TWI366231B - Plasma processing apparatus - Google Patents

Plasma processing apparatus

Info

Publication number
TWI366231B
TWI366231B TW096126899A TW96126899A TWI366231B TW I366231 B TWI366231 B TW I366231B TW 096126899 A TW096126899 A TW 096126899A TW 96126899 A TW96126899 A TW 96126899A TW I366231 B TWI366231 B TW I366231B
Authority
TW
Taiwan
Prior art keywords
processing apparatus
plasma processing
plasma
processing
Prior art date
Application number
TW096126899A
Other languages
Chinese (zh)
Other versions
TW200905743A (en
Inventor
Hsih Hsing Cheng
Shih Peng Lo
Chen Song Chen
Tzung Hwa Hsieh
hong yu Lai
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW096126899A priority Critical patent/TWI366231B/en
Publication of TW200905743A publication Critical patent/TW200905743A/en
Application granted granted Critical
Publication of TWI366231B publication Critical patent/TWI366231B/en

Links

TW096126899A 2007-07-24 2007-07-24 Plasma processing apparatus TWI366231B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096126899A TWI366231B (en) 2007-07-24 2007-07-24 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096126899A TWI366231B (en) 2007-07-24 2007-07-24 Plasma processing apparatus

Publications (2)

Publication Number Publication Date
TW200905743A TW200905743A (en) 2009-02-01
TWI366231B true TWI366231B (en) 2012-06-11

Family

ID=44722846

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096126899A TWI366231B (en) 2007-07-24 2007-07-24 Plasma processing apparatus

Country Status (1)

Country Link
TW (1) TWI366231B (en)

Also Published As

Publication number Publication date
TW200905743A (en) 2009-02-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees