1378135 101年.05月咗日修正替換頁 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明涉及一種導電膠帶及其製造方法。 【先前技術】 [0002] 在進行掃描電鏡（SEM)和X —射線能譜（EDS)分析時， 人們常常需要用一種導電且具有粘性的物體來固定所要 觀測的樣品。目前，使用非常廣泛的係碳導電膠帶 (Carbon Conductive Tape, CCT)，其中的破為無定 形碳。 [0003] 惟上述碳導電膠帶存在二方面的缺點：其一，電阻非常 大，一般都在約700KQ/cin的級別；其二，成本比較高（ 通常，一卷8mmx20m的碳導電膠帶的售價約為300元人民 幣）。 .1378135 101.05. The following is a revised replacement page. 6. Description of the Invention: [Technical Field of the Invention] [0001] The present invention relates to a conductive tape and a method of manufacturing the same. [Prior Art] [0002] In scanning electron microscopy (SEM) and X-ray energy spectroscopy (EDS) analysis, it is often necessary to use an electrically conductive and viscous object to fix the sample to be observed. Currently, a very wide range of Carbon Conductive Tape (CCT) is used, which breaks into amorphous carbon. [0003] However, the above-mentioned carbon conductive tape has two disadvantages: first, the resistance is very large, generally at the level of about 700KQ/cin; second, the cost is relatively high (usually, the price of a roll of 8mm x 20m carbon conductive tape) It is about 300 yuan). .
[0004] 而作為新型碳材料的奈米碳管（Carbon Nanotube， CNT)，係由日本研究人員Ii jima於1991年發現，請參見 "Helical Microtubules of Graphitic Carbon", S Iijima，Nature, vol.354，p56 ( 1 991 ))。奈米 碳管係已知最好之導電材料之一，其沿軸向的導電性表 現為金屬導電性。 【發明内容】 [0005] 有鑒於此，有必要提供一種含奈米碳管的導電膠帶及其 製造方法。 [0006] —種導電膠帶，其包括膠粘層及多個奈米碳管。該多個 奈米碳管相互平行地穿設於上述膠粘層中且垂直於該膠 09612469^^^^* A0101 第3頁/共13頁 1013165688-0 1378135 __ 101年05月02日按正替换頁 粘層兩側表面，該多個奈米碳管的兩端從該膠粘層兩側 露頭。 [0007] 一種導電膠帶的製造方法，其包括以下步驟：（1 ) 製 備膠粘劑及奈米碳管；（2) 使該膠粘劑包覆該奈米碳 管；及（3) 使該奈米碳管從膠粘劑的兩端露頭而形成 導電膠帶。 [0008] 所述的導電膠帶，其中奈米碳管穿設於該膠粘層中，奈 米碳管的導電性要優於無定形碳的導電性，故含奈米碳 管的導電膠帶的電阻低；製備導電膠帶時，如要達到同 € 樣的導電性，那麼奈米碳管的用量會更少，因此導電膠 帶的成本低。 [0009] 所述的導電膠帶的製造方法，藉由將奈米碳管穿設於膠 粘劑中，製備方法簡單且成本低。 【實施方式】 [0010] 下面將結合附圖對本發明實施例作進一步的詳細說明。 [0011] 請參閱圖1，本發明實施例提供一種導電膠帶10，其包括 _ 膠粘層102及多個奈米碳管104。該多個奈米碳管104相 互平行地穿設於上述膠粘層102中且垂直於該膠粘層102 兩側表面，該多個奈米碳管104的兩端從該膠粘層102兩 側露頭^ [0012] 該多個奈米碳管104形成奈米碳管陣列，該奈米碳管陣列 可選自多壁奈米碳管陣列、單壁奈米碳管陣列或兩者的 混合物◊奈米碳管陣列104可藉由化學氣相沈積法、電弧 放電法或鐳射蒸發法等先前方法製備，優選地，該奈米 0961246#單编號 Α〇101 第4頁/共13頁 1013165688-0 1378135 101年.05月0>日梭正替換頁 碳管陣列104係超順排奈米碳管陣列，該膠粘層102為壓 敏膠钻層。 [0013] 請參閱圖2，本發明實施例提供一種導電膠帶的製造方法 ，該製造方法包括以下步驟： [0014] (100) 製備膠粘劑及多個奈米碳管； [0015] ( 200 ) 使膠粘劑包覆該多個奈米碳管；及 [0016] (300 ) 使該多個奈米碳管從膠粘劑的兩端露頭。 Φ [0017] 本實施例中，該多個奈米碳管形成奈米碳管陣列。 [0018] 在步驟（100)中，製備膠粘劑的方法包括：將丙烯酸丁 酯、丙烯酸-2-乙基已酯、醋酸乙烯、曱基丙烯酸縮水甘 油酯、丙烯酸、過氧化苯曱醢、曱苯及醋酸乙酯混合均 勻分散後得到該膠粘劑。上述各種物質的品質份數分別 為：112. 5份的丙烯酸丁酯、116. 5份的丙烯酸-2-乙基 已酯、12. 5份的醋酸乙烯、1. 25份的曱基丙烯酸縮水甘 • 油酯、7. 5份的丙烯酸、0. 5份的過氧化苯甲醯、87. 5份 的甲苯及162.5份的醋酸乙酯，其分散可藉由細胞破碎機 及超聲清洗機實現。該膠粘劑具有較高的内聚力和膠接 強度，適用於製備膠粘帶、自粘標籤及雙面膠帶等。當 該膠粘劑用於雙面膠帶時，其膠接強度可達5. 6N/cni。當 然，上述各種物質的品質份數可依實際需要而作相應變 更，而不必具體以本實施例為限。 [0019] 優選地，該奈米碳管陣列為超順排奈米碳管陣列。本實 施例中，超順排奈米碳管陣列的製備方法採用化學氣相 第5頁/共13頁 09612469产單賊 A〇101 1013165688-0 1378135 101年05月0之日按正替換頁 沈積法，其具體步驟包括··（lb)提供一平整基底，本 實施例優選為採用4英寸的矽基底；（2b)在矽基底表面 均勻形成一催化劑層，該催化劑層材料可選用鐵（Fe) 、钻（Co)、鎳（Ni)或其任意組合的合金之一；（3b )將上述形成有催化劑層的基底在700〜900eC的空氣中退 火約30分鐘~90分鐘；（4b)將處理過的基底置於反應爐 中，在保護氣體環境下加熱到500〜74(TC，然後通入碳源 氣體反應約5~30分鐘，生長得到超順排奈米碳管陣列， 其高度為200〜400微米。當然，還可以根據實際需要改變 | 奈米碳管陣列製備方法中的各種參數而對應得到各種高 度的超順排奈米碳管陣列。 [0020] 該超順排奈米碳管陣列為多個彼此平行且垂直於基底生 長的奈米碳管形成的純奈米碳管陣列。藉由上述控制生 長條件，該超順排奈米碳管陣列中基本不含有雜質，如 無定型碳或殘留的催化劑金屬顆粒等。該奈米碳管陣列 中的奈米碳管彼此藉由凡德瓦爾力緊密接觸形成陣列。 上述的碳源氣可選用乙炔等化學性質較活潑的碳氫化合 · 物’保護氣體可選用氮氣、氨氣或惰性氣體。 [0021] 當然’奈米碳管陣列還可選自其他陣列，這些陣列的製 備方法包括化學氣相沈積法、電弧放電法或鐳射蒸發法 等先前製備方法。 [0022]在步驟（ 200 )中，所述的包覆奈米碳管陣列的步驟包括 :(100a)將帶有奈米碳管陣列的矽基底倒扣在一個容 該容器的深度大 將膠粘劑傾倒入容 1013165688-0 器内，奈米碳管陣列向下位於容器内 於奈米碳管陣列的高度；及（ 200a) 09612469#單編號A0101 第6頁/共13頁 1378.135 101年.05月02日核正替換頁 器内並填滿容器。 [0023] 在步驟（100a)中，容器的深度沒有特別要求，只要比 在步驟（100)中製備的奈米碳管陣列的高度大即可，容 器可以選擇為玻璃容器或鐵質容器等。 [0024] 在步驟（ 300 )中，所述的使奈米碳管陣列從膠粘劑的兩 端露頭的方法包括以下步驟：（100b) 待膠粘劑凝固後 將膠粘劑從容器内取出；（ 200b) 分別將矽基底及相對 於矽基底的膠粘劑端固定；及（ 300b) 利用多個平行的 • 刀片沿垂直於奈米碳管陣列生長的方向對包覆有奈米碳 管陣列的膠粘劑進行切割得到多片包覆有奈米碳管陣列 的膠粘劑，每片膠粘劑即為導電膠帶。 [0025] 在步驟（1 0 Ob )中，膠粘劑的凝固可採用自然凝固或人 工凝固等方法。人工凝固的方法包括風乾、熱乾或兩者 相結合。 [0026] 在步驟（ 200b)中，可藉由夾具或粘膠將矽基底固定於 固定平臺上，而相對於矽基底的膠粘劑端可利用其自身 的粘性將其固定在如厚紙板等物體上。優選的，該固定 平臺與該厚紙板係相互平行的。 [0027] 在步驟（ 30 0b)中，相鄰兩個刀片間的距離即為每片導 電膠帶的厚度。 [0028] 可以理解，在由刀片切割形成的膠粘劑的切面中，奈米 碳管陣列中的奈米碳管的兩端係暴露於空氣中。 [0029] 另外，在步驟（ 300 )中，所述的另一種使奈米碳管陣列 09612469^A〇101 第7頁/共13頁 1013165688-0 1378135 l101^05月 從膠粘劑的兩端露頭的方法包括以下步驟：將膠點層;^^^ 容器内取出及將矽基底移除，以電漿蝕刻該膠粘劑使奈 米碳管陣列沿其生長方向的兩側從膠粘劑的兩端露頭。 在電漿蝕刻中，奈米碳管陣列的蝕刻速度比膠粘劑的聚 合體蝕刻速度慢，故可使奈米碳管從膠粘劑中露頭。優 選的，該電漿係氧離子電漿。 [0030] 可以理解，膠粘劑形成的係本發明實施例的導電膠帶1〇 的膠粘層102 » [0031] 本發明實施例所提供的導電膠帶1〇，其奈米碳管陣列穿 設於該膠粘層中，奈米碳管的導電性要優於無定形碳的 導電性，故含奈米碳管陣列的導電膠帶的電阻低；製備 導電膠帶10時，如要達到同樣的導電性，那嚒奈米碳管 陣列的用量會更少，因此導電膠帶10的成本低；使用本 發明實施例提供的膠粘劑，可使導電膠帶的粘性好。 [0〇32] 综上所述，本1發明確已符合發明專利之要件，爰依法提 出專利申請。惟’以上所述者僅為本發明之較佳實施方 式，本發明之範圍並不以上述實施方式為限，舉凡熟習 本案技藝之人士援依本發明之精神所作之等效修飾或變 化，皆應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 [0033] 圖1為本發明實施例提供的一種導電膠帶的截面示意圖。 [0034] 圖2為本發明實施例提供的一種導電膠帶的製造流程圖。 【主要元件符號說明】 [0035] 導電膠帶：10 09612469# 單编號1 A0101 第8頁/共13頁 1013165688-0 1378135 101年.05月0乏日梭正§^頁 [00361 膠粘層：102 [0037] 奈米碳管：104[0004] Carbon nanotubes (CNTs), which are new carbon materials, were discovered by Japanese researcher Ii jima in 1991, see "Helical Microtubules of Graphitic Carbon", S Iijima, Nature, vol. 354, p56 (1 991 )). Nano Carbon tube is one of the best known conductive materials, and its electrical conductivity in the axial direction is metallic. SUMMARY OF THE INVENTION [0005] In view of the above, it is necessary to provide a conductive tape containing a carbon nanotube and a method of manufacturing the same. [0006] A conductive tape comprising an adhesive layer and a plurality of carbon nanotubes. The plurality of carbon nanotubes are disposed in parallel with each other in the adhesive layer and perpendicular to the glue 09612469^^^^* A0101 Page 3 / Total 13 Page 1013165688-0 1378135 __ 101 May 02 Press The two sides of the adhesive layer are replaced, and both ends of the plurality of carbon nanotubes are exposed from both sides of the adhesive layer. [0007] A method of manufacturing a conductive tape, comprising the steps of: (1) preparing an adhesive and a carbon nanotube; (2) coating the carbon nanotube with the adhesive; and (3) making the carbon nanotube A conductive tape is formed from the ends of the adhesive. [0008] The conductive tape, wherein a carbon nanotube is disposed in the adhesive layer, the conductivity of the carbon nanotube is better than the conductivity of the amorphous carbon, so the conductive tape containing the carbon nanotube The resistance is low; when the conductive tape is prepared, if the conductivity is the same, the amount of the carbon nanotubes is less, so the cost of the conductive tape is low. [0009] The method for producing a conductive tape is characterized in that the preparation method is simple and low in cost by inserting a carbon nanotube into an adhesive. [Embodiment] [0010] Hereinafter, embodiments of the present invention will be further described in detail with reference to the accompanying drawings. [0011] Referring to FIG. 1, an embodiment of the present invention provides a conductive tape 10 including an adhesive layer 102 and a plurality of carbon nanotubes 104. The plurality of carbon nanotubes 104 are disposed in parallel with each other in the adhesive layer 102 and perpendicular to both sides of the adhesive layer 102. The two ends of the plurality of carbon nanotubes 104 are separated from the adhesive layer 102. Side outcrop ^ [0012] The plurality of carbon nanotubes 104 form an array of carbon nanotubes, which may be selected from a multi-walled carbon nanotube array, a single-walled carbon nanotube array, or a mixture of the two The carbon nanotube array 104 can be prepared by a prior method such as chemical vapor deposition, arc discharge or laser evaporation. Preferably, the nanometer 0961246# single number Α〇101 4th page/total 13 page 1013165688 -0 1378135 101.05 month 0> Risuo is replacing the carbon nanotube array 104 series super-sequential carbon nanotube array, and the adhesive layer 102 is a pressure-sensitive adhesive layer. [0013] Please refer to FIG. 2, an embodiment of the present invention provides a method for manufacturing a conductive tape, the manufacturing method comprising the following steps: [0014] (100) preparing an adhesive and a plurality of carbon nanotubes; [0015] (200) The adhesive coats the plurality of carbon nanotubes; and [0016] (300) causes the plurality of carbon nanotubes to emerge from both ends of the adhesive. [0017] In this embodiment, the plurality of carbon nanotubes form an array of carbon nanotubes. [0018] In the step (100), the method for preparing the adhesive comprises: butyl acrylate, 2-ethylhexyl acrylate, vinyl acetate, glycidyl methacrylate, acrylic acid, benzoquinone benzoate, fluorene benzene The adhesive is obtained by uniformly mixing and dispersing ethyl acetate. The parts of the above-mentioned various substances are respectively: 11. 5 parts of butyl acrylate, 116.5 parts of 2-ethylhexyl acrylate, 12.5 parts of vinyl acetate, 1.25 parts of methacrylic acid shrinkage甘••················ . The adhesive has high cohesion and bonding strength and is suitable for the preparation of adhesive tapes, self-adhesive labels and double-sided tapes. 6N/cni。 When the adhesive is used for the double-sided tape, the bonding strength can reach 5. 6N / cni. Of course, the number of parts of the above various substances can be changed according to actual needs, and it is not necessary to specifically limit the present embodiment. [0019] Preferably, the carbon nanotube array is a super-sequential carbon nanotube array. In this embodiment, the preparation method of the super-sequential carbon nanotube array adopts the chemical vapor phase page 5 / 13 pages 09612469 single thief A 〇 101 1013165688-0 1378135 101 days on the 0th day according to the positive replacement page deposition The specific steps of the method include: (lb) providing a flat substrate, the embodiment preferably adopts a 4-inch germanium substrate; (2b) uniformly forming a catalyst layer on the surface of the germanium substrate, and the catalyst layer material may be iron (Fe) (3b) annealing the substrate on which the catalyst layer is formed in air at 700 to 900 eC for about 30 minutes to 90 minutes; (4b) The treated substrate is placed in a reaction furnace and heated to 500 to 74 (TC in a protective gas atmosphere, and then reacted with a carbon source gas for about 5 to 30 minutes to grow a super-aligned carbon nanotube array, the height of which is 200~400 microns. Of course, it is also possible to change various parameters in the preparation method of the carbon nanotube array according to actual needs to obtain arrays of super-sequential carbon nanotubes of various heights. [0020] The super-sequential nanocarbon The tube array is a plurality of parallel to each other and perpendicular to the substrate The array of pure carbon nanotubes formed by the growing carbon nanotubes. The super-sequential carbon nanotube array is substantially free of impurities such as amorphous carbon or residual catalyst metal particles, etc. by controlling the growth conditions described above. The carbon nanotubes in the carbon nanotube array are in close contact with each other by van der Waals force to form an array. The above carbon source gas may be selected from acetylene and other chemically active hydrocarbons. The protective gas may be nitrogen or ammonia. Gas or inert gas. [0021] Of course, the carbon nanotube array may also be selected from other arrays, and the preparation methods of these arrays include previous preparation methods such as chemical vapor deposition, arc discharge, or laser evaporation. In the step (200), the step of coating the carbon nanotube array comprises: (100a) inverting the crucible substrate with the carbon nanotube array in a depth of the container to pour the adhesive into the 1013165688 In the -0 device, the carbon nanotube array is located down to the height of the carbon nanotube array in the container; and (200a) 09612469#单号A0101 Page 6 of 13 Page 1318.135 101.05.02 Replace the pager Filling the container. [0023] In the step (100a), the depth of the container is not particularly required as long as the height of the carbon nanotube array prepared in the step (100) is large, and the container may be selected as a glass container or iron. a container or the like. [0024] In the step (300), the method for exposing the carbon nanotube array from both ends of the adhesive comprises the following steps: (100b) removing the adhesive from the container after the adhesive is solidified; 200b) respectively fixing the base of the crucible and the adhesive end relative to the crucible base; and (300b) using a plurality of parallel blades to adjoin the adhesive coated with the carbon nanotube array in a direction perpendicular to the growth of the carbon nanotube array A plurality of adhesives coated with a carbon nanotube array are obtained by cutting, and each adhesive is a conductive tape. [0025] In the step (10 Ob ), the solidification of the adhesive may be carried out by natural solidification or artificial solidification. Methods of artificial coagulation include air drying, heat drying, or a combination of both. [0026] In the step (200b), the crucible base can be fixed to the fixed platform by a clamp or an adhesive, and the adhesive end of the crucible base can be fixed to an object such as a cardboard by its own adhesiveness. . Preferably, the fixed platform and the thick cardboard are parallel to each other. [0027] In the step (30 0b), the distance between adjacent two blades is the thickness of each piece of conductive tape. [0028] It will be appreciated that in the section of the adhesive formed by the cutting of the blade, the ends of the carbon nanotubes in the array of carbon nanotubes are exposed to the air. [0029] In addition, in the step (300), the other type of carbon nanotube array 09612469 ^ A 〇 101 page 7 / 13 pages 1013165688-0 1378135 l101 ^ 05 months from the ends of the adhesive outcrop The method comprises the steps of: removing the glue layer; removing the inside of the container and removing the substrate, and plasma etching the adhesive so that the carbon nanotube array is exposed from both ends of the adhesive along both sides of the growth direction. In plasma etching, the etching speed of the carbon nanotube array is slower than that of the adhesive, so that the carbon nanotubes can be made out of the adhesive. Preferably, the plasma is an oxygen ion plasma. [0030] It can be understood that the adhesive layer 102 of the conductive tape of the embodiment of the present invention is formed by the adhesive. [0031] The conductive tape 1〇 provided by the embodiment of the present invention has a carbon nanotube array disposed thereon. In the adhesive layer, the conductivity of the carbon nanotubes is better than that of the amorphous carbon, so the electrical resistance of the conductive tape containing the carbon nanotube array is low; when the conductive tape 10 is prepared, if the same conductivity is to be achieved, The carbon nanotube array is used in a smaller amount, so that the cost of the conductive tape 10 is low; the adhesive provided by the embodiment of the present invention can make the conductive tape have good adhesion. [0〇32] In summary, the present invention has indeed met the requirements of the invention patent, and the patent application is filed according to law. However, the above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited to the above-described embodiments, and those skilled in the art will be able to make equivalent modifications or variations in accordance with the spirit of the present invention. It should be covered by the following patent application. BRIEF DESCRIPTION OF THE DRAWINGS [0033] FIG. 1 is a schematic cross-sectional view of a conductive tape according to an embodiment of the present invention. 2 is a flow chart of manufacturing a conductive tape according to an embodiment of the present invention. [Main component symbol description] [0035] Conductive tape: 10 09612469# Single number 1 A0101 Page 8 / Total 13 pages 1013165688-0 1378135 101 years. 05 months 0 days of the day is § ^ page [00361 Adhesive layer: 102 [0037] Nano carbon tube: 104
09612469#單職 A〇101 第9頁/共13頁 1013165688-009612469#单职 A〇101 Page 9 of 13 1013165688-0