TWI371826B - Photoresist coating method and applications thereof - Google Patents

Photoresist coating method and applications thereof

Info

Publication number
TWI371826B
TWI371826B TW097139768A TW97139768A TWI371826B TW I371826 B TWI371826 B TW I371826B TW 097139768 A TW097139768 A TW 097139768A TW 97139768 A TW97139768 A TW 97139768A TW I371826 B TWI371826 B TW I371826B
Authority
TW
Taiwan
Prior art keywords
applications
coating method
photoresist coating
photoresist
coating
Prior art date
Application number
TW097139768A
Other languages
Chinese (zh)
Other versions
TW201017818A (en
Inventor
Cheyi Chen
Chunwen Kuo
Original Assignee
Advanced Wireless Semiconductor Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Wireless Semiconductor Company filed Critical Advanced Wireless Semiconductor Company
Priority to TW097139768A priority Critical patent/TWI371826B/en
Publication of TW201017818A publication Critical patent/TW201017818A/en
Application granted granted Critical
Publication of TWI371826B publication Critical patent/TWI371826B/en

Links

TW097139768A 2008-10-16 2008-10-16 Photoresist coating method and applications thereof TWI371826B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097139768A TWI371826B (en) 2008-10-16 2008-10-16 Photoresist coating method and applications thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097139768A TWI371826B (en) 2008-10-16 2008-10-16 Photoresist coating method and applications thereof

Publications (2)

Publication Number Publication Date
TW201017818A TW201017818A (en) 2010-05-01
TWI371826B true TWI371826B (en) 2012-09-01

Family

ID=44830981

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097139768A TWI371826B (en) 2008-10-16 2008-10-16 Photoresist coating method and applications thereof

Country Status (1)

Country Link
TW (1) TWI371826B (en)

Also Published As

Publication number Publication date
TW201017818A (en) 2010-05-01

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