TWI379061B - - Google Patents

Description

1379061 ι〇ι年《Ί月 y β Revision Replacement—VI. Description of the Invention: [Technical Field] The present invention relates to an air purification device, and more particularly to a plurality of clean rooms separated inside a cylinder, and Each of the clean room is filled with a purification material, and an air flow passage connecting the air inlet, each of the clean room and the air outlet is formed inside the cylinder, and the gas to be purified is continuously purified by using a single structure. The designer of the program.

[Prior Art]

In the process of semiconductor wafer fabrication, TFT-LCD panel or solar photovoltaic manufacturing, acid solutions such as inorganic acids (nitric acid, sulfuric acid, hydrofluoric acid, hydrochloric acid) and organic acids (such as acetic acid) are used in the wet etching process. In the dry process or the cleaning process, a large amount of fluorine compounds (such as PFC: NF3, SF6, CF4, C2F6) are used, and the inorganic acid (nitric acid, hydrofluoric acid) is decomposed by the purification equipment; The ratio of organic acid to inorganic acid is not the same. The main etching effect is carried out by inorganic acid. The addition of organic acid (such as acetic acid) is mainly to make the inorganic acid more stable and improve the etching yield. However, it causes a lot of toxic gases. Odor, white smoke, N〇2 yellow smoke or aversive odor emissions. Suspended particulate refers to solid or liquid particles suspended in a gas stream. It is used as an evaluation item when referring to general air quality, and horizontally filtered by a high-volume sampler during measurement. Determination. However, the ability of suspended particles to enter the human respiratory system varies greatly, and the general medical community believes that particles below 10 microns can enter the human respiratory tract, and the damage of the respiratory system caused by particles below 2.5 microns. The strongest. At present, the general environmental protection unit for the airborne particles -3379061 __ p丨年η月v} Ei correction replacement page - jl - 丨丨 · | LOG · - the degree of pollution is changed to use "particle size less than or equal to 1 〇 micron suspension Particles (Particulate matters 10 " m, referred to as PM10), in the public health sector, the use of "particle size of 2.5 microns or less suspended particles (Particulate matters 2 · 5 " m 'referred to PM 2. 5)" to assess pollution pairs The impact of health. The particles below 2.5 microns are therefore also referred to as "Respirable suspended particles". However, the conventional purification and absorption methods are currently the most commonly used purification equipment (such as treatment with suction and simple filters or general adsorption or washing), and it is impossible to remove the above-mentioned suspended particles present in the air. Acidic gases (nitric acid, sulfuric acid, hydrofluoric acid, hydrochloric acid, ammonia, n〇2; especially hydrofluoric acid, n〇2) and other intractable molecular pollutants, and these suspended particles will cause health if inhaled by the human body. At the same time, these acid gases will produce malodor at low concentrations, and will easily discharge white smoke or yellow smoke from sub-micron particles in the pipeline, which will easily affect the living environment around the plant and cause public protests. Product yield of high-end processes in other high-tech plants around the plant. Furthermore, there is a method of purifying a gas containing a sulfurized compound, a nitric acid, an acetic acid, and the like in a treated air filter medium, and the catalytic filter material has the advantages of purifying a sulfur compound, nitric acid, and acetic acid. The removal of substances such as gases - high efficiency, low reaction temperature, low energy consumption, avoiding the formation of secondary pollutants, etc., is an environmentally friendly catalytic purification technology. - 'Contents of the Invention>> The main object of the present invention is to provide an air purifying device which has the effect of being small in size. Another object of the present invention is to enhance the efficiency of purification by utilizing on-line regeneration. -4- 1379061, <^年*1月日酱正换页 In order to achieve the above-mentioned effects, the structural feature of the present invention is that a plurality of clean rooms are separated and each of the clean rooms is filled with a purification material, and The cylinder body is formed with an air inlet and an air outlet, and an air flow passage connecting the air inlet, each of the clean room and the air outlet π is formed inside the cylinder; thereby, the gas to be purified is introduced from the air inlet Further, the purification is completed by filling in different clean rooms::: material, and the purified gas is exported by the gas outlet. - in the middle of the cylinder - the horizontally disposed first - perforated plate is separated from the first - vertical partition of the top of the first clearing chamber, and the second laterally disposed second outer plate and the second in the ground The vertical partition partitions the second clean room, and the first vertical partition and the second vertical partition separate the passage between the bottom side of the first clean room and the top side of the second clean room, and the The shape of the gas port 2 is opposite to the top side of the first purification chamber, and the position of the gas outlet π is formed on the bottom side of the second chamber: and the inside of the cylinder is formed to communicate with the π: the clean room top The side, the bottom side of the first purifying chamber, the air flow of the channel = the top side 'the bottom side of the second clean room and the filling cylinder of the air outlet are circular ° x, and each of the purifying chambers is filled or graded - A porous purification material filled with unintentional properties. 3. The porous purification material filled in the chemical conversion chamber is activated carbon, active oxidized, oxidized or post-filled in the second purification chamber, and the porous purification material is =, active oxidized, carbon nanotube, porous Sex tree month _ stone. Quality = body bottom two? = disputes are each set with regenerant _, and at the bottom of the cylinder U there is a discharge of regenerant. In addition, the door is filled with liquid money (4) raw liquid circulation unit, each of the regeneration liquid circulation 2 1379061 1〃1 year Θ ετ each set the suction end of a circulation tube at the bottom of the cylinder, the discharge end of each circulation tube Then, the regenerating liquid sprayer is connected to each of the circulation pipes, and a circulation pump is disposed in each of the circulation pipes, and the regeneration liquid container is connected to the low pressure section of each of the circulation pipes by a supply pipe. Further, the porous purification material of each of the clean rooms is filled with a highly elastic application, preferably 30 to 60 cm. [Embodiment] First, referring to the first figure, an embodiment of the present invention is

The horizontally disposed cylindrical body 30 is internally separated from the first vertical plate 37a and the first vertical partition 34a disposed above the first clean room 31, and the second porous plate 37b is disposed laterally. The second vertical partition plate _ is disposed to separate the second clean room 32, and the (four) clean room 3b is filled with the purification material 40a, _, and the second vertical partition 34a and the second vertical partition Separating the passage chamber 33 connecting the bottom side of the first clean room 31 and the top side of the second clean room 31, and forming a position of the intake air σ 35 corresponding to the top side of the first clean room 31, - the formation position (4) of the outgassing σ3β is on the bottom side of the second clean room 32, and further, the inside of the cylindrical body 3Q is formed to communicate with the inlet

The air port 35, the top side of the first clean room 31, the bottom side of the first clean room 31, the top side of the first clean room 32, the bottom side of the second clean room 32, and the air flow of the air outlet 36 The channel is to be cleaned and guided by the air inlet 35, and then the purification material filled with the different clean room is used to clean the continuity, and the purified gas is led out by the outlet gas. In addition, each of the "Hai clean room (the first clean room 31 and the second clean room) are filled with different purification properties of the porous purification material, injury, or different purification properties of the porous purification material Yang, 40b grade (graded configuration) fills 1370906 to replace the page charge, to purify different contaminants, and the filling height is _< more preferably 30 to 60 cm; wherein, the first clean room μ is filled with the purification material 40a It can be used for purifying the suspended particles in the gas to be purified for activated carbon, activated alumina, ceramic I or boiling; and the porous purification material 4〇b filled in the second clean room 32 can be modified &gt And / activated carbon, activated alumina, carbon nanotubes, porous resin or zeolite, and can be used to purify the acid gas in the gas to be purified.

Further, the step-purifying chamber 31 is provided with a regenerating liquid sprinkler 5〇a, and the porous purifying material filled in the first purifying chamber 31 is sprayed with water (better of hot water), 俾The porous purification material 4〇a is washed and regenerated, and further, the second purification chamber 32 is provided with a regenerant liquid sprayer 5〇b, and the porous purification material filled in the second clean room 32 is used. Spraying the water or the test solution (for example, KOH, NaOH, KMn〇4 or CnS〇4 or any combination thereof), the porous purification material 40b is modified and regenerated. However, since the barrel 3() is circular and the bottom is provided with a drain port 123, the bottom of the barrel 30 is allowed to accumulate the sprayed regeneration liquid and is easily drained by the drain port 123.

Further, the regenerant circulating units 6a and 60b are further connected to the regenerant liquid sprayers 5a and 5b, and each of the regenerant circulating units 6a and 6bb has a circulation pipe 61a. The suction end of 61b is disposed at the bottom of the cylinder 3, and the discharge ends of the circulation pipes 61a, 61b are connected with the regenerant liquid sprayers 5a, 5B, and in each of the circulation pipes 61a, 61b The circulation pumps 62a, 62b' are provided and the regeneration liquid containers 63a, 63b are connected to the low pressure sections of the respective circulation pipes 61a, 61b by the supply pipes 64a, 64b. Based on the configuration, the present invention separates a plurality of clean rooms (the first clean room 31 and the second clean room 32) inside a cylinder 3, and is purified to be filled with the purification material 4〇a in each of the 1370906 And the galax, and the inlet 3 and the air outlet 36' are formed in the cylinder 3, and the clean room (the first clean room 31 and the second air inlet 35) are connected to the inside of the cylinder body. The second clean room is arbitrarily and the air flow passage of D 36 is taken out; thereby, the gas to be purified is introduced into the inlet port 35, and the purification material 4〇a and 填充 filled in the different clean rooms are continuously f Purification of the raw, and the purified gas is exported by the gas σ.

Therefore, the present invention utilizes a single structure to continuously perform the purification process of the gas to be purified (the conventional method must be the same as the purification process in which the two structures are connected in series and can be continuously fed twice); The function of the small volume of the device is ''', the regenerating liquid sprayer 5〇a, 5〇b and the regenerant circulation unit 6〇a, 6〇b are arranged, so that the porous purification material 4〇a, 4 Direct regeneration on the line (without stopping to take out regeneration) has the effect of improving the purification efficiency by using online regeneration; however, the flow direction of the airflow through each of the clean rooms 3 is the same as that of the regeneration liquid (both down) ), and the process of on-line regeneration (spray regenerant) can be carried out with a lower pressure loss. In summary, the technical means disclosed in the present invention have the invention patents such as "novelty", "progressiveness" and "available for industrial use", and pray for the patent to be granted by the bureau. German sense. However, the drawings and descriptions disclosed above are only preferred embodiments of the present invention. Those skilled in the art who are familiar with the art, the modifications or equivalent changes made in accordance with the spirit of the present case shall still be included in the scope of patent application in this case. Inside. 〆 1379061 _ January 1st revised replacement page [Simplified description of the drawings] The first figure is a structural explanatory diagram of an embodiment of the present invention. [Main component symbol description] 30 cylinder 31 first clean room 32 second clean room 33 passage room _ 34a first vertical partition

34b second vertical partition 35 air inlet 36 air outlet 37a first porous plate 37b second porous plate 123 drain port 40a, 40b porous purification material 50a, 50b regeneration liquid sprayer 60a, 60b regeneration liquid circulation unit 61a, 61b circulation pipes 62a, 62b circulation pumps 63a, 63b regeneration liquid containers 64a, 64b supply pipes 9·

Claims (1)

U/9061 七|l0丨年月>35 correction replacement page application patent scope: ~~-~-1. An air purification device 'separates a complex number inside the cylinder and turns it into a chemical chamber' Filled with a net (four) and in the cylinder-shaped air inlet and outlet, and an air flow passage connecting the air inlet and the second clean room and the air outlet is formed inside the cylinder; The first porous plate is disposed to be separated from the first cleaning chamber by the first vertical partition, and the second porous plate disposed laterally is separated from the first (four) plate disposed in the vertical to separate the second clean room The first longitudinal partition and the second vertical partition are separated from the bottom side of the first clean room and the second clean, top, and the passage chamber', and the position of the air inlet is corresponding to the first The formation position of the first to the fifth side air outlet corresponds to the bottom of the second clean room, and further, the inner side of the cylinder is formed to communicate with the air inlet, the first purification to the top side, and the first clean room bottom. a side, the passage chamber, the second clean room top 5 / advancing to the bottom side and the air flow passage of the air outlet; This, to be introduced from the gas port ^ β Hai intake, and further with a filler material different from the purge chamber to the purification of the continuity of the purification, the rear by the purge gas outlet out of those guide. 2. The air purifying device of claim 2, wherein the cylinder is circular in the basin. (3) The air purifying device of claim 2, wherein each of the air purifying devices. The purifying chambers are each filled or gradated with a multi-porous purification material filled with different purification properties. -10· 丄J/yuu丄1«^年〇月修修页 I 4 . Fill in the first clean room in the air net ^^"^一一1 described in the third paragraph of the patent scope = set = = r: - a net =: stone breaking, active oxidation, nano tube breaking, porous tree 5, such as the air purifying device described in Item 4 of the patent scope, Each of the four clean rooms is provided with a regenerating liquid spray M., and a bottom portion of the regenerated liquid is disposed at the bottom of the (four). [6] The air purifying device according to claim 5, wherein the step of the recirculating liquid is connected to each of the regenerating liquids, and the recirculating unit of each of the regenerating liquid circulating units is provided with a suction end of a circulating tube. The discharge end of each of the circulation pipes is connected to each of the regeneration liquid sprayers, and a circulation pump is disposed in each of the circulation pipes, and the regeneration liquid container is connected to each of the circulation pipes by a supply pipe. Low pressure section. 7. The air purifying device according to claim 6, wherein the porous purification material of each of the cleaning chambers has a filling height of 30 to 60 cm. -11 -