TWI413775B - - Google Patents

Info

Publication number
TWI413775B
TWI413775B TW99145817A TW99145817A TWI413775B TW I413775 B TWI413775 B TW I413775B TW 99145817 A TW99145817 A TW 99145817A TW 99145817 A TW99145817 A TW 99145817A TW I413775 B TWI413775 B TW I413775B
Authority
TW
Taiwan
Application number
TW99145817A
Other versions
TW201129807A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW99145817A priority Critical patent/TW201129807A/zh
Publication of TW201129807A publication Critical patent/TW201129807A/zh
Application granted granted Critical
Publication of TWI413775B publication Critical patent/TWI413775B/zh

Links

TW99145817A 2009-12-25 2010-12-24 MEMS probe and its manufacturing method TW201129807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW99145817A TW201129807A (en) 2009-12-25 2010-12-24 MEMS probe and its manufacturing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW98145129 2009-12-25
TW99145817A TW201129807A (en) 2009-12-25 2010-12-24 MEMS probe and its manufacturing method

Publications (2)

Publication Number Publication Date
TW201129807A TW201129807A (en) 2011-09-01
TWI413775B true TWI413775B (zh) 2013-11-01

Family

ID=49990882

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99145817A TW201129807A (en) 2009-12-25 2010-12-24 MEMS probe and its manufacturing method

Country Status (1)

Country Link
TW (1) TW201129807A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107656107A (zh) * 2016-07-25 2018-02-02 旺矽科技股份有限公司 具有悬臂式微机电探针的探针模块及其制造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI565649B (zh) * 2012-09-07 2017-01-11 Mpi Corp Needle body structure for power test and its preparation
TWI454706B (zh) * 2012-09-07 2014-10-01 Mpi Corp Probe structure of power test and its manufacturing method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1329721A (zh) * 1998-12-02 2002-01-02 佛姆法克特股份有限公司 光刻接触元件
US20020008530A1 (en) * 1998-10-01 2002-01-24 Amst Co., Ltd. Micro cantilever style contact pin structure for wafer probing
TW200628798A (en) * 2005-02-02 2006-08-16 Mjc Probe Inc Testing probe
CN1971287A (zh) * 2005-11-22 2007-05-30 旺矽科技股份有限公司 探针卡的探针及其制法
JP2008122330A (ja) * 2006-11-15 2008-05-29 Japan Advanced Institute Of Science & Technology Hokuriku 走査型プローブ顕微鏡用半導体・セラミックス複合カンチレバー
TW200912325A (en) * 2007-05-11 2009-03-16 Amst Co Ltd Probe card and method for fabricating the same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020008530A1 (en) * 1998-10-01 2002-01-24 Amst Co., Ltd. Micro cantilever style contact pin structure for wafer probing
CN1329721A (zh) * 1998-12-02 2002-01-02 佛姆法克特股份有限公司 光刻接触元件
TW200628798A (en) * 2005-02-02 2006-08-16 Mjc Probe Inc Testing probe
CN1971287A (zh) * 2005-11-22 2007-05-30 旺矽科技股份有限公司 探针卡的探针及其制法
JP2008122330A (ja) * 2006-11-15 2008-05-29 Japan Advanced Institute Of Science & Technology Hokuriku 走査型プローブ顕微鏡用半導体・セラミックス複合カンチレバー
TW200912325A (en) * 2007-05-11 2009-03-16 Amst Co Ltd Probe card and method for fabricating the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107656107A (zh) * 2016-07-25 2018-02-02 旺矽科技股份有限公司 具有悬臂式微机电探针的探针模块及其制造方法

Also Published As

Publication number Publication date
TW201129807A (en) 2011-09-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees