TWI370103B - Structure and method for manufacturing mems - Google Patents

Structure and method for manufacturing mems

Info

Publication number
TWI370103B
TWI370103B TW098127915A TW98127915A TWI370103B TW I370103 B TWI370103 B TW I370103B TW 098127915 A TW098127915 A TW 098127915A TW 98127915 A TW98127915 A TW 98127915A TW I370103 B TWI370103 B TW I370103B
Authority
TW
Taiwan
Prior art keywords
manufacturing mems
mems
manufacturing
Prior art date
Application number
TW098127915A
Other languages
Chinese (zh)
Other versions
TW201107228A (en
Inventor
Yihsiang Chiu
Liken Yeh
Chengyen Liu
Siewseong Tan
Original Assignee
Memsmart Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memsmart Semiconductor Corp filed Critical Memsmart Semiconductor Corp
Priority to TW098127915A priority Critical patent/TWI370103B/en
Publication of TW201107228A publication Critical patent/TW201107228A/en
Application granted granted Critical
Publication of TWI370103B publication Critical patent/TWI370103B/en

Links

TW098127915A 2009-08-19 2009-08-19 Structure and method for manufacturing mems TWI370103B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW098127915A TWI370103B (en) 2009-08-19 2009-08-19 Structure and method for manufacturing mems

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW098127915A TWI370103B (en) 2009-08-19 2009-08-19 Structure and method for manufacturing mems

Publications (2)

Publication Number Publication Date
TW201107228A TW201107228A (en) 2011-03-01
TWI370103B true TWI370103B (en) 2012-08-11

Family

ID=44835215

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098127915A TWI370103B (en) 2009-08-19 2009-08-19 Structure and method for manufacturing mems

Country Status (1)

Country Link
TW (1) TWI370103B (en)

Also Published As

Publication number Publication date
TW201107228A (en) 2011-03-01

Similar Documents

Publication Publication Date Title
EP2498513A4 (en) Mems microphone and method for manufacturing same
EP2398629A4 (en) Methods for fabricating microstructures
EP2518871A4 (en) Rotor and rotor manufacturing method
EP2426237A4 (en) Mold and manufacturing method therefor
EP2468531A4 (en) Tire and tire manufacturing method
GB0905140D0 (en) Method
EP2399759A4 (en) Tire and tire manufacturing method
EP2412431A4 (en) Dispersion and manufacturing method therefor
EP2603975A4 (en) Micromechanical resonator array and method for manufacturing thereof
EP2506431A4 (en) Piezoelectric device and method for manufacturing piezoelectric device
GB0902476D0 (en) Method
EP2399760A4 (en) Tire and tire manufacturing method
EP2603976A4 (en) Micromechanical resonator and method for manufacturing thereof
GB2482635B (en) Flow-actuated actuator and method
EP2489471A4 (en) Stringer manufacturing method
EP2497626A4 (en) Cylindrical structure and method for manufacturing same
EP2468489A4 (en) Tire manufacturing method and tire
EP2484504A4 (en) Honeycomb structure and method for manufacturing same
EP2487777A4 (en) Rotor and method for manufacturing same
GB0901444D0 (en) Method
HRP20130525T1 (en) Method and device for producing construction elements
EP2484461A4 (en) Bent member and method for manufacturing same
EP2457449A4 (en) Multiple-region candy and manufacturing method therefor
GB0905367D0 (en) Method
GB0903316D0 (en) Method

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees