 by a screen printing method. The composition of the conductive paste includes metal powder, low melting point glass powder, and a binder. Among them, the metal powder is preferably silver powder, and the binder is preferably terpineol or ethyl cellulose. In the conductive paste, the weight percentage of the metal powder is 50% to 90%, the weight percentage of the low-melting glass powder is 2% to 10%, and the weight percentage of the binder is 8% to 40%. It can be understood that the first electrode lead The 1212 and second electrode leads 1222 can also be prepared by chemical vapor deposition, magnetron sputtering, or the like.

Step 3: A portion of the nanotube array 190 is removed such that only the carbon nanotubes between each pair of the first electrode lead 1212 and the second electrode lead 1222 are retained.

The method of removing a portion of the nanotube array 190 may be a laser etch. By controlling the laser etching by a computer program, the excess carbon nanotubes can be accurately removed, leaving only the carbon nanotubes between each pair of first electrode leads 1212 and second electrode leads 1222.

Step 4: cutting the carbon nanotubes between each pair of first electrode leads 1212 and second electrode leads 1222 such that each pair of first electrode leads 1212 and second electrode leads 1222 form a one-to-one correspondence and are spaced apart The first carbon nanotube 1214 and the second carbon nanotube 1224.

The method of cutting the carbon nanotube between each pair of the first electrode lead 1212 and the second electrode lead 1222 may be performed by laser etching, electron beam (E-Beam) exposure development, photolithography, or current-crushing. Method implementation. When a method of blowing current is used, a defect can be formed on the carbon nanotube by laser scanning, and then a voltage is applied between the first electrode lead 1212 and the second electrode lead 1222, so that the carbon nanotube is The defect is broken. In the present embodiment, the carbon nanotubes between each pair of the first electrode lead 1212 and the second electrode lead 1222 are simultaneously cut by electron beam exposure development to form a fracture having a size of several tens of nanometers to several tens of micrometers.

Step 5: The sensing element 1230 is prepared, and the first carbon nanotube 1214 and the second carbon nanotube 1224 between each pair of the first electrode lead 1212 and the second electrode lead 1222 are connected by the sensing element 1230.

In this embodiment, the method for preparing the sensing element 1230 includes the following steps: First, the functionalized carbon nanotube has a functional group on its surface.

Secondly, the functionalized carbon nanotubes are modified by an inductive material to obtain a carbon nanotube carrying an inductive material.

Then, a carbon nanotube carrying an induction material is dispersed in an organic solvent or an aqueous solution to obtain a suspension.

Finally, the suspension is dropped between the corresponding and spaced first carbon nanotubes 1214 and the second carbon nanotubes 1224 and dried.

It can be understood that the carbon nanotube carrying the induction material can be moved by a nanometer to dry before the drying, so that the carbon nanotube carrying the induction material and the first carbon nanotube 1214 and the second carbon nanotube can be used. 1224 is a good connection.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

120‧‧‧Biosensor

1210‧‧‧First electrode

1212‧‧‧First electrode lead

1214‧‧‧First carbon nanotube

1216‧‧‧First detection tip

1220‧‧‧second electrode

1222‧‧‧Second electrode lead

1224‧‧‧Second carbon nanotube

1226‧‧‧Second detection tip

1230‧‧‧Inductive components

1232‧‧‧ Carrier

1234‧‧‧Induction materials

180‧‧‧Base

Claims (15)

A biosensor comprising: a substrate having a surface; a first electrode and a second electrode, the first electrode and the second electrode being spaced apart from each other on a surface of the substrate; and an inductive component arrangement Between the first electrode and the second electrode, the sensing element can react with the sample to be tested to cause a current change of the biosensor; the improvement is that the first electrode includes a plurality of parallelly arranged a carbon nanotube, the second electrode comprises a plurality of second carbon nanotubes arranged in parallel, the first carbon nanotubes are arranged in a one-to-one correspondence with the second carbon nanotubes and connected by the sensing element . The biosensor of claim 1, wherein the first carbon nanotube and the second carbon nanotube are both single carbon nanotubes. The biosensor of claim 2, wherein the first carbon nanotube has a first detecting tip, and the second carbon nanotube has a second detecting tip, the first The probe tip is opposite and spaced apart from the second probe tip, and the distance between the first probe tip and the second probe tip is less than or equal to 10 microns. The biosensor of claim 3, wherein a distance between the first detecting tip and the second detecting tip is less than or equal to 100 nm. The biosensor of claim 1, wherein the distance between any two adjacent first carbon nanotubes is between 5 micrometers and 10 micrometers, and any adjacent two second nanometers. The distance between the carbon tubes is 5 microns to 10 microns. The biosensor of claim 1, wherein the first carbon nanotube extends in the same direction as the second carbon nanotube, and the corresponding first carbon nanotube is The second carbon nanotubes are on the same line. The biosensor of claim 1, wherein the first carbon nanotube and the second carbon nanotube are metallic carbon nanotubes. The biosensor of claim 1, wherein the sensing elements are electrically connected to the first electrode and the second electrode, respectively. The biosensor of claim 1, wherein the sensing element comprises a plurality of carriers and an inductive material, and the inductive material is uniformly dispersed on a surface of the carrier; the carrier is nanocarbon One or more of a tube, carbon fiber, amorphous carbon, and graphite; the sensing material is an antibody, an antigen, a DNA, or a fluorescent molecular organism. The biosensor according to claim 9, wherein the carrier is a carbon nanotube, and the surface of the carbon nanotube has a functional group; the functional group includes a carboxyl group, a hydroxyl group, and an aldehyde group. And one or more of the amino groups. The biosensor of claim 9, wherein the carrier forms a conductive path between the first carbon nanotube and the second carbon nanotube. The biosensor of claim 9, wherein the plurality of first carbon nanotubes in the first electrode are electrically connected to a first electrode lead, and the second electrode is plural in a second The carbon nanotubes are electrically connected to a second electrode lead. A biosensor includes: a substrate having a surface; at least one first carbon nanotube, one end of the at least one first carbon nanotube is electrically connected to a first electrode lead, and the other end has a first probe tip; At least one second carbon nanotube, one end of the at least one second carbon nanotube is electrically connected to a second electrode lead, and the other end has a second detecting tip, and the second detecting of the second carbon nanotube a tip opposite and spaced apart from the first probe tip of the first carbon nanotube; and an inductive element disposed between the first probe tip of the first carbon nanotube and the second probe tip of the second carbon nanotube The first carbon nanotube is connected to the second carbon nanotube, and the sensing element can react with the sample to be tested to cause a current change of the biosensor. A biosensor package structure includes: a base; a cover opposite to the cover, and a space defined between the cover and the base as a detection chamber, the detection chamber passing through a sample passage and a sampling channel is connected to the outside; and at least one biosensor is disposed in the detection chamber; and the improvement is that the biosensor is the biosensor according to any one of claims 1 to 13. . A detection system includes: a biosensor package structure, the biosensor package structure includes: a substrate; a cover body, the substrate is disposed opposite to the cover body, and a space is defined between the cover body and the substrate As a detection chamber, the detection chamber communicates with the outside through a sample injection channel and a sample channel; and at least one biosensor is disposed in the detection chamber; a sample supply system, the sample supply system passes through an input tube and the injection Channel connection a sample collection system connected to the sample channel through an output tube; and a signal acquisition and analysis system electrically coupled to the biosensor through a plurality of wires; The improvement is that the biosensor is the biosensor according to any one of claims 1 to 13.