TWI392215B - Multi - dimensional miniature actuator - Google Patents

Description

Multi-dimensional microactuator

The present invention relates to an actuator, and more particularly to a multi-dimensional microactuator.

In recent years, due to the rapid development of microelectronics technology and the strong demand of the market, many devices and systems need to actuate servo mechanisms, such as digital cameras, concentrating solar power systems, and visual monitoring systems, so that they can face space. Position and track in a fixed direction. There are many types of actuators, such as multi-axis electromagnetic motors. Multi-axis electromagnetic motors must be combined with multiple single-axis electromagnetic motors by a gear mechanism. This will increase the size and weight of the motor. Therefore, it is naturally limited in the field of application, and cannot be used to pay attention to light and small devices and systems.

Nowadays, in order to make the servo mechanism have more degrees of freedom of motion to improve the performance of the actuating servo mechanism, a multi-degree-of-freedom ultrasonic motor has been developed. However, the stator structure and the driving method are complicated, and the stator occupies a larger volume. The volume of the ball rotor, so it is impossible to drive the larger ball rotor with a small stator, and requires a large driving voltage, and must consume more power, so the multi-degree of freedom ultrasonic motor still has certain limitations in use.

Therefore, the present invention has been directed to the above problems to provide a multi-dimensional microactuator which is simple in structure, small in size and light in weight, and requires only a small driving voltage to save power, which not only improves the above-mentioned conventional actuators. In addition to the shortcomings, high precision positioning can be achieved to solve the above problems.

It is an object of the present invention to provide a multi-dimensional microactuator that can drive a plurality of axially rotating components of a rotor by a plurality of motion modes of a plurality of symmetric piezoelectric plates, so that multi-axis motion can be performed. To achieve precise positioning in any orientation in space.

It is an object of the present invention to provide a multi-dimensional microactuator that is simple in structure and volume Small, light weight, in order to achieve the purpose of miniaturization.

It is an object of the present invention to provide a multi-dimensional microactuator that requires only a small drive voltage to move the rotor for power saving purposes.

The multi-dimensional microactuator of the present invention comprises a stator, a rotor and a plurality of pushing elements, the stator comprising a plurality of symmetric piezoelectric plates, each of the symmetric piezoelectric plates comprising a piezoelectric plate, a first electrode and a first a second electrode, the first electrode and the second electrode are respectively symmetrically disposed on a first surface of the piezoelectric plate, and the second surface of the piezoelectric plate is coupled to a ground end, and the pushing elements are respectively disposed on the symmetric electrodes The rotor of the actuator is disposed on the stator. The plurality of motion modes of the symmetrical piezoelectric plates can drive the plurality of directional movements of the urging member, so that the urging member can push the rotor Any axial rotation. In addition, the present invention further includes a magnetic body and a weight body, the magnetic body is disposed in the stator, and the weight body is disposed on the rotor.

In order to give your reviewers a better understanding and understanding of the technical features of the present invention and the efficacies achieved, please refer to the preferred embodiment and the detailed descriptions as follows: First, please refer to the first figure. It is a schematic structural view of a multi-dimensional microactuator according to a preferred embodiment of the present invention. As shown, the multi-dimensional microactuator 10 of the present invention includes a rotor 12 and a stator 14. The stator 14 includes a base 16 and a plurality of symmetric piezoelectric plates 18 disposed above the substrate 16. The symmetrical piezoelectric plates 18 are disposed on one of the substrates 16 , and the symmetrical piezoelectric plates 18 are disposed perpendicular to each other on the substrate 16 to form a rectangle. The present invention can be used according to the needs of the symmetrical piezoelectric plates. The plates 18 form the stator 14 of any polygon. The push elements 20 are respectively disposed in the middle of the long sides of the symmetrical piezoelectric plates 18. One of the push elements 20 is triangular in shape, but may have any shape according to the needs of use. The rotor 12 is disposed on the stator 14. The multi-dimensional microactuator of the present invention generates a deformation motion by driving the symmetrical piezoelectric plates 18, thereby driving the urging members 20 to move, and rotating the rotor 12, that is, the present invention The amplitude energy of the symmetrical piezoelectric plates 18 is converted into between the urging members 20 and the rotor 12. Friction to push the rotor 12 to rotate. It can be seen from the above that the multi-dimensional microactuator 10 of the present invention has a simple structure, a small volume, and a light weight, so as to achieve miniaturization.

Please refer to FIG. 2A and FIG. 2B, which are schematic structural diagrams of a symmetric piezoelectric plate of a multi-dimensional microactuator according to a preferred embodiment of the present invention. As shown, the symmetrical piezoelectric plate 18 includes a piezoelectric plate 22, a first electrode 24 and a second electrode 26. The first electrode 24 and the second electrode 26 are connected to a driving power source (not shown), and the piezoelectric One embodiment of the plate 22 is a ceramic piezoelectric plate, that is, a ceramic piezoelectric material, such as lead zirconate titanate, which is only one embodiment of the present invention, and does not limit the piezoelectric plate 22 of the present invention to only ceramic pressure. Electric board. The first electrode 24 and the second electrode 26 are respectively symmetrically disposed on the first surface of the piezoelectric plate 22, that is, as shown in FIG. 2A, respectively disposed symmetrically on one surface of the piezoelectric plate 22. As shown in the second B-picture, the other surface of the piezoelectric plate 22 is provided with a ground electrode 28 and is connected to a ground terminal (not shown). The first electrode 24, the second electrode 26, and the ground electrode 28 may be provided on the piezoelectric plate 22 by electroplating. The preferred length/width ratio of the piezoelectric plate 22 ranges from 1.5 to 2.5, and the optimum length/width ratio is 2, and the optimum thickness of the piezoelectric plate 22 is equal to less than 1 mm (mm).

Please refer to FIG. 3A and FIG. 3B, which are waveform diagrams of a driving power supply according to a preferred embodiment of the present invention and a schematic diagram of a motion mode of a symmetric piezoelectric plate of the multi-dimensional microactuator of the present invention. When a driving power source is applied to the first electrode 24 or/and the second electrode 26, the piezoelectric plate 22 generates displacements in different directions according to the coefficient characteristics of the piezoelectric material itself, and the piezoelectric plate 22 is polarized and its pole The direction is distributed along the thickness direction of the piezoelectric plate 22. The following description will be made with reference to the third A diagram and the third B diagram. As shown in FIG. 3A, in this embodiment, the driving power input to the second electrode 26 of the present invention is the driving voltage of the SIN waveform, and the first electrode 24 is a free end, and the ground electrode 28 is connected to the ground. end. As shown in the third diagram B, when the driving voltage is initially C, the piezoelectric plate 22 does not have any movement. When the driving voltage is the D point, that is, the peak of the positive half cycle of the driving voltage of the SIN waveform, the P point of the long side of the piezoelectric plate 22 moves to the upper left. When the driving voltage is point E, the piezoelectric plate 22 has no movement. When the driving voltage is the point F, that is, the valley of the negative half cycle of the driving voltage of the SIN waveform, the P point of the long side of the piezoelectric plate 22 moves to the lower right.

As can be seen from the above, as long as the first electrode 24 and the second electrode 26 are given different combinations of driving voltages, the piezoelectric plates 22 generate different motion modes. The following is the fourth to fourth Figure C illustrates three motion modes of a preferred embodiment of the present invention such that the long side P of the piezoelectric plate 22 produces displacements in three different directions. As shown in FIG. 4A, the mode 1 of the present invention is such that the driving voltage is simultaneously input to the first electrode 24 and the second electrode 26, and at this time, the P point of the piezoelectric plate 22 is displaced only in the Z direction. As shown in FIG. 4B, the modality 2 is that the driving voltage is input to the first electrode 24, and the second electrode 26 does not input the driving voltage, and at this time, the P point of the piezoelectric plate 22 is displaced toward the upper right. In the mode 3, the driving voltage is input to the second electrode 26, and the first electrode 24 does not input the driving voltage, and at this time, the P point of the piezoelectric plate 22 is displaced toward the upper left. The above driving voltages are all the peaks of the positive half cycle of the SIN waveform.

Please refer to FIGS. 5A to 5C, which are schematic diagrams showing the motion modes of the stator of the multi-dimensional microactuator according to a preferred embodiment of the present invention. The fifth to fifth C diagrams respectively show the motion modes in which the stator 14 of the multi-axis micro-piezo actuator of the present invention pushes the rotor 12 (see the first figure) to rotate in the X, Y, and Z axes. The motion mode of the stator 14 of this embodiment is controlled by modes 1, 2, and 3 of Figs. 4A through 4C. The motion modes of the piezoelectric plates 30, 32, 34, 36 of the stator 14 shown in Figs. 5A to 5C are as shown in the following table.

As shown in the table, the stator 14 is controlled to rotate the rotor 12 in the X-axis to rotate in the forward direction, that is, to drive the piezoelectric plates 30, 32 to the modal 1, and the piezoelectric plates 34, 36 are the modalities 2 and 3, respectively. Although the piezoelectric plates 30 and 32 are both modal 1, but opposite in phase, they indicate that the moving direction of the urging member 20 disposed on the piezoelectric plates 30 and 32 is opposite, and the phase of the mode 1 of the piezoelectric plate 30 is π, that is, It is shown that the moving direction of the piezoelectric plate 30 is opposite to the moving direction of the mode 1 of FIG. 4A, that is, the phase of the driving voltage input to the first electrode and the second electrode of the piezoelectric plate 30 is opposite to that of the fourth A picture. Since the phase of the driving voltage of the electrode 24 and the second electrode 26 is as shown in FIG. 5A, the urging member 20 provided on the piezoelectric plate 30 is displaced downward, that is, displaced in the negative Z direction.

As shown in the table, the stator 14 is controlled to rotate the rotor 12 in the Y-axis, that is, the driving piezoelectric plates 30 and 32 are modalities 3 and 2, respectively, and the piezoelectric plates 34 and 36 are modal 1, and piezoelectric. The phase 1 of the mode 34 of the plate 34 is π. To control the stator 14 to rotate the rotor 12 to rotate in the Z-axis, that is, to drive the piezoelectric plates 30, 32, 34, 36 to be modal 2. In addition, according to the above table, the multi-dimensional microactuator of the present invention can also push the rotor 12 to rotate in the opposite directions of the X, Y, and Z axes. The above embodiments are only one embodiment of the present invention, and do not limit the present invention to only have the above modes 1, 2, and 3, and do not mean that the present invention can only control the stator using the above modes 1, 2, and 3. 14 Rotate the rotor 12. Since the first electrode and the second electrode of the present invention are symmetrically disposed on the piezoelectric plate, respectively, the present invention requires only a small driving voltage to move the rotor 12 to save power.

Please refer to the sixth drawing, which is a structural schematic diagram of a multi-dimensional microactuator according to another preferred embodiment of the present invention. As shown, the rotor 42 of the multi-dimensional microactuator 40 of this embodiment is semi-circular and the surface is curved, so that the rotor 42 can be mounted by a platform to be positioned, such as a digital position. The lens of the camera, the solar chip of the solar power system, the CCD of the surveillance system, or the eyeball of the robot. With the stator 14 of the present invention, it is possible to precisely control the rotation of the rotor 42 in any orientation in the space.

In addition, this embodiment further includes a magnetic body 45 disposed in the stator 14, and the rotor 42 includes a material that can be attracted by the magnetic body 45, such as a metal material, so that the rotor 42 can be attracted by the magnetic body 45. The frictional force between the pushing element 20 and the rotor 42 is increased to increase the force of the pushing element 20 to push the rotor 42, and the rotor 42 can be prevented from moving due to external influences. This allows precise control of the displacement of the rotor 42. The magnetic body 45 may be a magnet, an electromagnet or the like. Further, the present invention can also apply a magnetic material directly to the surface of the substrate 16, and attract the rotor 42 like the magnetic body 45. Similarly, a material that can be attracted by the magnetic body 45 can be applied directly to the surface of the rotor 42.

Please refer to the seventh figure, which is a structural schematic diagram of a multi-dimensional microactuator according to still another preferred embodiment of the present invention. As shown, this embodiment differs from the previous embodiment in that the embodiment further includes a weight body 47 disposed on the rotor 42. When the stator 14 rotates the rotor 42 to a certain position, the rotor 42 will fall on the stator 14. Therefore, the present invention can further provide the weight body 47 to the rotor 42, and the weight body 47 is movable, in this embodiment. The weight body 47 is a liquid such as water, mercury, or the like, and the type of the liquid can be determined according to the weight of the rotor 42, and a liquid having an appropriate specific gravity is selected. When the rotor 42 rotates, the weight body 47 also moves, thus changing the position of the center of gravity of the rotor 42, so that the rotor 42 does not fall on the stator 14 when it moves. The weight body 47 may be replaced by a solid such as a steel ball in addition to a liquid. Further, in order to reduce the weight of the rotor 42, the rotor 42 is a hollow body in the embodiment, so that the driving voltage for driving the stator 14 can be reduced, and power is saved.

In summary, the multi-dimensional microactuator of the present invention comprises a rotor, a stator and a plurality of urging elements, the stator comprises a plurality of symmetrical piezoelectric plates, each symmetrical piezoelectric plate comprising a piezoelectric plate, a first electrode and a second electrode, The first electrode and the second electrode are symmetrically disposed on the piezoelectric plate, and the pushing elements are respectively disposed on the symmetric piezoelectric plates. The multi-dimensional microactuator of the present invention mainly drives the moving element by various moving modes of the piezoelectric plate, thereby rotating the rotor by pushing the friction between the element and the rotor, thus by piezoelectric The combination of the various motion modes of the board allows for precise rotation of the rotor and precise control of the rotor in any orientation in space.

Therefore, the present invention is a novelty, progressive and available for industrial use. It should be in accordance with the requirements of patent applications for patent law in China. It is undoubtedly to file an invention patent application according to law, and the Prayer Council will grant patents as soon as possible.

However, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, so that the shapes, structures, features, and spirits described in the claims of the present invention are equally changed. Modifications are intended to be included in the scope of the patent application of the present invention.

10‧‧‧Multidimensional microactuators

12‧‧‧Rotor

14‧‧‧ Stator

16‧‧‧Base

18‧‧‧symmetric piezoelectric plate

20‧‧‧Promoting components

22‧‧‧Piezoelectric plate

24‧‧‧First electrode

26‧‧‧second electrode

28‧‧‧Ground electrode

30‧‧‧Piezoelectric plate

32‧‧‧Piezoelectric plate

34‧‧‧Piezoelectric plate

36‧‧‧Piezoelectric plate

40‧‧‧Multidimensional microactuators

42‧‧‧Rotor

45‧‧‧Magnetic body

47‧‧‧weights

1 is a schematic structural view of a multi-dimensional microactuator according to a preferred embodiment of the present invention; and FIG. 2A and FIG. 2B are symmetry of a multi-dimensional microactuator according to a preferred embodiment of the present invention; Schematic diagram of a piezoelectric plate; FIG. 3A is a waveform diagram of a driving power supply according to a preferred embodiment of the present invention; and FIG. 3B is a symmetrical pressure of a multi-dimensional microactuator according to a preferred embodiment of the present invention. Schematic diagram of the motion mode of the electric board; fourth to fourth C pictures are schematic diagrams of the motion modes of the symmetric piezoelectric plates of the multi-dimensional microactuator of a preferred embodiment of the present invention; and FIG. Figure 5 is a schematic view showing the motion mode of the stator of the multi-dimensional microactuator of a preferred embodiment of the present invention; and Figure 6 is a structure of the multi-dimensional microactuator of another preferred embodiment of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 7 is a schematic view showing the structure of a multi-dimensional microactuator according to still another preferred embodiment of the present invention.

10‧‧‧Multidimensional microactuators

12‧‧‧Rotor

14‧‧‧ Stator

16‧‧‧Base

18‧‧‧symmetric piezoelectric plate

20‧‧‧Promoting components

Claims (13)

A multi-dimensional microactuator comprising: a stator comprising a plurality of symmetric piezoelectric plates, each of the symmetric piezoelectric plates comprising a piezoelectric plate, a first electrode and a second electrode, the first electrode The second electrode is symmetrically disposed on a first surface of the piezoelectric plate, and a second surface of the piezoelectric plate is connected to a ground end; a rotor is disposed above the stator, and the rotor has a weight body The weight body moves with the rotation of the rotor to change the position of the center of gravity of the rotor; and a plurality of pushing elements are respectively disposed on the symmetric piezoelectric plates to push the rotor. The multi-dimensional microactuator of claim 1, wherein the surface of the rotor is curved. The multi-dimensional microactuator of claim 1, wherein the stator further comprises a substrate, and the symmetric piezoelectric plates are disposed above the substrate. The multi-dimensional microactuator of claim 1, wherein the stator is of a polygonal type. The multi-dimensional microactuator of claim 1, wherein each of the symmetrical piezoelectric plates further comprises a ground electrode disposed on the second surface of the piezoelectric plate and connected to the ground. The multi-dimensional microactuator according to claim 1, further comprising a magnetic body disposed in the stator. The multi-dimensional microactuator of claim 6, wherein the magnetic body is a magnet. The multi-dimensional microactuator of claim 6, wherein the magnetic body is an electromagnet. The multi-dimensional microactuator of claim 1, wherein the piezoelectric plate comprises a ceramic piezoelectric material. The multi-dimensional microactuator of claim 9, wherein the ceramic piezoelectric material It is lead zirconate titanate. The multi-dimensional microactuator of claim 1, wherein the piezoelectric plate has a length/width ratio ranging from 1.5 to 2.5. The multi-dimensional microactuator of claim 11, wherein the piezoelectric plate has an optimum length/width ratio of two. The multi-dimensional microactuator of claim 1, wherein the urging member is disposed in the middle of the long side of the piezoelectric plate.