TWI381160B - Device for setting filter media sample for gas-absorption - Google Patents

Description

Sample placement device for detecting trace pollutant gas adsorption filter material

The invention relates to a sample placing device for detecting a trace pollution gas adsorption filter material, and is particularly suitable for a micro gas pollution detection range of ppm to ppb level.

At present, the way of removing gaseous pollutants in space is generally divided into wet type and dry type. The so-called wet filter device, such as the washing tank type, is to introduce the pollutant gas in the space into the washing tank, and filter the pollutants in the water washing manner to achieve the gas purifying effect. The dry filtering device utilizes a material having an adsorption or catalytic reaction effect on the target contaminated gaseous molecules to perform physical or chemical adsorption; The generation of trace pollutant gases in the space is generally generated during the production of the product or the introduction of gas into the air conditioner. The concentration of gas pollution in the space is too high, in addition to affecting human health, it will also have an impact on the production process of some industries, especially in the nano-process.

Currently, dry adsorption devices, such as chemical filters or other similar products, are used in semiconductor plants at the most. The filter mesh is a frame structure, and is internally filled with a filter medium that adsorbs or reacts with a target gas, such as an activated carbon material. Such a porous filter material can be roughly classified into two types, a granular shape and a flat shape, in terms of appearance. The filter manufacturer completes the manufacture of the chemical filter or activated carbon filter after the filter external structure is completed, and then fills in the appropriate granular or flat filter media. The performance of the product is commissioned by a specialized agency for performance testing.

The filter material performance data required for general chemical filter development can be divided into the following items: (1) Material filtration performance part, including: filter material pressure loss, initial efficiency, adsorption capacity, filter material outgas analysis, etc.; The structural aspects include: gas concentration, amount of filter material (thickness), surface wind speed and temperature and humidity conditions. Once the two are integrated, an effective chemical filter product can be designed.

The above-mentioned full-scale performance verification, for the manufacturer, the development cost is quite high. At present, there is no standardized equipment on the market for the inspection of materials, so the price of the filter on the market is high. If the performance verification method of the filter material can be standardized and instrumented, the filter material performance verification operation can be tested and screened before product development, and the product development cost has absolute economic benefits.

Accordingly, the inventors of the present invention have developed a sample placement device for detecting a trace amount of contaminating gas adsorbent filter material, which is capable of systematically verifying the performance of the filter material structure.

The main object of the present invention is to provide a filter material sample placement device for detecting micro-polluted gas adsorbent materials, which utilizes an actual gas flow field for dynamic detection of filter media to achieve development time and cost savings.

In order to achieve the above object, the present invention provides a sample placement device for detecting a trace amount of a contaminating gas adsorbent filter material, comprising: a frame; a sample tank mounted on the frame and accommodating the filter material; a first flow tube Mounted on the frame and connected to the sample tank; and a second flow tube mounted on the frame and connected to the sample tank; wherein the gas system flows through the first flow tube in sequence, a sample tank and the second flow tube.

In order to enable your review committee to have a better understanding and recognition of the structural purpose and efficacy of the present invention, the detailed description is as follows.

Please refer to FIG. 1 to FIG. 3 , wherein FIG. 1 is a perspective view of the sample material placement device of the present invention; FIG. 2 is a perspective view of the sample tank, the first flow tube and the second flow tube of the present invention; A cross-sectional view of the sample tank, the first flow tube and the second flow tube are connected.

The filter material sample placement device 1 of the present invention mainly comprises a frame 10, a sample tank 12, a first flow tube (front flow path portion) 14, and a second flow tube (gas flow tube) 16. The sample tank 12 is mounted on the frame 10 and can accommodate a filter material (not shown); the first flow tube 14 is mounted on the frame 10 and connected to the sample tank 12 at one end; the second flow tube 16 is also mounted on the sample tube 12 The frame 10 is connected to the sample tank 12 at one end.

The sample tank 12, the first flow tube 14 and the second flow tube 16 can be separated to test the loading and replacement of the filter material. The separating operation is to separate or close the three by using a first driving portion (upper pneumatic cylinder) 102 and a second driving portion (lower pneumatic cylinder) 104 above or below. The first driving portion 102 is connected to the sample tank 12 and actuated to engage or separate the sample tank 12 from the first flow tube 14. The second driving unit 104 is connected to the second flow tube 16 and actuated to engage or disengage the sample tank 12 and the second flow tube 16. The separated sample tank 12 can in turn be removed by means of a linear moving unit 106 for the loading and replacement of the test filter material.

In order to accurately position the sample tank 12 at the time of joining, the frame 10 is provided with A first positioning unit 1062 is positioned for displacement. Similarly, in order to accurately position the sample well 12 during the joining, a second positioning unit 1064 is also provided above the frame 10 for positioning during displacement.

The first flow tube 14 can be further divided into a front flow guiding portion 142, a rectifying portion 144 connected to the front guiding portion 142, and a front flow channel portion 146 connected to the rectifying portion 144 and the sample tank 12, respectively. (As shown in Figure 2).

The first flow tube 14 is provided with a temperature sampling port 1402, a dew point sampling port 1404, a differential pressure meter sampling port 1460, and a pre-measurement sampling port 1462. In the present embodiment, the temperature sampling port 1402 and the dew point sampling port 1404 are disposed in the front flow guiding portion 142, and the differential pressure meter sampling port 1460 and the front sampling port 1462 are disposed in the front flow path portion 146. Therefore, when the gas enters the first flow tube 14 via the gas inlet 1400 (connected to the gas circuit under test (not shown)), the temperature can be connected to the temperature measuring device (not shown). The sampling port 1402 measures the initial temperature of the gas, and measures the initial humidity of the gas by using the dew point sampling port 1404 connected to the dew point measuring device (not shown) by means of the differential pressure measuring device (not shown in the figure) The connected differential pressure meter sampling port 1460 measures the initial pressure of the gas and measures the initial concentration of the gas by measuring the sampling port 1462 before being connected to a concentration measuring device (not shown).

Similarly, the second flow tube 16 is also provided with a temperature sampling port 1602, a dew point sampling port 1604, a differential pressure meter sampling port 1606, and a post-measurement sampling port 1608. In this way, the temperature of the adsorbed gas can be measured by a temperature sampling port 1602 connected to a temperature measuring device (not shown), and the dew point connected to the dew point measuring device (not shown) can be measured. Sampling port 1604 to measure the humidity of the adsorbed gas by means of a differential pressure measuring device (in the figure) The differential pressure meter sampling port 1606 is not shown to measure the adsorbed gas pressure, and the adsorbed gas is measured by measuring the sampling port 1608 after being connected to a concentration measuring device (not shown). concentration. Finally, the gas exits the filter material sample placement device 1 via the gas outlet 1600.

As shown in FIG. 3, in order to guide the airflow field of the gas to be measured, a rectifying portion 144 is connected to the rectifying portion 144 connected between the front flow guiding portion 142 and the front flow portion 146, and the commutator piece 1440 is provided with a plurality of The holes, therefore, can be rectified by the gas being introduced through the gas inlet 1400 to improve the accuracy and consistency of the test. The front flow path portion 146 is in turn connected to the sample tank 12 to introduce the gas to be measured into the adsorption zone A for adsorption test.

In order to achieve the airtight effect, an airtight ring S1 is disposed at the first opening F of the sample tank 12 and the first flow tube 14 is connected, and another gas is disposed at the second opening B of the sample tank 12 and the second flow tube 16 Closed ring S2.

In order to filter media of different structure types, the sample tank 12 can be changed in different structures to meet the requirements of different adsorbent materials. Referring to Figure 4, the sample cell shown in the figure is used to place a particulate filter (not shown). The sample tank 12 is provided with two movable filter screens 120 and a filter screen 122 (the filter screen 120 and the filter screen 122 can adjust the height and the low spacing independently), and the filter screen 120 is provided with a plurality of holes 1200, and the filter screen 122 is opened. There are a plurality of holes 1220, so that the granular filter material (not shown) to be tested can be placed between the screen 120 and the screen 122.

If the filter material to be tested is in the form of a sheet, the sample tank has a different design. Referring to FIG. 5, in the embodiment, a plurality of hollow discs 124 stacked on each other are disposed in the sample tank 12. The sheet-shaped filter material 126 to be tested can be fixed by being sandwiched by the adjacent hollow discs 124. In this configuration, We can increase or decrease the number of hollow discs 124 by measuring the number of filter media.

If the filter material to be tested is a flexible sheet-like filter material (for example, a fiber cloth or a paper filter material used in a bag type dust collector), a plurality of sample grooves 12 may be provided for the purpose of fixing and flexing. The tapered sheet-like body 128 adjacent to each other, and the distance between the adjacent two tapered sheet-like bodies 128 is maintained for gas passage, and is shown in FIG. In this way, the filter material to be tested (not shown) can be sandwiched between the two tapered sheet-like bodies 128 for performance testing in the form of waves or corrugations.

It can be seen from the above description that the sample placing device for detecting the trace pollutant gas adsorbing filter material of the present invention can provide the necessary performance data (temperature, dew point, pressure, concentration, etc.) for holding the filter material for the specific gas adsorption efficiency, thereby saving the same. Development time and cost should be patented so that practitioners in related industries can use it to promote industrial development.

The above is only the best mode for carrying out the invention, and the scope of the invention is not limited thereto. That is to say, the equivalent changes and modifications made by the applicant in accordance with the scope of the patent application of the present invention should still fall within the scope of the patent of the present invention. I would like to ask your review committee to give a clear explanation and pray for it.

1‧‧‧Filter material sample placement device

10‧‧‧Frame

12‧‧‧ sample slot

14‧‧‧First flow tube (front flow section)

16‧‧‧Second flow tube (gas flow tube)

102‧‧‧First drive (upper pneumatic cylinder)

104‧‧‧Second drive (lower air cylinder)

106‧‧‧Linear mobile unit

120‧‧‧Filter

122‧‧‧Filter

124‧‧‧ hollow disc

126‧‧‧Flake filter

128‧‧‧Cone flakes

142‧‧‧ Front diversion

144‧‧‧Rectifier

146‧‧‧ Front Runner Department

1062‧‧‧First positioning unit

1064‧‧‧Second positioning unit

1200‧‧‧ hole

1220‧‧‧ hole

1400‧‧‧ gas inlet

1402‧‧‧ Temperature sampling port

1404‧‧‧ Dew point sampling port

1440‧‧‧Rectifier

1460‧‧‧ Differential pressure meter sampling port

1462‧‧‧Pre-test sampling port

1600‧‧‧ gas export

1602‧‧‧Temperature sampling port

1604‧‧‧ Dew point sampling port

1606‧‧‧ Differential pressure meter sampling port

1608‧‧‧Sampling sampling port

A‧‧‧Adsorption zone

F‧‧‧first opening

B‧‧‧second opening

S1‧‧‧ airtight ring

S2‧‧‧ airtight ring

Figure 1 is a perspective view of a sample placement device for detecting a micro-polluted gas adsorption filter material according to the present invention; Figure 2 is a perspective view of the sample tank, the first flow tube and the second flow tube of the present invention; FIG. 4 is a perspective sectional view showing a sample tank according to the present invention; FIG. 5 is a perspective sectional view showing a sample tank according to the present invention; A variation; and FIG. 6 is a perspective cross-sectional view of a sample tank used in the present invention, which shows another variation.

12‧‧‧ sample slot

144‧‧‧Rectifier

1400‧‧‧ gas inlet

1402‧‧‧ Temperature sampling port

1404‧‧‧ Dew point sampling port

1440‧‧‧Rectifier

1460‧‧‧ Differential pressure meter sampling port

1462‧‧‧Pre-test sampling port

1600‧‧‧ gas export

1602‧‧‧Temperature sampling port

1604‧‧‧ Dew point sampling port

1606‧‧‧ Differential pressure meter sampling port

1608‧‧‧Sampling sampling port

A‧‧‧Adsorption zone

F‧‧‧first opening

B‧‧‧second opening

S1‧‧‧ airtight ring

S2‧‧‧ airtight ring

Claims (19)

A sample placement device for detecting a micro-polluted gas adsorption filter material, comprising: a frame; a sample tank mounted on the frame and accommodating the filter material; a first flow tube mounted on the frame and The sample tanks are connected to each other; and a second flow tube is mounted on the frame and connected to the sample tank; wherein the gas system sequentially flows through the first flow tube, the sample tank and the second flow tube, The first flow tube includes a front flow guiding portion, and the front flow guiding portion is provided with a dew point sampling port. The front flow guiding portion can be connected to the dew point measuring device by the dew point sampling port, and the first flow tube includes a front a flow guiding portion, the front flow guiding portion is provided with a pre-measuring sampling port, wherein the front flow channel portion can be connected to the concentration measuring device by the pre-measuring sampling port; wherein the second flow tube is provided with a dew point sampling The second flow tube can be connected to the dew point measuring device by the dew point sampling port, and the second flow tube is provided with a post-measurement sampling port, and the second flow tube can be measured by the post-measurement sampling port and concentration The device is connected; wherein the sample slot is provided with a first Port and a second opening, provided between the first line and second openings among the plurality of mutually stacked empty disc. The sample placing device for detecting a micro-polluted gas adsorbing filter material according to the first aspect of the patent application, wherein the frame further comprises: a first driving portion connected to the sample tank and actuated accordingly; Acting to engage or separate the sample tank from the first flow tube; And a second driving portion connected to the second flow tube and actuated to engage or separate the sample tank and the second flow tube. The sample placement device for detecting a trace pollutant gas adsorbent filter material according to the second aspect of the patent application, wherein the first driving portion further comprises a linear moving unit, and the first driving portion causes the sample slot to follow The linear moving unit performs a linear movement. The sample placement device for detecting a trace pollutant gas adsorbent filter material according to claim 1, wherein the frame is further provided with a first positioning unit for positioning the sample tank. The sample placement device for detecting a micro-polluted gas adsorption filter material according to claim 1, wherein the frame is further provided with a second positioning unit for positioning the second flow tube. The sample placement device for detecting a micro-polluted gas adsorption filter material according to the first aspect of the invention, wherein the first flow tube comprises: the front flow guiding portion, a rectifying portion connected to the front flow guiding portion, and respectively The front flow path portion connected to the rectifying portion and the sample tank. The sample placement device for detecting a micro-polluted gas adsorption filter material according to the sixth aspect of the patent application, wherein the front flow guiding portion is provided with a temperature sampling port, and the front flow guiding portion can be connected with the temperature sampling port The temperature measuring devices are connected. The sample placement device for detecting a micro-polluted gas adsorption filter material according to the sixth aspect of the patent application, wherein the front flow channel portion is provided with a differential pressure meter sampling port, and the front flow channel portion can be separated by the pressure difference The metering port is connected to the differential pressure measuring device. The sample placement device for detecting a micro-polluted gas adsorption filter material according to claim 1, wherein at least one airtight ring is disposed at a junction of the sample tank and the first flow tube. The sample placement device for detecting a micro-polluted gas adsorption filter material according to claim 1, wherein at least one airtight ring is disposed at a junction of the sample tank and the second flow tube. The sample placement device for detecting a micro-polluted gas adsorption filter material according to the first aspect of the patent application, wherein the second flow tube is provided with a temperature sampling port, and the second flow tube can be connected with the temperature sampling port The temperature measuring devices are connected. The sample placement device for detecting a micro-polluted gas adsorption filter material according to the first aspect of the patent application, wherein the second flow tube is provided with a differential pressure meter sampling port, and the second flow tube can be separated by the pressure difference The metering port is connected to the differential pressure measuring device. The sample placement device for detecting a micro-polluted gas adsorbent filter material according to the first aspect of the patent application, wherein the first opening is for connecting with the first flow tube, and the second opening is for connecting with the second flow tube. The sample placement device for detecting a micro-polluted gas adsorption filter material according to claim 13 , wherein at least one filter is disposed between the first opening and the second opening, the filter mesh having a plurality of holes. A sample placement device for detecting a trace amount of a contaminating gas adsorbent filter material according to claim 14 of the patent application, wherein the sample tank is used for placing a granular filter medium. The sample placement device for detecting a trace pollution gas adsorption filter material according to the fifteenth item of the patent application, wherein the size of the holes is smaller than The size of the granular filter material. A sample placing device for detecting a trace amount of a contaminating gas adsorbing filter material according to the first aspect of the patent application, wherein the sample tank is used for placing a sheet-shaped filter medium. A sample placement device for detecting a trace amount of a contaminating gas adsorbent filter material according to claim 17, wherein the sheet-like filter material is sandwiched between adjacent two hollow discs. The sample placement device for detecting a micro-polluted gas adsorption filter material according to claim 13 , wherein a plurality of tapered sheet-like bodies adjacent to each other are disposed between the first opening and the second opening, And the distance between the adjacent two tapered sheet bodies is maintained.