TWI413775B - - Google Patents
Info
- Publication number
- TWI413775B TWI413775B TW99145817A TW99145817A TWI413775B TW I413775 B TWI413775 B TW I413775B TW 99145817 A TW99145817 A TW 99145817A TW 99145817 A TW99145817 A TW 99145817A TW I413775 B TWI413775 B TW I413775B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW99145817A TW201129807A (en) | 2009-12-25 | 2010-12-24 | MEMS probe and its manufacturing method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW98145129 | 2009-12-25 | ||
TW99145817A TW201129807A (en) | 2009-12-25 | 2010-12-24 | MEMS probe and its manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201129807A TW201129807A (en) | 2011-09-01 |
TWI413775B true TWI413775B (zh) | 2013-11-01 |
Family
ID=49990882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW99145817A TW201129807A (en) | 2009-12-25 | 2010-12-24 | MEMS probe and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201129807A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107656107A (zh) * | 2016-07-25 | 2018-02-02 | 旺矽科技股份有限公司 | 具有悬臂式微机电探针的探针模块及其制造方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI565649B (zh) * | 2012-09-07 | 2017-01-11 | Mpi Corp | Needle body structure for power test and its preparation |
TWI454706B (zh) * | 2012-09-07 | 2014-10-01 | Mpi Corp | Probe structure of power test and its manufacturing method |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1329721A (zh) * | 1998-12-02 | 2002-01-02 | 佛姆法克特股份有限公司 | 光刻接触元件 |
US20020008530A1 (en) * | 1998-10-01 | 2002-01-24 | Amst Co., Ltd. | Micro cantilever style contact pin structure for wafer probing |
TW200628798A (en) * | 2005-02-02 | 2006-08-16 | Mjc Probe Inc | Testing probe |
CN1971287A (zh) * | 2005-11-22 | 2007-05-30 | 旺矽科技股份有限公司 | 探针卡的探针及其制法 |
JP2008122330A (ja) * | 2006-11-15 | 2008-05-29 | Japan Advanced Institute Of Science & Technology Hokuriku | 走査型プローブ顕微鏡用半導体・セラミックス複合カンチレバー |
TW200912325A (en) * | 2007-05-11 | 2009-03-16 | Amst Co Ltd | Probe card and method for fabricating the same |
-
2010
- 2010-12-24 TW TW99145817A patent/TW201129807A/zh not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020008530A1 (en) * | 1998-10-01 | 2002-01-24 | Amst Co., Ltd. | Micro cantilever style contact pin structure for wafer probing |
CN1329721A (zh) * | 1998-12-02 | 2002-01-02 | 佛姆法克特股份有限公司 | 光刻接触元件 |
TW200628798A (en) * | 2005-02-02 | 2006-08-16 | Mjc Probe Inc | Testing probe |
CN1971287A (zh) * | 2005-11-22 | 2007-05-30 | 旺矽科技股份有限公司 | 探针卡的探针及其制法 |
JP2008122330A (ja) * | 2006-11-15 | 2008-05-29 | Japan Advanced Institute Of Science & Technology Hokuriku | 走査型プローブ顕微鏡用半導体・セラミックス複合カンチレバー |
TW200912325A (en) * | 2007-05-11 | 2009-03-16 | Amst Co Ltd | Probe card and method for fabricating the same |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107656107A (zh) * | 2016-07-25 | 2018-02-02 | 旺矽科技股份有限公司 | 具有悬臂式微机电探针的探针模块及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW201129807A (en) | 2011-09-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |