TWI394967B - Defect inspection device and inspection method of solar cell - Google Patents

Defect inspection device and inspection method of solar cell Download PDF

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TWI394967B
TWI394967B TW101121299A TW101121299A TWI394967B TW I394967 B TWI394967 B TW I394967B TW 101121299 A TW101121299 A TW 101121299A TW 101121299 A TW101121299 A TW 101121299A TW I394967 B TWI394967 B TW I394967B
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bias current
voltage
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solar cell
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TW201303326A (en
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Seiji Yoshino
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Npc Inc
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10Testing of PV devices, e.g. of PV modules or single PV cells
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10Testing of PV devices, e.g. of PV modules or single PV cells
    • H02S50/15Testing of PV devices, e.g. of PV modules or single PV cells using optical means, e.g. using electroluminescence
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Description

太陽電池之缺陷檢查裝置及檢查方法Solar cell defect inspection device and inspection method 技術領域Technical field

本發明係一種有關於檢查太陽電池缺陷之裝置及檢查方法。The present invention is a device and method for inspecting defects in a solar cell.

背景技術Background technique

近年隨著環保意識之高漲,逐漸有大量之太陽電池流通在市面上。如此一來,檢查太陽電池之性能,於製造步驟特定並除去有缺陷之太陽電池至為重要。In recent years, with the rising awareness of environmental protection, a large number of solar cells have been circulating in the market. As such, it is important to check the performance of the solar cell, specifying the manufacturing steps and removing defective solar cells.

以下之專利文獻1中,揭示有使用主光源與副光源共二個光源之太陽電池輸出檢測裝置。太陽電池中,在複數太陽電池單元經串聯時,裝置全體之輸出電流值係與發電量最少之太陽電池單元所發電之電流值相同。因此,主光源部係對太陽電池之一部分檢測對象單元的受光面照射光,而副光源部則對非檢測對象單元之受光面照射照度較高之光,且使於非檢測對象單元產生較高之電流值,藉此可檢測檢測對象單元之受光面之面內分布。Patent Document 1 below discloses a solar cell output detecting device using two light sources of a main light source and a sub light source. In a solar cell, when a plurality of solar cells are connected in series, the output current value of the entire device is the same as the current value generated by the solar cell with the least amount of power generation. Therefore, the main light source unit illuminates the light receiving surface of the detecting unit of the solar cell, and the sub light source unit illuminates the light receiving surface of the non-detecting target unit with high illuminance, and generates a high current for the non-detecting target unit. The value is thereby used to detect the in-plane distribution of the light receiving surface of the detection target unit.

又,專利文獻2揭示有藉由電致發光(以下稱為EL)法之檢查裝置。該裝置係根據對太陽電池施加順向電流時就會發光之特性來檢測裂痕或缺口等缺陷。Further, Patent Document 2 discloses an inspection apparatus by an electroluminescence (hereinafter referred to as EL) method. The device detects defects such as cracks or notches based on the characteristics of light emitted when a forward current is applied to the solar cell.

先行技術文獻Advanced technical literature 專利文獻Patent literature

【專利文獻1】日本特開2010-238906號[Patent Document 1] Japanese Patent Laid-Open No. 2010-238906

【專利文獻2】日本特表2006-59615號[Patent Document 2] Japanese Special Table 2006-59615

發明揭示Invention

然而,在已串聯太陽電池單元之串與模組之檢測中,在使用主光源部與副光源部共二個光源進行輸出檢測時,係將來自主光源部之光照射的檢測對象單元之發電電流,與旁通且流動檢測對象單元之電阻成分的非檢測對象單元之發電電流相加來加以檢測。即,太陽電池單元係可用等效電路來表現,而該等效電路包含有:串聯之電流源與二極體、與該電流源及二極體並聯之電阻、更與該電流源及二極體串聯之電阻者。藉此,將上述太陽電池複數串聯時,個別之單元中與電流源及二極體並聯之電阻中會流動已旁通之電流。例如,在檢測第1個太陽電池單元時,對於已測出之電流值,係除了第1個單元之發電電流以外,非檢測對象之第2個以後之單元所發電之電流會流動於第1個單元之並聯電阻而相加。以下,將該已旁通之電流稱為偏壓電流。However, in the detection of the series and the module of the tandem solar cell unit, when the output detection is performed using the two main light sources of the main light source unit and the sub-light source unit, the generation current of the detection target unit irradiated with the light of the autonomous light source unit is generated. And detecting the generated current of the non-detecting target unit of the resistance component of the bypass and flowing detection target unit. That is, the solar cell unit can be represented by an equivalent circuit, and the equivalent circuit includes: a series current source and a diode, a resistor connected in parallel with the current source and the diode, and the current source and the diode The resistance of the body series. Therefore, when the solar cells are connected in series, the bypassed current flows in the resistors connected to the current source and the diode in the individual cells. For example, when the first solar cell is detected, the current generated by the cell after the second cell other than the non-detection source flows in the first step, except for the current value of the first cell. The parallel resistances of the cells are added together. Hereinafter, the bypassed current is referred to as a bias current.

構成串與模組之各個單元,係依據單元製造時之品質不均,而分別具有不同內部電阻值。故,依據副光源部之光照射,每一太陽電池單元會流動不同偏壓電流,而無法獲得正確之檢查結果。Each unit constituting the string and the module has different internal resistance values depending on the quality unevenness of the unit manufacturing. Therefore, according to the light irradiation of the sub-light source portion, each solar cell unit will flow different bias currents, and the correct inspection result cannot be obtained.

特別是當偏壓電流一大,於檢查結果之顯示圖像中缺陷單元之圖像就會超過檢測系統之輸入範圍,因此會變成超過圖像資料之處理上限而亮度過高之圖像而呈現一片雪 白。In particular, when the bias current is large, the image of the defective unit in the display image of the inspection result exceeds the input range of the detection system, and thus becomes an image exceeding the upper limit of processing of the image data and the brightness is too high. a piece of snow White.

偏壓電流較主光源部之發電電流為大,若將其保持原狀地轉換成圖像,在檢測複數單元中例如檢測電阻小之第1個單元時,就會輸出一檢測出只有該第1個單元之發電量相當多的錯誤結果。The bias current is larger than the power generation current of the main light source unit, and if it is converted into an image in the original state, for example, when detecting the first unit having a small resistance, the output unit detects that only the first one is detected. The unit's power generation is quite a erroneous result.

又,依據串及模組內太陽電池之電阻成分的不均狀況,可能會將不良部分判定為良好,或良好部分判定為不良。因此,在使用有2個光源之缺陷檢查裝置中,必須檢出偏壓電流,並從已相加之電流值將該數值減去,而關於此點專利文獻1中係完全無記載。Further, depending on the unevenness of the resistance components of the solar cells in the string and the module, the defective portion may be judged to be good, or the good portion may be judged to be defective. Therefore, in the defect inspection apparatus using two light sources, it is necessary to detect the bias current and subtract the value from the added current value, and there is no description at all in Patent Document 1.

又,EL法中,在用於檢查多結晶型太陽電池之情況下,當已流動順向電流時,會受到存在於多結晶型太陽電池之發電之粒界部與不發電之粒界部的影響,而有難以藉由多結晶型太陽電池單元之粒界形態缺限的圖像進行判別之問題。Further, in the EL method, when a polycrystalline solar cell is used, when a forward current has flowed, it is affected by the grain boundary portion of the power generation of the polycrystalline solar cell and the grain boundary portion of the non-power generation. However, there is a problem that it is difficult to discriminate by an image in which the grain boundary form of the polycrystalline solar cell unit is defective.

有鑑於上述情事,本發明之目的係在於提供一種可用高精度判定缺陷之太陽電池之缺陷檢查裝置及檢查方法。In view of the above circumstances, an object of the present invention is to provide a defect inspection device and an inspection method for a solar cell which can determine a defect with high precision.

本發明之太陽電池之缺陷檢查裝置,係檢查已串聯複數單元之太陽電池之缺陷者,其特徵在於包含有:主光源,係對前述單元中之檢測對象之單元照射光者;副光源,係對前述單元中之非檢測對象之單元照射光者;光源控制電路,係控制前述主光源與前述副光源分別之照度,使前述副光源之照度較前述主光源照度為高者;電流電壓轉換器,係被賦予前述太陽電池 所輸出之電流,且將其加以轉換成電壓並輸出者;放大器,係被賦予前述電流電壓轉換器所輸出之電壓,且將其加以放大並輸出者;偏壓電流抽出電路,係將包含於來自前述放大器之輸出的偏壓電流抽出並加以輸出者;偏壓電流抵銷電路,係將來自前述放大器之前述輸出,減去前述偏壓電流抽出電路所抽出之前述偏壓電流並加以輸出者;A/D轉換器,係將來自前述偏壓電流抵銷電路之輸出轉換成數位資料並加以輸出者;圖像處理裝置,係對前述A/D轉換器所輸出之數位資料進行圖像處理並輸出圖像資料者;及,顯示器,係被賦予前述圖像處理裝置所輸出之前述圖像資料並進行圖像顯示者,且,前述缺陷檢查裝置係根據已考量前述偏壓電流且檢測對象之單元已發電之啟動電流成分來進行檢查。The defect inspection device for a solar cell of the present invention is for inspecting a defect of a solar cell having a plurality of cells connected in series, and is characterized by comprising: a main light source, which is a device that irradiates light to a unit of the detection target in the unit; Illuminating the unit of the non-detecting object in the unit; the light source control circuit controls the illuminance of the main light source and the sub-light source respectively, so that the illuminance of the sub-light source is higher than the illuminance of the main light source; the current-voltage converter , is given the aforementioned solar cell The output current is converted into a voltage and output; the amplifier is given the voltage output by the current-voltage converter, and is amplified and output; the bias current extraction circuit is included in The bias current from the output of the amplifier is extracted and output; the bias current cancellation circuit subtracts the bias current drawn by the bias current extraction circuit from the output of the amplifier and outputs the output The A/D converter converts the output from the bias current canceling circuit into digital data and outputs it; the image processing device performs image processing on the digital data output by the A/D converter. And outputting the image data; and the display is provided to the image data output by the image processing device and displaying the image, and the defect inspection device determines the target according to the bias current The unit has generated the starting current component for power generation for inspection.

本發明之太陽電池之缺陷之檢查方法,係檢查已串聯複數單元之太陽電池之缺陷者,其特徵在於包含有以下步驟:藉由主光源,用第1照度對前述單元中之檢測對象之單元,照射光;藉由副光源,用較前述第1照度高之第2照度對前述單元中之非檢測對象之單元照射光;藉由偏壓電流抽出電路,抽出包含於前述太陽電池所輸出之電流之偏壓電流;藉由偏壓電流抵銷電路,從前述太陽電池所輸出之電流抵銷前述偏壓電流;及,使用來自前述偏壓電流抵銷電路之輸出來進行圖像處理且顯示於顯示器,藉此,根據已考量前述偏壓電流且檢測對象之單元已發電之啟動電流成分來進行檢查。The method for inspecting a defect of a solar cell of the present invention is for inspecting a defect of a solar cell in which a plurality of cells have been connected in series, and is characterized in that the method comprises the steps of: detecting, by the first light source, a unit of the detection target in the unit by using the first light source Irradiating light; illuminating a unit of the non-detection target in the unit with a second illuminance higher than the first illuminance by a sub-light source; and extracting the output included in the solar cell by a bias current extraction circuit a bias current of the current; the bias current is offset from the current output by the solar cell by the bias current canceling circuit; and the output from the bias current canceling circuit is used for image processing and display In the display, the inspection is performed based on the starting current component that has been subjected to the aforementioned bias current and the unit of the detection target has been generated.

依據本發明之太陽電池之缺陷檢查裝置及檢查方法,使用主光源部與副光源部共2個光源,可進行已將偏壓電流除去之正確發電電流之檢測,結果,亦可適當地進行缺陷之圖像顯示。又,依據本發明,即使是太陽電池使用多結晶型太陽電時,由於不會受粒界之影響,因此在已圖像化時不會出現粒界花紋,而可只特定裂痕等缺陷部位。According to the defect inspection apparatus and the inspection method of the solar battery of the present invention, the two main light sources and the sub-light source unit are used in total, and the detection of the correct current generated by the bias current can be performed. As a result, the defect can be appropriately performed. The image is displayed. Further, according to the present invention, even when the solar cell uses the polycrystalline solar power, since it is not affected by the grain boundary, the grain boundary pattern is not formed when the image is formed, and only the defect portion such as the crack can be specified.

圖式之簡單說明Simple description of the schema

第1圖係顯示本發明其中一實施形態中太陽電池之缺陷檢查裝置全體構成的立體圖。Fig. 1 is a perspective view showing the overall configuration of a defect inspection device for a solar cell according to an embodiment of the present invention.

第2圖係顯示同缺陷檢查裝置中偏壓電流抽出電路之構成例的電路圖。Fig. 2 is a circuit diagram showing a configuration example of a bias current extraction circuit in the same defect inspection device.

第3(a)~(d)圖係顯示具有第2圖所示構成之偏壓電流抽出電路中各部分之電壓波形的圖表。The third (a) to (d) diagrams are graphs showing the voltage waveforms of the respective portions of the bias current extraction circuit having the configuration shown in Fig. 2.

第4圖係顯示同缺陷檢查裝置中偏壓電流抽出電路之其他構成例的電路圖。Fig. 4 is a circuit diagram showing another configuration example of the bias current extraction circuit in the same defect inspection device.

第5圖係顯示同偏壓電流抽出電路中抽出偏壓電流之時機之時間圖。Fig. 5 is a timing chart showing the timing of extracting the bias current in the same bias current drawing circuit.

第6(a)~(c)圖係顯示同缺陷檢查裝置使用發電電流之檢測值來圖像化之方法的說明圖。The sixth (a) to (c) diagrams are explanatory diagrams showing a method of imaging with the detection value of the generated current by the defect inspection device.

第7圖係顯示同缺陷檢查裝置中抵銷偏壓電流前之檢出電流之圖表。Fig. 7 is a graph showing the detected current before the bias current is offset in the defect inspection device.

第8圖係顯示同缺陷檢查裝置中抵銷偏壓電流前之檢查圖像之說明圖。Fig. 8 is an explanatory view showing an inspection image before the bias current is canceled in the defect inspection device.

第9圖係顯示同缺陷檢查裝置中抵銷偏壓電流後之檢 出電流之圖表。Figure 9 shows the inspection after offsetting the bias current in the same defect inspection device. A chart of current flow.

第10圖係顯示同缺陷檢查裝置中抵銷偏壓電流後之檢查圖像之說明圖。Fig. 10 is an explanatory view showing an inspection image after the bias current is canceled in the defect inspection device.

用以實施發明之形態Form for implementing the invention

以下,參考圖式來說明本發明的實施形態。Hereinafter, embodiments of the present invention will be described with reference to the drawings.

第1圖顯示本發明實施形態中太陽電池之缺陷檢查裝置之全體構成。Fig. 1 shows the overall configuration of a defect inspection device for a solar cell according to an embodiment of the present invention.

該缺陷檢查裝置具有:載置台1、檢查接腳2、主光源3、副光源4、光源控制電路5、移動機構6、分流器電阻7、放大器8、偏壓電流抽出電路9、偏壓電流抵銷電路10、遮蔽(mute)電路11、類比數位(以下稱為A/D)轉換器12、圖像處理裝置13、以及顯示器14。The defect inspection device includes a mounting table 1, an inspection pin 2, a main light source 3, a sub-light source 4, a light source control circuit 5, a moving mechanism 6, a shunt resistor 7, an amplifier 8, a bias current extraction circuit 9, and a bias current. The offset circuit 10, the mute circuit 11, the analog digital (hereinafter referred to as A/D) converter 12, the image processing device 13, and the display 14.

載置台1係設於缺陷檢查裝置之上部而可載置太陽電池S,且檢測對象之太陽電池S係使受光面向下而被載置於此處。又,在此太陽電池S係指已串聯複數太陽電池之串以及已連接串之模組。載置台1係宜以玻璃等具有透明性之材料來構成。The mounting table 1 is placed on the upper portion of the defect inspection device to mount the solar battery S, and the solar cell S to be detected is placed with the light receiving surface facing downward. Moreover, the solar cell S here refers to a series of solar cell strings and modules connected to the strings. The mounting table 1 is preferably made of a material having transparency such as glass.

針對突出於所載置之太陽電池S兩端之標記導線(Tab lead),分別連接已設置於載置台1兩端的檢查接腳2。在此狀態下,從載置台1下面所配置之主光源3,對檢測對象之態樣電池單元照射光。在此,主光源3可藉由移動機構6朝太陽電池S之長邊方向移動。且主光源3之初始位置係位在成為第1次檢測對象之太陽電池S之第1個單元的正下方。 而,在本實施形態係使用雷射光源來作為主光源3。The inspection pins 2 that are provided at both ends of the mounting table 1 are respectively connected to the tab leads protruding from the both ends of the mounted solar cells S. In this state, the main light source 3 disposed under the mounting table 1 emits light to the state battery unit to be detected. Here, the main light source 3 can be moved toward the longitudinal direction of the solar cell S by the moving mechanism 6. The initial position of the main light source 3 is directly below the first unit of the solar cell S which is the first detection target. In the present embodiment, a laser light source is used as the main light source 3.

對於太陽電池S中殘留之全部單元(即非檢測對象單元之全體),從複數之副光源4來照射光。此時,藉由光源控制電路5,將副光源4之光的放射照度控制成較主光源3之光的放射照度為高。All the cells remaining in the solar cell S (that is, the entire non-detection target cell) are irradiated with light from a plurality of sub-light sources 4. At this time, the illuminance of the light of the sub-light source 4 is controlled to be higher than the illuminance of the light of the main light source 3 by the light source control circuit 5.

將已發電之檢測對象單元之電流從檢查接腳2取出,且將分流器電阻7之兩端所產生之電壓用放大器放大,藉此將所檢出之電流轉換成電壓。而,不限於分流器電阻7,只要是將電流轉換成電壓之電流電壓轉換器即可。The current of the detected detection unit is taken out from the inspection pin 2, and the voltage generated at both ends of the shunt resistor 7 is amplified by an amplifier, thereby converting the detected current into a voltage. However, it is not limited to the shunt resistor 7 as long as it is a current-voltage converter that converts a current into a voltage.

已放大之電壓值Va+Vb係被賦予至偏壓電流抽出電路9,且抽出與藉由副光源4之光的照射所產生之偏壓電流成分對應之偏壓電壓值Vb。而,Va係由檢測對象單元中光啟動電力產生之電壓。The amplified voltage value Va+Vb is applied to the bias current extraction circuit 9, and the bias voltage value Vb corresponding to the bias current component generated by the irradiation of the light of the sub-light source 4 is extracted. On the other hand, Va is a voltage generated by the light-initiating power in the detection target unit.

偏壓電流抵銷電路10係由訊差放大器構成,被賦予有放大器8所輸出之電壓Va+Vb、與偏壓電流抽出電路9所抽出之偏壓電壓Vb,並將從電壓Va+Vb減去偏壓電壓Vb之值放大且輸出。而來自偏壓電流抵銷電路10之輸出會被賦予至遮蔽電路11。The bias current canceling circuit 10 is composed of a noise amplifier, and is supplied with a voltage Va+Vb output from the amplifier 8 and a bias voltage Vb extracted from the bias current extracting circuit 9, and is subtracted from the voltage Va+Vb. The value of the bias voltage Vb is amplified and output. The output from the bias current canceling circuit 10 is given to the masking circuit 11.

遮蔽電路11係構造成可將在偏壓電流抵銷電路10抵銷偏壓電流成分時發生之過渡性訊號之雜亂遮蔽(muting),且不會顯示於之後的顯示器14中的圖像。雖該遮蔽電路11係期望設置成過渡性訊號的雜亂不會影響圖像,但只要根據期望之圖像品質來設置即可,不一定是不可或缺條件。The shielding circuit 11 is configured to be capable of muting the transient signal generated when the bias current canceling circuit 10 cancels the bias current component, and is not displayed on the image in the subsequent display 14. Although the masking circuit 11 is desirably set to be a transitional signal, the image does not affect the image, but it is not necessarily an indispensable condition as long as it is set according to the desired image quality.

來自遮蔽電路11之輸出係藉由A/D轉換器12轉換成數 位資料,且在圖像處裡裝置13中實施圖像處理,顯示於顯示器14。The output from the masking circuit 11 is converted into a number by the A/D converter 12. The bit data is subjected to image processing in the image device 13 and displayed on the display 14.

如此一來,從來自檢測對象之第1個太陽電池單元之輸出抵銷偏壓電流,只取出發電電流,顯示於顯示器14。In this way, the output current is offset from the output of the first solar cell from the detection target, and only the generated current is taken out and displayed on the display 14.

在檢測對象之第1個太陽電池單元之檢測結束後,檢測對象單元會移到第2個太陽電池單元。因此,主光源3會藉由移動機構6朝第2個太陽電池單元之下部移動,並朝第2個太陽電池單元照射光。此時,副光源4之照射對象係藉由光源控制電路5,切換為除了已成為新檢測對象單元之第2個太陽電池單元以外的全部非檢測對象單元。之後的步驟係與第1個單元之檢測流程相同。After the detection of the first solar cell of the detection target is completed, the detection target unit moves to the second solar cell. Therefore, the main light source 3 moves toward the lower portion of the second solar cell unit by the moving mechanism 6, and illuminates the second solar cell unit. At this time, the object to be irradiated by the sub-light source 4 is switched to all of the non-detection target units other than the second solar battery cell that has become the new detection target unit by the light source control circuit 5. The subsequent steps are the same as the detection process of the first unit.

經過如此之流程,直到太陽電池S之全部單元之檢測結束前,重覆上述之來自太陽電池單元之輸出電流之檢測、偏壓電流之抵銷、直到圖像化前之處理,並檢測各單元每一發電電流而顯示為圖像資料。After such a process, until the detection of all the cells of the solar cell S is completed, the detection of the output current from the solar cell unit, the offset of the bias current, the processing until the image formation, and the detection of each unit are repeated. Each generated current is displayed as image data.

第2圖係顯示偏壓電流抽出電路9之電路構成例。該構成係採用類比電路方式,且具有:低通濾過器21、減法電路22、包絡線偵測電路23、加法電路24、取樣保持電路25、時機訊號產生電路26。Fig. 2 is a view showing an example of the circuit configuration of the bias current extraction circuit 9. This configuration employs an analog circuit method and includes a low pass filter 21, a subtraction circuit 22, an envelope detection circuit 23, an addition circuit 24, a sample and hold circuit 25, and a timing signal generation circuit 26.

使用顯示有由該第2圖中各電路元件輸出之電壓V1~V6之波形的第3圖,來說明該偏壓電流抽出電路9之動作。The operation of the bias current extraction circuit 9 will be described using a third diagram showing the waveforms of the voltages V1 to V6 output from the circuit elements in the second drawing.

藉由第1圖所示之放大器8所放大且輸出之電壓V1(=Va+Vb)係具有包含如第3(a)圖所示之高頻成分之波 形。The voltage V1 (=Va+Vb) amplified by the amplifier 8 shown in Fig. 1 has a wave including a high-frequency component as shown in Fig. 3(a). shape.

將該電壓V1輸入低通濾過器21且積分,除去高頻成分作為如第3(a)圖所示之電壓V2來輸出。This voltage V1 is input to the low-pass filter 21 and integrated, and the high-frequency component is removed and output as the voltage V2 as shown in the third figure (a).

將該電壓V2與放大器8所輸出之電壓V1輸入減法電路22,且將電壓V1減去電壓V2。藉此,可抽出具有電壓V1所含之高頻成分(即與發電電流對應之如第3圖所示之波形)的電壓V3。該電壓V3係含有漣波(ripple)。The voltage V2 and the voltage V1 output from the amplifier 8 are input to the subtraction circuit 22, and the voltage V1 is subtracted from the voltage V2. Thereby, the voltage V3 having the high-frequency component (that is, the waveform shown in FIG. 3 corresponding to the generated current) included in the voltage V1 can be extracted. This voltage V3 contains ripples.

該電壓V3係被賦予至電壓包絡線偵測電路23,且藉由偵測該電壓之下限,可獲得具有如第3(b)圖所示之波形的電壓V4。This voltage V3 is applied to the voltage envelope detecting circuit 23, and by detecting the lower limit of the voltage, a voltage V4 having a waveform as shown in Fig. 3(b) can be obtained.

將該電壓V4與低通濾過器21所輸出之電壓V2輸入至加法電路24且相加,可獲得與如第3(c)圖所示之偏壓電流成分對應之電壓V5。The voltage V4 and the voltage V2 output from the low-pass filter 21 are input to the adding circuit 24 and added, and a voltage V5 corresponding to the bias current component as shown in the third figure (c) can be obtained.

然而,該電壓V5殘留有包絡線偵測電路23中產生之漣波。因此,使用一顯示時機產生電路26所產生之預定時機的取樣訊號,在取樣保持電路中進行取樣與保持,使偏壓電流呈一定值。藉此,可獲得與如第3(d)圖所示之偏壓電流對應的電壓V6。而,減法電路22與加法電路24可由演算放大器或電晶體等構成。However, the voltage V5 remains with the chopping generated in the envelope detecting circuit 23. Therefore, the sampling signal of the predetermined timing generated by the display timing generating circuit 26 is used to perform sampling and holding in the sample and hold circuit so that the bias current has a constant value. Thereby, the voltage V6 corresponding to the bias current as shown in FIG. 3(d) can be obtained. Further, the subtraction circuit 22 and the addition circuit 24 may be constituted by an arithmetic amplifier, a transistor, or the like.

第4圖顯示偏壓電流抽出電路9之其他電路構成例。該構成相當於使用微電腦且採用數位電路方式之例,具有A/D轉換器31、微電腦32、時機訊號產生電路33、及D/A轉換器34。Fig. 4 shows an example of another circuit configuration of the bias current extraction circuit 9. This configuration corresponds to an example in which a microcomputer is used and a digital circuit system is used, and includes an A/D converter 31, a microcomputer 32, a timing signal generating circuit 33, and a D/A converter 34.

當使用該偏壓電流抽出電路9時,在開始已使用主光源3之太陽電池S的檢查前,預先對檢測對象單元以外之太陽電池S全體,只以副光源4之光來照射。即,僅檢測對象之第1個單元未照射到光,而對第1個單元以外之太陽電池S全體照射的狀態,且以該狀態來檢測偏壓電流。When the bias current extraction circuit 9 is used, the entire solar cell S other than the detection target unit is irradiated with only the light of the sub-light source 4 before the inspection of the solar cell S using the main light source 3 is started. In other words, only the first unit of the detection target is not irradiated with light, and the entire surface of the solar cell S other than the first unit is irradiated, and the bias current is detected in this state.

接著,對第2個單元以外之太陽電池S之全體照射副光源4之光,且檢測偏壓電流值。用這樣的流程去切換副光源4之非照射對象,完成全部單元之偏壓電流值之檢測,並藉由A/D轉換器31將測出之類比形態之偏壓電流值轉換成數位資料,預先將時機訊號產生電路33所產生之時機中之資料保存於微電腦32。當該資料被微電腦32讀出時,會藉由D/A轉換器34轉換成類比形態之偏壓電流值後並輸出。Next, the light of the sub-light source 4 is irradiated to the entire solar cell S other than the second cell, and the bias current value is detected. By using such a process, the non-irradiation object of the sub-light source 4 is switched, the detection of the bias current value of all the cells is completed, and the measured bias current value of the analog form is converted into digital data by the A/D converter 31. The data in the timing generated by the timing signal generating circuit 33 is stored in the microcomputer 32 in advance. When the data is read by the microcomputer 32, it is converted into an analog current bias current value by the D/A converter 34 and output.

之後,開始太陽電池S之檢查。隨著照射檢測對象單元之主光源3移動而切換副光源4之照射對象。隨著該切換,可讀出微電腦32所保存之資料,且藉由偏壓電流抵消電路10從檢測值減去偏壓電流值,僅求取檢測對象單元之發電電流。After that, the inspection of the solar cell S is started. The irradiation target of the sub-light source 4 is switched as the main light source 3 of the irradiation detection target unit moves. With this switching, the data held by the microcomputer 32 can be read, and the bias current canceling circuit 10 subtracts the bias current value from the detected value, and only the generated current of the detecting target unit is obtained.

第5圖顯示抽出偏壓電流成分之時機。在此,使用LED1~LED5作為副光源4。Figure 5 shows the timing of extracting the bias current component. Here, LED1 to LED5 are used as the sub-light source 4.

檢測對象單元為第1個單元時,位於第1個單元正下方之LED1為熄滅狀態,而與其他全部單元對應之LED2~LED5則為點亮狀態。When the detection target unit is the first unit, the LED 1 located immediately below the first unit is turned off, and the LEDs 2 to 5 corresponding to all other units are turned on.

接著,在開始檢測作為檢測對象單元之第2個單元前,點亮LED1,而熄滅LED2來取代。其他之LED3~LED5則維 持點亮狀態。該等點亮、熄滅之切換時機,係例如以鄰接單元之界線為準,或使其與主光源3朝下一個檢測對象移動之時機相同等,任一者亦可。Next, before starting to detect the second unit as the detection target unit, the LED 1 is turned on, and the LED 2 is turned off to replace it. Other LED3~LED5 are dimensional Hold the light state. The timing of switching between the lighting and the extinction may be, for example, the boundary of the adjacent unit or the timing at which the main light source 3 moves toward the next detection target, or the like.

根據鄰接單元之界線來切換LED1~LED5之點亮、熄滅時,係使用紅外線、雷射感測器等來檢出單元之界線。而,在從雷射感測器等感測器輸出光時,宜較檢查用之主光源3之輸出要小許多。When the LEDs 1 to 5 are turned on or off according to the boundary of the adjacent unit, infrared rays, a laser sensor, or the like is used to detect the boundary of the unit. However, when outputting light from a sensor such as a laser sensor, it is preferable to use a smaller output than the main light source 3 for inspection.

同樣地,在開始檢測作為檢測對象單元之第3個單元前,點亮LED2,而熄滅LED3來取代,且其他LED1、LED4~LED5則維持點亮狀態。在開始檢測作為檢測對象單元之第4個單元前,點亮LED3,而熄滅LED4來取代,且其他LED1~LED2、LED5則維持點亮狀態。在開始檢測作為檢測對象單元之第5個單元前,點亮LED4,而熄滅LED5來取代,且其他LED1~LED3、LED5則維持點亮狀態。Similarly, before starting to detect the third unit as the detection target unit, the LED 2 is turned on, and the LED 3 is turned off instead, and the other LEDs 1 and LED4 to LED5 are kept in the lighting state. Before starting the detection of the fourth unit as the detection target unit, the LED 3 is turned on, and the LED 4 is turned off, and the other LEDs 1 to 2 and 2 are kept lit. Before the detection of the fifth unit as the detection target unit, the LED 4 is turned on, and the LED 5 is turned off instead, and the other LEDs 1 to LED3 and the LED 5 are kept in the lighting state.

經由這樣的流程,輸出第1~5個單元之各自的偏壓電流Ib1~Ib5,且按照預定之時機,取得當時之偏壓電流值。Through such a flow, the bias currents Ib1 to Ib5 of the first to fifth cells are output, and the current bias current value is obtained at a predetermined timing.

參考第6圖,說明使用太陽電池S所發電之光啟動電流來進行圖像顯示之方法。Referring to Fig. 6, a method of performing image display using the light starting current generated by the solar cell S will be described.

如第6(a)圖所示,對於表面存在缺陷(裂痕)之太陽電池單元,於與突出於兩端之標記導線正交之方向,將來自主光源3之雷射光從圖中左至右方向來掃瞄。藉此所得之發電電流I1、I2、...、In(n為2以上之整數),包含有與各自掃瞄線上之缺陷位置對應之電流成分。As shown in Fig. 6(a), for a solar cell having a surface defect (crack), in the direction orthogonal to the mark wires protruding at both ends, the laser light of the autonomous light source 3 will be left to right from the figure. Come scan. The generated currents I1, I2, ..., In (n is an integer of 2 or more) obtained thereby include current components corresponding to the defect positions on the respective scanning lines.

藉由該發電電流I1、I2、...、In之電流值係用時間序列 來連接,可利用示波器等顯示如第6(b)圖所示之波形。接著,藉由對發電電流I1、I2、...、In施行圖像處理,可如第6(c)圖所示顯示圖像並特定缺陷。The current value of the generated currents I1, I2, ..., In is used in a time series To connect, an oscilloscope or the like can be used to display a waveform as shown in Fig. 6(b). Next, by performing image processing on the generated currents I1, I2, ..., In, an image can be displayed and a defect can be specified as shown in Fig. 6(c).

第7圖顯示與抵銷偏壓電流前之檢測電流值對應之圖像。該檢測電流值係與第1圖所示之分流器電阻7之兩端發生之電壓對應,且將其與檢測對象單元所發電之啟動電流及偏壓電流相加。Figure 7 shows an image corresponding to the detected current value before the bias current is cancelled. The detected current value corresponds to the voltage generated across the shunt resistor 7 shown in Fig. 1, and is added to the start current and the bias current generated by the detection target unit.

在此,太陽電池單元為已串聯3個單元之串。由於依據各單元具有不同之電阻,因此得知偏壓電流亦各自不同。Here, the solar cell unit is a string of three cells that have been connected in series. Since each unit has a different resistance, it is known that the bias currents are also different.

第8圖顯示抵銷偏壓電流前之串的檢查圖像。圖中,當左側之太陽電池單元為單元1、中央之單元為單元2、右側之單元為單元3時,單元2、單元3會超過檢測系統之輸入範圍,由於超過圖像資料之處理上限而無法圖像化處理,因此無法取得圖像資料。Figure 8 shows an inspection image of the string before the bias current is cancelled. In the figure, when the solar cell on the left side is the unit 1, the unit in the center is the unit 2, and the unit on the right side is the unit 3, the unit 2 and the unit 3 will exceed the input range of the detection system, because the processing limit of the image data is exceeded. Image data cannot be obtained because image processing cannot be performed.

第9圖顯示與抵銷偏壓電流後之檢測電流值對應的圖像。可得知是從位於左側之第1個單元1取得以0V為基準之發電電流之檢測值。Fig. 9 shows an image corresponding to the detected current value after the bias current is cancelled. It can be seen that the detected value of the generated current based on 0 V is obtained from the first unit 1 located on the left side.

第10圖顯示抵銷偏壓電流後之串的檢查圖像。可得知在所有單元1~單元3皆可於不受偏壓電流之影響下,取得顯示有缺陷(裂痕)的圖像資料而使檢查者可辨認。Figure 10 shows an inspection image of the string after the bias current is cancelled. It can be seen that in all of the cells 1 to 3, image data showing defects (cracks) can be obtained without being affected by the bias current, and the examiner can recognize the image data.

檢出太陽電池所發電之光啟動電流且檢出缺限部分之方式中,為了將基於檢測對象單元之發電電流的缺限部位正確地圖像化,必須檢出且抵銷檢測電流所含的偏壓電流。依據本實施形態,藉由如上述只檢測啟動電流,可迴 避如EL法之結晶形態顯示為黑暗部而難以特定缺陷部位之現象。In the method of detecting the light-starting current generated by the solar cell and detecting the defective portion, in order to correctly image the defective portion of the generated current based on the detection target unit, it is necessary to detect and offset the detection current. Bias current. According to this embodiment, by detecting only the startup current as described above, it is possible to return It is avoided that the crystal form of the EL method is a dark portion and it is difficult to specify a defect portion.

上述實施形態係皆為一例,於本發明之技術範圍內中可變形為各式各樣。Each of the above embodiments is an example, and can be modified into various types within the technical scope of the present invention.

1‧‧‧載置台1‧‧‧mounting table

2‧‧‧檢查接腳2‧‧‧Check the pins

3‧‧‧主光源3‧‧‧Main light source

4‧‧‧副光源4‧‧‧Sub Light Source

5‧‧‧光源控制電路5‧‧‧Light source control circuit

6‧‧‧移動機構6‧‧‧Mobile agencies

7‧‧‧分流器電阻7‧‧‧Shunt resistor

8‧‧‧放大器8‧‧‧Amplifier

9‧‧‧偏壓電流抽出電路9‧‧‧Butable current extraction circuit

10‧‧‧偏壓電流抵銷電路10‧‧‧Bias Current Offset Circuit

11‧‧‧遮蔽電路11‧‧‧Shielding circuit

12、31‧‧‧A/D轉換器12, 31‧‧‧A/D converter

13‧‧‧圖像處理裝置13‧‧‧Image processing device

14‧‧‧顯示器14‧‧‧ display

21‧‧‧低通濾過器21‧‧‧low pass filter

22‧‧‧減法電路22‧‧‧Subtraction circuit

23‧‧‧包絡線偵測電路23‧‧‧Envelope Detection Circuit

24‧‧‧加法電路24‧‧‧Addition circuit

25‧‧‧取樣保持電路25‧‧‧Sampling and holding circuit

26、33‧‧‧時機訊號產生電路26, 33‧‧‧ timing signal generation circuit

32‧‧‧微電腦32‧‧‧Microcomputer

34‧‧‧D/A轉換器34‧‧‧D/A converter

S‧‧‧太陽電池S‧‧‧ solar battery

I1、I2~In‧‧‧發電電流I1, I2~In‧‧‧ generating current

Ib1~Ib5‧‧‧偏壓電流Ib1~Ib5‧‧‧ bias current

LED1~LED5‧‧‧副光源LED1~LED5‧‧‧Sub Light Source

V1~V6‧‧‧電壓V1~V6‧‧‧ voltage

第1圖係顯示本發明其中一實施形態中太陽電池之缺陷檢查裝置全體構成的立體圖。Fig. 1 is a perspective view showing the overall configuration of a defect inspection device for a solar cell according to an embodiment of the present invention.

第2圖係顯示同缺陷檢查裝置中偏壓電流抽出電路之構成例的電路圖。Fig. 2 is a circuit diagram showing a configuration example of a bias current extraction circuit in the same defect inspection device.

第3(a)~(d)圖係顯示具有第2圖所示構成之偏壓電流抽出電路中各部分之電壓波形的圖表。The third (a) to (d) diagrams are graphs showing the voltage waveforms of the respective portions of the bias current extraction circuit having the configuration shown in Fig. 2.

第4圖係顯示同缺陷檢查裝置中偏壓電流抽出電路之其他構成例的電路圖。Fig. 4 is a circuit diagram showing another configuration example of the bias current extraction circuit in the same defect inspection device.

第5圖係顯示同偏壓電流抽出電路中抽出偏壓電流之時機之時間圖。Fig. 5 is a timing chart showing the timing of extracting the bias current in the same bias current drawing circuit.

第6(a)~(c)圖係顯示同缺陷檢查裝置使用發電電流之檢測值來圖像化之方法的說明圖。The sixth (a) to (c) diagrams are explanatory diagrams showing a method of imaging with the detection value of the generated current by the defect inspection device.

第7圖係顯示同缺陷檢查裝置中抵銷偏壓電流前之檢出電流之圖表。Fig. 7 is a graph showing the detected current before the bias current is offset in the defect inspection device.

第8圖係顯示同缺陷檢查裝置中抵銷偏壓電流前之檢查圖像之說明圖。Fig. 8 is an explanatory view showing an inspection image before the bias current is canceled in the defect inspection device.

第9圖係顯示同缺陷檢查裝置中抵銷偏壓電流後之檢出電流之圖表。Fig. 9 is a graph showing the detected current after canceling the bias current in the defect inspection device.

第10圖係顯示同缺陷檢查裝置中抵銷偏壓電流後之檢查圖 像之說明圖。Figure 10 shows the inspection chart after offsetting the bias current in the same defect inspection device. Like the illustration.

1‧‧‧載置台1‧‧‧mounting table

2‧‧‧檢查接腳2‧‧‧Check the pins

3‧‧‧主光源3‧‧‧Main light source

4‧‧‧副光源4‧‧‧Sub Light Source

5‧‧‧光源控制電路5‧‧‧Light source control circuit

6‧‧‧移動機構6‧‧‧Mobile agencies

7‧‧‧分流器電阻7‧‧‧Shunt resistor

8‧‧‧放大器8‧‧‧Amplifier

9‧‧‧偏壓電流抽出電路9‧‧‧Butable current extraction circuit

10‧‧‧偏壓電流抵銷電路10‧‧‧Bias Current Offset Circuit

11‧‧‧遮蔽電路11‧‧‧Shielding circuit

12‧‧‧A/D轉換器12‧‧‧A/D converter

13‧‧‧圖像處理裝置13‧‧‧Image processing device

14‧‧‧顯示器14‧‧‧ display

S‧‧‧太陽電池S‧‧‧ solar battery

Claims (4)

一種太陽電池之缺陷檢查裝置,係檢查已串聯複數單元(cell)之太陽電池之缺陷者,其特徵在於包含有:主光源,係對前述單元中之檢測對象之單元照射光者;副光源,係對前述單元中之非檢測對象之單元照射光者;光源控制電路,係控制前述主光源與前述副光源分別之照度,使前述副光源之照度較前述主光源照度為高者;電流電壓轉換器,係被賦予前述太陽電池所輸出之電流,且將其加以轉換成電壓並輸出者;放大器,係被賦予前述電流電壓轉換器所輸出之電壓,且將其加以放大並輸出者;偏壓電流抽出電路,係將包含於來自前述放大器之輸出的偏壓電流抽出並加以輸出者;偏壓電流抵銷電路,係將來自前述放大器之前述輸出,減去前述偏壓電流抽出電路所抽出之前述偏壓電流並加以輸出者;A/D轉換器,係將來自前述偏壓電流抵銷電路之輸出轉換成數位資料並加以輸出者;圖像處理裝置,係對前述A/D轉換器所輸出之數位資料進行圖像處理並輸出圖像資料者;及顯示器,係被賦予前述圖像處理裝置所輸出之前述圖像資料並進行圖像顯示者,且,前述缺陷檢查裝置係根據已考量前述偏壓電流且 檢測對象之單元已發電之啟動電流成分來進行檢查。 A solar cell defect inspection device for inspecting a defect of a solar cell in which a plurality of cells are connected in series is characterized in that: a main light source is included, and a unit that detects a target object in the unit is irradiated with light; And illuminating the unit of the non-detection object in the unit; the light source control circuit controls the illuminance of the main light source and the sub-light source respectively, so that the illuminance of the sub-light source is higher than the illuminance of the main light source; current voltage conversion Is given to the current output by the solar cell and converted into a voltage and output; the amplifier is given the voltage output by the current-voltage converter, and is amplified and output; bias The current extraction circuit extracts and outputs a bias current included in an output from the amplifier; the bias current cancellation circuit subtracts the output from the amplifier from the bias current extraction circuit The aforementioned bias current is output to the output; the A/D converter converts the output from the aforementioned bias current cancellation circuit The digital data is output to the image processing device, and the image processing device performs image processing on the digital data outputted by the A/D converter and outputs the image data; and the display is provided to the image processing device. The image data is displayed and displayed, and the defect inspection device is based on the bias current The starting current component that has been generated by the unit of the detection object is checked. 如申請專利範圍第1項之太陽電池之缺陷檢查裝置,其中前述偏壓電流抽出電路具有:低通濾波器,係被賦予來自前述放大器之輸出作為第1電壓,並輸出已將高頻成分除去之第2電壓者;減法電路,係被賦予前述第1電壓與前述第2電壓,且輸出將前述第1電壓減去前述第2電壓而含有前述高頻成分之第3電壓者;電壓包絡線偵測電路,係被賦予前述第3電壓,且輸出已偵測該電壓之下限之第4電壓者;加法電路,係被賦予前述第2電壓與前述第4電壓,並輸出將前述第2電壓與前述第4電壓相加之第5電壓者;取樣保持電路,係被賦予前述第5電壓,且將已在預定之時機取樣保持之第6電壓作為前述偏壓電流且輸出者;及移動機構,係使前述主光源朝太陽電池之長邊方向移動者,且,前述缺陷檢查裝置係在與已藉由前述移動機構將前述主光源朝檢測對象之單元移動之時間點對應之時機,或與串聯之單元之連接部分對應之時機,求取流動於檢測對象之單元之前述偏壓電流。 The solar cell defect inspection device according to claim 1, wherein the bias current extraction circuit has a low-pass filter that is supplied with an output from the amplifier as a first voltage, and outputs a high-frequency component. a second voltage; a subtraction circuit that supplies the first voltage and the second voltage, and outputs a third voltage that includes the high frequency component by subtracting the second voltage from the first voltage; a voltage envelope The detection circuit is provided with the third voltage, and outputs a fourth voltage that has detected the lower limit of the voltage; and the adding circuit supplies the second voltage and the fourth voltage, and outputs the second voltage. a fifth voltage that is added to the fourth voltage; the sample-and-hold circuit is supplied with the fifth voltage, and the sixth voltage that has been sampled and held at a predetermined timing is used as the bias current and is output; and the moving mechanism And moving the main light source toward a longitudinal direction of the solar cell, and the defect inspection device moves the unit to the detection target by the moving mechanism Between the time point corresponding to, or corresponding to timing of the series connection portion of the unit, obtaining a flow of the bias current to be detected of the unit. 如申請專利範圍第1項之太陽電池之缺陷檢查裝置,其中前述之偏壓電流抽出電路具有:A/D轉換器,係被賦予來自前述放大器之輸出,且將其轉換成數位訊號並輸出者; 微電腦,係在預定之時機,將來自前述A/D轉換器之輸出作為偏壓電流檢測資料來保存者;D/A轉換器,係將前述微電腦所保存之前述偏壓電流檢測資料轉換成類比訊號,並作為前述偏壓電流加以輸出者;及移動機構,係使前述主光源朝前述太陽電池之長邊方向移動者,又,在檢查開始前,檢測各單元之每一偏壓電流並作為前述偏壓電流檢測資料來保存於前述微電腦;且,前述缺陷檢查裝置係在與已藉由前述移動機構將前述主光源朝檢測對象之單元移動之時間點對應之時機,或與串聯之單元之連接部分對應之時機,輸出前述微電腦所保存之前述偏壓電流檢測資料,且由前述D/A轉換器輸出前述偏壓電流者。 The solar cell defect inspection device of claim 1, wherein the bias current extraction circuit has an A/D converter that is supplied with an output from the amplifier and converted into a digital signal and outputter. ; The microcomputer, at a predetermined timing, stores the output from the A/D converter as a bias current detection data; the D/A converter converts the bias current detection data stored in the microcomputer into an analogy a signal outputting as the bias current; and a moving mechanism for moving the main light source toward the longitudinal direction of the solar cell, and detecting each bias current of each unit before the inspection starts The bias current detection data is stored in the microcomputer; and the defect inspection device is at a timing corresponding to a time point at which the main light source has been moved toward the unit to be detected by the moving mechanism, or a unit connected in series The timing corresponding to the connection portion outputs the bias current detection data stored by the microcomputer, and the bias current is outputted by the D/A converter. 一種太陽電池之缺陷之檢查方法,係檢查已串聯複數單元之太陽電池之缺陷者,其特徵在於包含有以下步驟:藉由主光源,用第1照度對前述單元中之檢測對象之單元,照射光;藉由副光源,用較前述第1照度高之第2照度對前述單元中之非檢測對象之單元照射光;藉由偏壓電流抽出電路,抽出包含於前述太陽電池所輸出之電流之偏壓電流;藉由偏壓電流抵銷電路,從前述太陽電池所輸出之電流抵銷前述偏壓電流;及 使用來自前述偏壓電流抵銷電路之輸出來進行圖像處理且顯示於顯示器,藉此,根據已考量前述偏壓電流且檢測對象之單元已發電之啟動電流成分來進行檢查。A method for inspecting a defect of a solar cell is a defect of a solar cell in which a plurality of cells have been connected in series, and is characterized in that the method comprises the steps of: illuminating a unit of the detection target in the unit with a first illuminance by a main light source; Light, by means of a secondary light source, illuminating a unit of the non-detection target in the unit with a second illuminance higher than the first illuminance; and extracting a current included in the solar cell by a bias current extraction circuit a bias current; the current output from the solar cell is offset by the bias current offset circuit; and Image processing is performed using the output from the bias current canceling circuit and displayed on the display, whereby the inspection is performed based on the starting current component that has been subjected to the aforementioned bias current and the unit of the detection target has generated power.
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