TWI367941B - Post cmp cleaning composition and the method thereof - Google Patents

Post cmp cleaning composition and the method thereof

Info

Publication number
TWI367941B
TWI367941B TW094101414A TW94101414A TWI367941B TW I367941 B TWI367941 B TW I367941B TW 094101414 A TW094101414 A TW 094101414A TW 94101414 A TW94101414 A TW 94101414A TW I367941 B TWI367941 B TW I367941B
Authority
TW
Taiwan
Prior art keywords
cleaning composition
cmp cleaning
post cmp
post
composition
Prior art date
Application number
TW094101414A
Other languages
Chinese (zh)
Other versions
TW200535238A (en
Inventor
Matthew L Fisher
Ashutosh Misra
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Publication of TW200535238A publication Critical patent/TW200535238A/en
Application granted granted Critical
Publication of TWI367941B publication Critical patent/TWI367941B/en

Links

TW094101414A 2004-02-12 2005-01-18 Post cmp cleaning composition and the method thereof TWI367941B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54427204P 2004-02-12 2004-02-12
US95627304P 2004-10-01 2004-10-01

Publications (2)

Publication Number Publication Date
TW200535238A TW200535238A (en) 2005-11-01
TWI367941B true TWI367941B (en) 2012-07-11

Family

ID=52348803

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094101414A TWI367941B (en) 2004-02-12 2005-01-18 Post cmp cleaning composition and the method thereof

Country Status (1)

Country Link
TW (1) TWI367941B (en)

Also Published As

Publication number Publication date
TW200535238A (en) 2005-11-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees