TWI385269B - Method of making carbon nanotube - Google Patents
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本發明涉及一種奈米材料的備方法,尤其涉及一種奈米碳管的製備方法。The invention relates to a preparation method of a nano material, in particular to a preparation method of a carbon nanotube.
奈米碳管(Carbon Nanotube, CNT)係一種新型碳材料,由日本研究人員Iijima在1991年在電弧放電的產物中發現,請參見"Helical Microtubules of Graphitic Carbon", S. Iijima, Nature, vol.354, p56 (1991)。奈米碳管具有優良的綜合力學性能,如高彈性模量、高楊氏模量和低密度,以及優異的電學性能、熱學性能和吸附性能。隨著奈米碳管螺旋方式的變化,奈米碳管可呈現出金屬性或半導體性質。由於奈米碳管的優異特性,因此可望其在奈米電子學、材料科學、生物學、化學等領域中發揮重要作用。Carbon Nanotube (CNT) is a new type of carbon material discovered by Japanese researcher Iijima in the product of arc discharge in 1991. See "Helical Microtubules of Graphitic Carbon", S. Iijima, Nature, vol. 354, p56 (1991). The carbon nanotubes have excellent comprehensive mechanical properties such as high elastic modulus, high Young's modulus and low density, as well as excellent electrical properties, thermal properties and adsorption properties. The nanocarbon tubes may exhibit metallic or semiconducting properties as the carbon nanotubes are spirally changed. Due to the excellent properties of carbon nanotubes, it is expected to play an important role in the fields of nanoelectronics, materials science, biology, and chemistry.
目前,製備奈米碳管的方法主要係化學氣相沈積法(CVD)。化學氣相沈積主要係運用過渡金屬或其氧化物作為催化劑,在相對較低的溫度下分解含碳的源氣體,在所提供的基底上生長奈米碳管。At present, the method for preparing a carbon nanotube is mainly a chemical vapor deposition (CVD) method. Chemical vapor deposition mainly uses a transition metal or its oxide as a catalyst to decompose a carbon-containing source gas at a relatively low temperature and grow a carbon nanotube on the substrate provided.
當奈米碳管應用於場發射顯示器、電子槍、大功率行波管等器件時,因為場發射平面顯示點陣的定址要求具有良好的導電性且能夠承載較大電流的電極;電子槍、大功率行波管等器件的陰極也需要能承載較大電流的基底,而對於這些應用,金屬基底為最佳材料。When the carbon nanotube is applied to a field emission display, an electron gun, a high-power traveling wave tube, etc., the field emission plane shows that the address of the lattice requires an electrode having good conductivity and capable of carrying a large current; the electron gun, high power The cathode of a device such as a traveling wave tube also requires a substrate capable of carrying a large current, and for these applications, the metal substrate is the best material.
目前,由於奈米碳管的生長多以過渡金屬為催化劑,由於這種過渡金屬催化劑易與其他金屬形成合金,從而使 催化劑失去活性,導致無法正常生長奈米碳管,因此奈米碳管的生長多採用矽、二氧化矽、玻璃等材料作為基底,而無法在金屬基底上生長奈米碳管。At present, since the growth of the carbon nanotubes mostly uses a transition metal as a catalyst, since the transition metal catalyst is easily alloyed with other metals, The catalyst is inactivated, resulting in the inability to grow the carbon nanotubes. Therefore, the growth of the carbon nanotubes is mostly based on materials such as ruthenium, ruthenium dioxide, and glass, and it is impossible to grow the carbon nanotubes on the metal substrate.
Ch. Emmenegger揭示了一種在金屬基底上形成奈米碳管陣列的方法,請參見"Carbon nanotube synthesized on metallic substrate", Ch. Emmenegger, Applied Surface Science, vol.162-163, P452-456 (2000)。他們通過在鋁基底上塗敷上硝酸鐵(Fe(NO3 )3 ),通過熱處理使Fe(NO3 )3 塗層形成奈米級氧化鐵(Fe2 O3 )顆粒,以奈米級的Fe2 O3 顆粒為催化劑,然後通入乙炔碳源氣與保護氣體的混合氣體使奈米碳管陣列長出。然,由於Fe2 O3 導電性能較差,使奈米碳管與金屬基底的電性接觸較差,限制了奈米碳管作為電子器件的應用。且,該方法需要經過熱處理將過渡層處理為奈米級顆粒催化劑,增加了於金屬基底上生長奈米碳管的工藝步驟,使成本較高。Ch. Emmenegger discloses a method of forming a carbon nanotube array on a metal substrate, see "Carbon nanotube synthesized on metallic substrate", Ch. Emmenegger, Applied Surface Science, vol. 162-163, P452-456 (2000) . They applied Fe(NO 3 ) 3 coating to form nano-scale iron oxide (Fe 2 O 3 ) particles by heat treatment by coating iron nitrate (Fe(NO 3 ) 3 ) on the aluminum substrate to nanometer-scale Fe. The 2 O 3 particles are catalysts, and then a mixture of acetylene carbon source gas and shielding gas is introduced to grow the carbon nanotube array. However, due to the poor conductivity of Fe 2 O 3 , the electrical contact between the carbon nanotubes and the metal substrate is poor, which limits the application of the carbon nanotubes as an electronic device. Moreover, the method requires heat treatment to treat the transition layer into a nano-sized particle catalyst, and the process step of growing the carbon nanotubes on the metal substrate is increased, so that the cost is high.
有鑑於此,提供一種可在金屬基底上直接生長奈米碳管,無須在金屬基底與奈米碳管之間增加過渡層或催化劑,工藝簡單,成本較低,適合大量生產的奈米碳管的製備方法實為必要。In view of this, it is possible to provide a carbon nanotube directly grown on a metal substrate without adding a transition layer or a catalyst between the metal substrate and the carbon nanotube, which is simple in process and low in cost, and is suitable for mass production of carbon nanotubes. The preparation method is really necessary.
一種奈米碳管的製備方法,其包括以下步驟:提供一銅基底,對銅基底的表面進行拋光處理;將拋光處理後銅基底置於一加熱爐中,通入保護氣體後,加熱至400℃-800℃;向加熱爐中通入碳源氣,於400℃-800℃下生長奈米碳管。A method for preparing a carbon nanotube, comprising the steps of: providing a copper substrate, polishing a surface of the copper substrate; placing the polished copper substrate in a heating furnace, introducing a protective gas, and heating to 400 °C-800 ° C; carbon source gas is introduced into the heating furnace, and the carbon nanotubes are grown at 400 ° C - 800 ° C.
與先前技術相比較,本技術方案所提供的奈米碳管的製備方法,可直接在金屬銅上生長奈米碳管,且無須在金屬銅和奈米碳管之間增加過渡層,工藝簡單,成本較低,適合大量生產。Compared with the prior art, the preparation method of the carbon nanotube provided by the technical solution can directly grow the carbon nanotube on the metal copper, and does not need to add a transition layer between the metal copper and the carbon nanotube, and the process is simple. , low cost, suitable for mass production.
以下將結合附圖及具體實施例詳細說明本技術方案所提供的奈米碳管的製備方法。Hereinafter, a method for preparing a carbon nanotube provided by the present technical solution will be described in detail with reference to the accompanying drawings and specific embodiments.
請參閱圖1,本技術方案實施例提供一種製備奈米碳管的方法,具體包括以下步驟:步驟一:提供一銅基底,對銅基底的表面進行拋光處理。Referring to FIG. 1 , an embodiment of the present technical solution provides a method for preparing a carbon nanotube, and specifically includes the following steps: Step 1: providing a copper substrate, and polishing the surface of the copper substrate.
所述拋光處理的過程包括以下步驟:首先,採用一600目-800目的砂紙沿第一方向反復摩擦銅基底的表面3分鐘-5分鐘。而後,除去銅基底表面因摩擦產生的粉末。The polishing process includes the following steps: First, the surface of the copper substrate is repeatedly rubbed in the first direction for 3 minutes to 5 minutes using a 600-800 mesh sandpaper. Then, the powder generated on the surface of the copper substrate by friction is removed.
其次,採用一1000目-1300目的砂紙沿第二方向反復摩擦銅基底的表面5分鐘-8分鐘。而後,除去銅基底表面因摩擦產生的粉末。Next, the surface of the copper substrate is repeatedly rubbed in the second direction using a 1000 mesh-1300 mesh paper for 5 minutes to 8 minutes. Then, the powder generated on the surface of the copper substrate by friction is removed.
最後,採用一1500目-2000目的砂紙沿第一方向反復摩擦銅基底的表面10分鐘-15分鐘。而後,除去銅基底表面因摩擦產生的粉末。Finally, the surface of the copper substrate is repeatedly rubbed in the first direction for 10 minutes to 15 minutes using a 1500 mesh-2000 mesh paper. Then, the powder generated on the surface of the copper substrate by friction is removed.
所述第一方向與第二方向之間形成一夾角α,0∘<α90∘,優選地,α為90∘。上述除去銅基底表面因摩擦產生的粉末的方法為風吹的方法,可採用吹風機等。Forming an angle α between the first direction and the second direction, 0∘<α 90 ∘, preferably, α is 90 ∘. The above method of removing the powder generated by the friction of the surface of the copper substrate is a method of wind blowing, and a hair dryer or the like can be used.
所述銅基底的具體形狀不限,優選地,所述銅基底為 一長方體狀,該銅基底的厚度為0.5厘米-5厘米,其用於生長奈米碳管的表面的面積為4平方厘米-100平方厘米。The specific shape of the copper substrate is not limited, and preferably, the copper substrate is In the shape of a rectangular parallelepiped, the copper substrate has a thickness of 0.5 cm to 5 cm, and the surface for growing the carbon nanotubes has an area of 4 cm 2 to 100 cm 2 .
上述對銅基底表面進行拋光處理的目的為:其一,使銅基底表面盡可能平整和光滑,有利於奈米碳管的生長;其二,在對銅基底表面採用砂紙進行拋光處理的過程中,由於砂紙係沿不同的方向摩擦銅基底,且砂紙較細,因此在銅基底的表面會形成細小的網狀劃痕或溝槽。The purpose of the above-mentioned polishing treatment on the surface of the copper substrate is as follows: one is to make the surface of the copper substrate as flat and smooth as possible, which is favorable for the growth of the carbon nanotubes; and second, in the process of polishing the surface of the copper substrate with sandpaper. Since the sandpaper rubs the copper substrate in different directions and the sandpaper is fine, fine mesh scratches or grooves are formed on the surface of the copper substrate.
步驟二:將拋光處理後銅基底置於一反應爐中,通入保護氣體後,加熱至400℃-800℃。Step 2: The polished copper substrate is placed in a reaction furnace, and after passing through a shielding gas, it is heated to 400 ° C - 800 ° C.
將上述拋光處理後的銅基底裝入一反應舟中,該反應舟一般為石英舟,將反應舟裝入反應爐中,該反應爐可為箱式加熱爐或管式加熱爐等,本實施例優選為管式加熱爐,將反應舟置於管式加熱爐中央,通入保護氣體後,加熱至400℃-800℃溫度,優選地,加熱至700℃。The polished copper substrate is placed in a reaction boat, which is generally a quartz boat, and the reaction boat is loaded into a reaction furnace, which may be a box furnace or a tube furnace, etc. For example, a tubular heating furnace is preferably provided. The reaction vessel is placed in the center of the tubular heating furnace, and after passing through a shielding gas, it is heated to a temperature of from 400 ° C to 800 ° C, preferably to 700 ° C.
在上述加熱過程中,銅基底表面網狀劃痕或溝槽進一步形成大小均勻的銅顆粒,該銅顆粒為奈米碳管的生長提供晶核,起到催化劑的作用。該銅顆粒的直徑為1奈米-10奈米,銅顆粒的密度與拋光時砂紙磨擦的次數和摩擦方向之間的夾角有關,摩擦的次數越多,摩擦方向之間的夾角越小,銅顆粒的密度越大。During the above heating process, the mesh scratches or grooves on the surface of the copper substrate further form copper particles of uniform size, which provide nucleation for the growth of the carbon nanotubes and act as a catalyst. The diameter of the copper particles is from 1 nm to 10 nm, and the density of the copper particles is related to the angle between the rubbing time and the rubbing direction of the sandpaper during polishing. The more the number of rubbing, the smaller the angle between the rubbing directions, and the copper. The greater the density of the particles.
步驟三:向加熱爐中通入反應氣,400℃-800℃溫度下生長奈米碳管一段時間。Step 3: The reaction gas is introduced into the heating furnace, and the carbon nanotubes are grown at a temperature of 400 ° C to 800 ° C for a period of time.
向加熱爐中通入碳源氣與保護氣體的混合氣體形成的反應氣,其中碳源氣為碳氫化合物,可為乙炔、乙烯等,由於碳源氣在反應過程中首先需要裂解,而乙炔的裂解溫 度較低,故本實施例優選乙炔為碳源氣。保護氣體為惰性氣體或氮氣,本實施例優選為氮氣。400℃-800℃溫度下,生長奈米碳管5分鐘-30分鐘。由於銅基底形成有大小均勻的銅顆粒,該銅顆粒在奈米碳管的生長過程為奈米碳管的生長提供了晶核,即銅顆粒起催化劑的作用,使奈米碳管得以生長。冷卻後,取出銅基底,於銅基底的表面形成有複數個奈米碳管。a reaction gas formed by introducing a mixed gas of a carbon source gas and a shielding gas into the heating furnace, wherein the carbon source gas is a hydrocarbon, which may be acetylene, ethylene, etc., since the carbon source gas first needs to be cracked during the reaction, and acetylene Pyrolysis temperature The degree is low, so in the present embodiment, acetylene is preferably a carbon source gas. The shielding gas is an inert gas or nitrogen, and this embodiment is preferably nitrogen. The carbon nanotubes were grown at a temperature of 400 ° C to 800 ° C for 5 minutes to 30 minutes. Since the copper substrate is formed with copper particles of uniform size, the copper particles provide a nucleus for the growth of the carbon nanotubes during the growth of the carbon nanotubes, that is, the copper particles act as a catalyst to allow the carbon nanotubes to grow. After cooling, the copper substrate was taken out, and a plurality of carbon nanotubes were formed on the surface of the copper substrate.
請參閱圖2及圖3,本實施例中所製備的奈米碳管於銅基底的表面無序排列,該奈米碳管的一端與銅基底連接,該奈米碳管的直徑為5奈米-20奈米。Referring to FIG. 2 and FIG. 3, the carbon nanotubes prepared in this embodiment are randomly arranged on the surface of the copper substrate, and one end of the carbon nanotube is connected to the copper substrate, and the diameter of the carbon nanotube is 5 M-20 nm.
本技術方案所提供的奈米碳管的製備方法,可直接於金屬銅上生長奈米碳管,且無須在金屬銅和奈米碳管之間增加過渡層,工藝簡單,成本較低,適合大量生產。The preparation method of the carbon nanotube provided by the technical solution can directly grow the carbon nanotube on the metal copper, and does not need to add a transition layer between the metal copper and the carbon nanotube, the process is simple, the cost is low, and the method is suitable. Mass production.
採用本技術方案的方法可直接於場發射顯示器、電子槍、大功率行波管等電子器件的電極上形成奈米碳管,避免了先製備奈米碳管,再把奈米碳管粘附到所應用的器件上的複雜過程。By adopting the method of the technical solution, the carbon nanotubes can be formed directly on the electrodes of the electronic devices such as the field emission display, the electron gun, the high-power traveling wave tube, etc., thereby avoiding the preparation of the carbon nanotubes first, and then attaching the carbon nanotubes to the A complex process on the applied device.
綜上所述,本發明確已符合發明專利之要件,遂依法提出專利申請。惟,以上所述者僅為本發明之較佳實施例,自不能以此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士援依本發明之精神所作之等效修飾或變化,皆應涵蓋於以下申請專利範圍內。In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.
圖1係本技術方案實施例的奈米碳管的製備方法的流程圖。1 is a flow chart of a method for preparing a carbon nanotube according to an embodiment of the present technical solution.
圖2係本技術方案實施例所製備的奈米碳管的掃描電鏡照片。2 is a scanning electron micrograph of a carbon nanotube prepared by an embodiment of the present technical solution.
圖3係本技術方案實施例所製備的奈米碳管的透射電鏡照片。3 is a transmission electron micrograph of a carbon nanotube prepared by an embodiment of the present technical solution.
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