TWI368629B - Apparatus and method for manufacturing polymer film - Google Patents

Apparatus and method for manufacturing polymer film

Info

Publication number
TWI368629B
TWI368629B TW096118583A TW96118583A TWI368629B TW I368629 B TWI368629 B TW I368629B TW 096118583 A TW096118583 A TW 096118583A TW 96118583 A TW96118583 A TW 96118583A TW I368629 B TWI368629 B TW I368629B
Authority
TW
Taiwan
Prior art keywords
polymer film
manufacturing polymer
manufacturing
film
polymer
Prior art date
Application number
TW096118583A
Other languages
Chinese (zh)
Other versions
TW200846396A (en
Inventor
Derjen Sun
Wenchun Lee
Minghsiang Chen
Yen Huey Hsu
Shi Deh Chao
Yafen Tsai
Original Assignee
Mortech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mortech Corp filed Critical Mortech Corp
Priority to TW096118583A priority Critical patent/TWI368629B/en
Publication of TW200846396A publication Critical patent/TW200846396A/en
Application granted granted Critical
Publication of TWI368629B publication Critical patent/TWI368629B/en

Links

TW096118583A 2007-05-24 2007-05-24 Apparatus and method for manufacturing polymer film TWI368629B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096118583A TWI368629B (en) 2007-05-24 2007-05-24 Apparatus and method for manufacturing polymer film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096118583A TWI368629B (en) 2007-05-24 2007-05-24 Apparatus and method for manufacturing polymer film

Publications (2)

Publication Number Publication Date
TW200846396A TW200846396A (en) 2008-12-01
TWI368629B true TWI368629B (en) 2012-07-21

Family

ID=44823149

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096118583A TWI368629B (en) 2007-05-24 2007-05-24 Apparatus and method for manufacturing polymer film

Country Status (1)

Country Link
TW (1) TWI368629B (en)

Also Published As

Publication number Publication date
TW200846396A (en) 2008-12-01

Similar Documents

Publication Publication Date Title
HK1222716A1 (en) Exposure apparatus, exposure method and device manufacturing method
EP2155493A4 (en) Method and apparatus for depositing films
HK1169861A1 (en) Exposure apparatus, exposure method and device manufacturing method
HK1136878A1 (en) Exposure apparatus, exposure method, and device manufacturing method
EP2818928B8 (en) Exposure method, exposure apparatus, and device manufacturing method
HK1181124A1 (en) Exposure apparatus, exposure method, and device manufacturing method
HK1135510A1 (en) Method for manufacturing polymeric piezoelectric film and polymeric piezoelectric film
TWI367130B (en) Film coating apparatus and film coating method
HK1150888A1 (en) Exposure apparatus, exposure method, and device manufacturing method
HK1142565A1 (en) Reformer apparatus and method
HK1137077A1 (en) Exposure apparatus, exposure method and device manufacturing method
EP2120510A4 (en) Display device, apparatus for manufacturing display device, and method for manufacturing display device
EP2140889A4 (en) Haemodialfiltration method and apparatus
HK1144447A1 (en) Film forming apparatus and film forming method
EP2269818A4 (en) Cured film and method for production thereof
EP2099062A4 (en) Film deposition apparatus and film deposition method
EP2110221A4 (en) Apparatus and method for manufacturing laminate
EP2124037A4 (en) Method and apparatus for evaluating film quality and thin film device manufacturing system
EP2357036A4 (en) Method and apparatus for manufacturing polymer particle
EP2119806A4 (en) Multilayer film forming method and multilayer film forming apparatus
EP2101345A4 (en) Film deposition apparatus and film deposition method
EP2255891A4 (en) Coat film forming method and coat film forming apparatus
HK1144590A1 (en) Sputtering apparatus and film forming method
PL2117838T3 (en) Film and method for producing said film
EP2067875A4 (en) Method of forming film and film forming apparatus