TWI393851B - Vaccum oven - Google Patents

Vaccum oven Download PDF

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Publication number
TWI393851B
TWI393851B TW97117960A TW97117960A TWI393851B TW I393851 B TWI393851 B TW I393851B TW 97117960 A TW97117960 A TW 97117960A TW 97117960 A TW97117960 A TW 97117960A TW I393851 B TWI393851 B TW I393851B
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TW
Taiwan
Prior art keywords
interlayer
side wall
wall
vacuum oven
cooling
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TW97117960A
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Chinese (zh)
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TW200950598A (en
Inventor
Ting-Zong Huang
Ting Shun Huang
Cheng Ta Tu
Cheng Hsien Lin
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Zhen Ding Technology Co Ltd
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Priority to TW97117960A priority Critical patent/TWI393851B/en
Publication of TW200950598A publication Critical patent/TW200950598A/en
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Publication of TWI393851B publication Critical patent/TWI393851B/en

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Description

真空烘箱 Vacuum oven

本發明涉及一種真空烘箱,特別涉及一種可快速冷卻之真空烘箱。 The present invention relates to a vacuum oven, and more particularly to a vacuum oven that can be rapidly cooled.

印刷電路板是組裝電子零件用之基板。於印刷電路板之製作過程中,需要多次對印刷電路板半成品進行烘烤,然後進行後續加工。 A printed circuit board is a substrate for assembling electronic parts. In the manufacturing process of the printed circuit board, it is necessary to bake the semi-finished printed circuit board several times and then perform subsequent processing.

烘烤過程是將印刷電路板放置於高溫之環境下並保持一段時間,其通常於有氧之環境中進行。然而,於長時間之烘烤過程中,覆銅基板之銅箔表面之抗氧化層於高溫下分解,導致銅箔表面被氧化變色,嚴重影響了印刷電路板之外觀品質。 The baking process is to place the printed circuit board in a high temperature environment for a period of time, usually in an aerobic environment. However, during the long-time baking process, the anti-oxidation layer on the surface of the copper foil of the copper-clad substrate is decomposed at a high temperature, which causes the surface of the copper foil to be oxidized and discolored, which seriously affects the appearance quality of the printed circuit board.

採用真空烘箱烘烤印刷電路板可解決上述問題,由於真空烘箱於加熱之前會將腔內空氣抽走,使其壓力接近真空狀態,再進一步充入保護氣體,例如氮氣,將腔體內殘留之氧氣進一步稀釋之同時,保護氣體又可有效防止銅箔與微量氧之間氧化還原反應之發生。即使高溫破壞了銅箔表面之抗氧化層,銅箔也不會被氧化而變色。然而,真空烘箱於烘烤完成後,需要較長之時間進行冷卻,從而導致烘烤效率低。 Baking the printed circuit board with a vacuum oven can solve the above problem. Since the vacuum oven will evacuate the air in the chamber before heating, the pressure is close to the vacuum state, and further filled with a protective gas such as nitrogen to retain the residual oxygen in the chamber. At the same time of further dilution, the protective gas can effectively prevent the oxidation-reduction reaction between the copper foil and the trace oxygen. Even if the high temperature destroys the oxidation resistant layer on the surface of the copper foil, the copper foil is not oxidized and discolored. However, after the completion of the baking of the vacuum oven, it takes a long time to perform cooling, resulting in low baking efficiency.

有鑒於此,有必要提供一種可快速冷卻之真空烘箱,不僅能縮短冷卻時間,提高烘烤效率,亦可改善其氣密性,以防止產品被氧化。 In view of this, it is necessary to provide a vacuum oven capable of rapid cooling, which not only shortens the cooling time, improves the baking efficiency, but also improves the airtightness to prevent the product from being oxidized.

下面將以具體實施例說明該可快速冷卻之真空烘箱。 The quick-cooling vacuum oven will now be described in the context of a specific embodiment.

一種真空烘箱,包括箱體、隔熱外壁、氣體轉移裝置以及溫度控制裝置。所述箱體具有第一側壁、第二側壁及第三側壁。所述隔熱外壁包圍上述箱體,具有與上述箱體之第一、第二及第三側壁相對應之第一側壁、第二側壁及第三側壁。所述氣體轉移裝置與上述箱體相連通。所述溫度控制裝置用於控制該箱體內溫度。該可快速冷卻之真空烘箱還包括冷卻裝置。該冷卻裝置包括冷卻水套,以及設置於冷卻水套上之至少一個入水口、至少兩個出水口。該冷卻水套位於箱體與隔熱外壁之間,該冷卻水套具有第一夾層,以及與第一夾層相連通之第二夾層及第三夾層,該第二夾層與第三夾層相對設置,並與第一夾層一起圍成一個腔體。 A vacuum oven includes a box body, an insulated outer wall, a gas transfer device, and a temperature control device. The case has a first side wall, a second side wall and a third side wall. The heat insulating outer wall surrounds the box body, and has first side walls, second side walls and third side walls corresponding to the first, second and third side walls of the box body. The gas transfer device is in communication with the tank. The temperature control device is used to control the temperature inside the cabinet. The rapidly cooled vacuum oven also includes a cooling device. The cooling device includes a cooling water jacket, and at least one water inlet and at least two water outlets disposed on the cooling water jacket. The cooling water jacket is disposed between the box body and the heat insulating outer wall, the cooling water jacket has a first interlayer, and a second interlayer and a third interlayer connected to the first interlayer, the second interlayer being disposed opposite to the third interlayer And together with the first interlayer to form a cavity.

與先前技術相比,該真空烘箱加入了冷卻裝置,節省了冷卻時間,進而縮短了烘烤週期,提高了乾燥效率。並且其於抽至近似真空並充入氮氣之狀態下實施烘烤操作,提供了良好之氣密性,使得被烘烤產品具有良好之外觀品質。 Compared with the prior art, the vacuum oven incorporates a cooling device, which saves cooling time, thereby shortening the baking cycle and improving drying efficiency. Moreover, the baking operation is carried out under the condition of drawing to an approximate vacuum and filling with nitrogen, thereby providing good airtightness, so that the baked product has good appearance quality.

10‧‧‧箱體 10‧‧‧ cabinet

30‧‧‧冷卻裝置 30‧‧‧Cooling device

60‧‧‧循環風裝置 60‧‧‧Circulating wind installation

12、22‧‧‧第一側壁 12, 22‧‧‧ first side wall

16、26‧‧‧第二側壁 16, 26‧‧‧ second side wall

14、24‧‧‧第三側壁 14, 24‧‧‧ third side wall

31‧‧‧冷卻水套 31‧‧‧ Cooling water jacket

39‧‧‧入水口 39‧‧‧Water inlet

54‧‧‧加熱器 54‧‧‧heater

58‧‧‧固態繼電器 58‧‧‧Solid relay

64‧‧‧風輪 64‧‧‧Wind wheel

71‧‧‧抽氣裝置 71‧‧‧Exhaust device

73、76‧‧‧氣管 73, 76‧‧‧ trachea

20‧‧‧隔熱外壁 20‧‧‧Insulated outer wall

50‧‧‧溫度控制裝置 50‧‧‧ Temperature control device

70‧‧‧氣體轉移裝置 70‧‧‧ gas transfer device

32‧‧‧第一夾層 32‧‧‧First mezzanine

36‧‧‧第二夾層 36‧‧‧Second mezzanine

34‧‧‧第三夾層 34‧‧‧ third mezzanine

33、35、37‧‧‧出水口 33, 35, 37‧‧ ‧ water outlet

52‧‧‧感溫器 52‧‧‧temperature sensor

56‧‧‧溫控器 56‧‧‧ thermostat

62‧‧‧電動機 62‧‧‧Electric motor

66‧‧‧磁性聯軸器 66‧‧‧Magnetic Couplings

72‧‧‧充氣裝置 72‧‧‧Inflator

74‧‧‧氣體鋼瓶 74‧‧‧ gas cylinder

圖1係本發明實施例所提供之真空烘箱之結構剖面圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a cross-sectional view showing the structure of a vacuum oven provided in an embodiment of the present invention.

圖2係本發明實施例所提供之真空烘箱之結構俯視圖。 2 is a top plan view showing the structure of a vacuum oven provided by an embodiment of the present invention.

下面將結合附圖對本發明實施例作進一步之詳細說明。 The embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

圖1為本實施例所提供之真空烘箱之結構剖面圖,其包括:箱體10、隔熱外壁20、溫度控制裝置50、循環風裝置60、氣體轉移裝置70及冷卻裝置30。 1 is a cross-sectional view showing the structure of a vacuum oven according to the present embodiment, which includes a case 10, a heat insulating outer wall 20, a temperature control device 50, a circulation air device 60, a gas transfer device 70, and a cooling device 30.

參閱圖2,箱體10包括第一側壁12、第二側壁16及第三側壁14,且上述第一側壁12、第二側壁16及第三側壁14圍成一腔體。 Referring to FIG. 2, the casing 10 includes a first sidewall 12, a second sidewall 16 and a third sidewall 14, and the first sidewall 12, the second sidewall 16 and the third sidewall 14 define a cavity.

隔熱外壁20設置於箱體10周圍,具有分別與箱體10之第一側壁12、第二側 壁16及第三側壁14相對應之第一側壁22、第二側壁26及第三側壁24。隔熱外壁20與箱體10之間具有冷卻裝置30。 The heat insulating outer wall 20 is disposed around the casing 10 and has a first side wall 12 and a second side respectively opposite to the casing 10 The wall 16 and the third side wall 14 correspond to the first side wall 22, the second side wall 26 and the third side wall 24. A cooling device 30 is provided between the insulated outer wall 20 and the casing 10.

該溫度控制裝置50包括位於箱體10內壁之一個感溫器52,其可為熱電偶,位於隔熱外壁20外部之溫控器56及固態繼電器58,以及位於隔熱外壁20與箱體10之間區域之加熱器54,其可為金屬或紅外等加熱器。 The temperature control device 50 includes a temperature sensor 52 located on the inner wall of the casing 10, which may be a thermocouple, a thermostat 56 and a solid state relay 58 located outside the insulated outer wall 20, and a thermal insulation outer wall 20 and a casing. A heater 54 in the region between 10, which may be a heater such as metal or infrared.

該循環風裝置60位於箱體10之一側,其包括電動機62,磁性聯軸器66以及風輪64。該電動機62置於隔熱外壁20外部,該磁性聯軸器66一端連接於上述電動機62,另一端伸入到隔熱外壁20與箱體10之間之區域,該風輪64連接於上述磁性聯軸器66,且位於隔熱外壁20以內、箱體10以外之區域。其中,風輪64用於加速箱體10內之氣體流動,助於傳熱;電動機62用於帶動風輪64運作;磁性聯軸器66於電動機62及風輪64之間傳動,以保證箱體10具有良好之氣密性。 The circulating air device 60 is located on one side of the casing 10 and includes an electric motor 62, a magnetic coupling 66 and a rotor 64. The motor 62 is disposed outside the heat insulating outer wall 20. The magnetic coupling 66 is connected to the motor 62 at one end and extends to the region between the heat insulating outer wall 20 and the casing 10 at the other end. The wind wheel 64 is connected to the magnetic body. The coupling 66 is located inside the insulated outer wall 20 and outside the casing 10. The wind wheel 64 is used to accelerate the gas flow in the tank 10 to facilitate heat transfer; the motor 62 is used to drive the wind wheel 64 to operate; the magnetic coupling 66 is driven between the motor 62 and the wind wheel 64 to ensure the box The body 10 has good airtightness.

該氣體轉移裝置70包括抽氣裝置71及充氣裝置72,該抽氣裝置71包括一真空泵75及一氣管73,該真空泵75通過氣管73與箱體10相連通;該充氣裝置72包括一保護氣體鋼瓶74及一氣管76,該保護氣體鋼瓶74通過氣管76與箱體10相連通。本實施例中,該保護氣體為氮氣。 The gas transfer device 70 includes an air pumping device 71 and an inflator device 72. The air pumping device 71 includes a vacuum pump 75 and a gas pipe 73. The vacuum pump 75 communicates with the tank 10 through a gas pipe 73. The gas inflator 72 includes a shielding gas. The cylinder 74 and a gas pipe 76 communicate with the tank 10 through the gas pipe 76. In this embodiment, the shielding gas is nitrogen.

冷卻裝置30包括冷卻水套31,該冷卻水套31上設置有入水口39、出水口33、出水口35及出水口37。出水口33、35用於冷卻時可使冷卻水流出,出水口37用於冷卻完畢時,將殘留於冷卻水套31中之冷卻水排盡。本實施例中,冷卻水套31與箱體10均間隔一定距離,因此冷卻水套31主要用於對隔熱外壁20及箱體10間之氣體進行冷卻。然而可理解,冷卻水套31還可覆蓋箱體10之第一側壁12、第二側壁16及第三側壁14並直接與箱體10接觸,從而加速箱體10內氣體之冷卻。 The cooling device 30 includes a cooling water jacket 31 provided with a water inlet 39, a water outlet 33, a water outlet 35, and a water outlet 37. When the water outlets 33 and 35 are used for cooling, the cooling water can be discharged, and when the water outlet 37 is used for cooling, the cooling water remaining in the cooling water jacket 31 is drained. In the present embodiment, the cooling water jacket 31 and the casing 10 are spaced apart by a certain distance. Therefore, the cooling water jacket 31 is mainly used for cooling the gas between the heat insulating outer wall 20 and the casing 10. However, it can be understood that the cooling water jacket 31 can also cover the first side wall 12, the second side wall 16, and the third side wall 14 of the casing 10 and directly contact the casing 10, thereby accelerating the cooling of the gas in the casing 10.

請參閱圖2,冷卻水套31具有第一夾層32、與第一夾層32相連通之第二夾層36及第三夾層34,該第一夾層32之兩個側壁分別與箱體之第一側壁12及隔熱外壁之第一側壁22相鄰;該第二夾層36之兩個側壁分別與箱體之第二側壁16及隔熱外壁之第二側壁26相鄰;該第三夾層34之兩個側壁分別與箱體之第三側壁14及隔熱外壁之第三側壁24相鄰。 Referring to FIG. 2, the cooling water jacket 31 has a first interlayer 32, a second interlayer 36 and a third interlayer 34 communicating with the first interlayer 32. The two sidewalls of the first interlayer 32 are respectively opposite to the first sidewall of the casing. 12 and the first side wall 22 of the heat insulating outer wall are adjacent to each other; the two side walls of the second interlayer 36 are respectively adjacent to the second side wall 16 of the box body and the second side wall 26 of the heat insulating outer wall; two of the third interlayers 34 The side walls are adjacent to the third side wall 14 of the case and the third side wall 24 of the insulated outer wall, respectively.

綜合圖1及圖2,出水口33靠近加熱器54設置,出水口35位於冷卻水套之第一夾層32與第三夾層34相連通區之靠近加熱器54之一端。出水口33及35可常開。出水口37用於冷卻裝置使用結束後將31中殘留之冷卻水放出,因此37之位置須使得31中之水可全部流出。本實施例中,其靠近箱體10之底部,即最遠離加熱器54之一端。入水口39遠離出水口35設置,本實施例中,其位於出水口33之下方,即冷卻水套31之第一夾層32與第二夾層36相接觸區之最遠離加熱器54之一端,由於箱體10與隔熱外壁20之間之區域中,越靠近加熱器54處之溫度越高,因此冷卻水套31構成一逆流冷卻系統,具有較高之冷卻效率。出水口37位於出水口35之下方,即冷卻水套31之第一夾層32與第二夾層34相接觸區之最遠離加熱器54之一端。 1 and 2, the water outlet 33 is disposed adjacent to the heater 54, and the water outlet 35 is located at one end of the heater 54 adjacent to the first interlayer 32 of the cooling jacket and the third interlayer 34. The water outlets 33 and 35 can be opened normally. The water outlet 37 is used to discharge the cooling water remaining in 31 after the use of the cooling device, so that the position of 37 is such that the water in 31 can all flow out. In this embodiment, it is near the bottom of the casing 10, i.e., one end farthest from the heater 54. The water inlet 39 is disposed away from the water outlet 35. In this embodiment, it is located below the water outlet 33, that is, the contact zone between the first interlayer 32 and the second interlayer 36 of the cooling water jacket 31 is farthest from the heater 54 due to In the region between the casing 10 and the insulated outer wall 20, the temperature closer to the heater 54 is higher, so the cooling water jacket 31 constitutes a countercurrent cooling system with higher cooling efficiency. The water outlet 37 is located below the water outlet 35, that is, one end of the contact zone between the first interlayer 32 and the second interlayer 34 of the cooling water jacket 31 farthest from the heater 54.

烘烤之前,先使用抽氣裝置71將箱體10內抽真空,然後使用充氣裝置72往箱體10內充入氮氣。然後開啟加熱器54對箱體10內氣體加熱,並由溫控器56及固態繼電器58對加熱過程進行控制。同時使用循環風裝置60加速箱體10內氣體循環。 Prior to baking, the inside of the casing 10 is evacuated using an air extracting device 71, and then the inside of the casing 10 is filled with nitrogen gas using an inflator 72. The heater 54 is then turned on to heat the gas in the tank 10, and the heating process is controlled by the thermostat 56 and the solid state relay 58. At the same time, the circulation air device 60 is used to accelerate the gas circulation in the casing 10.

當烘烤完畢,需要快速冷卻時,關閉出水口37,打開入水口39,使得冷卻水由入水口39進入冷卻水套,帶走箱體之熱量後從出水口35及出水口33排出。冷卻完成時,關閉入水口39,打開出水口37以排盡殘留之冷卻水。 When the baking is completed and rapid cooling is required, the water outlet 37 is closed, and the water inlet 39 is opened, so that the cooling water enters the cooling water jacket from the water inlet 39, and the heat of the casing is taken out, and then discharged from the water outlet 35 and the water outlet 33. When the cooling is completed, the water inlet 39 is closed, and the water outlet 37 is opened to drain the remaining cooling water.

另外,本領域技術人員還可於本發明精神內做其他變化,適當變更冷卻水套位置分佈,或變更進出水口之位置或數目等,只要其不偏離本發明之技 術效果均可。這些依據本發明精神所做之變化,都應包含於本發明所要求保護之範圍之內。 In addition, those skilled in the art can make other changes within the spirit of the present invention, appropriately change the position distribution of the cooling water jacket, or change the position or number of the inlet and outlet, etc., as long as they do not deviate from the technology of the present invention. The effect can be. All changes made in accordance with the spirit of the invention are intended to be included within the scope of the invention.

綜上所述,本發明確已符合發明專利之要件,遂依法提出專利申請。惟,以上所述者僅為本發明之較佳實施方式,自不能以此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士援依本發明之精神所作之等效修飾或變化,皆應涵蓋於以下申請專利範圍內。 In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

10‧‧‧箱體 10‧‧‧ cabinet

30‧‧‧冷卻裝置 30‧‧‧Cooling device

60‧‧‧循環風裝置 60‧‧‧Circulating wind installation

31‧‧‧冷卻水套 31‧‧‧ Cooling water jacket

39‧‧‧入水口 39‧‧‧Water inlet

54‧‧‧加熱器 54‧‧‧heater

58‧‧‧固態繼電器 58‧‧‧Solid relay

64‧‧‧風輪 64‧‧‧Wind wheel

71‧‧‧抽氣裝置 71‧‧‧Exhaust device

73、76‧‧‧氣管 73, 76‧‧‧ trachea

75‧‧‧真空泵 75‧‧‧vacuum pump

20‧‧‧隔熱外壁 20‧‧‧Insulated outer wall

50‧‧‧溫度控制裝置 50‧‧‧ Temperature control device

70‧‧‧氣體轉移裝置 70‧‧‧ gas transfer device

37‧‧‧出水口 37‧‧‧Water outlet

52‧‧‧感溫器 52‧‧‧temperature sensor

56‧‧‧溫控器 56‧‧‧ thermostat

62‧‧‧電動機 62‧‧‧Electric motor

66‧‧‧磁性聯軸器 66‧‧‧Magnetic Couplings

72‧‧‧充氣裝置 72‧‧‧Inflator

74‧‧‧氣體鋼瓶 74‧‧‧ gas cylinder

Claims (8)

一種真空烘箱,包括:一箱體,具有第一側壁、第二側壁及第三側壁;隔熱外壁,其包圍上述箱體,具有第一側壁、第二側壁及第三側壁;氣體轉移裝置,與上述箱體相連通;以及溫度控制裝置,用於控制所述之箱體內之溫度,該真空烘箱還包括設置於該箱體與隔熱外壁之間之冷卻裝置,該冷卻裝置包括一冷卻水套,該冷卻裝置之冷卻水套具有第一夾層、與該第一夾層相連通之第二夾層及第三夾層,該第一夾層之兩個側壁分別與箱體之第一側壁及隔熱外壁之第一側壁相鄰;該第二夾層之兩個側壁分別與箱體之第二側壁及隔熱外壁之第二側壁相鄰;該第三夾層之兩個側壁分別與箱體之第三側壁及隔熱外壁之第三側壁相鄰。 A vacuum oven comprising: a box having a first side wall, a second side wall and a third side wall; a heat insulating outer wall surrounding the box body, having a first side wall, a second side wall and a third side wall; a gas transfer device, And the temperature control device for controlling the temperature inside the box, the vacuum oven further comprising a cooling device disposed between the box and the heat insulating outer wall, the cooling device comprising a cooling water The cooling water jacket of the cooling device has a first interlayer, a second interlayer and a third interlayer connected to the first interlayer, and the two side walls of the first interlayer respectively form a first side wall and a heat insulating outer wall of the box The first side wall is adjacent to each other; the two side walls of the second interlayer are respectively adjacent to the second side wall of the box body and the second side wall of the heat insulating outer wall; the two side walls of the third interlayer are respectively opposite to the third side wall of the box body And a third side wall of the insulated outer wall is adjacent. 如申請專利範圍第1項所述之真空烘箱,其中,該氣體轉移裝置包括至少一抽氣裝置及至少一充氣裝置。 The vacuum oven of claim 1, wherein the gas transfer device comprises at least one air extracting device and at least one air inflating device. 如申請專利範圍第2項所述之真空烘箱,其中,該充氣裝置及抽氣裝置通過獨立之氣管與箱體相連通。 The vacuum oven of claim 2, wherein the inflator and the pumping device are in communication with the tank through a separate air tube. 如申請專利範圍第1項所述之真空烘箱,其中,該溫度控制裝置包括至少一個感溫器,至少一個加熱器,溫控器以及固態繼電器。 The vacuum oven of claim 1, wherein the temperature control device comprises at least one temperature sensor, at least one heater, a thermostat, and a solid state relay. 如申請專利範圍第4項所述之真空烘箱,其中,該溫度控制裝置之感溫器位於箱體之第一、第二或第三側壁之內表面上,加熱器位於隔熱外壁與箱體之間區域,溫控器及固態繼電器位於隔熱外壁外部。 The vacuum oven of claim 4, wherein the temperature control device is located on the inner surface of the first, second or third side wall of the box, and the heater is located on the outer wall of the heat insulation and the cabinet The area between the thermostat and the solid state relay is located outside the insulated outer wall. 如申請專利範圍第1項所述之真空烘箱,其中,該冷卻裝置還包括設置於冷卻水套上之至少一個入水口、至少兩個出水口。 The vacuum oven of claim 1, wherein the cooling device further comprises at least one water inlet disposed on the cooling water jacket, and at least two water outlets. 如申請專利範圍第6項所述之真空烘箱,其中,該冷卻裝置之至少一個入水口位於冷卻水套第一夾層與第二或第三夾層相連通區之靠近該加熱器處,該至少一個出水口位於第一夾層與第二或第三夾層相連通區之遠離該加熱器處,入水口位於冷卻水套第一夾層與第二或第三夾層相連通區之遠離該加熱器處。 The vacuum oven of claim 6, wherein at least one water inlet of the cooling device is located adjacent to the heater in a first interlayer of the cooling water jacket and a second or third interlayer connecting region, the at least one The water outlet is located away from the heater in the communication zone between the first interlayer and the second or third interlayer, and the water inlet is located away from the heater in the first interlayer of the cooling water jacket and the communication zone of the second or third interlayer. 如申請專利範圍第6項所述之真空烘箱,其中,該冷卻裝置之位於冷卻水套第一夾層與第二或第三夾層相連通區之靠近該加熱器處之出水口為常開。 The vacuum oven of claim 6, wherein the cooling device is located normally adjacent to the heater at a communication zone between the first interlayer of the cooling water jacket and the second or third interlayer.
TW97117960A 2008-05-16 2008-05-16 Vaccum oven TWI393851B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04254432A (en) * 1991-02-07 1992-09-09 Furukawa Electric Co Ltd:The Method and device for drawing optical fiber
JPH10197155A (en) * 1996-12-27 1998-07-31 Shimazu Mekutemu Kk Retort furnace
US6198075B1 (en) * 1998-11-25 2001-03-06 Yield Engineering Systems, Inc. Rapid heating and cooling vacuum oven
US6283749B1 (en) * 2000-06-02 2001-09-04 Surface Combustion, Inc. Inside/out, industrial vacuum furnace
TW544470B (en) * 2001-02-22 2003-08-01 Chugai Ro Kogyo Kaisha Ltd A gas-cooled single-chamber type heat-treating furnace and a gas cooling process in the furnace

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04254432A (en) * 1991-02-07 1992-09-09 Furukawa Electric Co Ltd:The Method and device for drawing optical fiber
JPH10197155A (en) * 1996-12-27 1998-07-31 Shimazu Mekutemu Kk Retort furnace
US6198075B1 (en) * 1998-11-25 2001-03-06 Yield Engineering Systems, Inc. Rapid heating and cooling vacuum oven
US6283749B1 (en) * 2000-06-02 2001-09-04 Surface Combustion, Inc. Inside/out, industrial vacuum furnace
TW544470B (en) * 2001-02-22 2003-08-01 Chugai Ro Kogyo Kaisha Ltd A gas-cooled single-chamber type heat-treating furnace and a gas cooling process in the furnace

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