TWI368275B - Dry etching process - Google Patents

Dry etching process

Info

Publication number
TWI368275B
TWI368275B TW096136907A TW96136907A TWI368275B TW I368275 B TWI368275 B TW I368275B TW 096136907 A TW096136907 A TW 096136907A TW 96136907 A TW96136907 A TW 96136907A TW I368275 B TWI368275 B TW I368275B
Authority
TW
Taiwan
Prior art keywords
etching process
dry etching
dry
etching
Prior art date
Application number
TW096136907A
Other languages
Chinese (zh)
Other versions
TW200917357A (en
Inventor
Jing Kae Liou
Original Assignee
Nanya Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanya Technology Corp filed Critical Nanya Technology Corp
Priority to TW096136907A priority Critical patent/TWI368275B/en
Publication of TW200917357A publication Critical patent/TW200917357A/en
Application granted granted Critical
Publication of TWI368275B publication Critical patent/TWI368275B/en

Links

TW096136907A 2007-10-02 2007-10-02 Dry etching process TWI368275B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096136907A TWI368275B (en) 2007-10-02 2007-10-02 Dry etching process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096136907A TWI368275B (en) 2007-10-02 2007-10-02 Dry etching process

Publications (2)

Publication Number Publication Date
TW200917357A TW200917357A (en) 2009-04-16
TWI368275B true TWI368275B (en) 2012-07-11

Family

ID=44726373

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096136907A TWI368275B (en) 2007-10-02 2007-10-02 Dry etching process

Country Status (1)

Country Link
TW (1) TWI368275B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6277004B2 (en) * 2014-01-31 2018-02-07 株式会社日立ハイテクノロジーズ Dry etching method

Also Published As

Publication number Publication date
TW200917357A (en) 2009-04-16

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