TWI367909B - Organo-silsesquioxane polymers for forming low-k dielectrics - Google Patents

Organo-silsesquioxane polymers for forming low-k dielectrics

Info

Publication number
TWI367909B
TWI367909B TW093109843A TW93109843A TWI367909B TW I367909 B TWI367909 B TW I367909B TW 093109843 A TW093109843 A TW 093109843A TW 93109843 A TW93109843 A TW 93109843A TW I367909 B TWI367909 B TW I367909B
Authority
TW
Taiwan
Prior art keywords
dielectrics
organo
forming low
silsesquioxane polymers
silsesquioxane
Prior art date
Application number
TW093109843A
Other languages
English (en)
Other versions
TW200521158A (en
Inventor
Jyri Paulasaari
Juha Rantala
Original Assignee
Silecs Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silecs Oy filed Critical Silecs Oy
Priority to US10/552,663 priority Critical patent/US7514709B2/en
Priority to PCT/FI2004/000223 priority patent/WO2004090019A1/en
Priority to JP2006505637A priority patent/JP2006526672A/ja
Publication of TW200521158A publication Critical patent/TW200521158A/zh
Application granted granted Critical
Publication of TWI367909B publication Critical patent/TWI367909B/zh

Links

TW093109843A 2003-04-11 2004-04-09 Organo-silsesquioxane polymers for forming low-k dielectrics TWI367909B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/552,663 US7514709B2 (en) 2003-04-11 2004-04-13 Organo-silsesquioxane polymers for forming low-k dielectrics
PCT/FI2004/000223 WO2004090019A1 (en) 2003-04-11 2004-04-13 Organo-silsesquioxane polymers for forming low-k dielectrics
JP2006505637A JP2006526672A (ja) 2003-04-11 2004-04-13 低ｋ誘電体形成用有機シルセスキオキサン重合体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20031905A FI20031905A0 (fi) 2003-12-23 2003-12-23 Organosilseskvioksaanipolymeerit alhaisen K-arvon omaavien eristeiden valmistamiseksi

Publications (2)

Publication Number Publication Date
TW200521158A TW200521158A (en) 2005-07-01
TWI367909B true TWI367909B (en) 2012-07-11

Family

ID=29763593

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093109843A TWI367909B (en) 2003-04-11 2004-04-09 Organo-silsesquioxane polymers for forming low-k dielectrics

Country Status (2)

Country Link
FI (1) FI20031905A0 (zh)
TW (1) TWI367909B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG176493A1 (en) * 2007-03-12 2011-12-29 Silverbrook Res Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
TWI430462B (zh) 2008-12-12 2014-03-11 Ind Tech Res Inst 封裝材料、矽晶太陽光電模組及薄膜太陽光電模組

Also Published As

Publication number Publication date
TW200521158A (en) 2005-07-01
FI20031905A0 (fi) 2003-12-23

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees