TWI395934B - UV light detector - Google Patents
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Description
本發明是有關於一種光偵測器,且特別是有關於一種紫外光偵測器。The present invention relates to a photodetector, and more particularly to an ultraviolet photodetector.
雖然現今科技發達,為現代人帶來便利的生活,但是追求科技的進步,卻也造成地球環境的破壞,例如現在大氣層中的臭氧層已經被一些氟氯碳化物破壞而出現破洞。臭氧層一旦有破洞,部分來自太陽的紫外光會直接照射到地表上,進而危害地球上的生物。Although today's technology is developed and brings convenience to modern people, the pursuit of technological advancement has also caused damage to the global environment. For example, the ozone layer in the atmosphere has been damaged by some CFCs. Once there is a hole in the ozone layer, some of the ultraviolet light from the sun will directly hit the earth's surface, which will harm the creatures on the earth.
紫外光對人體的危害相當大。倘若人體長期被紫外光所曝曬的話,罹患皮膚癌、皮膚炎以及白內障、視網膜與黃斑部病變等眼睛方面的疾病之機率會增加。因此,用來偵測紫外光存在及強度的紫外光偵測器已漸漸受到重視。Ultraviolet light is very harmful to the human body. If the human body is exposed to ultraviolet light for a long time, the risk of skin cancer, dermatitis, and eye diseases such as cataracts, retina and macular degeneration will increase. Therefore, ultraviolet light detectors for detecting the presence and intensity of ultraviolet light have gradually gained attention.
傳統的紫外光偵測器包括一真空管、分別配置在真空管二端的陰極與陽極、塗佈在陰極上的電子激發材料以及密封於真空管內的惰性氣體,其中真空管是由石英玻璃所製成。當紫外光偵測器運作時,陰極和陽極之間會被施加很大的電場。The conventional ultraviolet light detector includes a vacuum tube, a cathode and an anode respectively disposed at two ends of the vacuum tube, an electron excitation material coated on the cathode, and an inert gas sealed in the vacuum tube, wherein the vacuum tube is made of quartz glass. When the UV detector operates, a large electric field is applied between the cathode and the anode.
當紫外光照射到陰極上的電子激發材料時,會發生光電效應,電子激發材料產生光電子。由於陰極和陽極之間被施加很大的電場,因此光電子會被陽極吸引而朝向陽極移動。When ultraviolet light is irradiated onto the electron-exciting material on the cathode, a photoelectric effect occurs, and the electron-exciting material generates photoelectrons. Since a large electric field is applied between the cathode and the anode, photoelectrons are attracted by the anode and move toward the anode.
光電子在移動的過程中碰撞惰性氣體,解離惰性氣體中的氣體分子而產生離子與電子。這些離子與電子會再次碰撞惰性氣體,以使真空管內會產生大量的離子與電子,進而在陰極與陽極之間形成光電流。藉由量測光電流的電流值,即可計算出紫外光的強度。The photoelectrons collide with the inert gas during the movement, dissociating the gas molecules in the inert gas to generate ions and electrons. These ions and electrons collide with the inert gas again, so that a large amount of ions and electrons are generated in the vacuum tube, thereby forming a photocurrent between the cathode and the anode. The intensity of the ultraviolet light can be calculated by measuring the current value of the photocurrent.
然而,傳統的紫外光偵測器,其體積相當龐大,加上真空管很容易破裂,以至於傳統的紫外光偵測器攜帶相當不方便。因此,如何研發出便於攜帶的紫外光偵測器,是值得探討的課題。However, the conventional ultraviolet light detector is quite bulky, and the vacuum tube is easily broken, so that the conventional ultraviolet light detector is quite inconvenient to carry. Therefore, how to develop a portable ultraviolet detector is a subject worth exploring.
本發明的主要目的是提供一種紫外光偵測器,其具有體積小,便於攜帶的優點。The main object of the present invention is to provide an ultraviolet light detector which has the advantages of small size and portability.
本發明提出一種紫外光偵測器,包括一表面聲波振盪器(Surface Acoustic Wave oscillator,SAW oscillator)、一壓控振盪器(Voltage control oscillator,VCO)、一混頻器(mixer)、一鎖相迴路(Phase locked loop,PLL)、一類比對數位轉換器以及一處理單元。表面聲波振盪器能接收一紫外光,並根據紫外光的能量而輸出一第一頻率訊號。壓控振盪器能輸出一第二頻率訊號。混頻器能將第一頻率訊號與第二頻率訊號進行混頻,以產生一混頻訊號。鎖相迴路能將混頻訊號轉換成一電壓類比訊號。類比對數位轉換器能將電壓類比訊號轉換成一數位訊號。處理單元能根據數位訊號,計算出紫外光的一能量值。The invention provides an ultraviolet light detector, which comprises a surface acoustic wave oscillator (SAW oscillator), a voltage control oscillator (VCO), a mixer, a phase lock. Phase locked loop (PLL), a type of analog to digital converter, and a processing unit. The surface acoustic wave oscillator can receive an ultraviolet light and output a first frequency signal according to the energy of the ultraviolet light. The voltage controlled oscillator can output a second frequency signal. The mixer can mix the first frequency signal with the second frequency signal to generate a mixed signal. The phase-locked loop converts the mixed signal into a voltage analog signal. An analog-to-digital converter converts a voltage analog signal into a digital signal. The processing unit can calculate an energy value of the ultraviolet light according to the digital signal.
本發明的紫外光偵測器是利用表面聲波元件會受到紫外光照射而產生頻率的改變,藉此來偵測紫外光,並透過壓控振盪器、混頻器、鎖相迴路、類比對數位轉換器以及處理單元等電子元件來處理訊號。相較於習知技術而言,本發明的紫外光偵測器具有體積小,便於攜帶,以及不易破裂等優點。The ultraviolet light detector of the present invention utilizes a surface acoustic wave element to be subjected to ultraviolet light to generate a change in frequency, thereby detecting ultraviolet light, and transmitting the voltage controlled oscillator, the mixer, the phase locked loop, and the analog logarithmic bit. Electronic components such as converters and processing units to process signals. Compared with the prior art, the ultraviolet light detector of the present invention has the advantages of small volume, portability, and difficulty in cracking.
為讓本發明之上述特徵和優點能更明顯易懂,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.
圖1是本發明一實施例之紫外光偵測器的方塊示意圖。請參閱圖1,紫外光偵測器100包括一表面聲波振盪器110、一壓控振盪器120、一混頻器130、一鎖相迴路140、一類比對數位轉換器150以及一處理單元160,其中表面聲波振盪器110與壓控振盪器120均電性連接混頻器130,而鎖相迴路140與類比對數位轉換器150二者都電性連接於混頻器130與處理單元160之間。1 is a block diagram of an ultraviolet light detector according to an embodiment of the present invention. Referring to FIG. 1 , the ultraviolet detector 100 includes a surface acoustic wave oscillator 110 , a voltage controlled oscillator 120 , a mixer 130 , a phase locked loop 140 , a type of comparison digital converter 150 , and a processing unit 160 . The surface acoustic wave oscillator 110 and the voltage controlled oscillator 120 are electrically connected to the mixer 130, and the phase locked loop 140 and the analog-to-digital converter 150 are electrically connected between the mixer 130 and the processing unit 160. .
表面聲波振盪器110包括一表面聲波元件200、二匹配電路(match network)112a、112b與一放大器114,其中表面聲波元件200包括一對電極210a、210b。匹配電路112a、112b分別電性連接電極210a、210b,而放大器114電性連接匹配電路112a、112b,其中放大器114為一低雜訊放大器(Low Noise Amplifier,LNA)。透過匹配電路112a、112b與放大器114,表面聲波振盪器110可以穩定地輸出頻率訊號。The surface acoustic wave oscillator 110 includes a surface acoustic wave element 200, two match networks 112a, 112b and an amplifier 114, wherein the surface acoustic wave element 200 includes a pair of electrodes 210a, 210b. The matching circuits 112a, 112b are electrically connected to the electrodes 210a, 210b, respectively, and the amplifier 114 is electrically connected to the matching circuits 112a, 112b, wherein the amplifier 114 is a Low Noise Amplifier (LNA). The surface acoustic wave oscillator 110 can stably output a frequency signal through the matching circuits 112a, 112b and the amplifier 114.
本發明的紫外光偵測器100是利用表面聲波頻率會受紫外光強度改變的原理來偵測紫外光U。詳細而言,當紫外光U照射到表面聲波元件200時,表面聲波元件200會接收紫外光U,而表面聲波振盪器110所輸出的頻率訊號,其頻率會受到紫外光U的能量所影響而變動。The ultraviolet light detector 100 of the present invention detects the ultraviolet light U by utilizing the principle that the surface acoustic wave frequency is changed by the intensity of the ultraviolet light. In detail, when the ultraviolet light U is irradiated to the surface acoustic wave element 200, the surface acoustic wave element 200 receives the ultraviolet light U, and the frequency signal output by the surface acoustic wave oscillator 110 is affected by the energy of the ultraviolet light U. change.
舉例來說,紫外光U的能量越高,頻率訊號的頻率變動越大。因此,表面聲波振盪器110是根據紫外光U的能量來改變頻率訊號的頻率,進而輸出第一頻率訊號,其中第一頻率訊號的頻率介於102MHz至113MHz之間,例如第一頻率訊號的頻率可為107MHz。For example, the higher the energy of the ultraviolet light U, the greater the frequency variation of the frequency signal. Therefore, the surface acoustic wave oscillator 110 changes the frequency of the frequency signal according to the energy of the ultraviolet light U, and then outputs the first frequency signal, wherein the frequency of the first frequency signal is between 102 MHz and 113 MHz, for example, the frequency of the first frequency signal. Can be 107MHz.
圖2是圖1中的表面聲波元件的俯視示意圖。請參閱圖1與圖2。表面聲波元件200更包括一壓電基材220,而電極210a、210b配置於壓電基材220上,其中電極210a、210b彼此未重疊。在本實施例中,這些電極210a、210b的形狀實質上彼此相同,且二者的面積實質上彼此相等。此外,這些電極210a、210b皆為指叉電極,且電極210a、210b的材質為金屬。2 is a top plan view of the surface acoustic wave element of FIG. 1. Please refer to Figure 1 and Figure 2. The surface acoustic wave element 200 further includes a piezoelectric substrate 220, and the electrodes 210a, 210b are disposed on the piezoelectric substrate 220, wherein the electrodes 210a, 210b do not overlap each other. In the present embodiment, the shapes of the electrodes 210a, 210b are substantially identical to each other, and the areas of the two are substantially equal to each other. In addition, the electrodes 210a and 210b are all finger electrodes, and the electrodes 210a and 210b are made of metal.
壓電基材220包括一基板222與一配置在基板222上的壓電薄膜224。壓電薄膜224的材質例如是氧化鋅(ZnO)或是其他能吸收紫外光U的壓電材料,而基板222的材質可為LiNdO3 。當電極210a被通入交流電時,位於電極210a附近的壓電薄膜224會發生振盪,產生表面聲波。當表面聲波傳遞至電極210b時,位於電極210b附近的壓電薄膜224亦會振盪,而表面聲波振盪器110得以輸出頻率訊號。The piezoelectric substrate 220 includes a substrate 222 and a piezoelectric film 224 disposed on the substrate 222. The material of the piezoelectric film 224 is, for example, zinc oxide (ZnO) or other piezoelectric material capable of absorbing ultraviolet light U, and the material of the substrate 222 may be LiNdO 3 . When the electrode 210a is supplied with an alternating current, the piezoelectric film 224 located in the vicinity of the electrode 210a oscillates to generate a surface acoustic wave. When the surface acoustic wave is transmitted to the electrode 210b, the piezoelectric film 224 located in the vicinity of the electrode 210b also oscillates, and the surface acoustic wave oscillator 110 outputs a frequency signal.
壓電薄膜224的材質為氧化鋅,因此壓電薄膜224能吸收波長在390奈米以下的紫外光U。當壓電薄膜224吸收紫外光U時,壓電薄膜224會被紫外光U所激發而產生電子電洞對,造成壓電薄膜224的導電率提高,表面聲波的波速改變。如此,頻率訊號的頻率亦會改變,而表面聲波振盪器110得以輸出第一頻率訊號。Since the piezoelectric film 224 is made of zinc oxide, the piezoelectric film 224 can absorb ultraviolet light U having a wavelength of 390 nm or less. When the piezoelectric film 224 absorbs the ultraviolet light U, the piezoelectric film 224 is excited by the ultraviolet light U to generate an electron hole pair, resulting in an increase in the conductivity of the piezoelectric film 224 and a change in the wave velocity of the surface acoustic wave. Thus, the frequency of the frequency signal also changes, and the surface acoustic wave oscillator 110 can output the first frequency signal.
請再次參閱圖1,壓控振盪器120能輸出一第二頻率訊號,並能調整第二頻率訊號的頻率,其中第二頻率訊號的頻率介於102MHz至113MHz之間。在本實施例中,表面聲波振盪器110與壓控振盪器120均可以採用考畢子形式的振盪電路,而二者在電路架構上所使用的電晶體可以是型號BFR505的電晶體。Referring again to FIG. 1, the voltage controlled oscillator 120 can output a second frequency signal and can adjust the frequency of the second frequency signal, wherein the frequency of the second frequency signal is between 102 MHz and 113 MHz. In the present embodiment, both the surface acoustic wave oscillator 110 and the voltage controlled oscillator 120 may adopt an oscillation circuit in the form of a Cobbe, and the transistors used in the circuit architecture may be a transistor of the type BFR505.
混頻器130會接收第一頻率訊號與第二頻率訊號,並能將第一頻率訊號與第二頻率訊號進行混頻,以產生一混頻訊號,其中混頻訊號的頻率介於1HZ至10MHZ之間。具體而言,在第一頻率訊號與第二頻率訊號進行混頻時,混頻器130會將第一頻率訊號與第二頻率訊號二者的頻率相減。因此,混頻訊號的頻率可等於第一頻率訊號與第二頻率訊號二者頻率的差值。The mixer 130 receives the first frequency signal and the second frequency signal, and can mix the first frequency signal with the second frequency signal to generate a mixed signal, wherein the frequency of the mixed signal is between 1HZ and 10MHZ. between. Specifically, when the first frequency signal is mixed with the second frequency signal, the mixer 130 subtracts the frequency of both the first frequency signal and the second frequency signal. Therefore, the frequency of the mixed signal can be equal to the difference between the frequencies of the first frequency signal and the second frequency signal.
承上述,壓控振盪器120是當作本地振盪器(Local Oscillator,LO),而第二頻率訊號是作為參考用的頻率訊號。因此,混頻訊號的頻率可代表表面聲波振盪器110所輸出的頻率訊號,及頻率的變動量。具體而言,當表面聲波振盪器110被紫外光U照射時,透過混頻訊號的頻率,頻率訊號的頻率變動量可以得知。In view of the above, the voltage controlled oscillator 120 is used as a local oscillator (LO), and the second frequency signal is used as a reference frequency signal. Therefore, the frequency of the mixed signal can represent the frequency signal output by the surface acoustic wave oscillator 110 and the amount of fluctuation of the frequency. Specifically, when the surface acoustic wave oscillator 110 is irradiated with the ultraviolet light U, the frequency of the frequency signal can be transmitted through the frequency of the mixed signal.
壓控振盪器120可將第二頻率訊號的頻率範圍調整在±5 MHz,讓第二頻率訊號的頻率接近第一頻率訊號,例如當第一頻率訊號的頻率約為107 MHz時,第二頻率訊號的頻率可被調整為108MHz,以逼近第一頻率訊號的頻率。這樣可以降低混頻訊號的頻率,而有利於後續進行的工作。The voltage controlled oscillator 120 can adjust the frequency range of the second frequency signal to ±5 MHz, so that the frequency of the second frequency signal is close to the first frequency signal, for example, when the frequency of the first frequency signal is about 107 MHz, the second frequency The frequency of the signal can be adjusted to 108 MHz to approximate the frequency of the first frequency signal. This can reduce the frequency of the mixed signal, which is conducive to the subsequent work.
鎖相迴路140能對訊號進行頻率對電壓的轉換,而直接輸出電壓類比訊號,其中鎖相迴路140的型號例如是LM565。在混頻器130輸出混頻訊號之後,鎖相迴路140會接收混頻訊號,並將混頻訊號轉換成一電壓類比訊號。之後,鎖相迴路140會將電壓類比訊號往數位對類比轉換器150輸出。The phase-locked loop 140 can perform frequency-to-voltage conversion on the signal and directly output a voltage analog signal. The model of the phase-locked loop 140 is, for example, the LM565. After the mixer 130 outputs the mixed signal, the phase locked loop 140 receives the mixed signal and converts the mixed signal into a voltage analog signal. Thereafter, the phase locked loop 140 outputs the voltage analog signal to the digital to analog converter 150.
紫外光偵測器100可更包括一低頻放大器170。低頻放大器170電性連接於混頻器130與鎖相迴路140之間,並直接接收來自混頻器130的混頻訊號。低頻放大器170能放大混頻訊號中的低頻成分,以相對地降低高頻成分,例如混頻器130可以讓混頻訊號的頻率降到200kHz至1MHz的等級。The ultraviolet light detector 100 can further include a low frequency amplifier 170. The low frequency amplifier 170 is electrically connected between the mixer 130 and the phase locked loop 140 and directly receives the mixing signal from the mixer 130. The low frequency amplifier 170 can amplify low frequency components in the mixed signal to relatively reduce high frequency components. For example, the mixer 130 can reduce the frequency of the mixed signal to a level of 200 kHz to 1 MHz.
在混頻訊號轉換成電壓類比訊號之後,類比對數位轉換器150接收電壓類比訊號,並將電壓類比訊號轉換成一數位訊號,其中類比對數位轉換器150的型號例如是ADC0804。在產生數位訊號之後,類比對數位轉換器150將數位訊號輸出至處理單元160,而處理單元160能根據數位訊號,計算出紫外光U的能量值,其例如是功率。After the mixed signal is converted into the voltage analog signal, the analog-to-digital converter 150 receives the voltage analog signal and converts the voltage analog signal into a digital signal, wherein the analog-to-digital converter 150 is, for example, an ADC0804. After the digital signal is generated, the analog-to-digital converter 150 outputs the digital signal to the processing unit 160, and the processing unit 160 can calculate the energy value of the ultraviolet light U based on the digital signal, which is, for example, power.
承上述,處理單元160可以是單晶片,其例如是可程式化系統晶片(programmable system-on-chip)。處理單元160內儲存計算紫外光U能量值的程式,而此程式可以利用程式語言(例如C語言)來編輯,以校正紫外光U的能量值,讓計算結果更為準確。In the above, the processing unit 160 can be a single chip, which is, for example, a programmable system-on-chip. The processing unit 160 stores a program for calculating the energy value of the ultraviolet light U, and the program can be edited by using a programming language (for example, C language) to correct the energy value of the ultraviolet light U to make the calculation result more accurate.
另外,紫外光偵測器100可更包括一差動放大器180。差動放大器180電性連接於鎖相迴路140與類比對數位轉換器150之間,其中差動放大器180的型號可為μA741。在電壓類比訊號轉換之前,差動放大器180能接收並放大電壓類比訊號,並將放大後的電壓類比訊號輸入至類比對數位轉換器150。In addition, the ultraviolet light detector 100 may further include a differential amplifier 180. The differential amplifier 180 is electrically connected between the phase locked loop 140 and the analog-to-digital converter 150, wherein the differential amplifier 180 can be of the type μA741. Before the voltage analog signal conversion, the differential amplifier 180 can receive and amplify the voltage analog signal, and input the amplified voltage analog signal to the analog to digital converter 150.
紫外光偵測器100可以更包括一顯示單元190,其中顯示單元190電性連接處理單元160,並能顯示紫外光U的能量值,例如紫外光U的功率。詳細而言,在處理單元160計算出紫外光U的能量值之後,處理單元160會命令顯示單元190根據此電訊號來顯示紫外光U的能量值。此外,顯示單元190可以是電視螢幕或電腦螢幕等顯示器。The ultraviolet light detector 100 may further include a display unit 190, wherein the display unit 190 is electrically connected to the processing unit 160 and can display the energy value of the ultraviolet light U, such as the power of the ultraviolet light U. In detail, after the processing unit 160 calculates the energy value of the ultraviolet light U, the processing unit 160 instructs the display unit 190 to display the energy value of the ultraviolet light U according to the electrical signal. In addition, the display unit 190 can be a display such as a television screen or a computer screen.
綜上所述,本發明的紫外光偵測器是利用表面聲波的原理來偵測紫外光。因此,本發明不僅能偵測紫外光的存在,同時還能透過混頻訊號的頻率,準確地求出紫外光的能量值(例如功率)。In summary, the ultraviolet light detector of the present invention utilizes the principle of surface acoustic waves to detect ultraviolet light. Therefore, the present invention can not only detect the presence of ultraviolet light, but also accurately determine the energy value (for example, power) of the ultraviolet light by the frequency of the mixed signal.
其次,本發明的紫外光偵測器是透過混頻器、鎖相迴路、類比對數位轉換器以及處理單元等電子元件來處理訊號,而這些電子元件可整合成一塊電路板。因此,相較於傳統的紫外光偵測器,本發明的紫外光偵測器具有體積小,便於攜帶,以及不易破裂等優點。Secondly, the ultraviolet light detector of the present invention processes signals through electronic components such as a mixer, a phase-locked loop, an analog-to-digital converter, and a processing unit, and the electronic components can be integrated into one circuit board. Therefore, compared with the conventional ultraviolet light detector, the ultraviolet light detector of the present invention has the advantages of small volume, portability, and difficulty in cracking.
再者,本發明是利用鎖相迴路,直接將混頻訊號轉換成電壓類比訊號,所以第一頻率訊號不必經過一連串繁瑣且複雜的放大、降頻與除頻等流程,而本發明也不需要採用頻率-電壓轉換積體電路(frequency to voltage IC)。因此,在偵測紫外光方面,本發明更具有運算快速的優點。Furthermore, the present invention utilizes a phase-locked loop to directly convert a mixed signal into a voltage analog signal, so that the first frequency signal does not have to go through a series of complicated and complicated processes of amplification, frequency reduction, and frequency division, and the present invention does not need to A frequency to voltage IC is used. Therefore, the present invention has the advantage of being fast in operation in detecting ultraviolet light.
雖然本發明以較佳實施例揭露如上,然其並非用以限定本發明,任何熟習相像技藝者,在不脫離本發明之精神和範圍內,所作更動與潤飾之等效替換,仍為本發明之專利保護範圍內。While the present invention has been described above by way of a preferred embodiment, it is not intended to limit the invention, and the equivalents of the modification and retouching are still in the present invention without departing from the spirit and scope of the invention. Within the scope of patent protection.
100...紫外光偵測器100. . . Ultraviolet detector
110...表面聲波振盪器110. . . Surface acoustic wave oscillator
112a、112b...匹配電路112a, 112b. . . Matching circuit
114...放大器114. . . Amplifier
120...壓控振盪器120. . . Voltage controlled oscillator
130...混頻器130. . . Mixer
140...鎖相迴路140. . . Phase-locked loop
150...類比對數位轉換器150. . . Analog to digital converter
160...處理單元160. . . Processing unit
170...低頻放大器170. . . Low frequency amplifier
180...差動放大器180. . . Differential amplifier
190...顯示單元190. . . Display unit
200...表面聲波元件200. . . Surface acoustic wave component
210a、210b...電極210a, 210b. . . electrode
220...壓電基材220. . . Piezoelectric substrate
222...基板222. . . Substrate
224...壓電薄膜224. . . Piezoelectric film
U...紫外光U. . . Ultraviolet light
圖1是本發明一實施例之紫外光偵測器的方塊示意圖。1 is a block diagram of an ultraviolet light detector according to an embodiment of the present invention.
圖2是圖1中的表面聲波元件的俯視示意圖。2 is a top plan view of the surface acoustic wave element of FIG. 1.
100...紫外光偵測器100. . . Ultraviolet detector
110...表面聲波振盪器110. . . Surface acoustic wave oscillator
112a、112b...匹配電路112a, 112b. . . Matching circuit
114...放大器114. . . Amplifier
120...壓控振盪器120. . . Voltage controlled oscillator
130...混頻器130. . . Mixer
140...鎖相迴路140. . . Phase-locked loop
150...類比對數位轉換器150. . . Analog to digital converter
160...處理單元160. . . Processing unit
170...低頻放大器170. . . Low frequency amplifier
180...差動放大器180. . . Differential amplifier
190...顯示單元190. . . Display unit
200...表面聲波元件200. . . Surface acoustic wave component
210a、210b...電極210a, 210b. . . electrode
220...壓電基材220. . . Piezoelectric substrate
222...基板222. . . Substrate
224...壓電薄膜224. . . Piezoelectric film
U...紫外光U. . . Ultraviolet light
Claims (13)
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TW200828636A (en) * | 2006-12-28 | 2008-07-01 | Univ Chung Yuan Christian | Ultraviolet light sensing device of surface acoustic wave by using III group nitride |
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US6710515B2 (en) * | 2000-07-13 | 2004-03-23 | Rutgers, The State University Of New Jersey | Integrated tunable surface acoustic wave technology and sensors provided thereby |
TWI293805B (en) * | 2006-01-24 | 2008-02-21 | Ind Tech Res Inst | Ultraviolet detector |
TW200828636A (en) * | 2006-12-28 | 2008-07-01 | Univ Chung Yuan Christian | Ultraviolet light sensing device of surface acoustic wave by using III group nitride |
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